CN103676134A - Double-cavity etalon - Google Patents
Double-cavity etalon Download PDFInfo
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- CN103676134A CN103676134A CN201210315985.8A CN201210315985A CN103676134A CN 103676134 A CN103676134 A CN 103676134A CN 201210315985 A CN201210315985 A CN 201210315985A CN 103676134 A CN103676134 A CN 103676134A
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Abstract
The invention relates to the field of optics, and discloses a double-cavity etalon. The double-cavity etalon comprises a fixing cavity, a tuning cavity and a micro-control system, wherein the tuning cavity and the fixing cavity have consistent penetrated peaks, and the micro-control system is connected with the tuning cavity and slightly regulates the penetrated peak of the tuning cavity. According to the double-cavity etalon, the combination of the fixed cavity and the tuning cavity is adopted; through the slight tuning of the micro-control system, two single-cavity etalons forming the double-cavity etalon have the strictly consistent penetrated peaks, and the double-cavity etalon has flat top type penetrated peaks with high degree of finish so as to be suitable for wavelength locking in a laser. The structure is simple and convenient in process and is easy to achieve.
Description
Technical field
The present invention relates to optical field, relate in particular to a kind of two-chamber etalon.
Background technology
Etalon is a kind of comb filtering optical element, and its key technical indexes comprises: Free Spectral Range, see through peak, fineness etc.At optics, optical communication field, etalon is commonly employed.
Lock ripple device is a kind of device for laser instrument wavelength locking, and its core parts are exactly etalon.The general principles of this utilization is as follows: under normal circumstances, the peak that sees through of laser output wavelength and etalon overlaps, and laser through etalon, then is held to using from laser instrument output.Now laser from the luminous power of laser instrument output with the ratio of luminous power after etalon in minimal value state.And when drift occurs laser output wavelength, due to the filter action of etalon, the luminous power of laser after etalon reduces, laser increases from the luminous power of laser instrument output and the ratio of luminous power after etalon.This power reduces phenomenon and is detected also feedback signal of processed rear formation.This feedback signal is provided for laser wavelength control system again, revises laser output wavelength a reference signal is provided for it.Sometimes in order to improve feedback signal sensitivity, wavelength corresponding to extreme point that meeting choice criteria tool transmitance changes overlaps with laser output wavelength.So, in etalon utilization in this respect, to the index request of etalon, be mainly to see through these two of peak and finenesses.
In some specific use, require etalon to see through peak and there is certain flat-top, as laser cavity modeling, Inter Leaver etc.For single chamber etalon, fineness index is two indexs that mutually oppose with seeing through peak flat-top index.Fineness index request height, sees through peak flat-top just poor; Otherwise it is good to see through peak flat-top, and fineness index is low.In order to meet high-fineness and to see through good these two indexs of peak flat-top simultaneously, need to adopt two-chamber or multi-cavity etalon.
Take two-chamber etalon as example, two single chamber etalons are linked together and realize two-chamber etalon, in order to realize through peak flat-top, need strictly to control the consistent through peak of these two single chamber etalons, namely to strictly control the thickness of these two single chamber etalons.If the material of two single chamber etalons is the same, the thickness of two single chamber etalons wants consistent.The 50GHz air-gap etalon that is 20 for fineness, two single chamber etalon thickness deviations need to be less than 19nm, see through peak and just have more satisfactory flat-top.This is very difficult for the production program of merely realizing THICKNESS CONTROL by cold working.
Summary of the invention
For the problems referred to above, the present invention proposes a kind of two-chamber etalon for laser instrument lock ripple, has the flat-head type that fineness is high and sees through peak, and simple process, is easy to realize simultaneously.
For achieving the above object, the technical scheme that the present invention proposes is: a kind of two-chamber etalon, comprises a lock chamber, a tuning cavity and miniature regulator control system.Described miniature regulator control system is connected with tuning cavity, fine adjustment tuning cavity see through peak, make tuning cavity and lock chamber there is the consistent peak that sees through, two to see through peak mutually overlapping, crossover region forms new meticulous flat-head type through peak.Wherein, tuning cavity has the consistent peak that sees through with lock chamber, refers to that the peak that sees through of the two has identical fineness.The peak center wavelength that sees through in two single chambeies approaches, and two is mutually overlapping through peak, forms meticulous flat-head type filter effect in crossover region.Formed flat-head type filtering and single etalon chamber to see through the peak cycle consistent, there is the FSR of phase.
Further, described lock chamber is Solid Cavity or air-gap chamber.
Further, described tuning cavity is Solid Cavity or air-gap chamber.
Further, described tuning cavity is thermo-sensitive material, and described miniature regulator control system is temperature control system; Or described tuning cavity is electrooptical material, described miniature regulator control system is electric-control system.
Further, described lock chamber is connected with tuning cavity in-depth optical cement.
Beneficial effect of the present invention is: the two-chamber etalon that adopts lock chamber to be combined with tuning cavity, by the fine tuning of miniature control system, two single chamber etalons that make to form two-chamber etalon have the peak that sees through of strict conformance, make this two-chamber etalon there is the flat-head type that fineness is high and see through peak, to be applicable to locking wavelength in laser instrument, use; This structural manufacturing process is easy, is easy to realize.
Accompanying drawing explanation
Fig. 1 is two-chamber etalon embodiment mono-of the present invention;
Fig. 2 is two-chamber etalon embodiment bis-of the present invention;
Fig. 3 is two-chamber etalon embodiment tri-of the present invention.
Reference numeral: 101, angle of wedge sheet; 102 spacer blocks; 103, plain film; 104, the first filming face; 105, the second coated surface; 106, the 3rd coated surface; 107, miniature regulator control system; 201, the first plain film; 202, the second plain film; 203, the first filming face; 204, the second coated surface; 205, the 3rd coated surface; 206, miniature regulator control system; 301, angle of wedge sheet; 302, spacer block; 303, plain film; 304, the first filming face; 305, the second coated surface; 306, the 3rd coated surface; 307, miniature regulator control system.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
The two-chamber etalon that the present invention adopts lock chamber to be combined with tuning cavity, by the fine tuning of miniature control system, two single chamber etalons that make to form two-chamber etalon have the peak that sees through of strict conformance, make this two-chamber etalon there is the flat-head type that fineness is high and see through peak, solved traditional two-chamber etalon and be difficult to control two single chambeies through the consistent problem in peak.And the passband cycle in single etalon chamber is very thin, for example, the etalon of 50GHz, its passband cycle is 10
-1nm rank.Concrete, two-chamber etalon of the present invention comprises a lock chamber, a tuning cavity and miniature regulator control system, this tuning cavity has the consistent peak that sees through with lock chamber; Miniature regulator control system is connected with tuning cavity, fine adjustment tuning cavity see through peak, make its see through peak and lock chamber through peak strict conformance.Wherein, lock chamber can be Solid Cavity, can be also air-gap chamber; Same, tuning cavity can be also Solid Cavity or air-gap chamber.The preferred thermo-sensitive material of tuning cavity, corresponding miniature regulator control system adopts temperature control system, by the temperature to tuning cavity, controls, make its with lock chamber see through peak maintenance strict conformance.Tuning cavity can also be selected electrooptical material, and corresponding miniature regulator control system adopts electric-control system, by the refractive index to electrooptical material, regulates, make its with lock chamber see through peak maintenance strict conformance.
Concrete, embodiment mono-as shown in Figure 1, lock chamber is an air-gap chamber, tuning cavity is a Solid Cavity.Comprising angle of wedge sheet 101, spacer block 102, plain film 103 and a miniature regulator control system 107; Two logical light faces at the right angle of angle of wedge sheet 101 face and plain film 103 all plate part reflectance coating, be respectively the first filming face 104, the second coated surface 105 and the 3rd coated surface 106, wherein the reflectivity of the first filming face 104 and the 3rd coated surface 106 is 90%, the reflectivity of the second coated surface 105 is 99%, the angle of wedge face plating anti-reflection film of angle of wedge sheet 101.Spacer block 102 is placed between angle of wedge sheet 101 and plain film 103, by in-depth optical cement, connects, and the first filming face 104 and the second coated surface 105 form an air-gap chamber, as lock chamber; Two logical light faces of plain film 103, the second coated surface 105 and the 3rd coated surface 106, form a Solid Cavity, as tuning cavity.Miniature regulator control system 107 is connected with plain film 103 sides, and plain film 103 is regulated.In this embodiment, angle of wedge sheet 101, spacer block 102 and plain film 103 all adopt and melt quartz, miniature regulator control system 107 is temperature control system, by cold working, make respectively and melt quartz wedge gusset plate, melt quartzy spacer block and melt quartzy plain film, to melting quartz wedge gusset plate and melting quartzy plain film, carry out plated film, and three is deepened to optical cement connection, make the Solid Cavity of melting quartzy plain film formation there is the general consistent peak that sees through with air-gap chamber, by temperature control system, to melting the temperature of quartzy plain film, control again, make itself and air-gap chamber there is the peak that sees through of strict conformance.Wherein, angle of wedge sheet 101 and spacer block 102 can also adopt the optical material different from plain film 103, as optical glass such as Zerodur or ULE.
Figure 2 shows that embodiments of the invention two, lock chamber and tuning cavity all adopt Solid Cavity, by two plain films, the first plain film 201 and the second plain film 202 form, the logical light face of two plain films all plates part reflectance coating, two plain films connect by in-depth optical cement, wherein the joint face of two plain films is the second coated surface 204, the logical light face of another one of the first plain film 201 is the first filming face 203, the logical light face of another one of the second plain film 202 is the second coated surface 205, the reflectivity of the first filming face 203 and the 3rd coated surface 205 is that the reflectivity of 90%, the second coated surface 204 is 99%.In this embodiment, the material of the first plain film 201 is silicon, and as tuning cavity, the second plain film 202 is for melting quartz, and as lock chamber, miniature regulator control system 206 is temperature control system.By cold working, make respectively silicon plain film and melt quartzy plain film, to silicon plain film and the logical light face difference plated film that melts quartzy plain film, and the two in-depth optical cement is connected, temperature control system is connected with silicon plain film, make silicon the plain film tuning cavity forming and the lock chamber that melts quartzy plain film formation there is the general consistent peak that sees through, by temperature control system, the temperature of silicon plain film is controlled again, made itself and lock chamber there is the peak that sees through of strict conformance.
Figure 3 shows that embodiments of the invention three, different from embodiment mono-, in this embodiment, lock chamber is a Solid Cavity, and tuning cavity is an air-gap chamber, and miniature regulator control system is connected with air-gap chamber.Concrete, this two-chamber etalon comprises angle of wedge sheet 301, spacer block 302, plain film 303 and a miniature regulator control system 307; Two logical light faces at the right angle of angle of wedge sheet 301 face and plain film 303 all plate part reflectance coating, be respectively the first filming face 304, the second coated surface 305 and the 3rd coated surface 306, wherein the reflectivity of the first filming face 304 and the 3rd coated surface 306 is 90%, the reflectivity of the second coated surface 305 is 99%, the angle of wedge face plating anti-reflection film of angle of wedge sheet 301.Spacer block 302 is placed between angle of wedge sheet 301 and plain film 303, by in-depth optical cement, connects, and the first filming face 304 and the second coated surface 305 form an air-gap chamber, as tuning cavity; Two logical light faces of plain film 303, the second coated surface 305 and the 3rd coated surface 306, form a Solid Cavity, as lock chamber.Miniature regulator control system 307 is connected with spacer block 302 sides, spacer block 302 is regulated, to regulate the chamber in air-gap chamber long.In this embodiment, angle of wedge sheet 301, spacer block 302 and plain film 303 all adopt and melt quartz, miniature regulator control system 307 is temperature control system, by cold working, make respectively and melt quartz wedge gusset plate, melt quartzy spacer block and melt quartzy plain film, to melting quartz wedge gusset plate and melting quartzy plain film, carry out plated film, and three is deepened to optical cement connection, make the Solid Cavity of melting quartzy plain film formation there is the general consistent peak that sees through with air-gap chamber, by temperature control system, to melting the temperature of quartzy spacer block, control again, make air-gap chamber and Solid Cavity there is the peak that sees through of strict conformance.Wherein, angle of wedge sheet 301 and plain film 303 can also adopt the optical material different from spacer block 302, as optical glass such as Zerodur or ULE.
In above-described embodiment one and two, also can change the material of tuning cavity into electrooptical material, corresponding temperature control system changes electric-control system into, by electric-control system, the refractive index of electrooptical material is regulated, make its with lock chamber see through peak maintenance strict conformance.And embodiment tri-, because air refraction is to temperature-insensitive, the long regulation and control in chamber in air-gap chamber are depended in the regulation and control that see through peak completely, so regulator control system can only adopt temperature control system.
Although specifically show and introduced the present invention in conjunction with preferred embodiment; but those skilled in the art should be understood that; within not departing from the spirit and scope of the present invention that appended claims limits; the various variations of in the form and details the present invention being made, are protection scope of the present invention.
Claims (6)
1. a two-chamber etalon, comprises a lock chamber, a tuning cavity and miniature regulator control system, it is characterized in that: described tuning cavity has the consistent peak that sees through with lock chamber; Described miniature regulator control system is connected with tuning cavity, fine adjustment tuning cavity see through peak.
2. a kind of two-chamber etalon as claimed in claim 1, is characterized in that: described lock chamber is Solid Cavity or air-gap chamber.
3. a kind of two-chamber etalon as claimed in claim 1, is characterized in that: described tuning cavity is Solid Cavity or air-gap chamber.
4. a kind of two-chamber etalon as claimed in claim 1, is characterized in that: described tuning cavity is thermo-sensitive material, and described miniature regulator control system is temperature control system.
5. a kind of two-chamber etalon as claimed in claim 1, is characterized in that: described tuning cavity is electrooptical material, and described miniature regulator control system is electric-control system.
6. a kind of two-chamber etalon as claimed in claim 1, is characterized in that: described lock chamber is connected with tuning cavity in-depth optical cement.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210315985.8A CN103676134A (en) | 2012-08-31 | 2012-08-31 | Double-cavity etalon |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210315985.8A CN103676134A (en) | 2012-08-31 | 2012-08-31 | Double-cavity etalon |
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| CN103676134A true CN103676134A (en) | 2014-03-26 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105790057A (en) * | 2014-12-26 | 2016-07-20 | 福州高意通讯有限公司 | Etalon type tunable laser |
| CN111262123A (en) * | 2018-11-30 | 2020-06-09 | 福州高意通讯有限公司 | Flexible grid double-standard wavelength locker |
| CN112241034A (en) * | 2019-07-18 | 2021-01-19 | 福州高意光学有限公司 | Etalon coupled with air layer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005049532A (en) * | 2003-07-31 | 2005-02-24 | Furukawa Electric Co Ltd:The | Variable dispersion compensation device |
| CN102087376A (en) * | 2010-12-28 | 2011-06-08 | 福州高意光学有限公司 | Double-cavity etalon and fabrication method thereof |
| CN102162913A (en) * | 2011-04-14 | 2011-08-24 | 福州高意通讯有限公司 | Tunable filter |
-
2012
- 2012-08-31 CN CN201210315985.8A patent/CN103676134A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005049532A (en) * | 2003-07-31 | 2005-02-24 | Furukawa Electric Co Ltd:The | Variable dispersion compensation device |
| CN102087376A (en) * | 2010-12-28 | 2011-06-08 | 福州高意光学有限公司 | Double-cavity etalon and fabrication method thereof |
| CN102162913A (en) * | 2011-04-14 | 2011-08-24 | 福州高意通讯有限公司 | Tunable filter |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105790057A (en) * | 2014-12-26 | 2016-07-20 | 福州高意通讯有限公司 | Etalon type tunable laser |
| CN105790057B (en) * | 2014-12-26 | 2019-08-13 | 福州高意通讯有限公司 | A kind of etalon type tunable laser |
| CN111262123A (en) * | 2018-11-30 | 2020-06-09 | 福州高意通讯有限公司 | Flexible grid double-standard wavelength locker |
| CN112241034A (en) * | 2019-07-18 | 2021-01-19 | 福州高意光学有限公司 | Etalon coupled with air layer |
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Application publication date: 20140326 |