CN103674250A - High-accuracy middle-infrared-band absolute spectral responsivity calibrating device - Google Patents
High-accuracy middle-infrared-band absolute spectral responsivity calibrating device Download PDFInfo
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- CN103674250A CN103674250A CN201310684304.XA CN201310684304A CN103674250A CN 103674250 A CN103674250 A CN 103674250A CN 201310684304 A CN201310684304 A CN 201310684304A CN 103674250 A CN103674250 A CN 103674250A
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Abstract
The invention provides a high-accuracy middle-infrared-band absolute spectral responsivity calibrating device which comprises a middle-infrared tunable optical parametric oscillator, an acoustic optical modulator, a space filter, a middle-infrared laser power stabilization system, a photoelectric detector vacuum chamber, a low-temperature radiometer system and a vacuum set. After output laser of the middle-infrared tunable optical parametric oscillator passes through the acoustic optical modulator, the output laser enters the space filter to optimize beam quality of the laser and is divided into two beams after passing through a beam splitting piece, one laser beam enters the laser power stabilization system and is used for outputting a voltage signal to control a drive signal on the acoustic optical modulator, and the other laser beam enters the photoelectric detector vacuum chamber and the low-temperature radiometer system and is used for calibrating absolute spectral responsivity of a photoelectric detector. According to the technical scheme, output wavelengths of a laser device can be continuously regulated within the range of 1.3 micrometers-2 micrometers and 2.2 micrometers-4.7 micrometers, a calibrated wavelength point of the absolute spectral responsivity can be increased at will, and measurement accuracy is improved.
Description
Technical field
The invention belongs to infrared band absolute spectral response collimation technique field, in particular a kind of high precision middle-infrared band absolute spectral response calibrating installation.
Background technology
Low temperature absolute radiometer is the measurement standard of optical radiation power calibration aspect full accuracy, it has gathered the advanced technologies such as vacuum, superconduction, the double-deck cold shield of liquid nitrogen liquid helium, optical radiation power measurement is equivalent to electric power measurement, and its measuring accuracy has reached and has been better than 10-5 magnitude.Low temperature radiometer is being brought into play basic key effect in fields such as space remote sensing, climate monitoring, environmental monitoring, optical radiation measurement, communications.
In recent years, take the external metering mechanism that the NIST of the U.S. and the NPL of Britain etc. are representative, carried out and usingd low temperature radiometer as the research of the first grade standard of absolute light radiation, carried out a large amount of basic experiment research and technology integrated simultaneously.Along with a series of high-precision standard is transmitted succeeding in developing of detector (power, brightness, illumination etc.), the high-precision radiation benchmark of low temperature radiometer also progressively transmission of quantity value to user's remote sensors such as ground spectral radiometer, satellite borne sensors.At home, defense-related science, technology and industry photoelectron one-level test satellite location has carried out to using low temperature radiometer in a deep going way as the first grade standard of optical radiation power, photodetector is carried out to the research of absolute spectral response calibration.
At present, use low temperature radiometer as the first grade standard of optical radiation power, the method that photodetector absolute spectral response is calibrated, different at the technology maturity of different-waveband, the calibration accuracy of absolute spectral response is also different.From the calibration situation of user's photodetector, comparatively ripe at visible light wave range collimation technique, calibration precision is better than 1%, at the calibration precision of near-infrared band, is difficult to be better than 5%, lower at the calibration precision of middle-infrared band.
For the photodetector absolute spectral response calibration research of 2.5 μ m～5 μ m middle-infrared bands, both at home and abroad also all in the starting stage.The common method of present stage is to carry out indirect transfer calibration by thermal detector, first with low temperature radiometer, the absolute spectral response of the thermal detectors such as pyroelectricity or film thermopile is calibrated, recycling standard thermal detector centering infrared photoelectric detector transmits calibration.The indirect calibration steps of middle-infrared band is used thermal detector to transmit detector as standard.Relatively and photon detector, not only responsiveness is low for thermal detector, the response time is long, and less stable, can introduce larger uncertainty of measurement.
At present, the research of the absolute spectral response calibration of the domestic and international photodetector for 2.5 μ m～5 μ m middle-infrared bands seldom, the common disadvantage existing in a few scheme comprises: the output wavelength of the lasing light emitter using in the calibration of (1) absolute spectral response is single wavelength, therefore the change of the calibration wavelength of absolute spectral response can only realize by switched laser light source, and calibration wavelength can only be discrete several fixed wave length points.(2) standard detector using in the calibration of middle-infrared band absolute spectral response is the thermal detectors such as pyroelectricity or film thermopile, with respect to photon detector, the responsiveness of thermal detector is relatively low, response time is relatively long, and the performance of hot-probing is subject to shape, the size of device, the impact of production technology is larger, the less stable that causes thermal detector, in the calibration process of absolute spectral response, can introduce uncertainty of measurement, affect the transmission of quantity value precision of low temperature radiometer.
Therefore, there is defect in prior art, needs to improve.
Summary of the invention
Technical matters to be solved by this invention is for the deficiencies in the prior art, and a kind of high precision middle-infrared band absolute spectral response calibrating installation is provided.
Technical scheme of the present invention is as follows:
A kind of high precision middle-infrared band absolute spectral response calibrating installation, wherein, comprise middle tunable IR optical parametric oscillator, acousto-optic modulator, spatial filter, mid-infrared laser power stablizing system, photodetector vacuum storehouse and low-temp radiating meter systems and vacuum unit; The Output of laser of middle tunable IR optical parametric oscillator is after acousto-optic modulator, after entering spatial filter the beam quality of laser being optimized, through beam splitting chip, be divided into two bundles, beam of laser enters laser power stability system, for output voltage signal, controls the driving signal on acousto-optic modulator; Another beam of laser enters photodetector vacuum storehouse and low-temp radiating meter systems, for the absolute spectral response to photodetector, calibrates.
Described calibrating installation, wherein, described laser power stability system, comprises acousto-optic modulator, photodetector, lock-in amplifier and controller; Beam of laser enters in the photodetector in laser power stability system, and output signal, after lock-in amplifier detects amplification, obtains detection signal, input control device; Described controller carries out analytic operation to detection signal, if detection signal is bigger than normal, described controller is controlled the driving signal on acousto-optic modulator by output voltage signal, makes to diminish by the luminous power of acousto-optic modulator; If detection signal is less than normal, described controller is controlled the driving signal on acousto-optic modulator by output voltage signal, makes to become large by the luminous power of acousto-optic modulator.
Described calibrating installation, wherein, described photodetector vacuum storehouse and low-temp radiating meter systems comprise Brewster window, detector vacuum cavity, integrating sphere, InSb detector and low temperature radiometer; Described Brewster window is connected with detector vacuum cavity, and detector vacuum cavity is connected with low temperature radiometer, and it is inner that described integrating sphere and InSb detector are positioned at detector vacuum cavity.
Described calibrating installation, wherein, is provided with slide valve between described detector vacuum cavity and low temperature radiometer, for controlling the break-make of detector vacuum cavity and low temperature radiometer junction, guarantees the high vacuum environment of low temperature radiometer.
Described calibrating installation, wherein, described Brewster window, for eliminating the interference of detector vacuum cavity external stray light, improves the precision of optical radiation calibration.
Described calibrating installation, wherein, described Brewster window is GaF2 optical glass, to realize the high permeability of middle-infrared band laser.
Described calibrating installation, wherein, described integrating sphere and InSb detector are as a whole transmits detector as standard; By high precision electric control translation guide rail, realize translation, control laser simultaneously and enter integrating sphere, or enter low temperature radiometer.
Described calibrating installation, wherein, described low temperature radiometer adopts low temperature, vacuum and superconductor technology, utilizes electricity substituted principle to measure the absolute power of optical radiation; Described low temperature radiometer arranges a high absorption cavity, the laser that enters to inject low temperature radiometer raises the temperature of high absorber cavity, after reaching thermal equilibrium, block incident laser, by electrically heated mode, make the high cavity that absorbs produce same temperature rising, the high electric power value that absorbs cavity of now heating equals the performance number of incident laser.
Adopt such scheme: in 1, using, tunable IR optical parameter oscillating laser is as regulation light source, the output wavelength of laser instrument can be adjustable continuously within the scope of 1.3 μ m～2 μ m and 2.2 μ m～4.7 μ m, can increase arbitrarily the calibration wavelength points of absolute spectral response, increase measuring accuracy.2, use mid-infrared laser power stablizing system to adopt acousto-optic crsytal modulation device, utilize Bragg diffraction principle to realize the object of laser power stability.3, the thermal detector in use InSb photon detector replacement traditional scheme, as Transfer Standards detector, had both improved responsiveness and response time, had improved again uncertainty of measurement.Simultaneously enough even in order to guarantee the laser emission that InSb detector photosurface receives, before InSb detector, use integrating sphere, using the integral body of integrating sphere and InSb detector as in infrared Transfer Standards detector.The Transfer Standards detector of middle-infrared band uses InSb photon detector, has greatly improved the transmission of quantity value precision of low temperature radiometer.
Accompanying drawing explanation
Fig. 1 is the infrared absolute spectral response calibration system of the present invention structural representation.
Fig. 2 is photodetector vacuum storehouse and low temperature radiometer system architecture schematic diagram in the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
As shown in Figure 1, high precision middle-infrared band absolute spectral response calibration system mainly by tunable IR optical parametric oscillator, mid-infrared laser power stablizing system, photodetector vacuum storehouse, low temperature radiometer and vacuum unit form.The Output of laser of middle tunable IR optical parametric oscillator, after acousto-optic modulator, enters spatial filter the beam quality of laser is optimized.Laser is through after beam quality optimization, through beam splitting chip, be divided into two bundles, beam of laser enters laser power stability system, the output signal of photodetector is input control device after lock-in amplifier detects amplification, controller carries out analytic operation to signal, then output voltage signal is controlled the size of the driving signal on acousto-optic modulator, so just forms a feedback control procedure, utilizes the stable control of this process implementation to laser power.Beam of laser enters photodetector vacuum storehouse and low-temp radiating meter systems in addition.
As shown in Figure 2, photodetector vacuum storehouse and low-temp radiating meter systems are mainly comprised of Brewster window 1, detector vacuum cavity 2, integrating sphere 3, InSb detector 4, low temperature radiometer 7.In system, Brewster window 1 is connected with detector vacuum cavity 2, and detector vacuum cavity 2 is connected with low temperature radiometer 7, the middle slide valve 6 that is equipped with.It is inner that integrating sphere 3 and InSb detector 4 are positioned at detector vacuum cavity.
Described Brewster window 1, can eliminate the interference of cavity external stray light, improves the precision of optical radiation calibration.Window is selected GaF2 optical glass, guarantees the high permeability of middle-infrared band laser.
Described integrating sphere 3 and InSb detector 4 are an integral body, use this integral body to transmit detector as standard in system.Integrating sphere 3 and InSb detector 4 are realized translation by high precision electric control translation guide rail 5, control laser and enter integrating sphere 3, or enter low temperature radiometer 7.
Described low temperature radiometer 7 adopts low temperature, vacuum and superconductor technology, utilizes electricity substituted principle to measure the absolute power of optical radiation.Incident light raises the temperature in low temperature radiometer absorbed inside chamber, blocks incident light after reaching thermal equilibrium, with electrical heating, produces same temperature rise, and needed electric power just equals the optical radiation of actual incident.Electricity substituted measurement is the core of low temperature radiometer, and the electricity substituted process of closed loop mechanical refrigeration low temperature radiometer is completed by computer controlled automatic.In the middle of low temperature radiometer 7 and detector vacuum cavity 2, be equipped with slide valve 6, can facilitate the break-make at control linkage place, guarantee the high vacuum environment of low temperature radiometer 2.
On the basis of above-described embodiment, further, as Figure 1-Figure 2, a kind of high precision middle-infrared band absolute spectral response calibrating installation, it is characterized in that, comprise middle tunable IR optical parametric oscillator, acousto-optic modulator, spatial filter, mid-infrared laser power stablizing system, photodetector vacuum storehouse and low-temp radiating meter systems and vacuum unit; The Output of laser of middle tunable IR optical parametric oscillator is after acousto-optic modulator, after entering spatial filter the beam quality of laser being optimized, through beam splitting chip, be divided into two bundles, beam of laser enters laser power stability system, for output voltage signal, controls the driving signal on acousto-optic modulator; Another beam of laser enters photodetector vacuum storehouse and low-temp radiating meter systems, for the absolute spectral response to photodetector, calibrates.
Described laser power stability system, comprises acousto-optic modulator, photodetector, lock-in amplifier and controller; Beam of laser enters in the photodetector in laser power stability system, and output signal, after lock-in amplifier detects amplification, obtains detection signal, input control device; Described controller carries out analytic operation to detection signal, if detection signal is bigger than normal, described controller is controlled the driving signal on acousto-optic modulator by output voltage signal, makes to diminish by the luminous power of acousto-optic modulator; If detection signal is less than normal, described controller is controlled the driving signal on acousto-optic modulator by output voltage signal, makes to become large by the luminous power of acousto-optic modulator.By such FEEDBACK CONTROL, reach the object of stabilized lasers power.
Described photodetector vacuum storehouse and low-temp radiating meter systems comprise Brewster window, detector vacuum cavity, integrating sphere, InSb detector and low temperature radiometer; Described Brewster window is connected with detector vacuum cavity, and detector vacuum cavity is connected with low temperature radiometer, and it is inner that described integrating sphere and InSb detector are positioned at detector vacuum cavity.
Between described detector vacuum cavity and low temperature radiometer, be provided with slide valve, for controlling the break-make of detector vacuum cavity and low temperature radiometer junction, guarantee the high vacuum environment of low temperature radiometer 2
Described Brewster window, for eliminating the interference of detector vacuum cavity external stray light, improves the precision of optical radiation calibration.
As described in Brewster window be GaF2 optical glass, to realize the high permeability of middle-infrared band laser.
Described integrating sphere and InSb detector 4 are as a whole transmits detector as standard; By high precision electric control translation guide rail, realize translation, control laser simultaneously and enter integrating sphere, or enter low temperature radiometer.
Described low temperature radiometer adopts low temperature, vacuum and superconductor technology, utilizes electricity substituted principle to measure the absolute power of optical radiation; Described low temperature radiometer arranges a high absorption cavity, the laser that enters to inject low temperature radiometer raises the temperature of high absorber cavity, after reaching thermal equilibrium, block incident laser, by electrically heated mode, make the high cavity that absorbs produce same temperature rising, the high electric power value that absorbs cavity of now heating equals the performance number of incident laser.Because current technology has very high precision to the measurement of electric current and voltage, therefore can carry out by above-mentioned electricity substituted principle the absolute power of precise measuring radiation.
Adopt such scheme: in 1, using, tunable IR optical parameter oscillating laser is as regulation light source, the output wavelength of laser instrument can be adjustable continuously within the scope of 1.3 μ m～2 μ m and 2.2 μ m～4.7 μ m, can increase arbitrarily the calibration wavelength points of absolute spectral response, increase measuring accuracy.2, use mid-infrared laser power stablizing system to adopt acousto-optic crsytal modulation device, utilize Bragg diffraction principle to realize the object of laser power stability.3, the thermal detector in use InSb photon detector replacement traditional scheme, as Transfer Standards detector, had both improved responsiveness and response time, had improved again uncertainty of measurement.Simultaneously enough even in order to guarantee the laser emission that InSb detector photosurface receives, before InSb detector, use integrating sphere, using the integral body of integrating sphere and InSb detector as in infrared Transfer Standards detector.The Transfer Standards detector of middle-infrared band uses InSb photon detector, has greatly improved the transmission of quantity value precision of low temperature radiometer.
Should be understood that, for those of ordinary skills, can be improved according to the above description or convert, and all these improvement and conversion all should belong to the protection domain of claims of the present invention.
Claims (8)
1. a high precision middle-infrared band absolute spectral response calibrating installation, it is characterized in that, comprise middle tunable IR optical parametric oscillator, acousto-optic modulator, spatial filter, mid-infrared laser power stablizing system, photodetector vacuum storehouse and low-temp radiating meter systems and vacuum unit; The Output of laser of middle tunable IR optical parametric oscillator is after acousto-optic modulator, after entering spatial filter the beam quality of laser being optimized, through beam splitting chip, be divided into two bundles, beam of laser enters laser power stability system, for output voltage signal, controls the driving signal on acousto-optic modulator; Another beam of laser enters photodetector vacuum storehouse and low-temp radiating meter systems, for the absolute spectral response to photodetector, calibrates.
2. calibrating installation as claimed in claim 1, is characterized in that, described laser power stability system, comprises acousto-optic modulator, photodetector, lock-in amplifier and controller; Beam of laser enters in the photodetector in laser power stability system, and output signal, after lock-in amplifier detects amplification, obtains detection signal, input control device; Described controller carries out analytic operation to detection signal, if detection signal is bigger than normal, described controller is controlled the driving signal on acousto-optic modulator by output voltage signal, makes to diminish by the luminous power of acousto-optic modulator; If detection signal is less than normal, described controller is controlled the driving signal on acousto-optic modulator by output voltage signal, makes to become large by the luminous power of acousto-optic modulator.
3. calibrating installation as claimed in claim 1, is characterized in that, described photodetector vacuum storehouse and low-temp radiating meter systems comprise Brewster window, detector vacuum cavity, integrating sphere, InSb detector and low temperature radiometer; Described Brewster window is connected with detector vacuum cavity, and detector vacuum cavity is connected with low temperature radiometer, and it is inner that described integrating sphere and InSb detector are positioned at detector vacuum cavity.
4. calibrating installation as claimed in claim 3, is characterized in that, between described detector vacuum cavity and low temperature radiometer, is provided with slide valve, for controlling the break-make of detector vacuum cavity and low temperature radiometer junction.
5. calibrating installation as claimed in claim 4, is characterized in that, described Brewster window, for eliminating the interference of detector vacuum cavity external stray light, improves the precision of optical radiation calibration.
6. calibrating installation as claimed in claim 5, is characterized in that, described Brewster window is GaF2 optical glass, to realize the high permeability of middle-infrared band laser.
7. calibrating installation as claimed in claim 6, is characterized in that, described integrating sphere and InSb detector are as a whole transmits detector as standard; By high precision electric control translation guide rail, realize translation, control laser simultaneously and enter integrating sphere, or enter low temperature radiometer.
8. calibrating installation as claimed in claim 7, is characterized in that, described low temperature radiometer adopts low temperature, vacuum and superconductor technology, utilizes electricity substituted principle to measure the absolute power of optical radiation; Described low temperature radiometer arranges a high absorption cavity, the laser that enters to inject low temperature radiometer raises the temperature of high absorber cavity, after reaching thermal equilibrium, block incident laser, by electrically heated mode, make the high cavity that absorbs produce same temperature rising, the high electric power value that absorbs cavity of now heating equals the performance number of incident laser.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106768351A (en) * | 2016-11-23 | 2017-05-31 | 苏州苏纳光电有限公司 | Infrared Detectors single mode changeable responsiveness test system and method |
| CN108180999A (en) * | 2017-12-28 | 2018-06-19 | 中国科学院合肥物质科学研究院 | Infrared detector absolute response degree robot scaling equipment and method based on laser scanning |
| CN109990822A (en) * | 2019-04-29 | 2019-07-09 | 中国电子科技集团公司第四十一研究所 | A kind of the frequency response caliberating device and method of photoelectric detection module |
| RU2739724C1 (en) * | 2020-10-13 | 2020-12-28 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева" | Method of reducing power losses of an input stream of polarized laser radiation in an absolute cryogenic radiometer with an entrance window of a brewster |
| CN112242942A (en) * | 2020-08-10 | 2021-01-19 | 上海交通大学 | Information transmission method of double-layer topological architecture of multi-channel radiometer imaging system |
| CN113063732A (en) * | 2021-03-24 | 2021-07-02 | 北京卫星环境工程研究所 | Solar absorption ratio in-situ detection device and method in vacuum low-temperature environment |
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| CN203274912U (en) * | 2013-05-30 | 2013-11-06 | 中国电子科技集团公司第四十一研究所 | An optical radiation calibrating device |
| CN103441425A (en) * | 2013-08-23 | 2013-12-11 | 西安电子科技大学 | Medium wave infrared laser power stabilization system |
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| CN203274912U (en) * | 2013-05-30 | 2013-11-06 | 中国电子科技集团公司第四十一研究所 | An optical radiation calibrating device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106768351A (en) * | 2016-11-23 | 2017-05-31 | 苏州苏纳光电有限公司 | Infrared Detectors single mode changeable responsiveness test system and method |
| CN106768351B (en) * | 2016-11-23 | 2019-04-23 | 苏州苏纳光电有限公司 | Infrared detector single mode changeable responsiveness test macro and method |
| CN108180999A (en) * | 2017-12-28 | 2018-06-19 | 中国科学院合肥物质科学研究院 | Infrared detector absolute response degree robot scaling equipment and method based on laser scanning |
| CN108180999B (en) * | 2017-12-28 | 2020-04-14 | 中国科学院合肥物质科学研究院 | Infrared detector absolute responsivity calibration device and method based on laser scanning |
| CN109990822A (en) * | 2019-04-29 | 2019-07-09 | 中国电子科技集团公司第四十一研究所 | A kind of the frequency response caliberating device and method of photoelectric detection module |
| CN112242942A (en) * | 2020-08-10 | 2021-01-19 | 上海交通大学 | Information transmission method of double-layer topological architecture of multi-channel radiometer imaging system |
| RU2739724C1 (en) * | 2020-10-13 | 2020-12-28 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева" | Method of reducing power losses of an input stream of polarized laser radiation in an absolute cryogenic radiometer with an entrance window of a brewster |
| CN113063732A (en) * | 2021-03-24 | 2021-07-02 | 北京卫星环境工程研究所 | Solar absorption ratio in-situ detection device and method in vacuum low-temperature environment |
| CN113063732B (en) * | 2021-03-24 | 2023-01-31 | 北京卫星环境工程研究所 | Solar absorption ratio in-situ detection device and method in vacuum low-temperature environment |
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Application publication date: 20140326 |