CN103671012A

CN103671012A - Oppositely-arranged moving coil linear compressor adopting long-coil radial magnetization and manufacturing method

Info

Publication number: CN103671012A
Application number: CN201310590554.7A
Authority: CN
Inventors: 党海政
Original assignee: Shanghai Institute of Technical Physics of CAS
Current assignee: Shanghai Institute of Technical Physics of CAS
Priority date: 2013-11-21
Filing date: 2013-11-21
Publication date: 2014-03-26
Anticipated expiration: 2033-11-21
Also published as: CN103671012B

Abstract

The invention discloses an oppositely-arranged moving coil linear compressor adopting long-coil radial magnetization and a manufacturing method. The oppositely-arranged moving coil linear compressor is of an oppositely-arranged whole structure so as to offset mechanical vibrations of the left portion and the right portion. Except a common base, the left portion and the right portion each consist of an air cylinder bushing, a permanent magnet, an upper yoke iron, a lower yoke iron, a current-carrying coil, a coil framework, a piston, an upper plate spring group, a lower plate spring group, an upper pressing piece structure, a lower pressing piece structure, an upper supporting structure, a lower supporting structure, a displacement sensor iron core, a displacement sensor coil, a displacement sensor support and a casing. The permanent magnet is radially magnetized, and the current-carrying coil is a long coil. The upper yoke irons, the pistons and the current-carrying coils of the left portion and the right portion meet the requirement that the axial height of the respective current-carrying coil is larger than the sum of the axial thickness of the bottom of the respective lower yoke iron and a maximum stroke of the respective piston. The oppositely-arranged moving coil linear compressor adopting the long-coil radial magnetization is compact in structure, low in vibration, high in motor efficiency, long in life expectancy and has important significance on development of high-reliability, long-service-life and high-efficiency linear compressors.

Description

Adopt opposed type moving-coil linear compressor and the manufacture method of long loop axial charging

Technical field

The present invention relates to linear compressor, particularly a kind of opposed type moving-coil linear compressor and manufacture method thereof that adopts long loop axial charging.

Background technique

Linear compressor is a kind of of reciprocating-piston compressor.Traditional reciprocating-piston compressor belongs to rotary compressor mostly, adopts that electric rotating machine drives, the mechanical transmission by connecting rod etc. realizes to-and-fro motion.The technology of rotary compressor is comparatively ripe, but its energy transmission link is many, vibration and noise large, complete machine control complicated, energy conversion efficiency is on the low side, the lateral force particularly because of structural feature, piston being applied, be one of main source producing idle work and mechanical wear, thereby greatly limited its operating life.Linear compressor utilizes linear electric motor driven plunger to do reciprocating linear motion in cylinder, eliminated in theory the radial effect power to piston completely, thereby eliminated mechanical wear and the consequent idle work between piston and cylinder wall, operating life and energy conversion efficiency all improve greatly, so have very important application at special dimensions such as needing the Aeronautics and Astronautics of long lifetime and efficiency operation, military affairs.

The core component of linear compressor is linear electric motor.Linear electric motor are mainly divided three classes according to moving element wherein: moving-iron type, moving coil and moving-magnetic type.Moving-iron type linear motor is not used permanent magnet, thereby price is cheaper, but performance is relatively unstable, controls more difficultly, and its application reduces gradually; Moving coil and moving-magnetic type linear motor all comprise three class core components: permanent magnet, yoke and current-carrying coil are that moving coil and moving-magnetic type are divided in current-carrying coil or permanent magnet motion during according to motion.Wherein, moving coil linear compressor has been realized the elimination completely of radial force because of its structural feature, and on current-carrying coil, do not produce axial force and moment of torsion in when open circuit, thereby there is high efficiency, low noise and highly reliable outstanding advantages, thereby become the first-selected power source of the interior space regenerating type low-temperature refrigerator (as pulse tube refrigerating machine and sterlin refrigerator) of international coverage over nearly 30 years.The western developed country that the U.S. is representative of take is example, and in the space flight pulse tube refrigerating machine and sterlin refrigerator launching between nearly 20 years, the overwhelming majority has adopted moving coil linear compressor.

At present, be applied in the world space industry and need to guarantee that long lifetime, moving coil linear compressor highly reliable, efficiency operation mainly adopt Oxford type and opposed type structural type.So-called Oxford type, it is gained the name and comes from two key technologies of Regius professor---and clearance seal and leaf spring support, and these two technology are oil-free lubrication and key guarantee that can long lifetime running; So-called opposed type structural type, refers to the mechanical vibration that adopt two completely reciprocity motions and supporting structure to cancel out each other and self produce in agent structure, and this technology is to realize the reliable guarantee of the low vibration of linear compressor.

As previously mentioned, dynamic coil linear motor comprises three class core components: permanent magnet, yoke and current-carrying coil.During work, current-carrying coil is in permanent magnet and the common air gap forming of yoke, and magnetic field force induced effect, becomes reciprocal straight line motion.According to the magnetizing direction of the length of current-carrying coil and permanent magnet, dynamic coil linear motor can be divided into four kinds, Fig. 1 has provided the schematic diagram of these four kinds of forms, and wherein (1) is long loop axial charging form, (2) be short coil axial charging form, (3) be long loop radial magnetizing form, (4) are short coil radial magnetizing form, and wherein 63 is permanent magnet, 64 is upper yoke, 65 is lower yoke, and 66 is current-carrying coil, through hole centered by 67.

The kind of the linear electric motor that moving coil linear compressor adopts according to it, also be correspondingly divided into four kinds of forms, that is: adopted the moving coil linear compressor of the moving coil linear compressor of long loop axial charging, the moving coil linear compressor that adopts short coil axial charging, the moving coil linear compressor that adopts long loop radial magnetizing, employing short coil radial magnetizing.No matter moving coil linear compressor adopts any in above-mentioned four kinds of forms, if guarantee its energy stable operation, all must follow following basic principle: (1) or be in whole piston stroke, guarantee all the time steady magnetic field be in current-carrying coil within (corresponding to long loop form); (2) or be in whole piston stroke, guarantee all the time current-carrying coil (corresponding to short coil form) within stable magnetic field.The moving coil linear compressor of these four kinds of forms development at home is at present all at the early-stage.

Summary of the invention

The present invention proposes a kind of opposed type moving-coil linear compressor and manufacture method thereof that adopts long loop axial charging.

The opposed type moving-coil linear compressor of the employing long loop axial charging of inventing is by sharing support 0, left part cylinder liner 1, left part permanent magnet 2, on left part, yoke 3, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, on left part, plate spring groups 8, under left part, plate spring groups 9, on left part, tabletting structure 10, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 and right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 on right part ', right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 on right part ', plate spring groups 9 under right part ', tabletting structure 10 on right part ', right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' jointly form, it is characterized in that, the mechanical vibration that overall structure adopts opposed type to produce to offset left and right two-part, take vertical center line 40 as symmetry axis, and all parts of left part and structural configuration and right part corresponding part and structural configuration be enantiotropy each other, horizontal axis 50 indications are shown axial direction, share support 0 by left part cylinder 41, right part cylinder 41 ' and shared air outlet hole 42 form, left part cylinder liner 1 interference fit is embedded in the inside of left part cylinder 41, right part cylinder liner 1 ' interference fit be embedded in right part cylinder 41 ' inside, left part permanent magnet 2 is cylinder-like structure, and central position is processed with the left part magnet inner via hole 43 that diameter is d vertically, on left part, yoke 3 is cylinder-like structure, and its external diameter equates with the external diameter of left part permanent magnet 2, and central position is processed with yoke inner via hole 44 on the left part that diameter is d vertically, left part lower yoke 4 is U-shaped structure, and the internal diameter of U-shaped body is greater than the external diameter of left part permanent magnet 2, in the central position of U-shaped body bottom, is processed with vertically the left part lower yoke inner via hole 45 that diameter is d, left part permanent magnet 2 magnetizes vertically to saturated, on left part, yoke 3 wraps up left part permanent magnet 2 wherein completely with left part lower yoke 4 afterwards, on left part, yoke left side 18 flushes with left part lower yoke left side 19, on left part, yoke right side 20 is close together with left part permanent magnet left side 21, and left part permanent magnet right side 22 is close together with left part lower yoke left side 23, yoke 3, the common left part ring-type air gap 46 that forms of left part lower yoke 4 on left part permanent magnet 2, left part, left part current-carrying coil 5 inserts in left part ring-type air gap 46 with one heart, right part permanent magnet 2 ', yoke 3 on right part ', right part lower yoke 4 ' jointly form right part ring-type air gap 46 ', right part current-carrying coil 5 ' insert with one heart right part ring-type air gap 46 ' in, left part current-carrying coil 5 and right part current-carrying coil 5 ' axial height be h, range when left part piston 7 and right part piston 7 ' work is s, yoke 3 on yoke 3 and right part on left part ' axial thickness be δ, and meet relation: h > s+ δ, to guarantee in whole piston stroke, within guaranteeing that all the time steady magnetic field is in current-carrying coil, upper left supports right end face 24 is supported on left part lower yoke left side 19, and the two is by screw fastening, and ring plain 25 is processed in the left side of left part upper support structure 12, lower-left supports right end face 47 is supported in and shares on support left surface 48, and the two welds together, lower-left carries left leading flank 26 is supported on left part lower yoke right side 27, and the two is by screw fastening, and lower ring plain 28 is processed in the side, lower-left of left part lower support structure 13, on left part, plate spring groups 8 is formed by stacking by some single piece plate spring thin slices, in outer rim, form upper left group outer rim 29, at inner edge, form upper left group inner edge 30, in center portion, being processed with vertically diameter is the upper left group spring body center hole 31 of d, wherein upper left group outer rim 29 is positioned on the upper ring plain 25 of left part upper support structure 12, and passes through screw fastening, under left part, plate spring groups 9 is formed by stacking by some single piece plate spring thin slices, in outer rim, form lower-left group outer rim 32, at inner edge, form lower-left group inner edge 33, in center portion, being processed with vertically diameter is the lower-left group spring body center hole 34 of d, wherein lower-left group outer rim 32 is positioned on the lower ring plain 28 of left part lower support structure 13, and passes through screw fastening, left part piston 7 is comprised of left part piston head 35, left part piston middle transition platform 36 and left part piston rod 37, at the end of left part piston rod 37, be processed with the left bar thread section 49 of long 1～3mm, the external diameter of left part piston head 35, than little 10～30 μ m of internal diameter of left part cylinder 41, guarantees that the diameter of left part piston rod 37 is less than d simultaneously, left part piston rod 37 runs through yoke inner via hole 44 on lower-left group spring body center hole 34, left part lower yoke inner via hole 45, left part magnet inner via hole 43, left part, upper left group spring body center hole 31 successively, on left part, tabletting structure 10 tightens together upper left group inner edge 30 and left part coil rack 6 with left part piston rod 37, left part lower sheeting structure 11 tightens together lower-left group inner edge 33 with left part piston middle transition platform 36, thereby guarantees on left part current-carrying coil 5, left part coil rack 6 and left part piston 7, left part under plate spring groups 8, left part that plate spring groups 9 is connected to the integral body that can simultaneously move, left part displacement transducer iron core 14 inside are processed with the left iron core thread section 51 matching with left bar thread section 49, and left bar thread section 49 screws in left iron core thread section 51 also fastening, outside left part displacement transducer iron core 14, arrange with left part displacement transducer and support the 16 left part displacement transducer coils 15 that tighten together, left part displacement transducer supports 16 and then be supported on left part upper support structure 12 and also tighten together with it, left part casing 17 is welded and fixed by support exterior edge face, 61Yu lower-left, left part casing exterior edge face 52, thereby form left part airtight cavity, by left part cylinder liner 1, left part permanent magnet 2, on left part, yoke 3, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, on left part, plate spring groups 8, under left part, plate spring groups 9, on left part, tabletting structure 10, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 all covers in wherein, the all parts of right part and structural configuration are that left part corresponding part and structural configuration are about the enantiotropy of vertical center line 40, right part casing 17 ' by right part casing exterior edge face 61 ' with support exterior edge face, bottom right 52 ' be welded and fixed, form right part airtight cavity, by right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 on right part ', right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 on right part ', plate spring groups 9 under right part ', tabletting structure 10 on right part ', right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' all cover in wherein, thereby form a kind of opposed type moving-coil linear compressor that adopts long loop axial charging.

Below in conjunction with accompanying drawing, the manufacture method of the opposed type moving-coil linear compressor of invented employing long loop axial charging is described as follows:

Fig. 2 is the section plan of the opposed type moving-coil linear compressor of invented employing long loop axial charging; Take vertical center line 40 as symmetry axis each other all parts of left part of enantiotropy and part that right part corresponding part need adopt same batch of production so that the difference between individuality minimize;

Fig. 3 is for sharing the three-dimensional cutaway view of support 0; Sharing support 0 adopts the titanium alloy material that mechanical strength is high, thermal expansion coefficient is little to make, adopt five-axis machine tool process simultaneously left part cylinder 41 and right part cylinder 41 ', assurance left part cylinder 41 and right part cylinder 41 ' about vertical center line 40 symmetries, and guarantee left part cylinder 41 and right part cylinder 41 ' coaxality be better than 1.0 μ m, guarantee that the endoporus circularity of above-mentioned two cylinders is all better than 0.5 μ m simultaneously; After left part cylinder 41 and right part cylinder 41 ' completion of processing, use same five-axis machine tool to process and share air outlet hole 42, guarantee to share air outlet hole 42 and left part cylinder 41 and right part cylinder 41 ' perpendicularity be all better than 2.0 μ m;

Fig. 4 is the three-dimensional cutaway view (for the left and right parts of enantiotropy each other, generally only provide the detailed maps of left part, and manufacturer's rule is together narrated left part and right part parts in accompanying drawing, lower with) of left part cylinder liner 1; left part cylinder liner 1 and right part cylinder liner 1 ' all adopt hardness is greater than 58 die steel material and uses the method for the silk thread cutting of being careful to be processed into cylindric, guarantee left part cylinder liner 1 and right part cylinder liner 1 ' external diameter respectively than left part cylinder 41 and right part cylinder 41 ' the large 0.5～1.0mm of internal diameter, then adopt interference fit and the mode of expanding with heat and contract with cold be inlaid into respectively left part cylinder 41 and right part cylinder 41 ' in, concrete method for embedding is as follows: it is homogeneous heating 4～6 hours in the heated at constant temperature case of 160 ℃ that shared support 0 integral body is as shown in Figure 3 positioned over to inside temperature, before shared support 0 takes out heated at constant temperature case 5～10 minutes, by left part cylinder liner 1 and right part cylinder liner 1 ' be positioned in liquid nitrogen and soak simultaneously, when shared support 0 takes out from heated at constant temperature case, by left part cylinder liner 1 and right part cylinder liner 1 ' take out from liquid nitrogen, then use mechanical external force by left part cylinder liner 1 and right part cylinder liner 1 ' push respectively left part cylinder 41 and right part cylinder 41 ' inside, thereby guarantee left part cylinder liner 1 and right part cylinder liner 1 ' outer wall respectively with left part cylinder 41 and right part cylinder 41 ' inwall combine closely, then use jig grinding machine to left part cylinder liner 1 and right part cylinder liner 1 ' endoporus carry out fine gtinding, guarantee that its endoporus circularity is all better than 0.5 μ m,

Fig. 5 is the section plan of left part piston 7; Left part piston 7 and right part piston 7 ' all adopt the titanium alloy material that mechanical strength is high, thermal expansion coefficient is little to make, first adopt numerical control machine tool to process blank, then adopt jig grinding machine to carry out fine gtinding, guarantee left part piston head 35 and right part piston head 35 ' circularity be all better than 0.5 μ m, and guarantee the beating lower than 3.0 μ m of left part piston rod 37 and right part piston rod 37 ' vertically, and left part piston rod 37 is better than 1.0 μ m with the perpendicularity of left part piston head 35, right part piston rod 37 ' with right part piston head 35 ' perpendicularity be better than 1.0 μ m; Left part piston rod 37 and right part piston rod 37 ' end use precise numerical control machine process respectively left bar thread section 49 and right bar thread section 49 '; Range when left part piston 7 and right part piston 7 ' work is all designed to s, by limit structure, guarantees that stroke accuracy is better than 2.0 μ m;

Fig. 6 is the combination schematic diagram of tabletting structure 10 on plate spring groups 8 and left part on left part, and Fig. 7 is the combination schematic diagram of plate spring groups 9 and left part lower sheeting structure 11 under left part; Tabletting structure 10 on tabletting structure 10, left part lower sheeting structure 11 and right part on left part ', right part lower sheeting structure 11 ' higher by mechanical strength, metallic material that remanent magnetism is lower adopt numerical control machine tool processing and fabricating to form, machining accuracy is all better than 9.0 μ m; Plate spring groups 8 on plate spring groups 9 and right part under plate spring groups 8, left part on left part ', plate spring groups 9 under right part ' form by some plate sheet leaf springs stacks, the thickness of monolithic thin slice leaf spring and quantity determine by specifically applying needed elastic stiffness, material is beryllium bronze or stainless steel, adopt the method for photoetching accurately to process inner molded line, inner molded line can be spirality, also can be straight-arm shape, that molded line requires is level and smooth, without burr, without knuckle, and surpass 10 by leaf spring vibration tester ⁸inspection of fatigue more than individual circulation;

The schematic diagram that inner molded line is spiral monolithic thin slice leaf spring as shown in Figure 8, on thin slice, with photolithography, etch spirality molded line 38, thereby self-assembling formation spirality leaf spring arm 39, outside reserves single piece plate spring outer rim 53, and with photolithography, evenly etch somely for the fixing screw hole 54 of screw thereon, in inner side, reserve single piece plate spring inner edge 55;

The schematic diagram of the monolithic thin slice leaf spring that inner molded line is straight-arm shape as shown in Figure 9, on thin slice, with photolithography, etch straight-arm template spring arm 56 and movement arm 57, outside reserves single piece plate spring outer rim 58, and with photolithography, evenly etch somely for the fixing screw hole 59 of screw thereon, in inner side, reserve single piece plate spring inner edge 60;

Figure 10 and Figure 11 are respectively the section plan of left part upper support structure 12 and left part lower support structure 13; Left part upper support structure 12 and the metallic material that left part lower support structure 13 is higher by mechanical strength, remanent magnetism is lower adopt numerical control machine tool processing and fabricating to form, and machining accuracy is all better than 5.0 μ m; The left side of left part upper support structure 12 is used precise numerical control machine to be processed into ring plain 25; Upper left supports right end face 24 is supported on left part lower yoke left side 19, and the two passes through screw fastening; Lower-left supports right end face 47 is supported in and shares on support left surface 48, the two welds together by electron beam welding technology, lower-left carries left leading flank 26 is supported on left part lower yoke right side 27, the two passes through screw fastening, the side, lower-left of left part lower support structure 13 is used precise numerical control machine to process lower ring plain 28, and the side, upper left of left part lower support structure 13 is used precise numerical control machine to process support exterior edge face, lower-left 52;

Figure 12 be right part lower support structure 13 ' section plan; Right part lower support structure 13 ' higher by mechanical strength, metallic material that remanent magnetism is lower adopt numerical control machine tool processing and fabricating to form, and machining accuracy is better than 5.0 μ m, its side, upper right use precise numerical control machine process support exterior edge face, lower-left 52 ';

Figure 13 is the section plan of left part displacement transducer iron core 14; Left part displacement transducer iron core 14 and right part displacement transducer iron core 14 ' by pure iron material, make, inner be processed with respectively with the left iron core thread section 51 of left bar thread section 49 and right bar thread section 49 ' match and right iron core thread section 51 ', left bar thread section 49 and right bar thread section 49 ' screw in respectively left iron core thread section 51 and right iron core thread section 51 ' interior and fastening;

Left part coil rack 6, right part coil rack 6 ', left part displacement transducer supports 16, left part displacement transducer supports 16 ' metallic material higher by mechanical strength, that remanent magnetism is lower and adopts numerical control machine tool processing and fabricating to form, machining accuracy is all better than 9.0 μ m; Left part displacement transducer coil 15 and right part displacement transducer coil 15 ' by enamel covered wire coiling on corresponding skeleton, form;

Figure 14 is the section plan of left part permanent magnet 2; Left part permanent magnet 2 and right part permanent magnet 2 ' all adopt the rare earth permanent-magnetic material that magnetic energy product is higher to make, use the mode machine shaping of laser beam machining, left part permanent magnet 2 and right part permanent magnet 2 ' all use pulsed magnetizer to magnetize vertically to saturated;

Figure 15 is the section plan of yoke 3 on left part; Yoke 3 on yoke 3 and right part on left part ' all the adopt pure iron material that permeability is higher, is used precise numerical control machine to process, yoke 3 on yoke 3 and right part on left part ' axial thickness be δ, machining accuracy is all better than 2.0 μ m;

Figure 16 is the section plan of left part lower yoke 4; Left part lower yoke 4 and right part lower yoke 4 ' all adopt the pure iron material that permeability is higher, use precise numerical control machine to process;

Figure 17 is the schematic diagram of left part current-carrying coil 5; Left part current-carrying coil 5 and right part current-carrying coil 5 ' all adopt enamel covered wire coiling in solid support to form, the motor force that the diameter of enamel covered wire and thickness are provided by needs determines; Left part current-carrying coil 5 and right part current-carrying coil 5 ' axial height be h, during making, by machine tool accuracy and technique for coiling, guarantee that the precision of h is better than 2.0 μ m;

Figure 18 is the combined planar sectional view of yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5; On left part, yoke 3 wraps up left part permanent magnet 2 wherein completely with left part lower yoke 4, jointly forms left part ring-type air gap 46, and left part current-carrying coil 5 inserts in left part ring-type air gap 46 with one heart; Yoke 3 on right part ' with right part lower yoke 4 ' by the parcel of right part permanent magnet 2 ' completely wherein, jointly form right part ring-type air gap 46 ', right part current-carrying coil 5 ' insert with one heart right part ring-type air gap 46 ' in; Yoke 3 on yoke 3, left part current-carrying coil 5, left part piston 7 and right part on left part ' with right part current-carrying coil 5 ', right part piston 7 ' all need to guarantee to meet when making: h > s+ δ, to guarantee in whole piston stroke, within guaranteeing that all the time steady magnetic field is in current-carrying coil;

Figure 19 and Figure 20 be respectively left part casing 17 and right part casing 17 ' section plan; Left part casing 17 and right part casing 17 ' high by mechanical strength, compact structure, the metallic material that remanent magnetism is lower are used precise numerical control machine processing and fabricating to be shaped; Support exterior edge face, 61Yu lower-left, left part casing exterior edge face 52 is used electron beam technology to weld together, and forms left side airtight cavity; Right part casing exterior edge face 61 ' weld together with support exterior edge face, bottom right 52 ' use electron beam technology, form right part airtight cavity, above-mentioned two complete airtight cavities of welding are all filled with to high-purity helium check, and compressive strength all need be higher than 5.0MPa, and helium leak-down rate all need be lower than 3.0 * 10 ^-8pam ³/ s.

The invention has the advantages that: stable, the reliable and continuous operation of having realized moving-coil linear compressor in the mode of long loop and axial charging, there is compact structure, vibrate outstanding advantages low, that electric efficiency is high, expected life is long, significant to the development of highly reliable, long lifetime, high efficiency linear compressor.

Accompanying drawing explanation

Fig. 1 is the schematic diagram of four kinds of forms of dynamic coil linear motor, and wherein (1) is long loop axial charging form, and (2) are short coil axial charging form, and (3) are long loop radial magnetizing form, and (4) are short coil radial magnetizing form.Wherein 63 is permanent magnet, and 64 is upper yoke, and 65 is lower yoke, and 66 is current-carrying coil, through hole centered by 67;

Fig. 2 is the section plan of the opposed type moving-coil linear compressor of invented employing long loop axial charging, wherein: 0 for sharing support, 1 is left part cylinder liner, 2 is left part permanent magnet, 3 is yoke on left part, 4 is left part lower yoke, 5 is left part current-carrying coil, 6 is left part coil rack, 7 is left part piston, 8 is plate spring groups on left part, 9 is plate spring groups under left part, 10 is tabletting structure on left part, 11 is left part lower sheeting structure, 12 is left part upper support structure, 13 is left part lower support structure, 14 is left part displacement transducer iron core, 15 is left part displacement transducer coil, 16 is the support of left part displacement transducer, 17 is left part casing, 1 ' be right part cylinder liner, 2 ' be right part permanent magnet, 3 ' be yoke on right part, 4 ' be right part lower yoke, 5 ' be right part current-carrying coil, 6 ' be right part coil rack, 7 ' be right part piston, 8 ' be plate spring groups on right part, 9 ' be plate spring groups under right part, 10 ' be tabletting structure on right part, 11 ' be right part lower sheeting structure, 12 ' be right part upper support structure, 13 ' be right part lower support structure, 14 ' be right part displacement transducer iron core, 15 ' be right part displacement transducer coil, 16 ' be the support of right part displacement transducer, 17 ' be right part casing,

Fig. 3 is for sharing the three-dimensional cutaway view of support 0, and wherein 41 is left part cylinder, 41 ' be right part cylinder, 42 for sharing air outlet hole, and 48 for sharing support left surface;

Fig. 4 is the three-dimensional cutaway view of left part cylinder liner 1;

Fig. 5 is the section plan of left part piston 7, and wherein 35 is left part piston head, and 36 is left part piston middle transition platform, and 37 is left part piston rod, and 49 is left bar thread section;

Fig. 6 is the combination schematic diagram of tabletting structure 10 on plate spring groups 8 and left part on left part, and wherein 29 is upper left group outer rim, and 30 is upper left group inner edge, upper left group spring body center hole 31;

Fig. 7 is the combination schematic diagram of plate spring groups 9 and left part lower sheeting structure 11 under left part, and wherein 32 is lower-left group outer rim, and 33 is lower-left group inner edge, and 34 is lower-left group spring body center hole;

Fig. 8 is that inner molded line is the schematic diagram of spiral monolithic thin slice leaf spring, and wherein 38 is spirality molded line, and 39 is spirality leaf spring arm, and 53 is single piece plate spring outer rim, and 54 is screw hole, and 55 is single piece plate spring inner edge;

Fig. 9 is that inner molded line is the schematic diagram of the monolithic thin slice leaf spring of straight-arm shape, and wherein 56 is straight-arm template spring arm, and 57 is movement arm, and 58 is single piece plate spring outer rim, and 59 is screw hole, and 60 is single piece plate spring inner edge;

Figure 10 is the section plan of left part upper support structure 12, and wherein 24 is upper left supports right end face, and 25 is upper ring plain;

Figure 11 is the section plan of left part lower support structure 13, and wherein 26 is lower-left carries left leading flank, and 28 is lower ring plain, and 47 is lower-left supports right end face, and 52 is support exterior edge face, lower-left;

Figure 12 be right part lower support structure 13 ' section plan, wherein 52 ' be support exterior edge face, bottom right;

Figure 13 is the section plan of left part displacement transducer iron core 14, and wherein 51 is left iron core thread section;

Figure 14 is the section plan of left part permanent magnet 2, and wherein 21 is left part permanent magnet left side; 22 is left part permanent magnet right side; 43 is left part magnet inner via hole;

Figure 15 is the section plan of yoke 3 on left part, and wherein 18 is yoke left side on left part; 20 is yoke right side on left part; 44 is yoke inner via hole on left part;

Figure 16 is the section plan of left part lower yoke 4, and wherein 19 is left part lower yoke left side; 23 is left part lower yoke left side, and 27 is left part lower yoke right side; 45 is left part lower yoke inner via hole;

Figure 17 is the schematic diagram of left part current-carrying coil 5;

Figure 18 is the combined planar sectional view of yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5, and wherein 46 is left part ring-type air gap;

Figure 19 is the section plan of left part casing 17, and wherein 61 is left part casing exterior edge face, and 62 is left part engine housing;

Figure 20 be right part casing 17 ' section plan, wherein 61 ' be right part casing exterior edge face, 62 ' be right part engine housing.

Embodiment

Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail:

The opposed type moving-coil linear compressor of the employing long loop axial charging of inventing is by sharing support 0, left part cylinder liner 1, left part permanent magnet 2, on left part, yoke 3, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, on left part, plate spring groups 8, under left part, plate spring groups 9, on left part, tabletting structure 10, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 and right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 on right part ', right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 on right part ', plate spring groups 9 under right part ', tabletting structure 10 on right part ', right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' jointly form, it is characterized in that, the mechanical vibration that overall structure adopts opposed type to produce to offset left and right two-part, take vertical center line 40 as symmetry axis, and all parts of left part and structural configuration and right part corresponding part and structural configuration be enantiotropy each other, horizontal axis 50 indications are shown axial direction, share support 0 by left part cylinder 41, right part cylinder 41 ' and shared air outlet hole 42 form, left part cylinder liner 1 interference fit is embedded in the inside of left part cylinder 41, right part cylinder liner 1 ' interference fit be embedded in right part cylinder 41 ' inside, left part permanent magnet 2 is cylinder-like structure, and central position is processed with the left part magnet inner via hole 43 that diameter is d vertically, on left part, yoke 3 is cylinder-like structure, and its external diameter equates with the external diameter of left part permanent magnet 2, and central position is processed with yoke inner via hole 44 on the left part that diameter is d vertically, left part lower yoke 4 is U-shaped structure, and the internal diameter of U-shaped body is greater than the external diameter of left part permanent magnet 2, in the central position of U-shaped body bottom, is processed with vertically the left part lower yoke inner via hole 45 that diameter is d, left part permanent magnet 2 magnetizes vertically to saturated, on left part, yoke 3 wraps up left part permanent magnet 2 wherein completely with left part lower yoke 4 afterwards, on left part, yoke left side 18 flushes with left part lower yoke left side 19, on left part, yoke right side 20 is close together with left part permanent magnet left side 21, and left part permanent magnet right side 22 is close together with left part lower yoke left side 23, yoke 3, the common left part ring-type air gap 46 that forms of left part lower yoke 4 on left part permanent magnet 2, left part, left part current-carrying coil 5 inserts in left part ring-type air gap 46 with one heart, right part permanent magnet 2 ', yoke 3 on right part ', right part lower yoke 4 ' jointly form right part ring-type air gap 46 ', right part current-carrying coil 5 ' insert with one heart right part ring-type air gap 46 ' in, left part current-carrying coil 5 and right part current-carrying coil 5 ' axial height be h, range when left part piston 7 and right part piston 7 ' work is s, yoke 3 on yoke 3 and right part on left part ' axial thickness be δ, and meet relation: h > s+ δ, to guarantee in whole piston stroke, within guaranteeing that all the time steady magnetic field is in current-carrying coil, upper left supports right end face 24 is supported on left part lower yoke left side 19, and the two is by screw fastening, and ring plain 25 is processed in the left side of left part upper support structure 12, lower-left supports right end face 47 is supported in and shares on support left surface 48, and the two welds together, lower-left carries left leading flank 26 is supported on left part lower yoke right side 27, and the two is by screw fastening, and lower ring plain 28 is processed in the side, lower-left of left part lower support structure 13, on left part, plate spring groups 8 is formed by stacking by some single piece plate spring thin slices, in outer rim, form upper left group outer rim 29, at inner edge, form upper left group inner edge 30, in center portion, being processed with vertically diameter is the upper left group spring body center hole 31 of d, wherein upper left group outer rim 29 is positioned on the upper ring plain 25 of left part upper support structure 12, and passes through screw fastening, under left part, plate spring groups 9 is formed by stacking by some single piece plate spring thin slices, in outer rim, form lower-left group outer rim 32, at inner edge, form lower-left group inner edge 33, in center portion, being processed with vertically diameter is the lower-left group spring body center hole 34 of d, wherein lower-left group outer rim 32 is positioned on the lower ring plain 28 of left part lower support structure 13, and passes through screw fastening, left part piston 7 is comprised of left part piston head 35, left part piston middle transition platform 36 and left part piston rod 37, at the end of left part piston rod 37, be processed with the left bar thread section 49 of long 2mm, the external diameter of left part piston head 35, than the little 20 μ m of internal diameter of left part cylinder 41, guarantees that the diameter of left part piston rod 37 is less than d simultaneously, left part piston rod 37 runs through yoke inner via hole 44 on lower-left group spring body center hole 34, left part lower yoke inner via hole 45, left part magnet inner via hole 43, left part, upper left group spring body center hole 31 successively, on left part, tabletting structure 10 tightens together upper left group inner edge 30 and left part coil rack 6 with left part piston rod 37, left part lower sheeting structure 11 tightens together lower-left group inner edge 33 with left part piston middle transition platform 36, thereby guarantees on left part current-carrying coil 5, left part coil rack 6 and left part piston 7, left part under plate spring groups 8, left part that plate spring groups 9 is connected to the integral body that can simultaneously move, left part displacement transducer iron core 14 inside are processed with the left iron core thread section 51 matching with left bar thread section 49, and left bar thread section 49 screws in left iron core thread section 51 also fastening, outside left part displacement transducer iron core 14, arrange with left part displacement transducer and support the 16 left part displacement transducer coils 15 that tighten together, left part displacement transducer supports 16 and then be supported on left part upper support structure 12 and also tighten together with it, left part casing 17 is welded and fixed by support exterior edge face, 61Yu lower-left, left part casing exterior edge face 52, thereby form left part airtight cavity, by left part cylinder liner 1, left part permanent magnet 2, on left part, yoke 3, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, on left part, plate spring groups 8, under left part, plate spring groups 9, on left part, tabletting structure 10, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 all covers in wherein, the all parts of right part and structural configuration are that left part corresponding part and structural configuration are about the enantiotropy of vertical center line 40, right part casing 17 ' by right part casing exterior edge face 61 ' with support exterior edge face, bottom right 52 ' be welded and fixed, form right part airtight cavity, by right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 on right part ', right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 on right part ', plate spring groups 9 under right part ', tabletting structure 10 on right part ', right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer support 16 ', right part casing 17 ' all cover in wherein, thereby form a kind of opposed type moving-coil linear compressor that adopts long loop axial charging.

The manufacture method of the opposed type moving-coil linear compressor of the employing long loop axial charging of inventing can be implemented as follows:

Fig. 4 is the three-dimensional cutaway view (for the left and right parts of enantiotropy each other, generally only provide the detailed maps of left part, and manufacturer's rule is together narrated left part and right part parts in accompanying drawing, lower with) of left part cylinder liner 1; left part cylinder liner 1 and right part cylinder liner 1 ' all adopt hardness is greater than 58 die steel material and uses the method for the silk thread cutting of being careful to be processed into cylindric, guarantee left part cylinder liner 1 and right part cylinder liner 1 ' external diameter respectively than left part cylinder 41 and right part cylinder 41 ' the large 0.8mm of internal diameter, then adopt interference fit and the mode of expanding with heat and contract with cold be inlaid into respectively left part cylinder 41 and right part cylinder 41 ' in, concrete method for embedding is as follows: it is homogeneous heating 5 hours in the heated at constant temperature case of 160 ℃ that shared support 0 integral body is as shown in Figure 3 positioned over to inside temperature, at shared support 0, take out heated at constant temperature case first 7 minutes, by left part cylinder liner 1 and right part cylinder liner 1 ' be positioned in liquid nitrogen and soak simultaneously, when shared support 0 takes out from heated at constant temperature case, by left part cylinder liner 1 and right part cylinder liner 1 ' take out from liquid nitrogen, then use mechanical external force by left part cylinder liner 1 and right part cylinder liner 1 ' push respectively left part cylinder 41 and right part cylinder 41 ' inside, thereby guarantee left part cylinder liner 1 and right part cylinder liner 1 ' outer wall respectively with left part cylinder 41 and right part cylinder 41 ' inwall combine closely, then use jig grinding machine to left part cylinder liner 1 and right part cylinder liner 1 ' endoporus carry out fine gtinding, guarantee that its endoporus circularity is all better than 0.5 μ m,

Claims

1. adopt an opposed type moving-coil linear compressor for long loop axial charging, by shared support (0), left part cylinder liner (1), left part permanent magnet (2), yoke on left part (3), left part lower yoke (4), left part current-carrying coil (5), left part coil rack (6), left part piston (7), plate spring groups on left part (8), plate spring groups under left part (9), tabletting structure on left part (10), left part lower sheeting structure (11), left part upper support structure (12), left part lower support structure (13), left part displacement transducer iron core (14), left part displacement transducer coil (15), left part displacement transducer supports (16), left part casing (17) and right part cylinder liner (1 '), right part permanent magnet (2 '), yoke on right part (3 '), right part lower yoke (4 '), right part current-carrying coil (5 '), right part coil rack (6 '), right part piston (7 '), plate spring groups on right part (8 '), plate spring groups under right part (9 '), tabletting structure on right part (10 '), right part lower sheeting structure (11 '), right part upper support structure (12 '), right part lower support structure (13 '), right part displacement transducer iron core (14 '), right part displacement transducer coil (15 '), right part displacement transducer supports (16 ') and right part casing (17 ') forms, it is characterized in that, the mechanical vibration that overall structure adopts opposed type to produce to offset left and right two-part, the vertical center line (40) of take is symmetry axis, and all parts of left part and structural configuration and right part corresponding part and structural configuration be enantiotropy each other, horizontal axis (50) indication is shown axial direction, sharing support (0) is comprised of left part cylinder (41), right part cylinder (41 ') and shared air outlet hole (42), left part cylinder liner (1) interference fit is embedded in the inside of left part cylinder (41), and right part cylinder liner (1 ') interference fit is embedded in the inside of right part cylinder (41 '), left part permanent magnet (2) is cylinder-like structure, and central position is processed with the left part magnet inner via hole (43) that diameter is d vertically, yoke on left part (3) is cylinder-like structure, and its external diameter equates with the external diameter of left part permanent magnet (2), and central position is processed with yoke inner via hole (44) on the left part that diameter is d vertically, left part lower yoke (4) is U-shaped structure, and the internal diameter of U-shaped body is greater than the external diameter of left part permanent magnet (2), in the central position of U-shaped body bottom, is processed with vertically the left part lower yoke inner via hole (45) that diameter is d, left part permanent magnet (2) magnetizes vertically to saturated, on left part, yoke (3) wraps up left part permanent magnet (2) wherein completely with left part lower yoke (4) afterwards, on left part, yoke left side (18) flush with left part lower yoke left side (19), on left part, yoke right side (20) are close together with left part permanent magnet left side (21), and left part permanent magnet right side (22) is close together with left part lower yoke left side (23), on left part permanent magnet (2), left part, yoke (3), left part lower yoke (4) form left part ring-type air gap (46) jointly, left part current-carrying coil (5) inserts in left part ring-type air gap (46) with one heart, on right part permanent magnet (2 '), right part, yoke (3 '), right part lower yoke (4 ') form right part ring-type air gap (46 ') jointly, and right part current-carrying coil (5 ') inserts in right part ring-type air gap (46 ') with one heart, left part current-carrying coil (5) is h with the axial height of right part current-carrying coil (5 '), range when left part piston (7) is worked with right part piston (7 ') is s, on yoke on left part (3) and right part, the axial thickness of yoke (3 ') is δ, and meets relation: h > s+ δ, to guarantee in whole piston stroke, within guaranteeing that all the time steady magnetic field is in current-carrying coil, upper left supports right end face (24) is supported on left part lower yoke left side (19), and the two is by screw fastening, and ring plain (25) is processed in the left side of left part upper support structure (12), lower-left supports right end face (47) is supported in and shares on support left surface (48), and the two welds together, lower-left carries left leading flank (26) is supported on left part lower yoke right side (27), and the two is by screw fastening, and lower ring plain (28) is processed in the side, lower-left of left part lower support structure (13), plate spring groups on left part (8) is formed by stacking by some single piece plate spring thin slices, in outer rim, form upper left group outer rim (29), at inner edge, form upper left group inner edge (30), in center portion, being processed with vertically diameter is the upper left group spring body center hole (31) of d, wherein upper left group outer rim (29) is positioned on the upper ring plain (25) of left part upper support structure (12), and passes through screw fastening, under left part, plate spring groups 9 is formed by stacking by some single piece plate spring thin slices, in outer rim, form lower-left group outer rim (32), at inner edge, form lower-left group inner edge (33), in center portion, being processed with vertically diameter is the lower-left group spring body center hole (34) of d, wherein lower-left group outer rim (32) is positioned on the lower ring plain (28) of left part lower support structure (13), and passes through screw fastening, left part piston (7) is comprised of left part piston head (35), left part piston middle transition platform (36) and left part piston rod (37), at the end of left part piston rod (37), be processed with the left bar thread section (49) of long 1～3mm, the external diameter of left part piston head (35), than little 10～30 μ m of internal diameter of left part cylinder (41), guarantees that the diameter of left part piston rod (37) is less than d simultaneously, left part piston rod (37) runs through yoke inner via hole (44), upper left group spring body center hole (31) on lower-left group spring body center hole (34), left part lower yoke inner via hole (45), left part magnet inner via hole (43), left part successively, tabletting structure on left part (10) tightens together upper left group inner edge (30) and left part coil rack (6) with left part piston rod (37), left part lower sheeting structure (11) tightens together lower-left group inner edge (33) with left part piston middle transition platform (36), thereby guarantees on left part current-carrying coil (5), left part coil rack (6) and left part piston (7), left part under plate spring groups (8), left part that plate spring groups (9) is connected to the integral body that can simultaneously move, left part displacement transducer iron core (14) inside is processed with the left iron core thread section (51) matching with left bar thread section (49), and left bar thread section (49) screws in left iron core thread section (51) also fastening, outside left part displacement transducer iron core (14), arrange with left part displacement transducer and support the left part displacement transducer coil (15) that (16) tighten together, left part displacement transducer supports (16) and then is supported on left part upper support structure (12) and tightens together with it, left part casing (17) is welded and fixed by left part casing exterior edge face (61) and support exterior edge face, lower-left (52), thereby form left part airtight cavity, by left part cylinder liner (1), left part permanent magnet (2), yoke on left part (3), left part lower yoke (4), left part current-carrying coil (5), left part coil rack (6), left part piston (7), plate spring groups on left part (8), plate spring groups under left part (9), tabletting structure on left part (10), left part lower sheeting structure (11), left part upper support structure (12), left part lower support structure (13), left part displacement transducer iron core (14), left part displacement transducer coil (15), left part displacement transducer supports (16), left part casing (17) all covers in wherein, the all parts of right part and structural configuration are that left part corresponding part and structural configuration are about the enantiotropy of vertical center line (40), right part casing (17 ') is welded and fixed by right part casing exterior edge face (61 ') and support exterior edge face, bottom right (52 '), form right part airtight cavity, by right part cylinder liner (1 '), right part permanent magnet (2 '), yoke on right part (3 '), right part lower yoke (4 '), right part current-carrying coil (5 '), right part coil rack (6 '), right part piston (7 '), plate spring groups on right part (8 '), plate spring groups under right part (9 '), tabletting structure on right part (10 '), right part lower sheeting structure (11 '), right part upper support structure (12 '), right part lower support structure (13 '), right part displacement transducer iron core (14 '), right part displacement transducer coil (15 '), right part displacement transducer supports (16 '), right part casing (17 ') all covers in wherein, thereby forms a kind of opposed type moving-coil linear compressor that adopts long loop axial charging.

2. one kind of manufacture method that adopts as claimed in claim 1 the opposed type moving-coil linear compressor of long loop axial charging, it is characterized in that, take vertical center line (40) as symmetry axis each other enantiotropy all parts of left part and right part corresponding component need adopt same batch of production part so that the difference between individuality minimize; Sharing support (0) adopts the titanium alloy material that mechanical strength is high, thermal coefficient of expansion is little to make, adopt five-axis machine tool to process left part cylinder (41) and right part cylinder (41 ') simultaneously, guarantee that left part cylinder (41) and right part cylinder (41 ') are about vertical center line (40) symmetry, and the axiality that guarantees left part cylinder (41) and right part cylinder (41 ') is better than 1.0 μ m, guarantee that the endoporus circularity of above-mentioned two cylinders is all better than 0.5 μ m simultaneously; After left part cylinder (41) and right part cylinder (41 ') completion of processing, use same five-axis machine tool to process shared venthole (42), guarantee to share venthole (42) and be all better than 2.0 μ m with the perpendicularity of left part cylinder (41) and right part cylinder (41 '); left part cylinder liner (1) and right part cylinder liner (1 ') all adopt hardness to be greater than 58 die steel material to use the method for the silk thread cutting of being careful to be processed into cylindric, guarantee that the external diameter of left part cylinder liner (1) and right part cylinder liner (1 ') is respectively than the large 0.5～1.0mm of internal diameter of left part cylinder (41) and right part cylinder (41 '), then the mode that adopts interference fit and expand with heat and contract with cold is inlaid into respectively in left part cylinder (41) and right part cylinder (41 '), concrete method for embedding is: sharing support (0) entirety, to be positioned over internal temperature be homogeneous heating 4～6 hours in 160 ℃ heated at constant temperature case, on shared support (0), take out heated at constant temperature case front 5～10 minutes, by left part cylinder liner (1) and right part cylinder liner (1 '), be positioned in liquid nitrogen and soak simultaneously, when shared support (0) takes out from heated at constant temperature case, by left part cylinder liner (1) and right part cylinder liner (1 '), from liquid nitrogen, take out, then use mechanical external force to push respectively left part cylinder (41) and right part cylinder (41 ') inside by left part cylinder liner (1) and right part cylinder liner (1 '), thereby the outer wall that guarantees left part cylinder liner (1) and right part cylinder liner (1 ') is combined closely with the inwall of left part cylinder (41) and right part cylinder (41 ') respectively, then use jig grinder to carry out fine gtinding to the endoporus of left part cylinder liner (1) and right part cylinder liner (1 '), guarantee that its endoporus circularity is all better than 0.5 μ m, left part piston (7) and right part piston (7 ') all adopt the titanium alloy material that mechanical strength is high, thermal coefficient of expansion is little to make, first adopt Digit Control Machine Tool to process blank, then adopt jig grinder to carry out fine gtinding, the circularity that guarantees left part piston head (35) and right part piston head (35 ') is all better than 0.5 μ m, and guarantee vertically beat lower than 3.0 μ m of left part piston rod (37) and right part piston rod (37 '), and left part piston rod (37) is better than 1.0 μ m with the perpendicularity of left part piston head (35)Right part piston rod (37 ') is better than 1.0 μ m with the perpendicularity of right part piston head (35 '); In left part piston rod (37) and right part piston rod (37 ') end uses precise numerical control machine to process respectively left bar thread segment (49) and right bar thread segment (49 '); In the time of left part piston (7) and right part piston (7 ') work range is all designed to s, by position limiting structure, guarantees that stroke accuracy is better than 2.0 μ m; Tabletting structure (10 ') on tabletting structure on left part (10), left part lower sheeting structure (11) and right part, the metal material that right part lower sheeting structure (11 ') is higher by mechanical strength, remanent magnetism is lower adopt Digit Control Machine Tool processing and fabricating to form, and machining accuracy is all better than 9.0 μ m; Under plate spring groups on left part (8), left part, on plate spring groups (9) and right part, under plate spring groups (8 '), right part, plate spring groups (9 ') forms by some plate sheet flat spring stacks, the thickness of monolithic thin slice flat spring and quantity determine by specifically applying needed elastic stiffness, material is beryllium-bronze or stainless steel, adopt the method for photoetching accurately to process inner molded line, inner molded line can be spirality, also can be straight-arm shape, that molded line requires is level and smooth, without burr, without knuckle, and exceed 10 by leaf spring vibration rig ⁸More than individual circulation inspection of fatigue; The preparation method that inner molded line is spiral monolithic thin slice flat spring for to etch spirality molded line (38) with photoetching process on thin slice, thereby self-assembling formation spirality leaf spring arm (39), outside reserves single piece plate spring outer rim (53), and with photoetching process, evenly etch somely for the fixing screw hole of screw (54) thereon, inner side, reserve single piece plate spring inner edge (55); The preparation method that inner molded line is the monolithic thin slice flat spring of straight-arm shape is: on thin slice, with photoetching process, etch straight-arm template spring arm (56) and movement arm (57), outside reserves single piece plate spring outer rim (58), and with photoetching process, evenly etch somely for the fixing screw hole of screw (59) thereon, inner side, reserve single piece plate spring inner edge (60); Left part upper support structure (12) and the metal material that left part lower support structure (13) is higher by mechanical strength, remanent magnetism is lower adopt Digit Control Machine Tool processing and fabricating to form, and machining accuracy is all better than 5.0 μ m; The left side of left part upper support structure (12) uses precise numerical control machine to be processed into ring plain (25); Upper left supports right end face (24) is supported on left part lower yoke left side (19), and the two passes through screw fastening; Lower-left supports right end face (47) is supported in and shares on support left surface (48), the two welds together by electron beam welding technology, lower-left carries left leading flank (26) is supported on left part lower yoke right side (27), the two passes through screw fastening, the side, lower-left of left part lower support structure (13) uses precise numerical control machine to process lower ring plain (28), and the side, upper left of left part lower support structure (13) uses precise numerical control machine to process support outer face, lower-left (52); Right part lower support structure (13 ') is higher by mechanical strength,The metal material that remanent magnetism is lower adopts Digit Control Machine Tool processing and fabricating to form, and machining accuracy is better than 5.0 μ m, and its side, upper right uses precise numerical control machine to process support outer face, bottom right (52 '); Left part displacement transducer iron core (14) and right part displacement transducer iron core (14 ') are made by pure iron material, inside is processed with respectively match with left bar thread segment (49) and right bar thread segment (49 ') left iron core thread segment (51) and right iron core thread segment (51 '), and left bar thread segment (49) and right bar thread segment (49 ') screw in respectively in left iron core thread segment (51) and right iron core thread segment (51 ') also fastening; Left part coil rack (6), right part coil rack (6 '), left part displacement transducer support (16), left part displacement transducer supports (16 '), and higher by mechanical strength, remanent magnetism is lower metal material adopts Digit Control Machine Tool processing and fabricating to form, and machining accuracy is all better than 9.0 μ m; Left part displacement transducer coil (15) and right part displacement transducer coil (15 ') form by enamel covered wire coiling on corresponding skeleton; Left part permanent magnet (2) and right part permanent magnet (2 ') all adopt the rare earth permanent-magnetic material that magnetic energy product is higher to make, use the mode machine-shaping of Laser Processing, left part permanent magnet (2) and right part permanent magnet (2 ') all use pulsed magnetizer to magnetize vertically to saturated; On yoke on left part (3) and right part, yoke (3 ') all adopts the pure iron material that permeability is higher, uses precise numerical control machine to process, and on yoke on left part (3) and right part, the axial width of yoke (3 ') is δ, and machining accuracy is all better than 2.0 μ m; Left part lower yoke (4) and right part lower yoke (4 ') all adopt the pure iron material that permeability is higher, use Digit Control Machine Tool to process; Left part current-carrying coil (5) and right part current-carrying coil (5 ') all adopt enamel covered wire coiling on solid support to form, and the motor force that the diameter of enamel covered wire and thickness provide by needs determines; Left part current-carrying coil (5) is h with the axial height of right part current-carrying coil (5 '), in the time of making, by machine tool accuracy and technique for coiling, guarantees that h precision is better than 2.0 μ m; Yoke on left part (3) wraps up wherein by left part permanent magnet (2) completely with left part lower yoke (4), jointly forms left part ring-type air gap (46), and left part current-carrying coil (5) inserts in left part ring-type air gap (46) with one heart; Yoke on right part (3 ') wraps up wherein by right part permanent magnet (2 ') completely with right part lower yoke (4 '), jointly forms right part ring-type air gap (46 '), and right part current-carrying coil (5 ') inserts in right part ring-type air gap (46 ') with one heart; On yoke on left part (3), left part current-carrying coil (5), left part piston (7) and right part, yoke (3 ') and right part current-carrying coil (5 '), right part piston (7 ') all need to guarantee to meet separately the axial height of current-carrying coil and are greater than and go up separately the axial width of yoke and the range sum of piston separately in the time making, that is: h > s+ δ, with guaranteeing in whole piston stroke, within guaranteeing that all the time stabilizing magnetic field is in current-carrying coil; Left part casing (17) and right part casing (17 ') are high by mechanical strength, compact structure,The metal material that remanent magnetism is lower uses precise numerical control machine processing and fabricating to be shaped; Left part casing outer face (61) uses electron beam technology to weld together with support outer face, lower-left (52), form left side airtight cavity, right part casing outer face (61 ') uses electron beam technology to weld together with support outer face, bottom right (52 '), form right part airtight cavity, to above-mentioned two complete airtight cavities of welding, be all filled with high-purity helium check, compressive resistance all need be higher than 5.0MPa, and helium slip all need be lower than 3.0 * 10 ^-8Pam ³/ s.