CN103657563A - 静电式化学合成器 - Google Patents
静电式化学合成器 Download PDFInfo
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- CN103657563A CN103657563A CN201310643250.2A CN201310643250A CN103657563A CN 103657563 A CN103657563 A CN 103657563A CN 201310643250 A CN201310643250 A CN 201310643250A CN 103657563 A CN103657563 A CN 103657563A
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CN201310643250.2A CN103657563B (zh) | 2013-12-05 | 2013-12-05 | 静电式化学合成器 |
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CN201310643250.2A CN103657563B (zh) | 2013-12-05 | 2013-12-05 | 静电式化学合成器 |
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CN103657563A true CN103657563A (zh) | 2014-03-26 |
CN103657563B CN103657563B (zh) | 2015-02-04 |
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CN201310643250.2A Expired - Fee Related CN103657563B (zh) | 2013-12-05 | 2013-12-05 | 静电式化学合成器 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1137029A (en) * | 1966-04-14 | 1968-12-18 | Diamond Alkali Co | Improvements in or relating to chemical reactions involving gaseous materials |
JPH02213481A (ja) * | 1989-02-15 | 1990-08-24 | Fujitsu Ltd | 薄膜形成装置 |
JP3804574B2 (ja) * | 2002-05-01 | 2006-08-02 | 株式会社島津製作所 | 高周波誘導結合プラズマ生成装置およびプラズマ処理装置 |
CN101254452A (zh) * | 2007-03-02 | 2008-09-03 | 周开根 | 电催化合成反应器 |
CN101730716A (zh) * | 2007-03-15 | 2010-06-09 | Rev可再生能源投资公司 | 等离子体辅助合成 |
KR20130008854A (ko) * | 2011-07-13 | 2013-01-23 | 삼성테크윈 주식회사 | 그래핀 합성 챔버 및 이를 이용한 그래핀 합성 방법 |
CN203591794U (zh) * | 2013-12-05 | 2014-05-14 | 衢州昀睿工业设计有限公司 | 静电式化学合成器 |
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2013
- 2013-12-05 CN CN201310643250.2A patent/CN103657563B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1137029A (en) * | 1966-04-14 | 1968-12-18 | Diamond Alkali Co | Improvements in or relating to chemical reactions involving gaseous materials |
JPH02213481A (ja) * | 1989-02-15 | 1990-08-24 | Fujitsu Ltd | 薄膜形成装置 |
JP3804574B2 (ja) * | 2002-05-01 | 2006-08-02 | 株式会社島津製作所 | 高周波誘導結合プラズマ生成装置およびプラズマ処理装置 |
CN101254452A (zh) * | 2007-03-02 | 2008-09-03 | 周开根 | 电催化合成反应器 |
CN101730716A (zh) * | 2007-03-15 | 2010-06-09 | Rev可再生能源投资公司 | 等离子体辅助合成 |
KR20130008854A (ko) * | 2011-07-13 | 2013-01-23 | 삼성테크윈 주식회사 | 그래핀 합성 챔버 및 이를 이용한 그래핀 합성 방법 |
CN203591794U (zh) * | 2013-12-05 | 2014-05-14 | 衢州昀睿工业设计有限公司 | 静电式化学合成器 |
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CN103657563B (zh) | 2015-02-04 |
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Address after: Room 103, No. 108, Mingzhu Avenue, yonganzhou Town, Gaogang District, Taizhou City, Jiangsu Province Patentee after: QUZHOU YUNRUI INDUSTRIAL DESIGN Co.,Ltd. Address before: Zhejiang province Quzhou City Kecheng District 324000 Kaixuan Road No. 6 (WITHUB industrial design Industrial Park Building 2, room B-302) Patentee before: QUZHOU YUNRUI INDUSTRIAL DESIGN Co.,Ltd. |
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Effective date of registration: 20200930 Address after: 236400, Anhui province Fuyang Linquan County Economic Development Zone Three Phase workshop nineteenth, first floor Patentee after: Linquan Longhang Electronics Co.,Ltd. Address before: Room 103, No. 108, Mingzhu Avenue, yonganzhou Town, Gaogang District, Taizhou City, Jiangsu Province Patentee before: QUZHOU YUNRUI INDUSTRIAL DESIGN Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150204 Termination date: 20211205 |