CN103648715B - Hydrostatic gas-lubricated bearing main shaft - Google Patents
Hydrostatic gas-lubricated bearing main shaft Download PDFInfo
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- CN103648715B CN103648715B CN201280032185.3A CN201280032185A CN103648715B CN 103648715 B CN103648715 B CN 103648715B CN 201280032185 A CN201280032185 A CN 201280032185A CN 103648715 B CN103648715 B CN 103648715B
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- fixed station
- main shaft
- hydrostatic gas
- housing
- lubricated bearing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
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- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Bearings For Parts Moving Linearly (AREA)
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Abstract
A kind of hydrostatic gas-lubricated bearing main shaft, be fixed on the hydrostatic gas-lubricated bearing main shaft in installation surface (PS), possess: rotating shaft (1), this rotating shaft (1) has installed surface (1a) on end face; Housing (2), this housing (2) surrounds the outer peripheral face of rotating shaft (1) across the bearing clearance (10) for supplying bearing gas, above-mentioned bearing gas is used for supporting rotating shaft (1) to make it to rotate; And first fixed station (3) and the second fixed station (4), this first fixed station (3) and the second fixed station (4) configure, for housing (2) is fixed on installation surface (PS) along axis (AX) direction of housing (2) with being spaced from each other.Be configured in and comprise the straight line guide (5) that can guide point-blank along axis (AX) direction further from the second fixed station (4) on the position of installed surface (1a) than the first fixed station (3).Hydrostatic gas-lubricated bearing main shaft can suppress the change in location of installed surface (1a) thus.
Description
Technical field
The present invention relates to a kind of hydrostatic gas-lubricated bearing main shaft, particularly relate to the hydrostatic gas-lubricated bearing main shaft be fixed in installation surface.
Background technology
Hydrostatic gas-lubricated bearing main shaft is used for precise processing device and close examination device etc.Particularly when hydrostatic gas-lubricated bearing main shaft is used for precise processing device, in order to implement high-precision processing, wish that the change in location of the workpiece loading surface (installed surface) of fixing processing object (workpiece) is little.
But the heating that the variations in temperature of environment or the rotating shaft of adjoint hydrostatic gas-lubricated bearing main shaft rotate and produce can make the constituent part of hydrostatic gas-lubricated bearing main shaft produce thermal expansion.The position of installed surface can be made thus to change.Such as in Japanese Patent Laid-Open 2006-263824 publication (patent document 1), propose a kind of main shaft device, the installed surface change in location that thermal expansion causes can be suppressed.
Main shaft device the first support unit that this publication is recorded and the second support unit are by housing supporting on the ground.Be in, away from the second support unit on the position of installed surface side, there is parallel spring.When main shaft rotates and makes the temperature of housing increase, housing is out of shape because of thermal expansion, thus makes total length elongated.Now, the first support unit be on the position of installed surface side is then out of shape hardly.Be in and then deform because of parallel spring distortion away from the second support unit on the position of installed surface side.Therefore, installed surface mainly conjugates along the axis direction of housing from installed surface to the direction of the second support unit.
Prior art document
Patent document
Patent document 1: Japanese Patent Laid-Open 2006-263824 publication
Summary of the invention
Invent technical problem to be solved
But the main shaft device recorded of above-mentioned publication has rigidity to a certain degree because of the parallel spring self of the second support unit, and the housing that therefore thermal expansion causes conjugates and can not all occur from installed surface towards the direction of the second support unit.That is, the part of displacement that thermal expansion causes can occur from the first support unit towards the direction of installed surface.Installed surface position in the axial direction can be made thus to change.
In addition, parallel spring in the axial direction distortion the position of parallel spring in short transverse (direction intersected with axis direction) can be made to change.Installed surface position in the height direction can be made thus to change.
In addition, although the second support unit is out of shape because of parallel spring, thus the position in short transverse is conjugated, the first support unit deforms hardly, and therefore thermal expansion can not make housing move in parallel relative to ground.That is, housing can tilt relative to ground, and therefore installed surface also can tilt relative to ground.
Once the position of installed surface changes as described above, the position of processing object will change, and is therefore just difficult to implement high-precision processing.
The present invention does to solve the problem just, and its object is to provides a kind of hydrostatic gas-lubricated bearing main shaft that can suppress the change in location of installed surface.
The technical scheme that technical solution problem adopts
Hydrostatic gas-lubricated bearing main shaft of the present invention is the hydrostatic gas-lubricated bearing main shaft be fixed in installation surface, possesses: rotating shaft, and this rotating shaft has installed surface on end face; Housing, this housing surrounds the outer peripheral face of rotating shaft across the bearing clearance for supplying bearing gas, above-mentioned bearing gas is used for supporting rotating shaft to make it rotatable; And first and second fixed station, this first and second fixed station configures, for housing is fixed on installation surface along the axis direction of housing with being spaced from each other.Be configured in and comprise the straight line guide that can guide point-blank in the axial direction further from the second fixed station on the position of installed surface than the first fixed station.
According to hydrostatic gas-lubricated bearing main shaft of the present invention, contain the straight line guide that can guide point-blank in the axial direction owing to being configured in further from the second fixed station on the position of installed surface than the first fixed station, the displacement of the housing that therefore thermal expansion can be caused guides in the axial direction point-blank.
Therefore, moved to the second fixed station side by straight line guide, the housing produced displacement in the axial direction almost all can be absorbed because of thermal expansion.The change in location of the installed surface on axis direction can be suppressed thus.
In addition, because the displacement of the housing that thermal expansion can be caused is guided in the axial direction point-blank, therefore, it is possible to suppress the second fixed station to be out of shape to short transverse.Installed surface change in location in the height direction can be suppressed thus.
In addition, due to the second fixed station can be suppressed to be out of shape in the height direction, therefore, it is possible to make housing and installation surface keep almost parallel by the first fixed station and the second fixed station.Therefore housing can move in parallel relative to installation surface.The situation that installed surface tilts relative to installation surface can be suppressed thus.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best second fixed station has: fixed part, and this fixed part is fixed in installation surface; And support unit, this support unit is arranged on housing, and can do relative movement by straight line guide relative to fixed part.The displacement of the housing caused because of thermal expansion can be guided in the axial direction point-blank thus.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best straight line guide line slideway is formed.Therefore, it is possible to guided point-blank in the axial direction with the displacement of line slideway by the housing caused because of thermal expansion.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best straight line guide sliding bearing is formed.Therefore, it is possible to guided point-blank in the axial direction with the displacement of sliding bearing by the housing caused because of thermal expansion.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best straight line guide hydrostatic gas-lubricated bearing slide block is formed.Therefore, it is possible to guided point-blank in the axial direction with the displacement of hydrostatic gas-lubricated bearing slide block by the housing caused because of thermal expansion.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best second fixed station thermal coefficient of expansion is 8 × 10
-6the material of/below K is formed.Therefore, it is possible to the change in location of the installed surface suppressing the thermal expansion because of the second fixed station to cause.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, the inside of best second fixed station also possesses stream, flows the second fixed station cooling by making gas in stream.Therefore, it is possible to the change in location by cooling the installed surface suppressing the thermal expansion because of the second fixed station to cause with gas.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, the inside of best second fixed station also possesses stream, flows the second fixed station cooling by making liquid in stream.Therefore, it is possible to by the change in location of the installed surface that suppresses the thermal expansion because of the second fixed station to cause by liquid cools.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best second fixed station also possesses fin.Therefore, it is possible to the change in location by carrying out cooling the installed surface suppressing the thermal expansion because of the second fixed station to cause with fin.
Invention effect
As mentioned above, according to hydrostatic gas-lubricated bearing main shaft of the present invention, the change in location of installed surface can be suppressed.
Accompanying drawing explanation
Fig. 1 is the schematic front view of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1 and 2.
Fig. 2 is the diagrammatic side view of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 3 is the schematic sectional view of the III-III line along Fig. 1.
Fig. 4 is the schematic front view of the action of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 1.
Fig. 5 is the signal partial front elevation view near the straight line guide of the variation 1 of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 1.
Fig. 6 is the diagrammatic side view of the variation 1 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 7 is the very schematic exploded side elevation of the second fixed station of the variation 1 of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 1.
Fig. 8 is the very schematic exploded side elevation of the second fixed station of the variation 2 of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 1.
Fig. 9 is the signal partial front elevation view near the straight line guide of the variation 3 of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 1.
Figure 10 is the diagrammatic side view of the variation 3 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Figure 11 is the schematic front view of the comparative example of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Figure 12 is the diagrammatic side view of the comparative example of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Figure 13 is the diagrammatic side view of the state that the housing of the comparative example of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 1 is out of shape in the axial direction.
Figure 14 is the diagrammatic side view of the state that the housing of the comparative example of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 1 is radially out of shape.
Figure 15 is the signal partial sectional view of the second fixed station of the variation 1 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 2.
Figure 16 is the signal partial sectional view of the second fixed station of the variation 2 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 2.
Figure 17 is the diagrammatic side view of the state that first and second fixed station of the comparative example of the hydrostatic gas-lubricated bearing main shaft representing embodiment of the present invention 2 is out of shape upward relative to installation surface.
Detailed description of the invention
Based on accompanying drawing, embodiments of the present invention are described below.
(embodiment 1)
First the structure of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1 is described.
As shown in Figures 1 and 2, the hydrostatic gas-lubricated bearing main shaft of present embodiment is the hydrostatic gas-lubricated bearing main shaft be fixed on installation surface PS.Hydrostatic gas-lubricated bearing main shaft mainly has rotating shaft 1, housing 2, first fixed station 3 and the second fixed station 4.
Rotating shaft 1 has the installed surface 1a that can install workpiece on end face.Housing 2 surrounds the outer peripheral face of rotating shaft 1 across the bearing clearance (with reference to Fig. 3) for supplying bearing gas, this bearing gas is used for supporting rotating shaft 1 and makes it rotatable.
First fixed station 3 and the second fixed station 4 are along the separated from each other configuration in axis AX direction of housing 2.First fixed station 3 and the second fixed station 4 are fixed on housing 2 with set bolt 6a respectively.First fixed station 3 and the second fixed station 4 are also fixed on installation surface PS with set bolt 6b respectively.First fixed station 3 and the second fixed station 4 are for being fixed on installation surface PS by housing 2.
Second fixed station 4 is configured in than the first fixed station 3 further from the position of installed surface 1a.Second fixed station 4 has the straight line guide 5 that can guide point-blank along the axis AX direction of housing 2.
Second fixed station 4 has fixed part 41 and support unit 42.Fixed part 41 is fixed on installation surface PS.Support unit 42 is arranged on housing 2.Support unit 42 can do relative movement by straight line guide 5 relative to fixed part 41.
As long as the mechanism that straight line guide 5 can guide point-blank along the axis AX direction of housing 2.Straight line guide 5 can be formed with line slideway 51.Line slideway 51 has slide block 51a, bearing ball 51b and track 51c.In Fig. 2 for convenience of explanation, bearing ball 51b is illustrated.Slide block 51a slides on track 51c by bearing ball 51b.Bearing ball 51b is kept and energy Free-rolling by the groove of the groove of slide block 51a and track 51c.Track 51c extends along the axis AX direction of housing 2.
Slide block 51a is slided along track 51c by bearing ball 51b, thus slide block 51a can move along track 51c point-blank in axis AX direction.Slide block 51a is connected with support unit 42, and track 51c is connected with fixed part 41, and therefore fixed part 41 and support unit 42 relatively can be moved by line slideway 51, and can move point-blank along axis AX direction.
Then the structure of the hydrostatic gas-lubricated bearing main shaft of present embodiment is further described.For the ease of observing, not representing a part of component parts such as rotating shaft with sectional view in Fig. 3, but representing with top view.
As shown in Figure 3, rotating shaft 1 has drum.Rotating shaft 1 can rotate centered by rotary middle spindle CR.Rotary middle spindle CR is configured to the state consistent with the axis AX of housing 2.Rotating shaft 1 mainly has workbench 11, axle bush pad 12 and thrust plate 13.The respective rotary middle spindle of workbench 11, axle bush pad 12 and thrust plate 13 is consistent with the rotary middle spindle CR of rotating shaft 1.One end of rotating shaft 1 is located at by workbench 11.The end face of workbench 11 forms the end face of rotating shaft 1.Discoideus thrust plate 13 is located at workbench 11 across axle bush pad 12.
Housing 2 mainly has housing parts 21, bearing sleeve 22, coolant jacket 23 and encoder cover 24.Housing parts 21 surrounds the periphery of bearing sleeve 22 to keep bearing sleeve 22.Housing parts 21 has: be configured in the first housing parts 21a on workbench 11 side position; And the second housing parts 21b of the first housing parts 21a is configured at across circular shell parts 21c.
Bearing sleeve 22 surrounds the outer peripheral face of rotating shaft 1 across the bearing clearance 10 for supplying bearing gas, this bearing gas is used for supporting rotating shaft 1 and makes it rotatable.Bearing sleeve 22 across bearing clearance 10 respectively with the face (upper surface) of close workbench 11 side of thrust plate 13 and to deviate from the face (lower surface) of workbench 11 side relative.Bearing sleeve 22 has: the clutch shaft bearing sleeve 22a kept by the first housing parts 21a; And by the second bearing sleeve 22b of the second housing parts 21b maintenance.
Bearing sleeve 22 is formed the nozzle 22c supplied to bearing clearance 10 by bearing gas.Nozzle 22c can supply bearing gas respectively to the upper surface of thrust plate 13 and the bearing clearance between lower surface and bearing sleeve 22 10.
Nozzle 22c supplies road 31 with bearing with gas and is connected.Bearing gas supply road 31 is connected with gas supply part with bearing not shown in the figures.Bearing gas is supplied by bearing gas supply road 31.As bearing gas supply part, such as pump can be used.In addition, housing parts 21 and bearing sleeve 22 are formed with the bearing gas discharge path 32 be connected with the outside of housing 2 bearing clearance 10.Bearing gas is discharged by bearing gas discharge path 32.
Supply bearing clearance 10 from the bearing bearing gas that gas supply road 31 supplies from nozzle 22c, the outer peripheral face of the inner peripheral surface of bearing sleeve 22 and rotating shaft 1 is played a role as the bearing of journals (hydrostatic gas-lubricated bearing of axle journal) 101 at radial (diametric(al)) supporting rotating shaft 1.
In addition, supply bearing clearance 10 from the bearing bearing gas that gas supply road 31 supplies from nozzle 22c, the upper surface of the end face of bearing sleeve 22 and thrust plate 13 and lower surface are played a role respectively as the thrust bearing (hydrostatic gas-lubricated bearing of thrust) 102 at axis (axis direction) supporting rotating shaft 1.
In addition, in the part deviating from workbench 11 side of rotating shaft 1, the rotor 7a that the mode being configured with the outer peripheral face surrounding rotating shaft 1 connects.And be configured with stator 7b in the mode relative with the outer peripheral face of rotor 7a.Rotor 7a and stator 7b constitutes the motor 7 driving rotating shaft 1 to rotate around rotary middle spindle CR.Produced the driving force of direction of rotation by the electromagnetic force between rotor 7a and stator 7b, rotating shaft 1 is rotated around rotary middle spindle CR.Motor 7 motor cover 8 covers.
Coolant jacket 23 is provided with in the mode of surrounding housing parts 21 and motor cover 8.Coolant jacket 23 has cold-producing medium supply port 33, refrigerant flow path 34 and cold-producing medium outlet 35.Supply the next cooling fluid as cold-producing medium or refrigerating gas from cold-producing medium supply port 33, discharged from cold-producing medium outlet 35 by refrigerant flow path 34.By the flowing of this cold-producing medium, hydrostatic gas-lubricated bearing main shaft entirety is cooled.The temperature stabilization of hydrostatic gas-lubricated bearing main shaft can be made thus.In addition, the thermal expansion of hydrostatic gas-lubricated bearing main shaft can be suppressed.
Refrigerant flow path 34 is by being processed into spiral helicine groove or multiple endless groove forms.Therefore, by making cooling liquid or gas (cold-producing medium) flow through whole refrigerant flow path 34 from a cold-producing medium supply port 33 the supply system cryogen.When refrigerant flow path 34 is endless groove, it also can be the structure that adjacent endless groove is connected each other by the groove formed on the direction at a right angle with endless groove.And this groove also can be single or multiple groove.
In addition, encoder 9 has been installed in the front end deviating from workbench 11 side of rotating shaft 1.Encoder cover 24 is provided with in the mode covering encoder 9.
By said structure, once supply bearing gas, i.e. compressed air from bearing gas supply road 31, bearing gas just flows into journal bearing portion 101 and thrust bearing division 102 from nozzle 22c.Further, produce due to compressed-air actuated supply pressure the reaction of bearing balanced each other with the deadweight of rotating shaft 1 or external load.Therefore, rotating shaft 1 supports by housing 2 with contactless state, does rotary actuation around rotary middle spindle CR simultaneously.
The action of the hydrostatic gas-lubricated bearing main shaft of present embodiment is below described.
As shown in Figure 4, when the rotation of the change when environment temperature or the rotating shaft 1 with hydrostatic gas-lubricated bearing main shaft and the heating that produces make the component parts of hydrostatic gas-lubricated bearing main shaft produce thermal expansion, housing 2 can be out of shape and cause total length to be extended.As a result, housing 2 conjugates on axis AX direction.The hydrostatic gas-lubricated bearing main shaft of present embodiment can coordinate the housing displacement produced because of thermal expansion, and straight line guide 5 is moved in direction to arrow X1 in figure on axis AX direction.Therefore, the displacement of the housing produced because of thermal expansion on axis AX direction is almost all absorbed to the movement in arrow X1 direction in figure by straight line guide 5.Therefore, the change in location of installed surface 1a is suppressed.
Straight line guide 5 described above adopts line slideway, but also can be used as straight line guide 5 with sliding bearing.
As shown in Fig. 5 ~ Fig. 7, in the variation 1 of the hydrostatic gas-lubricated bearing main shaft of present embodiment, form straight line guide 5 with sliding bearing 52.Sliding bearing 52 has spindle unit 52a, parts of bearings 52b and lubrication part 52c.Spindle unit 52a has the taper reduced by the area of side towards parts of bearings 52b side.Parts of bearings 52b is then configured to the shape of the taper that can accept spindle unit 52a.The bearing surface of parts of bearings 52b extends along the axis AX direction of housing 2.Be configured with between spindle unit 52a and parts of bearings 52b and lubricate part 52c.
Spindle unit 52a and parts of bearings 52b relatively slides across lubrication part 52c, enables spindle unit 52a move point-blank along parts of bearings 52b on axis AX direction thus.Spindle unit 52a is connected with support unit 42, and parts of bearings 52b is connected with fixed part 41, and therefore fixed part 41 and support unit 42 relatively can be moved by sliding bearing 52, and can move point-blank along axis AX direction.
As the mode of sliding bearing 52, the process etc. that oil lubrication, De Fulike coating etc. have the application of lubricity, teflon (registration mark) coating etc. has lubricity can be implemented.
In addition, the shape of sliding bearing 52 is not limited to the shape of variation 1.The shape of the sliding bearing 52 of the variation 2 of the hydrostatic gas-lubricated bearing main shaft of present embodiment is different from variation 1.As shown in Figure 8, the spindle unit 52a of the sliding bearing 52 of variation 2 and parts of bearings 52b is formed as rectangle.The convex of spindle unit 52a matches with the spill of parts of bearings 52b.Under the state that the convex of spindle unit 52a coordinates with the spill of parts of bearings 52b, relatively sliding across lubricating part 52c between spindle unit 52a and parts of bearings 52b, enabling spindle unit 52a move point-blank on axis AX direction along parts of bearings 52b thus.
In addition, as straight line guide 5, hydrostatic gas-lubricated bearing slide block can also be used.
As shown in FIG. 9 and 10, in the variation 3 of the hydrostatic gas-lubricated bearing main shaft of present embodiment, straight line guide 5 is formed with hydrostatic gas-lubricated bearing slide block 53.Hydrostatic gas-lubricated bearing slide block 53 has mounting table portion 53a and guide part 53b.The direction that mounting table portion 53a intersects in the direction extended with guide part 53b surrounds the outer peripheral face of guide part 53b across gap.Bearing gas is supplied to the gap between mounting table portion 53a and guide part 53b from bearing gas feedway.Bearing gas makes to support with contactless state between mounting table portion 53a and guide part 53b.Guide part 53b extends along the axis AX direction of housing 2.
Mounting table portion 53a to be bearing on guide part 53b with contactless state by bearing gas and to slide along guide part 53b, enables mounting table portion 53a move point-blank on axis AX direction along guide part 53b thus.Mounting table portion 53a is connected with support unit 42, and guide part 53b is connected with fixed part 41, and therefore fixed part 41 and support unit 42 relatively can be moved by hydrostatic gas-lubricated bearing slide block 53, and can move point-blank along axis AX direction.
The action effect of the hydrostatic gas-lubricated bearing main shaft that present embodiment is described is compared below with comparative example.
As is illustrated by figs. 11 and 12, the hydrostatic gas-lubricated bearing main shaft of the comparative example of present embodiment is compared with the hydrostatic gas-lubricated bearing main shaft of present embodiment, and the main distinction is do not have straight line guide.The housing 2 of comparative example is fixed together with set bolt 6a and the first fixed station 3 and the second fixed station 4 respectively, and the first fixed station 3 and the second fixed station 4 are fixed on installation surface PS with arranging bolt 6b respectively.
As shown in figure 13, when the rotation of the change when environment temperature or the rotating shaft 1 with hydrostatic gas-lubricated bearing main shaft and the heating that produces make the temperature of housing 2 rise, housing 2 can deform because of thermal expansion, thus causes total length to be extended.That is, housing 2 is out of shape to X1 direction in figure and X2 Directional Extension on axis AX direction.As a result, the position of installed surface 1a only conjugates distance D1 to X2 direction in figure on axis AX direction.
At this moment, the temperature of installation surface PS is still room temperature and does not rise, and the first fixed station 3 therefore contacted with installation surface PS and the second fixed station 4 respective lower end thermal expansion do not occur.Therefore, the distance between the first fixed station 3 contacted with installation surface PS and the respective lower end of the second fixed station 4 is constant.On the other hand, due to the thermal expansion of housing 2, be fixed on the first fixed station 3 on housing 2 with set bolt 6a and the distance between the respective upper end of the second fixed station 4 expands.Therefore, the first fixed station 3 and the second fixed station 4 deform because of the thermal expansion of housing 2 respectively.
On the other hand, hydrostatic gas-lubricated bearing main shaft according to the present embodiment, contain the straight line guide that can guide point-blank in the axial direction owing to being configured in further from the second fixed station on the position of installed surface than the first fixed station, the displacement of the housing 2 that therefore thermal expansion can be caused guides in the axial direction point-blank.
Therefore, the displacement of the housing 2 produced because of thermal expansion on axis AX direction is almost all absorbed to the movement in the second fixed station 4 side (in figure arrow X1 direction) by straight line guide 5.The change in location of installed surface 1a on axis AX direction can be suppressed thus.
In addition, because the displacement of the housing that thermal expansion can be caused is guided point-blank along axis AX direction, therefore, it is possible to suppress the second fixed station 4 distortion in the height direction.Installed surface 1a change in location in the height direction can be suppressed thus.
In addition, due to the second fixed station 4 can be suppressed to be out of shape in the height direction, therefore, it is possible to make housing 2 and installation surface PS keep almost parallel by the first fixed station 3 and the second fixed station 4.Therefore housing 2 can move in parallel relative to installation surface PS.The situation that installed surface 1a tilts relative to installation surface PS can be suppressed thus.
Due to the change in location of installed surface 1a can be suppressed as described above, therefore, it is possible to suppress the change in location of processing object.High-precision processing can be implemented thus.
In addition, hydrostatic gas-lubricated bearing main shaft according to the present embodiment, the second fixed station 4 has: be fixed on the fixed part 41 on installation surface PS; And to be arranged on housing 2 and the support unit 42 of relative movement can be made by straight line guide 5 relative to fixed part 41.The displacement of the housing 2 caused because of thermal expansion can be guided point-blank along axis AX direction thus.
In addition, hydrostatic gas-lubricated bearing main shaft according to the present embodiment, straight line guide 5 also can be formed with line slideway 51.Thereby, it is possible to the displacement of the housing 2 caused because of thermal expansion is guided point-blank along axis AX direction with line slideway 51.
In addition, hydrostatic gas-lubricated bearing main shaft according to the present embodiment, straight line guide 5 also can be formed with sliding bearing 52.Thereby, it is possible to the displacement of the housing 2 caused because of thermal expansion is guided point-blank along axis AX direction with sliding bearing 52.
In addition, hydrostatic gas-lubricated bearing main shaft according to the present embodiment, straight line guide 5 also can be formed with hydrostatic gas-lubricated bearing slide block 53.Thereby, it is possible to the displacement of the housing 2 caused because of thermal expansion is guided point-blank along axis AX direction with hydrostatic gas-lubricated bearing slide block 53.
As shown in figure 14, when the rotation of the change when environment temperature or the rotating shaft 1 with hydrostatic gas-lubricated bearing main shaft and the heating that produces make the temperature of housing 2 rise, housing 2 can deform and expand towards radial (in figure arrow Y1 direction).Now, housing 2 centered by the axis AX of housing 2 towards radial deformation.Therefore, once housing 2 and the first fixed station 3 and the second fixed station 4 be fixed on the position of axis AX, housing 2 distortion diametrically would not make the first fixed station 3 and the second fixed station 4 conjugate in the height direction.Therefore, the position of the set bolt 6a of the first fixed station 3 and the second fixed station 4 preferably and axis AX be in sustained height, be highly more better close to axis AX from reality.
(embodiment 2)
About embodiments of the present invention 2, unless otherwise specified, be exactly the structure identical with above-mentioned embodiment 1, therefore identical key element represented and no longer repeat specification with identical symbol.
In embodiment 1, describe the displacement that thermal expansion the caused structure to the direction release do not had an impact, but be also applicable to the structure of the addendum modification also suppressing thermal expansion itself.
Fig. 1 again, part or all of the component parts of the hydrostatic gas-lubricated bearing main shaft of present embodiment is made up of the material (low-thermal-expansion material) that thermal coefficient of expansion is low.Specifically, the first fixed station 3 and the most handy thermal coefficient of expansion of the second fixed station 4 are 8 × 10
-6the material of/below K is formed.Particularly the most handy thermal coefficient of expansion of the second fixed station 4 is 8 × 10
-6the material of/below K is formed.Be 8 × 10 as thermal coefficient of expansion
-6the material of/below K, such as, can use invar, pottery etc.
In addition, the first fixed station 3 and the second fixed station 4 also can have cooling body.Particularly the second fixed station 4 preferably has cooling body.
As shown in figure 15, the second fixed station 4 of the variation 1 of the hydrostatic gas-lubricated bearing main shaft of present embodiment has and can realize by making cold-producing medium the cooling body cooled in internal flow.Second fixed station 4 has supply port 4a, stream 4b and outlet 4c.At the two ends of stream 4b being located at the second fixed station 4 inside, be configured with the supply port 4a to the outside opening of the second fixed station 4 and outlet 4c.
Gas or liquid are discharged from outlet 4c after passing through stream 4b as the cold-producing medium supplied from supply port 4a.Cross stream 4b to make the second fixed station 4 by making gas or liquid stream to cool.
In addition, cooling body also can be fin.As shown in figure 16, the second fixed station 4 of the variation 2 of the hydrostatic gas-lubricated bearing main shaft of present embodiment has fin 4d on outer peripheral face.
The action effect of the hydrostatic gas-lubricated bearing main shaft that present embodiment is described is compared below with comparative example.
As shown in figure 17, adopt the hydrostatic gas-lubricated bearing main shaft of comparative example of present embodiment, the change of environment temperature or the heating produced with the rotation of the rotating shaft 1 of hydrostatic gas-lubricated bearing main shaft can make the first fixed station 3 and the second fixed station 4 thermal expansion occur and produce distortion.
When there is thermal expansion because temperature rises in the first fixed station 3 and the second fixed station 4, thermal expansion can make housing 2 with installation surface PS for benchmark upward (in Fig. 2 arrow Y2 direction) mention.Even if as a result, the first fixed station 3 and the second fixed station 4 are fixed on the position of the axis AX of housing 2, housing 2 also can conjugate distance D2 upward.Thus installed surface 1a is also conjugated upward, therefore the position of installed surface 1a there occurs change.
On the other hand, when adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, because the second fixed station 4 is 8 × 10-with thermal coefficient of expansion
6the material of/below K is formed, therefore, it is possible to suppress the thermal expansion of the second fixed station 4.Therefore, it is possible to the change in location of the installed surface 1a suppressing the thermal expansion because of the second fixed station 4 to cause.
In addition, when adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, the second fixed station 4 is cooled, therefore, it is possible to the change in location by cooling the installed surface 1a suppressing the thermal expansion because of the second fixed station to cause with gas by making gas flow enter stream 4b.
In addition, when adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, by making liquid stream enter stream 4b, the second fixed station 4 is cooled, therefore, it is possible to by the change in location of the installed surface 1a that suppresses the thermal expansion because of the second fixed station 4 to cause by liquid cools.
In addition, when adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, the second fixed station 4 also has fin 4d, therefore, it is possible to the change in location by cooling the installed surface 1a suppressing the thermal expansion because of the second fixed station 2 to cause with fin 4d.
And low-thermal-expansion material and cooling body can simultaneously and use.That is, can be also 8 × 10 with thermal coefficient of expansion
-6the material of/below K forms cooling body.The performance can played stably further like this.
The respective embodiments described above can be appropriately combined.
Disclosed embodiment is example in all respects above, instead of limits.Scope of the present invention by above restriction being described, but is represented by claims, comprise with the meaning of claims equalization and do in right all change.
Industrial utilizability
The present invention is particularly useful for the hydrostatic gas-lubricated bearing main shaft be fixed in installation surface.
Symbol description
1 rotating shaft
1a installed surface
2 housings
3 first fixed stations
4 second fixed stations
4a supply port
4b stream
4c outlet
4d fin
5 straight line guides
6a set bolt
6b arranges bolt
7 motors
7a rotor
7b stator
8 motor cover
9 encoders
10 bearing clearancees
11 workbench
12 axle bush pads
13 thrust plates
21 housing parts
21a first housing parts
21b second housing parts
21c circular shell parts
22 bearing sleeves
22a clutch shaft bearing sleeve
22b second bearing sleeve
22c nozzle
23 coolant jackets
24 encoder covers
31 bearing gases supply road
32 bearings gas discharge path
33 cold-producing medium supply ports
34 refrigerant flow paths
35 cold-producing medium outlets
41 fixed parts
42 support units
51 line slideways
51a slide block
51b bearing bolt
51c track
52 sliding bearings
52a spindle unit
52b parts of bearings
52c lubricates part
53 hydrostatic gas-lubricated bearing slide blocks
53a mounting table portion
53b guide part
101 journal bearing portion
102 thrust bearing divisions
CR rotary middle spindle
PS installation surface
Claims (9)
1. a hydrostatic gas-lubricated bearing main shaft, is be fixed on the hydrostatic gas-lubricated bearing main shaft in installation surface (PS), it is characterized in that possessing:
Rotating shaft (1), this rotating shaft (1) has installed surface (1a) on end face;
Housing (2), this housing (2) surrounds the outer peripheral face of described rotating shaft (1) across the bearing clearance (10) for supplying bearing gas, described bearing gas is for supporting described rotating shaft (1) to make it to rotate; And
First fixed station (3) and the second fixed station (4), this first fixed station (3) and the second fixed station (4) configure along axis (AX) direction of described housing (2) with being spaced from each other, for described housing (2) is fixed on described installation surface (PS)
Be configured in and comprise the straight line guide (5) that can guide point-blank along described axis (AX) direction than described first fixed station (3) further from described second fixed station (4) on the position of described installed surface (1a)
Described second fixed station has cooling body.
2. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described second fixed station (4) has:
Fixed part (41), this fixed part (41) is fixed in described installation surface (PS); And
Support unit (42), this support unit (42) is arranged on described housing (2), and can do relative movement by described straight line guide (5) relative to described fixed part (41).
3. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described straight line guide (5) is made up of line slideway (51).
4. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described straight line guide (5) is made up of sliding bearing (52).
5. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described straight line guide (5) is made up of hydrostatic gas-lubricated bearing slide block (53).
6. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described second fixed station (4) is 8 × 10 with thermal coefficient of expansion
-6the material of/below K is formed.
7. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described second fixed station (4) also possesses stream (4b) in inside,
Flow described second fixed station (4) cooling in described stream (4b) by making gas.
8. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described second fixed station (4) also possesses stream (4b) in inside,
Flow described second fixed station (4) cooling in described stream (4b) by making liquid.
9. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described second fixed station (4) also possesses fin (4d).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-143804 | 2011-06-29 | ||
| JP2011143804A JP5744645B2 (en) | 2011-06-29 | 2011-06-29 | Hydrostatic gas bearing spindle |
| PCT/JP2012/063890 WO2013001969A1 (en) | 2011-06-29 | 2012-05-30 | Hydrostatic gas bearing spindle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103648715A CN103648715A (en) | 2014-03-19 |
| CN103648715B true CN103648715B (en) | 2016-04-06 |
Family
ID=47423869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280032185.3A Expired - Fee Related CN103648715B (en) | 2011-06-29 | 2012-05-30 | Hydrostatic gas-lubricated bearing main shaft |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5744645B2 (en) |
| CN (1) | CN103648715B (en) |
| WO (1) | WO2013001969A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5888663B2 (en) * | 2013-12-17 | 2016-03-22 | 株式会社安川電機 | Spindle motor |
| JP6802238B2 (en) * | 2018-10-25 | 2020-12-16 | ファナック株式会社 | Spindle device |
| US11828549B2 (en) * | 2019-01-04 | 2023-11-28 | Nvidia Corporation | Integrated heat sink and air plenum for a heat-generating integrated circuit |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4770575A (en) * | 1986-06-13 | 1988-09-13 | Gebruder Honsberg Gmbh | Centering and chucking system |
| CN1579704A (en) * | 2003-08-12 | 2005-02-16 | 柯尼卡美能达精密光学株式会社 | Machining apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000024853A (en) * | 1998-07-08 | 2000-01-25 | Mori Seiki Co Ltd | Machine tool |
| JP2003324897A (en) * | 2002-05-09 | 2003-11-14 | Murata Mach Ltd | Cooling device for drive motor |
| JP2006263824A (en) * | 2005-02-23 | 2006-10-05 | Konica Minolta Opto Inc | Spindle device |
| JP4672447B2 (en) * | 2005-06-08 | 2011-04-20 | 東芝機械株式会社 | Machine Tools |
| JP4959222B2 (en) * | 2006-05-15 | 2012-06-20 | 東芝機械株式会社 | Precision roll lathe saddle guide cooling device |
-
2011
- 2011-06-29 JP JP2011143804A patent/JP5744645B2/en not_active Expired - Fee Related
-
2012
- 2012-05-30 CN CN201280032185.3A patent/CN103648715B/en not_active Expired - Fee Related
- 2012-05-30 WO PCT/JP2012/063890 patent/WO2013001969A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4770575A (en) * | 1986-06-13 | 1988-09-13 | Gebruder Honsberg Gmbh | Centering and chucking system |
| CN1579704A (en) * | 2003-08-12 | 2005-02-16 | 柯尼卡美能达精密光学株式会社 | Machining apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103648715A (en) | 2014-03-19 |
| JP2013010159A (en) | 2013-01-17 |
| JP5744645B2 (en) | 2015-07-08 |
| WO2013001969A1 (en) | 2013-01-03 |
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