CN103648715A - Hydrostatic gas bearing spindle - Google Patents
Hydrostatic gas bearing spindle Download PDFInfo
- Publication number
- CN103648715A CN103648715A CN201280032185.3A CN201280032185A CN103648715A CN 103648715 A CN103648715 A CN 103648715A CN 201280032185 A CN201280032185 A CN 201280032185A CN 103648715 A CN103648715 A CN 103648715A
- Authority
- CN
- China
- Prior art keywords
- fixed station
- main shaft
- hydrostatic gas
- housing
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
Abstract
The hydrostatic gas bearing spindle that is affixed to a mounting surface (PS) is provided with: a pivot (1) having a fastening surface (1a) on an end face; a housing (2) that surrounds the outer circumferential surface of the pivot (1) with a bearing clearance (10), into which a bearing gas for rotatably supporting the pivot (1) is supplied, therebetween; and first fixing boards (3) and second fixing boards (4) that are disposed at a distance from each other in the direction of the axial line (AX) of the housing (2) and are for fixing the housing (2) to the mounting surface (PS). The second fixing boards (4), which are disposed at positions that are farther from the fastening surface (1a) than the first fixing boards (3), comprise a linear guide mechanism (5) that is capable of linear guidance in the axial direction (AX). A hydrostatic gas bearing spindle that can limit changes in the position of the fastening surface (1a) can thereby be obtained.
Description
Technical field
The present invention relates to a kind of hydrostatic gas-lubricated bearing main shaft, relate in particular to the hydrostatic gas-lubricated bearing main shaft being fixed in installation surface.
Background technology
Hydrostatic gas-lubricated bearing main shaft is for precise processing device and close examination device etc.Particularly, when hydrostatic gas-lubricated bearing main shaft is used for to precise processing device, in order to implement high-precision processing, the change in location of the workpiece loading surface (installed surface) of hope fixing processing object (workpiece) is little.
Yet, the variations in temperature of environment or follow the rotating shaft rotation of hydrostatic gas-lubricated bearing main shaft and the heating that produces can make the constituent part of hydrostatic gas-lubricated bearing main shaft produce thermal expansion.Can make thus the position of installed surface change.For example in Japanese Patent Laid-Open 2006-263824 communique (patent documentation 1), propose a kind of main shaft device, can suppress the installed surface change in location that thermal expansion causes.
The main shaft device that this communique is recorded supports housing on the ground with the first support unit and the second support unit.In locational the second support unit away from installed surface side, there is parallel spring.While making the temperature of housing increase when main shaft rotation, housing is out of shape because of thermal expansion, thereby makes total length elongated.Now, in distortion hardly of locational the first support unit near installed surface side.In locational the second support unit away from installed surface side, because being out of shape, parallel spring deforms.Therefore, the mainly direction displacement along the axis direction of housing and from installed surface to the second support unit of installed surface.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2006-263824 communique
Summary of the invention
Invent technical problem to be solved
Yet the main shaft device that above-mentioned communique is recorded has rigidity to a certain degree because of the parallel spring self of the second support unit, so not all generations of the direction from installed surface towards the second support unit of housing displacement of causing of thermal expansion.That is a part for the displacement that, thermal expansion causes can the direction from the first support unit towards installed surface occur.Can make thus the position of installed surface on axis direction change.
In addition, parallel spring can make the position of parallel spring in short transverse (direction of intersecting with axis direction) change along axis direction distortion.Can make thus the position of installed surface in short transverse change.
In addition, although the second support unit be out of shape because of parallel spring, thereby make the position in short transverse that displacement occur, the first support unit can deform hardly, so thermal expansion can not make housing make parallel with respect to ground.That is, housing can tilt with respect to ground, so installed surface also can tilt with respect to ground.
Once the position of installed surface changes as described above, the position of processing object will change, and therefore is just difficult to implement high-precision processing.
The present invention does in order to address the above problem just, and its object is to provide a kind of hydrostatic gas-lubricated bearing main shaft that can suppress the change in location of installed surface.
The technical scheme that technical solution problem adopts
Hydrostatic gas-lubricated bearing main shaft of the present invention is the hydrostatic gas-lubricated bearing main shaft being fixed in installation surface, possesses: rotating shaft, and this rotating shaft has installed surface on end face; Housing, this housing is across surround the outer peripheral face of rotating shaft with the bearing clearance of gas for supplying with bearing, and above-mentioned bearing is used for supporting rotating shaft to make it rotatable with gas; And first and second fixed station, this first and second fixed station is spaced from each other and configures along the axis direction of housing, for housing is fixed on to installation surface.Be configured in than the first fixed station and comprise the straight line guide that can guide point-blank along axis direction further from locational second fixed station of installed surface.
According to hydrostatic gas-lubricated bearing main shaft of the present invention, owing to being configured in than the first fixed station, further from locational second fixed station of installed surface, comprised the straight line guide that can guide point-blank along axis direction, the displacement of the housing that therefore thermal expansion can be caused guides point-blank along axis direction.
Therefore, by straight line guide, to the second fixed station one side shifting, the housing producing almost all can be absorbed in the displacement on axis direction because of thermal expansion.Can suppress the change in location of the installed surface on axis direction thus.
In addition, because the displacement of the housing that thermal expansion can be caused is guided point-blank along axis direction, therefore can suppress the second fixed station and be out of shape to short transverse.Can suppress thus the change in location of installed surface in short transverse.
In addition, owing to can suppressing the second fixed station, in short transverse, be out of shape, therefore can make housing and installation surface keep almost parallel by the first fixed station and the second fixed station.Therefore housing can be with respect to installation surface and parallel.Can suppress thus the situation that installed surface tilts with respect to installation surface.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best the second fixed station has: fixed part, and this fixed part is fixed in installation surface; And support unit, this support unit is arranged on housing, and can with respect to fixed part, relatively move by straight line guide.The displacement of the housing causing because of thermal expansion can be guided point-blank along axis direction thus.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, preferably straight line guide forms with line slideway.Therefore, can the displacement of the housing causing because of thermal expansion be guided along axis direction enough line slideways point-blank.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, preferably straight line guide forms with sliding bearing.Therefore, can the displacement of the housing causing because of thermal expansion be guided along axis direction enough sliding bearings point-blank.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, preferably straight line guide forms with hydrostatic gas-lubricated bearing slide block.Therefore, can the displacement of the housing causing because of thermal expansion be guided along axis direction enough hydrostatic gas-lubricated bearing slide blocks point-blank.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best the second fixed station thermal coefficient of expansion is 8 * 10
-6material below/K forms.The change in location that therefore, can suppress the installed surface that the thermal expansion because of the second fixed station causes.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, the inside of best the second fixed station also possesses stream, by gas is flowed in stream, the second fixed station is cooling.The change in location of the installed surface that therefore, can cause by the thermal expansion suppressing by gas cooled because of the second fixed station.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, the inside of best the second fixed station also possesses stream, by liquid is flowed in stream, the second fixed station is cooling.The change in location of the installed surface that therefore, can cause by the thermal expansion suppressing by liquid cools because of the second fixed station.
In above-mentioned hydrostatic gas-lubricated bearing main shaft, best the second fixed station also possesses fin.Therefore, can be by carry out the change in location of the installed surface that the cooling thermal expansion suppressing because of the second fixed station causes with fin.
Invention effect
As mentioned above, according to hydrostatic gas-lubricated bearing main shaft of the present invention, can suppress the change in location of installed surface.
Accompanying drawing explanation
Fig. 1 is the schematic front view of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1 and 2.
Fig. 2 is the diagrammatic side view of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 3 is the schematic sectional view along the III-III line of Fig. 1.
Fig. 4 means the schematic front view of action of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 5 means near the signal partial front elevation view straight line guide of variation 1 of hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 6 is the diagrammatic side view of variation 1 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 7 means the very schematic exploded side elevation of the second fixed station of variation 1 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 8 means the very schematic exploded side elevation of the second fixed station of variation 2 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Fig. 9 means near the signal partial front elevation view straight line guide of variation 3 of hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Figure 10 is the diagrammatic side view of variation 3 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Figure 11 is the schematic front view of comparative example of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Figure 12 is the diagrammatic side view of comparative example of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1.
Figure 13 means that the housing of comparative example of hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1 is along the diagrammatic side view of the state of axis direction distortion.
Figure 14 means the diagrammatic side view of the state that the housing of comparative example of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1 is radially out of shape.
Figure 15 is the signal partial sectional view of the second fixed station of variation 1 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 2.
Figure 16 is the signal partial sectional view of the second fixed station of variation 2 of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 2.
First and second fixed station of comparative example of hydrostatic gas-lubricated bearing main shaft that Figure 17 means embodiment of the present invention 2 is the diagrammatic side view of the state of distortion with respect to installation surface and upward.
The specific embodiment
Below based on accompanying drawing explanation embodiments of the present invention.
(embodiment 1)
First the structure of the hydrostatic gas-lubricated bearing main shaft of embodiment of the present invention 1 is described.
As shown in Figures 1 and 2, the hydrostatic gas-lubricated bearing main shaft of present embodiment is the hydrostatic gas-lubricated bearing main shaft being fixed on installation surface PS.Hydrostatic gas-lubricated bearing main shaft mainly has rotating shaft 1, housing 2, the first fixed station 3 and the second fixed station 4.
Rotating shaft 1 has the installed surface 1a that workpiece can be installed on end face.Housing 2 is across surrounding the outer peripheral face of rotating shaft 1 with the bearing clearance (with reference to Fig. 3) of gas for supplying with bearing, and this bearing makes it rotatable with gas for supporting rotating shaft 1.
The first fixed station 3 and the second fixed station 4 are along the spaced-apart configuration of axis AX direction of housing 2.The first fixed station 3 and the second fixed station 4 are fixed on housing 2 with set bolt 6a respectively.The first fixed station 3 and the second fixed station 4 are also fixed on installation surface PS with set bolt 6b respectively.The first fixed station 3 and the second fixed station 4 are for being fixed on installation surface PS by housing 2.
The second fixed station 4 is configured in than the first fixed station 3 on the position of installed surface 1a.The second fixed station 4 has the straight line guide 5 that can guide point-blank along the axis AX direction of housing 2.
The second fixed station 4 has fixed part 41 and support unit 42.Fixed part 41 is fixed on installation surface PS.Support unit 42 is arranged on housing 2.Support unit 42 can relatively move with respect to fixed part 41 by straight line guide 5.
Then further describe the structure of the hydrostatic gas-lubricated bearing main shaft of present embodiment.For the ease of observing, in Fig. 3, with cutaway view, do not represent a part of component parts such as rotating shaft, but represent with top view.
As shown in Figure 3, rotating shaft 1 has drum.Rotating shaft 1 can be rotated centered by rotary middle spindle CR.Rotary middle spindle CR is configured to the state consistent with the axis AX of housing 2.Rotating shaft 1 mainly has workbench 11, axle bush pad 12 and thrust plate 13.Workbench 11, axle bush pad 12 and thrust plate 13 rotary middle spindle are separately consistent with the rotary middle spindle CR of rotating shaft 1.Workbench 11 is located at one end of rotating shaft 1.The end face of workbench 11 forms the end face of rotating shaft 1.Discoideus thrust plate 13 is located at workbench 11 across axle bush pad 12.
Bearing sleeve 22 is across surrounding the outer peripheral face of rotating shaft 1 with the bearing clearance 10 of gas for supplying with bearing, and this bearing makes it rotatable with gas for supporting rotating shaft 1.Bearing sleeve 22 is across bearing clearance 10 and respectively with the face (upper surface) of close workbench 11 sides of thrust plate 13 and to deviate from the face (lower surface) of workbench 11 sides relative.Bearing sleeve 22 has: the clutch shaft bearing sleeve 22a being kept by the first housing parts 21a; And the second bearing sleeve 22b being kept by the second housing parts 21b.
On bearing sleeve 22, be formed with the nozzle 22c with gas 10 supplies to bearing clearance by bearing.Nozzle 22c can be respectively supplies with bearing gases to the bearing clearance 10 of 22 of the upper surface of thrust plate 13 and lower surface and bearing sleeves.
Nozzle 22c supplies with road 31 with bearing with gas and is connected.Bearing is supplied with road 31 with gas and is connected with gas supply part with bearing not shown in the figures.Bearing is supplied with road 31 by bearing with gas with gas and is supplied with.As bearing gas supply part, for example can use pump.In addition, on housing parts 21 and bearing sleeve 22, be formed with the bearing that bearing clearance 10 is connected with the outside of housing 2 and discharge road 32 with gas.Bearing is discharged road 32 by bearing with gas with gas and is discharged.
From bearing, with gas, supply with the bearing of supplying with on road 31 and from nozzle 22c, supply with bearing clearance 10 with gas, make the inner peripheral surface of bearing sleeve 22 and the outer peripheral face of rotating shaft 1 as playing a role at the bearing of journals of (diametric(al)) supporting rotating shaft 1 (hydrostatic gas-lubricated bearing that axle journal is used) 101 radially.
In addition, from bearing, with the bearing that gas supply road 31 is supplied with, with gas, from nozzle 22c, supply with bearing clearance 10, the end face of bearing sleeve 22 and the upper surface of thrust plate 13 and lower surface are played a role as the thrust bearing (hydrostatic gas-lubricated bearing that thrust is used) 102 at axial (axis direction) supporting rotating shaft 1 respectively.
In addition, in the part that deviates from workbench 11 sides of rotating shaft 1, configured the rotor 7a connecting to surround the mode of the outer peripheral face of rotating shaft 1.And configured stator 7b in the relative mode of the outer peripheral face with rotor 7a.Rotor 7a and stator 7b have formed the motor 7 that drives rotating shaft 1 to rotate around rotary middle spindle CR.By the electromagnetic force between rotor 7a and stator 7b, produce the driving force of direction of rotation, rotating shaft 1 is rotated around rotary middle spindle CR.Motor 7 use motor cover 8 cover.
To surround the mode of housing parts 21 and motor cover 8, be provided with coolant jacket 23.Coolant jacket 23 has cold-producing medium supply port 33, refrigerant flow path 34 and cold-producing medium outlet 35.From cold-producing medium supply port 33, supply with the cooling fluid as cold-producing medium or the refrigerating gas of coming, by refrigerant flow path 34, from cold-producing medium outlet 35, discharge.By flowing of this cold-producing medium, make hydrostatic gas-lubricated bearing main shaft integral body be able to cooling.Can make the temperature stabilization of hydrostatic gas-lubricated bearing main shaft thus.In addition, can suppress the thermal expansion of hydrostatic gas-lubricated bearing main shaft.
In addition, on the front end that deviates from workbench 11 sides of rotating shaft 1, encoder 9 has been installed.To cover the mode of encoder 9, be provided with encoder cover 24.
By said structure, once supply with road 31 from bearing with gas, to supply with gas for bearing, be compressed air, bearing just flows into bearing of journals portion 101 and thrust bearing division 102 from nozzle 22c with gas.And, because compressed-air actuated supply pressure produces the reaction of bearing that deadweight or external load with rotating shaft 1 balance each other.Therefore, rotating shaft 1 is subject to housing 2 supportings with contactless state, rotarilys actuate around rotary middle spindle CR simultaneously.
The action of the hydrostatic gas-lubricated bearing main shaft of present embodiment is below described.
As shown in Figure 4, when the variation of environment temperature or follow the rotation of rotating shaft 1 of hydrostatic gas-lubricated bearing main shaft and the heating that produces while making the component parts of hydrostatic gas-lubricated bearing main shaft produce thermal expansion, housing 2 can distortion and is caused total length to be extended.Result is, housing 2 displacement in axis AX direction.The hydrostatic gas-lubricated bearing main shaft of present embodiment can coordinate the housing displacement producing because of thermal expansion, and straight line guide 5 is moved to arrow X1 direction in figure in axis AX direction.Therefore the displacement of the housing, producing because of thermal expansion in axis AX direction is almost all absorbed to moving of arrow X1 direction in figure by straight line guide 5.Therefore, the change in location of installed surface 1a is suppressed.
As shown in Fig. 5～Fig. 7, in the variation 1 of the hydrostatic gas-lubricated bearing main shaft of present embodiment, with sliding bearing 52, form straight line guide 5.Sliding bearing 52 has spindle unit 52a, parts of bearings 52b and lubricated part 52c.Spindle unit 52a has towards parts of bearings 52b mono-side and by the taper of the area reducing of side.Parts of bearings 52b is configured to the shape of the taper that can accept spindle unit 52a.The bearing surface of parts of bearings 52b extends along the axis AX direction of housing 2.Between spindle unit 52a and parts of bearings 52b, configured lubricated part 52c.
As the mode of sliding bearing 52, can implement application that oil lubrication, De Fulike coating etc. have lubricity, teflon (registration mark) coating etc. and there is processing of lubricity etc.
In addition, the shape of sliding bearing 52 is not limited to the shape of variation 1.The shape of the sliding bearing 52 of the variation 2 of the hydrostatic gas-lubricated bearing main shaft of present embodiment is different from variation 1.As shown in Figure 8, the spindle unit 52a of the sliding bearing 52 of variation 2 and parts of bearings 52b form rectangle.The convex of spindle unit 52a matches with the spill of parts of bearings 52b.Under the state coordinating in the convex of spindle unit 52a and the spill of parts of bearings 52b, between spindle unit 52a and parts of bearings 52b, across lubricated part 52c, relatively slide, make thus spindle unit 52a in axis AX direction, move point-blank along parts of bearings 52b.
In addition, as straight line guide 5, can also use hydrostatic gas-lubricated bearing slide block.
As shown in FIG. 9 and 10, in the variation 3 of the hydrostatic gas-lubricated bearing main shaft of present embodiment, with hydrostatic gas-lubricated bearing slide block 53, form straight line guide 5.Hydrostatic gas-lubricated bearing slide block 53 has the 53a of mounting table portion and guide part 53b.In the direction that the 53a of mounting table portion intersects in the direction of extending with guide part 53b across the outer peripheral face of gap encircles guide part 53b.Bearing gas is supplied with in gap from bearing gas supply device to the 53a of mounting table portion and between guide part 53b.Bearing gas makes with contactless state, to support between the 53a of mounting table portion and guide part 53b.Guide part 53b extends along the axis AX direction of housing 2.
The 53a of mounting table portion is bearing in guide part 53b above and slides along guide part 53b with contactless state by bearing gas, makes thus the 53a of mounting table portion in axis AX direction, move point-blank along guide part 53b.The 53a of mounting table portion is connected with support unit 42, and guide part 53b is connected with fixed part 41, so fixed part 41 and support unit 42 can relatively move by hydrostatic gas-lubricated bearing slide block 53, and can move point-blank along axis AX direction.
Compare to illustrate below the action effect of the hydrostatic gas-lubricated bearing main shaft of present embodiment with comparative example.
As shown in Figure 11 and Figure 12, the hydrostatic gas-lubricated bearing main shaft of the comparative example of present embodiment is compared with the hydrostatic gas-lubricated bearing main shaft of present embodiment, and the main distinction is not have straight line guide.The housing 2 of comparative example is fixed together with set bolt 6a and the first fixed station 3 and the second fixed station 4 respectively, and the first fixed station 3 and the second fixed station 4 are fixed on installation surface PS with bolt 6b is set respectively.
As shown in figure 13, when the variation of environment temperature or follow the rotation of rotating shaft 1 of hydrostatic gas-lubricated bearing main shaft and the heating that produces while making the temperature of housing 2 increase, housing 2 can deform because of thermal expansion, thereby causes total length to be extended.That is, housing 2 in axis AX direction to X1 direction in figure and the distortion of X2 Directional Extension.Result is, the position of installed surface 1a in axis AX direction to only displacement distance D of X2 direction 1 in figure.
At this moment, the temperature of installation surface PS is still room temperature and does not rise, and thermal expansion does not occur for the first fixed station 3 and the second fixed station 4 lower end separately that therefore contact with installation surface PS.Therefore the distance between the first fixed station 3, contacting with installation surface PS and the second fixed station 4 lower end is separately constant.On the other hand, due to the thermal expansion of housing 2, by the first fixed station 3 and the distance between the second fixed station 4 upper end separately that set bolt 6a is fixed on housing 2, expand.Therefore, the first fixed station 3 and the second fixed station 4 are respectively because the thermal expansion of housing 2 deforms.
On the other hand, according to the hydrostatic gas-lubricated bearing main shaft of present embodiment, owing to being configured in than the first fixed station, further from locational second fixed station of installed surface, comprised the straight line guide that can guide point-blank along axis direction, the displacement of the housing 2 that therefore thermal expansion can be caused guides point-blank along axis direction.
Therefore the displacement of the housing 2, producing because of thermal expansion in axis AX direction is almost all absorbed to moving of the second fixed station 4 one sides (arrow X1 direction in figure) by straight line guide 5.Can suppress thus the change in location of installed surface 1a in axis AX direction.
In addition, because the displacement of the housing that thermal expansion can be caused is guided point-blank along axis AX direction, therefore can suppress the second distortion of fixed station 4 in short transverse.Can suppress thus the change in location of installed surface 1a in short transverse.
In addition, owing to can suppressing the second fixed station 4, in short transverse, be out of shape, therefore can make housing 2 and installation surface PS keep almost parallel by the first fixed station 3 and the second fixed station 4.Therefore housing 2 can be with respect to installation surface PS and parallel.Can suppress thus the situation that installed surface 1a tilts with respect to installation surface PS.
Owing to can suppressing as described above the change in location of installed surface 1a, the change in location that therefore can suppress to process object.Can implement high-precision processing thus.
In addition, according to the hydrostatic gas-lubricated bearing main shaft of present embodiment, the second fixed station 4 has: be fixed on the fixed part 41 on installation surface PS; And be arranged on housing 2 and can with respect to fixed part 41, make the support unit 42 relatively moving by straight line guide 5.The displacement of the housing causing because of thermal expansion 2 can be guided point-blank along axis AX direction thus.
In addition, according to the hydrostatic gas-lubricated bearing main shaft of present embodiment, straight line guide 5 also can form with line slideway 51.Thus, can the displacement of the housing causing because of thermal expansion 2 be guided along axis AX direction enough line slideways 51 point-blank.
In addition, according to the hydrostatic gas-lubricated bearing main shaft of present embodiment, straight line guide 5 also can form with sliding bearing 52.Thus, can the displacement of the housing causing because of thermal expansion 2 be guided along axis AX direction enough sliding bearings 52 point-blank.
In addition, according to the hydrostatic gas-lubricated bearing main shaft of present embodiment, straight line guide 5 also can form with hydrostatic gas-lubricated bearing slide block 53.Thus, can the displacement of the housing causing because of thermal expansion 2 be guided along axis AX direction enough hydrostatic gas-lubricated bearing slide blocks 53 point-blank.
As shown in figure 14, when the variation of environment temperature or follow the rotation of rotating shaft 1 of hydrostatic gas-lubricated bearing main shaft and the heating that produces while making the temperature of housing 2 increase, housing 2 can deform and expand towards radially (arrow Y1 direction in figure).Now, housing 2 is centered by the axis AX of housing 2 and towards radial deformation.Therefore,, once housing 2 and the first fixed station 3 and the second fixed station 4 is fixing on the position of axis AX, housing 2 distortion diametrically just can not make the first fixed station 3 and second fixed station 4 displacement in short transverse.Therefore, the position of the set bolt 6a of the first fixed station 3 and the second fixed station 4 preferably and axis AX in sustained height, from reality, be that highly more to approach axis AX better.
(embodiment 2)
About embodiments of the present invention 2, unless otherwise specified, be exactly the structure identical with above-mentioned embodiment 1, therefore for identical key element, with identical symbol, represent and no longer repeat specification.
In embodiment 1, the structure that displacement that thermal expansion is caused discharges to the direction not exerting an influence has been described, but has also been applicable to also to suppress the structure of the addendum modification of thermal expansion itself.
Fig. 1 again, part or all of the component parts of the hydrostatic gas-lubricated bearing main shaft of present embodiment consists of the low material of thermal coefficient of expansion (low-thermal-expansion material).Specifically, the first fixed station 3 and the second fixed station 4 the most handy thermal coefficient of expansions are 8 * 10
-6material below/K forms.Particularly the second fixed station 4 the most handy thermal coefficient of expansions are 8 * 10
-6material below/K forms.As thermal coefficient of expansion, be 8 * 10
-6material below/K, such as available invar, pottery etc.
In addition, the first fixed station 3 and the second fixed station 4 also can have cooling body.Particularly the second fixed station 4 preferably has cooling body.
As shown in figure 15, have can be by making cold-producing medium realize cooling cooling body in internal flow for the second fixed station 4 of the variation 1 of the hydrostatic gas-lubricated bearing main shaft of present embodiment.The second fixed station 4 has supply port 4a, stream 4b and outlet 4c.At the two ends of being located at the stream 4b of the second fixed station 4 inside, configured to supply port 4a and the outlet 4c of the outside opening of the second fixed station 4.
Gas or liquid are as the cold-producing medium of supplying with from supply port 4a and by discharging from outlet 4c stream 4b.By making gas or liquid flow through stream 4b, make the second fixed station 4 cooling.
In addition, cooling body can be also fin.As shown in figure 16, the second fixed station 4 of the variation 2 of the hydrostatic gas-lubricated bearing main shaft of present embodiment has fin 4d on outer peripheral face.
Compare to illustrate below the action effect of the hydrostatic gas-lubricated bearing main shaft of present embodiment with comparative example.
As shown in figure 17, adopt the hydrostatic gas-lubricated bearing main shaft of the comparative example of present embodiment, the variation of environment temperature or follow hydrostatic gas-lubricated bearing main shaft rotating shaft 1 rotation and the heating that produces can make the first fixed station 3 and the second fixed station 4 thermal expansions occur and produce distortion.
When there is thermal expansion because temperature rises in the first fixed station 3 and the second fixed station 4, thermal expansion meeting make housing 2 take installation surface PS as benchmark upward (arrow Y2 direction in Fig. 2) mention.Result is, even if the first fixed station 3 and the second fixed station 4 are fixed on the position of the axis AX of housing 2, housing 2 is displacement distance D upward 2 also.Thereby make also displacement upward of installed surface 1a, so there is variation in the position of installed surface 1a.
On the other hand, while adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, because the second fixed station 4 use thermal coefficient of expansions are 8 * 10-
6material below/K forms, and therefore can suppress the thermal expansion of the second fixed station 4.The change in location that therefore, can suppress the installed surface 1a that the thermal expansion because of the second fixed station 4 causes.
In addition, while adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, by making gas flow enter stream 4b, the second fixed station 4 is cooling, the change in location of the installed surface 1a that therefore can cause by the thermal expansion suppressing by gas cooled because of the second fixed station.
In addition, while adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, by making liquid flow into stream 4b, the second fixed station 4 is cooling, the change in location of the installed surface 1a that therefore can cause by the thermal expansion suppressing by liquid cools because of the second fixed station 4.
In addition, while adopting the hydrostatic gas-lubricated bearing main shaft of present embodiment, the second fixed station 4 also has fin 4d, therefore can be by the change in location of the installed surface 1a that causes with the cooling thermal expansion suppressing because of the second fixed station 2 of fin 4d.
And low-thermal-expansion material and cooling body can and be used simultaneously.That is can be also, 8 * 10 with thermal coefficient of expansion
-6material below/K forms cooling body.The performance that can further play stably like this.
The respective embodiments described above can be appropriately combined.
Disclosed embodiment is example in all respects above, rather than limits.Scope of the present invention is not limited by above explanation, but is represented by claims, comprises and the meaning of claims equalization and all changes of doing within the scope of claim.
Industrial utilizability
The present invention is particularly useful for being fixed on the hydrostatic gas-lubricated bearing main shaft in installation surface.
Symbol description
1 rotating shaft
1a installed surface
2 housings
3 first fixed stations
4 second fixed stations
4a supply port
4b stream
4c outlet
4d fin
5 straight line guides
6a set bolt
6b arranges bolt
7 motors
7a rotor
7b stator
8 motor cover
9 encoders
10 bearing clearancees
11 workbench
12 axle bush pads
13 thrust plates
21 housing parts
21a the first housing parts
21b the second housing parts
21c circular shell parts
22 bearing sleeves
22a clutch shaft bearing sleeve
22b the second bearing sleeve
22c nozzle
23 coolant jackets
24 encoder covers
31 bearings are supplied with road with gas
32 bearings are discharged road with gas
33 cold-producing medium supply ports
34 refrigerant flow paths
35 cold-producing medium outlets
41 fixed parts
42 support units
51 line slideways
51a slide block
51b bearing bolt
51c track
52 sliding bearings
52a spindle unit
52b parts of bearings
52c lubricates part
53 hydrostatic gas-lubricated bearing slide blocks
53a mounting table portion
53b guide part
101 bearing of journals portions
102 thrust bearing divisions
CR rotary middle spindle
PS installation surface
Claims (9)
1. a hydrostatic gas-lubricated bearing main shaft, is the hydrostatic gas-lubricated bearing main shaft being fixed in installation surface (PS), it is characterized in that possessing:
Rotating shaft (1), this rotating shaft (1) has installed surface (1a) on end face;
Housing (2), this housing (2) is across surrounding the outer peripheral face of described rotating shaft (1) with the bearing clearance (10) of gas for supplying with bearing, and described bearing is used for supporting described rotating shaft (1) to make it rotation with gas; And
The first fixed station (3) and the second fixed station (4), this first fixed station (3) and the second fixed station (4) are spaced from each other and configure along axis (AX) direction of described housing (2), for described housing (2) is fixed on to described installation surface (PS)
Be configured in than described the first fixed station (3) and comprise the straight line guide (5) that can guide point-blank along described axis (AX) direction further from locational described second fixed station (4) of described installed surface (1a).
2. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described the second fixed station (4) has:
Fixed part (41), this fixed part (41) is fixed in described installation surface (PS); And
Support unit (42), it is upper that this support unit (42) is arranged on described housing (2), and can with respect to described fixed part (41), relatively move by described straight line guide (5).
3. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described straight line guide (5) consists of line slideway (51).
4. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described straight line guide (5) consists of sliding bearing (52).
5. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described straight line guide (5) consists of hydrostatic gas-lubricated bearing slide block (53).
6. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described the second fixed station (4) is 8 * 10 with thermal coefficient of expansion
-6material below/K forms.
7. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described the second fixed station (4) also possesses stream (4b) in inside,
By gas is flowed in described stream (4b), described the second fixed station (4) is cooling.
8. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described the second fixed station (4) also possesses stream (4b) in inside,
By liquid is flowed in described stream (4b), described the second fixed station (4) is cooling.
9. hydrostatic gas-lubricated bearing main shaft as claimed in claim 1, is characterized in that,
Described the second fixed station (4) also possesses fin (4d).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-143804 | 2011-06-29 | ||
| JP2011143804A JP5744645B2 (en) | 2011-06-29 | 2011-06-29 | Hydrostatic gas bearing spindle |
| PCT/JP2012/063890 WO2013001969A1 (en) | 2011-06-29 | 2012-05-30 | Hydrostatic gas bearing spindle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103648715A true CN103648715A (en) | 2014-03-19 |
| CN103648715B CN103648715B (en) | 2016-04-06 |
Family
ID=47423869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280032185.3A Expired - Fee Related CN103648715B (en) | 2011-06-29 | 2012-05-30 | Hydrostatic gas-lubricated bearing main shaft |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5744645B2 (en) |
| CN (1) | CN103648715B (en) |
| WO (1) | WO2013001969A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111097929A (en) * | 2018-10-25 | 2020-05-05 | 发那科株式会社 | Spindle device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5888663B2 (en) * | 2013-12-17 | 2016-03-22 | 株式会社安川電機 | Spindle motor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4770575A (en) * | 1986-06-13 | 1988-09-13 | Gebruder Honsberg Gmbh | Centering and chucking system |
| JP2000024853A (en) * | 1998-07-08 | 2000-01-25 | Mori Seiki Co Ltd | Machine tool |
| CN1579704A (en) * | 2003-08-12 | 2005-02-16 | 柯尼卡美能达精密光学株式会社 | Machining apparatus |
| JP2006263824A (en) * | 2005-02-23 | 2006-10-05 | Konica Minolta Opto Inc | Spindle device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003324897A (en) * | 2002-05-09 | 2003-11-14 | Murata Mach Ltd | Cooling device for drive motor |
| JP4672447B2 (en) * | 2005-06-08 | 2011-04-20 | 東芝機械株式会社 | Machine Tools |
| JP4959222B2 (en) * | 2006-05-15 | 2012-06-20 | 東芝機械株式会社 | Precision roll lathe saddle guide cooling device |
-
2011
- 2011-06-29 JP JP2011143804A patent/JP5744645B2/en not_active Expired - Fee Related
-
2012
- 2012-05-30 CN CN201280032185.3A patent/CN103648715B/en not_active Expired - Fee Related
- 2012-05-30 WO PCT/JP2012/063890 patent/WO2013001969A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4770575A (en) * | 1986-06-13 | 1988-09-13 | Gebruder Honsberg Gmbh | Centering and chucking system |
| JP2000024853A (en) * | 1998-07-08 | 2000-01-25 | Mori Seiki Co Ltd | Machine tool |
| CN1579704A (en) * | 2003-08-12 | 2005-02-16 | 柯尼卡美能达精密光学株式会社 | Machining apparatus |
| JP2006263824A (en) * | 2005-02-23 | 2006-10-05 | Konica Minolta Opto Inc | Spindle device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111097929A (en) * | 2018-10-25 | 2020-05-05 | 发那科株式会社 | Spindle device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013010159A (en) | 2013-01-17 |
| WO2013001969A1 (en) | 2013-01-03 |
| JP5744645B2 (en) | 2015-07-08 |
| CN103648715B (en) | 2016-04-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20200284352A1 (en) | Shaft Seal Assembly | |
| JP6647357B2 (en) | Assembly for providing electrical contact and apparatus including the assembly | |
| JP5484315B2 (en) | Rotary table device with cooling structure | |
| CN100485202C (en) | Hydrodynamic fluid film bearing | |
| US20140286599A1 (en) | Air bearing for use as seal | |
| JP2010529390A (en) | Radial foil bearing with sealing function | |
| US10634186B2 (en) | Ball bearing, spindle device, and machine tool | |
| JP2005127518A (en) | Radial type rotary joint | |
| TWI605207B (en) | Ball bearing assembly | |
| CN103648715A (en) | Hydrostatic gas bearing spindle | |
| JP5600958B2 (en) | Bearing device | |
| CN101639067A (en) | Scroll fluid machine | |
| CN104169580A (en) | Hermetic compressor and refrigeration device comprising same | |
| CN101371044A (en) | Vacuum pump | |
| KR102078494B1 (en) | Journal bearing and rolling machine | |
| JP6729304B2 (en) | Spindle device | |
| KR20150050259A (en) | Spindle structure of machine tool | |
| US10890212B2 (en) | Thermal management structure for a bearing assembly | |
| JP2008110426A (en) | Spindle device | |
| JP2018025183A (en) | Rolling bearing for turbocharger and detent mechanism | |
| JPH10225802A (en) | Main spindle device for machine tool | |
| JP4529129B2 (en) | Hydrostatic air bearing spindle | |
| WO2022118665A1 (en) | Spindle device | |
| KR20160060992A (en) | Air-Bearing Spindle Capable Of Tilting By Load In Machining | |
| JP2017192997A (en) | Spindle device of machine tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160406 Termination date: 20170530 |