CN103645342B - Multi-axis capacitive accelerometer and acceleration detection method - Google Patents
Multi-axis capacitive accelerometer and acceleration detection method Download PDFInfo
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- CN103645342B CN103645342B CN201310659158.5A CN201310659158A CN103645342B CN 103645342 B CN103645342 B CN 103645342B CN 201310659158 A CN201310659158 A CN 201310659158A CN 103645342 B CN103645342 B CN 103645342B
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Abstract
The invention provides a kind of multi-axis capacitive accelerometer and acceleration detection method, two Z axis structure sheafs of the Z axis accelerometer of described multi-axis capacitive accelerometer are respectively placed in XY axis accelerometer both sides, this structure can reduce the error that encapsulation deformation causes, thus improves the sensitivity of multi-axis capacitive accelerometer.
Description
Technical field
The present invention relates to a kind of micro electromechanical structure detecting acceleration, particularly relate to a kind of multi-axis capacitive and accelerate
Degree meter and acceleration detection method.
Background technology
Use micro electronmechanical (Micro-Electro-Mechanic System is called for short MEMS) that surface treatment makes
Inertial sensor is with silicon chip as matrix, the three-dimensional micromechanics prepared by repeatedly thin-film deposition and showing methods
Structure.Conventional film layer material includes: polysilicon, silicon nitride, silicon dioxide and metal.Typical work
Skill step includes: substrate prepares, and once oxidation forms insulating barrier, deposits ground floor polysilicon, etches polycrystalline
Silicon forms electrode and interconnection line, and secondary oxidation forms sacrifice layer, and oxide layer etching forms through hole, deposits second
Layer polysilicon, deposited metal, etching sheet metal forms interconnection line, and etching of second layer polysilicon forms machinery
Structure graph, finally removes sacrifice layer and forms movable structure unit.
Accelerometer, i.e. acceleration induction device, be a kind of electronic equipment that can measure acceleration, be microcomputer
One of device commonly used by electricity (MEMS) inertial sensor.Acceleration induction device be mainly used in location sensitive,
Displacement sensing or kinestate sensing etc..As, mobile phone uses acceleration induction device, it is possible to detection
To the laying state of mobile phone, keep flat or inclination etc., start different programs to reach certain according to state
Effect, for another example, may be used on notebook computer, detects the moving state of notebook, and according to these
Data, system can select to close hard disk intelligently still allows it continue to run with, and so can farthest protect
Protect owing to vibration, the working environment such as jolted, or imprudence have fallen the hard disk infringement that computer is caused,
The farthest data inside protection.Another one purposes is exactly currently used digital camera and video camera
In be also adopted by acceleration transducer, the vibration of the hand in time detecting shooting, and according to these vibrations from
The focusing of dynamic regulation camera.
Accelerometer mainly includes twin-axis accelerometer and three axis accelerometer.Twin-axis accelerometer detection X-axis
Accekeration with Y direction.Adding of three axis accelerometer detection X-axis, Y-axis and three directions of Z axis
Velocity amplitude, wherein, it is mutual that X-axis acts on two parallel with principal plane with Y-axis accelerometer for detection
Acceleration on orthogonal direction, Z axis accelerometer acts on and adding in principal plane vertical direction for detection
Speed.Generally, accelerometer is mainly by movable mass, fixed anchor point, elastic construction and fixed electrode etc.
Composition.Wherein, elastic construction one end is connected with fixed anchor point, and the other end is connected with movable mass, fixing
Variable capacitance is formed between electrode and movable mass.The shape when external acceleration acts on movable mass
Becoming inertia force, this inertia force forms displacement to movable mass, and capacitive accelerometer is fixing by sensing
Capacitance variations between electrode and movable mass detects displacement variable, so that it is determined that external acceleration.
The referring mainly to of multi-axis capacitive accelerometer indicates: sensitivity, the linearity, temperature drift and anti-impact
Hit ability.But, practice finds, the temperature drift of current multi-axis capacitive accelerometer and anti-impact
The ability performance of hitting still can not meet requirement.
Summary of the invention
It is an object of the invention to, it is provided that a kind of have stronger Stress Release ability and less temperature drift
Multi-axis capacitive accelerometer.
For solving above-mentioned technical problem, the present invention provides a kind of multi-axis capacitive accelerometer, including substrate with
And XY axle construction layer, described XY axle construction layer include movable mass, center anchor point, elastic construction and
Multiple detecting electrodes, the plurality of detecting electrode for detecting the acceleration of X-direction and Y-direction, described can
Kinoplaszm gauge block is connected with center anchor point and elastic construction, and described multi-axis capacitive accelerometer also includes respectively
It is positioned at two Z axis structure sheafs of XY axle construction layer both sides.
Optionally, in described multi-axis capacitive accelerometer, each described Z axis structure sheaf all includes can
Kinoplaszm gauge block, fixed anchor point, elastic construction and two fixed electrodes, said two fixed electrode is fixed on
On the surface of described substrate, described elastic construction is connected with described fixed anchor point and movable mass.
Optionally, in described multi-axis capacitive accelerometer, two of each described Z axis structure sheaf are solid
Identical and about described Z axis structure sheaf the elastic construction of the structure of fixed electrode is symmetrical.
Optionally, in described multi-axis capacitive accelerometer, each described Z axis structure sheaf can kinoplaszm
The barycenter of gauge block is not on the elastic construction of described Z axis structure sheaf.
Optionally, in described multi-axis capacitive accelerometer, the elastic knot of one of them Z axis structure sheaf
Movable mass on the left of the elastic construction of the quality of the movable mass on the left of structure and another Z axis structure sheaf
Identical in quality, the quality of the movable mass on the right side of the elastic construction of one of them Z axis structure sheaf described with
Movable mass on the right side of the elastic construction of another Z axis structure sheaf described identical in quality.
Optionally, in described multi-axis capacitive accelerometer, in one of them Z axis structure sheaf away from
The fixed electrode of heart anchor point is electrically connected with the fixed electrode of close center anchor point in another Z axis structure sheaf,
In one of them Z axis structure sheaf described, the fixed electrode near center anchor point is remote with another Z axis structure sheaf
Fixed electrode from center anchor point is electrically connected.
Optionally, in described multi-axis capacitive accelerometer, the movable mass of described Z axis structure sheaf,
Fixed anchor point and elastic construction are the structures integrally formed by etching and fumigation process, described Z axis structure
The movable mass of movable mass, fixed anchor point and elastic construction and the described XY axle construction layer of layer,
Center anchor point, elastic construction and detecting electrode together utilize second layer polysilicon to be formed.
Optionally, in described multi-axis capacitive accelerometer, described multi-axis capacitive accelerometer also wraps
Include and be formed at described suprabasil wiring, the fixed electrode of described Z axis structure sheaf and described suprabasil wiring
Ground floor polysilicon is utilized to be formed.
Optionally, in described multi-axis capacitive accelerometer, described XY axle construction layer comprises eight altogether
Detecting electrode, described eight detecting electrodes are distributed in its surrounding centered by the anchor point of described center radially；
Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, for detecting the acceleration of X-direction
Degree；Four additional detecting electrode is symmetrically distributed in the both sides up and down of center anchor point, for detecting adding of Y-direction
Speed.
Optionally, in described multi-axis capacitive accelerometer, each described detecting electrode all includes first
Detecting electrode and two the second detecting electrodes, described first detecting electrode can kinoplaszm with XY axle construction layer
Gauge block is connected, and said two the second detecting electrode is fixed on described substrate surface.
Optionally, in described multi-axis capacitive accelerometer, described XY axle construction layer also includes fixing
In described suprabasil multiple scotch, the plurality of scotch is uniformly distributed in described XY axle construction layer
The surrounding of movable mass is also connected with the movable mass of described XY axle construction layer.
According to the another side of the present invention, also provide for the detection of a kind of multi-axis capacitive accelerometer degree of being accelerated
Method, when existing along the external acceleration of Z axis, the movable mass of two Z axis structure sheafs rotating around with
Its elastic construction connected does torsional movement；The movable mass of one of them Z axis structure sheaf is tied with this Z axis
Capacitance between the fixed electrode away from center anchor point of structure layer is C1, another Z axis structure sheaf movable
Capacitance between the fixed electrode of the close center anchor point of mass and this Z axis structure sheaf is C2, described its
In a Z axis structure sheaf movable mass and this Z axis structure sheaf close center anchor point fixed electrode it
Between capacitance be C3, the movable mass of another Z axis structure sheaf described and this Z axis structure sheaf away from
Capacitance between the fixed electrode of center anchor point is C4, by detect described capacitance C3 and C4 sum with
The difference of described capacitance C1 and C2 sum determines the external acceleration of Z axis.
The present invention also provides for a kind of multi-axis capacitive accelerometer, including substrate and XY axle construction layer, described
XY axle construction layer includes movable mass, center anchor point, elastic construction and multiple detecting electrode, described many
Individual detecting electrode is for detecting the acceleration of X-direction and Y-direction, described movable mass and described central anchor
Point is connected with elastic construction, and described elastic construction is fan-folded girder construction, described multi-axis capacitive acceleration
Meter also includes two the Z axis structure sheafs laying respectively at XY axle construction layer both sides.
The present invention also provides for a kind of multi-axis capacitive accelerometer, including substrate and XY axle construction layer, described
XY axle construction layer includes movable mass, center anchor point, elastic construction and multiple detecting electrode, described many
Individual detecting electrode is for detecting the acceleration of X-direction and Y-direction, described movable mass and described central anchor
Point is connected with elastic construction, and described center anchor point is for having structure jaggy, described multi-axis capacitive acceleration
Meter also includes two the Z axis structure sheafs laying respectively at XY axle construction layer both sides.
The present invention also provides for a kind of multi-axis capacitive accelerometer, including substrate and XY axle construction layer, described
XY axle construction layer includes movable mass, center anchor point, elastic construction and multiple detecting electrode, described many
Individual detecting electrode is for detecting the acceleration of X-direction and Y-direction, described movable mass and described central anchor
Point is connected with elastic construction, and described center anchor point is for having structure jaggy, and described elastic construction is fan-shaped folding
Stoplog structure, described multi-axis capacitive accelerometer also includes lay respectively at XY axle construction layer both sides two
Z axis structure sheaf.
Compared with prior art, two of the Z axis accelerometer of the multi-axis capacitive accelerometer of the present invention can
Kinoplaszm gauge block is respectively placed in XY axis accelerometer both sides, and about the asymmetric placement in center, i.e. each
The barycenter of the movable mass of described Z axis structure sheaf not on the elastic construction of described Z axis structure sheaf, XY
The Z axis movable mass wider portion of axis accelerometer side is near XY axis accelerometer, XY axle acceleration
The Z axis movable mass narrower part of meter opposite side is near XY axis accelerometer, and this structure can reduce encapsulation
The error that deformation causes, thus improve the sensitivity of multi-axis capacitive accelerometer.
It addition, in the multi-axis capacitive accelerometer of the present invention, the center anchor point of XY axis accelerometer uses band
The square of breach, different with the material thermal expansion coefficient of center anchor point due to substrate when reducing variations in temperature
And the stress produced, thus reduce the deformation of center anchor point, and then reduce temperature drift.
Additionally, during the elastic construction of the XY axis accelerometer of the multi-axis capacitive accelerometer of the present invention uses
Between the sector structure successively decreased of long, both sides, this sector structure has preferable Stress Release ability.Further,
Described sector structure length for the folded beam structure of traditional strip is shorter, so, is formed at
Suprabasil be used as wiring ground floor polysilicon can be without elastic construction immediately below, technique system can be reduced
The step impact on elastic construction performance formed due to bottom cloth line during work.
Accompanying drawing explanation
Fig. 1 is the overall schematic of the multi-axis capacitive accelerometer of the embodiment of the present invention one；
The schematic diagram of Fig. 2 a Shi Tu1Zhong center anchor point；
Fig. 2 b is the schematic diagram of another kind of center anchor point；
Fig. 3 is the schematic diagram of Fig. 1 Elastic structure；
Fig. 4 is the schematic diagram detecting electric capacity in Fig. 1；
Fig. 5 is the schematic diagram detecting bottom wiring corresponding to electric capacity in Fig. 1；
Fig. 6 is the overall schematic of the multi-axis capacitive accelerometer of the embodiment of the present invention two；
Along the schematic cross-section of straight line a when Fig. 7 is the substrate generation warpage of structure shown in Fig. 6；
Fig. 8 is the schematic diagram of Z axis structure sheaf in Fig. 6.
Detailed description of the invention
As stated in the Background Art, the temperature drift of existing multi-axis capacitive accelerometer and impact resistance
Performance still can not meet requirement.Study for a long period of time discovery through the applicant inventor, this is because traditional multiaxis
The Z axis acceleration structure of capacitive accelerometer, or use single movable mass, or use against
Two movable mass together, it can not reduce the impact of encapsulation iso-stress effectively.To this end, this
Two movable mass of bright Z axis accelerometer are respectively placed in XY axis accelerometer both sides, and about in
The asymmetric placement of the heart, i.e. the Z axis movable mass wider portion of XY axis accelerometer side is near XY axle
Accelerometer, the Z axis movable mass narrower part of XY axis accelerometer opposite side is near XY axle acceleration
Meter, this modes of emplacement can reduce the error that encapsulation deformation causes, thus improve multi-axis capacitive accelerometer
Sensitivity.
Applicant have also found that, the XY axle acceleration structure of traditional multi-axis capacitive accelerometer, rise and prop up
The center anchor point of support effect is the square of rule, the more difficult release of stress produced in its course of processing.To this end,
In the multi-axis capacitive accelerometer of the present invention, the center anchor point of XY axis accelerometer uses notched pros
Shape, produce owing to substrate is different with the material thermal expansion coefficient of center anchor point when reducing variations in temperature should
Power, thus reduce the deformation of center anchor point, and then reduce temperature drift.
Additionally, the elastic construction of traditional multi-axis capacitive accelerometer is typically the folded beam structure of strip,
Length is relatively long, and on the one hand impact resistance is more weak, on the other hand wiring (the electrode under elastic construction
And interconnection line) rigidity of elastic construction may be affected.To this end, the present invention provides a kind of multi-axis capacitive to add
Velometer, the elastic construction of its XY axis accelerometer uses the sector structure successively decreased in middle length, both sides, should
Sector structure has preferable Stress Release ability；And relative to traditional strip folded beam structure and
Saying that the length of this sector structure is shorter, so, being formed at the suprabasil ground floor polysilicon being used as wiring can
Immediately below without elastic construction, the step pair formed in technique manufacturing process can be reduced due to bottom cloth line
The impact of elastic construction performance.
Below in conjunction with schematic diagram, the present invention is described in more detail, which show the preferred of the present invention
Embodiment, it should be appreciated that those skilled in the art can revise invention described herein, and still realizes this
The advantageous effects of invention.Therefore, description below is appreciated that extensively knowing for those skilled in the art
Road, and it is not intended as limitation of the present invention.It should be noted that, accompanying drawing all use the form simplified very much and
All use non-ratio accurately, only in order to facilitate, to aid in illustrating lucidly the purpose of the embodiment of the present invention.
[embodiment one]
The multi-axis capacitive accelerometer of the present embodiment is that dual-axis capacitance type accelerometer, i.e. X and Y-axis accelerate
Degree meter.Fig. 1 is the overall schematic of the multi-axis capacitive accelerometer of the present embodiment.As it is shown in figure 1, institute
State multi-axis capacitive accelerometer and include substrate (not shown in figure 1) and XY axle construction layer, described XY axle
Structure sheaf includes movable mass 31, center anchor point 32, elastic construction 33 and detecting electrode 34a, 34b.
With continued reference to Fig. 1, in the present embodiment, XY axle construction layer 1a comprises eight detecting electrodes, eight inspections altogether
Surveying electrode and be symmetrically distributed in four drift angles of movable mass 31, this modes of emplacement effectively make use of chip face
Long-pending, be conducive to improving the sensitivity of accelerometer.Detailed, wherein four detecting electrode 34a are symmetrical
In the left and right sides of center anchor point 32, for detecting the acceleration of X-direction；Four additional detecting electrode 34b
It is symmetrically distributed in the both sides up and down of center anchor point 32, for detecting the acceleration of Y-direction.That is, described eight
Detecting electrode is distributed in its surrounding centered by center anchor point 32 radially.Certainly, the present invention does not limit
The quantity of detecting electrode and arrangement mode, also can arrange such as four groups detecting electrodes of other quantity and take it
Its mode is such as equidistantly arranged in center anchor point 32 around centered by center anchor point 32.
Fig. 2 a is the schematic diagram of the center anchor point of Fig. 1.As shown in Figure 2 a, the center of XY axle construction layer 1a
Anchor point 32 be shaped as the notched square in corner.Specifically, center anchor point 32 substantially in cross,
Cave inward at decussation point formation breach 41,42,43,44, described breach 41,42,43,44
Shape is identical, is all square.In practice, it has been found that owing to substrate is different from the material of center anchor point 32, phase
The thermal coefficient of expansion answered is the most different, and such as substrate is monocrystal silicon, and its thermal coefficient of expansion representative value is 2.5E-6
(1/K), center anchor point 32 is polysilicon, and its thermal coefficient of expansion representative value is 4.7E-6 (1/K), when different heat
When the material of the coefficient of expansion contacts with each other and temperature changes, then can produce stress, thus produce deformation.
The multi-axis capacitive accelerometer of the present embodiment uses notched central anchor dot structure, and this breach is conducive to releasing
Put stress, thus reduce deformation, and then reduce temperature drift.It is understood that the central anchor of the present invention
The shape of point is not limited to cross, and other notched shape is all comprised in the creation spirit of the present invention
In the range of.Such as, the shape of center anchor point 32 ' is similarly the notched square in corner, breach 41 ',
42 ', 43 ', 44 ' is the most trapezoidal, as shown in Figure 2 b, also can realize discharging the purpose of stress.
Fig. 3 is the schematic diagram of Fig. 1 Elastic structure.As it is shown on figure 3, the elastic knot of XY axle construction layer 1a
Structure 33 is the fan-folded girder construction that centre is grown, successively decrease in both sides.On the one hand this fan-folded girder construction has
Preferably Stress Release ability, on the other hand under conditions of not affecting elastic construction rigidity, fan-folded beam
Structure entire length can be shorter than traditional strip folded beam structure length, so, and elastic construction 33 layout
Time can walk around the wiring in substrate 10, the wiring of the most described elastic construction 33 and its bottom is staggered setting,
That is, be used as the ground floor polysilicon of wiring can be not via elastic construction 33 immediately below, thus be greatly reduced
The step formed due to bottom cloth line in the technique manufacturing process impact on elastic construction rigidity.
Fig. 4 is the schematic diagram detecting electric capacity in Fig. 1.Shown in Fig. 1 and Fig. 4, often group detecting electrode bag
Include: the first detecting electrode 61 and the second detecting electrode 62 and 63.First detecting electrode 61 and movable quality
Block 31 is connected, and movable mass 31 is connected with center anchor point 32 and elastic construction 33, the second detection electricity
Pole 62 and 63 is individually fixed on substrate 10 surface.When by the acceleration of Y-direction, the first detection electricity
Move together with movable mass 31 in pole 61, thus the first detecting electrode 61 and the second detecting electrode 62 and
Two capacitances are done difference processing by output circuit by the capacitance between 63 one increase, a reduction
Corresponding acceleration can be drawn.Output circuit structure and difference processing method are techniques well known,
Do not repeat them here.
In the present embodiment, described multi-axis capacitive accelerometer also includes multiple scotch 35, is uniformly distributed in
The surrounding of described movable mass 31 is also connected with described movable mass 31.It is also preferred that the left comprise four altogether
Scotch 35, four scotch 35 are symmetrically distributed in four drift angles of multi-axis capacitive accelerometer, are used for subtracting
The little external impact force impact on multi-axis capacitive accelerometer, it is to avoid affect its sensitivity.
In the present embodiment, described multi-axis capacitive accelerometer also includes the wiring (electricity being formed in substrate 10
Pole and interconnection line).Substrate 10 e.g. silicon base, the movable mass 31 being wherein illustrated in Fig. 1, in
Heart anchor point 32, elastic construction 33, detecting electrode 34a, 34b can be one of the forming by etch process
Structure.Additionally, XY axle construction layer also includes metal level (not shown), in order to the sensing letter that will produce
Number it is transferred to the wiring in substrate 10.
Concrete, described multi-axis capacitive accelerometer can be included by following processing step: substrate prepares,
Once oxidation forms insulating barrier, deposits ground floor polysilicon, and etching of first layer polysilicon forms electrode and interconnection
Line, secondary oxidation forms sacrifice layer, and sacrifice layer etching forms through hole, deposits second layer polysilicon, deposit gold
Belonging to layer, etching sheet metal forms interconnection line, and etching of second layer polysilicon forms frame for movement figure i.e. structure
Layer, finally removes sacrifice layer and forms movable structure unit i.e. accelerometer.
Fig. 5 is to detect the bottom line schematic diagram that electric capacity is corresponding in Fig. 1.Shown in Fig. 1 and Fig. 5, this
In embodiment, center anchor point 32 is positioned at center, and four scotch 35 are uniformly distributed in corner, center anchor point
32 are connected with the scotch 35 being positioned at corner.Specifically, the wiring in described substrate 10 only includes four
Motion block line 35 ' and four group of second detecting electrode line 62 ', 63 ' (totally eight the second detecting electrode lines).
Center anchor point 32 is all formed by second layer polysilicon with four scotch 35, the second detecting electrode line 62 ',
63 ' are all formed by ground floor polysilicon with scotch line 35 '.Four scotch 35 are by four scotch
Line 35 ' is connected with center anchor point 32, is substantially distributed in substrate 10 in X-shaped.Second detecting electrode line
62 ' and second detecting electrode line 63 ' be all to be bent into the broken line of three sections, often organize the second detecting electrode line 62 ',
63 ' the parallel substrate blank spaces being distributed between two scotch lines 35 ', the second detecting electrode line 62 ' exists
Inner side, the second detecting electrode line 63 ' is positioned at the second detecting electrode line 62 ' outside, and elastic construction 33 is the most right
Outside in the second detecting electrode line 63 '.That is, the line of the second detecting electrode 62 and 63 is not distributed in bullet
Property structure 33 immediately below, the elastic construction above line can be avoided in technique manufacturing process to form step, from
And eliminate its impact on elastic construction rigidity.
[embodiment two]
The multi-axis capacitive accelerometer of the present embodiment is three axle capacitive accelerometers, i.e. include as implemented
X described in example one and Y-axis accelerometer, also include Z axis accelerometer.The most as shown in Figure 6, described
X and Y-axis accelerometer include XY axle construction layer 1a, described Z axis accelerometer includes being positioned at XY axle
Torsional pendulum type Z axis structure sheaf 1b, 1c of structure sheaf 1a both sides, described XY axle construction layer 1a are overall in pros
Shape, described Z axis structure sheaf 1b, 1c entirety is rectangle, to save area as far as possible.
Along the schematic cross-section of straight line a when Fig. 7 is the substrate generation warpage of structure shown in Fig. 6, Fig. 8 is
The schematic diagram of Z axis structure sheaf 1b in Fig. 6.As shown in Figure 6 to 8, Z axis structure sheaf 1b, 1c include:
Movable mass 17,18, fixed anchor point 15b, 15c, elastic construction 16b, 16c, fixed electrode 11,12,
13、14。
With continued reference to Fig. 6, Fig. 7 and Fig. 8, fixed electrode 11,12,13,14 is individually fixed in substrate 10
On surface.Fixed electrode 11 is identical with fixed electrode 12 width, and about the elastic knot of Z axis structure sheaf 1b
Structure 16b is symmetrical.Fixed electrode 13 is identical with fixed electrode 14 width, and about Z axis accelerometer 1c's
Elastic construction 16c is symmetrical.Elastic construction 16b is connected with fixed anchor point 15b and movable mass 17, so,
Movable mass 17 can be floated on above substrate 10, between fixed electrode 11,12 and movable mass 17
Form variable capacitance；Being similar to, elastic construction 16c is connected with fixed anchor point 15c and movable mass 18,
So, movable mass 18 can be floated on above substrate 10, fixed electrode 13,14 and movable mass 18
Between formed variable capacitance.Described elastic construction 16b, 16c can be shell fragment or spring or and equivalence
Component.Movable mass 17,18 corresponding for Z axis structure sheaf 1b, 1c is by under fixed anchor point 15b, 15c
Ground floor polysilicon be electrically connected, fixed electrode 11 is electrically connected with fixed electrode 13, fixing electricity
Pole 12 is electrically connected with fixed electrode 14.
Preferably, the barycenter of the movable mass 17 of Z axis structure sheaf 1b not on elastic construction 16b, Z axis
The barycenter of the movable mass 18 of accelerometer 1c is not on elastic construction 16c.I.e., fixed anchor point 15b,
The movable mass width of the 15c left and right sides is different, thus the quality of correspondence is different.Z axis structure sheaf 1b's
On the left of the elastic construction 16c of the quality of the movable mass on the left of elastic construction 16b and Z axis structure sheaf 1c
Movable mass identical in quality, the movable mass on the right side of the elastic construction 16b of described Z axis structure sheaf 1b
Quality and the elastic construction 16c of described Z axis structure sheaf 1c on the right side of movable mass identical in quality.Also
That is, the Z axis movable mass wider portion on the left of XY axis accelerometer near XY axis accelerometer,
Z axis movable mass narrower part on the right side of XY axis accelerometer is near XY axis accelerometer.
The present embodiment also provides for the method for a kind of multi-axis capacitive accelerometer degree of being accelerated detection, works as existence
During along the external acceleration of Z axis, the movable mass of two Z axis structure sheafs is rotating around connected elasticity
Structure does torsional movement；The movable mass of one of them Z axis structure sheaf is solid with one of this Z axis structure sheaf
Capacitance between fixed electrode is C1, the movable mass of another Z axis structure sheaf and this Z axis structure sheaf
Capacitance between one fixed electrode is C2, the movable mass of one of them Z axis structure sheaf described with should
Capacitance between another fixed electrode of Z axis structure sheaf is C3, another Z axis structure sheaf described can
Capacitance between another fixed electrode of kinoplaszm gauge block and this Z axis structure sheaf is C4, described by detection
The difference of capacitance C3 and C4 sum and described capacitance C1 and C2 sum determines the external acceleration of Z axis.
Detailed, when there is the external acceleration along Z axis, then movable mass under the effect of inertia force
17,18 torsional movement can be done around elastic construction 16b, 16c.If external acceleration points to Z axis negative direction,
Then movable mass 17 is near fixed electrode 12, away from fixed electrode 11, correspondingly, movable mass 17
And the capacitance between fixed electrode 12 increases, the capacitance between movable mass 17 and fixed electrode 11
Reduce.Similarly, movable mass 18 is near fixed electrode 14, away from fixed electrode 13, correspondingly,
Capacitance between movable mass 18 and fixed electrode 14 increases, movable mass 18 and fixed electrode 13
Between capacitance reduce.Fixed electrode 11 is electrically connected with 13, and fixed electrode 12 and 14 is electrically
It is connected, if the capacitance C1 between movable mass 17 and fixed electrode 11 and movable mass 18 are with solid
Between fixed electrode 13, capacitance C2 sum is Ca, the electric capacity between movable mass 17 and fixed electrode 12
Between value C3 and movable mass 18 and fixed electrode 14, capacitance C4 sum is Cb, then both difference Δs
C=Cb-Ca=(C3+C4)-(C1+C2), can obtain external acceleration by detection Δ C.
In more detail, when encapsulating iso-stress and being bigger, substrate 10 may upwardly or downwardly warpage, with to
As a example by upper warpage, if the movable mass of Z axis accelerometer 17,18 is placed as shown in Figure 6, then can kinoplaszm
The capacitance variation amount Δ C3 that stress deformation between gauge block 17 and fixed electrode 12 causes is similar to can kinoplaszm
The capacitance variation amount Δ C2 that stress deformation between gauge block 18 and fixed electrode 13 causes；Similarly, may be used
The capacitance variation amount Δ C1 that stress deformation between kinoplaszm gauge block 17 and fixed electrode 11 causes is similar to can
The capacitance variation amount Δ C4 that stress deformation between kinoplaszm gauge block 18 and fixed electrode 14 causes, then Δ
C=Cb-Ca=((C3+ Δ C3)+(C4+ Δ C4)) ((C1+ Δ C1)+(C2+ Δ C2)) ≈ (C3+C4)-
(C1+C2)；The most above-mentioned placement can substantially eliminate the detection capacitance variation amount that basement warping causes.
The movable mass 17,18 of described Z axis structure sheaf, fixed anchor point 15b, 15c, elastic construction 16b,
(etching technics forms corresponding figure to the structure that 16c can be one of the forming by etching and fumigation process, smoked
Steam technique the sacrifice layer under movable mass is removed), can with the movable mass 31 of XY axle construction layer, in
Heart anchor point 32, elastic construction 33, detecting electrode 34a, 34b together utilize second layer polysilicon to be formed, institute
State fixed electrode 11,12,13,14 and suprabasil wiring is both and utilizes ground floor polysilicon to be formed, described
Fixed electrode 11 is with fixed electrode 13 by suprabasil fixed electrode line (not shown) electrically
Being connected, described fixed electrode 12 (is not shown in figure by suprabasil fixed electrode line with fixed electrode 14
Go out) electrically it is connected.Detailed, described fixed electrode 11,12,13,14 and fixed electrode line, the
Two detecting electrode lines 62 ', 63 ' and scotch line 35 ' are all formed by ground floor polysilicon.
It should be noted that each embodiment uses the mode gone forward one by one to describe in this specification, each embodiment
Stress is all the difference with other embodiments, and between each embodiment, identical similar portion is mutual
See.For the XY axle construction layer of capacitive accelerometer disclosed in embodiment two, due to
The XY axle construction layer of capacitive accelerometer disclosed in embodiment one is corresponding, so the comparison described is simple
Single, relevant part sees embodiment one corresponding part.
Foregoing description is only the description to present pre-ferred embodiments, not any limit to the scope of the invention
Fixed, any change that the those of ordinary skill in field of the present invention does according to the disclosure above content, modification, all belong to
Protection domain in claims.
Claims (38)
1. a multi-axis capacitive accelerometer, including substrate and XY axle construction layer, described XY axle construction
Layer includes movable mass, center anchor point, elastic construction and multiple detecting electrode, the plurality of detection electricity
Pole is for detecting the acceleration of X-direction and Y-direction, described movable mass and described center anchor point and elasticity
Structure is connected, it is characterised in that described multi-axis capacitive accelerometer also includes laying respectively at XY axle construction
Two Z axis structure sheafs of layer both sides；Wherein, each described Z axis structure sheaf all includes movable mass, consolidates
Determining anchor point, elastic construction and two fixed electrodes, said two fixed electrode is fixed in described substrate,
The elastic construction of described Z axis structure sheaf is connected with fixed anchor point and the movable mass of described Z axis structure sheaf；
The structure of two fixed electrodes of each described Z axis structure sheaf is identical and elasticity about described Z axis structure sheaf
Symmetrical configuration；The barycenter of the movable mass of each described Z axis structure sheaf is not at the bullet of described Z axis structure sheaf
In property structure；The quality of the movable mass on the left of the elastic construction of one of them Z axis structure sheaf and another Z
Movable mass on the left of the elastic construction of axle construction layer identical in quality, one of them Z axis structure sheaf described
Elastic construction on the right side of the quality of movable mass and the elastic construction of another Z axis structure sheaf on the right side of can
Kinoplaszm gauge block identical in quality.
2. multi-axis capacitive accelerometer as claimed in claim 1, it is characterised in that one of them Z axis
Away from fixed electrode and the fixing near center anchor point in another Z axis structure sheaf of center anchor point in structure sheaf
Electrode is electrically connected, near fixed electrode and another Z of center anchor point in one of them Z axis structure sheaf described
In axle construction layer, the fixed electrode away from center anchor point is electrically connected.
3. multi-axis capacitive accelerometer as claimed in claim 1, it is characterised in that described Z axis structure
Movable mass, fixed anchor point and the elastic construction of layer is the knot integrally formed by etching and fumigation process
Structure, movable mass, fixed anchor point and the elastic construction of described Z axis structure sheaf and described XY axle construction
Movable mass, center anchor point, elastic construction and the detecting electrode of layer together utilize second layer polysilicon shape
Become.
4. multi-axis capacitive accelerometer as claimed in claim 1, it is characterised in that described multiaxis electric capacity
Formula accelerometer also includes being formed at described suprabasil wiring, the fixed electrode of described Z axis structure sheaf and institute
Stating suprabasil wiring utilizes ground floor polysilicon to be formed.
5. multi-axis capacitive accelerometer as claimed in claim 1, it is characterised in that described XY axle is tied
Structure layer includes that eight detecting electrodes, described eight detecting electrodes divide centered by the anchor point of described center radially
It is distributed in its surrounding；Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, are used for detecting X
The acceleration in direction；Four additional detecting electrode is symmetrically distributed in the both sides up and down of center anchor point, is used for detecting
The acceleration of Y-direction.
6. multi-axis capacitive accelerometer as claimed in claim 5, it is characterised in that each described detection
Electrode all includes the first detecting electrode and two the second detecting electrodes, described first detecting electrode and described XY
The movable mass of axle construction layer is connected, and said two the second detecting electrode is fixed in described substrate.
7. multi-axis capacitive accelerometer as claimed in claim 1, it is characterised in that described XY axle is tied
Structure layer also includes being fixed on described suprabasil multiple scotch, and the plurality of scotch is uniformly distributed in described
The surrounding of the movable mass of XY axle construction layer is also connected with the movable mass of described XY axle construction layer.
8. utilize the method that multi-axis capacitive accelerometer degree of being accelerated as claimed in claim 2 detects,
It is characterized in that, when there is the external acceleration along Z axis, the movable mass of two Z axis structure sheafs divides
Do not do torsional movement around connected elastic construction；The movable mass of one of them Z axis structure sheaf and this Z
Capacitance between the fixed electrode away from center anchor point of axle construction layer is C1, another Z axis structure sheaf
Capacitance between the fixed electrode of the close center anchor point of movable mass and this Z axis structure sheaf is C2, institute
State the fixing electricity of the movable mass of one of them Z axis structure sheaf and the close center anchor point of this Z axis structure sheaf
Capacitance between pole is C3, the movable mass of another Z axis structure sheaf described and this Z axis structure sheaf
Be C4 away from the capacitance between the fixed electrode of center anchor point, by detect described capacitance C3 Yu C4 it
And determine the external acceleration of Z axis with the difference of described capacitance C1 Yu C2 sum.
9. a multi-axis capacitive accelerometer, including substrate and XY axle construction layer, described XY axle construction
Layer includes movable mass, center anchor point, elastic construction and multiple detecting electrode, the plurality of detection electricity
Pole is for detecting the acceleration of X-direction and Y-direction, described movable mass and described center anchor point and elasticity
Structure is connected, it is characterised in that described elastic construction is fan-folded girder construction, and described multi-axis capacitive adds
Velometer also includes two the Z axis structure sheafs laying respectively at XY axle construction layer both sides；Wherein, each described Z
Axle construction layer all includes movable mass, fixed anchor point, elastic construction and two fixed electrodes, described two
Individual fixed electrode is fixed in described substrate, the elastic construction of described Z axis structure sheaf and described Z axis structure sheaf
Fixed anchor point be connected with movable mass；The structure phase of two fixed electrodes of each described Z axis structure sheaf
Same and about described Z axis structure sheaf elastic construction is symmetrical；The movable mass of each described Z axis structure sheaf
Barycenter not on the elastic construction of described Z axis structure sheaf；The elastic construction of one of them Z axis structure sheaf is left
The matter of the movable mass on the left of the elastic construction of the quality of the movable mass of side and another Z axis structure sheaf
Measure identical, the quality of the movable mass on the right side of the elastic construction of one of them Z axis structure sheaf described and another
Movable mass on the right side of the elastic construction of individual Z axis structure sheaf identical in quality.
10. multi-axis capacitive accelerometer as claimed in claim 9, it is characterised in that described multiaxis electricity
Appearance formula accelerometer also includes being formed at described suprabasil wiring, the elastic construction of described XY axle construction layer
Stagger setting with described wiring.
11. multi-axis capacitive accelerometers as claimed in claim 9, it is characterised in that one of them Z
Away from fixed electrode and the consolidating near center anchor point in another Z axis structure sheaf of center anchor point in axle construction layer
Fixed electrode is electrically connected, in one of them Z axis structure sheaf described near the fixed electrode of center anchor point and another
In individual Z axis structure sheaf, the fixed electrode away from center anchor point is electrically connected.
12. multi-axis capacitive accelerometers as claimed in claim 9, it is characterised in that described Z axis is tied
The movable mass of structure layer, fixed anchor point and elastic construction are integrally formed by etching and fumigation process
Structure, movable mass, fixed anchor point and the elastic construction of described Z axis structure sheaf is tied with described XY axle
The movable mass of structure layer, center anchor point, elastic construction and detecting electrode together utilize second layer polysilicon
Formed.
13. multi-axis capacitive accelerometers as claimed in claim 9, it is characterised in that described multiaxis electricity
Appearance formula accelerometer also includes being formed at described suprabasil wiring, the fixed electrode of described Z axis structure sheaf with
Described suprabasil wiring utilizes ground floor polysilicon to be formed.
14. multi-axis capacitive accelerometers as claimed in claim 9, it is characterised in that described XY axle
Structure sheaf includes eight detecting electrodes, described eight detecting electrodes centered by the anchor point of described center radially
It is distributed in its surrounding；Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, are used for detecting X
The acceleration in direction；Four additional detecting electrode is symmetrically distributed in the both sides up and down of center anchor point, is used for detecting
The acceleration of Y-direction.
15. multi-axis capacitive accelerometers as claimed in claim 14, it is characterised in that each described inspection
Surveying electrode and all include the first detecting electrode and two the second detecting electrodes, described first detecting electrode is with described
The movable mass of XY axle construction layer is connected, and said two the second detecting electrode is fixed in described substrate.
16. multi-axis capacitive accelerometers as claimed in claim 9, it is characterised in that described XY axle
Structure sheaf also includes being fixed on described suprabasil multiple scotch, and the plurality of scotch is uniformly distributed in institute
State the surrounding of the movable mass of XY axle construction layer and be connected with the movable mass of described XY axle construction layer.
17. utilize the side that multi-axis capacitive accelerometer degree of being accelerated as claimed in claim 11 detects
Method, it is characterised in that when there is the external acceleration along Z axis, the movable quality of two Z axis structure sheafs
Block does torsional movement rotating around connected elastic construction；The movable mass of one of them Z axis structure sheaf
And the capacitance between the fixed electrode away from center anchor point of this Z axis structure sheaf is C1, another Z axis is tied
Capacitance between the fixed electrode of the movable mass of structure layer and the close center anchor point of this Z axis structure sheaf is
The close center anchor point of C2, the movable mass of one of them Z axis structure sheaf described and this Z axis structure sheaf
Capacitance between fixed electrode is C3, and the movable mass of another Z axis structure sheaf described is tied with this Z axis
Capacitance between the fixed electrode away from center anchor point of structure layer is C4, by detecting described capacitance C3
With the external acceleration that the difference of C4 sum with described capacitance C1 with C2 sum determines Z axis.
18. 1 kinds of multi-axis capacitive accelerometers, including substrate and XY axle construction layer, described XY axle construction
Layer includes movable mass, center anchor point, elastic construction and multiple detecting electrode, the plurality of detection electricity
Pole is for detecting the acceleration of X-direction and Y-direction, described movable mass and described center anchor point and elasticity
Structure is connected, it is characterised in that described center anchor point is for having structure jaggy, and described multi-axis capacitive adds
Velometer also includes two the Z axis structure sheafs laying respectively at XY axle construction layer both sides；Wherein, each described Z
Axle construction layer all includes movable mass, fixed anchor point, elastic construction and two fixed electrodes, described two
Individual fixed electrode is fixed in described substrate, the elastic construction of described Z axis structure sheaf and described Z axis structure sheaf
Fixed anchor point be connected with movable mass；The structure phase of two fixed electrodes of each described Z axis structure sheaf
Same and about described Z axis structure sheaf elastic construction is symmetrical；The movable mass of each described Z axis structure sheaf
Barycenter not on the elastic construction of described Z axis structure sheaf；The elastic construction of one of them Z axis structure sheaf is left
The matter of the movable mass on the left of the elastic construction of the quality of the movable mass of side and another Z axis structure sheaf
Measure identical, the quality of the movable mass on the right side of the elastic construction of one of them Z axis structure sheaf described and another
Movable mass on the right side of the elastic construction of individual Z axis structure sheaf identical in quality.
19. multi-axis capacitive accelerometers as claimed in claim 18, it is characterised in that described central anchor
Point is in cross, and cave inward at its decussation point formation breach.
20. multi-axis capacitive accelerometers as claimed in claim 19, it is characterised in that described breach is
Square breach or trapeze cut.
21. multi-axis capacitive accelerometers as claimed in claim 18, it is characterised in that one of them Z
Away from fixed electrode and the consolidating near center anchor point in another Z axis structure sheaf of center anchor point in axle construction layer
Fixed electrode is electrically connected, in one of them Z axis structure sheaf described near the fixed electrode of center anchor point and another
In individual Z axis structure sheaf, the fixed electrode away from center anchor point is electrically connected.
22. multi-axis capacitive accelerometers as claimed in claim 18, it is characterised in that described Z axis is tied
The movable mass of structure layer, fixed anchor point and elastic construction are integrally formed by etching and fumigation process
Structure, movable mass, fixed anchor point and the elastic construction of described Z axis structure sheaf is tied with described XY axle
The movable mass of structure layer, center anchor point, elastic construction and detecting electrode together utilize second layer polysilicon
Formed.
23. multi-axis capacitive accelerometers as claimed in claim 18, it is characterised in that described multiaxis electricity
Appearance formula accelerometer also includes being formed at described suprabasil wiring, the fixed electrode of described Z axis structure sheaf with
Described suprabasil wiring utilizes ground floor polysilicon to be formed.
24. multi-axis capacitive accelerometers as claimed in claim 19, it is characterised in that described XY axle
Structure sheaf includes eight detecting electrodes, described eight detecting electrodes centered by the anchor point of described center radially
It is distributed in its surrounding；Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, are used for detecting X
The acceleration in direction；Four additional detecting electrode is symmetrically distributed in the both sides up and down of center anchor point, is used for detecting
The acceleration of Y-direction.
25. multi-axis capacitive accelerometers as claimed in claim 24, it is characterised in that each described inspection
Surveying electrode and all include the first detecting electrode and two the second detecting electrodes, described first detecting electrode is with described
The movable mass of XY axle construction layer is connected, and said two the second detecting electrode is fixed in described substrate.
26. multi-axis capacitive accelerometers as claimed in claim 19, it is characterised in that described XY axle
Structure sheaf also includes being fixed on described suprabasil multiple scotch, and the plurality of scotch is uniformly distributed in institute
State the surrounding of the movable mass of XY axle construction layer and be connected with the movable mass of described XY axle construction layer.
27. utilize the side that multi-axis capacitive accelerometer degree of being accelerated as claimed in claim 21 detects
Method, it is characterised in that when there is the external acceleration along Z axis, the movable quality of two Z axis structure sheafs
Block does torsional movement rotating around connected elastic construction；The movable mass of one of them Z axis structure sheaf
And the capacitance between the fixed electrode away from center anchor point of this Z axis structure sheaf is C1, another Z axis is tied
Capacitance between the fixed electrode of the movable mass of structure layer and the close center anchor point of this Z axis structure sheaf is
The close center anchor point of C2, the movable mass of one of them Z axis structure sheaf described and this Z axis structure sheaf
Capacitance between fixed electrode is C3, and the movable mass of another Z axis structure sheaf described is tied with this Z axis
Capacitance between the fixed electrode away from center anchor point of structure layer is C4, by detecting described capacitance C3
With the external acceleration that the difference of C4 sum with described capacitance C1 with C2 sum determines Z axis.
28. 1 kinds of multi-axis capacitive accelerometers, including substrate and XY axle construction layer, described XY axle construction
Layer includes movable mass, center anchor point, elastic construction and multiple detecting electrode, the plurality of detection electricity
Pole is for detecting the acceleration of X-direction and Y-direction, described movable mass and described center anchor point and elasticity
Structure is connected, it is characterised in that described center anchor point is for having structure jaggy, and described elastic construction is fan
Shape folded beam structure, described multi-axis capacitive accelerometer also includes laying respectively at XY axle construction layer both sides
Two Z axis structure sheafs；Wherein, each described Z axis structure sheaf all include movable mass, fixed anchor point,
Elastic construction and two fixed electrodes, said two fixed electrode is fixed in described substrate, described Z axis
The elastic construction of structure sheaf is connected with fixed anchor point and the movable mass of described Z axis structure sheaf；Each described Z
Identical and about described Z axis structure sheaf the elastic construction of the structure of two fixed electrodes of axle construction layer is symmetrical；
The barycenter of the movable mass of each described Z axis structure sheaf is not on the elastic construction of described Z axis structure sheaf；
The quality of the movable mass on the left of the elastic construction of one of them Z axis structure sheaf and another Z axis structure sheaf
Elastic construction on the left of movable mass identical in quality, the elastic knot of one of them Z axis structure sheaf described
Movable mass on the right side of the elastic construction of the quality of the movable mass on the right side of structure and another Z axis structure sheaf
Identical in quality.
29. multi-axis capacitive accelerometers as claimed in claim 28, it is characterised in that described multiaxis electricity
Appearance formula accelerometer also includes being formed at described suprabasil wiring, the elastic construction of described XY axle construction layer
Stagger setting with described wiring.
30. multi-axis capacitive accelerometers as claimed in claim 28, it is characterised in that described central anchor
Point is in cross, and cave inward at its decussation point formation breach.
31. multi-axis capacitive accelerometers as claimed in claim 30, it is characterised in that described breach is
Square breach or trapeze cut.
32. multi-axis capacitive accelerometers as claimed in claim 28, it is characterised in that one of them Z
Away from fixed electrode and the consolidating near center anchor point in another Z axis structure sheaf of center anchor point in axle construction layer
Fixed electrode is electrically connected, in one of them Z axis structure sheaf described near the fixed electrode of center anchor point and another
In individual Z axis structure sheaf, the fixed electrode away from center anchor point is electrically connected.
33. multi-axis capacitive accelerometers as claimed in claim 28, it is characterised in that described Z axis is tied
The movable mass of structure layer, fixed anchor point and elastic construction are integrally formed by etching and fumigation process
Structure, movable mass, fixed anchor point and the elastic construction of described Z axis structure sheaf is tied with described XY axle
The movable mass of structure layer, center anchor point, elastic construction and detecting electrode together utilize second layer polysilicon
Formed.
34. multi-axis capacitive accelerometers as claimed in claim 28, it is characterised in that described multiaxis electricity
Appearance formula accelerometer also includes being formed at described suprabasil wiring, the fixed electrode of described Z axis structure sheaf with
Described suprabasil wiring utilizes ground floor polysilicon to be formed.
35. multi-axis capacitive accelerometers as claimed in claim 28, it is characterised in that described XY axle
Structure sheaf includes eight detecting electrodes, described eight detecting electrodes centered by the anchor point of described center radially
It is distributed in its surrounding；Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, are used for detecting X
The acceleration in direction；Four additional detecting electrode is symmetrically distributed in the both sides up and down of center anchor point, is used for detecting
The acceleration of Y-direction.
36. multi-axis capacitive accelerometers as claimed in claim 35, it is characterised in that each described inspection
Surveying electrode and all include the first detecting electrode and two the second detecting electrodes, described first detecting electrode is with described
The movable mass of XY axle construction layer is connected, and said two the second detecting electrode is fixed in described substrate.
37. multi-axis capacitive accelerometers as claimed in claim 28, it is characterised in that described XY axle
Structure sheaf also includes being fixed on described suprabasil multiple scotch, and the plurality of scotch is uniformly distributed in institute
State the surrounding of the movable mass of XY axle construction layer and be connected with the movable mass of described XY axle construction layer.
38. utilize the side that multi-axis capacitive accelerometer degree of being accelerated as claimed in claim 32 detects
Method, it is characterised in that when there is the external acceleration along Z axis, the movable quality of two Z axis structure sheafs
Block does torsional movement rotating around connected elastic construction；The movable mass of one of them Z axis structure sheaf
And the capacitance between the fixed electrode away from center anchor point of this Z axis structure sheaf is C1, another Z axis is tied
Capacitance between the fixed electrode of the movable mass of structure layer and the close center anchor point of this Z axis structure sheaf is
The close center anchor point of C2, the movable mass of one of them Z axis structure sheaf described and this Z axis structure sheaf
Capacitance between fixed electrode is C3, and the movable mass of another Z axis structure sheaf described is tied with this Z axis
Capacitance between the fixed electrode away from center anchor point of structure layer is C4, by detecting described capacitance C3
With the external acceleration that the difference of C4 sum with described capacitance C1 with C2 sum determines Z axis.
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| CN104392024B (en) * | 2014-10-31 | 2018-01-05 | 吉林大学 | The optimization method of fluid channel accelerometer induction cavity design parameter |
| US10078098B2 (en) | 2015-06-23 | 2018-09-18 | Analog Devices, Inc. | Z axis accelerometer design with offset compensation |
| JP7403069B2 (en) * | 2019-03-27 | 2023-12-22 | パナソニックＩｐマネジメント株式会社 | physical quantity sensor |
| CN110879303B (en) * | 2019-10-23 | 2022-01-04 | 杭州士兰微电子股份有限公司 | Inertial sensor and control method thereof |
| CN114509578A (en) * | 2020-10-29 | 2022-05-17 | 华为技术有限公司 | Accelerometer, inertial measurement unit IMU and electronic equipment |
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