CN103643075A - Nano-particle reinforced copper-based composite material and preparation method thereof - Google Patents

Nano-particle reinforced copper-based composite material and preparation method thereof Download PDF

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CN103643075A
CN103643075A CN201310632642.9A CN201310632642A CN103643075A CN 103643075 A CN103643075 A CN 103643075A CN 201310632642 A CN201310632642 A CN 201310632642A CN 103643075 A CN103643075 A CN 103643075A
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nano
base composites
copper
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molybdenum
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CN103643075B (en
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李晓
宋广平
卜凡雨
徐斌
楼白杨
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Jiaxing Yanzhi Network Technology Co ltd
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Zhejiang University of Technology ZJUT
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Abstract

The invention discloses a nano-particle reinforced copper-based composite material and a preparation method thereof. The size of a copper matrix grain is smaller than 20 microns in the copper-based composite material; the nano-particle reinforced phase is molybdenum carbide, or molybdenum carbide and molybdenum, or molybdenum carbide and carbon; the particle size of the nano-particle reinforced phase is smaller than 200nm; the mass percent of Mo in the copper-based composite material is 0.1-15%; the mass percent of C is smaller than 1%. The nano-particle reinforced copper-based composite material disclosed by the invention is prepared by adopting an electronic beam physical vapor deposition process. The nano-particle reinforced copper-molybdenum-carbon composite material prepared by the method has excellent mechanical property and electrical property, and adopted electronic beam physical vapor deposition process is simple, low in cost and easy to control.

Description

Cu-base composites of nano-particle reinforcement and preparation method thereof
Technical field
The present invention relates to Cu-base composites of a kind of nano-particle reinforcement and preparation method thereof, be specifically related to a kind of copper-molybdenum-carbon composite and preparation method of nano-particle reinforcement.
Background technology
Copper and Cu alloy material are a kind of important nonferrous materialss, owing to having excellent physical and mechanical properties, in fields such as electronic industries, obtain a wide range of applications.But along with the fast development of science and technology (the especially fast development of microelectronics industry), traditional copper and alloy thereof can not be taken into account due to electrical property and intensity, can not meet the demands.It is to take the advanced composite material that nanoparticle is second-phase that nano dispersion reinforced copper closes, because nanoparticle can hinder dislocation motion and Grain Boundary Sliding effectively, the mechanical property of material is improved, simultaneously can obviously not reduce specific conductivity, thereby solve preferably the problem that electrical property and intensity can not be taken into account.At present, the enhancing particle in this material has oxide compound, carbide, boride, nitride and refractory metal etc.Prepare the method for this material mainly by internal oxidation, powder metallurgy process and Mechanical Alloying etc.Internal oxidation is to utilize under hypoxia condition in Cu-Al alloy Al that selective oxidation occurs to form Al 2o 3technique.This technique is at present for the preparation of Cu-Al 2o 3the main technique of dispersion strengthening composites, the material property of preparation is good, but this technique also exists complex procedures, the cycle is long, cost is high shortcoming.Powder metallurgic method be utilize copper powder with strengthen particle according to a certain ratio be dry mixed or wet mixing condition under; through the mechanically mixing uniform mixed powder of mix particles that can be enhanced; sintering under moulding, vacuum or protective atmosphere condition, multiple pressure, resintering are prepared the technique of material.Although this technique can be prepared the matrix material that various size strengthen particle distribution, also exist the shortcoming that poor mechanical property, operation are many, cost is high of the matrix material of preparation.Mechanical Alloying is after adopting high energy ball mill that copper powder and enhancing mix particles is even, sintering under moulding, vacuum or protective atmosphere condition, the technique of press again, resintering being prepared material.Equally, also there is poor mechanical property, operation is many, cost is high shortcoming in this technique.In a word, about preparing nano dispersion reinforced Cu-base composites, all there is the problem that operation is many, the cycle is long, cost is high at present.Therefore, under this background, inventing a kind of matrix material of high-strength highly-conductive electrical property and operation is simple, cost is low preparation technology has great importance.
Summary of the invention
The object of this invention is to provide Cu-base composites of a kind of nano-particle reinforcement with excellent mechanical property, electrical property and preparation method thereof.
For achieving the above object, the present invention adopts following technical scheme:
The invention provides a kind of Cu-base composites of nano-particle reinforcement, in described Cu-base composites, copper matrix grain size is less than 20 μ m, and nano-particle reinforcement is molybdenum carbide or molybdenum carbide and molybdenum or molybdenum carbide and carbon mutually, and the particle size of nano-particle reinforcement phase is below 200nm; In described Cu-base composites, the quality percentage composition of Mo is 0.1-15%, and the quality percentage composition of C is below 1%.
The performance index of described Cu-base composites are as follows: yield strength R p0.2>=420MPa, tensile strength Rm>=480MPa, specific conductivity>=70%ICAS.
The present invention also provides a kind of preparation method of Cu-base composites of described nano-particle reinforcement, comprises the steps:
(1) a kind of in copper ingot material and molybdenum source, carbon source or two kinds are put in crucible respectively, and put isolating layer material on copper ingot material;
(2) vacuumize heated substrates;
(3) when vacuum tightness reaches 9 * 10 -2pa is following, substrate temperature reaches 500-800 ℃, opens substrate rotating device, makes substrate rotation, layer deposited isolating;
(4) open baffle plate, start deposition material;
(5) deposited, after substrate is cooling, taken off substrate, separation obtains settled layer material, is the Cu-base composites of nano-particle reinforcement.
In described step (1), molybdenum source or carbon source can be made into corresponding ingot and are placed in respectively crucible, or carbon is made to ingot, put molybdenum raw material be placed in same crucible at this above ingot.
Further, described carbon source is carbon target, or carbon dust, or anthracene powder.
Further, isolating layer material is selected from CaF 2or ZrO 2.
Further, in deposition process, substrate rotating speed is controlled at 3-20rev/min.
In described step (4), those skilled in the art can be according to actual needs by controlling the line size of electron beam gun and composition and the thickness that depositing time is controlled deposition material.
Compared with prior art, the invention has the beneficial effects as follows:
(1) copper-molybdenum-carbon composite of the nano-particle reinforcement that the present invention makes has excellent mechanical property and electrical property, its yield strength R p0.2>=420MPa, tensile strength Rm>=480MPa, specific conductivity>=70%IACS, and the room temperature yield strength of fine copper is 33MPa, tensile strength is 209MPa;
(2) the electro beam physics vapour deposition technique that the present invention adopts is simple, and cost is low, is easy to control.Particularly, at present the sedimentation rate of copper can reach 20 μ m/min, i.e. sedimentation diameter 1m, and the sheet material that thickness is 2mm only need deposit 100min.And same internal oxidation is prepared nano dispersion reinforced Cu-base composites, in light, oxidising process just needs 4-60h, and carries out hot pressed sintering at reducing atmosphere condition, and required operation is many, and the time is long.
Accompanying drawing explanation
Fig. 1 is copper-molybdenum-carbon material surface SEM photo of embodiment 1 preparation.
Fig. 2 is copper-molybdenum-carbon material TEM photo of embodiment 1 preparation.
Embodiment
Below by preferred embodiment, technical scheme of the present invention is described further, but should not be understood as limiting the scope of the invention.
Embodiment 1:
Copper ingot material and graphite ingot are put into crucible, and put 200g molybdenum on graphite ingot, on copper ingot material, put 5g CaF 2; Shut vacuum chamber, start to vacuumize; Start wheelwork substrate is rotated with the speed of 6rpm, and open substrate heating equipment, heated substrates temperature makes it to be stabilized in 650 ℃; When vacuum tightness reaches 3 * 10 -2during Pa, open baffle plate, electron beam gun, layer deposited isolating CaF 2; With line size 1.5A Heated Copper ingot, with line size 1.5A heating graphite ingot, start deposition material, after deposition 50min, close electron beam gun, pull on baffle plate, close heating unit, close substrate rotating device; When substrate temperature drops to below 200 ℃, close vacuum system, take off substrate, separated thickness 0.26mm, the sheet material of diameter 520mm of obtaining.Preparation sheet material composition be Cu-Mo1.3wt%-C0.086wt%, according to standard GB/T/T228.1-2010 to the finished product are carried out to Mechanics Performance Testing, its yield strength R p0.2=426MPa, tensile strength Rm=480MPa.With four probe method, the specific conductivity of material is detected, its specific conductivity is 82%IACS.Copper-molybdenum carbon composite copper matrix grain of preparation is of a size of 5-10 μ m(and sees Fig. 1), second-phase is Mo 2c, mean sizes is about 5nm(and sees Fig. 2).
Embodiment 2:
Copper ingot material, molybdenum ingot and anthracene powder are put into respectively to crucible, and put 5g CaF on copper ingot material 2; Shut vacuum chamber, start to vacuumize; Start wheelwork substrate is rotated with the speed of 15rpm, and open substrate heating equipment, heated substrates temperature makes it to be stabilized in 750 ℃; When vacuum tightness reaches 3 * 10 -2during Pa, open baffle plate, electron beam gun, layer deposited isolating CaF 2; With line size 2.2A Heated Copper ingot, with line size 2.6A heating molybdenum ingot, with line size 0.6A heating anthracene powder, start deposition material, after deposition 30min, close electron beam gun, pull on baffle plate, close heating unit, close substrate rotating device; When substrate temperature drops to below 200 ℃, close vacuum system, take off substrate, separated thickness 0.3mm, the sheet material of diameter 520mm of obtaining.Preparation sheet material composition be Cu-Mo15wt%-C0.2wt%, according to standard GB/T/T228.1-2010 to the finished product are carried out to Mechanics Performance Testing, its yield strength R p0.2=540MPa, tensile strength Rm=600MPa.With four probe method, the specific conductivity of material is detected, its specific conductivity is 70%IACS.Preparation state material matrix grain-size is 1-5 μ m, and Second Phase Particle is that Mo(mean sizes is 180nm), Mo 2c(mean sizes is 20nm).
Embodiment 3:
Copper ingot material, molybdenum ingot and anthracene powder are put into respectively to crucible, and put 5g ZrO on copper ingot material 2; Shut vacuum chamber, start to vacuumize; Start wheelwork substrate is rotated with the speed of 8rpm, and open substrate heating equipment, heated substrates temperature makes it to be stabilized in 650 ℃; When vacuum tightness reaches 3 * 10 -2during Pa, open baffle plate, electron beam gun, layer deposited isolating ZrO 2; With line size 2.2A Heated Copper ingot, with line size 2.0A heating molybdenum ingot, with line size 1A heating anthracene powder, start deposition material, after deposition 40min, close electron beam gun, pull on baffle plate, close heating unit, close substrate rotating device; When substrate temperature drops to below 200 ℃, close vacuum system, take off substrate, separated thickness 0.38mm, the sheet material of diameter 520mm of obtaining.The sheet material composition of preparation is Cu-Mo0.2wt%-C1wt%, according to standard GB/T/T228.1-2010, the finished product is carried out to Mechanics Performance Testing, its yield strength R p0.2=440MPa, tensile strength Rm=500MPa.With four probe method, the specific conductivity of material is detected, its specific conductivity is 80%IACS.Preparation state material matrix grain-size is 1-5 μ m, and Second Phase Particle is that C(mean sizes is 16nm), Mo 2c(mean sizes is 20nm).

Claims (6)

1. the Cu-base composites of a nano-particle reinforcement, it is characterized in that: in described Cu-base composites, copper matrix grain size is less than 20 μ m, and nano-particle reinforcement is molybdenum carbide or molybdenum carbide and molybdenum or molybdenum carbide and carbon mutually, and the particle size of nano-particle reinforcement phase is below 200nm; In described Cu-base composites, the quality percentage composition of Mo is 0.1-15%, and the quality percentage composition of C is below 1%.
2. the Cu-base composites of nano-particle reinforcement according to claim 1, is characterized in that the performance index of described Cu-base composites are as follows: yield strength R p0.2>=420MPa, tensile strength Rm>=480MPa, specific conductivity>=70%ICAS.
3. the preparation method of the Cu-base composites of nano-particle reinforcement according to claim 1, comprises the steps:
(1) a kind of in copper ingot material and molybdenum source, carbon source or two kinds are put in crucible respectively, and put isolating layer material on copper ingot material;
(2) vacuumize heated substrates;
(3) when vacuum tightness reaches 9 * 10 -2pa is following, substrate temperature reaches 500-800 ℃, opens substrate rotating device, makes substrate rotation, layer deposited isolating;
(4) open baffle plate, start deposition material;
(5) deposited, after substrate is cooling, taken off substrate, separation obtains settled layer material, is the Cu-base composites of nano-particle reinforcement.
4. the preparation method of the Cu-base composites of nano-particle reinforcement according to claim 3, is characterized in that: carbon source is carbon target, or carbon dust, or anthracene powder.
5. the preparation method of the Cu-base composites of nano-particle reinforcement according to claim 3, is characterized in that: isolating layer material is selected from CaF 2or ZrO 2.
6. the preparation method of the Cu-base composites of nano-particle reinforcement according to claim 6, is characterized in that: in deposition process, substrate rotating speed is controlled at 3-20rev/min.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104946923A (en) * 2015-06-30 2015-09-30 浙江工业大学 Copper-based composite material and preparation method thereof
CN112846570A (en) * 2020-12-31 2021-05-28 松山湖材料实验室 Nano welding flux and preparation method thereof, device and welding method
CN112846563A (en) * 2020-12-31 2021-05-28 松山湖材料实验室 Solder paste, method for preparing same, device and soldering method
CN114293051A (en) * 2021-12-23 2022-04-08 北京科大京都高新技术有限公司 Preparation method of high-temperature softening resistant high-strength high-conductivity copper-based composite material formed part
CN115612890A (en) * 2022-11-03 2023-01-17 中南大学 Mo 2 C particle reinforced CuCrZr composite material and preparation process thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1150172A (en) * 1997-07-29 1999-02-23 Yazaki Corp Carbide-dispersion strengthened copper alloy material
JP2008223091A (en) * 2007-03-13 2008-09-25 Komatsu Ltd Electrode for welding, and method for producing the same
CN102400006A (en) * 2010-09-16 2012-04-04 北京有色金属研究总院 Foamy carbon/copper matrix or aluminum matrix composite material and preparation method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1150172A (en) * 1997-07-29 1999-02-23 Yazaki Corp Carbide-dispersion strengthened copper alloy material
JP2008223091A (en) * 2007-03-13 2008-09-25 Komatsu Ltd Electrode for welding, and method for producing the same
CN102400006A (en) * 2010-09-16 2012-04-04 北京有色金属研究总院 Foamy carbon/copper matrix or aluminum matrix composite material and preparation method thereof

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104946923A (en) * 2015-06-30 2015-09-30 浙江工业大学 Copper-based composite material and preparation method thereof
CN104946923B (en) * 2015-06-30 2017-02-01 浙江工业大学 Copper-based composite material and preparation method thereof
CN112846570A (en) * 2020-12-31 2021-05-28 松山湖材料实验室 Nano welding flux and preparation method thereof, device and welding method
CN112846563A (en) * 2020-12-31 2021-05-28 松山湖材料实验室 Solder paste, method for preparing same, device and soldering method
CN112846570B (en) * 2020-12-31 2022-08-16 松山湖材料实验室 Nano welding flux and preparation method thereof, device and welding method
CN114293051A (en) * 2021-12-23 2022-04-08 北京科大京都高新技术有限公司 Preparation method of high-temperature softening resistant high-strength high-conductivity copper-based composite material formed part
CN114293051B (en) * 2021-12-23 2022-07-26 北京科大京都高新技术有限公司 Preparation method of high-temperature softening resistant high-strength high-conductivity copper-based composite material formed part
CN115612890A (en) * 2022-11-03 2023-01-17 中南大学 Mo 2 C particle reinforced CuCrZr composite material and preparation process thereof
CN115612890B (en) * 2022-11-03 2024-01-19 中南大学 Mo (molybdenum) 2 C particle reinforced CuCrZr composite material and preparation process thereof

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