CN103641333A - 一种超高透高性能低辐射膜的制备方法 - Google Patents
一种超高透高性能低辐射膜的制备方法 Download PDFInfo
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- CN103641333A CN103641333A CN201310567790.7A CN201310567790A CN103641333A CN 103641333 A CN103641333 A CN 103641333A CN 201310567790 A CN201310567790 A CN 201310567790A CN 103641333 A CN103641333 A CN 103641333A
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- layer
- sputtering
- power
- argon gas
- magnetron sputtering
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- 238000002360 preparation method Methods 0.000 title claims abstract description 27
- 239000012528 membrane Substances 0.000 title abstract 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 66
- 238000004544 sputter deposition Methods 0.000 claims abstract description 63
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 48
- 239000011787 zinc oxide Substances 0.000 claims abstract description 33
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052709 silver Inorganic materials 0.000 claims abstract description 12
- 239000004332 silver Substances 0.000 claims abstract description 12
- 239000000956 alloy Substances 0.000 claims abstract description 11
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 112
- 239000007789 gas Substances 0.000 claims description 111
- 229910052786 argon Inorganic materials 0.000 claims description 56
- 239000000376 reactant Substances 0.000 claims description 40
- 238000009738 saturating Methods 0.000 claims description 24
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 23
- 239000001301 oxygen Substances 0.000 claims description 23
- 229910052760 oxygen Inorganic materials 0.000 claims description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 239000004411 aluminium Substances 0.000 claims description 15
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 229910007717 ZnSnO Inorganic materials 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229910052725 zinc Inorganic materials 0.000 claims description 5
- 239000011701 zinc Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 4
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 abstract 4
- 229910007694 ZnSnO3 Inorganic materials 0.000 abstract 1
- 239000005344 low-emissivity glass Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
Description
Claims (9)
Priority Applications (1)
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CN201310567790.7A CN103641333B (zh) | 2013-11-14 | 2013-11-14 | 一种超高透高性能低辐射膜的制备方法 |
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CN201310567790.7A CN103641333B (zh) | 2013-11-14 | 2013-11-14 | 一种超高透高性能低辐射膜的制备方法 |
Publications (2)
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CN103641333A true CN103641333A (zh) | 2014-03-19 |
CN103641333B CN103641333B (zh) | 2016-04-27 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104290404A (zh) * | 2014-10-30 | 2015-01-21 | 中山市亨立达机械有限公司 | 一种特殊膜系的绿色双银low-e玻璃 |
CN104993010A (zh) * | 2015-04-21 | 2015-10-21 | 上海大学 | AZO/Ag/AZO薄膜太阳能电池前电极的制备方法 |
CN110582472A (zh) * | 2017-03-03 | 2019-12-17 | 佳殿玻璃有限公司 | 具有ir反射层和用于提高太阳能增益和可见光透射率的外覆层的涂覆制品 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101497500A (zh) * | 2009-03-06 | 2009-08-05 | 中国南玻集团股份有限公司 | 一种可后续加工的三银低辐射膜玻璃 |
CN201802258U (zh) * | 2010-09-25 | 2011-04-20 | 信义玻璃(天津)有限公司 | 大巴汽车用镀膜钢化中空玻璃 |
JP2011173764A (ja) * | 2010-02-25 | 2011-09-08 | Central Glass Co Ltd | 低放射膜 |
CN102372447A (zh) * | 2010-08-24 | 2012-03-14 | 中国南玻集团股份有限公司 | 含银低辐射玻璃及其制造方法 |
CN102918434A (zh) * | 2010-05-25 | 2013-02-06 | 旭硝子欧洲玻璃公司 | 阳光控制门窗玻璃 |
CN103264549A (zh) * | 2013-05-17 | 2013-08-28 | 中国南玻集团股份有限公司 | 正面和侧面反射色调一致的红外线屏蔽玻璃 |
-
2013
- 2013-11-14 CN CN201310567790.7A patent/CN103641333B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101497500A (zh) * | 2009-03-06 | 2009-08-05 | 中国南玻集团股份有限公司 | 一种可后续加工的三银低辐射膜玻璃 |
JP2011173764A (ja) * | 2010-02-25 | 2011-09-08 | Central Glass Co Ltd | 低放射膜 |
CN102918434A (zh) * | 2010-05-25 | 2013-02-06 | 旭硝子欧洲玻璃公司 | 阳光控制门窗玻璃 |
CN102372447A (zh) * | 2010-08-24 | 2012-03-14 | 中国南玻集团股份有限公司 | 含银低辐射玻璃及其制造方法 |
CN201802258U (zh) * | 2010-09-25 | 2011-04-20 | 信义玻璃(天津)有限公司 | 大巴汽车用镀膜钢化中空玻璃 |
CN103264549A (zh) * | 2013-05-17 | 2013-08-28 | 中国南玻集团股份有限公司 | 正面和侧面反射色调一致的红外线屏蔽玻璃 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104290404A (zh) * | 2014-10-30 | 2015-01-21 | 中山市亨立达机械有限公司 | 一种特殊膜系的绿色双银low-e玻璃 |
CN104993010A (zh) * | 2015-04-21 | 2015-10-21 | 上海大学 | AZO/Ag/AZO薄膜太阳能电池前电极的制备方法 |
CN110582472A (zh) * | 2017-03-03 | 2019-12-17 | 佳殿玻璃有限公司 | 具有ir反射层和用于提高太阳能增益和可见光透射率的外覆层的涂覆制品 |
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Publication number | Publication date |
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CN103641333B (zh) | 2016-04-27 |
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Inventor after: Chen Luyu Inventor after: Yang Wenzhi Inventor after: Wu Xiang Inventor before: Chen Luyu |
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Effective date of registration: 20201009 Address after: No.19, Guangming West Road, high tech Zone, Zaozhuang City, Shandong Province Patentee after: ZAOZHUANG KESHUN DIGITAL Co.,Ltd. Address before: 528400 No. 229, Pioneer Building, Torch Development Zone, Guangdong, Zhongshan Patentee before: ZHONGSHAN CITY CHUANGKE SCIENTIFIC RESEARCH TECHNOLOGY SERVICE Co.,Ltd. |