CN103641292B - The continuous induction melting furnace of wall thickness can be controlled in high precision - Google Patents

The continuous induction melting furnace of wall thickness can be controlled in high precision Download PDF

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Publication number
CN103641292B
CN103641292B CN201310614744.8A CN201310614744A CN103641292B CN 103641292 B CN103641292 B CN 103641292B CN 201310614744 A CN201310614744 A CN 201310614744A CN 103641292 B CN103641292 B CN 103641292B
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core bar
melting furnace
fixing device
induction melting
wall thickness
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CN103641292A (en
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陈士斌
周明强
许志仁
徐同根
刘明伟
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JIANGSU PACIFIC QUARTZ CO Ltd
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JIANGSU PACIFIC QUARTZ CO Ltd
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Abstract

The present invention provides a kind of continuous induction melting furnace that can control wall thickness in high precision, and described core bar is positioned at the top of molding device, and the top of core bar is fixed with core bar fixing device.The outer rim of described core bar fixing device is fixed with the crucible internal walls of described continuous induction melting furnace.Less than the 1/3 of a length of crucible length of described core bar.The present invention can realize being accurately positioned of molding device and core bar by core bar fixing device, so that discharging is uniform, solving bring core bar and molding device instability due to quartz liquation flowing and high temperature deformation or rock and produce the problem that wall unevenness is even, after making molding, wall thickness of quartz tube is uniform.And the continuous induction melting furnace that the present invention provides also includes core bar fixing device, it is possible to makes the gap uniformity between core bar and molding device, thus solves the inclined wall problem of quartz ampoule, make wall thickness of quartz tube uniform, improve the geometric accuracy of production of quartz tubes.

Description

The continuous induction melting furnace of wall thickness can be controlled in high precision
Technical field
The present invention relates to continuous induction melting furnace, be specifically related to a kind of continuous induction melting furnace that can control wall thickness in high precision.
Background technology
The key factor determining quartz ampoule quality is exactly the wall thickness of quartz ampoule, as there is inclined wall or wall unevenness is even all will directly affect the quality of quartz ampoule.The core bar of existing continuous induction melting furnace is all suspended from bell, and core bar length is generally higher than 1.5 meters, has more than the high temperature of 2000 degree in tungsten pot, core bar can be because of high temperature deformation, plus the unstability of quartz sand liquation, core bar can be caused to rock, easily produce inclined wall or the phenomenon such as wall unevenness is even.Therefore, the even problem of wall unevenness how is overcome to become technical problem urgently to be resolved hurrily in production of quartz tubes.
Summary of the invention
The technical problem to be solved in the present invention is for the deficiencies in the prior art, propose a kind of continuous induction melting furnace that can control wall thickness in high precision, by using core bar fixing device to realize being accurately positioned to core bar, make the gap uniformity between core bar and molding device, thus solve the inclined wall problem of quartz ampoule, make wall thickness of quartz tube uniform, improve the geometric accuracy of production of quartz tubes.
The present invention provides a kind of continuous induction melting furnace that can control wall thickness in high precision, and described core bar is positioned at the top of molding device, and the top of core bar is fixed with core bar fixing device.
The outer rim of described core bar fixing device is fixed with the crucible internal walls of described continuous induction melting furnace.
Less than the 1/3 of a length of crucible length of described core bar.
The core of described core bar has the first through hole, and described core bar fixing device has the second through hole of connection outer rim and center, and one end connective protection gas supply pipeline of this second through hole, the other end is connected with the first through hole of core bar.
Described core bar fixing device is annular stent.
Described core bar fixing device is circular support.
Present invention have the advantage that:
The present invention proposes a kind of continuous induction melting furnace that can control wall thickness in high precision, being accurately positioned of molding device and core bar can be realized by design core bar fixing device, so that discharging is uniform, solve bring core bar and molding device instability due to quartz liquation flowing and high temperature deformation or rock and produce the problem that wall unevenness is even, after making molding, wall thickness of quartz tube is uniform, thus improves the precision of wall thickness.Described core bar fixing device can also make the gap uniformity between core bar and molding device, thus solves the inclined wall problem of quartz ampoule, makes wall thickness of quartz tube uniform, improves the geometric accuracy of production of quartz tubes.
Accompanying drawing explanation
Fig. 1 is the structural representation of the continuous induction melting furnace that can control wall thickness in high precision that embodiment provides;
Fig. 2 is the structural representation of the core bar part of continuous induction melting furnace in prior art;
Fig. 3 is the position view expecting seam in prior art;
Fig. 4 is the structural representation of SMIS lever fixing apparatus of the present invention;
Fig. 5 is the top view of SMIS lever fixing apparatus of the present invention.
Detailed description of the invention
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, so that those skilled in the art can be better understood from the present invention and can be practiced, but illustrated embodiment is not as a limitation of the invention.
The present embodiment provides a kind of continuous induction melting furnace that can control wall thickness in high precision, such as Fig. 1, including feeding device 1, bell 2, body of heater 3, core bar 4, molding device 5, crucible 6, heating power automatic control system, electrode 7, net with heating function 8, high temperature brick 9, it is incubated the parts such as sand 10, water jacket 11, dust-exbaust system 12, body of heater bearing 13.As shown in Figure 1, the continuous induction melting furnace structure of the present embodiment is roughly the same with the structure of the continuous induction melting furnace of the existing manufacture quartz ampoule shown in Fig. 2, and difference is, eliminates the deviation correcting device 16 in existing continuous induction melting furnace in the present embodiment, and include core bar fixing device 15, and existing long core bar is replaced by short core bar.The core bar 4 of prior art is long core bar, intert from the top of crucible 6 and enter, until bottom crucible 6, and core bar 4 top outer, the outside of bell 2 are provided with deviation correcting device 16, it can drive core bar 4 to move in X, the Y-direction of plane, by translation, make molding device 5 remain and expect that platform 19 is coaxial, as it is shown on figure 3, so that discharging is uniform, reach the purpose of the uniform wall thickness of quartz ampoule 14 after molding.
But, existing technology implementation Process Precision keeps poor, and the effect that translation deviation correcting device 16 brings is extremely limited, and owing to core bar 4 is longer, only there is a fixing point in bell 2 position, when actual production, quartz liquation flow down can affect the stability of core bar 4, additionally, core bar 4 at high temperature intensity can decline deliquescing, exacerbate the unstability of core bar 4, it is easy to cause the change of discharging opening material seam 17, the most easily produce the phenomenon that wall unevenness is even.Therefore the design that have employed short core bar in the present embodiment replaces original design of long core bar, and sets up core bar fixing device 15 to eliminate deviation correcting device 16 of the prior art.
As shown in Figure 4 and Figure 5, core bar 4 described in the present embodiment only retains the one section of size being in bottom crucible 6, above molding device 5, preferably less than the 1/3 of crucible length, the most a length of 10~about 20cm.This core bar 4 is identical with existing core bar structure, and its core also has protective gas opening.The top of described core bar 4 is provided with core bar fixing device 15, and then is in molding device 5 at a distance above, is i.e. provided above core bar fixing device 15 at molding device 5 and core bar 4.It is also desirable to be fixed on the inwall of crucible 6 at the edge of core bar fixing device 15, indirectly increase the fixed-area of core bar 4, to increase the stability of core bar 4.As it is shown in figure 5, described core bar fixing device 15 can be annular stent, such as the support of automobile steering disk-form.Can also be circular support, after being fixed on core bar 4 top, be fixed with crucible 6 inwall by the outside of circular support.This core bar fixed support 15 can also be other various ways, it is only necessary to plays fixing effect, and and described crucible 6 inwall between there is fixing contact area, concrete shape and structure be not limited with circular or circular ring structure.
Core bar 4 center of the present embodiment also has protective gas through hole; as shown in Figure 4; described core bar fixing device 15 has the through hole of connection core bar fixing device margin and center; and one end of this through hole connects the protective gas supply line of outside by body 18; the protective gas opening of other end connection core bar 4 is connected, in the protective gas circulation passage by this protective gas opening connection molding device 5.Owing to being additionally arranged core bar fixing device 15, core bar 4 is not easy generation and rocks deviation, is the most just not easy to make material seam 17 change, the quartz ampoule of production wall the most partially.Find through a large amount of production practices, use the quartz ampoule 14 that the fixing continuous induction melting furnace of core bar fixing device 15 is produced, its wall thickness accuracy can improve more than 30%, with front situation about cannot produce because wall thickness deviation can not reach quasiconductor requirement, just can normally produce after using continuous induction melting furnace of the present invention.
Embodiment described above is only the preferred embodiment lifted by absolutely proving the present invention, and protection scope of the present invention is not limited to this.The equivalent that those skilled in the art are made on the basis of the present invention substitutes or conversion, all within protection scope of the present invention.Protection scope of the present invention is as the criterion with claims.

Claims (3)

1. can control a continuous induction melting furnace for wall thickness in high precision, including core bar and molding device, it is characterised in that described core bar is positioned at the top of molding device, the top of core bar is fixed with core bar fixing device;The outer rim of described core bar fixing device is fixed with the crucible internal walls of described continuous induction melting furnace;Less than the 1/3 of a length of crucible length of described core bar;The core of described core bar has the first through hole, and described core bar fixing device has the second through hole of connection outer rim and center, and one end connective protection gas supply pipeline of this second through hole, the other end is connected with the first through hole of core bar.
The continuous induction melting furnace that can control wall thickness in high precision the most according to claim 1, it is characterised in that described core bar fixing device is annular stent.
The continuous induction melting furnace that can control wall thickness in high precision the most according to claim 1, it is characterised in that described core bar fixing device is circular support.
CN201310614744.8A 2013-11-28 2013-11-28 The continuous induction melting furnace of wall thickness can be controlled in high precision Active CN103641292B (en)

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CN107010814A (en) * 2017-04-20 2017-08-04 江苏太平洋石英股份有限公司 It is capable of the continuous induction melting furnace of the inclined wall of high-precision control tubing
CN106977082A (en) * 2017-04-20 2017-07-25 江苏太平洋石英股份有限公司 Multifunction quartz glass continuous induction melting furnace
CN108275867A (en) * 2018-04-09 2018-07-13 江苏奥赛斯现代农业科技有限公司 A kind of production of quartz tubes continuous smelting furnace feeder

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CN2518857Y (en) * 2001-12-30 2002-10-30 东海县太平洋石英制品有限公司 Quartz glass tube shaping device
CN102897995A (en) * 2012-09-19 2013-01-30 江苏太平洋石英股份有限公司 Quartz tube, quartz rod continuous furnace
CN203653419U (en) * 2013-11-28 2014-06-18 江苏太平洋石英股份有限公司 Continuous smelting furnace capable of controlling wall thickness at high accuracy

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JPH07172841A (en) * 1993-12-18 1995-07-11 Toshiba Ceramics Co Ltd Production of quarts glass tube and device therefor
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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2518857Y (en) * 2001-12-30 2002-10-30 东海县太平洋石英制品有限公司 Quartz glass tube shaping device
CN102897995A (en) * 2012-09-19 2013-01-30 江苏太平洋石英股份有限公司 Quartz tube, quartz rod continuous furnace
CN203653419U (en) * 2013-11-28 2014-06-18 江苏太平洋石英股份有限公司 Continuous smelting furnace capable of controlling wall thickness at high accuracy

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