CN103630575A

CN103630575A - Multielectrode combined integrated gas sensor

Info

Publication number: CN103630575A
Application number: CN201310657175.5A
Authority: CN
Inventors: 刘航; 唐祯安
Original assignee: Dalian University of Technology
Current assignee: Dalian University of Technology
Priority date: 2013-12-05
Filing date: 2013-12-05
Publication date: 2014-03-12

Abstract

The invention relates to a multielectrode combined integrated gas sensor and belongs to the technical field of sensors. The multielectrode combined integrated gas sensor comprises an insulating substrate, a heater, a heater electrode, N sensitive electrodes and a sensing film, wherein the heater and the heater electrode are formed on the substrate; the N sensitive electrodes are formed on the substrate and are distributed regularly; the sensing film is formed on the substrate. Different sensitive electrodes are not in contact; the sensitive electrodes are not in contact with the heater. The sensing film comprises sensing particles and covers the surfaces of all the sensitive electrodes. The sensor is characterized in that N is greater than 2; two sensitive electrodes are selected from the N sensitive electrodes each time and are used as sensor units to be output; N(N-1)/2 combinations are formed; a sensor array comprising N(N-1)/2 sensor units is formed. The multielectrode combined integrated gas sensor has the effects and the benefits that compared with the prior art with the same number of sensor units, the size of the sensor array is reduced and the number of the electrodes is reduced, i.e. more sensor units are formed by a limited number of electrodes.

Description

A kind of multi electrode combination formula integrated gas sensors

Technical field

The invention belongs to sensor technical field, relate to a kind of new gas sensor.

Background technology

Gas sensor is the sensing equipment existing for detection of one or more specific gas, as detected carbon monoxide, VOC gas etc.Wherein, the principle of semiconductor gas sensor is: employing semiconductor material is sensing material, and after gas molecule is adsorbed by material surface, material carrier concentration changes, thereby changes the conductivity of this material.

Tradition gas sensor is generally by a pair of sensitive electrode and a pair of heating electrode, such gas sensor unit has four electrodes, for example, and the Chinese patent that is numbered CN202421118U that on September 5th, 2012 is announced, disclose a kind of gas sensor chip, contain 4 electrodes.At present, in order to improve in actual applications stability and the accuracy of gas sensor, conventionally use the gas sensor array being formed by a plurality of gas sensor units, for example, the Chinese patent that is numbered CN1453584A that on November 5th, 2003 is announced, has disclosed a kind of food smell fast non-destructive detection method and device based on gas sensor array technology.This invention is the reaction chamber at strip by the even alternative arrangement of a plurality of sensors, forms sensor array, therefore causes reaction chamber larger, and the number of electrodes of the sensor array connecting is more.In view of this, provide a kind of and can effectively reduce gas sensor array volume, the integrated gas sensors that can reduce number of electrodes is simultaneously real in necessary.

Summary of the invention

The gas sensor that the object of this invention is to provide a kind of integrated a plurality of sensitive electrodes, has solved the larger problem of sensor array volume, has solved the more problem of electrode of sensor array simultaneously.

Technical scheme of the present invention is as follows:

A multi electrode combination formula integrated gas sensors, comprising: dielectric base, be formed at well heater and heater electrode in dielectric base, be formed in dielectric base and with N sensitive electrode of certain regular distribution, be formed at the sense film in dielectric base.Wherein, N is greater than 2, and different sensitive electrodes do not contact mutually, and sensitive electrode does not contact with well heater; Sense film contains sensing particulate, is formed in dielectric base, and covers whole sensitive electrodes surface.Heating electrode is worked under DC voltage, by adjusting heating electrode both end voltage, controls the working temperature of sensor array, and guarantees that all sensitive electrodes are in same temperature.In N sensitive electrode, select two sensitive electrodes as the signal output of sensor unit at every turn, total N (N-1)/2 kind of selection, has formed the sensor array that contains N (N-1)/2 sensor unit.

Effect of the present invention and benefit are that, than the prior art that contains equal number sensor unit, the present invention has reduced sensor array volume, reduced the quantity of electrode, utilizes limited quantity electrode to form sensor unit more.

Accompanying drawing explanation

Accompanying drawing 1 is the structural representation of embodiment 1, wherein N=4.

Accompanying drawing 2 is the structural representation of embodiment 2, wherein N=4.

In figure: 1,2,7,8 is heater electrode; 3,4,5,6,9,10,11,12 is sensitive electrode.

Embodiment

Below in conjunction with technical scheme and accompanying drawing, describe the specific embodiment of the present invention in detail.

The invention provides a kind of multi electrode combination formula integrated gas sensors, comprise the well heater and N the sensitive electrode that are arranged in dielectric base.Fig. 1 and Fig. 2 are two embodiment of the present invention, and the quantity of sensitive electrode is all 4, and N equals 4, and difference is that the shape of sensitive electrode is different with distribution.Well heater and the sensitive electrode of each embodiment are arranged in dielectric base.Well heater is circuitous folding shape and is distributed in sensitive electrode sheet surrounding, and sensitive electrode is independent and do not contact with well heater separately.Preparation method comprises the following steps:

The heating electrode that multi electrode combination formula integrated gas sensors adopts and sensitive electrode are in same substrate;

Graphic making process is: substrate is cleaned and pre-service, by techniques such as magnetron sputterings at substrate polished surface sputter Pt film, use sol evenning machine gluing, exposure and development etc. on exposure machine, then carry out backwash etching formation heater electrode and sensitive electrode figure.The width of sensitive electrode and well heater and length can design as required;

After heater electrode and sensitive electrode electric welding are drawn, adopt spin coating, drip the techniques such as painting and apply sense film at substrate surface, as carbon nano-tube film.Heating electrode is worked under DC voltage, by adjusting heating electrode both end voltage, controls the working temperature of sensor array, and guarantees that all sensitive electrodes are in same temperature.Utilize that a pair of analog switch is each selects two sensitive electrodes to export as sensor signal, according to the concrete property of sense film electricity can be led, voltage or electric capacity is as output.Each embodiment contains 4 sensitive electrodes, once selects 2, has 6 kinds of selections, has formed the sensor array that contains 6 sensor units.

Claims

1. a multi electrode combination formula integrated gas sensors, comprising: dielectric base, be formed at well heater and heater electrode in dielectric base, be formed in dielectric base and with N sensitive electrode of certain regular distribution, be formed at the sense film in dielectric base; It is characterized in that N is greater than 2, in N sensitive electrode, select two sensitive electrodes as the signal output of sensor unit at every turn, total N (N-1)/2 kind of selection, has formed the sensor array that contains N (N-1)/2 sensor unit.