CN103630262A - Multichannel gallium arsenide semiconductor absorption type optical fiber temperature measuring system - Google Patents

Multichannel gallium arsenide semiconductor absorption type optical fiber temperature measuring system Download PDF

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CN103630262A
CN103630262A CN201210296627.7A CN201210296627A CN103630262A CN 103630262 A CN103630262 A CN 103630262A CN 201210296627 A CN201210296627 A CN 201210296627A CN 103630262 A CN103630262 A CN 103630262A
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gallium arsenide
optical
unit
light source
fiber
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董玉明
张文松
樊维涛
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XI'AN HEQI OPTO-ELECTRONIC TECHNOLOGY Co Ltd
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XI'AN HEQI OPTO-ELECTRONIC TECHNOLOGY Co Ltd
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Abstract

The invention relates to a multichannel gallium arsenide semiconductor absorption type optical fiber temperature measuring system which is mainly composed of a main controller unit (1), a light source group driving unit (2), a spectrum analysis unit (3), a data processing unit (4), a peripheral auxiliary unit (5), a display and communication unit (6), a light source group (7), an optical reuse system (8) and a gallium arsenide fiber temperature sensor group (9). Spectrum information generated by different gallium arsenide optical fiber temperature sensors on different time slices is detected via the same spectrum analysis unit (3) by the system so that measurement of multi-point optical fiber temperature is realized. Besides, communication with external systems and devices can be realized via an Modbus, an RS485, an RS232, a LAN, a GPIB, a wireless mode, a 101 electric power communication standard specification and an IEC61880 specification of the display and communication unit (6).

Description

The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor
Technical field:
The invention belongs to technical field of optical fiber sensing, relate to the absorption fiber optic temperature measurement system of a kind of hyperchannel gallium arsenide semiconductor.
Background technology:
Optical-fiber temperature measuring technology has the advantages such as itself is not charged, volume is little, quality is light, flexible, anti-electromagnetic interference (EMI), radioresistance, is particularly suitable for applying under strong electromagnetic interference environment, microwave, radio frequency, limited space, the rugged surroundings such as inflammable, explosive.Due to above-mentioned characteristic, based on the absorption fiber optic temperature measurement system of gallium arsenide semiconductor, be particularly useful for the power transmission and transforming equipments such as the high-tension switch gear of electric system, large motor, transformer; The equipment such as the microwave heating in Microwave Industry, microwave chemical are auxiliary; The equipment such as the radio frequency in medical industry, microwave therapy apparatus, magnetic resonance imager; The monitoring of the device interior temperature such as large motor stator, bearing shell.
The absorption fiber optic temperature technology of gallium arsenide semiconductor based semiconductor light absorption principle.Light is propagated in semiconductor has relaxation phenomenon (producing light absorption), and wherein valence band electronic transition is most important absorption process.The photon (energy must be equal to or greater than energy gap Eg) of enough energy makes electron excitation, crosses forbidden transition and enters empty conduction band, and this absorption process is Intrinsic Gettering, and corresponding wavelength is Intrinsic Gettering wavelength, as shown in the formula:
E g=hv
Directly transition type semiconductor material gallium arsenide (gallium arsenide) energy gap vary with temperature as shown in the formula:
E g ( t ) = E g ( 0 ) - αt 2 β + t
In formula: E g(t) be the energy gap of temperature while being t, E g(O) be the energy gap of temperature while being OK, α and β are empirical constants, and numerical value is as follows:
E g(0)=1.522eV;
α=5.8×10 -4eV/K;
β=300K。
Consider the correction of refractive index and other factors, during normal temperature, gallium arsenide Intrinsic Gettering wavelength is about 875nm, and temperature raises, and it is large that Intrinsic Gettering wavelength becomes, and transmittance graph moves to long wavelength's direction; Otherwise temperature reduces, Intrinsic Gettering wavelength diminishes, and transmittance graph moves to short wavelength's direction.Gallium arsenide transmittance graph and vary with temperature schematic diagram as shown in Figure 1, T 1, T 2, T 3represent different temperatures, and T 3> T 2> T 1, with the rising of temperature, gallium arsenide transmittance graph moves to long wave direction.
Utilization is at the high temperature resistant optical cement of 800nm-1000nm wave band transmission, one side is plated to 800nm-1000nm wave band transmission film, the gallium arsenide temperature sensing thin slice of another side plating 800nm-1000nm wave band reflectance coating, the one side of plating 800nm-1000m wave band transmission film is cementing in Transmission Fibers termination, by Transmission Fibers, carry out optic path, realize reflection-type optical fibre sensor structure.Adopt spectroscopy unit to resolve the Intrinsic Gettering wavelength information of sensor reflectance spectrum, obtain the temperature information at gallium arsenide sensing station place, realize temperature monitoring.
Based on the absorption fiber optic temperature measurement system essence of gallium arsenide semiconductor, belong to single-point type temperature measurement technology, the spectroscopy unit adopting causes its system cost higher, design spectroscopy unit of a kind of use and can realize the technology of multipoint temperature measuring, there is larger actual application value.
The optical multiplexer system (8) that native system utilizes time division technique and N 1*2 fiber coupler (81) and 1 N*1 optical-fiber bundling device (82) to form.On special time sheet, light source driving units drives specific light source, detector is measured specific gallium arsenide semiconductor Fibre Optical Sensor (91) temperature information in corresponding timeslice, realizes the function of carrying out the absorption optical-fiber temperature measuring of hyperchannel gallium arsenide semiconductor with same spectroscopy unit (3).
Summary of the invention:
The object of the invention is to design the absorption fiber optic temperature measurement system of a kind of hyperchannel gallium arsenide semiconductor.
The present invention will solve is the measurement that realizes the absorption fiber optic temperature information of hyperchannel gallium arsenide semiconductor of economical and practical, dependable performance.
The mode that the present invention will adopt time division technique and optical multiplexer system (8) to combine, optical multiplexer system (8) is comprised of N 1*2 fiber coupler (81) and 1 N*1 optical-fiber bundling device (82), realizes the cost degradation that multichannel optical fiber temperature information is measured.
The present invention will adopt a spectroscopy unit (3), realize the measurement of the absorption fiber optic temperature information of hyperchannel gallium arsenide semiconductor.
Time division technique of the present invention can guarantee that light source group driver element (2) realizes drive to light source group (7) by N light source, does not interfere with each other.
Time division technique of the present invention and optical multiplexer system (8) can guarantee that N the light transmission between optical channel can realize independent transmission in timeslice, do not interfere with each other.
Spectroscopy unit of the present invention (3) is characterized in that: spectroscopy unit (3) is by optical connector (31), polymerizable lens (32), spectro-grating (33), horizontal direction cylinder coupled lens (34), vertical direction cylinder coupled lens (35) and photodetector (36) form, optical connector (31) is LC, FC, HP, SMA, ST optical connector or other optical connectors, collimation polymerizable lens (32) is convex lens, spectro-grating (33) is blazed grating or holographic grating, horizontal direction cylinder coupled lens (34), vertical direction cylinder coupled lens (35) is cylindrical lens, photodetector (36) is CCD line detector, CMOS line detector, photoelectron diode array detector or gallium arsenide detector array etc., the wavelength resolution of whole analytic unit can reach 0.3nm, wavelength detection scope 800nm-1000nm, and possess the features such as high sensitivity.
Optical multiplexer system of the present invention (8) is characterized in that: optical multiplexer system (8) is comprised of N 1*2 fiber coupler (81) and 1 N*1 optical-fiber bundling device (82).Wherein 1*2 fiber coupler (81) has two input ports and 1 output port, is respectively No. 1 input port, No. 2 input ports and output port.N*1 optical-fiber bundling device (82) has N input port and 1 output port, is respectively No. 1 input port, No. 2 input ports, N-1 input port, N input port and output port.No. 1 input port of each 1*2 fiber coupler (81) is connected with a light source output terminal in light source group (7), the output terminal of each 1*2 fiber coupler (81) is connected with the gallium arsenide fibre optic temperature sensor (91) in gallium arsenide fibre optic temperature sensor group (9), No. 2 input ports of N 1*2 fiber coupler (81) are connected with N input port of N*1 optical-fiber bundling device (82), and the output port of N*1 optical-fiber bundling device (82) is connected with spectroscopy unit (3) input end.
N*1 optical-fiber bundling device of the present invention (82) has N input port and 1 output port, for realizing, the input of N passage is coupled light to 1 output channel, guarantees that each input channel is less than 15% to the energy loss of output channel simultaneously.
Light source group of the present invention (7) is comprised of at the light source of 800nm-1000nm wave band the individual spectral wavelength scope that can be independently luminous of N.
Light source group driver element of the present invention (2) is comprised of timing control unit and N pulse driver unit.Described timing control unit, for the time reference of constructing system work, guarantees at the appointed time to put the pulse driver unit that starts certain appointment.A described N pulse driver unit is separate to each other, and each pulse driver unit drives an independently light source.
Gallium arsenide fibre optic temperature sensor of the present invention (91) is by optical connector (911), Transmission Fibers (912), gallium arsenide temperature sensing probe (913), fix with optical cement (914) and protect protective rubber (195) for temperature sensing probe to form, optical connector (911) is LC, FC, HP, SMA, ST optical connector or other optical connectors etc., Transmission Fibers (912) can be plastic optical fiber, silica fibre or multicomponent glass optical fiber etc., gallium arsenide temperature sensing probe (913) is on two sides all on the gallium arsenide thin slice (thickness is 100um~200um) after polishing, one side is plated near the high temperature resistant transmission film of wave band of 800nm-1000nm, near the high temperature resistant highly reflecting films of wave band another side plating 800nm-1000nm, fixing is can be high temperature resistant with optical cement (914), and wave band has the glue of high transmission near 800nm-1000nm, protection gallium arsenide for temperature sensing probe protective rubber (915) be high temperature resistant, heat conductivity is good, and there is certain degree of hardness and can protect the destroyed glue of gallium arsenide temperature sensing probe.
Demonstration of the present invention and communication unit (6) is characterized in that: described demonstration and communication unit (6) are by display screen, serial ports, phoenix terminal, CAN, the Modbus of network interface and carrying thereof, RS485, RS232, LAN, GPIB, wireless, 101 power communication Standards Codes, IEC 61880 stipulations form.
Peripheral auxiliary unit of the present invention (5) is characterized in that: peripheral auxiliary unit (5) is by a plurality of relays and control circuit thereof, and a plurality of 4-20mA or the output of 0-1mA Industrial Simulation and control circuit thereof form.Multichannel optical fiber temperature measurement system tool of the present invention has the following advantages:
1) the present invention realizes the absorption optical-fiber temperature measuring of hyperchannel gallium arsenide semiconductor, only needs a spectroscopy unit (3), and structural design is simple, easy for installation, cost is low;
2) multichannel technology that the present invention carries can configure according to demand the light source group (7) of respective numbers, pulse driver unit and corresponding optical multiplexer system (8) etc.As: the absorption fiber optic temperature measurement system of 8 passage gallium arsenide semiconductor need configure the light source group (7) of 8 light sources, 8 pulse driver unit and 8 1*2 fiber couplers and 1 optical multiplexer system (8) that 1*8 optical-fiber bundling device forms.
3) the present invention adopts time division technique, only drives a unique light source in default special time sheet, and spectroscopy unit (3) only gathers the spectral information with a default corresponding unique absorption Fibre Optical Sensor of gallium arsenide semiconductor.Each light source and the corresponding absorption Fibre Optical Sensor of gallium arsenide semiconductor are independent of one another on time dimension, do not interfere with each other.
4) independent of one another between each light source in light source group of the present invention (7), independent of one another between the absorption Fibre Optical Sensor of each gallium arsenide semiconductor (91) in sensor group (9), do not interfere with each other.
5) the present invention's optical multiplexer system used (8) is comprised of N 1*2 fiber coupler (81) and 1 N*1 optical-fiber bundling device (82), and light path is simple and clear, and each device can modular design, between device, connect simple, compact conformation, dependable performance, cost is low.
6) in optical multiplexer system of the present invention (8), N*1 optical-fiber bundling device used (82) has N input port and 1 output port, for realizing, the input of N passage is coupled light to 1 output channel, guarantee that each input channel is less than 15% to the energy loss of output channel simultaneously.Optical path loss is little, the longest 500m that reaches of fibre optic temperature sensor.
7) temperature measurement range of the present invention can reach :-40~300 ℃, measuring accuracy can reach: ± 0.1 ℃, interchangeability is good;
8) the present invention can adopt Modbus, RS485, RS232, LAN, GPIB, wireless, 101 power communication Standards Codes, IEC 61880 stipulations and external system and device talk.
9) in the present invention, peripheral auxiliary unit (5) is by a plurality of relays and control circuit thereof, and a plurality of 4-20mA, 0-1mA, 0-5V or the output of 0-10V Industrial Simulation and control circuit thereof form.
Embodiment:
The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor of the present invention is comprised of Main Control Unit (1), light source group driver element (2), spectroscopy unit (3), data processing unit (4), peripheral auxiliary unit (5), demonstration and communication unit (6), light source group (7), optical multiplexer system (8) and gallium arsenide fibre optic temperature sensor group (9).The output of Main Control Unit (1) is connected with the input of light source group driver element (2), the output of light source group driver element (2) is connected with the input of light source group (7), the output of light source group (7) is connected with the input of optical multiplexer system (8), the output of optical multiplexer system (8) is connected with the input of gallium arsenide fibre optic temperature sensor group (9) with spectroscopy unit (3), the output of spectroscopy unit (3) is connected with Main Control Unit (1), data processing unit (4), peripheral auxiliary unit (5), show and be connected with Main Control Unit (1) with communication unit (6), the absorption fiber optic temperature measurement system frame diagram of hyperchannel gallium arsenide semiconductor as shown in Figure 2.
Spectroscopy unit of the present invention (3) is comprised of optical connector (31), polymerizable lens (32), spectro-grating (33), horizontal direction cylinder coupled lens (34), vertical direction cylinder coupled lens (35) and photodetector (36), and spectroscopy unit schematic diagram as shown in Figure 3.Optical connector (31) is LC, FC, HP, SMA, ST optical connector or other optical connectors etc.Collimation polymerizable lens (32) is for projecting grating by the optical alignment of optical connector (31) output port.Spectro-grating (33) is blazed grating or holographic grating etc., for realizing by the wavelength of incident light separately.Horizontal direction cylinder coupled lens (34) for realize by the optically-coupled of spectro-grating horizontal direction focus on photodetector, vertical direction cylinder coupled lens (35) focuses on photodetector for realizing by the optically-coupled of spectro-grating vertical direction, improve the standard and vertical direction converge to the luminous energy on photodetector.Photodetector (36) is CCD line detector, CMOS line detector, photoelectron diode array detector or gallium arsenide detector array etc.
Light source group driver element of the present invention (2) and light source group (7) can be to realizing independently controlling, not interfereing with each other each light source.Described light source group driver element (2) is comprised of timing control unit and N pulse driver unit, timing control unit is for the time reference of constructing system work, guarantee at the appointed time to put the pulse driver unit that starts certain appointment, N pulse driver unit is separate to each other, and each pulse driver unit drives a specifically light source independently.
Optical multiplexer system of the present invention (8) is comprised of N 1*2 fiber coupler (81) and 1 N*1 optical-fiber bundling device (82), and optical multiplexer system schematic as shown in Figure 6.Wherein 1*2 fiber coupler (81) schematic diagram as shown in Figure 4, has two input ports and 1 output port, is respectively No. 1 input port, No. 2 input ports and output port.N*1 optical-fiber bundling device (82) schematic diagram as shown in Figure 5, has N input port and 1 output port, is respectively No. 1 input port, No. 2 input ports, N-1 input port, N input port and output port.As shown in Figure 6, No. 1 input port of each 1*2 fiber coupler (81) is connected with a light source output terminal in light source group (7), the output terminal of each 1*2 fiber coupler (81) is connected with a gallium arsenide fibre optic temperature sensor in gallium arsenide fibre optic temperature sensor group (9), No. 2 input ports of N 1*2 fiber coupler (81) are connected with N input port of N*1 optical-fiber bundling device (82), and the output port of N*1 optical-fiber bundling device (82) is connected with spectroscopy unit (3) input end.
Gallium arsenide fibre optic temperature sensor group of the present invention (9) as shown in Figure 7, is comprised of N gallium arsenide fibre optic temperature sensor independent of each other (91).
Gallium arsenide fibre optic temperature sensor of the present invention (91) is by optical connector (911), Transmission Fibers (912); gallium arsenide temperature sensing probe (913); fix with optical cement (914) and protect protective rubber (915) for temperature sensing probe to form, gallium arsenide fibre optic temperature sensor group (91) as shown in Figure 8.Optical connector (911) is LC, FC, HP, SMA, ST optical connector or other optical connectors etc.Transmission Fibers (912) is plastic optical fiber, silica fibre or multicomponent glass optical fiber etc.Described gallium arsenide temperature sensing probe (913) is on two sides all on the gallium arsenide thin slice (thickness is 100um~200um) after polishing, one side is plated near the high temperature resistant transmission film of wave band of 800nm-1000nm, near the high temperature resistant highly reflecting films of wave band another side plating 800nm-1000nm, wherein plate transmission film and are simultaneously adhered to Transmission Fibers top.Fixedly the optical cement (914) on gallium arsenide temperature sensing probe and Transmission Fibers top is high temperature resistant, and wave band has glue of high transmission etc. near 800nm-1000nm.Protection gallium arsenide for temperature sensing probe protective rubber (915) be high temperature resistant, heat conductivity is good, and has certain degree of hardness and can protect the destroyed glue of gallium arsenide temperature sensing probe.
The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor of the present invention adopts time division technique and light multiplex system (8) realization to utilize single spectroscopy unit (3) to carry out multi-channel measurement.The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor is measured the 1st gallium arsenide fibre optic temperature sensor place temperature information schematic diagram as shown in Figure 9 in T (1) timeslice.In T (1) timeslice, light source group driver element (2) only drives the 1st light source, and other light sources, in driving condition not, only has the information of the 1st light source in transmission in light path.The 1st source emissioning light pulse is through optical multiplexer system (8), enter the 1st gallium arsenide fibre optic temperature sensor, owing to there are highly reflecting films in the end of gallium arsenide fibre optic temperature sensor, reflected light will be got back to the 1st 1*2 fiber coupler, through optical multiplexer system (8), to spectroscopy unit (3), by resolving the information of reflected light spectrum, can obtain the temperature information at the 1st gallium arsenide fibre optic temperature sensor place.
The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor is measured the 2nd gallium arsenide fibre optic temperature sensor place temperature information schematic diagram as shown in figure 10 in T (2) timeslice.In T (2) timeslice, light source group driver element (2) only drives the 2nd light source, and other light sources, in driving condition not, only has the information of the 2nd light source in transmission in light path.The 2nd source emissioning light pulse is through optical multiplexer system (8), enter the 2nd gallium arsenide fibre optic temperature sensor, owing to there are highly reflecting films in the end of gallium arsenide fibre optic temperature sensor, reflected light will be got back to the 2nd 1*2 fiber coupler, through optical multiplexer system (8), to spectroscopy unit (3), by resolving the information of reflected light spectrum, can obtain the temperature information at the 2nd gallium arsenide fibre optic temperature sensor place.
The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor is measured N-1 gallium arsenide fibre optic temperature sensor place temperature information schematic diagram as shown in figure 11 in T (N-1) timeslice.In T (N-1) timeslice, light source group driver element (2) only drives (N-1) individual light source, and other light sources, in driving condition not, only has the information of (N-1) individual light source in transmission in light path.(N-1) individual source emissioning light pulse is through optical multiplexer system (8), enter (N-1) individual gallium arsenide fibre optic temperature sensor, owing to there are highly reflecting films in the end of gallium arsenide fibre optic temperature sensor, reflected light will be got back to (N-1) individual 1*2 fiber coupler, through optical multiplexer system (8), to spectroscopy unit (3), by resolving the information of reflected light spectrum, can obtain the temperature information at (N-1) individual gallium arsenide fibre optic temperature sensor place.
The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor is measured N gallium arsenide fibre optic temperature sensor place temperature information schematic diagram as shown in figure 12 in T (N) timeslice.In T (N) timeslice, light source group driver element (2) only drives N light source, and other light sources, in driving condition not, only has the information of N light source in transmission in light path.N source emissioning light pulse is through optical multiplexer system (8), enter N gallium arsenide fibre optic temperature sensor, owing to there are highly reflecting films in the art end of gallium arsenide fibre optic temperature sensor, reflected light will be got back to N 1*2 fiber coupler, through optical multiplexer system (8), to spectroscopy unit (3), by resolving the information of reflected light spectrum, can obtain the temperature information at N gallium arsenide fibre optic temperature sensor place.
T (1) timeslice of the absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor, T (2) timeslice ..., can there is certain time interval Δ T between T (N-1) timeslice and T (N) timeslice, for the fully interference between each passage light path of isolation.
The absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor is poll T (1) timeslice, T (2) timeslice periodically ..., T (N-1) timeslice and T (N) timeslice realize the measurement of multichannel optical fiber temperature.

Claims (9)

1. the absorption fiber optic temperature measurement system of hyperchannel gallium arsenide semiconductor, is characterized in that: system is comprised of Main Control Unit (1), light source group driver element (2), spectroscopy unit (3), data processing unit (4), peripheral auxiliary unit (5), demonstration and communication unit (6), light source group (7), optical multiplexer system (8) and gallium arsenide fibre optic temperature sensor group (9); This system adopts time division technique and optical multiplexer system (8), by same spectroscopy unit (3), survey the spectral information that on different time sheet, different gallium arsenide fibre optic temperature sensors produce, realize the measurement of multiple spot fiber optic temperature, system also can be by showing and Modbus, the RS485 of communication unit (6), RS232, LAN, GPIB, wireless, 101 power communication Standards Codes, IEC 61880 stipulations and external system and device talk.
2. light source group driver element according to claim 1 (2), it is characterized in that: described light source group driver element (2) is comprised of timing control unit and N pulse driver unit, timing control unit is for the time reference of constructing system work, guarantee at the appointed time to put the pulse driver unit that starts certain appointment, N pulse driver unit is separate to each other, and each pulse driver unit drives an independently light source.
3. spectroscopy unit according to claim 1 (3), it is characterized in that: described spectroscopy unit (3) is by optical connector (31), polymerizable lens (32), spectro-grating (33), horizontal direction cylinder coupled lens (34), vertical direction cylinder coupled lens (35) and photodetector (36) form, optical connector (31) is LC, FC, HP, SMA, ST optical connector or other optical connectors etc., polymerizable lens (32) is convex lens, spectro-grating (33) is blazed grating or holographic grating, horizontal direction cylinder coupled lens (34), vertical direction cylinder coupled lens (35) is cylindrical lens, photodetector (36) is CCD line detector, CMOS line detector, photoelectron diode array detector or gallium arsenide detector array etc.
4. peripheral auxiliary unit according to claim 1 (5), it is characterized in that: described peripheral auxiliary unit (5) is by a plurality of relays and control circuit thereof, and a plurality of 4-20mA, 0-1mA, 0-5V or the output of 0-10V Industrial Simulation and control circuit thereof form.
5. demonstration according to claim 1 and communication unit (6), it is characterized in that: described demonstration and communication unit (6) are by display screen, serial ports, phoenix terminal, CAN, the Modbus of network interface and carrying thereof, RS485, RS232, LAN, GPIB, wireless, 101 power communication Standards Codes, IEC 61880 stipulations form.
6. light source group according to claim 1 (7), it is characterized in that: described light source group (7) is comprised of near individual independently luminous, the spectral wavelength scope light source of wave band 800nm-1000nm of N, light source can be photodiode (LED), laser instrument (LD) or other similar light sources etc.
7. optical multiplexer system according to claim 1 (8), it is characterized in that: described optical multiplexer system (8) is comprised of N 1*2 fiber coupler (81) and 1 N*1 optical-fiber bundling device (82), 1*2 fiber coupler (81) has two input ports and 1 output port, be respectively No. 1 input port, No. 2 input ports and output port, N*1 optical-fiber bundling device (82) has N input port and 1 output port, be respectively No. 1 input port, No. 2 input ports ..., N-1 input port, N input port and output port.
8. optical multiplexer system according to claim 1 (8), it is characterized in that: No. 1 input port of each 1*2 fiber coupler (81) is connected with a light source output terminal in light source group (7), the output terminal of each 1*2 fiber coupler (81) is connected with the gallium arsenide optical connector (91) in gallium arsenide fibre optic temperature sensor group (9), No. 2 input ports of N 1*2 fiber coupler (81) are connected with N input port of N*1 optical-fiber bundling device (82), and the output port of N*1 optical-fiber bundling device (82) is connected with spectroscopy unit (3) input end.
9. gallium arsenide fibre optic temperature sensor group according to claim 1 (9) is comprised of N gallium arsenide fibre optic temperature sensor (91), it is characterized in that: described gallium arsenide fibre optic temperature sensor (91) is by optical connector (911), Transmission Fibers (912), gallium arsenide temperature sensing probe (913), fix with optical cement (914) and protect protective rubber (915) for temperature sensing probe to form, optical connector (911) is LC, FC, HP, SMA, ST optical connector or other optical connectors etc., Transmission Fibers (912) is plastic optical fiber, silica fibre or multicomponent glass optical fiber etc., gallium arsenide temperature sensing probe (913) is on two sides all on the gallium arsenide thin slice (thickness is 100um~200um) after polishing, one side is plated near the high temperature resistant transmission film of wave band of 800nm-1000nm, near the high temperature resistant highly reflecting films of wave band another side plating 800nm-1000nm, fixing is high temperature resistant with optical cement (914), and wave band has the glue of high transmission near 800nm-1000nm, protection gallium arsenide for temperature sensing probe protective rubber (915) be high temperature resistant, heat conductivity is good, and there is certain degree of hardness and can protect the destroyed glue of gallium arsenide temperature sensing probe.
CN201210296627.7A 2012-08-20 2012-08-20 Multichannel gallium arsenide semiconductor absorption type optical fiber temperature measuring system Pending CN103630262A (en)

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