CN103616621B - A kind of vacuum discharge detection device of electronic gun - Google Patents
A kind of vacuum discharge detection device of electronic gun Download PDFInfo
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- CN103616621B CN103616621B CN201310598638.5A CN201310598638A CN103616621B CN 103616621 B CN103616621 B CN 103616621B CN 201310598638 A CN201310598638 A CN 201310598638A CN 103616621 B CN103616621 B CN 103616621B
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Abstract
A kind of vacuum discharge detection device of electronic gun, including light-conducting system (5), CCD imaging device, photoelectric sensing module, signal processing module and display module.Described light-conducting system (5) is connected with CCD imaging device and photoelectric sensing module respectively by extreme ultraviolet optical fiber；Described photoelectric sensing module is connected with signal processing module；Described CCD imaging device and signal processing module are connected with display module respectively.Described light-conducting system (5) is arranged on the high-tension porcelain insulator wall of the vacuum-chamber wall residing for electron gun or vacuum chamber front end as probe.The present invention utilizes the extreme ultraviolet producing in electron gun vacuum discharge process to analyze the vacuum discharge intensity of electron gun；CCD imaging device is exposed imaging to electron gun vacuum electric discharge, to electric discharge spots localization.
Description
Technical field
The present invention relates to the detection device of a kind of electron gun vacuum electric discharge.
Background technology
Electron gun is the critical component of vacuum electronic device, when running under vacuum conditions, owing to field strength distribution is uneven, simultaneously
There is burr and defect etc. in vacuum chamber inwall, electric discharge phenomena often occur.This vacuum discharge to electron gun, high-tension porcelain insulator and
The associated parts such as high pressure generator bring harm greatly, have a strong impact on its life-span.Destroy vacuum environment simultaneously, and
The stable operation of extreme influence vacuum electronic device.Eliminating discharge fault in time is the key measure ensureing electron gun stable operation,
Need to be analyzed electric discharge reason and electric discharge position.Owing to electron gun vacuum electric discharge is more complicated, existing point discharge, also have
Arc discharge, even glow discharge.Meanwhile, electron gun inner vacuum is extremely short for discharge time, typically in nanosecond quantity.In detection
Electron gun inner vacuum electric discharge device usually use for reference power equipment in terms of discharging detection device.As ultrasonic detection device is main
Being made up of acoustoelectric sensor and amplifier, owing to inside electron gun being high vacuum environment, sound wave is not propagated in a vacuum, simultaneously electricity
Noise during the outside air extractor work of sub-rifle has a strong impact on the work of sonac.Therefore, it is difficult to use this device to electronics
Rifle internal discharge carries out detection and localization.Owing to inside electron gun being high vacuum environment, utilize the product that electric discharge produces composition and
Concentration judges the chemical measure of shelf depreciation, is also not suitable for the method as electron gun vacuum discharge examination.At document " electric arc
In the research of electric discharge ultraviolet radiation detecting system " and " research of electrion ultraviolet detecting system ", use ultraviolet pair
High-tension electricity equipment, long lasting for the quantitative detection of electric discharge, is not suitable for the very short time within electron gun and discontinuously discharges mould
The detection of formula.So far, it is still short of for weak discharge detection device under the internal high vacuum environment of electron gun.
Content of the invention
It is an object of the invention to overcome the shortcoming of existing electron gun vacuum discharge examination equipment, propose a kind of electron gun vacuum discharge electrode
Detection device.Apparatus of the present invention carry out spectrum analysis to the extreme ultraviolet producing in electron gun vacuum discharge process, and to electron gun
Vacuum discharge process imaging, analyzes electron gun vacuum electric discharge reason and electric discharge position.The present invention have simply efficient, visual in image,
Anti-electromagnetic interference capability is strong, highly sensitive, non-contact measurement and the advantage such as operation not affecting equipment.
The detection device that the present invention proposes is mainly by light-conducting system, CCD imaging device, photoelectric sensing module, signal transacting mould
Block and display module composition.Described light-conducting system by extreme ultraviolet optical fiber respectively with CCD imaging device and photoelectric sensing module
Connect, for positioning and the output of quantitative signal；Described photoelectric sensing module is connected by cable with signal processing module；Institute
The CCD imaging device stated and signal processing module are connected with display module by data wire respectively.
Described light-conducting system is the quartz ampoule that an one end is closed, and its blind end is hemispherical, and blind end inserts electron gun place
Vacuum chamber in as probe.Quartz ampoule is built with filter plate and optically coupled system.The quartz ampoule other end connects extreme ultraviolet optical fiber.
Described filter plate is positioned at the front end of optically coupled system, and its effect is to filter other interference light, makes the pole that electron gun electric discharge produces
Ultraviolet signal enters optically coupled system, converges after signal amplifies through optically coupled system and is transmitted separately to CCD through extreme ultraviolet optical fiber
Imaging system and photoelectric sensing module.
Described CCD imaging device is mainly made up of optical system and imaging system.Described optical system as receiving terminal,
Being connected with imaging system, the extreme ultraviolet signal that its role is to the electric discharge of electron gun inner vacuum to produce exports imaging system；
The described CCD imaging device response time is nanosecond.
Described photoelectric sensing module is mainly made up of filter plate and channel-style photomultiplier.Described filter plate and channel-style light
Electricity multiplier tube connects, and its role is to the extreme ultraviolet signal that the electron gun inner vacuum electric discharge detecting produces is converted into telecommunications
Number.Described photoelectric sensing module response time is nanosecond.
Signal processing module is mainly made up of main amplifying circuit, filter amplification circuit and A/D conversion circuit.Described main amplification electricity
Road is connected with filter amplification circuit；Described filter amplification circuit is connected with A/D conversion circuit.Its role is in electron gun
The faint extreme ultraviolet that portion's vacuum discharge produces amplifies and strengthens.
Display module is made up of computer and serial communication circuit.Serial communication circuit is connected with computer, its role is to by
The extreme ultraviolet strength information that the image information of the extreme ultraviolet of CCD imaging device output and signal processing module are processed exports
Computer.
Described light-conducting system has many sets；Light-conducting system is arranged in the high pressure porcelain of the vacuum-chamber wall residing for electron gun or vacuum chamber front end
On bottle wall.Substantially symmetrical about its central axis with regard to cylinder vacuum room and high-tension porcelain insulator is respectively chosen on vacuum-chamber wall or high-tension porcelain insulator wall
Position, respectively to arrange a pair totally two set light-conducting system, two set light-conducting systems is generally aligned in the same plane, two set light-conducting systems it
Between angle be 180 degree.Also two positional symmetry substantially symmetrical about its central axis with regard to cylinder vacuum room and high-tension porcelain insulator can respectively be chosen
Arrange two to totally four set light-conducting systems.Four set light-conducting systems are to being arranged on cylindrical same cross section, and adjacent two set leaded lights are
Angle between system is 90 degree.The line of the light-conducting system position being positioned at same cross section passes through vacuum chamber or high-tension porcelain insulator
Axle center, enable high-tension porcelain insulator and internal vacuum chamber to be detected by light-conducting system gamut.Can certainly choose as required
More positional symmetry arranges light-conducting system.
Described filter plate is extreme ultraviolet filter plate in the range of 240nm-280nm；The channel-style of described photoelectric sensing module
The response time of photomultiplier, CCD imaging device, signal processing module and display module is nanosecond order；Described light
Fine is extreme ultraviolet optical fiber；Described optically coupled system uses set of lenses coupled modes, including positive lens and negative lens, positive lens,
Negative lens and described filter plate are quartz ultraviolet ray antireflective material and make；One end of the spherical closing of described quartz ampoule can connect
Receive the incident light of 180 °；Connect according to optical fiber, cable or data wire between described each parts.
The operation principle of the electron gun vacuum electric discharge device of the present invention is as follows:
During electron gun vacuum electric discharge, by the extreme ultraviolet exposure image to electron gun vacuum electric discharge generation for the CCD imaging system,
Positioning analysis is carried out to electric discharge position；The extreme ultraviolet optical signal that electron gun vacuum electric discharge produces, through photoelectric sensing module and letter
The transmission of number processing module and amplification, carry out spectrum analysis to extreme ultraviolet signal, obtain the change of extreme ultraviolet spectrum peak,
Analyzed the intensity of electron gun vacuum electric discharge by the change of extreme ultraviolet spectrum peak；Fixed by the electric discharge of display module summary
Position and the analysis of strength of discharge, complete to electron gun vacuum breakdown location, quantitatively and the analysis of electric discharge reason.
The electron gun vacuum discharge electrode ultraviolet detecting apparatus of the present invention has the advantage that
1st, the electron gun vacuum discharge electrode ultraviolet detecting apparatus of the present invention belongs to non-contact measurement apparatus, during detection with to be checked
Measurement equipment is completely isolated, need not have a power failure, and does not affect the running status of equipment.
2nd, the carrying out of faint shelf depreciation can be detected by the electron gun vacuum discharge electrode ultraviolet detecting apparatus of the present invention, and not
Being disturbed by high-frequency signal is affected, highly sensitive.
3rd, the electron gun vacuum discharge electrode ultraviolet detecting apparatus of the present invention can observe directly the position of electric discharge, shape etc.,
The operation conditions of electron gun device is made and judges that there is visual in image property and simple high efficiency accurately.
4th, the harm of electron gun vacuum electric discharge can be made assessment by the electron gun vacuum discharge electrode ultraviolet detecting apparatus of the present invention,
The early stage potential safety hazard of discovery remover apparatus, has saved the maintenance cost of equipment early, enhances the peace that electron gun system runs
Total stability.
Brief description
The structural representation of the electron gun vacuum discharge electrode ultraviolet detecting apparatus that Fig. 1 present invention proposes；
Fig. 2 embodiment of the present invention vacuum electronic gun plane structure chart；
The position relationship top view of Fig. 3 another embodiment of the present invention light-conducting system；
In figure: 1 high-tension porcelain insulator, 2 negative electrodes, 3 anodes, 4 vacuum chambers, 5 light-conducting systems, 501A the first light-conducting system, 502B
Second light-conducting system, 501C the 3rd light-conducting system, 502D the 4th light-conducting system, 503A the 5th light-conducting system, 503C the 6th
Light-conducting system, 504B the 7th light-conducting system, 504D the 8th light-conducting system.
Detailed description of the invention
The invention will be further described with detailed description of the invention below in conjunction with the accompanying drawings.
As it is shown in figure 1, electron gun vacuum discharge electrode ultraviolet detecting apparatus of the present invention include light-conducting system the 5th, CCD imaging device,
Photoelectric sensing module, signal processing module and display module.
Described light-conducting system 5 is connected with CCD imaging device and photoelectric sensing module respectively by extreme ultraviolet optical fiber, for determining
Position and the output of quantitative signal；Described photoelectric sensing module is connected with signal processing module；Described CCD imaging device and
Signal processing module is connected with display module respectively.
Fig. 2 show one embodiment of the present of invention.The electron gun structure of this embodiment and light-conducting system distribution as in figure 2 it is shown,
The negative electrode 2 of electron gun and anode 3 are in vacuum chamber 4, and high-tension porcelain insulator 1 is positioned at the front end of vacuum chamber 4.Light-conducting system 5 cloth
Put the position between negative electrode 2 and anode 3 on high-tension porcelain insulator wall and vacuum-chamber wall, wherein four set light-conducting system 501A and
502B, 503C and 504D are relatively symmetrically distributed on high-tension porcelain insulator wall and vacuum-chamber wall at negative electrode location two-by-two.
Wherein the first light-conducting system 501A and the second light-conducting system 502B is symmetrically dispersed in the same shaft section of high-tension porcelain insulator 1
The position of sidewall A and B, the 5th light-conducting system 503C and the 6th light-conducting system 504D is symmetrically dispersed in negative electrode 2 and sun
The position of outer A and B of the sidewall of the same shaft section vacuum chamber 4 between pole 3, position A's and B of same shaft section
Line AB passes through the axle center of the shaft section at vacuum chamber 1 place.The guide-lighting system of each on high-tension porcelain insulator wall and vacuum-chamber wall
System investigative range is 180 °.
Described light-conducting system is it can also be provided that 8 overlap, as shown in Figure 3.Four set light-conducting systems put by high-tension porcelain insulator wall cloth, respectively
It is the first light-conducting system 501A, the second light-conducting system 502B, the 3rd light-conducting system 501C, the 4th light-conducting system 502D, its
In the first light-conducting system 501A and the second light-conducting system 502B, the 3rd light-conducting system 501C and the 4th light-conducting system 502D close
It in the axial symmetry of high-tension porcelain insulator, and is on same cross section；First light-conducting system 501A and the second light-conducting system 502B position
The line put and the line of the 3rd light-conducting system 501C and the 4th light-conducting system 502D position are mutually perpendicular to, as shown in Figure 3
Position A, B, C, D of light-conducting system.Four light-conducting systems are arranged in the position of vacuum-chamber wall upper gun negative electrode, point
It is not the 5th light-conducting system 503A, the 6th light-conducting system 504B, the 7th light-conducting system 503C and the 8th light-conducting system 504D,
Wherein the 5th light-conducting system 503A and the 6th light-conducting system 504B, the 7th light-conducting system 503C and the 8th light-conducting system 504D
It with regard to the axial symmetry of vacuum chamber, and is on same cross section, the 5th light-conducting system 503A and the 6th light-conducting system 504B position
The line put and the line of the 7th light-conducting system 503C and the 8th light-conducting system 504D position are mutually perpendicular to, as shown in Figure 3
Position A, B, C, D of light-conducting system.Each light-conducting system detection on high-tension porcelain insulator wall and cathode vacuum locular wall
Scope is 90 °.
Described photoelectric sensing module, CCD imaging device, signal processing module and display module can also arrange and preferably ring
It is 20-1000ns between Ying Shi.
When electron gun vacuum discharges, the extreme ultraviolet that electric discharge is produced respectively by light-conducting system by filter plate and optically coupled system is believed
Number be filtered and signal amplify, by the extreme ultraviolet signal of amplification respectively through extreme ultraviolet optical fiber be transmitted to photoelectric sensing module and
CCD imaging system.Extreme ultraviolet optical signal is converted into the signal of telecommunication and is transmitted to display module, display module by photoelectric sensing module
Display reaction extreme ultraviolet spectral information, uses spectroscopic analysis methods to analyze the vacuum discharge intensity of electron gun.CCD imaging sets
It for receiving extreme ultraviolet, is exposed imaging to electron gun vacuum electric discharge, and by conducting images to display module display image letter
Breath.The vacuum discharge intensity showing according to display module and the information of imaging, and according to CCD imaging system to electron gun vacuum
Discharge position is positioned by the imaging picture of electric discharge.The intensity of the ultraviolet spectrogram according to vacuum discharge generation judges that electron gun is true
The power of empty electric discharge, and combine electron gun vacuum discharge position, strong and weak and exposure according to the aura of image information and electric discharge generation
The information of imaging carries out the analysis of causes of discharging.
Claims (7)
1. a vacuum discharge detection device of electronic gun, described detection device include light-conducting system (5), CCD imaging device,
Photoelectric sensing module, signal processing module and display module；Described light-conducting system (5) by extreme ultraviolet optical fiber respectively with CCD
Imaging device and photoelectric sensing module connect；Described photoelectric sensing module is connected with signal processing module；Described CCD becomes
As equipment and signal processing module are connected with display module respectively,
It is characterized in that: described light-conducting system (5) is the quartz ampoule of the spherical closing in one end, and the blind end of quartz ampoule is hemisphere
Shape, the vacuum chamber that this blind end inserts electron gun place is interior as probe, is able to receive that the incident light of 180 °；Quartz ampoule built with
Filter plate and optically coupled system；The other end of quartz ampoule connects extreme ultraviolet optical fiber；Before described filter plate is positioned at optically coupled system
End；Described light-conducting system (5) is simultaneously arranged on the high-tension porcelain insulator wall of the vacuum-chamber wall residing for electron gun and vacuum chamber front end.
2. vacuum discharge detection device of electronic gun according to claim 1, it is characterised in that: at described vacuum-chamber wall
With respectively choose two positions substantially symmetrical about its central axis with regard to cylinder vacuum room and high-tension porcelain insulator on high-tension porcelain insulator wall, selected
Position is respectively to arranging a pair totally two set light-conducting system (5), and two sets light-conducting system (5) are positioned at cylindrical same cross section,
Angle between two sets light-conducting system (5) is 180 degree.
3. vacuum discharge detection device of electronic gun according to claim 1, it is characterised in that: at described vacuum-chamber wall
With respectively choose four positions substantially symmetrical about its central axis with regard to cylinder vacuum room and high-tension porcelain insulator on high-tension porcelain insulator wall, selected
Position is respectively symmetrically arrangement two to totally four set light-conducting systems；Four set light-conducting systems to being arranged on cylindrical same cross section, phase
Angle between adjacent two set light-conducting systems is 90 degree.
4. the vacuum discharge detection device of electronic gun according to Claims 2 or 3, it is characterised in that: it is positioned at same transversal
The line of the described light-conducting system position in face passes through the axle center of vacuum chamber or high-tension porcelain insulator.
5. vacuum discharge detection device of electronic gun according to claim 1, it is characterised in that: in described detection device,
The response time of the channel-style photomultiplier of photoelectric sensing module, CCD imaging device, signal processing module and display module
For nanosecond order.
6. vacuum discharge detection device of electronic gun according to claim 1, it is characterised in that: in described detection device,
The response time of the channel-style photomultiplier of photoelectric sensing module, CCD imaging device, signal processing module and display module
It is preferably 20-1000ns.
7. vacuum discharge detection device of electronic gun according to claim 1, it is characterised in that: when electron gun vacuum electric discharge
When, the extreme ultraviolet signal that electric discharge is produced respectively by light-conducting system (5) by filter plate and optically coupled system is filtered and believes
Number amplify, the extreme ultraviolet signal of amplification is transmitted to photoelectric sensing module and CCD imaging device through extreme ultraviolet optical fiber respectively；
Extreme ultraviolet signal is converted into the signal of telecommunication and is transmitted to display module, display module display reaction extreme ultraviolet spectrum by photoelectric sensing module
Information, uses spectroscopic analysis methods to analyze the vacuum discharge intensity of electron gun；CCD imaging device receives extreme ultraviolet, right
Electron gun vacuum electric discharge is exposed imaging, and shows conducting images to display module；Put according to the vacuum that display module shows
Electric strength and the information of image, and the image discharging electron gun vacuum according to CCD imaging device, it is fixed to carry out discharge position
Position；Judge, according to the intensity of extreme ultraviolet spectrum that vacuum discharge produces, the power that electron gun vacuum discharges, and according to image information with
The aura that electric discharge produces, carries out, in conjunction with electron gun vacuum discharge position, power, the analysis of causes of discharging.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310598638.5A CN103616621B (en) | 2013-11-25 | 2013-11-25 | A kind of vacuum discharge detection device of electronic gun |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310598638.5A CN103616621B (en) | 2013-11-25 | 2013-11-25 | A kind of vacuum discharge detection device of electronic gun |
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| CN103616621A CN103616621A (en) | 2014-03-05 |
| CN103616621B true CN103616621B (en) | 2016-11-09 |
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| CN111308290A (en) * | 2020-03-06 | 2020-06-19 | 西安交通大学 | Partial discharge detection device based on silicon photomultiplier |
| CN113109675B (en) * | 2021-04-12 | 2024-06-11 | 西北核技术研究所 | Image diagnosis device and method for insulating stack vacuum surface flashover |
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|---|---|---|---|---|
| CN101706548A (en) * | 2009-11-06 | 2010-05-12 | 宁波大学 | Optical detection device for corona discharge |
| CN101718821A (en) * | 2009-12-04 | 2010-06-02 | 重庆大学 | Device and method for positioning ultraviolet detection of insulation discharge in transformer |
| CN101852835A (en) * | 2010-04-09 | 2010-10-06 | 重庆大学 | Power equipment visual detection device based on partial discharge signal and detection method thereof |
| CN103105567A (en) * | 2013-02-05 | 2013-05-15 | 宁波工程学院 | Spectroscope type corona ultraviolet detector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152377A (en) * | 1987-12-10 | 1989-06-14 | Central Res Inst Of Electric Power Ind | Partial discharge detection method |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101706548A (en) * | 2009-11-06 | 2010-05-12 | 宁波大学 | Optical detection device for corona discharge |
| CN101718821A (en) * | 2009-12-04 | 2010-06-02 | 重庆大学 | Device and method for positioning ultraviolet detection of insulation discharge in transformer |
| CN101852835A (en) * | 2010-04-09 | 2010-10-06 | 重庆大学 | Power equipment visual detection device based on partial discharge signal and detection method thereof |
| CN103105567A (en) * | 2013-02-05 | 2013-05-15 | 宁波工程学院 | Spectroscope type corona ultraviolet detector |
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