CN103616570B - A kind of self-correcting photoelectric integration electric-field sensor system - Google Patents
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Abstract
本发明涉及一种自校正光电集成电场传感器系统，属于电场测量技术领域。其中的激光源的输出端依次通过起偏器、输入保偏光纤与传感器的输入端相连，传感器的输出端依次通过输出保偏光纤、偏振分束器、Y波导调制器与探测器的输入端相连。探测器输出的电信号经处理器产生可调直流电源模块的控制信号及经处理器数学运算反推出待测电场信号，控制可调直流电源模块为Y波导调制器提供电压信号，形成闭环控制。本发明系统通过Y波导调制器的反馈控制，实现系统传递函数的现场标定，提高测量精度；并将系统的静态工作点调整至π/2，使得传感器工作在最佳状态。
The invention relates to a self-correcting photoelectric integrated electric field sensor system, which belongs to the technical field of electric field measurement. The output end of the laser source is connected to the input end of the sensor through a polarizer, the input polarization maintaining fiber in turn, and the output end of the sensor is connected to the input end of the detector through an output polarization maintaining fiber, a polarization beam splitter, a Y waveguide modulator, etc. connected. The electric signal output by the detector is generated by the processor to control the signal of the adjustable DC power module and the electric field signal to be measured is reversed by the processor mathematical operation, and the adjustable DC power module is controlled to provide the voltage signal for the Y waveguide modulator to form a closed-loop control. Through the feedback control of the Y waveguide modulator, the system of the invention realizes on-site calibration of the system transfer function and improves the measurement accuracy; and adjusts the static working point of the system to π/2 so that the sensor works in the best state.
Description
技术领域technical field
本发明涉及一种自校正光电集成电场传感器系统，属于电场测量技术领域。The invention relates to a self-correcting photoelectric integrated electric field sensor system, which belongs to the technical field of electric field measurement.
背景技术Background technique
电场测量在诸多科学研究和工程技术领域具有重要意义，特别是在电力系统、电磁兼容及微波技术等领域具有广泛的应用。Electric field measurement is of great significance in many fields of scientific research and engineering technology, especially in the fields of power system, electromagnetic compatibility and microwave technology.
随着集成光学技术的迅速发展，光电集成电场传感器得到了愈来愈多的研究和应用。已有基于光电集成传感器的电场测量系统，如申请号为：201310076620.9，发明名称为准互易数字闭环铌酸锂光波导交变电场/电压传感器的专利申请，其铌酸锂直波导传感单元上不含天线，测量灵敏度较低；且采用了光纤陀螺的全数字闭环系统，系统响应时间较长，测量电磁兼容和微波技术领域暂态波形较为困难，因此其应用局限于电力系统中的工频强电场或电压测量。申请号为：201210348311.8，发明名称为一种基于共路干涉的集成电场传感器的专利申请，其结构如图1所示，With the rapid development of integrated optical technology, photoelectric integrated electric field sensors have been more and more researched and applied. There is an electric field measurement system based on photoelectric integrated sensors, such as the application number: 201310076620.9, the patent application for the quasi-reciprocal digital closed-loop lithium niobate optical waveguide alternating electric field/voltage sensor, and its lithium niobate direct waveguide sensing unit It does not contain an antenna, and the measurement sensitivity is low; and the full digital closed-loop system of the fiber optic gyroscope is adopted, the system response time is long, and it is difficult to measure the transient waveform in the field of electromagnetic compatibility and microwave technology, so its application is limited to the work in the power system Frequency strong electric field or voltage measurement. The application number is: 201210348311.8, and the title of the invention is a patent application for an integrated electric field sensor based on common path interference. Its structure is shown in Figure 1.
其中A为反映了激光源输出的光功率、光路损耗及探测器的光电转换系数；b为传感器的消光比，取决于保偏光纤与传感器中光波导的耦合工艺；为传感器的静态偏置点，取决于光波导的几何尺寸；Eπ为半波电场，取决于传感器中铌酸锂晶体、天线及调制电极的几何尺寸；E为待测电场信号，V为探测器输出的电压信号。Among them, A reflects the optical power output by the laser source, the optical path loss and the photoelectric conversion coefficient of the detector; b is the extinction ratio of the sensor, which depends on the coupling process between the polarization-maintaining fiber and the optical waveguide in the sensor; is the static bias point of the sensor, which depends on the geometry of the optical waveguide; E π is the half-wave electric field, which depends on the geometry of the lithium niobate crystal, antenna and modulation electrode in the sensor; E is the electric field signal to be measured, and V is the detection The voltage signal output by the device.
考虑到温度、湿度等环境因素会引起A、b、三个参数不同程度的变动，为保证测量准确，最好在测量电场信号前，对三个参数进行标定。已有技术中传感器的标定工作需要平行板电极和较高电压幅值（通常在10kV以上）的电压源等设备辅助，难以在测量现场实现，其应用范围被限制于实验室环境中。Considering environmental factors such as temperature and humidity will cause A, b, The three parameters vary in different degrees. In order to ensure the accuracy of the measurement, it is best to calibrate the three parameters before measuring the electric field signal. The calibration of sensors in the prior art requires the assistance of equipment such as parallel plate electrodes and a voltage source with a higher voltage amplitude (usually above 10kV), which is difficult to implement at the measurement site, and its application range is limited to the laboratory environment.
另外，静态偏置点对传感器的可测范围有重要影响，如图2所示。当或π时，传递函数的静态工作点位于余弦函数的顶部，属于饱和区域，一方面大大降低测量的灵敏度，另一方面是测量波形发生严重畸变，通过电压信号反推电场信号出现困难；当静态工作点位于余弦函数的近似线性段，测量系统具有最大的灵敏度和近似线性的输入输出特性。已有技术中传感器静态偏置点缺乏反馈控制，一旦温度等环境因数变化引起变动，传感器静态工作点将偏离余弦函数线性段，测量系统失去最大的灵敏度和近似线性的输入输出特性。Additionally, the static bias point It has an important impact on the measurable range of the sensor, as shown in Figure 2. when or π, the static operating point of the transfer function is located at the top of the cosine function, which belongs to the saturation region. On the one hand, the sensitivity of the measurement is greatly reduced; The static operating point is located in the approximate linear section of the cosine function, and the measurement system has the greatest sensitivity and approximately linear input and output characteristics. The static bias point of the sensor in the prior art Lack of feedback control, once changes in environmental factors such as temperature cause Changes, the static operating point of the sensor will deviate from the linear segment of the cosine function, and the measurement system loses its maximum sensitivity and approximately linear input and output characteristics.
综上所述，该已有技术主要存在两方面缺陷：其一，传感器标定工作难以在测量现场实现，应用范围被限制于实验室环境中；另一方面，传感器的静态偏置点缺乏反馈控制，一旦温度等环境因数变化引起变动，传感器静态工作点将偏离余弦函数线性段，测量系统失去最大的灵敏度和近似线性的输入输出传递函数特性。To sum up, there are two main defects in this existing technology: first, the sensor calibration work is difficult to realize at the measurement site, and the application range is limited to the laboratory environment; on the other hand, the static bias point of the sensor Lack of feedback control, once changes in environmental factors such as temperature cause Changes, the static operating point of the sensor will deviate from the linear segment of the cosine function, and the measurement system loses its maximum sensitivity and approximately linear input-output transfer function characteristics.
发明内容Contents of the invention
本发明的目的是提出一种自校正光电集成电场传感器系统，利用Y波导调制器的反馈控制，实现A、b两个参数的现场标定，实现准确测量；并将静态偏置点调整到使传感器具备最佳性能。The purpose of this invention is to propose a kind of self-calibration photoelectric integrated electric field sensor system, utilize the feedback control of Y waveguide modulator, realize the on-the-spot calibration of A, b two parameters, realize accurate measurement; And static bias point is adjusted to Make the sensor have the best performance.
本发明提出的自校正光电集成电场传感器系统，包括：The self-calibration photoelectric integrated electric field sensor system proposed by the present invention includes:
激光源，用于发出激光；a laser source for emitting laser light;
起偏器，用于将激光源发出的激光转化成线偏振光，起谝器与激光源通过单模光纤相连；The polarizer is used to convert the laser light emitted by the laser source into linearly polarized light, and the polarizer is connected to the laser source through a single-mode optical fiber;
传感器，用于通过输入保偏光纤接收线偏振光，输入保偏光纤的偏振轴以45°与传感器对轴耦合，线偏振光正交分解为两束等光功率不同偏振模式的线偏振光，在传感器的光波导中传播；传感器中的天线感应Y方向待测电场信号，产生一个电位差，该电位差通过传感器上的调制电极对光波导中传播的光信号产生调制作用，使两束不同偏振模式的线偏振光的传播常数发生互补变化，两束不同偏振模式的线偏振光在光波导的出射端产生与待测电场信号强度相对应的相位差；The sensor is used to receive linearly polarized light through the input polarization maintaining fiber. The polarization axis of the input polarization maintaining fiber is coupled to the sensor axis at 45°. The linearly polarized light is orthogonally decomposed into two beams of linearly polarized light with equal optical power and different polarization modes. Propagate in the optical waveguide of the sensor; the antenna in the sensor senses the electric field signal to be measured in the Y direction, and generates a potential difference, which modulates the optical signal propagating in the optical waveguide through the modulation electrode on the sensor, so that the two beams are different The propagation constant of the linearly polarized light in the polarization mode changes complementary, and the two beams of linearly polarized light in different polarization modes produce a phase difference corresponding to the intensity of the electric field signal to be measured at the exit end of the optical waveguide;
偏振分束器，用于通过输出保偏光纤接收具有相位差的两束不同偏振模式的线偏振光，并使在同一根输出保偏光纤中传播的两束不同偏振模式的线偏振光分离，得到两束独立传播的线偏振光；A polarization beam splitter is used to receive two beams of linearly polarized light of different polarization modes with a phase difference through the output polarization maintaining fiber, and separate the two beams of linearly polarized light of different polarization modes propagating in the same output polarization maintaining fiber, Two beams of independently propagating linearly polarized light are obtained;
Y波导调制器，用于通过两根保偏光纤接收两束独立传播的线偏振光，并根据来自可调直流模块的电压调制信号校正两束独立传播的线偏振光的相位差，校正相位差后的两束线偏振光在Y波导调制器的Y分支交点处发生干涉，得到一束干涉后的光信号，Y波导调制器通过两根保偏光纤与偏振分束器相连，通过电缆线与可调直流电源模块相连；The Y-waveguide modulator is used to receive two beams of independently propagating linearly polarized light through two polarization-maintaining optical fibers, and correct the phase difference of the two independently propagating linearly polarized lights according to the voltage modulation signal from the adjustable DC module, and correct the phase difference The last two beams of linearly polarized light interfere at the intersection point of the Y branch of the Y-waveguide modulator to obtain a beam of interfering optical signals. The Y-waveguide modulator is connected to the polarization beam splitter through two polarization-maintaining fibers, and connected to the The adjustable DC power supply module is connected;
探测器，用于通过单模光纤接收干涉后的光信号，将光信号转换成电压信号；The detector is used to receive the optical signal after interference through the single-mode optical fiber, and convert the optical signal into a voltage signal;
处理器，用于通过电缆线接收探测器输出的电压信号，根据存储的传递函数及其标定后的参数数学运算得到待测电场信号，同时为可调直流电源模块提供控制信号。The processor is used to receive the voltage signal output by the detector through the cable, obtain the electric field signal to be measured according to the stored transfer function and its calibrated parameter mathematical operation, and provide a control signal for the adjustable DC power module at the same time.
可调直流电源模块，用于通过电缆线接收处理器输出的控制信号，根据该控制信号产生一个电压调制信号，并将该电压调制信号发送至Y波导调制器。The adjustable DC power supply module is used to receive the control signal output by the processor through the cable, generate a voltage modulation signal according to the control signal, and send the voltage modulation signal to the Y waveguide modulator.
本发明提出的自校正光电集成电场传感器系统，其优点是：在测量前，实现传递函数各参数的现场标定，从而实现电场信号的精确测量；通过Y波导调制器，将光电集成电场传感器系统的静态工作点校正至π/2，使得传感器在最佳状态下工作，从而大大提高了本发明的电场传感器系统的电场测量灵敏度。The self-calibration photoelectric integrated electric field sensor system proposed by the present invention has the advantages of: before the measurement, the on-site calibration of each parameter of the transfer function is realized, thereby realizing the accurate measurement of the electric field signal; through the Y waveguide modulator, the photoelectric integrated electric field sensor system The static working point is corrected to π/2, so that the sensor works in an optimal state, thereby greatly improving the electric field measurement sensitivity of the electric field sensor system of the present invention.
附图说明Description of drawings
图1为已有技术中光电集成电场测量系统的结构示意图。Fig. 1 is a structural schematic diagram of an optoelectronic integrated electric field measurement system in the prior art.
图2为静态工作点对电场测量系统传递函数的影响的原理示意图。Fig. 2 is a schematic diagram of the principle of the influence of the static operating point on the transfer function of the electric field measurement system.
图3为本发明提出的自校正光电集成电场传感器系统的结构示意图。Fig. 3 is a schematic structural diagram of the self-calibration photoelectric integrated electric field sensor system proposed by the present invention.
图1和图3中，1是激光源，2是起偏器，3是传感器，4是光波导，5是天线，6是调制电极，7是铌酸锂（LiNbO3）晶片，8是检偏器，9是探测器，10是偏振分束器，11是Y波导调制器，12是处理器，13是可调直流电源模块。In Figure 1 and Figure 3, 1 is the laser source, 2 is the polarizer, 3 is the sensor, 4 is the optical waveguide, 5 is the antenna, 6 is the modulation electrode, 7 is the lithium niobate (LiNbO 3 ) chip, 8 is the detector A polarizer, 9 is a detector, 10 is a polarization beam splitter, 11 is a Y waveguide modulator, 12 is a processor, and 13 is an adjustable DC power supply module.
具体实施方式detailed description
本发明提出的自校正光电集成电场传感器系统，其结构如图3所示，包括：The self-calibration photoelectric integrated electric field sensor system that the present invention proposes, its structure is as shown in Figure 3, comprises:
激光源1，用于发出激光；A laser source 1 for emitting laser light;
起偏器2，用于将激光源发出的激光转化成线偏振光，起谝器与激光源通过单模光纤相连；The polarizer 2 is used to convert the laser light emitted by the laser source into linearly polarized light, and the polarizer is connected to the laser source through a single-mode optical fiber;
传感器3，用于通过输入保偏光纤接收线偏振光，输入保偏光纤的偏振轴以45°与传感器对轴耦合，线偏振光正交分解为两束等光功率不同偏振模式（横电波和横磁波两种模式）的线偏振光，在传感器的光波导4中传播；传感器中的天线感应Y方向待测电场信号，产生一个电位差，该电位差通过传感器上的调制电极对光波导中传播的光信号产生调制作用，使两束不同偏振模式的线偏振光的传播常数发生互补变化，两束不同偏振模式的线偏振光在光波导的出射端产生与待测电场信号强度相对应的相位差；Sensor 3 is used to receive linearly polarized light through the input polarization-maintaining fiber, the polarization axis of the input polarization-maintaining fiber is coupled with the opposite axis of the sensor at 45°, and the linearly polarized light is orthogonally decomposed into two beams with equal optical power and different polarization modes (transverse electric wave and The linearly polarized light in two modes of transverse magnetic wave) propagates in the optical waveguide 4 of the sensor; the antenna in the sensor senses the electric field signal to be measured in the Y direction to generate a potential difference, and the potential difference passes through the modulation electrode on the sensor to the optical waveguide. The propagating optical signal produces a modulation effect, so that the propagation constants of the two beams of linearly polarized light with different polarization modes are complementary to each other, and the two beams of linearly polarized light with different polarization modes generate an electric field corresponding to the intensity of the electric field signal to be measured at the output end of the optical waveguide. phase difference;
偏振分束器10，用于通过输出保偏光纤接收具有相位差的两束不同偏振模式的线偏振光，并使在同一根输出保偏光纤中传播的两束不同偏振模式的线偏振光分离，得到两束独立传播的线偏振光；Polarization beam splitter 10, used to receive two beams of linearly polarized light of different polarization modes with a phase difference through the output polarization maintaining fiber, and separate the two beams of linearly polarized light of different polarization modes propagating in the same output polarization maintaining fiber , two beams of linearly polarized light propagating independently are obtained;
Y波导调制器11，用于通过两根保偏光纤接收两束独立传播的线偏振光，并根据来自可调直流电源模块的电压调制信号校正两束独立传播的线偏振光的相位差，校正相位差后的两束线偏振光在Y波导调制器的Y分支交点处发生干涉，得到一束干涉后的光信号，Y波导调制器通过两根保偏光纤与偏振分束器相连，通过电缆线与可调直流电源模块相连；The Y-waveguide modulator 11 is used to receive two beams of independently propagated linearly polarized light through two polarization-maintaining optical fibers, and correct the phase difference of the two independently propagated linearly polarized lights according to the voltage modulation signal from the adjustable DC power module, and correct The two beams of linearly polarized light after the phase difference interfere at the intersection point of the Y branch of the Y waveguide modulator to obtain a beam of optical signals after interference. The Y waveguide modulator is connected to the polarization beam splitter through two polarization-maintaining fibers, and the cable The line is connected to the adjustable DC power supply module;
探测器9，用于通过单模光纤接收干涉后的光信号，将光信号转换成电压信号；The detector 9 is used to receive the interfering optical signal through the single-mode optical fiber, and convert the optical signal into a voltage signal;
处理器12，用于通过电缆线接收探测器输出的电压信号，根据存储的传递函数及其标定后的参数数学运算得到待测电场信号，同时为可调直流电源模块提供控制信号。The processor 12 is used to receive the voltage signal output by the detector through the cable, obtain the electric field signal to be measured according to the stored transfer function and its calibrated parameter mathematical operation, and provide a control signal for the adjustable DC power module.
可调直流电源模块13，用于通过电缆线接收处理器输出的控制信号，根据该控制信号产生一个电压调制信号，并将该电压调制信号发送至Y波导调制器。The adjustable DC power supply module 13 is used to receive the control signal output by the processor through the cable, generate a voltage modulation signal according to the control signal, and send the voltage modulation signal to the Y waveguide modulator.
本发明提出的自校正光电集成电场传感器系统，其工作原理是：The self-calibration photoelectric integrated electric field sensor system that the present invention proposes, its working principle is:
激光源发出的部分偏振光经起偏器后变为线偏振光；输入保偏光纤的偏振轴以45°与传感器对轴耦合，则线偏振光正交分解为两束等光功率不同偏振模式（横电波和横磁波两种模式）的线偏振光，在传感器的光波导中传播；传感器中的天线感应Y方向待测电场信号，产生一个电位差，该电位差通过传感器上的调制电极对光波导中传播的光信号产生调制作用，使两束不同偏振模式的线偏振光的传播常数发生互补变化，两束不同偏振模式的线偏振光在光波导的出射端产生与待测电场信号强度相对应的相位差；输出保偏光纤偏振轴以0°与传感器对轴耦合，则具有一定相位差的两正交偏振模式的线偏振光分别沿保偏光纤的快慢轴传播；快慢轴中的两束线偏振光经偏振分束器分束后分开在两根保偏光纤的慢轴中传播，后同时射入Y波导调制器的两臂；Y波导调制器根据来自可调直流电源模块的电压调制信号对在Y波导两臂传播的两束线偏振光的相位差进行校正，校正相位差后的两束线偏振光在Y波导调制器的Y分支的交点处发生干涉，生成的干涉信号传入光探测器进行光电转换，转换的电信号输入处理器进行数学运算，处理器根据该电信号输出可调直流电源模块的控制信号及待测电场信号，可调直流电源模块根据处理器输出的控制信为Y波导调制器提供调制信号。The partially polarized light emitted by the laser source becomes linearly polarized light after being passed through the polarizer; the polarization axis of the input polarization-maintaining fiber is coupled with the opposite axis of the sensor at 45°, and the linearly polarized light is orthogonally decomposed into two beams with equal optical power and different polarization modes Linearly polarized light (two modes of transverse electric wave and transverse magnetic wave) propagates in the optical waveguide of the sensor; the antenna in the sensor senses the electric field signal to be measured in the Y direction, and generates a potential difference, which passes through the modulation electrode pair on the sensor The optical signal propagating in the optical waveguide produces a modulation effect, so that the propagation constants of the two beams of linearly polarized light with different polarization modes are complementary to each other, and the two beams of linearly polarized light with different polarization modes are generated at the output end of the optical waveguide and the signal intensity of the electric field to be measured Corresponding phase difference; the polarization axis of the output polarization-maintaining fiber is coupled with the sensor on the axis at 0°, then the linearly polarized light of two orthogonal polarization modes with a certain phase difference propagates along the fast and slow axes of the polarization-maintaining fiber respectively; The two beams of linearly polarized light are split by the polarization beam splitter and propagate in the slow axis of the two polarization-maintaining fibers, and then enter the two arms of the Y-waveguide modulator at the same time; The voltage modulation signal corrects the phase difference of the two beams of linearly polarized light propagating in the two arms of the Y waveguide, and the two beams of linearly polarized light after correcting the phase difference interfere at the intersection of the Y branch of the Y waveguide modulator, and the generated interference signal The incoming light detector performs photoelectric conversion, and the converted electrical signal is input to the processor for mathematical operations. The processor outputs the control signal of the adjustable DC power supply module and the electric field signal to be measured according to the electrical signal, and the adjustable DC power supply module outputs The control signal provides the modulation signal for the Y waveguide modulator.
在使用本发明传感器系统进行电场测量之前，首先进行测量系统本身的标定和校正，以使测量系统在最佳状态下工作，保证测量系统的测量精确性和稳定性。Before using the sensor system of the present invention to measure the electric field, the calibration and correction of the measurement system itself should be carried out first, so that the measurement system can work in the best state and ensure the measurement accuracy and stability of the measurement system.
标定方法为：The calibration method is:
设传感器系统的传递函数如式2所示：Suppose the transfer function of the sensor system is shown in Equation 2:
其中A为反映了激光源输出的光功率、光路损耗及探测器的光电转换系数；b为传感器的消光比，取决于保偏光纤与传感器中光波导的耦合工艺；为传感器的静态偏置点，取决于光波导的几何尺寸；Eπ为传感器的半波电场，取决于传感器中铌酸锂晶体、天线及调制电极的几何尺寸；E为待测电场信号，V为探测器输出的电压信号，为Y波导调制器为传感器附加的偏置，可表示为下式：Among them, A reflects the optical power output by the laser source, the optical path loss and the photoelectric conversion coefficient of the detector; b is the extinction ratio of the sensor, which depends on the coupling process between the polarization-maintaining fiber and the optical waveguide in the sensor; is the static bias point of the sensor, which depends on the geometry of the optical waveguide; E π is the half-wave electric field of the sensor, which depends on the geometry of the lithium niobate crystal, antenna and modulation electrode in the sensor; E is the electric field signal to be measured, V is the voltage signal output by the detector, The bias added to the sensor for the Y waveguide modulator can be expressed as the following formula:
其中Vπ为Y波导调制器的半波电压，取决于Y波导调制器中铌酸锂晶体及调制电极的几何尺寸；Vin为通过可调直流电源模块加载在Y波导调制器上的电压信号；为Y波导调制器为传感器附加的偏置。Among them, V π is the half-wave voltage of the Y waveguide modulator, which depends on the geometric dimensions of the lithium niobate crystal and the modulating electrode in the Y waveguide modulator; V in is the voltage signal loaded on the Y waveguide modulator through the adjustable DC power module ; Additional bias for the sensor for the Y-waveguide modulator.
在测量电场信号前，将传感器置于E=0V/m的环境（或通过将传感器罩在一个密闭铁盒里通过屏蔽的方法创造出一个E=0V/m的环境），此时系统传递函数如式4所示。通过处理器输出的控制信号控制可调直流电源模块，使得可调直流电源模块输出的电压值以一定间隔从0到Vπ变动，可调直流电源模块输出的电压值提供给Y波导调制器，使得从0到Vπ变动。每变动可调直流电源模块一个电压值时，通过处理器记录下探测器的输出电压V，即传递函数的输出值V。根据传递函数（式4）的特征可以知道，从0到Vπ变动时，探测器输出电压V总能取得一个最大值Vmax和一个最小值Vmin，如式5所示，并被处理器记录。Before measuring the electric field signal, put the sensor in the environment of E=0V/m (or create an environment of E=0V/m by covering the sensor in a closed iron box and shielding the method), at this time the system transfer function As shown in formula 4. The adjustable DC power module is controlled by the control signal output by the processor, so that the voltage value output by the adjustable DC power module changes from 0 to V π at a certain interval, and the voltage value output by the adjustable DC power module is provided to the Y waveguide modulator, make Varies from 0 to V π . Whenever a voltage value of the adjustable DC power supply module is changed, the processor records the output voltage V of the detector, that is, the output value V of the transfer function. According to the characteristics of the transfer function (Equation 4), it can be known that When changing from 0 to V π , the detector output voltage V can always obtain a maximum value V max and a minimum value V min , as shown in Equation 5, and are recorded by the processor.
根据处理器记录的Vmax和Vmin，通过数学运算得到传递函数的A值和b值，如式6所示，并将A值和b值存储在处理器中，以备之后电场测量时反推出待测电场值，即实现了传感器系统的标定工作，标定过程不需要借助已有技术中标定工作所必须的平行板电极和较高电压幅值（通常在10kV以上）的电压源等设备。According to the V max and V min recorded by the processor, the A value and the b value of the transfer function are obtained through mathematical operations, as shown in Equation 6, and the A value and the b value are stored in the processor for future reference when the electric field is measured The electric field value to be measured is released, which realizes the calibration of the sensor system. The calibration process does not need to use parallel plate electrodes and voltage sources with higher voltage amplitudes (usually above 10kV) that are necessary for calibration in the prior art.
校正方法为：The correction method is:
通过处理器输出的控制信号控制可调直流电源模块，使得可调直流电源模块输出的电压值以一定间隔从0到Vπ变动，可调直流电源模块输出的电压值提供给Y波导调制器，使得从0到Vπ变动，探测器的输出电压V也发生相应变动。每变动可调直流电源模块一个电压值时，通过处理器记录下探测器的输出电压V，并与处理器中存储的电压值V＝A＝[Vmax+Vmin]/2进行比较，当两者相等时，停止变动处理器输出的控制信号，记录并持续输出当前的控制信号值。由传递函数（式4）可知，当光探测器的输出值V＝A＝[Vmax+Vmin]/2，此时系统的传递函数可以重写成式7，此时测量系统工作在最佳状态，即完成了传感器系统的校正工作。The adjustable DC power module is controlled by the control signal output by the processor, so that the voltage value output by the adjustable DC power module changes from 0 to V π at a certain interval, and the voltage value output by the adjustable DC power module is provided to the Y waveguide modulator, make From 0 to V π changes, the output voltage V of the detector also changes accordingly. Whenever a voltage value of the adjustable DC power supply module is changed, the output voltage V of the detector is recorded through the processor, and compared with the voltage value V=A=[V max +V min ]/2 stored in the processor, when When the two are equal, stop changing the control signal output by the processor, record and continuously output the current control signal value. From the transfer function (Formula 4), it can be seen that when the output value of the photodetector V=A=[V max +V min ]/2, then The transfer function of the system can be rewritten as Equation 7. At this time, the measurement system works in the best state, that is, the calibration of the sensor system is completed.
在传感器系统的标定和校正过程完成之后，即可将传感器置于待测电场下进行电场测量工作。电场测量方法为：After the calibration and calibration process of the sensor system is completed, the sensor can be placed under the electric field to be measured for electric field measurement. The electric field measurement method is:
传感器系统的传递函数如式7所示，A，b两个参数已经存储在处理器之中，根据探测器输出值V即可通过处理器的数学运算反推出待测电场值E。The transfer function of the sensor system is shown in Equation 7. The two parameters A and b have been stored in the processor. According to the output value V of the detector, the electric field value E to be measured can be reversed by the mathematical operation of the processor.
本发明的一个实施例中，所用的激光源1采用Sumimoto公司的激光源STL5411；传感器3的结构为：在铌酸锂（LiNbO3）晶片7上表面采用钛金属扩散方法制备光波导4，在光波导的两侧采用光刻方法加工出天线5和调制电极6，其中铌酸锂晶片的长度为20mm，宽度为5mm，厚度为1mm；探测器9采用NewFocus公司的探测器1592；Y波导调制器11采用北京浦丹光电技术有限公司的Y波导调制器GATV-15-10-0-A；处理器12采用德州仪器公司的处理器TMS320C6472，可同时实现模数转换、比较器、数学运算等功能；可调直流电源模块13采用德州仪器公司的可调直流电源模块LM4041-N-Q1。In one embodiment of the present invention, the laser source 1 used adopts the laser source STL5411 of Sumimoto Company; Antenna 5 and modulation electrode 6 are processed by photolithography on both sides of the optical waveguide. The length of the lithium niobate wafer is 20mm, the width is 5mm, and the thickness is 1mm; the detector 9 is the detector 1592 of NewFocus Company; The device 11 adopts the Y waveguide modulator GATV-15-10-0-A of Beijing Pudan Optoelectronics Technology Co., Ltd.; the processor 12 adopts the processor TMS320C6472 of Texas Instruments, which can simultaneously realize analog-to-digital conversion, comparator, mathematical operations, etc. Function; the adjustable DC power module 13 adopts the adjustable DC power module LM4041-N-Q1 of Texas Instruments.
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