CN103592748B - Scaling projection optics system and image projection device - Google Patents
Scaling projection optics system and image projection device Download PDFInfo
- Publication number
- CN103592748B CN103592748B CN201310349233.8A CN201310349233A CN103592748B CN 103592748 B CN103592748 B CN 103592748B CN 201310349233 A CN201310349233 A CN 201310349233A CN 103592748 B CN103592748 B CN 103592748B
- Authority
- CN
- China
- Prior art keywords
- lens
- battery
- scaling
- wide
- projection optics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The present invention relates to scale projection optics system and image projection device, this scaling projection optics system possesses overall 1st～the 6th battery of lens in order with the positive each focal power of the positive negative and positive of negative and positive successively from enlargement conjugation side to reduction conjugate side, when scaling to wide-angle side from focal length end, above-mentioned 3rd battery of lens and above-mentioned 5th battery of lens move from above-mentioned enlargement conjugation side to above-mentioned reduction conjugate side, above-mentioned reduction conjugate side is substantially telecentric iris, and above-mentioned 4th battery of lens has minus lens, plus lens and the aperture diaphragm of more than 2 from above-mentioned enlargement conjugation side successively.And, the image projection device of the present invention includes this scaling projection optics system.
Description
Technical field
The present invention relates to change pantograph ratio the image light enlarging projection that formed by image formation component to screen
On scaling projection optics system and employ the image projection device of this scaling projection optics system.
Background technology
The image projection device being commonly referred to as projector is the image light enlarging projection formed by image formation component
Device on screen.Especially for the image projection device of film, it is required figure along with the universal of digital movie
As forming the miniaturization of element and high-precision refinement, the scaling being equipped on the image projection device of film therewith together is thrown
Penetrate optical system and be also required to miniaturization and high-resolution.
As this scaling projection optics system, such as have Japanese Laid-Open 2001-108900 publication (patent documentation 1),
Japanese Laid-Open 2003-015038 publication (patent documentation 2) and Japanese Laid-Open 2002-350727 publication (patent
Document 3) disclosed in optical system.
This projection zoom lens disclosed in patent documentation 1 is to be amplified by plane picture and be allowed to the projection of projection imaging
With zoom lens, by from Zoom Side successively configuration there is the 1st～the 6th group of the positive each focal power of the positive negative and positive of negative and positive form,
When projection distance changes, in order to make plane picture be projected face conjugation, the 1st group carries out the movement along optical axis direction, contracting
When putting, fixing for the 1st group, the 4th group, the 6th group, the 2nd group, the 3rd group, the 5th group carries out the movement along optical axis direction, wide-angle side whole
The focal length of system: fw, back focus (value in air): bf, lens total length (from the 1st group near the face of Zoom Side to the 6th group
The length in the face near reduced side): OAL, the focal length of the 3rd group: f3, constitute Abbe number average of the convex lens of the 6th group
Value: ν 6P, constitutes the meansigma methods of the Abbe number of the concavees lens of the 4th group: ν 4M, constitutes Abbe number average of the concavees lens of the 5th group
Value: ν 5M meets OAL ＞ 90 bf/fw, 1.5 ＜ f3/fw ＜ 2.5, ν 6P ＞ 50, each conditional of (ν 4M+ ν 5M)/2 ＜ 40.
Projection zoom lens disclosed in above-mentioned patent documentation 2 by from Zoom Side successively configuration to have negative and positive positive and negative
The the 1st～the 6th group of the most positive each focal power, and between above-mentioned 3rd, the 4th battery of lens, there is aperture diaphragm and form, it is from Radix Rumicis
End when focal length end carries out continuously zooming, above-mentioned 1st, the 4th, the 6th battery of lens fixed, above-mentioned 2nd, the 3rd, the 5th battery of lens exists
The projection zoom lens of movement on optical axis, when being set to fw by the focal length of the whole system of wide-angle side, by the focal length of the 1st battery of lens
It is set to f1, is that back focus during infinity is set to Bf by the conjugate point of Zoom Side, when the length of whole system is set to L, they
Meet condition: 1.4 ＜ Bf/fw, 1.0 ＜ | f1|/fw ＜ 1.7,6.5 ＜ L/fw ＜ 9.0.
It addition, the projection zoom lens disclosed in above-mentioned patent documentation 3 is just to have negative and positive successively from Zoom Side
The projection zoom lens of the reduced side possessing 6 compositions substantially telecentric iris of the 1st～the 6th group of each focal power that negative and positive is positive,
From focal length end to wide-angle side scale time above-mentioned 3rd group and above-mentioned 5th group from amplify lateral reduced side move, above-mentioned 4th group has
Diaphragm.
In order to realize high-resolution, it is desirable to chromatic aberration and multiplying power chromatic aberration etc. on suppression spherical aberration, curvature of the image, axle
Each aberration.But, owing to being more set to high pantograph ratio, then between focal length end and wide-angle side, each aberration more significantly changes, more than institute
State requirement and be in the situation incompatible with high pantograph ratio.Accordingly, it is difficult to take into account high-resolution and high pantograph ratio.
If studying above-mentioned patent documentation 1～patent documentation 3 from this viewpoint, then at above-mentioned patent documentation 1 and specially
In profit projection zoom lens disclosed in document 2, if the high-resolution of realization, then comprise the composition of the 4th battery of lens of diaphragm not
Suitably, it is believed that cannot effectively suppress spherical aberration.It addition, it is saturating at the projection zoom disclosed in above-mentioned patent documentation 3
In mirror, if the high-resolution of realization, then the suppression of the chromatic aberration of the 4th battery of lens is insufficient, it is believed that cause in wide-angle side and
Focal length end chromatic aberration amplifies.
Summary of the invention
The present invention is the invention made in view of the foregoing, its object is to, it is provided that can fully suppress spherical aberration,
Each aberration such as chromatic aberration and multiplying power chromatic aberration on curvature of the image, axle and realize the scaling projection optics system of higher resolution with
And employ the image projection device of this scaling projection optics system.
Scaling projection optics system involved in the present invention possesses entirety successively and depends on from enlargement conjugation side to reduction conjugate side
Secondary 1st～the 6th battery of lens with the positive each focal power of the positive negative and positive of negative and positive, when scaling to wide-angle side from focal length end, the above-mentioned 3rd
Battery of lens and above-mentioned 5th battery of lens move to above-mentioned reduction conjugate side from above-mentioned enlargement conjugation side, and above-mentioned reduction conjugate side is
Substantially telecentric iris, above-mentioned 4th battery of lens has minus lens, plus lens and the hole of more than 2 from above-mentioned enlargement conjugation side successively
Footpath diaphragm.And, the image projection device that the present invention relates to includes this scaling projection optics system.Therefore, the present invention relates to
Scaling projection optics system and image projection device can be adequately suppressed on spherical aberration, curvature of the image, axle chromatic aberration with
And each aberration such as multiplying power chromatic aberration, it is possible to realize higher resolution.
Above-mentioned and other the purpose of the present invention, feature and advantage can be clear according to greater detail below record and accompanying drawing
Chu understands.
Accompanying drawing explanation
Fig. 1 be for illustrate in embodiment scaling projection optics system, schematically show its constitute lens
Sectional view.
Fig. 2 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 1.
Fig. 3 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 2.
Fig. 4 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 3.
Fig. 5 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 4.
Fig. 6 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 5.
Fig. 7 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 6.
Fig. 8 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 7.
Fig. 9 is the sectional view of the arrangement of the lens in the scaling projection optics system representing embodiment 8.
Figure 10 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 1.
Figure 11 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 1.
Figure 12 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 2.
Figure 13 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 2.
Figure 14 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 3.
Figure 15 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 3.
Figure 16 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 4.
Figure 17 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 4.
Figure 18 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 5.
Figure 19 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 5.
Figure 20 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 6.
Figure 21 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 6.
Figure 22 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 7.
Figure 23 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 7.
Figure 24 is the longitudinal aberration figure of the focal length end in the scaling projection optics system of embodiment 8.
Figure 25 is the longitudinal aberration figure of the wide-angle side in the scaling projection optics system of embodiment 8.
Detailed description of the invention
Hereinafter, based on accompanying drawing, an involved in the present invention embodiment is described.Wherein, be labelled with in the various figures identical
Constituting of reference represents it is identical composition, and suitably the description thereof will be omitted.It addition, the lens number in cemented lens is engaging
Lens entirety not 1, utilizes the signal-lens number constituting cemented lens to represent.
The definition ＞ of the main term of ＜
The term this specification used in the following description is defined as foloows.
A () refractive index nd is the refractive index of the wavelength (587.56nm) for d line.
B () Abbe number refers to will be for d line, F line (wavelength 486.13nm), the refractive index of C line (wavelength 656.28nm)
It being set to nd, nF, nC, and in the case of Abbe number is set to ν d, with ν d=(nd-1)/the definition of (nF-nC) obtains
Abbe number ν d.
C () is by θg、FIt is defined to indicate that the index of anomalous dispersion.Ng is being set to for g line (wavelength 435.84nm)
During refractive index, θg、F=(ng-nF)/(nF-nC).Additionally by △ θg、FIt is defined to indicate that the glass material of anomalous dispersion and standard
The index deviateing what degree compared by material.
△θg、F=θg、F-(0.6438-0.001682 × ν d)
D (), for lens, in the case of employing " recessed ", " convex " or " concavo-convex " this expression, they represent optical axis
The lens shape at neighbouring (immediate vicinity of lens) place.
E () constitutes the statement of the focal power (luminous power, the inverse of focal length) in each simple lens of cemented lens is simple lens
Lens face both sides be the power in the case of air.
F resin material that () compound non-spherical lens is used is due to the additional function of only base plate glass material, institute
Not use as single optical component, and as with base plate glass material, there is the use that aspheric situation is equal, thoroughly
Eyeglass number is also processed as 1.And, the index of refraction in lens is also the refractive index of the glass material becoming substrate.Compound aspheric surface
Lens are to apply thin resin material on the glass material of substrate and be formed as the lens of aspherical shape becoming.
The scaling projection optics system of ＜ mono-embodiment and employ the image projection of this scaling projection optics system
The explanation ＞ of device
Fig. 1 be for illustrate in embodiment scaling projection optics system, schematically show its constitute lens
Sectional view.
Scaling projection optics system in present embodiment is the image light enlarging projection formed by image formation component
Optical system on the screen being configured in the position leaving predetermined distance.
Employ the image projection device of this scaling projection optics system possess formed image light image formation component and
The projection optics system of the above-mentioned image light that enlarging projection is formed by above-mentioned image formation component, this projection optics system can use
The scaling projection optics system of present embodiment.More specifically, image projection device possesses the scaling projection of present embodiment
Optical system, the formation image formation component of image light, the light source sending illumination light and the above-mentioned photograph that will go out from light source radiation
Mingguang City guides the lamp optical system of above-mentioned image formation component.Image formation component is by based on being inputted from image circuit
Picture signal above-mentioned illumination light is modulated, form the spatial optical modulation element of image light.Such image forms unit
Part e.g. DMD(Digital Micromirror Device, DMD), reflective liquid crystal panel and transmission-type
Liquid crystal panel etc..
DMD possesses by being formed along the both direction two-dimensional arrangement of Line independent by multiple small mirror elements
Mirror surface, the reflection angle being configured to each mirror elements can be to separate both direction switching.Above-mentioned each
Mirror elements is corresponding with the pixel of the image being projected onto a screen.If the side in above-mentioned two direction is set angle of reflection
Degree, then mirror elements is the state of " opening (ON) ", the mirror elements of this opening the image light reflected is via contracting
Put projection optics system to be projected onto a screen.On the other hand, if the opposing party in above-mentioned 2 directions is set reflection angle,
Then reflecting mirror is the state of " Guan Bi (OFF) ", and pixel screen on corresponding with the mirror elements of this closure state is shown
For black pixel.
The scaling projection optics system 1 that such image projection device is used is e.g. as it is shown in figure 1, be conjugated from amplifying
Lateral reduction conjugate side has the optical system of the 1st～the 6th battery of lens 11～16 successively.Wherein, the scaling projection illustrated in Fig. 1
Optical system 1 is the scaling projection optics system 1A(Fig. 2 with the 1st embodiment described later) identical composition.And, at this scaling
In projection optics system 1, moved along optical axis direction by the 1st battery of lens and focus.
It addition, the 1st battery of lens 11 entirety has negative focal power, fix when scaling.More specifically, shown in Fig. 1
Example in, the 1st battery of lens 11 is made up of 7 the 1st～the 7th lens 111～117.1st lens 111 are convex to enlargement conjugation side
Diverging meniscus lens (meniscus lens), the 2nd lens 112 are the plus lens of biconvex, and the 3rd lens 113 are to enlargement conjugation side
Convex diverging meniscus lens, the 4th lens 114 are the diverging meniscus lenses convex to enlargement conjugation side, and the 5th lens 115 are the negative saturating of concave-concave
Mirror, the 6th lens 116 are the plus lens of biconvex, and, the 7th lens 117 are the minus lenses of concave-concave.
2nd battery of lens 12 entirety has positive focal power, movable when scaling.More specifically, at the example shown in Fig. 1
In, the 2nd battery of lens 12 is made up of 1 the 8th lens 121.8th lens 121 are the plus lens of biconvex.
3rd battery of lens 13 entirety has positive focal power, movable when scaling.More specifically, at the example shown in Fig. 1
In, the 3rd battery of lens 13 is made up of 1 the 9th lens 131.9th lens 131 are the plus lens of biconvex.
4th battery of lens 14 entirety has negative focal power, fixes when scaling.More specifically, at the example shown in Fig. 1
In, the 4th battery of lens 14 is made up of 3 the 10th～the 12nd lens 141～143.10th lens 141 are the minus lenses of concave-concave, the 11st
Lens 142 are the diverging meniscus lenses convex to enlargement conjugation side, and, the 12nd lens 143 are the plus lens of biconvex.
5th battery of lens 15 entirety has positive focal power, movable when scaling.More specifically, at the example shown in Fig. 1
In, the 5th battery of lens 15 is made up of 6 the 13rd～the 18th lens 151～156.13rd lens 151 be to enlargement conjugation side recessed just
Meniscus lens, the 14th lens 152 are the minus lenses of concave-concave, and the 15th lens 153 are the plus lens of biconvex, and the 16th lens 154 are double
Convex plus lens, the 17th lens 155 are the minus lenses of concave-concave, and, the 18th lens 116 are the plus lens of biconvex.
6th battery of lens 16 entirety has positive focal power, fixes when scaling.More specifically, at the example shown in Fig. 1
In, the 6th battery of lens 16 is made up of 2 the 19th and the 20th lens 161,162.19th lens 161 are the plus lens of biconvex, and
And, the 20th lens 162 are the plus lens of the plano-convex of convex to enlargement conjugation side (being flat in reduction conjugate side).
Each lens 111～162 of these the 1st～the 6th battery of lens 11～16 can be such as glass lens, the most also
Can be the resin material lens such as plastics.
Between the 4th battery of lens the 14 and the 5th battery of lens 15, i.e. at reduction conjugate side and the 5th battery of lens of the 4th battery of lens 14
The enlargement conjugation side of 15 is configured with the optical diaphragm 17 fixing when scaling.This optical diaphragm 17 is aperture diaphragm.
So, the 4th battery of lens 14 has the minus lens of more than 2, the most saturating successively from enlargement conjugation side to reduction conjugate side
Mirror and aperture diaphragm.In the present embodiment, the 4th battery of lens 14 possess these 2, the 10th lens the 141 and the 11st lens 142 bear
Lens, the plus lens of the 12nd lens 143 and aperture diaphragm 17.
It addition, when scaling to wide-angle side from focal length end, the 3rd battery of lens the 13 and the 5th battery of lens 13 is from enlargement conjugation side
Moving to the direction dullness of reduction conjugate side, reduction conjugate side is substantially telecentric iris (telecentric).In the example shown in Fig. 1
In son, the 2nd battery of lens 12, also when scaling to wide-angle side from focal length end, moves from enlargement conjugation side to direction, reduction conjugate side dullness
Dynamic.
And, in the example depicted in figure 1, be configured with in the reduction conjugate side of this scaling projection optics system 1 prism 18,
Light filter 19 and image formation component 20.Light filter 19 is the optical element of parallel flat shape, it is schematically indicated various
Optical light filter, the protection glass etc. of image formation component 20.Image formation component 20 is above-mentioned DMD, liquid crystal panel etc..Profit
Using these elements, the image light of image formation component 20 is by scaling projection optics system 1 along its optical axis AX with suitable scaling
Ratio is directed on screen, thus the image light of image formation component 20 is exaggerated and projects on screen.
The scaling projection optics system 1 so constituted has the positive negative and positive of negative and positive successively from enlargement conjugation side to reduction conjugate side
Positive 6 groups, when scaling to wide-angle side from focal length end the 3rd battery of lens the 13 and the 5th battery of lens 15 from enlargement conjugation side to reducing
Conjugate side moves.Therefore, for the 3rd battery of lens 13 with positive light coke, in wide-angle side close to the 4th compared with focal length end
Battery of lens 14, for the 5th battery of lens 15 with positive light coke, is bordering on the 4th battery of lens in focal length termination compared with wide-angle side
14.Therefore, the scaling projection optics system 1 of this composition is configured with and all has positive at focal length end near diaphragm in wide-angle side
The battery of lens of focal power.When near diaphragm, the positive light coke of configuration becomes big, optical system is in have owes burnt (under) side
To the trend of spherical aberration, if the correction to it is insufficient, then cause the resolution of axle glazing to reduce.But, in this enforcement
In the scaling projection optics system 1 of mode, the 4th battery of lens 14 has the minus lens, just of more than 2 from enlargement conjugation side successively
Lens and diaphragm (in the present embodiment, the respectively the 10th lens the 141, the 11st lens the 142, the 12nd lens 143 and aperture
Diaphragm 17).Therefore, the scaling projection optics system 1 of this composition is owing to connecting in the 4th battery of lens 14 so comprise diaphragm 17
Continuous use minus lens, it is possible to spherical aberration is revised to overfocus (over) side strength, available high resolution.
Additionally, in the above-described embodiment, the 4th battery of lens 14 can also can when scaling to wide-angle side from focal length end
Dynamic.
It addition, in the above-described embodiment, preferably by comprised for the 4th battery of lens from enlargement conjugation side
The △ θ of i minus lensg、FAnd focal power is set to △ θg、F4iAnd φ4i, by burnt for synthesis light overall for the optical system of wide-angle side
Degree is set to φwIn the case of, the conditional meeting following (1) in more than 2 minus lenses of the 4th battery of lens 14, the 4th is saturating
Another in above-mentioned more than 2 minus lenses of mirror group 14 meets the conditional of following (2).
0.003≤△θg、F≤ 0.05 (1)
-0.035≤(Σ (△ θg、F4i×φ4i))/φ w≤-0.001 (2)
In projection optics system, need to revise well chromatic aberration, but here from because of chromatic aberration and spherical image axle
The discrete viewpoint that the wavelength of difference causes is studied.Owing to imaging optical system whole system has positive focal power, institute
The trend bigger than the focal power for long wavelength to be in the focal power of the light for short wavelength, therefore can produce axle colouring as
Difference.It addition, for the spherical aberration produced because of the light by lens perimeter, owing to the refractive index of lens is because of wavelength difference
And different, so produce because of wavelength cause discrete.
In order to suppress chromatic aberration on these axles and spherical aberration because of wavelength cause discrete, configured near diaphragm
4th battery of lens 14, according to the mode specified by conditional (1) and conditional (2), possesses the minus lens with anomalous dispersion.
When using the minus lens so near diaphragm with anomalous dispersion, the focal position of the light of melancholy short wavelength is to crossing coke side
Mobile, it is possible to revise chromatic aberration on axle.It is additionally, since and is got over by the light of this minus lens periphery with anomalous dispersion
It is that the light of short wavelength is then got over and become the effect of overfocus by spherical aberration, so causing because of wavelength of spherical aberration can also be revised
Discrete.Therefore, the scaling projection optics system 1 of this composition is by meeting conditional (1) and conditional (2), it is possible to press down
On axle processed, the color of chromatic aberration and spherical aberration is discrete, available high resolution.
Wherein, above-mentioned conditional (1) defines the size of anomalous dispersion.When higher than the upper limit of this conditional (1), by
Became coke side in spherical aberration for the light of short wavelength in the entire system, thus the color of spherical aberration discrete be excessive
Revise, the most preferably.On the other hand, when less than the lower limit of conditional (1), due in the entire system for the light of short wavelength
Spherical aberration become deficient coke side, so the color of spherical aberration is discrete for revising not, the most preferably.It addition, when 4 groups whole bear
When lens are higher than the higher limit of this conditional (1), on axle, chromatic aberration is at long wavelength side for owing Jiao, is overfocus at short wavelength side, no
Preferably.Thus, the spot position deflection causing the light of long wavelength side and short wavelength side defocuses direction skew, gathering at reference wavelength
Optical position spotlight diameter is more than the size of 1 pixel of pattern-creating element, the most preferably.On the other hand, if less than conditional (1)
Lower limit, then can cause phenomenon contrary to the above, on axle, chromatic aberration is overfocus at long wavelength side, is deficient at short wavelength side
Jiao, the most preferably.Equally, cause the spot position spotlight diameter at reference wavelength more than 1 pixel big of pattern-creating element
Little, the most preferably.
It addition, above-mentioned conditional 2 is the anomalous dispersion to each minus lens contained by the 4th battery of lens 14 is multiplied by respective light
Focal power and the summation of value that obtains.If higher than the upper limit of this conditional (2), then due in the entire system for the light of short wavelength
The spherical aberration of line became coke side, so the color of spherical aberration is discrete for over-correction, the most preferably.On the other hand, if being less than
The lower limit of conditional (2), then become deficient coke side due to spherical aberration for the light of short wavelength in the entire system, so ball
The color of face aberration is discrete for revising not, the most preferably.If it addition, higher than the upper limit of conditional (2), then gathering relative to focal position
Light to the long wavelength of depths light be condensed to relative to focal position in front of the departure defocusing direction of light of short wavelength
Exceed the size of chromatic aberration on the axle that spotlight diameter is bigger than the size of the 1 of pattern-creating element pixel, the most preferably.The opposing party
Face, in the case of the lower limit of less-than condition formula (2), relative to focal position be concentrated in front of the light of long wavelength with relative
The departure defocusing direction of the light being condensed to the short wavelength of depths in focal position can exceed spotlight diameter and generate unit than image
The size of chromatic aberration on the axle that the size of 1 pixel of part is big, the most preferably.
It addition, in the above-described embodiment, under in more than 2 minus lenses of the preferably the 4th battery of lens 14 meets
Stating the conditional of (3), another in above-mentioned more than 2 minus lenses of the 4th battery of lens 14 meets the conditional of following (4).
0.03≤△θg、F≤ 0.05 (3)
-0.035≤(Σ (△ θg、F4i× φ))/φ4i≤-0.01 (4)
The scaling projection optics system of this composition is by meeting conditional (3) and conditional (4), above-mentioned with meeting
The scaling projection optics system of conditional (1) and conditional (2) is compared, and anomalous dispersion becomes higher, it is possible to press down further
On axle processed, the color of chromatic aberration and spherical aberration is discrete, available higher resolution.
If it addition, whole minus lenses of 4 groups are higher than the higher limit of this conditional (3), then on axle chromatic aberration at long wavelength side
For deficient Jiao, it is overfocus at short wavelength side, the most preferably.Thus, cause the spot position of light of long wavelength side and short wavelength side to dissipating
The deviation of burnt direction, the spot position spotlight diameter at reference wavelength can be the most excellent more than the size of 1 pixel of pattern-creating element
Choosing.If the value of conditional (3) diminishes, then have at long wavelength side, by the light of periphery with respect to the light at the center of lens
More to entering front optically focused, at short wavelength side, by the light of periphery on the contrary with respect to the light at center of lens more to inner side optically focused
Trend.If less than the lower limit of conditional (3), the light of the most above-mentioned long wavelength to nearby optically focused and above-mentioned to inner side optically focused
The departure defocusing direction of the light of short wavelength can exceed on the axle more than the size of 1 pixel of pattern-creating element of the optically focused footpath
The size of chromatic aberration, the most preferably.
It addition, in composition within the higher limit converging on conditional (4), there is the color more effectively suppressing spherical aberration
The effect of deviation, it is possible to by relative focal positions to the light of inner side optically focused with relative to focal position dissipating to the light of nearby optically focused
The size of chromatic aberration on the axle of the size degree that departure suppression is 0.5 pixel becoming pattern-creating element in burnt direction,
The most preferred.Within converging on the higher limit of the conditional (4) narrower than the higher limit of conditional (2), need minus lens
The △ θ such as the FCD1 using such as HOYA companyg、F> 0 glass material, and to plus lens use △ θg、F< the glass material of 0
Material.On the other hand, in the case of the lower limit less than conditional (4), relative to focal position to the long wavelength of nearby optically focused
Light can exceed spotlight diameter ratio with relative to focal position to the departure defocusing direction of the light of the short wavelength of inner side optically focused
The size of chromatic aberration on the axle that the size of 1 pixel of pattern-creating element is big, the most preferably.
From such a viewpoint, more preferably conditional (3A), and be conditional (4A).
0.032≤△θg、F≤ 0.05 (3A)
-0.028≤(Σ (△ θg、F4i× φ))/φ4i≤-0.01 (4A)
It addition, in the above-described embodiment, when by saturating for the i-th from enlargement conjugation side contained by the 5th battery of lens
The △ θ of mirrorg、FAnd focal power is set to △ θg、F5iAnd φ5i, by from focal length end to wide-angle side scale time the 5th battery of lens 15 from
Enlargement conjugation side is set to dz5 to the amount of movement of reduction conjugate side, and when the focal length in the whole system of wide-angle side is set to fw,
Lens contained by preferably the 5th battery of lens 15 meet following (5) and (6) each conditional.
0.025≤(Σ (△ θg、F5i×φ5i))/φw≤ 0.065 (5)
0.4≤dz5/fw≤1 (6)
In scaling optical system, normally due to multiplying power chromatic aberration shakes to positive side and minus side between wide-angle side and focal length end
Move and resolution reduction.The scaling projection optics system 1 of above-mentioned composition, by meeting conditional (5), thus moves when scaling
The 5th battery of lens in effectively use the glass material with anomalous dispersion, it is possible to suppress the multiplying power chromatic aberration caused because of scaling
Variation, it is possible to decrease the significant difference of the multiplying power chromatic aberration between focal length end and wide-angle side.
More specifically, owing to the value of conditional (5) is the biggest, then the anomalous dispersion of plus lens is more close to Kz side, another
Aspect, the anomalous dispersion of minus lens is close to lange side, makes multiplying power chromatic aberration be close to negative direction so these each lens have
Effect.To for the light passed through in the 5th battery of lens 15, pass through high position in wide-angle side from optical axis compared with focal length end,
The multiplying power chromatic aberration of wide-angle side is close to negative direction than the multiplying power chromatic aberration the earth of focal length end.Thus, the scaling projection of above-mentioned composition
Optical system 1 can reduce the significant difference of the multiplying power chromatic aberration between wide-angle side and focal length end.
If it addition, higher than the higher limit of conditional (5), then multiplying power chromatic aberration is excessive to the vibration of minus side, multiplying power color as
The probability of the size that the departure of difference exceedes 2 pixels of pattern-creating element increases, the most preferably.On the other hand, when being less than
During the lower limit of conditional (5), the amplitude to positive side of multiplying power chromatic aberration is excessive, and it is raw that the bias of multiplying power chromatic aberration exceedes image
The probability becoming the size of 2 pixels of element increases, the most preferably.
It addition, amount of movement when conditional (6) defines the scaling of the 5th battery of lens 15.Movement due to the 5th battery of lens 15
Measuring the biggest, between focal length end and wide-angle side, the height by the light in lens is the most different, so the scaling of above-mentioned composition is thrown
Penetrate optical system 1 by meeting conditional (6), it is possible to effectively reduce the significant difference of multiplying power chromatic aberration.
It addition, along with the value of conditional (6) becomes big, when projecting lens entirety scales, the 5th battery of lens undertakes for scaling
Burden become big, the impact of the multiplying power chromatic aberration being had due to the 5th battery of lens cause the multiplying power color of Radix Rumicis side and long coke side as
The variation quantitative change of difference is big.If higher than the higher limit of conditional (6), then the size at wide-angle side or focal length end multiplying power chromatic aberration surpasses
The probability of the size crossing 2 pixels of pattern-creating element improves, the most preferably.On the other hand, become along with the value of conditional (6)
Little, when projecting lens entirety scales, the 5th battery of lens diminishes for the burden of scaling, and other lenses group undertakes for scaling
Burden becomes big.Therefore, the impact of the multiplying power chromatic aberration being had because of this battery of lens cause the multiplying power color of Radix Rumicis side and long coke side as
The variation quantitative change of difference is big.If higher than the higher limit of conditional (6), then the size at wide-angle side or focal length end multiplying power chromatic aberration surpasses
The probability of the size crossing 2 pixels of pattern-creating element improves, the most preferably.
From such a viewpoint, more preferably conditional (5A), and be conditional (6A).
0.045≤(Σ (△ θg、F5i×φ5i))/φ w≤0.065 (5A)
0.7≤dz5/fw≤1 (6A)
It addition, in the above-described embodiment, when the synthesis by the 2nd battery of lens the 12 and the 3rd battery of lens 13 of wide-angle side
Focal power is set to φ2,3W, and the synthesis focal power of the 2nd battery of lens the 12 and the 3rd battery of lens 13 of focal length end is set to φ2,3T
Time, preferably the synthesis focal power of the 2nd battery of lens the 12 and the 3rd battery of lens 13 of wide-angle side is relative to the 2nd battery of lens of focal length end
The ratio of the synthesis focal power of the 12 and the 3rd battery of lens 13 meets the conditional of following (7).
1.15≤φ2,3W/φ2,3T≤ 1.35 (7)
In scaling optical system, between wide-angle side and focal length end, typically there is the variation of curvature of the image.In more detail and
Speech, owing to the focal power in optical system entirety is stronger, so becoming overfocus by the image planes of focal length end than focal length end in wide-angle side
Side, the image planes of wide-angle side become deficient coke side, and resolution can be caused to reduce.In consideration of it, the scaling projection optics system 1 of above-mentioned composition
By meeting conditional (7), it is possible to the synthesis focal power of the 2nd battery of lens the 12 and the 3rd battery of lens 13 is strengthened at focal length end, can make
The image planes of focal length end are close to owe coke side compared with wide-angle side relatively.As a result, the scaling projection optics system 1 of above-mentioned composition can press down
The variation of the image planes between focal length end processed and wide-angle side.
Wherein, conditional (7) defines the Radix Rumicis side of synthesis focal power and the length of the 2nd battery of lens the 12 and the 3rd battery of lens 13
The ratio of coke side, and be specified to Radix Rumicis side and long coke side image planes variation width be converged in suitable scope.Along with conditional (7)
Value diminish, the synthesis focal power of long coke side becomes big, and the existence compared with the image planes of long coke side of the image planes of Radix Rumicis side became coke side
Trend.If higher than the higher limit of conditional (7), then at wide-angle side or focal length end, at the optimal focus position of axle glazing
The size of the spotlight diameter of peripheral light exceed the size of 1 pixel of pattern-creating element probability improve and the most preferred.With
The value conditional (7) becomes big, and the synthesis focal power of Radix Rumicis side becomes big, the existence compared with the image planes of Radix Rumicis side of the image planes of long coke side
Became the trend of coke side.If less than the lower limit of conditional (7), then at wide-angle side or focal length end, optimal Jiao of axle glazing
The probability of the size that the size of spotlight diameter of the peripheral light of some position exceedes 1 pixel of pattern-creating element improve and
The most preferred.
From this point of view, more preferably conditional (7A).
1.25≤φ2,3W/φ2,3T≤ 1.35 (7A)
It addition, in the above-described embodiment, the preferably the 1st battery of lens 11 comprises a piece of above condition meeting following (8)
The minus lens of formula.
0.03≤△θg、F≤ 0.05 (8)
Move when scaling by employing the 5th battery of lens 15 of the lens with anomalous dispersion, focal length end and Radix Rumicis
The variation of the multiplying power chromatic aberration between end is suppressed to a certain degree, but is difficult to completely remove the variation of above-mentioned multiplying power chromatic aberration.Mirror
In this, the scaling projection optics system 1 of above-mentioned composition, as by conditional (8) regulation, possesses in the 1st battery of lens 11 and has
The minus lens of anomalous dispersion.Therefore, the scaling projection optics system 1 of above-mentioned composition can suppress further above-mentioned multiplying power color as
The variation of difference.Suppression is moved when scaling by the 5th battery of lens 15 and is suppressed multiplying power remaining, above-mentioned afterwards i.e., further
Residual fraction in the variation of chromatic aberration.
If it addition, higher than the higher limit of conditional (8), then the difference of the multiplying power chromatic aberration of Radix Rumicis side and long coke side being pressed down
The effect of system is excessive, and oil gas becomes big, the most preferably at the amplitude that wide-angle side is negative.On the other hand, if being less than the lower limit of conditional (8)
Value, then insufficient with the effect that the difference of the multiplying power chromatic aberration of long coke side suppresses to Radix Rumicis side, in wide-angle side or focal length end
The probability of size of the size of any one multiplying power chromatic aberration 2 pixels exceeding pattern-creating element improve, the most preferably.
From this point of view, more preferably conditional (8A).
0.032≤△θg、F≤ 0.05 (8A)
It addition, in the above-described embodiment, the preferably the 1st battery of lens the 11～the 4th battery of lens 14 is the most remote burnt
System.
The scaling projection optics system 1 of this composition is by the 1st～the 4th lens configured by enlargement conjugation side than diaphragm 17
The synthesis system of group 11～14 substantially becomes remote Jiao, it is possible to the variation of F value between suppression focal length end and wide-angle side when scaling.More
Specifically, owing to the width of light beam between the 4th battery of lens the 14 and the 5th battery of lens 15 is almost parallel, so being difficult to because of the 5th lens
The movement of group 15 causes F value to change.Therefore, the scaling projection optics system 1 of above-mentioned composition can suppress the focal length end when scaling
And the F value variation between wide-angle side.
It addition, in the above-described embodiment, the motion track of the 2nd battery of lens 12 when preferably scaling is to amplifying conjugation
The u turn shape that side is convex.
In scaling optical system, owing to general focal length is different from wide-angle side at focal length end, so the focus position when scaling
Put and change.The variation of focal position during this scaling can be by the 5th battery of lens 15 to keep constant by focal position
Mode moves and solves.But, in this solution only adjusting focal position with the 5th battery of lens 15, when scaling
The variation of curvature of the image becomes big.In consideration of it, the scaling projection optics system 1 of above-mentioned composition is except making the 5th battery of lens when scaling
Outside 15 move, the 2nd battery of lens 12 is also made to move in the way of the track of the convex u turn shape in enlargement conjugation side describing, by
The variation of focal position and the variation of curvature of the image when this can reduce scaling.
The explanation ＞ of the more specifically embodiment (embodiment) of ＜ scaling projection optics system
Hereinafter, it is explained with reference to the concrete of scaling projection optics system 1 as shown in Figure 1 constitute.
Fig. 2～Fig. 9 is the arrangement of the lens in the scaling projection optics system representing the 1st embodiment～the 8th embodiment
Sectional view.Fig. 2 (A)～Fig. 9 (A) represents that the situation of focal length end, Fig. 2 (B)～Fig. 9 (B) represent the situation of wide-angle side respectively respectively.
In Fig. 2～Fig. 9, numbering ri(i=1 that each lens face is endowed, 2,3) it is in the case of the number of enlargement conjugation side
I-th lens face (wherein, the composition surface of lens is as a face number).Additionally, optical diaphragm ST face (is amplified altogether
Yoke side), the two sides of prism P1, the image forming surface of the two sides of parallel flat P2 and image formation component IG also serve as one
Face processes.The meaning of this process and reference is same in each embodiment 1～embodiment 8.But, it is not the most identical
The meaning, such as in Fig. 2～Fig. 9 of each embodiment 1～8, the lens face by enlargement conjugation side configuration is marked identical
Reference (r1), but it is not meant to that their curvature etc. is identical in each embodiment 1～8.
Each scaling projection optics system 1A～1G in 1st embodiment～the 7th embodiment each such as Fig. 2～Fig. 8 respectively
As shown in individual, there is by entirety to reduction conjugate side from enlargement conjugation side the fix when scaling the 1st of negative power successively
Battery of lens Gr1, entirety have the 2nd battery of lens Gr2 movable when scaling of positive light coke, entirety has contracting of positive light coke
The 3rd battery of lens Gr3, entirety movable when putting have the 4th battery of lens Gr4 fixing when scaling of negative power, entirety has
The 5th battery of lens Gr5 movable when scaling of positive light coke and entirety have the fix the 6th of positive light coke when scaling
Battery of lens Gr6 is constituted, and when scaling to wide-angle side from focal length end, the 3rd battery of lens Gr3 and the 5th battery of lens Gr5 is from amplifying conjugation
Lateral reduction conjugate side is moved, and reduction conjugate side is substantially telecentric iris, and the 4th battery of lens Gr4 possesses 2 from enlargement conjugation side successively
The above minus lens of sheet, plus lens and aperture diaphragm ST.That is, it is configured with between the 4th battery of lens Gr4 and the 5th battery of lens Gr5
Aperture diaphragm ST fixing during scaling.
And, in the reduction conjugate side of the 6th battery of lens Gr6, it is configured with rib successively to reduction conjugate side from enlargement conjugation side
The parallel flat P2 and image formation component IG such as mirror P1, various optical light filter, protection glass.
Under this composition, the image light that image formation component IG is formed along optical axis AX pass sequentially through parallel flat P2,
Prism P1, the 6th battery of lens Gr6, the 5th battery of lens Gr5, the 4th battery of lens Gr4(first pass through aperture diaphragm ST), the 3rd battery of lens
Gr3, the 2nd battery of lens Gr2 and the 1st lens Gr1, be directed on screen with suitable pantograph ratio, thus image formation component
The image light of IG is exaggerated and projects on screen.
More specifically, in scaling projection optics system 1A, 1D of the 1st and the 4th embodiment, the 1st battery of lens Gr1 by
7 the 1st～the 7th lens L1～L7 are constituted, and the 2nd battery of lens Gr2 is made up of 1 the 8th lens L8, and the 3rd battery of lens Gr3 is by 1 the 9th
Lens L9 is constituted, and the 4th battery of lens Gr4 is made up of 3 the 10th～the 12nd lens L10～L12, and the 5th battery of lens Gr5 is by 6 the 13rd
～the 18th lens L13～L18 constitute, the 6th battery of lens Gr6 is made up of 2 the 19th and the 20th lens L19, L20.That is, the 1st with
And the 4th scaling projection optics system 1A, 1D of embodiment be made up of 20 the 1st～the 20th lens L1～L20.And, the 1st with
And the 4th embodiment scaling projection optics system 1A, 1D in, when scaling to wide-angle side from focal length end, the 2nd, the 3rd and the 5th
Battery of lens Gr2, Gr3, Gr5 move from enlargement conjugation side to direction, reduction conjugate side dullness, and reduction conjugate side is substantially telecentric iris.
Here, the 1st embodiment is scaled projection optics system 1A and the 4th embodiment scaling projection optics system 1D and
Speech, the 4th, the 8th, the 11st, the 14th and the 20th lens L4, L8, L11, L14, L20 is different.
More specifically, in the scaling projection optics system 1A of the 1st embodiment, in the 1st battery of lens Gr1, the 1st lens
L1 is the diverging meniscus lens convex to enlargement conjugation side, and the 2nd lens L2 is the plus lens of biconvex, and the 3rd lens L3 is to amplifying conjugation
The diverging meniscus lens that side is convex, the 4th lens L4 is the diverging meniscus lens convex to enlargement conjugation side, and the 5th lens L5 is the negative saturating of concave-concave
Mirror, the 6th lens L6 is the plus lens of biconvex, and, the 7th lens L7 is the minus lens of concave-concave.On the other hand, in the 4th embodiment
Scaling projection optics system 1D in, in the 1st battery of lens Gr1, the 4th lens L4 is the minus lens of concave-concave.
It addition, in the scaling projection optics system 1A of the 1st embodiment, in the 2nd battery of lens Gr2, the 8th lens L8 is double
Convex plus lens.On the other hand, in the scaling projection optics system 1D of the 4th embodiment, in the 2nd battery of lens Gr2, the 8th is saturating
Mirror L8 is the positive meniscus lens convex to reduction conjugate side.
It addition, in scaling projection optics system 1A, 1D of the 1st and the 4th embodiment, in the 3rd battery of lens Gr3, the 9th
Lens L9 is the plus lens of biconvex.
It addition, in the scaling projection optics system 1A of the 1st embodiment, in the 4th battery of lens Gr4, the 10th lens L10 is
The minus lens of concave-concave, the 11st lens L11 is the diverging meniscus lens convex to enlargement conjugation side, and, the 12nd lens L12 is biconvex
Plus lens.And in the scaling projection optics system 1D of the 4th embodiment, in the 4th battery of lens Gr4, the 11st lens L11 is concave-concave
Minus lens.So, the 1st and the 4th scaling projection optics system 1A, 1D possess the 10th lens L10 and the 11st lens L11 this
Two panels minus lens and the plus lens of the 12nd lens L12, be configured with as described above in the reduction conjugate side of the 12nd lens L12
Aperture diaphragm ST fixing during scaling.
It addition, in the scaling projection optics system 1A of the 1st embodiment, in the 5th battery of lens Gr5, the 13rd lens L13 is
The positive meniscus lens recessed to enlargement conjugation side, the 14th lens L14 is the minus lens of concave-concave, and the 15th lens L15 is the most saturating of biconvex
Mirror, the 16th lens L16 is the plus lens of biconvex, and the 17th lens L17 is the minus lens of concave-concave, and, the 18th lens L18 is biconvex
Plus lens.And in the scaling projection optics system 1D of the 4th embodiment, in the 5th battery of lens Gr5, the 14th lens L14 be to
The diverging meniscus lens that reduction conjugate side is convex.
It addition, in the scaling projection optics system 1A of the 1st embodiment, in the 6th battery of lens Gr6, the 19th lens L19 is
The plus lens of biconvex, and, the 20th lens L20 is the most saturating of the plano-convex of convex to enlargement conjugation side (being flat in reduction conjugate side)
Mirror.And in the scaling projection optics system 1D of the 4th embodiment, in the 6th battery of lens Gr6, the 20th lens L20 be biconvex just
Lens.
It addition, in scaling projection optics system 1B, 1F of the 2nd and the 6th embodiment, more specifically, the 1st battery of lens
Gr1 is made up of 4 the 1st～the 4th lens L1～L4, and the 2nd battery of lens Gr2 is made up of 1 the 5th lens L5, and the 3rd battery of lens Gr3 is by 2
Sheet the 6th and the 7th lens L6, L7 are constituted, and the 4th battery of lens Gr4 is made up of 3 the 8th～the 10th lens L8～L10, the 5th battery of lens
Gr5 is made up of 6 the 11st～the 16th lens L11～L16, and the 6th battery of lens Gr6 is by 2 the 17th and the 18th lens L17, L18 structures
Become.That is, scaling projection optics system 1B, 1F of the the 2nd and the 6th embodiment are made up of 18 the 1st～the 18th lens L1～L18.
And, in scaling projection optics system 1B, 1F of the 2nd and the 6th embodiment, when scaling to wide-angle side from focal length end, the
2, the 3rd and the 5th battery of lens Gr2, Gr3, Gr5 moves, the 3rd and the 5th battery of lens Gr3, Gr5 two embodiments all from amplification
Being conjugated direction, lateral reduction conjugate side dullness to move, the 2nd battery of lens Gr2 is convex to enlargement conjugation side to describe in the 2nd embodiment
The mode of track of u turn shape move, and move from reduction conjugate side to direction, enlargement conjugation side dullness in the 4th embodiment
Dynamic, reduction conjugate side is all substantially telecentric iris two embodiments.
Here, the 2nd embodiment is scaled projection optics system 1B and the 6th embodiment scaling projection optics system 1F and
Speech, the 3rd, the 6th, the 15th, the 17th and the 18th lens L3, L6, L15, L17, L18 is different.
More specifically, in the scaling projection optics system 1B of the 2nd embodiment, in the 1st battery of lens Gr1, the 1st lens
L1 is the plus lens of biconvex, and the 2nd lens L2 is the diverging meniscus lens convex to enlargement conjugation side, and the 3rd lens L3 is to amplifying conjugation
The diverging meniscus lens that side is convex, and, the 4th lens L4 is the minus lens of concave-concave.And at the scaling projection optics system of the 6th embodiment
In 1F, in the 1st battery of lens Gr1, the 3rd lens L3 is the minus lens of concave-concave.
It addition, in scaling projection optics system 1B, 1F of the 2nd and the 6th embodiment, in the 2nd battery of lens Gr2, the 5th
Lens L5 is the plus lens of biconvex.
It addition, in the scaling projection optics system 1B of the 2nd embodiment, in the 3rd battery of lens Gr3, the 6th lens L6 be to
The positive meniscus lens that reduction conjugate side is convex, the 7th lens L7 is the positive meniscus lens convex to enlargement conjugation side.And in the 6th embodiment
Scaling projection optics system 1F in, in the 3rd battery of lens Gr3, the 6th lens L6 is the plus lens of biconvex.
It addition, in scaling projection optics system 1B, 1F of the 2nd and the 6th embodiment, in the 4th battery of lens Gr4, the 8th
Lens L8 is the diverging meniscus lens convex to enlargement conjugation side, and the 9th lens L9 is the minus lens of concave-concave, and, the 10th lens L10 is
The plus lens of biconvex.So, the 2nd and the 6th scaling projection optics system 1B, 1F possess the 8th lens L8 and the 9th lens L9 this
2 minus lenses and the plus lens of the 10th lens L10, be configured with in the reduction conjugate side of the 10th lens L10 as described above in contracting
Aperture diaphragm ST fixing when putting.
It addition, in the scaling projection optics system 1B of the 2nd embodiment, in the 5th battery of lens Gr5, the 11st lens L11 is
The positive meniscus lens recessed to enlargement conjugation side, the 12nd lens L12 is the minus lens of concave-concave, and the 13rd lens L13 is the most saturating of biconvex
Mirror, the 14th lens L14 is the plus lens of biconvex, and the 15th lens L15 is the diverging meniscus lens convex to enlargement conjugation side, and, the
16 lens L16 are the positive meniscus lens recessed to reduction conjugate side.And in the scaling projection optics system 1F of the 6th embodiment,
In 5th battery of lens Gr5, the 15th lens L15 is the minus lens of concave-concave.
It addition, in the scaling projection optics system 1B of the 2nd embodiment, in the 6th battery of lens Gr6, the 17th lens L17 is
The positive meniscus lens recessed to reduction conjugate side, and, the 18th lens L18 is (in reduction conjugate side is flat) convex to enlargement conjugation side
The plus lens of plano-convex.And in the scaling projection optics system 1F of the 6th embodiment, in the 6th battery of lens Gr6, the 18th lens
L18 is the positive meniscus lens recessed to reduction conjugate side.
It addition, in the scaling projection optics system 1C of the 3rd embodiment, more specifically, the 1st battery of lens Gr1 is by 3
1～the 3rd lens L1～L3 is constituted, and the 2nd battery of lens Gr2 is made up of 2 the 4th and the 5th lens L4, L5, and the 3rd battery of lens Gr3 is by 1
Sheet the 6th lens L6 is constituted, and the 4th battery of lens Gr4 is made up of 3 the 7th～the 9th lens L7～L9, and the 5th battery of lens Gr5 is by 5 the 10th
～the 14th lens L10～L14 constitute, the 6th battery of lens Gr6 is made up of 1 the 15th lens L15.That is, the scaling of the 3rd embodiment is thrown
Penetrate optical system 1C to be made up of 15 the 1st～the 15th lens L1～L15.And, at the scaling projection optics system of the 3rd embodiment
In 1C, when scaling to wide-angle side from focal length end, the 2nd, the 3rd and the 5th battery of lens Gr2, Gr3, Gr5 from enlargement conjugation side to contracting
Little conjugate side direction dullness moves, and reduction conjugate side is substantially telecentric iris.
More specifically, in the scaling projection optics system 1C of the 3rd embodiment, in the 1st battery of lens Gr1, the 1st lens
L1 is the plus lens of biconvex, and the 2nd lens L2 is the diverging meniscus lens convex to enlargement conjugation side, and the 3rd lens L3 is the negative saturating of concave-concave
Mirror.In the 2nd battery of lens Gr2, the 4th lens L4 is the diverging meniscus lens convex to enlargement conjugation side, the 5th lens L5 be biconvex just
Lens.These the 4th and the 5th lens L4, L5 are cemented lens.In the 3rd battery of lens Gr3, the 6th lens L6 is the most saturating of biconvex
Mirror.In the 4th battery of lens Gr4, the 7th lens L7 is the minus lens of concave-concave, and the 8th lens L8 is the minus lens of concave-concave, and, the 9th
Lens L9 is the plus lens of biconvex.So, the scaling projection optics system 1C of the 3rd embodiment possesses the 7th lens L7 and the 8th saturating
Mirror L8 this 2 minus lenses and plus lens of the 9th lens L9, be configured with as described above in the reduction conjugate side of the 9th lens L9
Aperture diaphragm ST fixing during scaling.In the 5th battery of lens Gr5, the positive bent moon that the 10th lens L10 is recessed to enlargement conjugation side is saturating
Mirror, the 11st lens L11 is the diverging meniscus lens convex to reduction conjugate side, and the 12nd lens L12 is the plus lens of biconvex, the 13rd lens
L13 is the minus lens of the plano-concave of recessed to reduction conjugate side (being flat in enlargement conjugation side), and, the 14th lens L14 is biconvex
Plus lens.In the 6th battery of lens Gr6, the 15th lens L15 is the plus lens of biconvex.
It addition, in the scaling projection optics system 1E of the 5th embodiment, more specifically, the 1st battery of lens Gr1 is by 7
1～the 7th lens L1～L7 is constituted, and the 2nd battery of lens Gr2 is made up of 1 the 8th lens L8, and the 3rd battery of lens Gr3 is by 1 the 9th lens
L9 is constituted, and the 4th battery of lens Gr4 is made up of 3 the 10th～the 12nd lens L10～L12, and the 5th battery of lens Gr5 is by 6 the 13rd～the
18 lens L13～L18 are constituted, and the 6th battery of lens Gr6 is made up of 1 the 19th lens L19.That is, the scaling projection light of the 5th embodiment
System 1E is made up of 19 the 1st～the 19th lens L1～L19.And, at the scaling projection optics system 1E of the 5th embodiment
In, when scaling to wide-angle side from focal length end, the 2nd, the 3rd and the 5th battery of lens Gr2, Gr3, Gr5 from enlargement conjugation side to reducing
Conjugate side direction dullness moves, and reduction conjugate side is substantially telecentric iris.
More specifically, in the scaling projection optics system 1E of the 5th embodiment, in the 1st battery of lens Gr1, the 1st lens
L1 is the diverging meniscus lens convex to enlargement conjugation side, and the 2nd lens L2 is the plus lens of biconvex, and the 3rd lens L3 is to amplifying conjugation
The diverging meniscus lens that side is convex, the 4th lens L4 is the minus lens of concave-concave, and the negative bent moon that the 5th lens L5 is convex to enlargement conjugation side is saturating
Mirror, the 6th lens L6 is the plus lens of biconvex, and, the 7th lens L7 is the minus lens of concave-concave.In the 2nd battery of lens Gr2, the 8th
Lens L8 is the plus lens of biconvex.In the 3rd battery of lens Gr3, the 9th lens L9 is the plus lens of biconvex.At the 4th battery of lens Gr4
In, the 10th lens L10 is the minus lens of concave-concave, and the 11st lens L11 is the minus lens of concave-concave, and, the 12nd lens L12 is biconvex
Plus lens.So, the scaling projection optics system 1E of the 5th embodiment possess the 10th lens L10 and the 11st lens L11 this 2
Individual minus lens and the plus lens of the 12nd lens L12, be configured with in the reduction conjugate side of the 12nd lens L12 as described above at scaling
Time fixing aperture diaphragm ST.In the 5th battery of lens Gr5, the 13rd lens L13 is the positive meniscus lens recessed to enlargement conjugation side,
14th lens L14 is the diverging meniscus lens convex to reduction conjugate side, and the 15th lens L15 is the plus lens of biconvex, the 16th lens L16
Being the plus lens of biconvex, the 17th lens L17 is the minus lens of concave-concave, and, the 18th lens L18 is the plus lens of biconvex.The 6th
In battery of lens Gr6, the 19th lens L19 is the plus lens of biconvex.So, the scaling projection optics system 1E of the 5th embodiment is relative
In the scaling projection optics system 1A of the 1st embodiment, the 6th battery of lens Gr6 is made up of 1 the 19th lens L19, and the 4th, the 5th, the 11st
And the 14th lens L4, L5, L11, L14 different.
It addition, in the scaling projection optics system 1G of the 7th embodiment, more specifically, the 1st battery of lens Gr1 is by 4
1～the 4th lens L1～L4 is constituted, and the 2nd battery of lens Gr2 is made up of 1 the 5th lens L5, the 3rd battery of lens Gr3 by 2 the 6th and
7th lens L6, L7 is constituted, and the 4th battery of lens Gr4 is made up of 4 the 8th～the 11st lens L8～L11, and the 5th battery of lens Gr5 is by 6
12nd～the 17th lens L12～L17 is constituted, and the 6th battery of lens Gr6 is made up of 2 the 18th and the 19th lens L18, L19.That is,
The scaling projection optics system 1G of 7 embodiments is made up of 19 the 1st～the 19th lens L1～L19.And, in the 7th embodiment
In scaling projection optics system 1G, when scaling to wide-angle side from focal length end, the 2nd, the 3rd and the 5th battery of lens Gr2, Gr3, Gr5
Moving from enlargement conjugation side to direction, reduction conjugate side dullness, reduction conjugate side is substantially telecentric iris.
More specifically, in the scaling projection optics system 1G of the 7th embodiment, in the 1st battery of lens Gr1, the 1st lens
L1 is the plus lens of biconvex, and the 2nd lens L2 is the diverging meniscus lens convex to enlargement conjugation side, and the 3rd lens L3 is to amplifying conjugation
The diverging meniscus lens that side is convex, and, the 4th lens L4 is the minus lens of concave-concave.In the 2nd battery of lens Gr2, the 5th lens L5 is double
Convex plus lens.In the 3rd battery of lens Gr3, the 6th lens L6 is the positive meniscus lens convex to reduction conjugate side, and the 7th lens L7 is
The plus lens of the plano-convex of convex to enlargement conjugation side (being flat in reduction conjugate side).In the 4th battery of lens Gr4, the 8th lens L8 is double
Recessed minus lens, the 9th lens L9 is the diverging meniscus lens convex to enlargement conjugation side, and the 10th lens L10 is the minus lens of concave-concave, and
And, the 11st lens L11 is the plus lens of biconvex.So, the scaling projection optics system 1G of the 7th embodiment possess the 8th lens L8,
9th lens L9 and the 10th lens L10 this 3 minus lenses and plus lens of the 11st lens L11, reducing of the 11st lens L11
Conjugate side is configured with the aperture diaphragm ST fixing when scaling as described above.In the 5th battery of lens Gr5, the 12nd lens L12 is
The positive meniscus lens recessed to enlargement conjugation side, the 13rd lens L13 is the flat of recessed to enlargement conjugation side (being flat in reduction conjugate side)
Recessed minus lens, the 14th lens L14 is the plus lens of biconvex, and the 15th lens L15 is the plus lens of biconvex, and the 16th lens L16 is
The minus lens of concave-concave, and, the 17th lens L17 is the plus lens of biconvex.In the 6th battery of lens Gr6, the 18th lens L18 be to
The plus lens of the plano-convex of enlargement conjugation side convex (being flat in reduction conjugate side), the 19th lens L19 is convex to enlargement conjugation side (in contracting
Little conjugate side is flat) the plus lens of plano-convex.
In scaling projection optics system 1A～1G of these the 1st～the 7th embodiments above-mentioned, the 4th battery of lens Gr4 is at scaling
Time fix, but in the scaling projection optics system 1H of the 8th embodiment, the 4th battery of lens Gr4 is movable when scaling.
The scaling projection optics system 1H of such 8th embodiment is as it is shown in figure 9, from enlargement conjugation side to reduction conjugate side
By entirety, there is the 1st battery of lens Gr1 fixing when scaling of negative power successively, entirety have positive light coke when scaling
Movable the 2nd battery of lens Gr2, entirety have the 3rd battery of lens Gr3 movable when scaling of positive light coke, entirety has negative light
The 4th battery of lens Gr4 movable when scaling of focal power, entirety have 5th battery of lens movable when scaling of positive light coke
Gr5 and entirety have the 6th battery of lens Gr6 fixing when scaling of positive light coke and constitute, when contracting to wide-angle side from focal length end
When putting, the 3rd battery of lens Gr3 and the 5th battery of lens Gr5 moves to reduction conjugate side from enlargement conjugation side, and reduction conjugate side is substantially
Telecentric iris, the 4th battery of lens Gr4 has more than 2 minus lenses, plus lens and aperture light from above-mentioned enlargement conjugation side successively
Door screen ST.That is, between the 4th battery of lens Gr4 and the 5th battery of lens Gr5, the aperture diaphragm ST fixing when scaling it is configured with.
And, in the reduction conjugate side of the 6th battery of lens Gr6, it is configured with rib successively to reduction conjugate side from enlargement conjugation side
The parallel flat P2 and and image formation component IG such as mirror P1, various optical light filter, protection glass.
Under this composition, the image light that image formation component IG is formed along optical axis AX pass sequentially through parallel flat P2,
Prism P1, the 6th battery of lens Gr6, the 5th battery of lens Gr5, the 4th battery of lens Gr4(first pass through aperture diaphragm ST), the 3rd battery of lens
Gr3, the 2nd battery of lens Gr2 and the 1st lens Gr1, be directed on screen with suitable pantograph ratio, thus image formation component
The image light of IG is exaggerated and projects on screen.
More specifically, the 1st battery of lens Gr1 is made up of 4 the 1st～the 4th lens L1～L4, and the 2nd battery of lens Gr2 is by 1
5th lens L5 is constituted, and the 3rd battery of lens Gr3 is made up of 2 the 6th and the 7th lens L6, L7, the 4th battery of lens Gr4 by 3 the 8th～
10th lens L8～L10 is constituted, and the 5th battery of lens Gr5 is made up of 6 the 11st～the 16th lens L11～L16, the 6th battery of lens Gr6
It is made up of 2 the 17th and the 18th lens L17, L18.That is, the scaling projection optics system 1H of the 8th embodiment by 18 the 1st～
18th lens L1～L18 is constituted.And, in the scaling projection optics system 1H of the 8th embodiment, when from focal length end to wide-angle side
During scaling, the 2nd, the 3rd, the 4th and the 5th battery of lens Gr2, Gr3, Gr4, Gr5 moves, and the 3rd～the 5th battery of lens Gr3～Gr5 is from putting
Big conjugation direction, lateral reduction conjugate side dullness moves, and the 2nd battery of lens Gr2 is dull to direction, enlargement conjugation side from reduction conjugate side
Mobile, reduction conjugate side is substantially telecentric iris.And, the 3rd battery of lens Gr3 and the 5th battery of lens Gr5 is relative to the 4th battery of lens
The amount of movement of Gr4, moves with relatively large amount of movement.
More specifically, in the scaling projection optics system 1H of the 8th embodiment, in the 1st battery of lens Gr1, the 1st lens
L1 is the plus lens of biconvex, and the 2nd lens L2 is the diverging meniscus lens convex to enlargement conjugation side, and the 3rd lens L3 is the negative saturating of concave-concave
Mirror, and, the 4th lens L4 is the minus lens of concave-concave.In the 2nd battery of lens Gr2, the 5th lens L5 is the plus lens of biconvex.?
In 3 battery of lens Gr3, the 6th lens L6 is the positive meniscus lens convex to enlargement conjugation side, and the 7th lens L7 is convex to enlargement conjugation side
Positive meniscus lens.In the 4th battery of lens Gr4, the 8th lens L8 is the diverging meniscus lens convex to enlargement conjugation side, the 9th lens L9
It is the minus lens of concave-concave, and, the 10th lens L10 is the plus lens of biconvex.So, the 8th scaling projection optics system 1H possesses
8th lens L8 and the 9th lens L9 this 2 minus lenses and plus lens of the 10th lens L10, reducing altogether at the 10th lens L10
Yoke side is arranged as described above the aperture diaphragm ST fixing when scaling.In the 5th battery of lens Gr5, the 11st lens L11 is to putting
The positive meniscus lens that big conjugate side is recessed, the 12nd lens L12 is the minus lens of concave-concave, and the 13rd lens L13 is the plus lens of biconvex, the
14 lens L14 are the plus lens of biconvex, and the 15th lens L15 is the minus lens of concave-concave, and, the 16th lens L16 is to amplifying altogether
The plus lens of the plano-convex of yoke side convex (being flat in reduction conjugate side).In the 6th battery of lens Gr6, the 17th lens L19 be biconvex just
Lens, and, the 18th lens L18 is the plus lens of the plano-convex of convex to enlargement conjugation side (being flat in reduction conjugate side).
Structure data in scaling projection optics system 1A～1H of these each embodiments 1～8 above-mentioned, each lens are such as
Under.Wherein, " CR " represents the radius of curvature (unit is mm) of each, and " d " represents the infinity focus state (tune of unlimited distance
Coke-like state) under optical axis on the interval (axle is spaced above) of each lens face, " nd " represents that each lens are relative to d line (wavelength
Refractive index 587.56nm), " ν d " represents Abbe number, and, " R " represents effective optical path radius.Further, since aperture diaphragm
ST, each of image forming surface of image formation component IG are plane, so their radius of curvature is ∞ (infinitely great).Separately
Outward, the prism P1 configured as required and its radius of curvature of two sides of planopaallel plate P2 are also for ∞ (infinitely great).
First, the structure data of each lens in the scaling projection optics system 1A of embodiment 1 are expressed as follows.
Numerical example 1
Unit mm
Face data
It follows that the structure data of each lens in the scaling projection optics system 1B of embodiment 2 are expressed as follows.
Numerical example 2
Unit mm
Face data
It follows that in the scaling projection optics system 1C of embodiment 3, the structure data of each lens are expressed as follows.
Numerical example 3
Unit mm
Face data
It follows that the structure data of each lens in the scaling projection optics system 1D of embodiment 4 are expressed as follows.
Numerical example 4
Unit mm
Face data
It follows that the structure data of each lens in the scaling projection optics system 1E of embodiment 5 are expressed as follows.
Numerical example 5
Unit mm
Face data
It follows that the structure data of each lens in the scaling projection optics system 1F of embodiment 6 are expressed as follows.
Numerical example 6
Unit mm
Face data
It follows that the structure data of each lens in the scaling projection optics system 1G of embodiment 7 are expressed as follows.
Numerical example 7
Unit mm
Face data
It follows that the structure data of each lens in the scaling projection optics system 1H of embodiment 8 are expressed as follows.
Numerical example 8
Unit mm
Face data
By with lens configuration as described above, the scaling projection optics system 1A of the 1st～the 8th embodiment being configured to basis
～each aberration in 1H represents Figure 10～Figure 25 respectively.Figure 10, Figure 12, Figure 14, Figure 16, Figure 18, Figure 20, Figure 22 and Figure 24
Being the longitudinal aberration figure of focal length end, Figure 11, Figure 13, Figure 15, Figure 17, Figure 19, Figure 21, Figure 23 and Figure 25 are the longitudinal aberrations of wide-angle side
Figure.
Figure 10 (A)～Figure 25 (A) represents spherical aberration (sine condition), and its transverse axis illustrates focal position with mm unit
Deviation, its longitudinal axis illustrates light coordinate on entrance pupil with mm unit.Solid line is the spherical aberration relative to d line, single
Chain-dotted line is the spherical aberration relative to g line, and double dot dash line is the spherical aberration relative to C line, and, dotted line is sinusoidal bar
Part.Figure 10 (B)～Figure 25 (B) represents astigmatism, and its transverse axis represents the deviation of focal position with mm unit, and its longitudinal axis is with mm unit table
Show image height.Solid line represents the astigmatism of the d line on vertical disconnected (radially) face, and single dotted broken line represents the astigmatism of the g line on vertical section, double
Chain-dotted line represents the astigmatism of the C line on vertical section.Cut flat with on (warp-wise) face it addition, the dotted line being made up of the line of line of shortest length length represents
The astigmatism of d line, the dotted line being made up of the line of the second short line length (middle line length) represents the astigmatism of the g line on incisal plane,
The dotted line being made up of the line of nose length represents the astigmatism of the C line on incisal plane.Figure 10 (C)～Figure 25 (C) represents distortion aberration,
Its transverse axis represents the image height of reality with the ratio (%) with preferable image height, and the longitudinal axis represents its image height with mm unit.Figure 10 (D)～figure
25(D) representing multiplying power chromatic aberration, its transverse axis represents each light coordinate in image planes departure relative to d line with mm unit, its
The longitudinal axis represents image height with mm unit.Solid line represents the multiplying power chromatic aberration of g line, and dotted line represents the multiplying power chromatic aberration of C line.
To can be applicable to each of scaling projection optics system 1A～1H of above-mentioned the 1st～the 8th embodiment listed
One example of the glass material of mirror is shown in table 1.
[table 1]
It is applied to conditional 1 and 2 both sides ... 1
Be only applied to conditional 2......2,3
And, the conditional above-mentioned by these the 1st～the 8th embodiments being scaled projection optics system 1A～1H application
(1) each numeric representation～in the case of (8) is in table 2.
[table 2]
As described above, scaling projection optics system 1A～1H in these the 1st～the 8th embodiments meets the present invention
The key element related to, result can fully suppress on spherical aberration, curvature of the image, axle chromatic aberration and multiplying power chromatic aberration etc. respectively as
Difference, it is achieved higher resolution.
This specification discloses the technology of various mode as described above, main technology is summed up as follows.
The scaling projection optics system that one mode relates to possesses to reduction conjugate side successively from enlargement conjugation side: overall tool
Have the 1st battery of lens of negative power, entirety to have the 2nd battery of lens of positive light coke, entirety has the 3rd lens of positive light coke
Group, entirety have the 4th battery of lens of negative power, entirety has the 5th battery of lens of positive light coke and entirety to have positive light burnt
6th battery of lens of degree, when scaling to wide-angle side from focal length end, above-mentioned 3rd battery of lens and above-mentioned 5th battery of lens are put from above-mentioned
Big conjugate side moves to above-mentioned reduction conjugate side, and above-mentioned reduction conjugate side is substantially telecentric iris, and above-mentioned 4th battery of lens is put from above-mentioned
Big conjugate side plays minus lens, plus lens and the aperture diaphragm possessing more than 2 successively.The scaling projection that another mode relates to
Optical system possesses to reduction conjugate side successively from enlargement conjugation side: entirety has negative power and the fix the 1st when scaling
Battery of lens, entirety have positive light coke and when scaling movable the 2nd battery of lens, entirety there is positive light coke and can when scaling
Dynamic the 3rd battery of lens, entirety have negative power and 4th battery of lens fixing when scaling, entirety has positive light coke and
The 5th battery of lens movable during scaling and entirety have positive light coke and 6th battery of lens fixing when scaling, when from focal length
End is when wide-angle side scales, and above-mentioned 3rd battery of lens and above-mentioned 5th battery of lens reduce conjugation from above-mentioned enlargement conjugation side to above-mentioned
Side shifting, above-mentioned reduction conjugate side is substantially telecentric iris, and above-mentioned 4th battery of lens possesses 2 from above-mentioned enlargement conjugation side successively
Above minus lens, plus lens and aperture diaphragm.And, the scaling projection optics system that another mode relates to is from amplification
It is conjugated lateral reduction conjugate side to possess successively: entirety has negative power and 1st battery of lens fixing when scaling, entirety has
Positive light coke and when scaling movable the 2nd battery of lens, entirety have positive light coke and 3rd battery of lens movable when scaling,
Entirety have negative power and when scaling movable the 4th battery of lens, entirety there is positive light coke and when scaling the movable 5th
Battery of lens and entirety have positive light coke and 6th battery of lens fixing when scaling, when scaling to wide-angle side from focal length end
Time, above-mentioned 3rd battery of lens and above-mentioned 5th battery of lens move from above-mentioned enlargement conjugation side to above-mentioned reduction conjugate side, above-mentioned contracting
Little conjugate side is substantially telecentric iris, above-mentioned 4th battery of lens possess successively from above-mentioned enlargement conjugation side more than 2 minus lens,
Plus lens and aperture diaphragm.
Such scaling projection optics system possesses 6 that the positive negative and positive of negative and positive is positive successively from enlargement conjugation side to reduction conjugate side
Group, when scaling to wide-angle side from focal length end, the 3rd battery of lens and the 5th battery of lens move from enlargement conjugation side to reduction conjugate side
Dynamic.Therefore, there is the 3rd battery of lens of positive light coke close to the 4th battery of lens in wide-angle side compared with focal length end, compared with wide-angle side
There is the 5th battery of lens of positive light coke close to the 4th battery of lens at focal length end.Therefore, the scaling projection optics system of this composition
In wide-angle side, near diaphragm, the battery of lens with positive light coke is all configured at focal length end.If the positive light of configuration near diaphragm
Focal power becomes big, then optical system is in the trend with the spherical aberration owing burnt direction, if the correction to it is insufficient, then on axle
The resolution of light can reduce.But, in the scaling projection optics system of above-mentioned composition, the 4th battery of lens is from enlargement conjugation side
Possess minus lens, plus lens and the aperture diaphragm of more than 2 successively.Therefore, the scaling projection optics system of this composition by
In using minus lens continuously in the 4th battery of lens so comprise diaphragm, it is possible to spherical aberration is repaiied to crossing coke side strength
Just, available high resolution.
It addition, in another way, preferably in above-mentioned scaling projection optics system, above-mentioned the 2 of above-mentioned 4th battery of lens
In the above minus lens of sheet one meets the conditional of following (1), in above-mentioned more than 2 minus lenses of above-mentioned 4th battery of lens
Another meets the conditional of following (2).
0.003≤△θg、F≤ 0.05 (1)
-0.035≤(Σ (△ θg、F4i×φ4i))/φ w≤-0.001 (2)
Wherein, △ θg、F4iAnd φ4iIt is for the △ of i-th minus lens from enlargement conjugation side contained by the 4th battery of lens
θg、FAnd focal power, φ w is the synthesis focal power of the optical system entirety of wide-angle side.
In projection optics system, need to revise well chromatic aberration, here from axle chromatic aberration and spherical aberration because of
Wavelength cause discrete from the viewpoint of study.Owing to imaging optical system whole system has positive light coke, so place
Focal power in the light for short wavelength is more than the trend of the focal power for long wavelength, therefore produces chromatic aberration on axle.It addition,
For the spherical aberration produced because of the light by lens perimeter, owing to the refractive index of lens is different because wavelength is different,
So produce because of wavelength cause discrete.
In order to suppress chromatic aberration on these axles and spherical aberration because of wavelength cause discrete, be arranged near diaphragm
4th battery of lens, according to the mode specified by conditional (1) and conditional (2), possesses the minus lens with anomalous dispersion.If
Use the minus lens so near diaphragm with anomalous dispersion, then owing to the focal position of light of short wavelength is to overfocus sidesway
Dynamic, it is possible to revise chromatic aberration on axle.And, by there is the light of the minus lens periphery of this anomalous dispersion due to
The light of short wavelength gets over the effect being become overfocus by spherical aberration, so because what the wavelength of spherical aberration caused discrete also can repair
Just.Therefore, the scaling projection optics system of this composition can suppress axle by meeting conditional (1) and conditional (2)
The color of upper chromatic aberration and spherical aberration is discrete, available high resolution.
Wherein, above-mentioned conditional (1) defines the size of anomalous dispersion.It addition, above-mentioned conditional 2 is to the 4th lens
The summation of the value that the anomalous dispersion of each minus lens contained by group is multiplied by respective focal power and obtains.
It addition, in another mode, preferably in these scaling projection optics systems above-mentioned, above-mentioned 4th battery of lens
The conditional meeting following (3) in above-mentioned more than 2 minus lenses, above-mentioned more than 2 minus lenses of above-mentioned 4th battery of lens
In another meet the conditional of following (4).
0.03≤△θg、F≤ 0.05 (3)
-0.035≤(Σ (△ θg、F4i× φ))/φ4i≤-0.01 (4)
Conditional (3) and conditional (4) is met by the scaling projection optics system of this composition, above-mentioned with meeting
The scaling projection optics system of conditional (1) and conditional (2) is compared, and anomalous dispersion becomes strong further, it is possible to further
On suppression axle, the color of chromatic aberration and spherical aberration is discrete, available higher resolution.
It addition, in another mode, preferably in these scaling projection optics systems above-mentioned, above-mentioned 5th battery of lens institute
The lens contained meet each conditional of following (5) and (6).
0.025≤(Σ (△ θg、F5i×φ5i))/φ w≤0.065 (5)
0.4≤dz5/fw≤1 (6)
Wherein, △ θg、F5iAnd φ5iIt is for the △ of i-th lens from enlargement conjugation side contained by the 5th battery of lens
θg、FAnd focal power, dz5 be from focal length end to wide-angle side scale time the 5th battery of lens from enlargement conjugation side to reduction conjugate side
Amount of movement, fw is the focal length in the whole system of wide-angle side.
In scaling optical system, typically between wide-angle side and focal length end multiplying power chromatic aberration to the vibration of positive side and minus side
Resolution is reduced.The scaling projection optics system of above-mentioned composition is by meeting conditional (5), to the moved when scaling
5 battery of lens effectively use the glass material with anomalous dispersion such that it is able to the multiplying power chromatic aberration that suppression causes because of scaling
Variation, it is possible to decrease the significant difference of the multiplying power chromatic aberration between focal length end and wide-angle side.
More specifically, owing to the value of conditional (5) is the biggest, then the anomalous dispersion of plus lens is more by phase Kz side, and bears
The anomalous dispersion of lens is more close to lange side, so these each lens have the effect making multiplying power chromatic aberration be close to negative direction.
The light passed through in the 5th battery of lens passes through high position, the multiplying power color of wide-angle side in wide-angle side from optical axis compared with focal length end
Aberration is close to negative direction than the multiplying power chromatic aberration the earth of focal length end.Thus, the scaling projection optics system of above-mentioned composition can subtract
The significant difference of few multiplying power chromatic aberration between wide-angle side and focal length end.
It addition, conditional (6) defines the 5th battery of lens amount of movement when scaling.Owing to the amount of movement of the 5th battery of lens is got over
Greatly, then between focal length end and wide-angle side, height by the light in lens is the most different, so the scaling projection of above-mentioned composition
Optical system is by meeting conditional (6), it is possible to effectively reduce the significant difference of multiplying power chromatic aberration.
It addition, in other mode, due in these scaling projection optics systems above-mentioned, above-mentioned the of wide-angle side
The synthesis focal power of 2 battery of lens and above-mentioned 3rd battery of lens is relative to above-mentioned 2nd battery of lens of focal length end and above-mentioned 3rd saturating
The ratio of the synthesis focal power of mirror group meets the conditional of following (7).
1.15≤φ2,3W/φ2,3T≤ 1.35 (7)
Wherein, φ2,3WIt is the 2nd battery of lens and the synthesis focal power of the 3rd battery of lens, the φ of wide-angle side2,3TIt it is focal length end
2nd battery of lens and the synthesis focal power of the 3rd battery of lens.
In scaling optical system, between wide-angle side and focal length end, typically cause the variation of curvature of the image.In more detail and
Speech, owing to becoming strong, so the image planes of focal length end become overfocus in the focal power that wide-angle side optical system is overall compared with focal length end
Side, the image planes of wide-angle side become deficient coke side, thus cause resolution to reduce.In consideration of it, the scaling projection optics system of above-mentioned composition
System is by meeting conditional (7), it is possible to make the synthesis focal power of the 2nd battery of lens and the 3rd battery of lens become strong at focal length end, focal length end
Image planes can relatively be close to compared with wide-angle side owe coke side.As a result, the scaling projection optics system of above-mentioned composition can suppress
The variation of the image planes between focal length end and wide-angle side.
It addition, in another mode, preferably in these scaling projection optics systems above-mentioned, above-mentioned 1st battery of lens bag
Include the minus lens of a piece of above conditional meeting following (8).
0.03≤△θg、F≤ 0.05 (8)
Move when scaling by employing the 5th battery of lens of the lens with anomalous dispersion so that focal length end is with wide
The variation of the multiplying power chromatic aberration between the end of angle is suppressed to a certain degree, but is difficult to completely remove the variation of above-mentioned multiplying power chromatic aberration.
In consideration of it, the scaling projection optics system of above-mentioned composition is according to the mode specified by conditional (8), possess in the 1st battery of lens
There is the minus lens of anomalous dispersion.Therefore, the scaling projection optics system of above-mentioned composition can suppress above-mentioned multiplying power further
The variation of chromatic aberration.That is, can suppress further to be moved when scaling by above-mentioned 5th battery of lens and the most remaining after suppressing, on
State the residual fraction in the variation of multiplying power chromatic aberration.
It addition, in another mode, preferably in these scaling projection optics systems above-mentioned, above-mentioned 1st battery of lens is extremely
Above-mentioned 4th battery of lens the most substantially afocal system.
This composition scaling projection optics system by be arranged in compared with aperture diaphragm the by enlargement conjugation side the 1st～
The synthesis system of the 4th battery of lens becomes substantially afocal system, it is possible to the F value between suppression focal length end and wide-angle side when scaling
Variation.More specifically, owing to the width of light beam between the 4th battery of lens and the 5th battery of lens is generally parallel, so being difficult to because of
5 moving of battery of lens and cause the change of F value.Therefore, the scaling projection optics system of above-mentioned composition can the suppression when scaling
The variation of the F value between focal length end and wide-angle side.
It addition, in another mode, preferably in these scaling projection optics systems above-mentioned, the above-mentioned 2nd during scaling
The motion track of battery of lens is the u turn shape convex to enlargement conjugation side.
In scaling optical system, owing to general focal length is different with wide-angle side at focal length end, so the focus position when scaling
Put and can change.The variation of focal position during this scaling can by the 5th battery of lens with focal position is kept constant by the way of
Move and solve.But, in the solution maneuver the most only modulating focal position with the 5th battery of lens, the variation of curvature of the image exists
Can become big during scaling.In consideration of it, the scaling projection optics system of above-mentioned composition is except making the 5th battery of lens move it when scaling
Outward, the 2nd battery of lens is also made to move in the way of the track of the convex u turn shape in enlargement conjugation side describing such that it is able to reduce
The variation of focal position during scaling and the variation of curvature of the image.
And, the image projection device that another mode relates to possesses: form the image formation component of image light and by upper
Stating the projection optics system of the above-mentioned image light enlarging projection that image formation component is formed, above-mentioned projection optics system is above-mentioned
These scaling projection optical systems in any one.
Owing to the image projection device of this composition uses any one scaling projection optics system above-mentioned, it is possible to fill
Divide each aberration such as chromatic aberration and multiplying power chromatic aberration on suppression spherical aberration, curvature of the image, axle, it is possible to realize high-resolution more
Rate.
The application advocates excellent based on Japan's patent application Patent 2012-179416 filed in 13 days Augusts in 2012
First weighing, its content comprises in this application.
In order to show the present invention, adequately and sufficiently the present invention to be carried out above with reference to accompanying drawing and by embodiment
Explanation, it is believed that those skilled in the art can easily carry out the change to above-mentioned embodiment and/or change
Enter.Therefore, as long as should be interpreted that change mode or improved procedure that those skilled in the art implement are without departing from claims
Described technical scheme, then this change mode or this improved procedure are included in the interest field of this claim.
Claims (13)
1. a scaling projection optical system, it is characterised in that
Possess successively from enlargement conjugation side to reduction conjugate side: entirety has the 1st battery of lens of negative power, entirety has positive light
2nd battery of lens of focal power, entirety have the 3rd battery of lens of positive light coke, entirety has the 4th battery of lens of negative power, entirety
There is the 5th battery of lens of positive light coke and entirety have the 6th battery of lens of positive light coke,
When scaling to wide-angle side from focal length end, described 3rd battery of lens and described 5th battery of lens from described enlargement conjugation side to
Described reduction conjugate side is moved,
Described reduction conjugate side is substantially telecentric iris,
Described 4th battery of lens has minus lens, plus lens and the aperture diaphragm of more than 2 from described enlargement conjugation side successively,
Described 1st battery of lens, described 4th battery of lens and described 6th battery of lens are fixed when scaling,
Described 2nd battery of lens, described 3rd battery of lens and described 5th battery of lens are movable when scaling.
Scaling projection optical system the most according to claim 1, it is characterised in that
Lens contained by described 5th battery of lens meet each conditional of following (5) and (6),
0.025≤(Σ(△θg、F5i×φ5i))/φw≤0.065···(5)
0.4≤dz5/fw≤1···(6)
△θg、F=θg、F-(0.6438-0.001682 × ν d) (10)
θg、F=(ng-nF)/(nF-nC) (11)
ν d=(nd-1)/(nF-nC) (12)
Wherein,
△θg、F5i: the △ θ of i-th lens from enlargement conjugation side contained by the 5th battery of lensg、F
φ5i: the i-th power of lens from enlargement conjugation side contained by the 5th battery of lens
Dz5: from focal length end to wide-angle side scale time the 5th battery of lens from enlargement conjugation side to the amount of movement of reduction conjugate side
The focal length of the whole system of fw: wide-angle side
φw: the synthesis focal power that the optical system of wide-angle side is overall
Nd: relative to the refractive index of the wavelength of d line
NF: relative to the refractive index of the wavelength of F line
NC: relative to the refractive index of the wavelength of C line
Ng: relative to the refractive index of the wavelength of g line.
Scaling projection optical system the most according to claim 1, it is characterised in that
Described 2nd saturating relative to focal length end of described 2nd battery of lens of wide-angle side and the synthesis focal power of described 3rd battery of lens
The ratio of the synthesis focal power of mirror group and described 3rd battery of lens meets the conditional of following (7),
1.15≤φ2,3W/φ2,3T≤1.35···(7)
Wherein,
φ2,3W: the 2nd battery of lens of wide-angle side and the synthesis focal power of the 3rd battery of lens
φ2,3T: the 2nd battery of lens of focal length end and the synthesis focal power of the 3rd battery of lens.
Scaling projection optical system the most according to claim 1, it is characterised in that
Described 1st battery of lens comprises the minus lens of a piece of above conditional meeting following (8),
0.03≤△θg、F≤ 0.05 (8),
△θg、F=θg、F-(0.6438-0.001682 × ν d) (10)
θg、F=(ng-nF)/(nF-nC) (11)
ν d=(nd-1)/(nF-nC) (12)
Wherein, nd: relative to the refractive index of the wavelength of d line
NF: relative to the refractive index of the wavelength of F line
NC: relative to the refractive index of the wavelength of C line
Ng: relative to the refractive index of the wavelength of g line.
Scaling projection optical system the most according to claim 1, it is characterised in that
Described 1st battery of lens is to described 4th battery of lens the most substantially afocal system.
Scaling projection optical system the most according to claim 1, it is characterised in that
The motion track of described 2nd battery of lens during scaling is the u turn shape convex to enlargement conjugation side.
7. a scaling projection optical system, it is characterised in that
Possess successively from enlargement conjugation side to reduction conjugate side: entirety has the 1st battery of lens of negative power, entirety has positive light
2nd battery of lens of focal power, entirety have the 3rd battery of lens of positive light coke, entirety has the 4th battery of lens of negative power, entirety
There is the 5th battery of lens of positive light coke and entirety have the 6th battery of lens of positive light coke,
When scaling to wide-angle side from focal length end, described 3rd battery of lens and described 5th battery of lens from described enlargement conjugation side to
Described reduction conjugate side is moved,
Described reduction conjugate side is substantially telecentric iris,
Described 4th battery of lens has minus lens, plus lens and the aperture diaphragm of more than 2 from described enlargement conjugation side successively,
The conditional meeting following (1) in the minus lens of described more than 2 of described 4th battery of lens,
Another in the minus lens of described more than 2 of described 4th battery of lens meets the conditional of following (2),
0.003≤△θg、F≤0.05···(1)
-0.035≤(Σ (△ θg、F4i×φ4i))/φ w≤-0.001 (2)
△θg、F=θg、F-(0.6438-0.001682 × ν d) (10)
θg、F=(ng-nF)/(nF-nC) (11)
ν d=(nd-1)/(nF-nC) (12)
Wherein,
△θg、F4i: the △ θ of i-th minus lens from enlargement conjugation side contained by the 4th battery of lensg、F
φ4i: the focal power of i-th minus lens from enlargement conjugation side contained by the 4th battery of lens
φw: the synthesis focal power that the optical system of wide-angle side is overall
Nd: relative to the refractive index of the wavelength of d line
NF: relative to the refractive index of the wavelength of F line
NC: relative to the refractive index of the wavelength of C line
Ng: relative to the refractive index of the wavelength of g line.
Scaling projection optical system the most according to claim 7, it is characterised in that
Lens contained by described 5th battery of lens meet each conditional of following (5) and (6),
0.025≤(Σ(△θg、F5i×φ5i))/φw≤0.065···(5)
0.4≤dz5/fw≤1···(6)
Wherein,
△θg、F5i: the △ θ of i-th lens from enlargement conjugation side contained by the 5th battery of lensg、F
φ5i: the i-th power of lens from enlargement conjugation side contained by the 5th battery of lens
Dz5: from focal length end to wide-angle side scale time the 5th battery of lens from enlargement conjugation side to the amount of movement of reduction conjugate side
The focal length of the whole system of fw: wide-angle side
φw: the synthesis focal power that the optical system of wide-angle side is overall.
Scaling projection optical system the most according to claim 7, it is characterised in that
Described 2nd saturating relative to focal length end of described 2nd battery of lens of wide-angle side and the synthesis focal power of described 3rd battery of lens
The ratio of the synthesis focal power of mirror group and described 3rd battery of lens meets the conditional of following (7),
1.15≤φ2,3W/φ2,3T≤1.35···(7)
Wherein,
φ2,3W: the 2nd battery of lens of wide-angle side and the synthesis focal power of the 3rd battery of lens
φ2,3T: the 2nd battery of lens of focal length end and the synthesis focal power of the 3rd battery of lens.
Scaling projection optical system the most according to claim 7, it is characterised in that
Described 1st battery of lens comprises the minus lens of a piece of above conditional meeting following (8),
0.03≤△θg、F≤0.05···(8)。
11. scaling projection optical systems according to claim 7, it is characterised in that
Described 1st battery of lens is to described 4th battery of lens the most substantially afocal system.
12. scaling projection optical systems according to claim 7, it is characterised in that
The motion track of described 2nd battery of lens during scaling is the u turn shape convex to enlargement conjugation side.
13. 1 kinds of image projection devices, it is characterised in that have:
Form the image formation component of image light；And
The projection optics system of described image light enlarging projection that will be formed by described image formation component,
Described projection optics system is the scaling projection optical system in claim 1～claim 12 described in any one.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012179416A JP5988297B2 (en) | 2012-08-13 | 2012-08-13 | Variable magnification projection optical system and image projection apparatus |
| JP2012-179416 | 2012-08-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103592748A CN103592748A (en) | 2014-02-19 |
| CN103592748B true CN103592748B (en) | 2016-09-21 |
Family
ID=50082950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310349233.8A Active CN103592748B (en) | 2012-08-13 | 2013-08-12 | Scaling projection optics system and image projection device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5988297B2 (en) |
| CN (1) | CN103592748B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107148588B (en) * | 2014-10-31 | 2020-05-15 | 株式会社日东 | Projection optical system and projector apparatus |
| US9904044B2 (en) | 2015-10-20 | 2018-02-27 | Canon Kabushiki Kaisha | Zoom lens and image pickup apparatus including the same |
| JP6632319B2 (en) * | 2015-10-20 | 2020-01-22 | キヤノン株式会社 | Zoom lens and imaging device having the same |
| JP6632320B2 (en) * | 2015-10-20 | 2020-01-22 | キヤノン株式会社 | Zoom lens and imaging device having the same |
| JP6910842B2 (en) * | 2017-05-01 | 2021-07-28 | キヤノン株式会社 | Zoom lens and imaging device with it |
| JP7233036B2 (en) * | 2017-12-19 | 2023-03-06 | パナソニックＩｐマネジメント株式会社 | Projection lens system and image projection device |
| CN110045492B (en) * | 2019-04-26 | 2024-03-15 | 中国科学院长春光学精密机械与物理研究所 | Wide-spectrum large-numerical aperture ultrahigh-flux micro-objective optical system |
| CN110987054B (en) * | 2019-12-18 | 2021-10-22 | 上海御微半导体技术有限公司 | Calibration device and calibration method |
| CN115236833B (en) * | 2022-07-18 | 2023-11-14 | 广东思锐光学股份有限公司 | Long-focus large-magnification deformation lens in full-picture frame |
| CN117647880B (en) * | 2024-01-29 | 2024-04-05 | 长春长光智欧科技有限公司 | Immersion type high numerical aperture wide spectrum micro objective optical system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101086552A (en) * | 2006-06-08 | 2007-12-12 | 佳能株式会社 | Zoom lens and image projection apparatus having same |
| CN101281291A (en) * | 2007-04-06 | 2008-10-08 | 佳能株式会社 | Zoom lens and image projection apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007241184A (en) * | 2006-03-13 | 2007-09-20 | Sony Corp | Zoom lens and projection device |
| JP5053680B2 (en) * | 2007-03-29 | 2012-10-17 | キヤノン株式会社 | Image projection optical system and image projection apparatus |
| JP5359558B2 (en) * | 2009-05-27 | 2013-12-04 | 株式会社ニコン | Lens system, optical equipment |
| JP5369897B2 (en) * | 2009-05-27 | 2013-12-18 | 株式会社ニコン | Lens system, optical equipment |
-
2012
- 2012-08-13 JP JP2012179416A patent/JP5988297B2/en active Active
-
2013
- 2013-08-12 CN CN201310349233.8A patent/CN103592748B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101086552A (en) * | 2006-06-08 | 2007-12-12 | 佳能株式会社 | Zoom lens and image projection apparatus having same |
| CN101281291A (en) * | 2007-04-06 | 2008-10-08 | 佳能株式会社 | Zoom lens and image projection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014038153A (en) | 2014-02-27 |
| CN103592748A (en) | 2014-02-19 |
| JP5988297B2 (en) | 2016-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103592748B (en) | Scaling projection optics system and image projection device | |
| CN103048776B (en) | Projection zoom lens | |
| US10955646B2 (en) | Imaging optical system and image projection apparatus | |
| CN101276048B (en) | Image projection optical system and image projection apparatus | |
| US7529036B2 (en) | Projection zoom lens and projection display device | |
| US8508853B2 (en) | Projection lens and projection-type display apparatus | |
| JP4855024B2 (en) | Two-group zoom projection lens and projection display device | |
| CN107533215A (en) | Projection optics system and projecting apparatus | |
| US8116010B2 (en) | Projection variable focus lens and projection display device | |
| US9581795B2 (en) | Projection-type video display device | |
| JP6210686B2 (en) | Optical system and image projection apparatus having the same | |
| US20110157716A1 (en) | Zoom lens for projection and projection-type display apparatus | |
| JP2002350727A (en) | Zoom lens | |
| CN105824105A (en) | Projection optical system | |
| US10816780B2 (en) | Lens system, and image projection apparatus and imaging apparatus that include the same | |
| WO2013061535A1 (en) | Zoom lens for projection, and projection-type display device | |
| CN113933971B (en) | Projection lens and projection device | |
| CN104793322A (en) | Projection optical system and projection-type image display apparatus | |
| JP5307655B2 (en) | Projection variable focus lens and projection display device | |
| KR100473243B1 (en) | Projection lens and projector provided with the same | |
| JPWO2012114755A1 (en) | Projection zoom lens and projection display device | |
| US9772477B2 (en) | Projection zoom lens and projection type display device | |
| CN204215094U (en) | Projection optics system and projection type video display device | |
| JP3353355B2 (en) | Eyepiece zoom lens system, and telescope and binoculars including the eyepiece zoom lens system | |
| CN109983384A (en) | Projection optics system and projector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |