CN103586987B - Temperature control shaft roller - Google Patents
Temperature control shaft roller Download PDFInfo
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- CN103586987B CN103586987B CN201310538605.1A CN201310538605A CN103586987B CN 103586987 B CN103586987 B CN 103586987B CN 201310538605 A CN201310538605 A CN 201310538605A CN 103586987 B CN103586987 B CN 103586987B
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- roller
- cannelure
- axle
- supporting mass
- guiding gutter
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Abstract
A kind of Temperature control shaft roller, including the axle being positioned at center, it is connected to the supporter at axle two ends and is positioned at the roller of axle periphery, it is characterized in that: described axle is hollow axle, two outer ends of axial wall are connected with supporter, described roller is the tubular roller of sandwich, axial water channel circumferentially it is evenly distributed with in the interlayer of roller, it is embedded with sealing plate two ends between roller inwall and axial wall, the external diameter of supporter is consistent with the external diameter of roller, supporter axle center has aperture, diameter adapts with the external diameter of axle, cannelure and guiding gutter is had on the inner bottom surface of described supporting mass, described cannelure connects with the water channel in roller interlayer, described guiding gutter connects each cannelure, cannelure is in communication with the outside through the macropore of outlet or water inlet and supporter, ultimately form temperature-controlled constant temperature water path.The present invention is by being controlled the temperature of water, it is achieved control the temperature of beaming roller, overcomes existing multi-line cutting machine and sets up Temperature-controlled appliance, operation complexity specially, and technology requires high problem.
Description
Technical field
The present invention relates to a kind of beaming roller, particularly to a kind of beaming roller being applied on multi-wire saw cutting machine and may be temperature controlled.
Background technology
Multi-wire saw cutting machine is the equipment that quasiconductor crystal bar cuts into wafer, semiconductor crystal wafer is the backing material of production of integrated circuits, the precision of wafer cutting directly affects the yield rate of production of integrated circuits, so the cutting accuracy to wafer requires the highest in actual production.Temperature is the key factor affecting wafer precision, therefore eliminates temperature to extremely important on the precision impact of wafer in the course of processing.
A kind of multi-line cutting machine water-cooling method announced in the recent period and device, have cutting temperature control, and key position each to complete machine cools down comprehensively, achieve the control of temperature of key part each to multi-line cutting machine, but its complex structural designs, operating technology requires height, and cost puts into bigger.
Summary of the invention
For solving current multi-line cutting machine water cooling technique device complex structural designs, operating technology requires height, and cost puts into bigger problem, the present invention provides the beaming roller that may be temperature controlled of application on a kind of multi-wire saw cutting machine, temperature-controlled constant temperature water is had to pass through inside beaming roller, by the temperature of water is controlled, it is achieved the temperature of beaming roller is controlled.
The present invention solves that above-mentioned technical problem be the technical scheme is that
nullA kind of Temperature control shaft roller，Including the axle being positioned at center、It is connected to the supporting mass at axle two ends and is positioned at the roller of axle periphery，It is characterized in that: described axle is hollow axle，Two outer ends of axial wall are connected with supporting mass，Described roller is the tubular roller of sandwich，Its length less than the length of axle 10～20mm，Axial water channel circumferentially it is evenly distributed with in the interlayer of roller，It is embedded with sealing plate two ends between roller inwall and axial wall，There is step-like hole in the axle center of described supporting mass，It is aperture in the inner part，It is macropore in the outer part，Its external diameter of supporting mass is consistent with the external diameter of roller，The diameter of the aperture in supporting mass axle center adapts with the external diameter of axle，Cannelure and guiding gutter is had on the inner bottom surface of described supporting mass，Described cannelure connects with the water channel in roller interlayer，Described guiding gutter connects each cannelure，Cannelure is in communication with the outside through the macropore of outlet or water inlet and supporting mass.
The lateral surface of described supporting mass is sandwich, has side cannelure and side guiding gutter in its interlayer.
Described cannelure is successively connected with water channel with side guiding gutter by the internal oblique pod apertures of supporting mass, the side cannelure sequentially connected.
Described side guiding gutter and water channel one_to_one corresponding also interconnect.
Guiding gutter on described supporting mass is cross radial arrangement.
In described cannelure, the cannelure near center is connected with water inlet；The cannelure of outermost side is connected with side cannelure by oblique pod apertures.
The section of described water channel, guiding gutter, cannelure, side guiding gutter and side cannelure is rectangle, circular arc or dihedral.
The section of described water inlet, outlet and pod apertures is polygon or circle.
The slotted eye of radial arrangement is had on the bottom surface that described supporting mass is exposed.
The inside of beaming roller of the present invention is the cavity sealed, it is therefore an objective to alleviate beaming roller quality, reduces rotary inertia；Supporting mass end face outside has multiple slotted eye, is used for installing mass balance block during beaming roller dynamic balancing；Described water channel and side guiding gutter, side cannelure, pod apertures, cannelure, guiding gutter and the water inlet on two-side supporting body or outlet order UNICOM successively, form temperature-controlled constant temperature water path, temperature-controlled constant temperature water is had to pass through, by the temperature of water is controlled, realize the temperature to beaming roller to control, overcoming existing multi-line cutting machine and set up Temperature-controlled appliance, operation complexity specially, technology requires high problem.
Accompanying drawing explanation
Fig. 1 is Temperature control shaft roller structural representation of the present invention；
Fig. 2 is bottom bracket axle inner-cavity structure schematic diagram of the present invention；
Fig. 3 is bottom bracket axle wall construction schematic diagram of the present invention；
Fig. 4 is the structural representation of supporting mass in the present invention；
Fig. 5 is the medial surface structural representation of supporting mass in the present invention；
Fig. 6 is the lateral surface structural representation of supporting mass in the present invention.
Reference: 1-axle, 2-roller inwall, 3-roller, 4-sealing plate, 5-cavity, 6-water channel, 7-axial wall, 8-supporting mass, 9-guiding gutter, 10-cannelure, 11-water inlet, 12-pod apertures, 13-slotted eye, 14-side cannelure, 15-side guiding gutter, 16-outlet.
Detailed description of the invention
nullAs shown in Fig. 1 ~ 6，A kind of Temperature control shaft roller，Including the axle 1 being positioned at center、It is connected to the supporting mass 8 at axle two ends and is positioned at the roller 3 of axle periphery，It is characterized in that: described axle 1 is hollow axle，Two outer ends of axial wall 7 are connected with supporting mass 8，Described roller 3 is the tubular roller of sandwich，Its length less than the length of axle 1 10～20mm，Axial water channel 6 circumferentially it is evenly distributed with in the interlayer of roller 3，It is embedded with sealing plate 4 two ends between roller inwall 2 and axial wall 7，There is step-like hole in the axle center of described supporting mass 8，It is aperture in the inner part，It is macropore in the outer part，Its external diameter of supporting mass 8 is consistent with the external diameter of roller 3，The diameter of the aperture in supporting mass axle center adapts with the external diameter of axle 1，Cannelure 10 and guiding gutter 9 is had on the inner bottom surface of described supporting mass 8，Described cannelure 10 connects with the water channel 6 in roller interlayer，Described guiding gutter 9 connects each cannelure 10，Cannelure 10 is in communication with the outside through the macropore of outlet 16 or water inlet 11 and supporting mass.The lateral surface of described supporting mass 8 is sandwich, has side cannelure 14 and side guiding gutter 15 in its interlayer.Described cannelure 10 is successively connected with water channel 6 with side guiding gutter 15 by the internal oblique pod apertures 12 of supporting mass 8, the side cannelure 14 sequentially connected.Described side guiding gutter 15 and water channel 6 one_to_one corresponding also interconnect.
Described cannelure 10 interconnects donut for multiple by radial guiding gutter 9；Described side cannelure 14 is multiple annular grooves parallel with the bottom surface of supporting mass 8.
In described cannelure 10, the cannelure 10 near center is connected with water inlet 11；The cannelure of outermost side is connected with side cannelure 14 by oblique pod apertures 12.
The section of described water channel 6, guiding gutter 9, cannelure 10, side guiding gutter 15 and side cannelure 14 can be rectangle, circular arc or dihedral.
Described water inlet 11, the section of pod apertures 12 can be polygon or circle.
The slotted eye 13 of radial arrangement is had on the bottom surface that described supporting mass 8 is exposed.
The circulation path of whole constant temperature water is: thermostatted water water inlet 11 from supporting mass 8 enters the cannelure 10 communicated therewith, exterior annular groove is entered by radial guiding gutter 9 by interior annular groove, then side cannelure 14 is entered by pod apertures 12, water channel 6 is entered by side guiding gutter 15, enter the side guiding gutter 15 on opposite side supporting mass 8, side cannelure 14, pod apertures 12, exterior annular groove, guiding gutter 9, interior annular groove by water channel 6 order, finally flowed out by outlet 16.
During work, thermostatted water keeps circulation, almost covers whole beaming roller due to water stream channel, and beaming roller is hollow design, so good cooling-down effect can be reached.
The inside of beaming roller is the cavity sealed, it is therefore an objective to alleviate beaming roller quality, reduces rotary inertia；Supporting mass end face outside has multiple slotted eye, is used for installing mass balance block during beaming roller dynamic balancing；Supporting mass is provided with pod apertures 12, guiding gutter 9, cannelure 10 and water inlet 11, described water channel 6, side guiding gutter 15, side cannelure 14, pod apertures 12, cannelure 10, guiding gutter 9 and water inlet 11 order UNICOM successively, form temperature-controlled constant temperature water path, temperature-controlled constant temperature water is had to pass through, by the temperature of water is controlled, it is achieved the temperature of beaming roller is controlled.
Claims (5)
- null1. a Temperature control shaft roller，It is applied on multi-line cutting machine，Including the axle (1) being positioned at center、It is connected to the supporting mass (8) at axle two ends and is positioned at the roller (3) of axle periphery，It is characterized in that: described axle (1) is hollow axle，Two outer ends of axial wall (7) are connected with supporting mass (8)，Described roller (3) is the tubular roller of sandwich，Its length is than the length little 10～20mm of axle (1)，Axial water channel (6) circumferentially it is evenly distributed with in the interlayer of roller (3)，It is embedded with sealing plate (4) two ends between roller inwall (2) and axial wall (7)，There is step-like hole in the axle center of described supporting mass (8)，It is aperture in the inner part，It is macropore in the outer part，Supporting mass (8) its external diameter is consistent with the external diameter of roller (3)，The diameter of the aperture in supporting mass axle center adapts with the external diameter of axle (1)，Cannelure (10) and guiding gutter (9) is had on the inner bottom surface of described supporting mass (8)，Described cannelure (10) connects with the water channel (6) in roller interlayer，Described guiding gutter (9) connects each cannelure (10)，Cannelure (10) is in communication with the outside through the macropore of outlet (16) or water inlet (11) and supporting mass；The lateral surface of described supporting mass (8) is sandwich, has side cannelure (14) and side guiding gutter (15) in its interlayer；Described cannelure (10) is successively connected with water channel (6) with side guiding gutter (15) by the internal oblique pod apertures (12) of supporting mass (8), the side cannelure (14) sequentially connected；Described side guiding gutter (15) and water channel (6) one_to_one corresponding also interconnect；In described cannelure (10), the cannelure (10) near center is connected with water inlet (11)；The cannelure of outermost side is connected with side cannelure (14) by oblique pod apertures (12).
- Temperature control shaft roller the most according to claim 1, it is characterised in that: the guiding gutter (9) on described supporting mass (8) is in cross radial arrangement.
- Temperature control shaft roller the most according to claim 1, it is characterised in that: the section of described water channel (6), guiding gutter (9), cannelure (10), side guiding gutter (15) and side cannelure (14) is rectangle, circular arc or dihedral.
- Temperature control shaft roller the most according to claim 1, it is characterised in that: the section of described water inlet (11), outlet (16) and pod apertures (12) is polygon or circle.
- 5. according to the Temperature control shaft roller described in claim 1 ~ 4 any one, it is characterised in that: have the slotted eye (13) of radial arrangement on the bottom surface that described supporting mass (8) is exposed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310538605.1A CN103586987B (en) | 2013-11-05 | 2013-11-05 | Temperature control shaft roller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310538605.1A CN103586987B (en) | 2013-11-05 | 2013-11-05 | Temperature control shaft roller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103586987A CN103586987A (en) | 2014-02-19 |
| CN103586987B true CN103586987B (en) | 2016-08-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310538605.1A Active CN103586987B (en) | 2013-11-05 | 2013-11-05 | Temperature control shaft roller |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103934627B (en) * | 2014-05-12 | 2016-05-25 | 苏州润德新材料有限公司 | The restorative procedure of MB guide roller of multi-line cutting machine |
| CN103934626B (en) * | 2014-05-12 | 2016-05-11 | 苏州润德新材料有限公司 | Home roll structure after the restorative procedure of NTC multi-wire cutting machine home roll and reparation thereof |
| CN105328288A (en) * | 2015-12-01 | 2016-02-17 | 苏州市汇峰机械设备有限公司 | Processing roll for multi-wire saw capable of preventing wire fracture |
| CN110802755B (en) * | 2019-10-27 | 2022-03-15 | 无锡怀恩精密机械有限公司 | Multi-wire cutting main roller for diamond wires |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201287402Y (en) * | 2008-08-12 | 2009-08-12 | 中国电子科技集团第四十五研究所 | Home roll of multi-lane cutting machine |
| CN201350461Y (en) * | 2009-01-22 | 2009-11-25 | 大连宝锋机器制造有限公司 | Cooling medium adjustable roller |
| CN102689369A (en) * | 2011-03-23 | 2012-09-26 | 硅电子股份公司 | Method for slicing wafers from a workpiece |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002086339A (en) * | 2000-09-08 | 2002-03-26 | Nippei Toyama Corp | Wire saw |
| JP5180515B2 (en) * | 2007-05-18 | 2013-04-10 | 三菱重工業株式会社 | Fitting for cryogenic fluid |
| JP2009196023A (en) * | 2008-02-20 | 2009-09-03 | Toyo Advanced Technologies Co Ltd | Wire saw |
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2013
- 2013-11-05 CN CN201310538605.1A patent/CN103586987B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201287402Y (en) * | 2008-08-12 | 2009-08-12 | 中国电子科技集团第四十五研究所 | Home roll of multi-lane cutting machine |
| CN201350461Y (en) * | 2009-01-22 | 2009-11-25 | 大连宝锋机器制造有限公司 | Cooling medium adjustable roller |
| CN102689369A (en) * | 2011-03-23 | 2012-09-26 | 硅电子股份公司 | Method for slicing wafers from a workpiece |
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| CN103586987A (en) | 2014-02-19 |
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