CN103580638A - Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic instrument and electric wave clock - Google Patents
Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic instrument and electric wave clock Download PDFInfo
- Publication number
- CN103580638A CN103580638A CN201310318639.XA CN201310318639A CN103580638A CN 103580638 A CN103580638 A CN 103580638A CN 201310318639 A CN201310318639 A CN 201310318639A CN 103580638 A CN103580638 A CN 103580638A
- Authority
- CN
- China
- Prior art keywords
- vibration
- arm
- piezoelectric
- execution mode
- mode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention provides a piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic instrument and electric wave clock which can further reduce CI values and prevent a vibration arm from vibrating in a second order bending mode. The piezoelectric vibrating reed comprises a plurality of vibration arms parallelly arranged in the width directions; a base connecting the base terminals of the vibration arms in the length directions; and a groove part formed on at least one side of the main surfaces and the back sides of the vibration arms and from the base terminals to the front terminals of the vibration arms. The piezoelectric vibrating reed is characterized in that when the vibration mode of the vibration arms is in a second order bending mode, a deformation restraining part used for restraining the bending deformation of the vibration arms is arranged between the vibration node of the base terminal side of the vibration arms and the vibration node of the front terminal side of the vibration arms.
Description
Technical field
The present invention relates to piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic equipment and radio controlled timepiece.
Background technology
In portable phone or portable information terminal equipment, as the timing source of moment source or control signal, derived reference signal etc., use the piezoelectric vibrator that utilizes quartzy (crystal) etc.About this piezoelectric vibrator, provide various, as wherein 1, the known piezoelectric vibration piece by tuning-fork-type is enclosed the piezoelectric vibrator of packaging part.
Figure 20 is the plane graph of existing piezoelectric vibration piece.
As shown in the drawing, the piezoelectric vibration piece 2001 of tuning-fork-type is to possess a pair of vibration arm 2010,2011 that broad ways configures abreast and the laminal quartz plate of base portion 2020 that the length direction cardinal extremity of this pair of shaker arm portion 2010,2011 is linked.And, on the outer surface of a pair of vibration arm 2010,2011, be formed with the excitation electrode 2030 that makes these a pair of shaker arm portion 2010,2011 vibrations.
Figure 21, Figure 22 are the key diagrams that the movement of piezoelectric vibration piece is shown.
As shown in the drawing, about piezoelectric vibration piece 2001, if voltage is applied to and is formed at the excitation electrode 2030 that respectively vibrates arm 2010, the mode that approaches, leaves with the front end of a pair of vibration arm 2010,2011, along set direction with set resonance frequency vibration.As shown in the figure, claiming that each vibration arm 2010,2011 is crooked and take the vibration mode that mode that the front end of a pair of vibration arm 2010,2011 approaches, leaves vibrates is beam mode.Under this beam mode, the front end of vibration arm becomes free end.And, in beam mode, except " first-harmonic pattern " with first-harmonic vibration, also exist second order beam mode, three rank beam modes etc. with " the high order harmonic component pattern " of high order harmonic component vibration.For example, the illustrated vibration mode of Figure 21 is " first-harmonic pattern ", and the illustrated vibration mode of Figure 22 is " high order harmonic component pattern (second order beam mode) ".Under " high order harmonic component pattern ", cardinal extremity at vibration arm 2010,2011 is formed with the 2010a of vibration node portion, 2011a respectively, and, also in front, being formed with the 2010b of vibration node portion, 2011b, the displacement of the substantial middle between these vibration node portions of take vibrates as maximum mode.
If under any vibration mode can both with expectation resonance frequency (for example, 32.768kHz) stably vibration, can be used as various timing sources, but due to generally speaking, under high order harmonic component pattern, with the frequency vibration higher than the frequency of common requirement, thereby be difficult to as various timing sources.On the other hand, with first-harmonic mode vibration in the situation that, easily obtain the resonance frequency of above-mentioned expectation.
At this, in recent years, be accompanied by the miniaturization of the equipment that is equipped with packaging part, the further miniaturization of expectation piezoelectric vibration piece.In the miniaturization of piezoelectric vibration piece, if straitly form the width of vibration arm, also stenosis is narrow for the formation width of excitation electrode, CI value (Crystal Impedance: crystal impedance) rise.Therefore, the rising of CI value and the various technology of seeking the miniaturization of piezoelectric vibration piece have been proposed to suppress.In addition, owing to can also for convenience's sake CI value being marked as to R, thereby following using the CI value under first-harmonic pattern as R1, the CI value under Second Order Wave pattern is described as R2.
Known to the good and precision of piezoelectric vibration piece efficiency is vibrated well, R is lower, just more can obtain this effect.Thereby, all the time, known formation of seeking the reduction of R.For example, as shown in figure 20, the known surface element at a pair of vibration arm 2010,2011 or back part are formed with the piezoelectric vibration piece of slot part 2040.According to this, form, owing to can making the interval of the excitation electrode 2030 of heteropole narrow down, thereby can reduce R.As a result, even due to vibrator miniaturization also can be suppressed to the rising of R, thereby can provide miniaturization and high performance vibrator (for example,, with reference to patent documentation 1).
Patent documentation 1: TOHKEMY 2002-261558 communique.
Yet, in above-mentioned prior art, there is following problem.
In slot part being formed to the vibration surface element of arm or the vibrator of back part, in the situation that wanting R is further reduced, consider that prolongation is with respect to the length of the length direction of the groove of shaker arm.For example, known, in the length of the length direction of groove relatively, with respect to the total length of shaker arm, be 55% situation and while being 60% situation, the latter R declines.In addition,, in the situation that be recited as simply below " length of shaker arm ", " length of groove ", refer to the length of the arm of length direction, the length of groove.
But, by inventors of the present invention, confirmed: if the length of the length direction of extension slot,, when the length of the groove of the length with respect to shaker arm surpasses certain ratio, become the R under R1(first-harmonic pattern) R under > R2(second order high order harmonic component).In this case, because piezoelectric vibrator is with the vibration of second order high order harmonic component, thereby no matter how low R is, all can not get the resonance frequency of expectation.
If the magnitude relationship at this to R1 and R2 describes, generally speaking known, there is the piezoelectric vibration piece of beam mode with the low vibration mode vibration of R.That is, if R1 is little in R1 and R2, this vibrating reed is with " first-harmonic pattern " vibration, and on the other hand, if R2 is little, this vibrating reed vibrates with " high order harmonic component pattern ".So, in order to make vibrating reed with " first-harmonic pattern " vibration, be necessary for R1 < R2.
Recognize, if extend the length of the groove that makes R2 reduction, R1 and R2 reduce, but because the rate of descent of R2 is larger than the rate of descent of R1, thereby the Relationship Change of R1 < R2 is R1 > R2.
With reference to Figure 23, this point is described in detail.Figure 23 be illustrated in by the longitudinal axis be made as R1 value and R2 value, the chart of the variation of existing R1 value when transverse axis is made as to TL100/L100 and R2 value.In addition, TL100 is the length of groove, and L100 is the length (Figure 20) of shaker arm.
As shown in the drawing, can confirm, along with the value change of TL100/L100 is large, the descending slope of R2 value is larger than the descending slope of R1 value.As a result, as shown in figure 23, if the value of TL100/L100 becomes approximately 0.58, R2 value is less than R1 value, exists vibration arm 2010 with the problem of second order beam mode vibration.In addition, as high order harmonic component pattern, at this, there are the situation of second order beam mode, but be confirmed, even high order harmonic component pattern in addition, i.e. three rank, quadravalence etc., R2 is also less than R1.
Summary of the invention
So the present invention makes in view of above-mentioned situation, provide and can make R1 further decline and prevent from vibrating arm with piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic equipment and the radio controlled timepiece of the vibration of second order beam mode.
In order to solve above-mentioned problem, piezoelectric vibration piece involved in the present invention possesses: a plurality of vibration arms, and broad ways configures abreast; Base portion, links the cardinal extremity of the length direction of described vibration arm; And slot part, the interarea of described vibration arm or at least one party at the back side, front from described base end side towards described vibration arm forms, it is characterized in that, between the vibration node portion of the vibration node portion of the described base end side of the described vibration arm when the vibration mode that makes described vibration arm is second order beam mode and the described front of described vibration arm, be provided with the diastrophic deformation suppression section that suppresses the described vibration arm under second order beam mode.
Like this, owing to being provided with deformation suppression section at vibration arm in the part of second order beam mode bottom offset, thereby the distortion (deflection) under the second order beam mode of vibration arm is inhibited.That is, can improve R2.And, if owing to can improving R2, even with respect to the length of shaker arm and the length of elongated slot also can make R1 effectively reduce and keep the relation of R1 < R2, thereby can make piezoelectric vibration piece with first-harmonic mode vibration.In addition, particularly, in the situation that the length of shaker arm is made as to L, the length of groove is made as to TL1, if TL1/L ≈ 0.6 can maintain the relation of R1 < R2.And, even if confirm TL1/L ≈ 0.68, also can maintain the relation of R1 < R2.
Piezoelectric vibration piece involved in the present invention, is characterized in that, described deformation suppression section be located at the described vibration arm while making the vibration mode of described vibration arm be second order beam mode peak swing portion near.
Like this, by near peak swing portion (for example, the part of diastrophic " abdomen ") deformation suppression section is set, thereby can effectively suppress the distortion (deflection) of the shaker arm under second order beam mode, can improve R2.Thereby, length that can extension slot and R1 is reduced, and prevent from vibrating arm and vibrate with second order beam mode.In addition, in this case, even if confirm TL1/L ≈ 0.68, also can maintain the relation of R1 < R2.
In addition, described deformation suppression section, is the cutting part that described slot part is cut apart at the length direction of described vibration arm.
By such formation, thereby if compared with keeping certain width and situation about slot part not being cut apart at length direction, the rigidity of the vibration arm at cutting part place is higher.That is,, at cutting part, due to " be difficult to vibration ", thereby can suppress the distortion (deflection) of second order beam mode.That is, can prevent from vibrating arm by easy formation vibrates with second order beam mode.
In addition, described deformation suppression section, is the narrow width portion that the size of the Width of described slot part narrows down.
By such formation, thereby if with keep certain width and slot part along its length continuous situation compare, the rigidity of the vibration arm at narrow width portion place is higher.That is,, in narrow width portion, due to " be difficult to vibration ", thereby can suppress the distortion (deflection) of second order beam mode.That is, can prevent from vibrating arm by easy formation vibrates with second order beam mode.
In addition, at described cutting part, be formed with recess.
At this said recess, refer to sulculus, narrow width groove, slit etc.Form like this, also can at the recess of cutting part, suppress the distortion (deflection) of second order beam mode, that is, can prevent from vibrating arm by easy formation and vibrate with second order beam mode.
Piezoelectric vibrator involved in the present invention, is characterized in that, has described piezoelectric vibration piece.
By such formation, thereby can provide, can make R1 further decline and prevent from vibrating arm with the piezoelectric vibrator of second order beam mode vibration.
Oscillator involved in the present invention, is characterized in that, described piezoelectric vibrator is electrically connected to integrated circuit as oscillator.
By such formation, thereby can provide, can make R1 further decline and prevent from vibrating arm with the oscillator of second order beam mode vibration.
Electronic equipment involved in the present invention, is characterized in that, described piezoelectric vibrator is electrically connected to timing portion.
By such formation, thereby can provide, can make R1 further decline and prevent from vibrating arm with the electronic equipment of second order beam mode vibration.
Radio controlled timepiece involved in the present invention, is characterized in that, described piezoelectric vibrator is electrically connected to filtering portion.
By such formation, thereby can provide, can make R1 further decline and prevent from vibrating arm with the radio controlled timepiece of second order beam mode vibration.
The effect of invention
According to the present invention, can provide and can make R1 further decline and prevent from vibrating arm with piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic equipment and the radio controlled timepiece of the vibration of second order beam mode.
Accompanying drawing explanation
Fig. 1 is the stereoscopic figure while watching the piezoelectric vibrator embodiments of the present invention from lid substrate-side;
Fig. 2 is the internal structure figure of the piezoelectric vibrator in the 1st execution mode of the present invention, be under disassembling the state that covers substrate from above figure while watching piezoelectric vibration piece;
Fig. 3 is the profile along the A-A line of Fig. 2;
Fig. 4 is the exploded perspective view of the piezoelectric vibrator in the 1st execution mode of the present invention;
Fig. 5 is the plane graph of the piezoelectric vibration piece in the 1st execution mode of the present invention;
Fig. 6 (a) is the profile along the B-B line of Fig. 5, is (b) profile along the C-C line of Fig. 5;
Fig. 7 is the plane graph of the piezoelectric vibration piece in the 2nd execution mode of the present invention;
Fig. 8 is the chart that the variation of R1 value in the 2nd execution mode of the present invention and R2 value is shown, and the situation of TL2/TL1=0.5 (a) is shown, and the situation of TL2/TL1=0.6 (b) is shown, and the situation of TL2/TL1=0.8 (c) is shown;
Fig. 9 is the plane graph of the piezoelectric vibration piece in the 3rd execution mode of the present invention;
Figure 10 is the plane graph of the piezoelectric vibration piece in the 4th execution mode of the present invention;
Figure 11 is the plane graph of the piezoelectric vibration piece in the 5th execution mode of the present invention;
Figure 12 is the plane graph of the piezoelectric vibration piece in the 6th execution mode of the present invention;
Figure 13 is the plane graph of the piezoelectric vibration piece in the 7th execution mode of the present invention;
Figure 14 is the plane graph of the piezoelectric vibration piece in the 8th execution mode of the present invention;
Figure 15 is the plane graph of the piezoelectric vibration piece in the 9th execution mode of the present invention;
Figure 16 is the plane graph of the piezoelectric vibration piece in the 10th execution mode of the present invention;
Figure 17 is the pie graph that an execution mode of oscillator of the present invention is shown;
Figure 18 is the pie graph that an execution mode of electronic equipment of the present invention is shown;
Figure 19 is the pie graph that an execution mode of radio controlled timepiece of the present invention is shown;
Figure 20 is the plane graph of existing piezoelectric vibration piece;
Figure 21 is the key diagram that the movement of existing piezoelectric vibration piece is shown;
Figure 22 is that existing piezoelectric vibration piece is with the movement key diagram of the situation of second order beam mode vibration;
Figure 23 is the chart that the variation of existing R1 value and R2 value is shown.
Embodiment
(the 1st execution mode)
(piezoelectric vibrator)
Then,, based on Fig. 1 ~ Fig. 6, the 1st execution mode of the present invention is described.
Fig. 1 is the stereoscopic figure while watching the piezoelectric vibrator present embodiment from lid substrate-side, Fig. 2 is the internal structure figure of piezoelectric vibrator, be under disassembling the state that covers substrate from above figure while watching piezoelectric vibration piece, Fig. 3 is the profile along the A-A line of Fig. 2, and Fig. 4 is the exploded perspective view of piezoelectric vibrator.
As shown in Fig. 1 ~ Fig. 4, the piezoelectric vibrator 1 of present embodiment is the piezoelectric vibrator 1 that possesses the box-like packaging part 10 of the anodic bonding via not shown grafting material by basal substrate 2 and lid substrate 3 and be accommodated in the surface installing type of the piezoelectric vibration piece 5 in the cavity C of packaging part 10.Piezoelectric vibration piece 5 and be arranged at the lower surface in the 1st 2a(Fig. 3 of basal substrate 2) outer electrode 6,7 by a pair of through electrode 8,9 that connects basal substrate 2, be electrically connected to.
Be formed with under the state of this cavity C, lid substrate 3 with respect to basal substrate 2 via grafting material anodic bonding.That is, the 1st the 3b side at lid substrate 3, is provided with recess 3a at central portion, and, around it, be provided with the frame region 3c becoming with the composition surface of basal substrate 2.In addition, the grafting material of present embodiment is formed by Si film, but also can form grafting material by AL.In addition, can also by waiting by doping, the Si discrete material of low resistance forms grafting material.In addition, in the present embodiment, to using the packaging part of glass material to describe, but the mode of packaging part is not limited to this.For example, can be also the ceramic package that uses ceramic substrate.In this case, ceramic substrate or sealing ring at the stacked frame shape of the basal substrate consisting of ceramic substrate, form cavity thus.In addition, crown cap or glass cover can be used as to lid.
(piezoelectric vibration piece)
Fig. 5 is the plane graph of piezoelectric vibration piece, and Fig. 6 (a) is the profile along the B-B line of Fig. 5, and Fig. 6 (b) is the profile along the C-C line of Fig. 5.
As shown in Fig. 5 ~ Fig. 6 (b), piezoelectric vibration piece 5 is vibrating reeds of the tuning-fork-type that formed by piezoelectrics such as quartzy, lithium tantalate or lithium niobates, when applying set voltage, vibrates.This piezoelectric vibration piece 5 forms the tuning-fork-type consisting of a pair of vibration arm 24,25 extending parallel to each other and base portion 26 that the base end part of the bearing of trend along this pair of shaker arm portion 24,25 is connected and fixed each other integratedly.
Width both sides at base portion 26 are formed with respectively recess 23, thereby make the narrowed width of base portion 26.The route that this recess 23 is passed to base portion 26 sides for the vibration that makes to be encouraged by a pair of vibration arm 24,25 narrows down.Thus, vibration can be constrained in to a pair of vibration arm 24,25 sides and suppress to leak to base portion 26 sides.
A pair of vibration arm 24,25 consists of following parts: arm main body 24a, 25a, extend from base portion 26; The 24b of hammer portion, 25b, the mode from the front end of arm main body 24a, 25a with the length direction along arm main body 24a, 25a extends to form, and, because ladder is poor, cause width more to expand than arm main body 24a, 25a.And the 24b of hammer portion, 25b are set to take the free end that base portion 26 is stiff end broad ways vibration.
On the outer surface of a pair of vibration arm 24,25, be formed with the not shown excitation electrode that makes these a pair of shaker arm portion 24,25 vibrations.In addition, at the outer surface of base portion 26, be formed with not shown assembling electrode, by not shown extraction electrode, be connected with excitation electrode.And, if set voltage is applied to these each electrodes, due to the interaction each other of the both sides' of a pair of vibration arm 24,25 excitation electrode cause a pair of vibration arm 24,25 along direction near each other or that leave (Width) with set resonance frequency vibration.
In addition, on two interarea 24c, 25c of a pair of vibration arm 24,25, the mode of extending towards front with the base end side from vibration arm is formed with slot part.These slot parts are cut apart at length direction by cutting part 43, and at this, the slot part that is disposed at base end side of usining in the groove of being cut apart is as the 1st slot part 41, using be disposed at front with the 1st slot part 41 devices spaced apart slot part as the 2nd slot part 42.These the 1st slot parts 41 and the 2nd slot part 42 form along the length direction of a pair of vibration arm 24,25.
At a pair of vibration arm 24,25, to compare with being formed with each slot part 41,42 parts, the rigidity that is formed with cutting part 43 parts is high.
At this, when the total length of each vibration arm 24,25 is made as to L, each distance TL1 vibrating between the cardinal extremity of arm 24,25 and the front end of the 2nd slot part 42 is set as meeting:
TL1≈0.6L……（1）。
In addition, each vibrates the cardinal extremity of arm 24,25 and the distance TL2 between cutting part 43 center is set as meeting:
TL2≈L/2……（2）。
And the width W 1 of the 1st slot part 41 and the width W 2 of the 2nd slot part 42 are set as meeting:
W1≈W2……（3）。
And the groove depth H2 of the groove depth H1 of the 1st slot part 41 and the 2nd slot part 42 is set as meeting:
H1≈H2……（4）。
Be back to Fig. 2 ~ Fig. 4, the piezoelectric vibration piece 5 forming like this, utilizes the salient point B(of gold etc. with reference to Fig. 3), salient point is engaged in the upper surface in the 2nd 2b(Fig. 3 of basal substrate 2) on the roundabout electrode 27,28 that forms.Particularly, an excitation electrode in each excitation electrode of piezoelectric vibration piece 5, via being formed at lip-deep assembling electrode and a salient point B of base portion 26, salient point is engaged on a roundabout electrode 27, and via being formed at lip-deep another assembling electrode of base portion 26 and salient point B, salient point is engaged on another roundabout electrode 28 another excitation electrode.In addition,, in the situation that ceramic package is used in to packaging part, also can utilizes such as conductive adhesive etc. piezoelectric vibration piece 5 is fixedly supported on ceramic substrate.
Like this, about piezoelectric vibration piece 5, a part for base portion 26 (part of a side far away from each vibration arm 24,25) is engaged in the roundabout electrode 27,28 of packaging part 10 sides, thus, part with this joint is (following, be called the 26a of department of assembly) as supporting fixing point, supported with the 2nd state that 2b floats from basal substrate 2.In addition, become the state each assembling electrode being electrically connected to respectively with roundabout electrode 27,28 by the 26a of department of assembly.
Through electrode the 8, the 9th, with respect to through hole 21,22 and integratedly the core of fixing conductivity, forms: the two ends that connect direction are smooth, and become the thickness roughly the same with the thickness of basal substrate 2.Each through electrode 8,9 is being undertaken such effect: through hole 21,22 stopped up completely, maintains airtight in cavity C, and, make outer electrode 6,7 and 27,28 conductings of roundabout electrode.Set forth particularly, a through electrode 8, externally, between electrode 6 and the base portion 26 of piezoelectric vibration piece 5, is positioned at the below of roundabout electrode 27; Another through electrode 9, externally, between electrode 7 and the vibration arm 25 of piezoelectric vibration piece 5, is positioned at the below of roundabout electrode 28.
(manufacture method of piezoelectric vibration piece)
Next, the manufacture method of piezoelectric vibration piece is described.
First, by photoetching technique, on the two sides of not shown disk, form the profile pattern of the piezoelectric vibration piece 5 with a pair of vibration arm 24,25 and base portion 26.In addition, now, on disk, form a plurality of profile patterns.
Next, using profile pattern as mask, respectively etching and processing is carried out in the two sides of disk.Thus, can optionally remove the region of not covered by profile pattern and form the outer shape of piezoelectric vibration piece 5.In addition,, under this state, each piezoelectric vibration piece 5 becomes the state linking with disk via not shown linking part.
At this, two interarea 24c, 25c respectively vibrating arm 24,25 at piezoelectric vibration piece 5, be formed with the 1st slot part 41 and the 2nd slot part 42.Particularly, the region that makes to be equivalent to each slot part 41,42 by photoetching technique is with respect to above-mentioned profile pattern and opening.Then, using the profile pattern that forms like this as mask, on the two sides of disk, implement respectively etching and processing (etching partially).Thus, two interarea 24c, 25c at each vibration arm 24,25, form the 1st slot part 41 and the 2nd slot part 42.
After this, by well-known method, on the outer surface of piezoelectric vibration piece 5, by electrode film composition, form excitation electrode, extraction electrode and assembling electrode.
Then, finally cut off the linking part of disk and piezoelectric vibration piece 5 links is disconnected a plurality of piezoelectric vibration pieces 5 and the cut-out operation of singualtion from disk.Thus, can once manufacture from 1 disk the piezoelectric vibration piece 5 of a plurality of tuning-fork-types.
(action of piezoelectric vibrator)
Then, the action of piezoelectric vibrator 1 is described.
In the situation that making piezoelectric vibrator 1 work, to being formed at the outer electrode 6,7 of basal substrate 2, apply set driving voltage.Thus, can make current flowing in each excitation electrode of piezoelectric vibration piece 5, can make a pair of vibration arm 24,25 along direction near each other, that leave (Width) with set frequency vibration.And, can utilize the vibration of this pair of shaker arm portion 24,25, as the timing source of moment source, control signal or derived reference signal etc. and utilize.
At this, on two interarea 24c, 25c of each vibration arm 24,25, clip cutting part 43 and be formed with respectively the 1st slot part 41 and the 2nd slot part 42.And each vibrates the distance TL1 between the cardinal extremity of arm 24,25 and the front end of the 2nd slot part 42, when the total length of each vibration arm 24,25 is made as to L, be set as about 0.6L(with reference to Fig. 5).With reference to Figure 23, as mentioned above, if the length with respect to the slot part of the total length of vibration arm 24,25 surpasses 0.58, become R1 > R2, thereby piezoelectric vibration piece is easily with second order beam mode vibration, but in the present embodiment, there is cutting part 43, thus, even the length of slot part is made as to about 0.6L, can be also R1 < R2.
Also can the reasons are as follows for R1 < R2 even the length of slot part is made as to about 0.6L.That is, in a pair of vibration arm 24,25, compare with being formed with each slot part 41,42 parts, the rigidity that is formed with cutting part 43 parts is high.And, be formed with the place of this cutting part 43, be equivalent between the joint and joint of the vibration in second order flexural vibrations.Therefore, cutting part 43 is as " hindering the part of the vibration under second order beam mode ", suppresses the second order diastrophic " deformation suppression section " of a pair of vibration arm 24,25 and works.
In addition, each vibrates the cardinal extremity of arm 24,25 and the distance TL2 between cutting part 43 center is set as meeting formula (2) (with reference to Fig. 5).That is the position of the maximum displacement when vibration mode that, cutting part 43 is formed at a pair of vibration arm 24,25 is second order beam mode (with reference to the P100 of peak swing portion in existing Figure 22).In other words, each vibrates the cardinal extremity of arm 24,25 and the distance TL2 between cutting part 43 center is set as, become and existing Figure 22 in the cardinal extremity that respectively vibrates arm 2010,2011 and the roughly the same distance of the distance SL2 between the P100 of peak swing portion.Therefore, prevented that a pair of vibration arm 24,25 from vibrating with second order beam mode due to unwanted flexural deformation, even if extend the length T L1 of slot part and reduce R1, also can keep R1 < R2, can make a pair of vibration arm 24,25 with first-harmonic mode vibration.
(effect)
According to the 1st execution mode, at a pair of vibration arm 24, two interarea 24c of 25, 25c, be formed with the 1st slot part 41, the 2nd slot part 42 and be disposed at these slot parts 41, cutting part 43 between 42, thus, even each is being vibrated to arm 24, the length of the distance TL1(slot part between the front end of 25 cardinal extremity and the 2nd slot part 42) be set as meeting in the situation of formula (1), , even if will comprise that the 1st slot part 41 of cutting part 43 and the total length of the 2nd slot part 42 are set as respectively vibrating arm 24, in the situation over half of 25 total length, also can make these vibration arms 24, 25 vibration mode is first-harmonic pattern.Therefore, can extend the length of slot part and R1 is further declined, and preventing that a pair of vibration arm 24,25 from vibrating with second order beam mode.
In addition, cutting part 43 is worked as suppressing the diastrophic deformation suppression section of a pair of vibration arm 24,25.Therefore, compare with implementing between the 1st slot part 41 and the 2nd slot part 42 for suppressing the situation of processing of the distortion of a pair of vibration arm 24,25, can suppress the increase of the manufacturing cost of piezoelectric vibration piece 5.In addition, the position of deformation suppression section is the about L/2 of TL2=in the present embodiment, but as long as between the joint under second order beam mode and joint, just can obtain the effect of " improving R2 ".More effectively, the substantial middle at joint with joint, the position of displacement maximum arranges deformation suppression section.The in the situation that of present embodiment, its position becomes the about L/2 of TL2=.
And, by being formed at the distance TL2 respectively vibrating between the cutting part 43 center of arm 24,25 and the cardinal extremity of each vibration arm 24,25, be set as, and a pair of vibration arm 24,25 is roughly the same with the position of the maximum displacement in the situation of second order beam mode vibration and the distance respectively vibrated between the cardinal extremity of arm 24,25.Therefore, can effectively prevent that a pair of vibration arm 24,25 from vibrating with second order beam mode.In addition, in the present embodiment, to be provided with the formation of recess 23 at the 24b of hammer portion, 25b or base portion 26, be illustrated, but the shape that can be suitable for piezoelectric vibration piece of the present invention is not limited to this, can be also the formation that does not adopt hammer portion or recess.In addition, for vibration arm 24,25, interarea, the back side arbitrary, slot part being set can (following other illustrated execution modes be also like this).
(the 2nd execution mode)
Then, quote Fig. 1, Fig. 3, based on Fig. 7, Fig. 8, the 2nd execution mode of the present invention is described.In addition, the morphological markers same-sign identical with the 1st execution mode illustrated to (for following execution mode, being also like this).
Fig. 7 is the plane graph of the piezoelectric vibration piece in the 2nd execution mode.
In the 2nd execution mode, the basic formation of following each point etc. identical with aforesaid the 1st execution mode (for following execution mode, being also like this): piezoelectric vibrator 1 be possess the box-like packaging part 10 of the anodic bonding via not shown grafting material by basal substrate 2 and lid substrate 3 and be accommodated in the piezoelectric vibration piece 105 in the cavity C of packaging part 10 surface installing type piezoelectric vibrator 1(or can be also ceramic package); Piezoelectric vibration piece 105 and the lower surface being arranged in the 1st 2a(Fig. 3 of basal substrate 2) outer electrode 6,7 by a pair of through electrode 8,9 that connects basal substrate 2, be electrically connected to; Piezoelectric vibration piece 105 is vibrating reeds of the tuning-fork-type that formed by piezoelectrics such as quartzy, lithium tantalate or lithium niobates, a pair of vibration arm 124,125 extending parallel to each other and base portion 26 that the base end part of the bearing of trend along this pair of shaker arm portion 124,125 is connected and fixed each other integratedly, consists of; A pair of vibration arm 124,125 is by the arm main body 124a, the 125a that extend from base portion 26 and from the front end of arm main body 124a, 125a, in the mode of the length direction along arm main body 124a, 125a, extend to form and cause because ladder is poor the 24b of hammer portion, the 25b that width more expands than arm main body 124a, 125a and form, and the 24b of hammer portion, 25b are set to take the free end of base portion 26 as the vibration of stiff end broad ways.
At this, the difference of the 2nd execution mode and the 1st execution mode is: at a pair of vibration arm 24,25 of the 1st execution mode, between the 1st slot part 41 and the 2nd slot part 42, be formed with cutting part 43, in contrast, a pair of vibration arm 124,125 at the 2nd execution mode, cutting part 43 between the 1st slot part 41 and the 2nd slot part 42, is formed with the 51(of stria portion recess).
More specifically, as shown in Figure 7, on two interarea 124c, 125c of each vibration arm 124,125, between the 1st slot part 41 and the 2nd slot part 42, be formed with stria portion 51.The width W 3 of this stria portion 51 is set as, narrower than the width W 2 of the width W of the 1st slot part 41 1 and the 2nd slot part 42.In addition, in order not to be communicated with the 1st slot part 41 or the 2nd slot part 42, stria portion 51 forms with both 41,42 devices spaced apart.
In the situation that forming like this, because the rigidity at stria portion 51 vibration arms 124,125 improves (with being formed with flute length the situation identical and groove that width is certain and comparing), thereby also can play the effect same with aforesaid the 1st execution mode.
Based on Fig. 8, the effect of the 2nd execution mode is more specifically described.
Fig. 8 is the chart of the variation of R1 value in the 2nd execution mode illustrating when the longitudinal axis is made as to R1 value and R2 value and transverse axis is made as to TL1/L and R2 value, (a) illustrate with the distance TL1 between each vibration cardinal extremity of arm 124,125 and the front end of the 2nd slot part 42 divided by the cardinal extremity of each vibration arm 124,125 and below the distance TL2(between cutting part 43 center, referred to as " TL2/TL1 ") and situation that the value obtaining is 0.5, (b) situation that the value of TL2/TL1 is 0.6, the situation that the value that TL2/TL1 (c) is shown is 0.8 are shown.
As shown in Figure 8 (a), can confirm that at TL2/TL1 be at 0.5 o'clock, if the value of TL1/L becomes approximately 0.6, R2 value is less than R1.
In addition, as shown in Figure 8 (b) shows, can confirm that at TL2/TL1 be at 0.6 o'clock, if the value of TL1/L becomes approximately 0.61, R2 value is less than R1 value.
And, as shown in Fig. 8 (c), can confirm that at TL2/TL1 be at 0.8 o'clock, if the value of TL1/L becomes approximately 0.62, R2 value is less than R1 value.
So according to the 2nd above-mentioned execution mode, compared with prior art (with reference to Figure 23) can make CI value decline, and prevents that a pair of vibration arm 124,125 from vibrating with second order beam mode.
In addition, as apparent from Fig. 8 (a) ~ Fig. 8 (c), by by each vibration arm 124,125 cardinal extremity and the distance TL2 between cutting part 43 center and respectively vibrate the cardinal extremity of arm 124,125 and the front end of the 2nd slot part 42 between distance TL1 be set as meeting:
TL2/TL1≥0.5……（5），
Thereby can effectively prevent that a pair of vibration arm 124,125 from vibrating with second order beam mode.In addition, more effectively, TL2/TL1 ≈ 0.8 if, even in the situation that extend the length T L1 of slot part, also can maintain the relation of R1 < R2.
(the 3rd execution mode)
Then,, based on Fig. 9, the 3rd execution mode of the present invention is described.
Fig. 9 is the plane graph of the piezoelectric vibration piece in the 3rd execution mode.
As shown in the drawing, the difference of the piezoelectric vibration piece 205 of the 3rd execution mode and the piezoelectric vibration piece 105 of the 2nd execution mode is: the shape of the groove of the cutting part 43 that is formed at a pair of vibration arm 224,225 in the 3rd execution mode is different from the shape of the groove of the cutting part 43 that is formed at a pair of vibration arm 124,125 in the 2nd execution mode.
More specifically, as shown in Figure 9, the cutting part 43 at each vibration arm 224,225, is formed with the slot part 52 that thickness direction plan view is circular shape.In the situation that forming like this, because the rigidity at slot part 52 vibration arms 224,225 improves (with being formed with flute length the situation identical and groove that width is certain and comparing), thereby also can play the effect same with aforesaid the 1st execution mode.
(the 4th execution mode)
Then,, based on Figure 10, the 4th execution mode of the present invention is described.
Figure 10 is the plane graph of the piezoelectric vibration piece in the 4th execution mode.
As shown in the drawing, the difference of the piezoelectric vibration piece 305 of the 4th execution mode and the piezoelectric vibration piece 105 of the 2nd execution mode is: be formed at the shape of groove of the cutting part 43 of vibration arm 324,325, and different from the shape of the groove of the cutting part 43 that is formed at a pair of vibration arm 124,125 in the 2nd execution mode.
More specifically, as shown in figure 10, at the cutting part 43 of a pair of vibration arm 324,325, broad ways disposes 2 strias 53 abreast.The width W 4 of each stria portion 53 is set as, and than the pact of the width W 2 of the width W of the 1st slot part 41 1 and the 2nd slot part 42, half is narrower.So, each stria portion 53 and the 1st slot part 41 and the 2nd slot part 42 devices spaced apart and configure.
Like this, in the situation that cutting part 43 is formed with 2 stria portions 53, because the rigidity at stria portion 53 vibration arms 324,325 improves (with being formed with flute length the situation identical and groove that width is certain and comparing), thereby can play the effect same with aforesaid the 1st execution mode.
In addition, in the above-described 4th embodiment, to be formed with the situation of 2 stria portions 53 at cutting part 43, be illustrated, but be not limited to this, also can form more than 3 stria portion at cutting part 43.
(the 5th execution mode)
Then,, based on Figure 11, the 5th execution mode of the present invention is described.
Figure 11 is the plane graph of the piezoelectric vibration piece in the 5th execution mode.
As shown in the drawing, the difference of the piezoelectric vibration piece 405 of the 5th execution mode and the piezoelectric vibration piece 105 of the 2nd execution mode is: the cardinal extremity of a pair of vibration arm 324,325 in the 5th execution mode, be formed with stria portion 54, in contrast, piezoelectric vibration piece 105 at the 2nd execution mode, does not form stria portion 54.
More specifically, as shown in figure 11, two interarea 424c, 425c at a pair of vibration arm 424,425, be formed with stria portion 54 at cardinal extremity.The width W 5 of this stria portion 54 is set as, narrower than the width W 2 of the width W of the 1st slot part 41 1 and the 2nd slot part 42.In addition, the 1st slot part 441 forms with stria portion 54 devices spaced apart, thereby is not communicated with stria portion 54.
In the situation that forming like this, because the rigidity at stria portion 51 vibration arms 424,425 improves (with being formed with flute length the situation identical and groove that width is certain and comparing), thereby also can play the effect same with aforesaid the 1st execution mode.And, by usining base end side as stria portion 54, thereby can improve the intensity of base end side of vibration arm 424,425.
(the 6th execution mode)
Then,, based on Figure 12, the 6th execution mode of the present invention is described.
Figure 12 is the plane graph of the piezoelectric vibration piece in the 6th execution mode.
As shown in the drawing, the difference of the 6th execution mode and the 1st execution mode is: at a pair of vibration arm 24,25 of the 1st execution mode, between the 1st slot part 41 and the 2nd slot part 42, be formed with cutting part 43, in contrast, between a pair of vibration arm 524,525, the 1 slot parts 41 of the 6th execution mode and the 2nd slot part 42 by the 55(of the stria portion narrow width portion of narrow width) link.
More specifically, as shown in figure 12, on two interarea 524c, 525c of a pair of vibration arm 524,525, between the 1st slot part 41 and the 2nd slot part 42, be formed with stria portion 55.The width W 6 of this stria portion 55 is set as, narrower than the width W 2 of the width W of the 1st slot part 41 1 and the 2nd slot part 42, can be described as narrow width portion.In addition, stria portion 55 forms, and across the 1st slot part 41 and the 2nd slot part 42,41,42 is communicated with both.
In the situation that forming like this, because the rigidity at stria portion 55 vibration arms 524,525 improves (with being formed with flute length the situation identical and groove that width is certain and comparing), thereby also can play the effect same with aforesaid the 1st execution mode.
(the 7th execution mode)
Then,, based on Figure 13, the 7th execution mode of the present invention is described.
Figure 13 is the plane graph of the piezoelectric vibration piece in the 7th execution mode.
As shown in the drawing, the difference of the 7th execution mode and the 1st execution mode is: at a pair of vibration arm 24,25 of the 1st execution mode, between the 1st slot part 41 and the 2nd slot part 42, be formed with cutting part 43, in contrast, the 1st slot part 641 that is formed at a pair of vibration arm 624,625 of the 7th execution mode is connected with the 2nd slot part 642, and the linking part 56 of these the 1st slot parts 641 and the 2nd slot part 642 links is being formed with to rib 57.This rib 57 is as " deformation suppression section " of second order flexural vibrations worked.
The width W 7 of rib 57 is set as, narrower than the width W 2 of the width W of the 1st slot part 41 1 and the 2nd slot part 42.By forming rib 57, thereby even if the width W 1 of the 1st slot part 641 and the 2nd slot part 642 form continuously, the rigidity of the deformed region under second order beam mode also improves.Therefore, rib 57 works as suppressing the diastrophic deformation suppression section of a pair of vibration arm 624,625.
So, according to the 7th above-mentioned execution mode, because the rigidity at rib 57 vibration arms 624,625 improves (comparing with the situation that does not form rib), thereby can play the effect same with aforesaid the 1st execution mode.
(the 8th execution mode)
Then,, based on Figure 14, the 8th execution mode of the present invention is described.
Figure 14 is the plane graph of the piezoelectric vibration piece in the 8th execution mode.
As shown in the drawing, the 8th execution mode is from the difference of the 2nd execution mode: the shape of the base portion 726 of the formation piezoelectric vibration piece 705 of the base portion 26 of the formation piezoelectric vibration piece 105 of the 2nd execution mode and the 8th execution mode is different.
More specifically, as shown in figure 14, along with the connecting portion side from a pair of vibration arm 724,725 is towards a side (downside Figure 14) contrary with these vibration arms 724,725, the base portion 726 of the 8th execution mode expands multistagely.That is, base portion 726 have with the 1st base portion 727 of the connecting portion side of a pair of vibration arm 724,725 with respect to the 1st base portion 727 and a side contrary with a pair of vibration arm 724,725 is connected the so-called secondary base portion of the 2nd base portion 728(type that arranges and compare with the 1st base portion 727 wider width).
In addition, the 1st base portion 727 and each vibration coupling part of arm 724,725 and the coupling part between each base portion 727,728, so that along with vibrating arm 724,725 sides towards a side contrary with these vibration arms 724,725, the mode that width expands is gradually formed with inclined plane 727a, 728a from each.
So, according to the 8th above-mentioned execution mode, owing to forming the route that the 1st base portion 727 of narrow width causes making vibration by a pair of vibration arm 724,725 excitations to be passed to the 2nd base portion 728 sides, narrow down, thereby vibration can be constrained in to a pair of vibration arm 724,725 sides and suppress to leak to the 2nd base portion 728 sides.Thus, can effectively suppress vibration and leak, can suppress the quality decline that CI value rises and suppresses output signal.
In addition, due to can not extend base portion 726 length L K increase the volume of base portion 726, and, can utilize the 2nd base portion 728 that forms wider width to assemble, thereby also can improve about assembling.
In addition, in the 1st ~ 7th above-mentioned execution mode, to the Width both sides of base portion 26 forming piezoelectric vibration piece 5,105,205,305,405,505,605 respectively so that the mode of the narrowed width of base portion 26 forms the situation of recess 23 is illustrated.In addition, in the above-described 8th embodiment, the situation that the Width both sides forming the base portion 726 of piezoelectric vibration piece 705 is formed respectively to recess 23 is illustrated.Yet, be not limited to these situations, can at base portion 26,726, not form recess 23 yet.
(the 9th execution mode)
Then,, based on Figure 15, the 9th execution mode of the present invention is described.
Figure 15 is the plane graph of the piezoelectric vibration piece in the 9th execution mode.
As shown in the drawing, the difference of the 9th execution mode and the 2nd execution mode is: at the piezoelectric vibration piece 805 of the 9th execution mode, Width both sides at base portion 826, be formed with respectively side arm 58, the so-called side arm type of 59(), in contrast, the base portion 26 of the piezoelectric vibration piece 105 in the 2nd execution mode, not integrally formed side arm 58.
More specifically, each side arm 58,59 forms, in the one end (lower end Figure 15) contrary with a pair of vibration arm 824,825 from base portion 826, after extend Width both sides, along the length direction of each vibration arm 824,825 and the front end bending of vibrating arm 824,825 towards each, extend.In addition, leading section 58a, the 59a of each side arm 58,59 a little more extend to the front of respectively vibrating arm 824,825 than the length direction substantial middle of the 2nd slot part 42.
Under such formation, can make junction surface 58a, the 59a of each side arm 58,59 work as department of assembly, can be installed on for example packaging part via this department of assembly.
So, according to the 9th above-mentioned execution mode, except with the same effect of aforesaid the 2nd execution mode, at base portion 826, can also guarantee with each vibration the connecting portion of arm 824,825 and the distance of department of assembly (leading section 58a, the 59a of side arm 58,59) longer.As a result, can not make the total length of piezoelectric vibration piece 805 increase to suppress vibration to be leaked and suppress the quality decline that CI value rises and suppresses output signal.
(the 10th execution mode)
Then,, based on Figure 16, the 10th execution mode of the present invention is described.
Figure 16 is the plane graph of the piezoelectric vibration piece in the 10th execution mode.
As shown in the drawing, the difference of the 10th execution mode and the 9th execution mode is: the base portion 926 at the 10th execution mode, is formed with recess 923 in Width both sides, in contrast, at the base portion 826 of the 9th execution mode, in Width both sides, do not form recess 923.
By such formation, thereby can make the route that the vibration by a pair of vibration arm 924,925 excitations is passed to base portion 926 sides narrow down.
So, according to the 10th above-mentioned execution mode, except with the same effect of aforesaid the 9th execution mode, owing to vibration can being constrained in to a pair of vibration arm 924,925 sides, suppress to leak to base portion 926 sides, thereby can also prevent that CI value from rising.
(oscillator)
Then,, based on Figure 17, oscillator involved in the present invention execution mode is described.
Figure 17 is the pie graph that an execution mode of oscillator is shown.
As shown in the drawing, the oscillator 1100 of present embodiment forms as the oscillator that piezoelectric vibrator 1 is electrically connected to integrated circuit 1101.This oscillator 1100 possesses the substrate 1103 of the electronic components such as capacitor is installed 1102.At substrate 1103, the above-mentioned integrated circuit 1101 that oscillator is used is installed, near this integrated circuit 1101, piezoelectric vibrator 1 is installed.These electronic components 1102, integrated circuit 1101 and piezoelectric vibrator 1 are electrically connected to by not shown wiring pattern respectively.In addition, each constituent part is by not shown resin molded.
In the oscillator 1100 forming like this, if voltage is applied to piezoelectric vibrator 1, the piezoelectric vibration piece 5(105,205,305,405,505,605,705,805,905 in this piezoelectric vibrator 1) vibration.Utilize the piezoelectric property that piezoelectric vibration piece 5 has that this vibration is transformed into the signal of telecommunication, as the signal of telecommunication, input to integrated circuit 1101.The signal of telecommunication of inputting carries out various processing by integrated circuit 1101, as frequency signal, exports.Thus, piezoelectric vibrator 5 works as oscillator.
In addition, set as requested and optionally the formation of integrated circuit 1101, such as RTC(real-time clock) module etc., thus, except clock and watch are with single function oscillator etc., can also add action day of this equipment or external equipment or constantly or provide constantly or the function of calendar etc. is provided.
As mentioned above, according to the oscillator 1100 of present embodiment, owing to possessing the piezoelectric vibrator 1 with high strength and the miniaturization that can CI value be suppressed lowlyer and high performance, thereby can provide and there is high reliability and high performance oscillator 1100.
(electronic equipment)
Then,, based on Figure 18, electronic equipment involved in the present invention execution mode is described.In addition,, as electronic equipment, mobile information apparatus (electronic equipment) 1110 with above-mentioned piezoelectric vibrator 1 of take describes as example.
At this, it is representative that the mobile information apparatus 1110 of present embodiment be take for example portable phone, develops and improves wrist-watch of the prior art.Outward appearance and watch kind seemingly, have liquid crystal display at the partial configuration that is equivalent to dial plate, can make present moment etc. be presented on this picture.In addition, as the communication equipment in the situation that, from wrist, take, can carry out same the communicating by letter of portable phone with prior art by the loud speaker and the microphone that are built in the inner side part of band.Yet, compare with existing portable phone, especially miniaturization and lightness.
Then, the formation of the mobile information apparatus 1110 of present embodiment is described.
Figure 18 is the pie graph of mobile information apparatus.
As shown in the drawing, this mobile information apparatus 1110 possesses piezoelectric vibrator 1 and for supplying with the power supply unit 1111 of electric power.Power supply unit 1111 consists of for example lithium secondary battery.At this power supply unit 1111, be connected with in parallel and carry out the control part 1112 of various controls, the timing portion 1113 of the counting that carries out constantly etc., carry out with the outside Department of Communication Force of communicating by letter 1114, show the display part 1115 of various information and the voltage detection department 1116 that detects the voltage of each function part.And, by power supply unit 1111, supply power to each function part.
Department of Communication Force 1114 has the function same with existing portable phone, possesses radio section 1117, acoustic processing portion 1118, switching part 1119, enlarging section 1120, Speech input efferent 1121, telephone number input part 1122, ringtone generating unit 1123 and calls out control store portion 1124.
In addition, ringtone generating unit 1123 response generates ringtone from the calling of base station.Switching part 1119 only just switches to ringtone generating unit 1123 by the enlarging section 1120 being connected with acoustic processing portion 1118 when incoming call, thus, via enlarging section 1120, export the ringtone generating to Speech input efferent 1121 in ringtone generating unit 1123.
In addition, call out control store portion 1124 and store the program relevant with called control to the calling of communication.In addition, telephone number input part 1122 possesses for example number button and other keys of 0 to 9, by pressing these number button etc., thus the telephone number of input partner etc.
In the situation that the voltage being applied by each function parts of 1111 pairs of control parts of power supply unit, 1112 grades is lower than set value, voltage detection department 1116 detects these voltage drops and also notifies to control part 1112.Set magnitude of voltage is now for Department of Communication Force 1114 is stably moved, to preset the value of usining as necessary MIN voltage, for example, be 3V left and right.The control part 1112 of the notice declining from voltage detection department 1116 receiver voltages is forbidden the action of radio section 1117, acoustic processing portion 1118, switching part 1119 and ringtone generating unit 1123.The action of the radio section 1117 that especially, power consumption is large stops becoming necessary.And, at display part 1115, show Department of Communication Force 1114 due to the deficiency of battery allowance out of use main idea.
That is, can forbid the action of Department of Communication Force 1114 and this main idea is presented to display part 1115 by voltage detection department 1116 and control part 1112.This demonstration can be also word message, and phone icon mark * (fork) mark that also can show the top of the display surface at display part 1115 is usingd as showing more intuitively.
In addition, the power supply that possesses the power supply that can optionally block the part relevant to the function of Department of Communication Force 1114 blocks portion 1126, thus, can stop more reliably the function of Department of Communication Force 1114.
As mentioned above, mobile information apparatus 1110 according to present embodiment, owing to possessing the piezoelectric vibrator 1 with high strength and the miniaturization that can CI value be suppressed lowlyer and high performance, thereby can provide and there is high reliability and high performance mobile information apparatus 1110.
(radio controlled timepiece)
Then,, based on Figure 19, radio controlled timepiece involved in the present invention execution mode is described.
Figure 19 is the pie graph that an execution mode of radio controlled timepiece is shown.
As shown in the drawing, the radio controlled timepiece 1130 of present embodiment possesses the piezoelectric vibrator 1 being electrically connected to filtering portion 1131, is to possess to receive the standard wave contain clock and watch information and be automatically modified to the correct moment and the clock and watch of the function that shows.
In Japan, ， Fukushima county (40kHz) and Saga county (60kHz) have the transmission institute (forwarding office) that sends standard wave, send respectively standard wave.Due to the long wave as 40kHz or 60kHz have the character propagated on earth's surface concurrently and in ionosphere with earth's surface while reflecting the character of propagating, thereby spread scope is wide, by 2 above-mentioned transmissions cover in Japan whole.
Below, the formation of the function of radio controlled timepiece 1130 is at length described.
Antenna 1132 receives the standard wave of the long wave of 40kHz or 60kHz.The standard wave of long wave is that the carrier wave that the time information AM that is called as time code is modulated to 40kHz or 60kHz forms.The standard wave of the long wave receiving is amplified by amplifier 1133, also tuning by filtering portion 1131 filtering with a plurality of piezoelectric vibrators 1.
And the signal of filtered set frequency is by detection, rectification circuit 1134 detections demodulation.
Next, via waveform shaping circuit 1135 take-off time codes, by CPU 1136, counted.In CPU 1136, read the information in present year or accumulation day, week, the moment etc.The message reflection reading, in RTC 1137, shows correct time information.
Because carrier wave is 40kHz or 60kHz, thereby quartzy vibrator portion 1138,1139 is preferably the vibrator of the structure that has above-mentioned tuning-fork-type.
In addition, above-mentioned explanation illustrates with example in Japan, but the standard electric wave frequency of long wave is different in overseas.For example, in Germany, use the standard wave of 77.5 kHz.So, radio controlled timepiece 1130 that in overseas also can be corresponding is packed in the situation of portable equipment, also need the piezoelectric vibrator 1 of the frequency different from Japanese situation.
As mentioned above, radio controlled timepiece 1130 according to present embodiment, owing to possessing the piezoelectric vibrator 1 with high strength and the miniaturization that can CI value be suppressed lowlyer and high performance, thereby can provide and there is high reliability and high performance radio controlled timepiece 1130.
In addition, the invention is not restricted to above-mentioned execution mode, be included in the inherent above-mentioned execution mode of scope that does not depart from main idea of the present invention and add the execution mode that various changes form.
For example, in the above-described embodiment, piezoelectric vibrator 1 at surface installing type adopts piezoelectric vibration piece 5,105,205,305,405,505,605,705,805,905 of the present invention, but be not limited to this, also can adopt at the piezoelectric vibrator of cylinder packaging part type piezoelectric vibration piece 5,105,205,305,405,505,605,705,805,905 of the present invention.
In addition, in the above-described embodiment, each situation that respectively forms 1 place's cutting part 43 at a pair of vibration arm 24 ~ 924,25 ~ 925 is illustrated.Yet, be not limited to this, also can form a plurality of cutting parts 43 at length direction.In this case, in a part that is formed at the 1st slot part 41,441,641 of a pair of vibration arm 24 ~ 924,25 ~ 925 and/or is formed with the 2nd slot part 42,642 parts, form cutting part 43.In addition, these cutting parts are necessary to be at least formed between the joint and joint under second order beam mode.Between joint and joint, the part of being out of shape under second order beam mode arranges cutting part 43, thus, is difficult to vibration under second order beam mode, and R2 rises.
In addition, in the situation that forming a plurality of cutting part 43, also can form stria portion 51,53,54,55 and slot part 52 at each of each cutting part 43, also can the part in a plurality of cutting parts 43 form stria portion 51,53,54,55 and slot part 52.
And, in the above-described embodiment, to being formed at distance TL2(between the cutting part 43 center of a pair of vibration arm 24 ~ 924,25 ~ 925 and the cardinal extremity of each vibration arm 24 ~ 924,25 ~ 925 with reference to Fig. 5) situation that is set as meeting formula (2) is illustrated.That is, to cutting part 43 being formed to the position of the maximum displacement of a pair of vibration arm 24 ~ 924,25 ~ 925 when the vibration mode of a pair of vibration arm 24 ~ 924,25 ~ 925 is second order beam mode, further in other words the situation of the position of the P100 of peak swing portion in existing Figure 22 is illustrated.
Yet, be not limited to this, the vibration node portion of the base end side when the vibration mode of a pair of vibration arm 24 ~ 924,25 ~ 925 is second order beam mode (for example, 2010a in Figure 22,2011a) with the vibration node portion (for example, the 2010b in Figure 22,2011b) of front between form cutting part 43.More preferably, can be to meet with respect to the total length L of each vibration arm 24 ~ 924,25 ~ 925 apart from TL2 the set positions of cutting part 43:
L/2TL≤TL2≤2L/3……（6）。
By cutting part 43 is formed and meets formula (6), thereby can play the effect same with aforesaid the 1st execution mode.
According to more than, according to the present invention, being assumed to the deformed region of vibration arm with the situation of high-order beam mode vibration, be provided with " deformation suppression section " that suppress high frequent vibration.Thus, if the situation that is formed at vibration arm with same width roughly and the groove that extends along its length compare, even if the same length of groove arranges " deformation suppression section " and also can increase R2.So, even because the length of extension slot also can keep the relation of R1 < R2 in the situation that want to reduce the R value (CI value) of piezoelectric vibration piece, thereby can make piezoelectric vibration piece with first-harmonic mode vibration.For example,, even if the length T L1 of groove with respect to the length L of shaker arm and be TL1/L1 ≈ 0.6, also can reach R1 < R2.And, by inventors of the present invention, confirmed, for example, if the position that the position of " deformation suppression section " is formed under second order beam mode to farthest distortion (, the position of abdomen), even if TL1/L ≈ 0.68, also can maintain R1 < R2, can be with first-harmonic mode vibration.In addition, in the situation that the cutting part of groove is set as deformation suppression section, and cutting part is set correspondingly, the length of groove shortens, but it is fine to involve the impact of electrolytic efficiency, and it is much bigger to maintain the benefit of relation of R1 < R2.
Description of reference numerals
1 piezoelectric vibrator; 5,105,205,305,405,505,605,705,805,905 piezoelectric vibration pieces; 24,25,124,125,224,225,324,325,424,425,524,525,624,625,724,725,824,825,924,925 vibration arms; 24c, 25c, 124c, 125c, 524c, 525c interarea; 26,726,826,926 base portions; 41,441,641 the 1st slot parts; 42,642 the 2nd slot parts; 43 cutting parts; 51,53,54,55 stria portions; 52 slot parts; 1100 oscillators; 1101 integrated circuits; 1110 mobile information apparatus (electronic equipment); 1113 clock and watch portions; 1130 radio controlled timepieces; 1131 filtering portions; 2010a, the 2010b of 2011a vibration node portion (the vibration node portion of base end side), 2011b vibration node portion (the vibration node portion of front); P100 peak swing portion; L total length.
Claims (9)
1. a piezoelectric vibration piece, possesses:
A plurality of vibration arms, broad ways configures abreast;
Base portion, links the cardinal extremity of the length direction of described vibration arm; And
Slot part, the interarea of described vibration arm or at least one party at the back side, the front from described base end side towards described vibration arm forms,
Described piezoelectric vibration piece is characterised in that, between the vibration node portion of the vibration node portion of the described base end side of the described vibration arm when the vibration mode that makes described vibration arm is second order beam mode and the described front of described vibration arm, be provided with the diastrophic deformation suppression section that suppresses the described vibration arm under second order beam mode.
2. piezoelectric vibration piece as claimed in claim 1, is characterized in that, described deformation suppression section be located at the described vibration arm while making the vibration mode of described vibration arm be second order beam mode peak swing portion near.
3. piezoelectric vibration piece as claimed in claim 1 or 2, is characterized in that, described deformation suppression section is the cutting part that described slot part is cut apart at the length direction of described vibration arm.
4. piezoelectric vibration piece as claimed in claim 1 or 2, is characterized in that, described deformation suppression section is the narrow width portion that the size of the Width of described slot part narrows down.
5. piezoelectric vibration piece as claimed in claim 3, is characterized in that, at described cutting part, is formed with recess.
6. a piezoelectric vibrator, is characterized in that, has the piezoelectric vibration piece described in claim 1 or 2.
7. an oscillator, is characterized in that, piezoelectric vibrator claimed in claim 6 is electrically connected to integrated circuit as oscillator.
8. an electronic equipment, is characterized in that, piezoelectric vibrator claimed in claim 6 is electrically connected to timing portion.
9. a radio controlled timepiece, is characterized in that, piezoelectric vibrator claimed in claim 6 is electrically connected to filtering portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012166156A JP6200636B2 (en) | 2012-07-26 | 2012-07-26 | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic device, and radio timepiece |
| JP2012-166156 | 2012-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103580638A true CN103580638A (en) | 2014-02-12 |
Family
ID=50051710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310318639.XA Pending CN103580638A (en) | 2012-07-26 | 2013-07-26 | Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic instrument and electric wave clock |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6200636B2 (en) |
| CN (1) | CN103580638A (en) |
| TW (1) | TW201424067A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109600123A (en) * | 2017-10-03 | 2019-04-09 | 微晶有限公司 | Small-sized piezoelectric resonator |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7232574B2 (en) * | 2018-02-28 | 2023-03-03 | エスアイアイ・クリスタルテクノロジー株式会社 | Method for manufacturing piezoelectric vibrating piece and method for manufacturing piezoelectric vibrator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003133896A (en) * | 2001-10-29 | 2003-05-09 | Seiko Epson Corp | Vibrating piece, vibrator, oscillator, electronic equipment and manufacture of vibrating piece |
| CN101316097A (en) * | 2007-05-30 | 2008-12-03 | 爱普生拓优科梦株式会社 | Tuning fork resonator element and turning fork resonator |
| JP2008306468A (en) * | 2007-06-07 | 2008-12-18 | Epson Toyocom Corp | Piezoelectric vibration piece and piezoelectric vibrator |
| JP2011160391A (en) * | 2010-01-09 | 2011-08-18 | Seiko Epson Corp | Piezoelectric vibration piece, method of manufacturing the same, piezoelectric vibrator and oscillator |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003060482A (en) * | 2001-08-10 | 2003-02-28 | River Eletec Kk | Tuning fork crystal oscillating piece |
| JP4281348B2 (en) * | 2002-12-17 | 2009-06-17 | セイコーエプソン株式会社 | Piezoelectric vibrating piece, piezoelectric device using the piezoelectric vibrating piece, mobile phone device using the piezoelectric device, and electronic equipment using the piezoelectric device |
| JP2007006375A (en) * | 2005-06-27 | 2007-01-11 | Sanyo Electric Co Ltd | Piezoelectric resonator and manufacturing method thereof |
| JP4694953B2 (en) * | 2005-11-30 | 2011-06-08 | セイコーインスツル株式会社 | Piezoelectric vibrating piece manufacturing method, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic device, and radio timepiece |
| JP5155275B2 (en) * | 2008-10-16 | 2013-03-06 | 日本電波工業株式会社 | Tuning fork type piezoelectric vibrating piece, piezoelectric frame and piezoelectric device |
-
2012
- 2012-07-26 JP JP2012166156A patent/JP6200636B2/en active Active
-
2013
- 2013-07-11 TW TW102124910A patent/TW201424067A/en unknown
- 2013-07-26 CN CN201310318639.XA patent/CN103580638A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003133896A (en) * | 2001-10-29 | 2003-05-09 | Seiko Epson Corp | Vibrating piece, vibrator, oscillator, electronic equipment and manufacture of vibrating piece |
| CN101316097A (en) * | 2007-05-30 | 2008-12-03 | 爱普生拓优科梦株式会社 | Tuning fork resonator element and turning fork resonator |
| JP2008306468A (en) * | 2007-06-07 | 2008-12-18 | Epson Toyocom Corp | Piezoelectric vibration piece and piezoelectric vibrator |
| JP2011160391A (en) * | 2010-01-09 | 2011-08-18 | Seiko Epson Corp | Piezoelectric vibration piece, method of manufacturing the same, piezoelectric vibrator and oscillator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109600123A (en) * | 2017-10-03 | 2019-04-09 | 微晶有限公司 | Small-sized piezoelectric resonator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014027480A (en) | 2014-02-06 |
| TW201424067A (en) | 2014-06-16 |
| JP6200636B2 (en) | 2017-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102201793A (en) | Glass substrate bonding method, glass assembly, package manufacturing method, package, piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece | |
| US8884500B2 (en) | Piezoelectric vibrating reed having arms with multiple grooves | |
| JP5793387B2 (en) | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic device, and radio timepiece | |
| CN103036522A (en) | Piezoelectric vibration reed, piezoelectric vibrator, oscillator, electronic instrument, and radio timepiece | |
| CN104052429A (en) | Piezoelectric Vibrating Piece, Piezoelectric Vibrator, Oscillator, Electronic Apparatus And Radio Controlled Timepiece | |
| CN102204088A (en) | Piezoelectric vibrator, oscillator, electronic device, atomic clock and method for manufacturing piezoelectric vibrator | |
| CN103036525B (en) | Piezoelectric vibration piece, piezoelectric vibrator, agitator, electronic equipment and radio wave clock | |
| TWI600276B (en) | Piezoelectric vibrating strip, piezoelectric vibrator, oscillator, electronic device, and radio timepiece | |
| CN103248333B (en) | Piezoelectric vibration piece, piezoelectric vibrator, agitator, electronic equipment and radio controlled timepiece | |
| CN102197585A (en) | Method for manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic apparatus, and wave clock | |
| CN102437833A (en) | Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic device and radio-controlled timepiece | |
| US8089202B2 (en) | Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic device, radio-controlled clock, and method for manufacturing piezoelectric vibrating reed | |
| CN102142826A (en) | Piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece | |
| CN101964637B (en) | Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic device, radio-controlled clock, and method for manufacturing piezoelectric vibrating reed | |
| CN101964639A (en) | The manufacture method of voltage fluctuation device, piezoelectric vibrator, oscillator, electronic equipment and radio wave clock | |
| CN102197587A (en) | Method for manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic apparatus, and wave clock | |
| CN103580638A (en) | Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic instrument and electric wave clock | |
| CN102227873A (en) | Piezoelectric oscillator manufacturing method, piezoelectric oscillator, oscillator, electronic device, and radio wave clock | |
| US20140028158A1 (en) | Piezoelectric vibrating strip, piezoelectric vibrator, oscillator, electronic device, and radio timepiece | |
| CN103326686A (en) | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece | |
| JP5912051B2 (en) | Piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic device and radio clock | |
| CN102377410B (en) | Piezoelectric vibration piece, piezoelectric vibrator, agitator, electronic equipment and radio wave clock | |
| CN102377410A (en) | Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic device and radio-controlled timepiece | |
| JP2013187854A (en) | Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic apparatus, and atomic clock | |
| JP2013165397A (en) | Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic apparatus, and atomic clock |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned | ||
| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20180608 |