CN103576345A - Programmable optical filter based on integrated silicon waveguide - Google Patents
Programmable optical filter based on integrated silicon waveguide Download PDFInfo
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- CN103576345A CN103576345A CN201310516805.7A CN201310516805A CN103576345A CN 103576345 A CN103576345 A CN 103576345A CN 201310516805 A CN201310516805 A CN 201310516805A CN 103576345 A CN103576345 A CN 103576345A
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Abstract
The invention discloses a programmable optical filter based on an integrated silicon waveguide. The programmable optical filter comprises a coupler, a power modulation structure, a phase modulation structure, a delay structure and a coupler which are connected in sequence. An optical signal required to be processed is input into an integrated silicon waveguide system; the optical signal is divided into multiple paths of signals through the coupler; the power of the paths of optical signals is adjusted through the power modulation structure; the phases of the paths of optical signals are adjusted through the phase modulation structure; the paths of optical signals are delayed; finally the paths of optical signals are combined into a path through the coupler; programmable filtering with adjustable central wavelength, adjustable bandwidth and adjustable filtering shape can be realized by adjusting the power and the phases of the paths of signals through an electric or heat modulation method. The programmable optical filter is simple and compact in structure, lower in cost, easy to realize, wider in application range and high in availability, and can be used for realizing integratable and programmable optical filtering.
Description
Technical field
The present invention relates to optical filtering technology field, relate in particular to a kind of programmable optical wave filter based on integrated silicon-based waveguide.
Background technology
The Main Function of optical filter screens broadband spectral signal exactly, thereby obtain required narrow band signal or particular frequencies composition, it is extremely important ingredient in optical system, at aspects such as suppressing noise, raising signal quality, increase message capacity and ultrafast optics, has very large contribution.
Existing tunable optical filter mainly can be divided into three kinds: centre wavelength adjustable filter, and bandwidth adjustable filter, centre wavelength bandwidth is adjustable filter all.The first centre wavelength adjustable filter refers to that the bandwidth of wave filter is immutable, the centre wavelength of filtering can change, wherein can be divided into again adjustable filter (the Das M and Thyagarajan K based on grating, " Wavelength division multiplexing isolation filter using concatenated chirped long period gratings " .Optics Communications, 2001), acousto-optic tunable filter (is gone through group, Liu little Ming, Lee Tong etc., " Acousto-optical Tunable Filters based on single-mode fiber ", Chinese laser, 2001), adjustable filter (the A.Kutyrev of Fabry POLO chamber (F-P) structure, C.L.Bennett, S.Moseley etal. " Near infrared cryogenic tunable solid fabry-perot spectrometer ", Proceedings of SPIE, 2004) etc.The second bandwidth adjustable filter refers to that the centre wavelength of filtering is immutable, but the bandwidth of filtering can regulate, wherein can be divided into again: (the Ming-Chang M.Lee and Ming C.Wu. " Variable bandwidth of dynamic add-drop filters based on coupling-controlled microdisk resonators " of the adjustable filter based on micro-dish or micro-ring, Optics Letter, 2006), adjustable filter based on Gires-Tournois interferometer (Kyoungsik Yu and Olav Solgaard. " Tunable Optical Transversal Filters Based ona Gires-Tournois Interferometer With MEMS Phase Shifters ", IEEE Journalof Selected Topics in Quant μ m Electronics, 2004) etc.The filter synthesis that the third centre wavelength bandwidth is all adjustable the advantage of first two wave filter, more flexible, range of application is also wider.But this wave filter is still in development, and implementation is less.Current published technical scheme has: the optical substrate that utilizes two plated films, change substrate distance and light source incoming position and realize all adjustable wave filter of centre wavelength bandwidth (Philip E.Buchsba μ m and James D.Lane, Tunable Variable Bandpass Opticalfilter:US, 6,700,690B1[P] .2004-3-2.).Based on Mach---all adjustable wave filter (the Yunhong Ding of centre wavelength bandwidth of Zeng Deer interferometer structure, Minhao Pu, Liu Liu etal. " Bandwidth and wavelength-tunableoptical bandpass filter based on silicon microring-MZI structure " .OpticsExpress, 2011,19 (7): 6242-6270.).This two schemes has certain limitation.In the first string, require very accurate machinery to control, and it is high to make complicated cost.The wavelength of second scheme median filter and the tuning range of bandwidth are very narrow, and this has limited its range of application greatly.Finisar company and SanTec company all develop centre frequency and can be in harmonious proportion the adjustable commercial optical filter of bandwidth (as the OTF-950 model of the WaveShaper4000s of Finisar company and Santec company and OTF-930 model) in addition, but be space optics technology, but not integrated optics technique, so constructed systems bulky, power consumption is high, and cost is high.And the wave filter scenario-frame that we propose is compact, by all functions module integration to silicon base chip, to make simply, cost is lower, and can realize able to programmely, and than midbandwidth, all adjustable filter is more flexible, and usable range is wider, and availability is strong.
Summary of the invention
For the deficiencies in the prior art, the object of the present invention is to provide a kind of programmable optical wave filter based on integrated silicon waveguide, the formation of this device is simple in structure, and cost is lower, is easy to realize, and easy of integration able to programme.
For realizing above goal of the invention, the present invention by the following technical solutions:
A kind of programmable optical wave filter based on integrated silicon waveguide, comprise a plurality of modules of joining successively: the first coupling mechanism, power modulation structure, phase-modulation structure, time-delay structure and the second coupling mechanism, described a plurality of module all completes on a silicon base chip, wherein
The first coupling mechanism is divided into uniform n road signal (4≤n≤16) by the light signal of input, power modulation structure is carried out power modulation to each road signal, phase-modulation structure is carried out phase-modulation to each road signal, time-delay structure Dui Mei road signal is made different delayed time, finally by the second coupling mechanism (5), be combined into a road, described power modulation structure and described phase-modulation structure adopt electricity to adjust or the meticulous control of hot tune mode, realize programmable filter.
Compared with prior art, technique effect of the present invention is embodied in:
By silica-based waveguides structure, realize optically filtering, silica-based waveguides is with respect to discrete device, and compact conformation is easy to integratedly, makes simply, and cost is lower, and can realize able to programmely, more flexible, and usable range is wider, and availability is strong.
Accompanying drawing explanation
Explanation with reference to below, by reference to the accompanying drawings, can have best understanding to the present invention.In the accompanying drawings, identical part can be represented by identical label.
Fig. 1 is the structural representation of optical filter of the present invention, 1(a wherein) for realizing the structural drawing of programmable optical filtering, 1(b) for realizing the silicon Wave guide system schematic top plan view of programmable optical filtering, (using and connect Y branch as power splitter, 8 tunnel light paths, hot adjusting power/phase-modulation structure is example), 1(c) for realizing sinc function shape spectrogram;
Fig. 2 is the mode profile of design waveguide cross-section;
Fig. 3 is the schematic diagram of design Y branch power splitter, wherein 3(a) be 2 dimension schematic diagram, be 3(b) 3 dimension schematic diagram;
Fig. 4 is the modulated structure of hot tune mode, 4(a wherein) for the heat of design is adjusted MZI power modulation structure 2 dimension schematic diagram, 4(b) for the heat of design is adjusted MZI power modulation structure 3 dimension schematic diagram, 4(c), for the hot phase modulation position modulated structure 2 dimension schematic diagram of design, 4(d) be the hot phase modulation position modulated structure 3 dimension schematic diagram of design;
Fig. 5 is that heat is adjusted the temperature variant graph of a relation of structure, wherein 5(a) be the temperature variant graph of a relation of hot adjusting power modulated structure output power, 5(b) for the modulated structure output phase change of hot phase modulation position, measure temperature variant graph of a relation;
Fig. 6 is the schematic diagram of time-delay structure, wherein 6(a) be 2 for schematic diagram, be 6(b) 3 to be schematic diagram;
Fig. 7 realizes the schematic diagram of programmable optical wave filter, wherein 4(a for simulation) be the standard frequency spectrum of time domain square wave, 4(b) for programmable filter, press the output spectrum of gained after standard frequency spectrum (a) setup parameter.4(c) be the standard frequency spectrum of time domain triangular wave, 4(d) for programmable filter, press the output spectrum of gained after standard frequency spectrum (c) setup parameter.4(e) be the standard frequency spectrum of time domain sawtooth wave, 4(f) for programmable filter, press the output spectrum of gained after standard frequency spectrum (e) setup parameter.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and exemplary embodiment, the present invention is further elaborated.Should be appreciated that exemplary embodiment described herein is only in order to explain the present invention, the scope of application being not intended to limit the present invention.
Fig. 1 (a) has provided a kind of structural representation that programmable optical wave filter of the present invention is realized.Programmable optical wave filter based on integrated silicon waveguide comprises the first coupling mechanism 1, power adjustments structure 2, phase-modulation structure 3, time-delay structure 4 and the second coupling mechanism 5 joining successively.
The light signal that need are processed is input in this programmable optical wave filter, by the first coupling mechanism 1, the light signal of input is divided into uniform n road (desirable 4 to 16 the arbitrary integer of n), power modulation structure 2 is carried out power modulation to each road light signal, phase-modulation structure 3 is carried out phase-modulation to each road light signal, each road light signal is made different delay process through time-delay structure 4 again, finally by the second coupling mechanism 5, is combined into a road.Described the first coupling mechanism 1 and the second coupling mechanism 5 are in series by a plurality of Y branch power splitters, or ，Wei 1*n road multiple-mode interfence instrument (MMI) power splitter silicon substrate structure, and wherein, the first coupling mechanism 1 is identical with the second coupling mechanism 5 structures, symmetrical placement.The all functions module of above programmable optical wave filter all completes on a silicon base chip, so compact conformation, low in energy consumption.In addition, this optical filter is realized based on finite impulse response principle, and the transmission spectrum obtaining has certain periodicity.The principle of the programmable optical filtering technique based on integrated silicon-based waveguide is as follows:
Because any periodic signal can be used Fourier expansion, thus in certain spectral range, can realize frequency spectrum arbitrarily by Fourier series sum, and the integrated silicon Wave guide system that the present invention proposes is exactly a kind of Fourier expansion form, its derivation is as follows:
If input light field is f
in(t), establishing its Fourier transform is F
in(ω).
The electric field intensity of supposing the output of n road is respectively E
out1, E
out2, E
out3e
outn, system is finally output as
If its Fourier transform is F
out(ω),
Ssystem transfer function H (ω) is:
α wherein
kbe the power modulation factor that in k bar light path, power modulation structure is introduced, value is between 0-1;
be that the phase place that in k bar light path, phase-modulation structure is introduced changes, value is between 0-2 π; T is the delay inequality facing mutually between two light paths.Form by final H (ω) can find out, this integrated silicon Wave guide system is output as Fourier series form.
From above-mentioned derivation, pending optical signals the first coupling mechanism 1 is divided into multichannel, through power adjustments structure 2 and phase-modulation structure 3, carry out the adjusting of power and phase place again, pass through again time-delay structure 4 different delayed time, just can realize Fourier series sum arbitrarily, thereby on frequency domain, realize programmable filter signal.
From above-mentioned derivation also, the Fourier expansion of power modulation factor and phase change amount and target spectrum has one-to-one relationship, and the phase term that in fact distribution of power modulation factor is multiplied by after phase-modulation is identical with the distribution of curve obtained after target spectrum Fourier transform.For spectrum mask very complicated in those frequency domain distribution, such as supposing to need the wave filter of a sinc shape, the Fourier transform of sinc shape frequency spectrum is rectangular function form, Yin=8 road light path is example, the output of 8 tunnel power modulation structures 2 should be set as to identical (power modulation factor should all be set as 1), and phase place output after 8 road phase-modulation structures 3 modulation also should be identical with the PHASE DISTRIBUTION of rectangular function, set thus the parameter (what choose due to power modulation factor is all 1, and corresponding phase place output should be identical) of phase-modulation structure 3.
In this specific embodiment, silicon waveguide upper silicon layer is 340nm, and etching 220nm forms ridge waveguide, and ridge waveguide width is 650nm, and its mode profile as shown in Figure 2.The 8 tunnel light paths of take are example, and the first coupling mechanism 1 can be realized with 3 grades of Y branched structures of series connection, and each Y branch realizes the effect that power is divided equally, and after 3 grades, input optical signal is by be divided into 8 parts of equalization.Y branch radius-of-curvature in the present invention is 20 μ m, and its 3 dimension schematic diagram as shown in Figure 3.
Wherein, power modulation structure and phase-modulation structure are realized by heat tune mode, and its principle can simplicity of explanation be that temperature variation causes that silicon waveguide effective refractive index changes, thereby causes phase place to change, and this just can realize phase-modulation.Particularly, described power modulation structure 3 is that electricity is adjusted or heat is adjusted Mach-Zehnder interferometer (MZI) structure, by changing voltage or temperature, can carry out decay in various degree by Dui Mei road light signal.Described phase-modulation structure 4 is that electricity is adjusted or heat is adjusted silica-based straight wave guide structure, by changing voltage or temperature, can introduce different phase places by Dui Mei road light signal.
Wherein, change the temperature of MZI mono-arm, another arm temperature remains unchanged, and two arms are because phase place is different, and after interfering, the power of output is just different, so just can realize power modulation.Silicon waveguide index varies with temperature relation and can be expressed as:
And light signal transmits in waveguide, phase place changes and the relation of waveguide index can be expressed as:
Wherein L is the light path of light signal process, and l is the physical length of light signal process, the wave vector that k is light signal.
For fixing waveguide length l, by (1), (2) known light signal, in waveguide, transmit phase place and change with the relation of temperature and can be expressed as:
In the present invention, 2, the 3 dimension schematic diagram of the MZI that heat is adjusted are respectively as Fig. 4 (a) with (b), and the radius-of-curvature of its curved waveguide is 20 μ m, and two brachiums are 300 μ m, wherein the heat of arm tune zone length is 240 μ m, and the relation of its output power and temperature variation is as Fig. 5 (a).Respectively as Fig. 4 (c) and (d), its waveguiding structure is constant for 2,3 dimension schematic diagram of hot phase modulation position modulated structure, and wherein hot tune zone length is 200 μ m, and the relation of its output phase change amount and temperature variation is as Fig. 5 (b).It should be noted that, heat adjusts region longer, and when uniform temp changes, variations in refractive index just greatly.If need minification, only need to improve heter temperature, just can reach same requirement.
2,3 dimension schematic diagram of time-delay structure 4 are (different delayed time amount realizes by a plurality of said structures of cascade) as shown in Figure 6, and wherein curved waveguide radius-of-curvature is still 20 μ m.When between every adjacent two light paths, the difference of amount of delay is 20ps, D segment length should be 432.5 μ m.
Realize silicon waveguide, generally need to pass through following several technological processes:
1. circular SOI wafer is divided into square little print, stock size is 2cm * 1.5cm;
2. clean print, generally use acetone, washed with de-ionized water;
3. even glue is coated with equably last layer photoresist on print;
4. according to the figure of design, photoresist is exposed;
5. print is developed, obtain photoresist mask;
6. inductively coupled plasma (ICP) etching obtains needed figure on silicon layer;
7. remove photoresist, spend glue and remove residual photoresist on print.
Push through above-mentioned 7 steps and just can obtain common silicon waveguide, but if realization heat is adjusted, need through following steps:
I, after ICP etching, is evenly coated with last layer BCB on print, and baking.The effect of this step is on silicon device, to form top covering, both silicon device and the heating wire that processing is got on afterwards can be separated, and can serve as heat-conducting layer again.
II, for obtaining electric heating metal electrode figure, need expose for the second time and develop print.This step is similar to the step in above-mentioned common waveguide fabrication, still comprises even glue, exposure, three steps of development.
The deposit of III electric heating metal, is attached on print electric heating metal.
IV liftoff, is about to the electric heating metal removal on photoresist and glue, forms electric heating metal electrode.
For intuitively embodying the process that the present invention realizes programmable filter, now provide 3 groups of standard filtered spectrum and this programmable filter output spectrum.Its result as shown in Figure 7,7(a wherein) be index zone pass filter frequency spectrum, 7(b) for programmable filter, press the output spectrum of gained after standard frequency spectrum (a) setup parameter.7(c) be standard triangle filtered spectrum, 7(d) for programmable filter, press the output spectrum of gained after standard frequency spectrum (c) setup parameter.7(e) be standard serrate filtered spectrum, 7(f) for programmable filter, press the output spectrum of gained after standard frequency spectrum (e) setup parameter.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (5)
1. the programmable optical wave filter based on integrated silicon waveguide, comprise a plurality of modules of joining successively: the first coupling mechanism (1), power modulation structure (2), phase-modulation structure (3), time-delay structure (4) and the second coupling mechanism (5), described a plurality of module all completes on a silicon base chip, wherein
The first coupling mechanism (1) is divided into uniform n road signal (4≤n≤16) by the light signal of input, power modulation structure (2) is carried out power modulation to each road signal, phase-modulation structure (3) is carried out phase-modulation to each road signal, time-delay structure (4) Dui Mei road signal is made different delayed time, finally by the second coupling mechanism (5), be combined into a road, described power modulation structure (2) adopts electricity to adjust or the meticulous control of hot tune mode with described phase-modulation structure (3), realizes programmable filter.
2. programmable optical wave filter according to claim 1, wherein, described the first coupling mechanism (1) and the second coupling mechanism (5) are a plurality of Y branch power splitters series connection Huo1*n road multiple-mode interfence instrument (MMI) power splitter silicon substrate structures.
3. programmable optical wave filter according to claim 1, wherein, described power modulation structure (2) is that electricity is adjusted or heat is adjusted MZI structure, by changing voltage or temperature Dui Mei road light signal, carries out decay in various degree.
4. programmable optical wave filter according to claim 1, wherein, described phase-modulation structure (3) is that electricity is adjusted or heat is adjusted silica-based straight wave guide structure, by changing voltage or temperature Dui Mei road light signal, introduces different phase places.
5. programmable optical wave filter according to claim 1, wherein, described time-delay structure (4) comprises n silica-based waveguides of different length, n road amount of delay is that arithmetic progression distributes, T, 2T, 3T ... nT.
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Cited By (6)
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| CN109471274A (en) * | 2018-09-11 | 2019-03-15 | 深圳大学 | All-optical, tunable filter and its application based on two-dimensional material |
| CN112147740A (en) * | 2020-10-22 | 2020-12-29 | 重庆邮电大学 | Multi-working-frequency-band programmable microwave photonic filter based on integrated silicon waveguide |
| CN112817891A (en) * | 2021-02-04 | 2021-05-18 | 联合微电子中心有限责任公司 | Programmable optical chip and terminal |
| CN113267911A (en) * | 2021-05-12 | 2021-08-17 | 华中科技大学 | Large-capacity photoelectric hybrid programmable logic operation chip |
| WO2021223715A1 (en) * | 2020-05-06 | 2021-11-11 | 中兴通讯股份有限公司 | Electro-optic modulator and system thereof |
| CN114609727A (en) * | 2020-12-08 | 2022-06-10 | 军事科学院系统工程研究院网络信息研究所 | Chip integrated programmable filtering method based on cascade filter |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109471274A (en) * | 2018-09-11 | 2019-03-15 | 深圳大学 | All-optical, tunable filter and its application based on two-dimensional material |
| WO2021223715A1 (en) * | 2020-05-06 | 2021-11-11 | 中兴通讯股份有限公司 | Electro-optic modulator and system thereof |
| CN112147740A (en) * | 2020-10-22 | 2020-12-29 | 重庆邮电大学 | Multi-working-frequency-band programmable microwave photonic filter based on integrated silicon waveguide |
| CN114609727A (en) * | 2020-12-08 | 2022-06-10 | 军事科学院系统工程研究院网络信息研究所 | Chip integrated programmable filtering method based on cascade filter |
| CN112817891A (en) * | 2021-02-04 | 2021-05-18 | 联合微电子中心有限责任公司 | Programmable optical chip and terminal |
| CN113267911A (en) * | 2021-05-12 | 2021-08-17 | 华中科技大学 | Large-capacity photoelectric hybrid programmable logic operation chip |
| CN113267911B (en) * | 2021-05-12 | 2022-05-27 | 华中科技大学 | Large-capacity photoelectric hybrid programmable logic operation chip |
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Application publication date: 20140212 |