CN103575812A - Test device for double-channel surface acoustic wave instrument - Google Patents
Test device for double-channel surface acoustic wave instrument Download PDFInfo
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- CN103575812A CN103575812A CN201310559984.2A CN201310559984A CN103575812A CN 103575812 A CN103575812 A CN 103575812A CN 201310559984 A CN201310559984 A CN 201310559984A CN 103575812 A CN103575812 A CN 103575812A
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 52
- 238000012360 testing method Methods 0.000 title claims abstract description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052802 copper Inorganic materials 0.000 claims abstract description 36
- 239000010949 copper Substances 0.000 claims abstract description 36
- 238000006243 chemical reaction Methods 0.000 claims abstract description 30
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims description 23
- 239000004809 Teflon Substances 0.000 claims description 16
- 229920006362 Teflon® Polymers 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 11
- 239000010425 asbestos Substances 0.000 claims description 7
- 229910052895 riebeckite Inorganic materials 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000000741 silica gel Substances 0.000 claims description 6
- 229910002027 silica gel Inorganic materials 0.000 claims description 6
- 238000012856 packing Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 abstract 6
- 230000006641 stabilisation Effects 0.000 abstract 5
- 238000011105 stabilization Methods 0.000 abstract 5
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- 238000009434 installation Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
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- 239000012530 fluid Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
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- 229910001369 Brass Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 2
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- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention discloses a test device for a double-channel surface acoustic wave instrument. The test device comprises a body, a frequency counter, a voltage stabilization power supply and a voltage signal acquirer, wherein an inwards sunken gas reaction cavity for containing the surface acoustic wave instrument as well as a gas inlet hole and a gas outlet hole which are communicated with the gas reaction cavity are formed above the body; an upper cover plate for sealing is arranged on the gas reaction cavity; two signal detection positions are arranged in the body; one of the signal detection positions is connected with the voltage stabilization power supply and the voltage signal acquirer, and the other signal detection position is connected with the frequency counter; each signal detection position comprises two coaxial cable connectors and two copper sleeves; the top ends of the copper sleeves are flush with the bottom surface of the gas reaction cavity; each copper sleeve is correspondingly connected with a coaxial cable connector; shielding cavities are formed at positions, which are provided with the copper sleeves and the coaxial cable connectors, in the body; one of the two coaxial cable connectors of the signal detection position connected with the voltage stabilization power supply and the voltage signal acquirer is connected with the voltage stabilization power supply, and the other coaxial cable connector of the signal detection position connected with the voltage stabilization power supply and the voltage signal acquirer is connected with the voltage signal acquirer.
Description
Technical field
The present invention relates to a kind of sensor detecting device, particularly a kind of double-channel SAW device testing apparatus.
Background technology
At present, sonic surface wave gas sensors is mainly by interdigital transducer, air-sensitive film, and piezoelectric substrate forms.During working sensor, main by the interdigital transducer in piezoelectric substrate, carry out by electricity to elastic wave again to electric energy conversion.When its energy during the stage, during surface acoustic wave process sensitive thin film, due to the absorption of sensitive thin film to gas, causes the Young modulus of film in elastic wave, volume, conductivity etc. change, thereby the resistance of elasticity wave frequency and device is changed.By frequency or resistance change are detected to the variation that can learn gas concentration.
The motivation needs high-frequency signal of sensor, and high-frequency signal very easily interferes with each other generation radio transmission effect, therefore to the test of SAW (Surface Acoustic Wave) device, need to have good ground connection and shielding.
Summary of the invention
Goal of the invention: technical matters to be solved by this invention is for the deficiencies in the prior art, provides a kind of double-channel SAW device testing apparatus.
In order to solve the problems of the technologies described above, the invention discloses a kind of double-channel SAW device testing apparatus, comprise body, frequency counter, stabilized voltage supply and voltage signal collector, body top is provided with the gas reaction chamber that holds SAW (Surface Acoustic Wave) device caving inward and air admission hole and the venthole being communicated with gas reaction chamber, and gas reaction chamber is provided with the upper cover plate for sealing; In body, be provided with two input positions, one of them input position connects stabilized voltage supply and voltage signal collector, another input position rate of connections counter;
An input position comprises two coaxial cable connectors and copper sleeve, the top of copper sleeve flushes with the bottom surface in gas reaction chamber, each copper sleeve is a coaxial cable connector of corresponding connection separately, and in body, the position of copper sleeve and coaxial cable connector is made as shielding cavity;
Two coaxial cable connectors that connect the input position of stabilized voltage supply and voltage signal collector, one connects stabilized voltage supply, and another connects voltage signal collector;
Two coaxial cable connectors of the input position of rate of connections counter are rate of connections counter simultaneously;
Described voltage signal collector is connected computing machine with frequency counter simultaneously.
In the present invention, the position of the corresponding SAW (Surface Acoustic Wave) device in the bottom surface in described gas reaction chamber is provided with groove, is provided with successively heat-conducting silica gel sheet in groove from top to bottom, micro-heating plate and asbestos, and wherein micro-heating plate is drawn body by wire and is connected a temperature controller.
In the present invention, described copper sleeve is nested with teflon cover outward.
In the present invention, between described upper cover plate and body, be provided with caulking gum packing ring.
In the present invention, described gas reaction is filled with teflon filling material in chamber.Teflon filling material rear and front end has the gas flow guiding groove that is communicated with air admission hole and venthole, teflon filling material upper surface also has two thermocouple probe patchholes and thermocouple probe lead placement groove, and thermocouple probe is drawn and is connected to voltage signal collector.
The present invention is for containing direct current signal and radiofrequency signal and being the SAW (Surface Acoustic Wave) device that finite concentration gas is tested, and this device can also meet device temperature heating testing requirement.
Proving installation of the present invention has twin-channel test function, each passage contains independently SAW (Surface Acoustic Wave) device, can adopt control variate method, records two kinds of responses of SAW (Surface Acoustic Wave) device simultaneously, and contrast, the data reference of an extensive can be provided experimental result.
Advantage of the present invention: 1, this acoustic surface wave gas proving installation has channel structure, can to the conductivity effect of the mass effect of SAW (Surface Acoustic Wave) device and device, measure contrast respectively.2, this clamp-replacing device is convenient and contact is reliable.3, the ingenious isolation that is applicable to short distance TO series leg signal completely of shielding cavity design.4, this fixture is comparatively compact small and exquisite portable.5, fixture air cavity is vacuumizing under state, can keep 5 hours air pressure constant, and sealing property is better.6, this fixture is except the more difficult dismounting of heating extension line, and all the other all adopt screw thread and nested connection, change dismounting all very convenient.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is done further and illustrated, above-mentioned and/or otherwise advantage of the present invention will become apparent.
Fig. 1 is general structure schematic diagram of the present invention.
Fig. 2 is proving installation cross-sectional schematic.
Fig. 3 is that proving installation is analysed and observe local enlarged diagram.
Fig. 4 is proving installation (not being with TO base) vertical view.
Fig. 5 is proving installation (band TO base) vertical view.
Embodiment
The present invention discloses a kind of double-channel SAW device testing apparatus, comprise body, frequency counter, stabilized voltage supply and voltage signal collector, body top is provided with the gas reaction chamber that holds SAW (Surface Acoustic Wave) device caving inward and air admission hole and the venthole being communicated with gas reaction chamber, and gas reaction chamber is provided with the upper cover plate for sealing; In body, be provided with two input positions, one of them input position connects stabilized voltage supply and voltage signal collector, another input position rate of connections counter; An input position comprises two coaxial cable connectors and copper sleeve, the top of copper sleeve flushes with the bottom surface in gas reaction chamber, each copper sleeve is a coaxial cable connector of corresponding connection separately, and in body, the position of copper sleeve and coaxial cable connector is made as shielding cavity; Two coaxial cable connectors that connect the input position of stabilized voltage supply and voltage signal collector, one connects stabilized voltage supply, and another connects voltage signal collector; Two coaxial cable connectors of the input position of rate of connections counter, simultaneously rate of connections counter; Described voltage signal collector is connected computing machine with frequency counter simultaneously.
The position of the corresponding SAW (Surface Acoustic Wave) device in the bottom surface in described gas reaction chamber is provided with groove, is provided with successively heat-conducting silica gel sheet in groove from top to bottom, micro-heating plate and asbestos, and wherein micro-heating plate is drawn body by wire and is connected a temperature controller.
Described copper sleeve is nested with teflon cover outward.
Between described upper cover plate and body, be provided with caulking gum packing ring.
Described gas reaction is filled with teflon filling material in chamber.The lower surface of filling material also has a concave surface, and this concave surface is in order to prevent that filling material is pressed onto SAW (Surface Acoustic Wave) device.
Air admission hole and venthole are that diameter is the gas passage orifices of 3mm.The upper cover plate of the sealing in gas reaction chamber can effectively intercept the extraneous electromagnetic interference (EMI) to inner SAW (Surface Acoustic Wave) device.Simultaneously also for importing into of gas provides an airtight passage with spreading out of.It is 6 blind holes that 1mm is corresponding with TO base pin that bottom surface, gas reaction chamber also has diameter.
Jig main body bottom has four high-frequency signal shielding cavities, mutually isolated and be cylindrical between them, can reduce the generation that contains pointed shape.Jig main body left and right also has two square plate coaxial cable connector inner core end through holes simultaneously, and this hole is identical with corresponding shielding cavity.Side's plate coaxial cable connector inner core end can insert this hole, and fastening side's plate coaxial cable connector four screws around can be fixed on square plate coaxial cable connector on jig main body.
In body, the shielding cavity of copper sleeve and coaxial cable connector is four, and in four shielding cavities, two is that one group of intercommunicating pore is two electrical signal paths, i.e. binary channels from left to right.Four teflon sleeves embed wherein, then four long copper sleeves are packed in teflon sleeve, and the bottom of long copper sleeve is connected with long slab coaxial cable connector inner core by soldering.Electric signal enters from square plate coaxial cable connector standard header, by long copper sleeve, conducts on device input pin, and the teflon cover being enclosed within on long copper sleeve can effectively insulate, and avoids on jig main body that electrical signal conduction makes to brass.
Embodiment
In particular, as Fig. 1, shown in 2,4, comprise body 13, frequency counter, stabilized voltage supply and voltage signal collector, body top is provided with the gas reaction chamber 6 that holds SAW (Surface Acoustic Wave) device and the air admission hole 11 being communicated with gas reaction chamber and the venthole 24 caving inward.Gas reaction chamber 6 is provided with the upper cover plate 1 for sealing, and caulking gum packing ring 2 is arranged on cover plate below.In body 13, be provided with two input positions, one of them input position connects stabilized voltage supply and voltage signal collector, another input position rate of connections counter.An input position comprises two coaxial cable connectors 7 and copper sleeve 19, the top of copper sleeve flushes with the bottom surface in gas reaction chamber, each copper sleeve is corresponding separately connects a coaxial cable connector, and the lower end that in body, copper sleeve 19 and the position contacting of coaxial cable connector 14 extend to body is made as the shielding cavity 15 of opening; Edge on body 13 is provided with the threaded hole that diameter is 2mm, and cover plate 1 and caulking gum packing ring 2 correspondence positions are provided with threaded hole, and three is bolted to connection.
As shown in Figure 1,3,5 long pins 18 that stretch out are arranged at TO series base 4 bottoms, and its pin closely embeds cooperation by 2 long copper pipe 19 endoporus 25 and 3 blind holes around 23 as shown in Figure 4.In a passage, electric signal is pressed order (as shown by the arrows in Figure 4) from left to right, through coaxial cable connector 7, and long copper sleeve 19, TO base pin 18, spun gold line 17, SAW (Surface Acoustic Wave) device 3, spun gold line 17, pin 18, long copper sleeve 19, coaxial cable connector 7.In TO base 4, two of transmission of signal pins 18 all will contacts closely with each self-corresponding long copper pipe cover 19 when mounted, outside long copper pipe cover 19, be provided with teflon and overlap 20, its can be used to completely cut off electric signal in transmitting procedure with the contacting of chuck body 13.
On 6 bottom surfaces, chuck body 13 gas reaction chamber, upper end, have the cuboid groove 22 of dark 4mm.Groove 22 bottoms and surrounding scribble one deck insulating gel, and first groove 22 bottoms place a slice asbestos 10, and it mainly plays partiting thermal insulation effect.Above asbestos 10, place micro-heating plate 9, sheet metal 9 terminals are connected to heating wires.Chuck body 13 tops, left side have a heating wires fairlead 21, and the wire that connects micro-heating plate 9 draws from this hole 21, and wire scribbles fluid sealant around, makes wire fairlead 21 in sealing state.On micro-heating plate 9, be also placed with one deck heat-conducting silica gel sheet 8, these silica gel piece 8 coefficient of heat conductivity reach 3W/MK, mainly play heat conductive insulating effect.
As Fig. 1 general structure schematic diagram can clearly be shown installation and the matching relationship of each parts.
The erection sequence of fixture is as follows: first pack teflon cover 20 into teflon trepanning 5, then copper sleeve 19 is packed into teflon cover 20.The inner core end 14 of four square plate coaxial cable connectors 7 is inserted respectively to shielding cavity intercommunicating pore 12, then use respectively the screw of M2 * 4 in addition fastening, the bottom of long copper sleeve 19 is connected with square plate coaxial cable connector inner core 14 with soldering 16 after fastening.Complete after above-mentioned steps, start to install heating part, at the inner last layer insulating gel that is coated with uniformly of square groove 22, first rectangle asbestos 10 are lain in to groove 22 bottoms according to grooved, heating wires the end of a thread is connected to micro-heating plate 9, the heating plate 9 that connects wire is lain against on asbestos 10, and the heating wires other end is connected to temperature controller through wire fairlead 21, and the contact place of wire fairlead 21 and wire coats fluid sealant and prevents gas leakage.On micro-heating plate 9, continue to place heat-conducting silica gel sheet 8 and compress, can play the effect of insulation and heat conduction.Next TO series base 4 is installed, 5 pin correspondences of base to blind hole 23 and the 19 endoporus insertions of long copper sleeve.Then rubber washer 2 is placed on to boss coboundary according to corresponding threaded hole, then covers cover plate 1.The air inlet/outlet 11 of air cavity 6 can be introduced gas and then from venthole 24, be drawn gas by iron conduit, the contact place of iron conduit and pore 11 and 24 coats fluid sealant and seals, then in air cavity 6, put into SAW (Surface Acoustic Wave) device, then teflon filling material correspondence and put into, gas can arrive device surface through filling material gas guiding groove after by air admission hole 11.At the filling material upper surface thermocouple probe insertion thermocouple probe that inserts in the hole, be used for sensitive detection parts 3 upper surface temperature, observe the temperature gap of device surface temperature and temperature controller setting value.Thermopair extension line wears to hole 21 along drawing wire casing, is connected on outside voltage acquisition card.
As shown in Figure 4, air cavity 6 bottoms have six blind holes 23, and the diameter of blind hole is that 1mm is identical with the leg diameter of TO base series, and the grounding pin of base directly embeds these six blind holes and directly contacts with chuck body 13, the brass of bulk can regard as " ", reach TO base good earth.
The main unique distinction of this device is binary channels, and a passage is surveyed the mass effect of device, and another passage is surveyed the conductivity effect of device.SAW (Surface Acoustic Wave) device experiment is nothing but two large basic branches, and one is mass effect, and one is conductivity effect.Therefore on this grip device, passage one is built to oscillatory circuit figure, first add after SAW (Surface Acoustic Wave) device, energising allows whole circuit starting of oscillation, by frequency counter, carry out the frequency in writing circuit, after ventilation, the frequency of device can change, and then by the programming of Labview configuration software, data recording is got off.The electric loop that passage two is built as shown in Figure 1, input end at direct current signal is connected to the stabilized voltage supply with transformer, provide stable voltage to supply with, the integrated data collector that has Aglient at receiving end, data acquisition unit comprises data collecting card and follow-up signal modulate circuit, and the software that the increased resistance value that data acquisition unit collection comes carries by Aglient records and processes.The SAW (Surface Acoustic Wave) device of two passages is all with same material, and specification is made, and is placed on TO base.By the measurement to two passages simultaneously, can observe device is how two kinds of effect change occur in gas.
Claims (5)
1. a double-channel SAW device testing apparatus, it is characterized in that, comprise body, frequency counter, stabilized voltage supply and voltage signal collector, body top is provided with the gas reaction chamber that holds SAW (Surface Acoustic Wave) device caving inward and air admission hole and the venthole being communicated with gas reaction chamber, and gas reaction chamber is provided with the upper cover plate for sealing; In body, be provided with two input positions, one of them input position connects stabilized voltage supply and voltage signal collector, another input position rate of connections counter;
An input position comprises two coaxial cable connectors and copper sleeve, the top of copper sleeve flushes with the bottom surface in gas reaction chamber, each copper sleeve is a coaxial cable connector of corresponding connection separately, and in body, the position of copper sleeve and coaxial cable connector is made as shielding cavity;
Two coaxial cable connectors that connect the input position of stabilized voltage supply and voltage signal collector, one connects stabilized voltage supply, and another connects voltage signal collector;
Two coaxial cable connectors of the input position of rate of connections counter are rate of connections counter simultaneously;
Described voltage signal collector is connected computing machine with frequency counter simultaneously.
2. a kind of double-channel SAW device testing apparatus according to claim 1, it is characterized in that, the position of the corresponding SAW (Surface Acoustic Wave) device in bottom surface in described gas reaction chamber is provided with groove, in groove, be provided with successively heat-conducting silica gel sheet from top to bottom, micro-heating plate and asbestos, wherein micro-heating plate is drawn body by wire and is connected a temperature controller.
3. a kind of double-channel SAW device testing apparatus according to claim 1, is characterized in that, described copper sleeve is nested with teflon cover outward.
4. a kind of double-channel SAW device testing apparatus according to claim 1, is characterized in that, is provided with caulking gum packing ring between described upper cover plate and body.
5. a kind of double-channel SAW device testing apparatus according to claim 1, is characterized in that, described gas reaction is filled with teflon filling material in chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310559984.2A CN103575812A (en) | 2013-11-12 | 2013-11-12 | Test device for double-channel surface acoustic wave instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310559984.2A CN103575812A (en) | 2013-11-12 | 2013-11-12 | Test device for double-channel surface acoustic wave instrument |
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| CN103575812A true CN103575812A (en) | 2014-02-12 |
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| CN201310559984.2A Pending CN103575812A (en) | 2013-11-12 | 2013-11-12 | Test device for double-channel surface acoustic wave instrument |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455403A (en) * | 2019-08-19 | 2019-11-15 | 哈尔滨工业大学 | A kind of frequency characteristic of SAW device continuously adjusts detection method and its detection system and generator |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2674451Y (en) * | 2003-09-16 | 2005-01-26 | 中国科学院声学研究所 | Gas sensor measurer |
| CN101135670A (en) * | 2007-10-12 | 2008-03-05 | 电子科技大学 | Two-channel sonic surface wave gas sensors having humidity compensate function |
| US20080216558A1 (en) * | 2007-03-08 | 2008-09-11 | Honeywell International | Saw based CO2 sensors using carbon nanotubes as the sensitive layer |
| CN102636564A (en) * | 2012-04-25 | 2012-08-15 | 电子科技大学 | Surface acoustic wave gas sensor array integrated with heater and preparation method thereof |
-
2013
- 2013-11-12 CN CN201310559984.2A patent/CN103575812A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2674451Y (en) * | 2003-09-16 | 2005-01-26 | 中国科学院声学研究所 | Gas sensor measurer |
| US20080216558A1 (en) * | 2007-03-08 | 2008-09-11 | Honeywell International | Saw based CO2 sensors using carbon nanotubes as the sensitive layer |
| CN101135670A (en) * | 2007-10-12 | 2008-03-05 | 电子科技大学 | Two-channel sonic surface wave gas sensors having humidity compensate function |
| CN102636564A (en) * | 2012-04-25 | 2012-08-15 | 电子科技大学 | Surface acoustic wave gas sensor array integrated with heater and preparation method thereof |
Non-Patent Citations (1)
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| 李川: "《声表面波气体传感器阵列信号采集电路设计》", 《中国优秀硕士学位论文全文数据库信息科技辑（2013年第07期）》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455403A (en) * | 2019-08-19 | 2019-11-15 | 哈尔滨工业大学 | A kind of frequency characteristic of SAW device continuously adjusts detection method and its detection system and generator |
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Application publication date: 20140212 |