CN103575220A - Miniaturization single-optical-grating interference measurement system and method based on optical fiber coupler - Google Patents
Miniaturization single-optical-grating interference measurement system and method based on optical fiber coupler Download PDFInfo
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Abstract
Provided are a miniaturization single-optical-grating interference measurement system and method based on an optical fiber coupler. The system comprises a laser device, an optical grating for generating diffraction, the optical fiber coupler and a photoelectric detector. Light output by the laser device is transmitted through optical fibers and is emitted into the optical grating to form diffraction light in various levels; a group of diffraction light in the symmetrical level is subjected to coupling and then enters the optical fiber coupler; after the diffraction light is subjected to intervening in the optical fiber coupler, light interference field signals are output through the optical fiber coupler, the photoelectric detector which records the output light signals is arranged at the output end of the optical fiber coupler, and after a follow-up circuit processes the received signals, the displacement of the optical grating in a certain direction is obtained. The measurement method is carried out based on the measurement system. The measurement system and method have the advantages that miniaturization, integration, large measurement range, high accuracy and the like are achieved.
Description
Technical field
The present invention is mainly concerned with surveying instrument apparatus field, refers in particular to a kind of miniaturization monochromatic light grid interferometer measuration system and measuring method based on fiber coupler.
Background technology
Nano measurement is the gordian technique of advanced manufacturing industry development, is also guide and the basis in whole nanosecond science and technology field.Along with the development of ultraprecise processing and ultra tiny process technology, stroke reaches 100 millimeters of magnitudes, Motion Resolution rate reaches nano level ultraprecise and ultra tiny process equipment, and the means of testing of wide range, nano high-precision has been proposed to active demand.In numerous nano measurement instruments, grating measuring apparatus utensil has that measurement range is large, Measurement Resolution high.And fibre optic interferometer due to little, lightweight, the anti-electromagnetic interference (EMI) of volume, can wavelength-division multiplex, the advantage such as highly integrated and cheap is widely used in precision measurement field, the parameters such as displacement, vibration, speed, acceleration, strain and temperature are measured.
Grating measuring instrument by pitch the absolute type in the cycle measure and the increment type measurement outside the cycle combines, measuring basis is the pitch of grating rather than the wavelength of light wave.Measuring accuracy depends primarily on the precision of scribing of grating, and the impact that changed by lambda1-wavelength is relatively little.At present, although grating measuring instrument can obtain higher Measurement Resolution, its measuring accuracy has been subject to more multifactorial restriction, not yet reaches due nano-scale.First, it is all that two bundle diffraction lights are interfered in air through certain light path system that traditional grating interference is measured, and comparatively complexity, staff debug difficulty relatively to light channel structure on the one hand; There is variation along with the slowly small relative structure of skew, light path can occur for the variation of time in light path system on the other hand, affects measurement result.Secondly, along with the factors such as aging, the beam deflection that atmospheric turbulence causes of laser instrument and wave deformation, extraneous vibration all likely cause the fluctuation of light intensity.Especially for traditional interferometry, interference field is under common atmospheric environment, and the measuring error that air turbulence, atmospheric turbulence cause is particularly outstanding.And in the optical fibre interference system of existing measurement displacement, in order to improve measuring accuracy, the random variation of the phase place that need to cause environmental interference compensates.Utilize the method for common path interference to suppress the impact of environmental interference on measuring system, but it is very little to measure range.
Therefore,, although existing grating measuring instrument can access nano level Measurement Resolution, measuring accuracy not yet reaches nano-scale; And traditional grating interference measuring system is combined not tight with optical fibre interference at present.
Summary of the invention
The technical problem to be solved in the present invention is just: the technical matters existing for prior art, the invention provides a kind of miniaturization, integrated, wide range, high-precision miniaturization monochromatic light grid interferometer measuration system and measuring method based on fiber coupler.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A miniaturization monochromatic light grid interferometer measuration system for fiber coupler, comprises laser instrument, the grating for generation of diffraction, fiber coupler and photodetector, and the light of described laser instrument output is through Optical Fiber Transmission and incide and on grating, form diffraction lights at different levels; The diffraction light of one group of order of symmetry time is by the laggard fiber coupler that enters that is coupled; This group diffraction light interferes by fiber coupler output interference of light field signal in fiber coupler, at fiber coupler output terminal, be provided with the photodetector that records output optical signal, and after processing to received signal, obtain grating at the displacement of a direction.
Further improvement as measuring system of the present invention:
Described grating, fiber coupler and photodetector are enclosed in a miniaturization measurement module, and the output signal of described photodetector is drawn by measurement module through wire, and the light of described laser instrument output is in Optical Fiber Transmission enters miniaturization measurement module.
Described laser instrument enters in miniaturization measurement module and vertical incidence grating after coupling fiber, forms at different levels times symmetrical diffraction lights in incident light both sides.
Two input ends of described fiber coupler are arranged in the diffraction light light path between grating and coupling mechanism, and two input ends of described fiber coupler are symmetrical placement along the both sides of input path, and the diffraction light that one group of order of symmetry is inferior is coupled into fiber coupler.
Described fiber coupler is excellent is 2 * 1,2 * 2,2 * 3 or 3 * 3 coupling mechanisms.
Described fiber coupler operation wavelength should be consistent with laser instrument output light wavelength, and coupling ratio is even.
Described grating is excellent is reflection grating or transmission grating.
Described grating is the quartz of low thermal coefficient of expansion or the grating that zero expansion glass material is made.
The present invention further provides a kind of measuring method based on above-mentioned measuring system, the steps include: that a shilling optically-coupled for laser instrument output enters optical fiber, and impinged perpendicularly on grating by Optical Fiber Transmission; Describedly through optical grating diffraction, form diffraction lights at different levels time, by wherein ± n order diffraction light is coupled into respectively two input ends of fiber coupler, two bundle diffraction lights are coupled into fiber coupler and interfere in fiber coupler through input end condenser lenses; From M output terminal output M road optical interference signals of fiber coupler, wherein M is 2 or 3; With N photodetector, light signal is received, the signal receiving is drawn to sealing measurement module and processed through wire, wherein N≤M; When grating is subjected to displacement, can cause that N road detector receives signal and changes, make described optical path produce the N road signal of phase phasic difference particular degree, there is corresponding relation in periodicity and the displacement of signal, the variation of parameter to be measured is converted to the motion of described grating; N road is received to signal and gather and distinguish the variation of recording light interference signal simultaneously, finally with digit phase mensuration, carry out again the electronic fine-grained of high multiple, get final product the displacement of precise measuring grid.
Compared with prior art, the invention has the advantages that:
1, the present invention is first by grating in kind, both combinations of fiber coupler, structure interferometer measuration system, not only utilized the feature that grating measuring benchmark in kind is reliable, drift is little, combined that fiber coupler is simple in structure simultaneously, stable performance, debug feature easily.
2, the present invention is by grating, fiber coupler, and photodetector etc. are all positioned in the miniaturization measurement module of a sealing, and light source is coupled into optical fiber and enters module by optical fiber, and the output electrical signals of photodetector is drawn from measurement module by wire.Whole system is all arranged in a small-sized measurement module except light source and checking system for PCB, has realized test macro miniaturization, integrated feature.
3, the present invention adopts the laser instrument of power stability, and diffraction light is coupled into optical fiber, in fiber coupler, interfere, compare with common grating interference measuring method that fiber coupler is simple in structure, optical path adjusting is convenient, antijamming capability is strong, and because interference field is in fiber coupler, compare with common grating interference measurement, the measuring error that air turbulence, atmospheric turbulence cause can all be eliminated;
4, the present invention adopts grating physical form that measuring basis is provided, and when adopting the quartz of low thermal coefficient of expansion, (its thermal expansivity is less than 6 * 10
-7/ ℃) or the glass of zero thermal expansion coefficient etc. while making grating, its measuring basis is reliable and stable, zero point drift is minimum, and can reduce the impact of temperature on measuring accuracy, improves the adaptive faculty of measuring system to environment.
5, senior diffraction light of symmetry that the present invention adopts optical grating diffraction to produce (such as ± 3 grades, ± 5 grades) form interference fringe, by design asymmetrical diffraction light path, produce double Doppler shift amount, under equal conditions make theoretical resolution be doubled, obtain the optical fine of high multiple, produce the stripe signal of micron or submicron order;
6, the present invention adopts based on arc tangent conversion San road signal high precision divided method and DSP Digital Signal Processing and combines, utilize the signal high power segmentation of arc tangent conversion, the methods such as two-way phase demodulation, the Measurement accuracy of interference signal wide range phase information and the segmentation of the high power of decimal phase place have been realized, effectively the resolution of grating measuring is brought up to nanometer scale, and then the nano-precision of realizing 100 millimeters of order magnitude range is measured, and (it is electronic fine-grained that employing digit phase measuring method obtains high multiple, can effectively the resolution of grating measuring be brought up to nanometer scale, and the nano-precision of realizing 100 millimeters of order magnitude range is measured).
In sum, the present invention utilizes fiber coupler and laser configuration miniaturization, integrated, wide range, high-precision monochromatic light grid homodyne interference offset measuring system, antijamming capability and the stability of optical grating measuring system have been strengthened, improved its adaptive faculty to external environment condition, can realize the nano-precision of 100 millimeters of order magnitude range and measure, can meet the related wide range nanometer measurement positioning requirements in field such as micro photo-electro-mechanical, integrated circuit (IC) chip manufacture, ultraprecise processing, ultra tiny processing, bioengineering, Aero-Space and new material.The present invention has formed the nano measurement philosophy and technique prototype of new wide range, strong interference immunity, its range depends primarily on the length of adopted grating, the independent development ability that has greatly improved China's low to medium price level nanometer measurement instrument, has important practical significance to the development of further promotion advanced manufacturing technology.
Accompanying drawing explanation
Fig. 1 is the present invention at concrete Application Example 1(based on 3 * 3 fiber couplers) in structural principle schematic diagram.
Fig. 2 is the present invention at concrete Application Example 2(based on 3 * 3 fiber couplers) in structural principle schematic diagram.
Fig. 3 is the present invention at concrete Application Example 3(based on 2 * 2 fiber couplers) in structural principle schematic diagram.
Fig. 4 is the present invention at concrete Application Example 4(based on 2 * 2 fiber couplers) in structural principle schematic diagram.
Fig. 5 is the schematic flow sheet of the inventive method.
Marginal data:
1, laser instrument; 21, reflection grating; 22, transmission grating; 3, first input end; 4, the second input end; 5, the first output terminal; 6, the second output terminal; 7, the 3rd output terminal; 8, the first photodetector; 9, the second photodetector; 10, the 3rd photodetector; 11, fiber coupler; 12, single-mode fiber; 13, miniaturization measurement module.
Embodiment
Below with reference to Figure of description and specific embodiment, the present invention is described in further details.
A kind of miniaturization monochromatic light grid interferometer measuration system based on fiber coupler of the present invention, comprise laser instrument 1, the grating for generation of diffraction, photodetector and fiber coupler 11, the light of laser instrument 1 output is through Optical Fiber Transmission and incide and on grating, form diffraction lights at different levels, on optical diffraction, the diffraction light of one group of order of symmetry time is by the laggard fiber coupler 11 that enters that is coupled; Diffraction light interferes by fiber coupler 11 output interference of light field signals in fiber coupler 11, at the output light path of fiber coupler 11 output terminals by photodetectors register output optical signal.
In concrete application example, when grating is static, the symmetrical two-stage diffraction light being produced by optical grating diffraction, enters fiber coupler 11 and forms interference field, and it is static that the interference field signal of output keeps; When grating moves, symmetrical two-stage diffraction light, by producing equal and opposite in direction, Doppler shift amount that symbol is contrary, makes optical path produce some roads signal of phase phasic difference particular degree.Finally, by photodetector, received the interference field signal of optical path, and after processing to received signal, can precise measuring grid at the displacement of a direction.
Further, grating, fiber coupler 11 and photodetector are enclosed in a miniaturization measurement module 13, the output signal of photodetector is drawn by measurement module through wire, and the light of laser instrument 1 output is in Optical Fiber Transmission enters miniaturization measurement module 13.
Further, laser instrument 1 also can enter in miniaturization measurement module 13 after coupling fiber, and vertical incidence grating.
Further, after the light vertical incidence grating of laser instrument 1 output, in incident light both sides, form at different levels times symmetrical diffraction lights.
Further, two of fiber coupler 11 input end condenser lenses are arranged on the optical diffraction between grating and fiber coupler 11.Two input ends of fiber coupler 11 are symmetrical placement along the both sides of input path, after optical grating diffraction, produce at different levels times symmetrical diffraction lights, by the laggard fiber coupler 11 that enters that is coupled, the interference of light of ± n order diffraction occurs in fiber coupler 11 respectively.
Further, the fiber coupler in the present invention 11 is excellent is 2 * 1,2 * 2,2 * 3 or 3 * 3 coupling mechanisms; The operation wavelength of fiber coupler 11 should be consistent with laser instrument 1 output wavelength, and coupling ratio is even.
Further, the grating in the present invention is preferably reflection grating 21 or transmission grating 22.In above-mentioned grating interference measuring system, grating is preferably the quartz of low thermal coefficient of expansion or the grating that zero expansion glass material is made, can guarantee better that like this measuring basis is reliable and stable, zero point drift is minimum, and can reduce the impact of temperature on measuring accuracy, improve the adaptive faculty of interferometric method of the present invention to environment.
Concrete application example 1: as shown in Figure 1, measuring system of the present invention comprises laser instrument 1, reflection grating 21 and the fiber coupler 11 interfering for two bundle diffraction lights, and wherein reflection grating 21, fiber coupler 11, the first photodetector 8, the second photodetector 9, the 3rd photodetector 10 are all positioned at miniaturization measurement module 13.The light of laser instrument 1 output is through being coupled into single-mode fiber 12, and enters miniaturization measurement module 13 by single-mode fiber 12 transmission, impinges perpendicularly in reflection grating 21.Through reflection grating 21 diffraction, form the diffraction light of at different levels times, by wherein ± n order diffraction light line focus Lens Coupling respectively enters first input end 3 and the second input end 4, two bundle diffraction lights enter fiber coupler 11 through two input ends are laggard, and interfere in fiber coupler 11.Then from the first output terminal 5, the second output terminal 6, the 3rd output terminal 7 of fiber coupler 11, export the optical interference signals of approximately 120 ° of three tunnel phase phasic differences, output terminal lens collimate and expand, by the first photodetector 8, the second photodetector 9, the 3rd photodetector 10 variation of recording light interference signal respectively.The electric signal that photodetector produces is drawn through miniaturization measurement module 13 by three wires.When reflection grating 21 is subjected to displacement in x direction, can cause that No. three detectors receive signal and change, by Dui San road, receive signal and process, can accurately measure reflection grating 21 at the displacement of x direction.
Concrete application example 2: as shown in Figure 2, this measuring system comprises laser instrument 1, transmission grating 22 and the fiber coupler 11 interfering for two bundle diffraction lights, and wherein transmission grating 22, fiber coupler 11, the first photodetector 8, the second photodetector 9, the 3rd photodetector 10 are all positioned at miniaturization measurement module 13.The light of laser instrument 1 output is through being coupled into single-mode fiber 12, and enters miniaturization measurement module 13 by single-mode fiber 12 transmission, impinges perpendicularly on transmission grating 22.Through transmission grating 22 diffraction, form the diffraction light of at different levels times, by wherein ± n order diffraction light line focus Lens Coupling respectively enters first input end 3 and the second input end 4, two bundle diffraction lights enter fiber coupler 11 through two input ends, and interfere in fiber coupler 11.Then from the first output terminal 5, the second output terminal 6, the 3rd output terminal 7 of fiber coupler 11, export the optical interference signals of approximately 120 ° of three tunnel phase phasic differences, output terminal lens collimate and expand, by the first photodetector 8, the second photodetector 9, the 3rd photodetector 10 variation of recording light interference signal respectively.The electric signal that photodetector produces is drawn through miniaturization measurement module 13 by three wires.When transmission grating 22 is subjected to displacement in x direction, can cause that No. three detectors receive signal and change, by Dui San road, receive signal and process, can accurately measure transmission grating 22 at the displacement of x direction.
Concrete application example 3: as shown in Figure 3, measuring system of the present invention comprises laser instrument 1, reflection grating 21 and the fiber coupler 11 interfering for two bundle diffraction lights, and wherein reflection grating 21, fiber coupler 11, the first photodetector 8, the second photodetector 9, the 3rd photodetector 10 are all positioned at miniaturization measurement module 13.The light of laser instrument 1 output is through being coupled into single-mode fiber 12, and enters miniaturization measurement module 13 by single-mode fiber 12 transmission, impinges perpendicularly in reflection grating 21.Through reflection grating 21 diffraction, form the diffraction light of at different levels times, by wherein ± n order diffraction light line focus Lens Coupling respectively enters first input end 3 and the second input end 4, two bundle diffraction lights enter fiber coupler 11 through two input ends, and interfere in fiber coupler 11.Then from the first output terminal 5 of fiber coupler 11, the optical interference signals of the 3rd output terminal 7 output two-way phase places different (90 ° or 180 °), output terminal lens collimate and expand, by the first photodetector 8, the 3rd photodetector 10 variation of recording light interference signal respectively.The electric signal that photodetector produces is drawn through miniaturization measurement module 13 by three wires.When reflection grating 21 is subjected to displacement in x direction, can cause that two-way detector receives signal and changes, by being received to signal, processes two-way, can accurately measure reflection grating 21 at the displacement of x direction.
Concrete application example 4: as shown in Figure 4, this measuring system comprises laser instrument 1, transmission grating 22 and the fiber coupler 11 interfering for two bundle diffraction lights, and wherein transmission grating 22, fiber coupler 11, the first photodetector 8, the second photodetector 9, the 3rd photodetector 10 are all positioned at miniaturization measurement module 13.The light of laser instrument 1 output is through being coupled into single-mode fiber 12, and enters miniaturization measurement module 13 by single-mode fiber 12 transmission, impinges perpendicularly on transmission grating 22.Through transmission grating 22 diffraction, form the diffraction light of at different levels times, by wherein ± n order diffraction light line focus Lens Coupling respectively enters first input end 3 and the second input end 4, two bundle diffraction lights enter fiber coupler 11 through two input ends, and interfere in fiber coupler 11.Then from the first output terminal 5 of fiber coupler 11, the optical interference signals of the 3rd output terminal 7 output two-way phase places different (90 ° or 180 °), output terminal lens collimate and expand, by the first photodetector 8, the 3rd photodetector 10 variation of recording light interference signal respectively, the electric signal that photodetector produces is drawn through miniaturization measurement module 13 by three wires.When transmission grating 22 is subjected to displacement in x direction, can cause that two-way detector receives signal and changes, by being received to signal, processes two-way, can accurately measure reflection grating 21 at the displacement of x direction.
As shown in Figure 5, based on above-mentioned measuring system, the present invention further provides a kind of monochromatic light grid homodyne interference displacement measuring method based on fiber coupler, concrete steps are:
The optically-coupled of Schilling laser instrument 1 output enters optical fiber, and is entered in miniaturization measurement module 13 and impinged perpendicularly on grating by Optical Fiber Transmission.Through optical grating diffraction, form the diffraction light of at different levels times, time diffraction light of one group of order of symmetry wherein (± 3 grades, ± 5 grades etc.) line focus Lens Coupling is respectively entered to two input ends of fiber coupler 11, two bundle diffraction lights enter fiber coupler 11 through input end, and interfere in fiber coupler 11.From the M(M of fiber coupler 11, be then 2 or 3) individual output terminal output M road optical interference signals, with N(N≤M) individual photodetector receives light signal, and the signal receiving is drawn to sealing measurement module and processed by follow-up electronic system through wire.
When grating is subjected to displacement, can cause that N road detector receives signal and changes, make described optical path produce the N road signal of phase phasic difference particular degree, there is corresponding relation in periodicity and the displacement of signal, has realized the motion that the variation of parameter to be measured is converted to described grating.N road is received to signal and gather and distinguish the variation of recording light interference signal simultaneously, finally with digit phase mensuration, carry out again the electronic fine-grained of high multiple, get final product the displacement of precise measuring grid.
In above-mentioned grating interference measuring method, grating is preferably the quartz of low thermal coefficient of expansion or the grating that zero expansion glass material is made, can guarantee better that like this measuring basis is reliable and stable, zero point drift is minimum, and can reduce the impact of temperature on measuring accuracy, improve the adaptive faculty of interferometric method of the present invention to environment.
Below be only the preferred embodiment of the present invention, protection scope of the present invention is also not only confined to above-described embodiment, and all technical schemes belonging under thinking of the present invention all belong to protection scope of the present invention.It should be pointed out that for those skilled in the art, some improvements and modifications without departing from the principles of the present invention, should be considered as protection scope of the present invention.
Claims (9)
1. the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler, it is characterized in that, comprise laser instrument, the grating for generation of diffraction, fiber coupler and photodetector, the light of described laser instrument output is through Optical Fiber Transmission and incide and on grating, form diffraction lights at different levels; The diffraction light of one group of order of symmetry time is by the laggard fiber coupler that enters that is coupled; This group diffraction light interferes by fiber coupler output interference of light field signal in fiber coupler, at fiber coupler output terminal, be provided with the photodetector that records output optical signal, and after processing to received signal, obtain grating at the displacement of a direction.
2. the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler according to claim 1, it is characterized in that, described grating, fiber coupler and photodetector are enclosed in a miniaturization measurement module, the output signal of described photodetector is drawn by measurement module through wire, and the light of described laser instrument output is in Optical Fiber Transmission enters miniaturization measurement module.
3. the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler according to claim 2, it is characterized in that, described laser instrument enters in miniaturization measurement module and vertical incidence grating after coupling fiber, forms at different levels times symmetrical diffraction lights in incident light both sides.
4. according to the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler described in claim 1 or 2 or 3, it is characterized in that, two input ends of described fiber coupler are arranged on the optical diffraction between grating and coupling mechanism, two input ends of described fiber coupler are symmetrical placement along the both sides of input path, and the diffraction light that one group of order of symmetry is inferior is coupled into fiber coupler.
5. according to the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler described in claim 1 or 2 or 3, it is characterized in that, described fiber coupler is 2 * 1,2 * 2,2 * 3 or 3 * 3 coupling mechanisms.
6. the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler according to claim 5, is characterized in that, described fiber coupler operation wavelength should be consistent with laser instrument output light wavelength, and coupling ratio is even.
7. according to the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler described in claim 1 or 2 or 3, it is characterized in that, described grating is excellent is reflection grating or transmission grating.
8. the miniaturization monochromatic light grid interferometer measuration system based on fiber coupler according to claim 7, is characterized in that, the grating that the quartz that described grating is low thermal coefficient of expansion or zero expansion glass material are made.
9. the measuring method based on any one measuring system in the claims 1～8, is characterized in that, step is: the optically-coupled of shilling laser instrument output enters optical fiber, and is impinged perpendicularly on grating by Optical Fiber Transmission; Describedly through optical grating diffraction, form diffraction lights at different levels time, by wherein ± n order diffraction light is coupled into respectively two input ends of fiber coupler, two bundle diffraction lights are coupled into fiber coupler and interfere in fiber coupler through input end condenser lenses; From M output terminal output M road optical interference signals of fiber coupler, wherein M is 2 or 3; With N photodetector, light signal is received, the signal receiving is drawn to sealing measurement module and processed through wire, wherein N≤M; When grating is subjected to displacement, can cause that N road detector receives signal and changes, make described optical path produce the N road signal of phase phasic difference particular degree, there is corresponding relation in periodicity and the displacement of signal, the variation of parameter to be measured is converted to the motion of described grating; N road is received to signal and gather and distinguish the variation of recording light interference signal simultaneously, finally with digit phase mensuration, carry out again the electronic fine-grained of high multiple, get final product the displacement of precise measuring grid.
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