CN103567634A - Method of producing strain sensor by utilizing laser micro-melting technology - Google Patents
Method of producing strain sensor by utilizing laser micro-melting technology Download PDFInfo
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- CN103567634A CN103567634A CN201210280988.2A CN201210280988A CN103567634A CN 103567634 A CN103567634 A CN 103567634A CN 201210280988 A CN201210280988 A CN 201210280988A CN 103567634 A CN103567634 A CN 103567634A
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- micro
- laser
- elastomer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/005—Soldering by means of radiant energy
- B23K1/0056—Soldering by means of radiant energy soldering by means of beams, e.g. lasers, E.B.
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention is suitable for the field of production technologies of strain sensors, and provides a method of producing a strain sensor by utilizing a direct writing-laser micro-melting technology. The method comprises the following steps of (1) drawing the shape of a strain gauge and a position pattern on an elastomer on a computer by utilizing a drawing function; (2) directly writing the drawn pattern on the elastomer of the sensor by a micro-pen provided with a slurry solder (glass powder or the other material) or a micro-spray device; (3) drying the slurry solder in an on-line manner; (4) placing the semiconductor strain gauge on the slurry solder; and (5) heating the slurry welder along a movement locus of the micro-pen by the laser, and fixing the strain gauge on the elastomer after cooling. In comparison with the prior art, the method has the advantages of less procedure, small heat affected zone, good product performance and high reliability, and capability of forming an automatic production line, greatly improving the efficiency, saving energy, decreasing emission of chemical substances and reducing the production cost.
Description
Technical field
The invention belongs to strain gauge transducer manufacturing technology field, in particular, the present invention relates to a kind of method of using directly the micro-molten technology of write-laser to manufacture strain gauge transducer.
Background technology
Strain gauge transducer is the principle based on such: when power or pressure-acting are on elastomer, foil gauge can the transformation for strain on elastomer be the signal of telecommunication accurate transfer out.For the elastomeric strain of Measurement accuracy, normally foil gauge is fixed on elastomer with glue.Traditional way is, with screen printing technique, slurry scolder is imprinted on elastomer, and semiconductor gauge is pasted on scolder, then elastomer together put into stove high temperature sintering together with sensor base.Because this technique need to be prepared masterplate in advance, step is many, cycle is long, for revising design, often needs again to process masterplate, does not therefore more and more meet the demand of electronic product fast development, after elastomer high temperature burning is black, also need surface treatment, the manual operation of workman is more, is not easy to automated production, causes the production cycle long, homogeneity of product is poor, and production cost increases.
Summary of the invention
The technical problem that the present invention solves is: a kind of method of using directly the micro-molten technology of write-laser to manufacture strain gauge transducer is provided, does not need to prepare masterplate, without high temperature sintering in stove, solve the technical problem of above-mentioned existence.
The technical solution used in the present invention: utilize micro-straight writing technology that slurry scolder is preset on elastic matrix by graphics track, after low temperature drying, foil gauge is placed on slurry scolder, laser heats slurry scolder along micro-movement locus, select laser micro-molten as micro-straight subsequent technique of writing, do not need whole sample to put high temperature sintering in stove, only at foil gauge regional area sintering slurry scolder.
Compared with prior art, its beneficial effect is manufacture method of the present invention, adopts the micro-spray of micro-pen directly to write technique, reduced plate-making process; Use local laser sintering, reduced the subsequent treatment operation after workpiece blackout; Save the energy, reduce poisonous and harmful substance discharge, be conducive to environmental protection; Local heat, heat affected area is little, needn't be incubated for a long time and programmed cooling, eliminates thermal stress, shortens process time; On Digit Control Machine Tool, realize and directly writing with laser sintered by setup program, be convenient to form automatic production line and produce in enormous quantities, increase work efficiency, reduce costs.
Accompanying drawing explanation
Fig. 1 illustrate that the embodiment of the present invention provides pedestal and elastomer.(seeing Fig. 1)
Fig. 2 illustrates the distribution of four arm resistances of the present invention on flexible sheet.(seeing Fig. 2)
Fig. 3 illustrates the distribution of half-bridge foil gauge of the present invention on flexible sheet.(seeing Fig. 3)
Fig. 4 illustrates the micro-molten schematic diagram of directly write-laser of the present invention.(seeing Fig. 4)
The specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.Should be appreciated that specific embodiment described herein, only for explaining the present invention, is not intended to limit the present invention.
The invention provides a kind of method of using the micro-molten technology of laser to manufacture strain transducer, the Digit Control Machine Tool that the method is used has following functions: LASER HEATING, the micro-spray of micro-pen are directly write, servo-drive, location, heating and air supply system.The method comprises the following steps:
(1) with drawing function, draw foil gauge shape and the location graphic on elastomer on computers;
(2) drawing shape with micro-the micro-spray device that slurry scolder (glass dust and other materials) is housed, directly write on sensor elastomer;
(3) dry online slurry scolder;
(4) semiconductor gauge is placed on slurry scolder;
(5) with laser, along micro-movement locus, slurry scolder is heated, cooling after, foil gauge is just fixed on elastomer.
Adopt after technique scheme, with micro-straight writing technology, figure is directly write on elastomer, cancelled plate-making and printing process.Serigraphy efficiency for printing significantly complex figure is very high, but for printing the simple so little figure of strain transducer, its advantage is difficult to performance, and same printing process, only stamps simple or 4 points at 2, simple not as good as directly writing.Compared with prior art, adopt direct writing technology, with single arm resistance foil gauge, need to write four, use half-bridge foil gauge, only need to write two.Adopt Digit Control Machine Tool directly write with local sintering after, can form automatic production line, efficiency increases substantially, good product consistency, repeatability and reliability are high, thereby reduce production costs.
A kind of method of using directly the micro-molten technology of write-laser to manufacture strain gauge transducer provided by the invention is divided into five large steps, is described in detail as follows:
Step (1) is used drawing function graphing on the computer of Digit Control Machine Tool;
With reference to Tu1，①Yong mapping software, draw pedestal 1 graphic file that includes elastomer 2; Elastomer 2 and pedestal 1 are metal material, will carry out surface treatment and melt to be applicable to directly writing with laser is micro-before directly writing.
With reference to Tu2, Tu3，②Yong mapping software, on the flat diaphragm of elastomer 2, draw the graphic file of foil gauge 3 positions and shape; Foil gauge size: 1.6 * 0.5mm; Foil gauge 3 positions are in positive and negative maximum strain place.
Step (2) drawing shape with the micro-pen 52 that slurry scolder 4 (glass dust and other materials) is housed, directly write on sensor elastomer 2; Straight writing tools comprises micro-pen and micro-spray device.Below direct-write methods is elaborated.
1., use single arm resistance foil gauge, with reference to Fig. 2, use half-bridge foil gauge, with reference to Fig. 3,2. one group of pedestal is arranged on the fixture of being convenient to batch production; 3. modulate slurry scolder; This slurry scolder will be suitable for the micro-spray of micro-pen and directly write with laser sintered; 4. in micro-pen 52, pour into slurry scolder 4; 5. micro-pen 52 is installed, and during installation, micro-nib will regulate suitably with the vertical range of elastomer diaphragm, and reference distance 60um will guarantee that micro-fixedly secures on support, can not become flexible.6. set straight write parameters: straight writing rate 5mm/s; Nib internal diameter: Φ 220um; Drive air pressure: 0.2MPa; Minimum feature: 190um.7. start Digit Control Machine Tool 5 and directly write figure by setup parameter and graph position shape.
Step (3) is dried slurry scolder online; 1. open the heater switch of Digit Control Machine Tool 5, the pedestal after directly writing is carried out to on-line heating oven dry, bake out temperature: 150 ℃; Drying time: 10～15min,
2. pedestal will together heat with fixture, must not take off, and avoids secondary clamping and produces error.
Step (4) is placed on semiconductor gauge on slurry scolder; Adopt special-purpose patch device, comprise microdevice automatic Picking and machine vision alignment device, draw-mobile-location-placement completes automatically.
Step (5) heats slurry scolder along micro-movement locus with laser 51, cooling after, foil gauge is just fixed on elastomer.Describe the method for the micro-molten foil gauge of laser below in detail.1. laser instrument is selected diode pumping full-solid laser instrument: wavelength 1.064um, maximum power output 50W.2. laser sintered location: adjust laser instrument, make laser 51 scan start points and micro-pen 52 directly write starting point maintenance same point, make drawing shape by whole complete sintering.3. set sintering parameter: laser power density 1.5 * 10
6w/cm
2and sweep speed.4. start laser system, with laser, according to micro-straight track of writing, with suitable sweep speed, slurry scolder figure scanned to sintering, cooling after, foil gauge 3 is just fixed on elastomer 2.5. when laser scanning, open ventilation blower, take away in time pernicious gas.6. the laser sintered rear subsequent heat treatment step that also has, puts into stove Low Temperature Heat Treatment by pedestal, the thermal stress producing to eliminate LASER HEATING.
Said method is only preferred embodiment of the present invention, is not used for limiting the scope of the present invention, thus all any modifications of making in content described in the claims in the present invention, equivalence change, within all should being included in protection scope of the present invention.
Claims (5)
1. the micro-molten technology of directly write-laser of use is manufactured a method for strain gauge transducer, it is characterized in that, comprises the following steps:
(1) with drawing function, draw foil gauge shape and the location graphic on elastomer on computers;
(2) drawing shape with micro-the micro-spray device that scolder slurry (glass dust or other materials) is housed, directly write on sensor elastomer;
(3) semiconductor gauge is placed on slurry scolder after drying online slurry;
(4) with laser, along micro-movement locus, slurry scolder is heated, cooling after, foil gauge is just fixed on elastomer.
2. a kind of method of using directly the micro-molten technology of write-laser to manufacture strain gauge transducer as claimed in claim 1, it is characterized in that: in step (1), with computer drawing function, draw position and the shape figure of foil gauge on elastomer, this graphic file need be written in Digit Control Machine Tool.
3. a kind of method of using directly the micro-molten technology of write-laser to manufacture strain gauge transducer as claimed in claim 1, it is characterized in that: in step (2), micro-micro-spray device and laser instrument are together arranged on the Z axis of Digit Control Machine Tool, micro-pen is drawn foil gauge position and shape figure by the graphic file being written on elastomer.
4. a kind of method of using directly the micro-molten technology of write-laser to manufacture strain gauge transducer as claimed in claim 1, it is characterized in that: in step (3) online while drying slurry pedestal will with fixture together heating on workbench, avoid secondary clamping and produce error.
5. a kind of method of using directly the micro-molten technology of write-laser to manufacture strain gauge transducer as claimed in claim 1, it is characterized in that: in step (4), adjust laser instrument, make laser scanning starting point and micro-straight starting point of writing keep same point, make drawing shape by whole complete sintering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210280988.2A CN103567634A (en) | 2012-08-09 | 2012-08-09 | Method of producing strain sensor by utilizing laser micro-melting technology |
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| CN201210280988.2A CN103567634A (en) | 2012-08-09 | 2012-08-09 | Method of producing strain sensor by utilizing laser micro-melting technology |
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| CN103567634A true CN103567634A (en) | 2014-02-12 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104807416A (en) * | 2015-05-08 | 2015-07-29 | 南开大学 | Design and manufacturing method of optical strain sensor of microstructure array |
| CN105157579A (en) * | 2015-07-27 | 2015-12-16 | 南开大学 | Manufacturing method of microstructure array optical displacement sensor and method for detecting minimal displacement |
| US20160225551A1 (en) * | 2013-09-10 | 2016-08-04 | Apple Inc. | Sealed Button for an Electronic Device |
| CN109511232A (en) * | 2018-12-04 | 2019-03-22 | 深圳捷创电子科技有限公司 | Foil gauge electronic sensor pasting method |
| US10275069B2 (en) | 2017-09-22 | 2019-04-30 | Apple Inc. | Pressure resistant force sensing enclosure |
| US10659866B2 (en) | 2018-09-14 | 2020-05-19 | Apple Inc. | Elastomeric pressure transduction based user interface |
| CN114126248A (en) * | 2022-01-21 | 2022-03-01 | 深圳原驰三维技术有限公司 | Printed circuit board pad and circuit defect repairing method |
-
2012
- 2012-08-09 CN CN201210280988.2A patent/CN103567634A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160225551A1 (en) * | 2013-09-10 | 2016-08-04 | Apple Inc. | Sealed Button for an Electronic Device |
| US9916942B2 (en) * | 2013-09-10 | 2018-03-13 | Apple Inc. | Sealed button for an electronic device |
| CN104807416A (en) * | 2015-05-08 | 2015-07-29 | 南开大学 | Design and manufacturing method of optical strain sensor of microstructure array |
| CN105157579A (en) * | 2015-07-27 | 2015-12-16 | 南开大学 | Manufacturing method of microstructure array optical displacement sensor and method for detecting minimal displacement |
| US10275069B2 (en) | 2017-09-22 | 2019-04-30 | Apple Inc. | Pressure resistant force sensing enclosure |
| US10659866B2 (en) | 2018-09-14 | 2020-05-19 | Apple Inc. | Elastomeric pressure transduction based user interface |
| US11153676B2 (en) | 2018-09-14 | 2021-10-19 | Apple Inc. | Elastomeric pressure transduction based user interface |
| CN109511232A (en) * | 2018-12-04 | 2019-03-22 | 深圳捷创电子科技有限公司 | Foil gauge electronic sensor pasting method |
| CN114126248A (en) * | 2022-01-21 | 2022-03-01 | 深圳原驰三维技术有限公司 | Printed circuit board pad and circuit defect repairing method |
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Application publication date: 20140212 |