CN103567629B - Laser processing device - Google Patents
Laser processing device Download PDFInfo
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- CN103567629B CN103567629B CN201310303183.XA CN201310303183A CN103567629B CN 103567629 B CN103567629 B CN 103567629B CN 201310303183 A CN201310303183 A CN 201310303183A CN 103567629 B CN103567629 B CN 103567629B
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- 239000000835 fiber Substances 0.000 claims abstract description 75
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- 230000001678 irradiating effect Effects 0.000 claims description 4
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- 239000004065 semiconductor Substances 0.000 description 6
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Abstract
The present invention provides a kind of laser processing device, it has Optical fiber component, the focus of the laser beam that vibrates from laser oscillator can be navigated to the plane of incidence of the heart yearn of optical fiber by this Optical fiber component exactly, and is able to maintain that the state of the plane of incidence of the heart yearn that the focus of laser beam navigates to optical fiber.A kind of laser processing device with optical transport component, laser beam after optical transport component is carried out the collecting lens of optically focused by the laser beam gone out that vibrates laser oscillator and made by collecting lens optically focused is injected and is channeled to the Optical fiber component of condenser and constitutes, Optical fiber component includes: LMA fiber, it is to cover the heart yearn of major diameter by covering and constitute, the laser beam after collecting lens optically focused inject this heart yearn；Transmission Fibers, it is made up of sm fiber or PM optical fiber, is to cover the heart yearn of minor diameter by covering and constitute；And connecting elements, it connects LMA fiber and Transmission Fibers in the way of optical axis is consistent.
Description
Technical field
The present invention relates to machined object irradiated with pulse laser light thus implement the laser processing device of Laser Processing.
Background technology
In fabrication of semiconductor device, by being arranged as the cancellate segmentation preset lines of spacing track that is referred to as big
The surface of the semiconductor wafer causing circular plate shape marks off multiple region, forms the integrated electricity of IC(in this region marked off
Road), LSI(large scale integrated circuit) etc. device.Further, cutting off semiconductor wafer along spacing track, thus segmentation is formed
The region of device, thus produce semiconductor chip one by one.It addition, the surface layer at sapphire substrate is laminated with photodiode
Cut off also along spacing track Deng the optical device wafer of the light-emitting component such as photo detector or laser diode, be thus partitioned into
The optical device such as photodiode, laser diode one by one, the optical device being partitioned into is widely applied to electrical equipment.
Propose so as the method along the spacing track segmentation wafer such as above-mentioned semiconductor wafer or optical device wafer
Method: carry out irradiating laser light along the spacing track being formed at wafer, be consequently formed laser processing groove or change being internally formed
Property layer, ruptures along this laser processing groove or modified layer.Like this machined objects such as wafer are implemented Laser Processing
Laser processing device has: chuck table, and it is used for keeping machined object；And laser light irradiation component, it is for right
It is maintained at the machined object irradiating laser light of this chuck table.This laser light irradiation component is constituted by with lower part: swash
Optical generator, its laser beam that is used for vibrating；Condenser, its laser beam gone out that vibrated this laser oscillator gathers
Light is also irradiated to be maintained at the machined object of chuck table；And optical transport component, it is for vibrating by laser oscillator
Laser beam be directed to condenser.
Usually, by from above-mentioned laser oscillator vibrate the laser beam be directed to the optical transport component of condenser by
The optical system with lens and reflecting mirror is constituted.But, there is problems in that the restriction due to setting place, by lens and
The optical system that reflecting mirror is constituted degree of freedom in design is few.In order to solve such problem, it is proposed that use the light of optical fiber
Conveying member (for example, referring to patent documentation 1).
Prior art literature
Patent documentation 1: Japanese Unexamined Patent Publication 2007-207856 publication
Summary of the invention
The above-mentioned optical fiber as the optical transport component that laser beam is directed to condenser employ have the thinnest
The optical fiber of heart yearn, the diameter about the several times of the wavelength that above-mentioned heart yearn has the laser beam that transmit.Therefore, will be from laser
The vibrate end face of heart yearn that the focus of the laser beam navigates to optical fiber of agitator is difficult, and maintains laser light
The state of the end face that the focus of line is positioned at the heart yearn of optical fiber is difficult.That is, it is the laser light of 1 μm for transmission wavelength
Line, employs the optical fiber with the heart yearn about a diameter of 6 μm, so the focus of laser beam navigates to a diameter of 6 μm
The end face of the heart yearn of left and right is difficult.Additionally, there are problems with: at the core that the focus of laser beam is navigated to optical fiber
After the end face of line, owing to thermal expansion or strain etc. make the focus of laser beam depart from from the end face of the heart yearn of optical fiber.
The present invention is the invention made in view of the above fact, and its main technical task is to provide one and has optical fiber structure
The laser processing device of part, this Optical fiber component can be reliably fixed by the focus of the laser beam that vibrates from laser oscillator
Position is to the plane of incidence of the heart yearn of optical fiber, and is able to maintain that the plane of incidence of the heart yearn that the focus of laser beam navigates to optical fiber
State.
In order to solve above-mentioned main technical task, according to the invention provides a kind of laser processing device, its feature exists
In, having: chuck table, it is used for keeping machined object；Laser light irradiation component, it is for being maintained at above-mentioned chuck
The machined object irradiating laser light of workbench, and include: laser oscillator, its laser beam that is used for vibrating；Condenser, its
Carry out optically focused for the laser beam that above-mentioned laser oscillator is vibrated and be irradiated to be maintained at above-mentioned chuck table
Machined object；And optical transport component, its laser beam that vibrated by above-mentioned laser oscillator is directed to condenser, above-mentioned
Optical transport component includes: collecting lens, and it carries out optically focused for the laser beam gone out that vibrates above-mentioned laser oscillator；And light
Fine component, is injected into this Optical fiber component by the laser beam after above-mentioned collecting lens optically focused, and this Optical fiber component is by above-mentioned laser light
Line is directed to above-mentioned condenser, and above-mentioned Optical fiber component includes: large-mode-area fiber, and it is the core being covered major diameter by covering
Line and constitute, above-mentioned laser oscillator vibrate and injected this heart yearn by the laser beam after above-mentioned collecting lens optically focused；
Transmission Fibers, it is made up of single-mode fiber or polarization-maintaining fiber, and described single-mode fiber or polarization-maintaining fiber are to pass through covering
Cover the heart yearn of minor diameter corresponding to the wavelength of the laser beam that vibrates with above-mentioned laser oscillator and constitute；And even
Connection member, it connects above-mentioned large-mode-area fiber and above-mentioned Transmission Fibers in the way of optical axis is consistent.
Preferably, above-mentioned connecting elements is constituted by with lower part: by end and the above-mentioned biography of above-mentioned large-mode-area fiber
Lose the connection member that the end of fibre couples together at spaced intervals；With the collecting lens being disposed in above-mentioned connection member.
Or, above-mentioned connecting elements is constituted by with lower part: by end and the above-mentioned transmission light of above-mentioned large-mode-area fiber
The connection member that fine end couples together at spaced intervals；With the Oblique refractive lens being disposed in above-mentioned connection member.
According to the present invention, the optically focused that optical transport component is carried out optically focused by the laser beam gone out that vibrates laser oscillator is saturating
Mirror and the laser beam after making by above-mentioned collecting lens optically focused are injected and are directed to the Optical fiber component of condenser and constitute.Above-mentioned light
Fine component includes: large-mode-area fiber, it is to cover the heart yearn of major diameter by covering and constitute, laser oscillator shake
Swing and injected this heart yearn by the laser beam after above-mentioned collecting lens optically focused；Transmission Fibers, it is protected by single-mode fiber or polarization
Holding optical fiber to constitute, described single-mode fiber or polarization-maintaining fiber are to cover, by covering, the laser that vibrates with laser oscillator
The heart yearn of the minor diameter that the wavelength of light is corresponding and constitute；And connecting elements, it connects big mould in the way of optical axis is consistent
Area fiber and Transmission Fibers.Therefore, the laser beam gone out that vibrates laser oscillator carries out the collecting lens of optically focused by optically focused
Point location is to the plane of incidence of the bigger large-mode-area fiber of core line diameter, it is possible to easily focus is navigated to heart yearn
The plane of incidence, and solve problem focus being departed from due to thermal expansion and strain from the plane of incidence of heart yearn.
Further, since by connecting elements with optical axis connect and compose by the way of consistent Optical fiber component large-mode-area fiber and
Transmission Fibers, compares so can be injected into diameter exactly from the laser beam of the outgoing plane injection of the heart yearn of large-mode-area fiber
The plane of incidence of the heart yearn of little Transmission Fibers.
Accompanying drawing explanation
Fig. 1 is the axonometric chart of the laser processing device constituted according to the present invention.
Fig. 2 is mounted in the frame assumption diagram of the pulse laser light irradiation component of the laser processing device shown in Fig. 1.
Fig. 3 is the section view of the major part of the Optical fiber component representing that the pulse laser light shown in pie graph 2 irradiates component
Figure.
Fig. 4 is other embodiments of the Optical fiber component representing that the pulse laser light shown in pie graph 2 irradiates component
Main portion sectional view.
Label declaration
2: stationary base
3: chuck table mechanism
31: guide rail
36: chuck table
37: processing feeding component
38: the 1 index feed components
4: laser light irradiation unit supporting mechanism
41: guide rail
42: moveable support pedestal
43: the 2 index feed components
5: laser light irradiation unit
50: imaging member
6: pulse laser light irradiates component
62: pulsed laser light line oscillator
63: condenser
64: optical transport component
641: collecting lens
7: Optical fiber component
71:LMA(Large Mode Area: large mode area) optical fiber
72: Transmission Fibers
73: connecting elements.
Detailed description of the invention
Hereinafter, referring to the drawings carrying out the most in detail the laser processing device constituted according to the present invention
Explanation.
Fig. 1 represents the axonometric chart of the laser processing device constituted according to the present invention.Laser processing device tool shown in Fig. 1
Have: stationary base 2；Chuck table mechanism 3, it can be joined movably in the processing direction of feed (X-direction) shown in arrow X
It is located at this stationary base 2, is used for keeping machined object；Laser light irradiation unit supporting mechanism 4, its can with processing feeding
The orthogonal index feed direction (Y direction) shown in arrow Y, direction (X-direction) is disposed in stationary base 2 movably；And
Laser light irradiation unit 5, it can keep the optically focused shown in the vertical arrow Z in face relative to chuck table described later
Point position adjustment direction (Z-direction) is disposed in this laser light irradiation unit supporting mechanism 4 movably.
Above-mentioned chuck table mechanism 3 has: pair of guide rails 31,31, and it is disposed in static base abreast along X-direction
On seat 2；1st sliding shoe 32, it can be disposed on this guide rail 31,31 movably in X-direction；2nd sliding shoe 33, it can
It is disposed in movably on the 1st sliding shoe 32 in Y direction；Cover platform 35, it is supported on the 2nd slip by cylinder part 34
On block 33；And chuck table 36, it is processed article holding component.This chuck table 36 has by porous material shape
The absorption chuck 361 become, is protected the most discoideus semiconductor wafer as machined object by not shown attracting member
Hold on the absorption chuck 361 keeping face as machined object.By the not shown pulse horse being disposed in cylinder part 34
Reach and make the chuck table 36 constituted like this rotate.It addition, be equipped for fixing ring described later at chuck table 36
The clamping device 362 of shape framework.
Above-mentioned 1st sliding shoe 32 is provided with a pair directed groove coordinated with above-mentioned pair of guide rails 31,31 at its lower surface
321,321, and the upper surface of the 1st sliding shoe 32 be provided be formed parallel to along Y direction pair of guide rails 322,
322.The 1st sliding shoe 32 constituted like this is configured to by making directed groove 321,321 coordinate with pair of guide rails 31,31, and
Can move along pair of guide rails 31,31 in X-direction.Chuck table mechanism 3 has adding of being made up of ball screw framework
Work feeding component 37, above-mentioned ball screw framework is used for making the 1st sliding shoe 32 move along pair of guide rails 31,31 in X-direction.
Processing feeding component 37 includes: and outside above-mentioned pair of guide rails 31,31 is disposed between above-mentioned pair of guide rails 31 and 31 abreast
Threaded rod 371: and drive source for rotating the impulse motor 372 etc. driving this external thread rod 371.Its one end of external thread rod 371
Rotatably it is supported on the drive tab 373 being fixed on above-mentioned stationary base 2, the other end of external thread rod 371 and above-mentioned pulse
The output shaft of motor 372 is in transmission connection.It addition, external thread rod 371 and the through female thread being formed at not shown female thread block
Hole screws togather, and above-mentioned female thread block is protrusively provided in the central part lower surface of the 1st sliding shoe 32.Therefore, by impulse motor 372
Rotate forward and reversion drives external thread rod 371, thus make the 1st sliding shoe 32 move in X-direction along guide rail 31,31.
Above-mentioned 2nd sliding shoe 33 is configured to: its lower surface is provided with a pair directed groove 331,331, is drawn for this pair
Guide groove 331,331 coordinates with the pair of guide rails 322,322 of the upper surface being arranged at above-mentioned 1st sliding shoe 32, by making this be drawn
Guide groove 331,331 coordinates with pair of guide rails 322,322, and the 2nd sliding shoe 33 can be along pair of guide rails 322,322 in Y direction
Mobile.Chuck table mechanism 3 has the 1st index feed component 38 being made up of ball screw framework, above-mentioned ball-screw machine
Structure is for making the 2nd sliding shoe 33 move along the pair of guide rails 322,322 being arranged at the 1st sliding shoe 32 in Y direction.1st point
Degree feeding component 38 includes: and above-mentioned pair of guide rails 322,322 is disposed between above-mentioned pair of guide rails 322 and 322 abreast
External thread rod 381；With the source such as driving such as impulse motor 382 grade for rotating this external thread rod 381 of driving.External thread rod 381 one
End is rotatably supported in the fixing drive tab 383 of the upper surface of above-mentioned 1st sliding shoe 32, another of external thread rod 381
The output shaft with above-mentioned impulse motor 382 is held to be in transmission connection.It addition, external thread rod 381 be formed at not shown female thread block
Through internal thread hole screw togather, above-mentioned female thread block is protrusively provided in the central part lower surface of the 2nd sliding shoe 33.Therefore, logical
Extra pulse motor 382 rotates forward and inverts driving external thread rod 381, thus makes the 2nd sliding shoe 33 along guide rail 322,322 at Y
Direction of principal axis moves.
Above-mentioned laser light irradiation unit supporting mechanism 4 has: pair of guide rails 41,41, it is joined abreast along Y direction
It is located in stationary base 2；And moveable support pedestal 42, it is arranged to move along this guide rail 41,41 in X-direction.
This moveable support pedestal 42 is constituted by with lower part: mobile supporting part 421, it can be disposed on guide rail 41,41 movably；With
And department of assembly 422, it is installed on this and moves supporting part 421.Department of assembly 422 is provided with abreast at one side and prolongs in Z-direction
The pair of guide rails 423,423 stretched.Laser light irradiation unit supporting mechanism 4 has the 2nd indexing being made up of ball screw framework
Feeding component 43, above-mentioned ball screw framework is used for making moveable support pedestal 42 move along pair of guide rails 41,41 in Y direction
Dynamic.2nd index feed component 43 includes: and above-mentioned pair of guide rails 41,41 is disposed between above-mentioned pair of guide rails 41,41 abreast
External thread rod 431；With the source such as driving such as impulse motor 432 grade for rotating this external thread rod 431 of driving.External thread rod 431 its
One end is rotatably supported on the not shown drive tab being fixed on above-mentioned stationary base 2, the other end of external thread rod 431 with
The output shaft of above-mentioned impulse motor 432 is in transmission connection.It addition, external thread rod 431 be formed in not shown female thread block
Screwed hole screws togather, and above-mentioned female thread block is protrusively provided in the central part of the mobile supporting part 421 constituting moveable support pedestal 42
Lower surface.Therefore, rotate forward and invert driving external thread rod 431 by impulse motor 432, thus make moveable support pedestal 42 edge
Guide rail 41,41 to move in Y direction.
Laser light irradiation unit 5 has: unit rack 51；And pulse laser light irradiates component 6, it is arranged on this
Unit rack 51.Unit rack 51 is provided with a pair directed groove 511,511, this pair directed groove 511,511 be arranged at
The pair of guide rails 423,423 of above-mentioned department of assembly 422 can coordinate slidably, by making this directed groove 511,511 lead with above-mentioned
Rail 423,423 coordinates, and laser light irradiation unit 5 is supported for can be at the focus position adjustment direction (Z shown in arrow Z
Direction of principal axis) mobile.
Laser light irradiation unit 5 have for make unit rack 51 along pair of guide rails 423,423 be perpendicular to above-mentioned
The machined object of chuck table 36 keeps the focus position adjustment means 53 that the direction i.e. Z-direction in face moves.Focus
Position adjustment means 53 is same with above-mentioned processing feeding component the 37 and the 1st index feed component the 38 and the 2nd index feed component 43
It is made up of ball screw framework sample.This focus position adjustment means 53 includes: be disposed between pair of guide rails 423,423
External thread rod (not shown)；With for rotating the source such as driving such as impulse motor 532 grade driving this external thread rod, pass through impulse motor
532 rotate forward and invert the external thread rod that driving is not shown, thus make unit rack 51 and pulse laser light irradiate component 6
Move along guide rail 423,423 in Z-direction.It addition, make pulse laser light irradiate structure by rotating forward driving pulse motor 532
Part 6 is moved upward, and makes pulse laser light irradiate component 6 by reversion driving pulse motor 532 and moves downwards.
Above-mentioned pulse laser light irradiates component 6 and has the cylindrical shape being fixed on unit rack 51 and substantially protruding horizontally up
Casing 61.It is equipped with detection in the leading section of the casing 61 of this cylindrical shape and should irradiate component by above-mentioned pulse laser light
6 imaging member 50 carrying out the machining area laser machined.This imaging member 50 is made up of imaging apparatus (infrared C CD) etc.,
And captured picture signal is sent to not shown control member.
Pulse laser light irradiates component 6 to be had: pulsed laser light line oscillator 62, it is disposed in above-mentioned as shown in Figure 2
In casing 61, and the pulse laser light LB that vibrates；Condenser 63, it is disposed in the end of casing 61, to by pulsed laser light
The line oscillator 62 pulse laser light that vibrates carries out optically focused, and is irradiated to be maintained at the quilt of above-mentioned chuck table 36
Machining object W；And optical transport component 64, pulsed laser light line oscillator 62 the pulse laser light that vibrates is transferred to by it
Condenser 63.This optical transport component 64 is constituted by with lower part: collecting lens 641, and it is for pulsed laser light line oscillator
The laser beam that 62 vibrate carries out optically focused；And Optical fiber component 7, its make by this collecting lens 641 optically focused after laser beam
Inject and direct it to above-mentioned condenser 63.
Above-mentioned pulsed laser light line oscillator 62 is made up of YAG laser oscillator or YVO4 laser oscillator.It addition, with
Under type sets the pulse laser light LB vibrating from pulsed laser light line oscillator 62.
Wavelength: 1064nm
Repetition rate: 100kHz
Average output: 0.2W
Above-mentioned condenser 63 is constituted by with lower part: revise lens 631, and it is by from the optical fiber structure constituting optical transport component 64
The pulse laser light of part (fiber unit) 7 injection is modified to directional light (collimated beam (collimated beam))；Thing is gathered
Optical lens 632, it carries out optically focused to the pulse laser light after being modified to directional light by these correction lens 631 and is irradiated to
It is maintained at the machined object W of chuck table 36.
Arrange the collecting lens 641 constituting above-mentioned optical transport component 64 in the following manner: pulse laser light is vibrated
The device 62 pulse laser light LB that vibrates carries out optically focused, and focus navigates to constitute the LMA fiber described later of Optical fiber component 7
The end face (plane of incidence) of heart yearn.
It follows that above-mentioned Optical fiber component 7 is illustrated.
Optical fiber component 7 in embodiment shown in Fig. 2 has: LMA(Large Mode Area, large mode area) optical fiber
71, it is to cover the heart yearn of major diameter by covering (clad) and constitute, by the pulse after above-mentioned collecting lens 641 optically focused
Laser beam LB injects this heart yearn；Transmission Fibers 72, it is by SM(Single Mode, single mode) optical fiber or PM(Polarization
Maintaining: polarization keeps) optical fiber composition, described sm fiber or PM optical fiber are to be covered by covering and pulsed laser light
Line oscillator 62 vibrates the heart yearn of minor diameter corresponding to the wavelength of the pulse laser light LB and constitutes；And connecting elements
73, it connects LMA fiber 71 and Transmission Fibers 72 in the way of optical axis is consistent.
It follows that above-mentioned LMA fiber 71 and Transmission Fibers 72 and connecting elements 73 are illustrated with reference to Fig. 3.
LMA fiber 71 is made up of heart yearn 711 and the covering 712 covering this heart yearn 711.The heart yearn 711 of this LMA fiber 71
Diameter (d1) be set as that 35 μm, length (L1) are set as 10～20cm.The heart yearn 711 of the LMA fiber 71 constituted like this
Plane of incidence 711a and above-mentioned collecting lens 641 are opposed to arrange, and make outgoing plane 711b join in being exposed to connecting elements 73
If.
Above-mentioned by SM(Single Mode) optical fiber or PM(Polarization Maintaining: polarization keeps) optical fiber
The Transmission Fibers 72 constituted in the same manner as LMA fiber 71 by heart yearn 721 with cover the covering 722 of this heart yearn 721 and constitute.This biography
The diameter (d2) of the heart yearn 721 losing fine 72 is set as that 6 μm, length (L1) are set as 2～3m.The Transmission Fibers constituted like this
The outgoing plane of the heart yearn 711 in the plane of incidence 721a of the heart yearn 721 of 72 is exposed to connecting elements 73 and with above-mentioned LMA fiber 71
711b is opposed to arrange.The outgoing plane 721b of the heart yearn 721 of this Transmission Fibers 72 and the above-mentioned condenser 63 of composition as shown in Figure 2
Revise lens 631 to be opposed to arrange.
Going on to say with reference to Fig. 3, above-mentioned connecting elements 73 is constituted by with lower part: formed by suitable synthetic resin
Connection member 731 for tubular；With the collecting lens 732 being disposed in this connection member 731.Connection member 731 is by with bottom
Dividing and constitute: the 1st supporting part 731a, it is for fixing the end of the outgoing plane 711b side of above-mentioned LMA fiber 71；2nd supporting part
731b, it is for the end of the plane of incidence 721a side of constant transmissions optical fiber 72；And lens incorporating section 731c, it is formed at the 1st
Between supporting part 731a and the 2nd supporting part 731b, lens incorporating section 731c is equipped with collecting lens 732.It addition, collecting lens
732 arrange in the following manner: gather the laser beam of the outgoing plane 711b injection from the heart yearn 711 constituting LMA fiber 71
Light, navigates to constitute the plane of incidence 721a of the heart yearn 721 of Transmission Fibers 72 by focus.
It follows that other embodiments of connecting elements 73 are illustrated with reference to Fig. 4.
Owing to the connecting elements 73 in the embodiment shown in Fig. 4 simply arranges with the connecting elements 73 shown in above-mentioned Fig. 3
Different in the lens of the lens incorporating section 731c of connection member 731, other structure is substantially the same, so to same portion
Part marks same label thus omits this explanation.Connecting elements 73 in embodiment shown in Fig. 4 is in the company of connecting elements 73
The lens incorporating section 731c of relay part 731 is equipped with grin lens (Gradient Index Lens: Oblique refractive lens) 733.
This grin lens 733 carries out optically focused to the laser beam of the outgoing plane 711b injection from the heart yearn 711 constituting LMA fiber 71, will
Focus navigates to constitute the plane of incidence 721a of the heart yearn 721 of Transmission Fibers 72.Alternatively, it is also possible to by connection member 731
Fixing grin lens 733, but preferably the outgoing plane 711b side welding of grin lens 733 with LMA fiber 71 is reliably entered
Row is fixing.
Constitute pulse laser light illumination unit 6 in the above manner, below its effect is illustrated.
Vibrate the pulse laser light LB from pulsed laser light line oscillator 62, carries out optically focused also at collecting lens 641
It is injected into the plane of incidence 711a of the heart yearn 711 of LMA fiber 71.Now, owing to pulsed laser light line oscillator 62 is vibrated
Pulse laser light LB carries out the collecting lens 641 of optically focused and focus navigates to the ratio that diameter (d1) is 35 μm of heart yearn 711
The plane of incidence 711a of bigger LMA fiber 71, it is possible to easily focus to be navigated to the plane of incidence 711a of heart yearn 711,
And solve the problem making focus depart from due to thermal expansion and strain from the plane of incidence 711a of heart yearn 711.
As it has been described above, be injected into the pulse laser light LB of the plane of incidence 711a of the heart yearn 711 of LMA fiber 71 from heart yearn
The outgoing plane 711b of 711 injects to be formed at the lens incorporating section 731c of the connection member 731 of connecting elements 73.From LMA fiber
The pulse laser light LB of the outgoing plane 711b injection of the heart yearn 711 of 71 is carried out optically focused by collecting lens 732 and is injected into structure
Become the plane of incidence 721a of the heart yearn 721 of Transmission Fibers 72.Now, due to for such structure: by connecting elements 73 with optical axis
Consistent mode connects LMA fiber 71 and Transmission Fibers 72, and by the focus of the laser beam by collecting lens 732 optically focused
Navigate to constitute the plane of incidence 721a of the heart yearn 721 of Transmission Fibers 72, even so the diameter of heart yearn 721 (d2) is 6 μm
The Transmission Fibers 72 that diameter is smaller, from the pulse laser light LB of the outgoing plane 711b injection of the heart yearn 711 of LMA fiber 71 also
Exactly focus can be navigated to the plane of incidence 721a of heart yearn 721 to carry out incidence.
Like this, the pulse laser light LB of plane of incidence 721a of the heart yearn 721 of Transmission Fibers 72 it is injected into by transmission
The heart yearn 721 of optical fiber 72 transmits, and penetrates towards the correction lens 631 constituting condenser 63 from outgoing plane 721b.From transmission
The pulse laser light LB of the outgoing plane 721b injection of the heart yearn 721 of optical fiber 72 by revising after lens 631 are modified to directional light,
Thing collecting lens 632 is being carried out optically focused, and is being irradiated to be maintained at the machined object W of chuck table 36.
Claims (3)
1. a laser processing device, it is characterised in that have:
Chuck table, it is used for keeping machined object；
Laser light irradiation component, it is used for the machined object irradiating laser light being maintained at above-mentioned chuck table, and wraps
Include: laser oscillator, its laser beam that is used for vibrating；Condenser, it is for the laser gone out that vibrates above-mentioned laser oscillator
Light carries out optically focused and is irradiated to be maintained at the machined object of above-mentioned chuck table；And optical transport component, it is by upper
State the laser oscillator laser beam that vibrates and be directed to condenser,
Above-mentioned optical transport component includes: collecting lens, and it gathers for the laser beam gone out that vibrates above-mentioned laser oscillator
Light；And Optical fiber component, the laser beam after above-mentioned collecting lens optically focused it being injected into this Optical fiber component, this Optical fiber component is by upper
State laser beam and be directed to above-mentioned condenser,
Above-mentioned Optical fiber component includes:
Large-mode-area fiber, it is to carry out the covering diameter heart yearn bigger than the diameter of the heart yearn of Transmission Fibers by covering and constitute
, above-mentioned laser oscillator vibrate and injected this heart yearn by the laser beam after above-mentioned collecting lens optically focused；
Above-mentioned Transmission Fibers, it is made up of single-mode fiber or polarization-maintaining fiber, and described single-mode fiber or polarization-maintaining fiber are
Cover the heart yearn of minor diameter corresponding to the wavelength of the laser beam that vibrates with above-mentioned laser oscillator by covering and constitute
's；And
Connecting elements, it connects above-mentioned large-mode-area fiber and above-mentioned Transmission Fibers in the way of optical axis is consistent.
Laser processing device the most according to claim 1, it is characterised in that
Above-mentioned connecting elements is constituted by with lower part: by the end of above-mentioned large-mode-area fiber and the end of above-mentioned Transmission Fibers every
Open the connection member that compartment of terrain couples together；With the collecting lens being disposed in above-mentioned connection member.
Laser processing device the most according to claim 1, it is characterised in that
Above-mentioned connecting elements is constituted by with lower part: by the end of above-mentioned large-mode-area fiber and the end of above-mentioned Transmission Fibers every
Open the connection member that compartment of terrain couples together；With the Oblique refractive lens being disposed in above-mentioned connection member.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP2012-169737 | 2012-07-31 | ||
| JP2012169737A JP6068859B2 (en) | 2012-07-31 | 2012-07-31 | Laser processing equipment |
| JP2012-169737 | 2012-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103567629A CN103567629A (en) | 2014-02-12 |
| CN103567629B true CN103567629B (en) | 2016-11-30 |
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