CN103559993B - Prepulsing is isolated inductance and is utilized the capillary discharging soft x-ray laser device of this inductance - Google Patents
Prepulsing is isolated inductance and is utilized the capillary discharging soft x-ray laser device of this inductance Download PDFInfo
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- CN103559993B CN103559993B CN201310589661.8A CN201310589661A CN103559993B CN 103559993 B CN103559993 B CN 103559993B CN 201310589661 A CN201310589661 A CN 201310589661A CN 103559993 B CN103559993 B CN 103559993B
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Abstract
Prepulsing isolation inductance and utilize the capillary discharging soft x-ray laser device of this inductance, relates to a kind of prepulsing apparatus for protecting power supply and utilizes the x-ray laser device of this device.The main pulse voltage that the invention solves existing capillary discharging soft x-ray laser device produces amplitude higher current impulse interference signal and prepulsing power supply is produced to the problem destroyed in prepulsing circuit, and the present invention utilizes wire-wound inductance, nylon insulating sleeve, branch sleeve, steel flange, Metallic rod, annular gas discharge switch, nylon branch sleeve, No. two Metallic rod and a nylon rod obtain prepulsing isolation inductance; Utilize inductance to the inhibition of fast rising edge, reduce main pulse high pressure to the interference of prepulsing power supply, inductance is connected between capillary and prepulsing power supply.The suitable capillary discharging Z pinch effect that utilizes of the present invention obtains soft x-ray laser pulser.
Description
Technical field
The present invention relates to a kind of prepulsing apparatus for protecting power supply and utilize the x-ray laser device of this device.
Background technology
Capillary discharging soft x-ray laser refers to and utilizes capillary discharging Z pinch effect to obtain soft x-ray laser pulse.First, the gas be filled with in capillary is carried out to the electric discharge of low voltage (being about tens kilovolts), the electric current producing tens amperes flows through the gas in capillary.Neutral gas in pipe is ionized into the plasma be made up of lower ionization valence state by this electric current, and this electric current is called as prepulsing electric current, is produced by prepulsing power supply.To puncture in capillary after gas tens microsecond in pre-pulse voltages, main pulse power supply produces main pulse voltage (being about hundreds of kilovolt) and discharges to the plasma in capillary, and forming the current impulse that first amplitude is tens kilo-amperes, this electric current is called main pulse electric current.Because the half period of this electric pulse is about 130ns, can produce skin effect when flowing through preionization plasma, electric current only flows through on the surface of plasma column.Due to discharging current and the magnetic field interaction that self produces, produce the Lorentz force pointing to axle center, plasma column shrinks to axle center, and this is called as Z pinch effect.In this process, due to electronics and ion mutually collide, the effect such as Joule heating, plasma temperature raises, density increases.When plasma pinch is to axle center, form the plasma column that diameter only has hundreds of micron, the high-temperature high-density condition of plasma makes the upper and lower energy level population reversion of laser simultaneously, and laser gain is greater than loss, the pulse of final formation soft x-ray laser.
The schematic diagram of capillary discharging soft x-ray laser device is given in Fig. 1.As can be seen from Figure 1, main pulse and prepulsing two power supplys need to be connected with capillary load simultaneously, therefore, when main pulse voltage arrives capillary end, main pulse voltage is added in capillary end simultaneously, and on the prepulsing circuit be connected with capillary end.Main pulse voltage produces the higher current impulse interference signal of amplitude in prepulsing circuit, and imports prepulsing power supply by prepulsing cable, thus produces destruction to prepulsing power supply.
Summary of the invention
The present invention produces in order to the main pulse voltage solving existing capillary discharging soft x-ray laser device produces the higher current impulse interference signal of amplitude in prepulsing circuit the problem destroyed to prepulsing power supply, propose the capillary discharging soft x-ray laser device that prepulsing is isolated inductance and utilized this inductance.
Prepulsing isolation inductance of the present invention, this inductance comprises wire-wound inductance, nylon insulating sleeve, branch sleeve, steel flange, Metallic rod, annular gas discharge switch, nylon branch sleeve, No. two Metallic rod and a nylon rod;
Wire-wound inductance is wrapped on nylon rod, nylon insulating sleeve is enclosed within the outside of wire-wound inductance, branch sleeve is enclosed within the outside of nylon insulating sleeve, the height of branch sleeve is less than the height of nylon insulating sleeve, and the upper and lower side of branch sleeve has outward extending edge, and be describedly outward extendingly evenly provided with manhole along upper, the lower end of branch sleeve is coaxially installed with steel flange, through hole on branch sleeve is corresponding with the through hole on steel flange, the bottom of nylon insulating sleeve is stuck on the shoulder in steel flange, one end connecting line of a Metallic rod is around one end of inductance, annular gas discharge switch is connected between a Metallic rod and No. two Metallic rod, and annular gas discharge switch and No. two Metallic rod are positioned at steel flange, lower end and the nylon branch sleeve of rust steel flange are bolted, there is outward extending edge the upper end of described nylon branch sleeve, the bottom of nylon branch sleeve is airtight, the other end of No. two Metallic rod is by the bottom of nylon branch sleeve through nylon branch sleeve.
Utilize above-mentioned prepulsing to isolate the capillary discharging soft x-ray laser device of inductance, this device comprises main pulse power supply, arc chamber, capillary, vacuum chamber, vacuum system, detector and prepulsing power supply; Main pulse power supply signal output connects one end of capillary and the output of prepulsing power supply simultaneously, capillary is placed in arc chamber, arc chamber is tubular confined space, capillary is fixed on the axis of arc chamber tubular, and capillary and vacuum chamber, vacuum system is used for vacuumizing vacuum chamber;
Prepulsing isolation inductance is connected between capillary and prepulsing power supply.
The present invention utilizes the rise-time of current of inductor element to very fast change to have higher inhibition; a kind of prepulsing isolation inductance is added in prepulsing outlet line; can effectively stop main pulse voltage in prepulsing current circuit, produce unnecessary amplitude current impulse; simultaneously in order to discharge the dump energy in the rear water capacitance of laser pulse generation fast; in prepulsing inductance, add annular gas switch, reach the object of protection prepulsing power supply.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing capillary discharging soft x-ray laser device;
In figure, A is main pulse power supply, B is arc chamber, C is capillary, D is vacuum chamber, E is vacuum system, F is detector;
Fig. 2 is the structural representation of prepulsing of the present invention isolation inductance;
Fig. 3 is the structural representation of capillary discharging soft x-ray laser device of the present invention;
Fig. 4 is the main pulse current waveform figure installing capillary discharging soft x-ray laser device before and after main pulse isolation inductance;
In figure, solid line is the main pulse current waveform before installing main pulse isolation inductance;
In figure, dotted line is the main pulse current waveform after installing main pulse isolation inductance.
Embodiment
Embodiment one, composition graphs 2 illustrate present embodiment, prepulsing isolation inductance described in present embodiment, this inductance comprises wire-wound inductance 1, nylon insulating sleeve 2, branch sleeve 3, steel flange 4, Metallic rod 5, annular gas discharge switch 6, nylon branch sleeve 7, No. two Metallic rod 8 and nylon rods;
Wire-wound inductance 1 is wrapped on nylon rod, nylon insulating sleeve 2 is enclosed within the outside of wire-wound inductance 1, branch sleeve 3 is enclosed within the outside of nylon insulating sleeve 2, the height of branch sleeve 3 is less than the height of nylon insulating sleeve 2, and the upper and lower side of branch sleeve 3 has outward extending edge, and be describedly outward extendingly evenly provided with manhole along upper, the lower end of branch sleeve 3 is coaxially installed with steel flange 4, through hole on branch sleeve 3 is corresponding with the through hole on steel flange 4, the bottom of nylon insulating sleeve 2 is stuck on the shoulder in steel flange 4, one end connecting line of a Metallic rod 5 is around one end of inductance 1, annular gas discharge switch 6 is connected between a Metallic rod 5 and No. two Metallic rod 8, and annular gas discharge switch 6 and No. two Metallic rod 8 are positioned at steel flange 4, lower end and the nylon branch sleeve 7 of rust steel flange 4 are bolted, there is outward extending edge the upper end of described nylon branch sleeve 7, the bottom of nylon branch sleeve 7 is airtight, the other end of No. two Metallic rod 8 is by the bottom of nylon branch sleeve 7 through nylon branch sleeve 7.
Effect of the present invention utilizes inductance to the inhibition of fast rising edge, reduces main pulse high pressure to the interference of prepulsing power supply, thus increase the stability of prepulsing power supply.Single core high voltage insulated cable is used to make wire-wound inductance.This isolation inductance has the inductance value of about 1 microhenry, is about 24 Ω to the induction reactance value of main pulse electric current, is about 0.79 Ω to the induction reactance value of prepulsing electric current, the induction reactance value of this inductance to main pulse electric current 2 orders of magnitude higher than prepulsing electric current.
Wire-wound inductance is with high voltage, and outer branch sleeve is earth potential, for ensureing the normal work of isolation inductance, needs to carry out High-Voltage Insulation design between isolation inductance and sleeve.Therefore between wire-wound inductance and branch sleeve, devise the High-Voltage Insulation sleeve of nylon material.
The present invention is in order to after reducing laser pulse and producing, and main pulse electric current vibrates the electromagnetic interference produced for a long time, thus ensures that main pulse power control system can normally work, and adds annular gas switch in the design of prepulsing inductance.This gas switch, can, by by the main pulse electric current after wire-wound inductance, utilize the mode of arc discharge to import the earth.This discharge switch can change the inner side sparking electrode of different-diameter, thus realizes different voltage insulation intensity, to adapt to the discharge test condition of different main pulse voltage.Main pulse voltage is generally hundreds of kilovolt, and pre-pulse voltages is only about 20 kilovolts, therefore can by different discharge switch spacing, and while discharging main pulse electric energy, pre-pulse voltages can not make switch conduction.Discharge switch utilizes Metallic rod to be connected with prepulsing power end, enables pre-pulse voltages through isolation inductance.
Embodiment two, present embodiment are further illustrating the prepulsing isolation inductance described in embodiment one, the lower surface on outward extending edge, branch sleeve 3 lower end is provided with toroidal cavity, this groove is positioned at the inner side of manhole, be provided with air seal cushion rubber in groove, air seal cushion rubber is used for sealing the connection of branch sleeve 3 and steel flange 4.
Embodiment three, present embodiment are further illustrating the prepulsing isolation inductance described in embodiment one, the lower end of steel flange 4 is provided with toroidal cavity, this groove is positioned at the inner side of bolt, be provided with air seal cushion rubber in groove, this air seal cushion rubber is used for the junction sealing by steel flange 4 and nylon branch sleeve 7.
Embodiment four, present embodiment is further illustrating the prepulsing isolation inductance described in embodiment one, it also comprises rosette, this rosette is fixedly mounted in No. two Metallic rod 8, No. two Metallic rod 8 pass the center of circle of rosette, the lower surface of this rosette and the upper surface at the bottom of nylon branch sleeve 7 are fitted, and the lower surface of rosette is provided with donut connected in star, air seal cushion rubber is provided with in toroidal cavity, this air seal cushion rubber seals for the connection of the bottom to No. two Metallic rod 8 and nylon branch sleeve 7.
Embodiment five, composition graphs 3 illustrate present embodiment, present embodiment is the capillary discharging soft x-ray laser device of the prepulsing isolation inductance utilized described in embodiment one, and this device comprises main pulse power supply a, arc chamber b, capillary c, vacuum chamber d, vacuum system e, detector f and prepulsing power supply g; Main pulse power supply a signal output part connects one end of capillary c and the output of prepulsing power supply g simultaneously, capillary c is placed in arc chamber b, arc chamber b is tubular confined space, capillary c is fixed on the axis of arc chamber b tubular, and capillary c is communicated with vacuum chamber d, vacuum system e is used for vacuumizing vacuum chamber d;
Prepulsing isolation inductance h is connected between capillary c and prepulsing power supply g.
The main pulse current waveform installed before and after main pulse isolation inductance is given in Fig. 4.As can be seen from Figure 4, when not using main pulse to isolate inductance, main pulse electric current is RLC oscillating discharge waveform, and current attenuation is slower.After using isolation inductance main pulse isolation inductance, can find out and almost to overlap completely with former main pulse electric current at first half period main pulse electric current, this illustrates to install newly isolates inductance and can not have an impact to the plasma compression process in capillary.Can find out in scope after 400ns, use the electric current after main pulse isolation inductance to be RC discharge waveform, current amplitude is almost reduced to zero when 1000ns, and oscillation amplitude and cycle diminish simultaneously simultaneously.This illustrates that the annular gas switch newly added in main pulse isolation inductance is in about 400ns conducting, and is directly discharged by ground wire by the residual electricity magnetic energy be stored in capillary and water capacitance, reduces the interference of dump energy to control system.Experimental result shows, after installing isolation inductance main pulse isolation inductance, master synchronizer and prepulsing form circuit can normally associated working.The electromagnetic interference produced when main pulse power control circuit is not easily discharged after using new isolation inductance is destroyed, and the stability of a system strengthens.These results suggest that, we are on the basis of capillary discharging device, design and have made the isolation inductance effectively isolating main pulse electric current, and completing debugging efforts.
Claims (5)
1. prepulsing isolation inductance, it is characterized in that, this inductance comprises wire-wound inductance (1), nylon insulating sleeve (2), branch sleeve (3), steel flange (4), Metallic rod (5), annular gas discharge switch (6), nylon branch sleeve (7), No. two Metallic rod (8) and a nylon rod;
Wire-wound inductance (1) is wrapped on nylon rod, nylon insulating sleeve (2) is enclosed within the outside of wire-wound inductance (1), branch sleeve (3) is enclosed within the outside of nylon insulating sleeve (2), the height of branch sleeve (3) is less than the height of nylon insulating sleeve (2), and the upper and lower side of branch sleeve (3) has outward extending edge, and be describedly outward extendingly evenly provided with manhole along upper, the lower end of branch sleeve (3) is coaxially installed with steel flange (4), through hole on branch sleeve (3) is corresponding with the through hole on steel flange (4), the bottom of nylon insulating sleeve (2) is stuck on the shoulder in steel flange (4), one end connecting line of a Metallic rod (5) is around one end of inductance (1), annular gas discharge switch (6) is connected between a Metallic rod (5) and No. two Metallic rod (8), and annular gas discharge switch (6) and No. two Metallic rod (8) are positioned at steel flange (4), lower end and the nylon branch sleeve (7) of rust steel flange (4) are bolted, there is outward extending edge the upper end of described nylon branch sleeve (7), the bottom of nylon branch sleeve (7) is airtight, the other end of No. two Metallic rod (8) is by the bottom of nylon branch sleeve (7) through nylon branch sleeve (7).
2. prepulsing isolation inductance according to claim 1, it is characterized in that, the lower surface on outward extending edge, branch sleeve (3) lower end is provided with toroidal cavity, this groove is positioned at the inner side of manhole, be provided with air seal cushion rubber in groove, air seal cushion rubber is used for sealing the connection of branch sleeve (3) and steel flange (4).
3. prepulsing isolation inductance according to claim 1, it is characterized in that, the lower end of steel flange (4) is provided with toroidal cavity, this groove is positioned at the inner side of bolt, be provided with air seal cushion rubber in groove, this air seal cushion rubber is used for the junction sealing by steel flange (4) and nylon branch sleeve (7).
4. prepulsing isolation inductance according to claim 1, it is characterized in that, it also comprises rosette, this rosette is fixedly mounted on No. two Metallic rod (8), No. two Metallic rod (8) are through the center of circle of rosette, the lower surface of this rosette and the upper surface at the bottom of nylon branch sleeve (7) cylinder are fitted, and the lower surface of rosette is provided with donut connected in star, air seal cushion rubber is provided with in toroidal cavity, this air seal cushion rubber is used for sealing the connection of No. two Metallic rod (8) with the bottom of nylon branch sleeve (7).
5. utilize the capillary discharging soft x-ray laser device of the prepulsing isolation inductance described in claim 1, this device comprises main pulse power supply (a), arc chamber (b), capillary (c), vacuum chamber (d), vacuum system (e), detector (f) and prepulsing power supply (g); Main pulse power supply (a) signal output part connects one end of capillary (c) and the output of prepulsing power supply (g) simultaneously, capillary (c) is placed in arc chamber (b), arc chamber (b) is tubular confined space, capillary (c) is fixed on the axis of arc chamber (b) tubular, and capillary (c) is communicated with vacuum chamber (d), vacuum system (e) is for vacuumizing vacuum chamber (d);
It is characterized in that, prepulsing isolation inductance (h) is connected between capillary (c) and prepulsing power supply (g).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310589661.8A CN103559993B (en) | 2013-11-20 | 2013-11-20 | Prepulsing is isolated inductance and is utilized the capillary discharging soft x-ray laser device of this inductance |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310589661.8A CN103559993B (en) | 2013-11-20 | 2013-11-20 | Prepulsing is isolated inductance and is utilized the capillary discharging soft x-ray laser device of this inductance |
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| CN103559993A CN103559993A (en) | 2014-02-05 |
| CN103559993B true CN103559993B (en) | 2015-09-16 |
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| CN104619105B (en) * | 2015-02-16 | 2017-03-01 | 哈尔滨工业大学 | The arc chamber of Xe medium capillary discharging detection EUV light source |
| CN112911784B (en) * | 2021-02-05 | 2022-08-26 | 北京大学 | Focusing device of laser acceleration pulse proton beam |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4937832A (en) * | 1989-06-30 | 1990-06-26 | Rocca Jorge J | Methods and apparatus for producing soft x-ray laser in a capillary discharge plasma |
| US5335238A (en) * | 1992-08-10 | 1994-08-02 | The University Of Iowa Research Foundation | Apparatus and method for guiding an electric discharge with a magnetic field |
| US6026099A (en) * | 1996-07-31 | 2000-02-15 | Tetra Corporation | Pulse forming x-ray laser |
| US6356618B1 (en) * | 2000-06-13 | 2002-03-12 | Euv Llc | Extreme-UV electrical discharge source |
| CN101115345A (en) * | 2007-07-31 | 2008-01-30 | 哈尔滨工业大学 | Capillary discharging X-laser device using blumlein line and eliminating prepulse |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7251263B2 (en) * | 2005-05-23 | 2007-07-31 | Colorado State University Research Foundation | Capillary discharge x-ray laser |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4937832A (en) * | 1989-06-30 | 1990-06-26 | Rocca Jorge J | Methods and apparatus for producing soft x-ray laser in a capillary discharge plasma |
| US5335238A (en) * | 1992-08-10 | 1994-08-02 | The University Of Iowa Research Foundation | Apparatus and method for guiding an electric discharge with a magnetic field |
| US6026099A (en) * | 1996-07-31 | 2000-02-15 | Tetra Corporation | Pulse forming x-ray laser |
| US6356618B1 (en) * | 2000-06-13 | 2002-03-12 | Euv Llc | Extreme-UV electrical discharge source |
| CN101115345A (en) * | 2007-07-31 | 2008-01-30 | 哈尔滨工业大学 | Capillary discharging X-laser device using blumlein line and eliminating prepulse |
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