CN103558741B - Method for machining detection plate - Google Patents
Method for machining detection plate Download PDFInfo
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- CN103558741B CN103558741B CN201310588967.1A CN201310588967A CN103558741B CN 103558741 B CN103558741 B CN 103558741B CN 201310588967 A CN201310588967 A CN 201310588967A CN 103558741 B CN103558741 B CN 103558741B
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Abstract
The invention discloses a machining and manufacturing process for a detection plate of a photo-etching machine, and particularly relates to a method for machining a detection plate. The method comprises the following steps: (1) measuring positioning marks of the detection plate, and processing data; (2) adjusting the reference accuracy of X and Y directions of a machining center machine tool and a clamp, and fixing a workpiece of the detection plate; (3) machining X-direction and Y-direction reference surfaces of the detection plate, and calibrating the accuracy of the reference surfaces and the reference of a cursor; (4) pre-machining all characteristics of the detection plate, and checking and verifying parameters of the machining center machine tool; (5) roughly machining an outline and internal characteristics; and (6) finely machining the outline and the internal characteristics. According to the invention, the rejection rate is reduced, the machined detection plate is high in quality, and requirements of photo-etching are met.
Description
Technical field
The present invention relates to litho machine, particularly a kind of job operation of the detecting plate for substep projection mask aligner, this detecting plate is mainly used in the position alignment of substep projection mask aligner snoop tag, and this directly has influence on silicon chip in substep projection mask aligner to position grating auto-alignment to achievement.
Background technology
The equipment of current American-European countries processing detecting plate is the special processing equipment adding on-line measurement device in accurate milling Cutter Body Processing with Machining Center center machine tool, and this kind equipment is also not for sale at present.Can to measure processed size in part process with this kind of special processing equipment and by data close-loop feedback correction processing center machine tool machined parameters, realize high-precision milling processing, be easy to reach relative 4 the cross mark dimensional accuracies in 3 Ge Kongwei centers and be better than the requirement that 0.04mm, detecting plate edge reference and 4 cross mark dimensional accuracies be better than 0.04mm.And the DATA REASONING correction of domestic processing detecting plate needs part to take off from processing center machine tool, the surveying instrument be separated obtains data and goes corrective parameter, cause process data deviation, make processed finished products rate low, the requirement of 90nm litho machine can not be met far away.
Summary of the invention
The object of the present invention is to provide a kind of job operation of the detecting plate for substep projection mask aligner, relative 4 the cross mark dimensional accuracies in center of position, 3 holes of the detecting plate of the method processing are better than the requirement that 0.04mm, detecting plate edge reference and 4 cross mark dimensional accuracies are better than 0.04mm, meet litho machine to position grating auto-alignment requirement.
Technical solution of the present invention is as follows:
For a job operation for the detecting plate of substep projection mask aligner, its feature is, the method comprises the following steps:
1) in clean workroom, staff brings antistatic gloves, the two plane electrostatic prevention optical glass cleaning wiping cloth up and down of the detecting plate glued together are dipped in upper alcohol and carries out wiping, carefully surface dirt is watched under detecting plate being placed on the light of 100w in wiping process, until without the visible dust of human eye, wiping is complete;
2) be put on tool microscope translation stage by the detecting plate that wiping is good, upwards, adjustment irradiation source, side, makes the optical axis in irradiation source, side and the angle of microscopical axis be less than 20 degree to coated surface;
3) the distance A at 4 cross marks of detecting plate coated surface and detecting plate edge, B, C, D is measured respectively each 3 times with tool microscope, notice that measuring requirement is: cross mark live width is 0.01mm, when reading data, range estimation is peeked according to live width centre position, after valid data precision controlling to radix point 3, be then averaging to obtain A, B, C, D:
A=（A1+A2+A3）/3
B=（B1+B2+B3）/3
C=（C1+C2+C3）/3
D=（D1+D2+D3）/3；；
4) measure the verticality on detecting plate four limit respectively with tool microscope, numerical value is less than 0.1mm, if be greater than 0.1mm, will revise below during machining benchmark;
5) fixture level is installed on processing center machine tool work top, adjustment processing center machine tool X is to, Y-direction and described fixture X side reference edge, Y-direction side reference edge, pre-fix fixture, be less than 0.02mm with the X of lever indicator adjustment fixture to the error of side reference edge, Y-direction side reference edge;
6) lever indicator is replaced by dial test indicator, the X of adjustment fixture is less than 0.008mm to side reference edge (1) and processing center machine tool X to precision, adjust Y-direction side reference edge (3) of fixture and processing center machine tool Y-direction precision is less than 0.008mm;
7) described detecting plate level is put on the level reference of described fixture, make the X of described detecting plate to side reference edge near the X of processing center machine tool to reference edge, the Y-direction side reference edge of detecting plate is near the Y-direction reference edge of processing center machine tool, then compress with 4 horizontal press strips, compaction pressure is 2 ~ 3kg;
8) work in-process heart machine tool chief axis is installed Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 5mm
Diamond grit: 180 ~ 280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.8 ~ 1mm
The speed of mainshaft: 2300 ~ 3000rpm
Speed of feed: 80 ~ 100mm/min
The degree of depth amount of feeding: 0.04 ~ 0.06mm;
9) A, B, C, D according to step 3), the detecting plate X described in processing is to reference edge and Y-direction reference edge, and every limit is reserved 0.5mm and adjusted surplus, and namely distance cross mark is of a size of 2.5+0.5=3mm, and working depth is 1mm;
10) take off described detecting plate, measure distance a, b, c, the d at 4 cross marks of detecting plate coated surface and detecting plate edge with tool microscope respectively, when a, b, c, d are less than or equal to 0.01mm, enter step 11); If a, b, c or d are greater than 0.015mm, then turn back to step 7);
11) detecting plate profile and feature 1, feature 2 is processed:
Feature 1 is the concentric circles counterbore of 3 the diameter 6mm degree of depth 1mm being positioned at detecting plate three bights, 1 limit of concentric circles counterbore is provided with 1 breach. and the center of circle of concentric circles counterbore and the distance at detecting plate edge are determined by design drawing, namely respectively with X reference edge size t1y1, t1y2, with Y reference edge size t1x1, t1x2;
Feature 2 is 1 square hole being positioned at the 6x6mm in the middle of detecting plate, and the party's pitch-row bottom surface distance is 0.5mm, and the distance at this square hole and edge is determined by design drawing, namely with X reference edge size t2y1, with Y reference edge size t2x;
By above-mentioned requirements dimensioned detecting plate profile and feature 1, feature 2:
12) take off detecting plate tool microscope and measure cross mark and marginal dimension; By the size of three-dimensional coordinates measurement feature, meet the requirements, enter step 13), return step 11) correction as undesirable;
13) process detecting plate profile and feature 1, feature 2 on request, locate allowance 0.4mm bottom feature 2, detecting plate profile and allowance 0.15mm monolateral with feature thereof;
14) work in-process heart machine tool chief axis is changed Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 3mm
Grinding-head handle footpath size: 3mm
Diamond grit: 180 ~ 280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.4 ~ 0.6mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 60 ~ 80mm/min
The degree of depth amount of feeding: 0.02 ~ 0.03mm;
By dimensional requirement the processing feature 1 of detecting plate, the fillet of feature 2, monolateral allowance 0.1mm;
15) work in-process heart machine tool chief axis is changed Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 6mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.5 ~ 0.8mm
The speed of mainshaft: 2300 ~ 3000rpm
Speed of feed: 50 ~ 60mm/min
The degree of depth amount of feeding: 0.02 ~ 0.03mm;
By dimensional requirement finishing detecting plate external form to size;
16) work in-process heart machine tool chief axis is changed Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3 ~ 0.5mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 50 ~ 60mm/min
The degree of depth amount of feeding: 0.015 ~ 0.025mm;
By the fillet of dimensional requirement institute finishing detecting plate feature 1, feature 2 to size;
17) processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3 ~ 0.5mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 30 ~ 50mm/min
The degree of depth amount of feeding: 0.01 ~ 0.02mm;
By the feature 2 of dimensional requirement finishing detecting plate, bottom allowance 0.2mm
18) processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.2 ~ 0.3mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 20 ~ 40mm/min
The degree of depth amount of feeding: 0.007 ~ 0.015mm;
By dimensional requirement finishing detecting plate feature 2, bottom allowance 0.1mm;
19) processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.15 ~ 0.2mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 10 ~ 20mm/min
The degree of depth amount of feeding: 0.005 ~ 0.08mm;
By the feature of dimensional requirement finishing detecting plate to size;
20) take off detecting plate tool microscope and measure cross mark and marginal dimension; Use three-dimensional coordinates measurement characteristic dimension; The bottom thickness Assurance of Size 0.5 ± 0.04mm of described detecting plate machining feature 2 does not break; Relative 4 the cross mark dimensional accuracies in Kong Wei center of described detecting plate feature 1 are better than 0.04mm; Detecting plate edge reference and 4 cross mark dimensional accuracies of described detecting plate processing are better than 0.04mm;
21) detecting plate processed is packed, packaged detecting plate is placed in clean container preserve stand-by.
Compared with prior art, the invention has the beneficial effects as follows:
The processing of usual detecting plate generally adopts edge to origin reference location mode, and higher to detection datum plate morpheme dimensional requirement, calibration location is only carried out in roughing and finishing in process location, has dependence very by force to operating personnel; In 6x6 square hole working process, need strict technical process control, directly affect passing rate of processing.
1, the invention solves following problem:
★ tool microscope, step measurement locating and machining mark, and carry out rationally processing drawing locating and machining data exactly to data;
★ carries out preprocessing location to each processing emery wheel, guarantees that process tool error does not affect Workpiece Machining Accuracy;
The strict controlled working technique of ★, adopts the substep process control such as preprocessing, roughing, finishing, superfinishing, ensures the quality requirements of emphasis processing 6x6 center square hole;
★ reduces production cost, improves product percent of pass, meets high-quality requirement.
2, adopt detecting plate job operation of the present invention, can guarantee that the detecting plate processed meets steppers completely to position grating auto-alignment requirement.
Accompanying drawing explanation
Fig. 1 is the front view of the detecting plate that the present invention processes.
Fig. 2 is the cut-open view of the detecting plate that the present invention processes.
The front view of Fig. 3 detecting plate frock.
Fig. 4 is the technical requirement figure of the detecting plate that the present invention processes.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but should not limit the scope of the invention with this.
In order to the worker-house temperature and humidity residing for preventing from gluing together is on the solution of impact of gummed, the temperature in clean workroom is 20 ~ 26 DEG C ± 0.1 DEG C, and humidity is 50 ~ 70%, and normal atmosphere pressure is carried out;
1, the measurement of detecting plate telltale mark and data processing is carried out, institute obtains measuring numerical value A, B, C, D precision and reaches ± and 0.01, meet the accuracy requirement of detecting plate processing.It is characterized in that, the method comprises the following steps:
In clean workroom, staff brings antistatic gloves, the two plane electrostatic prevention optical glass cleaning wiping cloth up and down of the detecting plate glued together are dipped in upper alcohol and carries out wiping, carefully surface dirt is watched under detecting plate being placed on the light of 100w in wiping process, until without the visible dust of human eye, wiping is complete;
Be put on tool microscope by the detecting plate that wiping is good, coated surface upwards.Adjustment irradiation source, side, makes the optical axis in irradiation source, side and the angle of microscope central axis be less than 20 degree;
Measure 4 cross marks and detecting plate Edge Distance A, B, C, D of detecting plate coated surface respectively with tool microscope, cross mark live width is 0.01mm, and when reading data, range estimation is according to the peek of live width centre position, after valid data precision controlling to radix point 3;
Measure the verticality on detecting plate four limit respectively with tool microscope, numerical value is less than 0.01mm, if be greater than 0.01mm, will revise below during machining benchmark;
4 numerical value A, B, C, D respectively measure 3 times, measure after being averaging after numerical value is added namely draw A, B, C, D by 3 times;
A=（A1+A2+A3）/3
B=（B1+B2+B3）/3
C=（C1+C2+C3）/3
D=（D1+D2+D3）/3;
2, adjust processing center machine tool X, Y-direction and detecting plate workholder reference surface precision and fix detecting plate with pressing plate, guaranteeing the positioning precision of each handling.
Fixture level is installed on processing center machine tool work top, adjustment processing center machine tool X to side reference edge, Y-direction and fixture X to side reference edge, Y-direction side reference edge, pre-fix fixture, see Fig. 2.0.02mm is less than to side reference edge, Y-direction side reference edge precision with lever indicator adjustment fixture X;
Lever indicator is replaced by dial test indicator, adjustment fixture X is less than 0.008mm with processing center machine tool X to precision to side reference edge 1, adjust fixture Y-direction side reference edge 3 and processing center machine tool Y-direction precision is less than 0.008mm;
Detecting plate is put on fixture level reference according to Fig. 2 position level, detecting plate X to side reference edge 1 near processing center machine tool X to reference edge, then detecting plate Y-direction side reference edge 3 compresses with 4 horizontal press strips 2 near processing center machine tool Y-direction reference edge 3, and compaction pressure is 2 ~ 3kg;
3, preprocessing detecting plate X reference field, Y-direction reference field, adjustment processing center machine tool X, Y-direction and detecting plate workpiece cross mark line precision, meet the precision processing of detecting plate;
Work in-process heart machine tool chief axis installs Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 5mm
Diamond grit: 180 ~ 280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.8 ~ 1mm
The speed of mainshaft: 2300 ~ 3000rpm
Speed of feed: 80 ~ 100mm/min
The degree of depth amount of feeding: 0.04 ~ 0.06mm;
According to 4 numerical value A, B, C, D that step draws, preprocessing detecting plate X, Y reference edge, reserves 0.5mm according to the every limit of X, Y reference edge of Fig. 4 dimensional requirement processing and adjusts surplus, and namely distance cross mark is of a size of 2.5+0.5=3mm.Working depth 1mm;
Take off detecting plate, measure 4 cross marks and detecting plate Edge Distance a, b, c, d of detecting plate coated surface with tool microscope respectively, make a, b, c, d be less than or equal to 0.01mm.A, b or c, d difference turn back to step when being also greater than 0.015mm;
4, preprocessing detecting plate profile and all features, the checking correctness of job sequence and the duty of bistrique;
According to Fig. 3,4 dimensional requirement processing detecting plate profiles and feature 1, feature 2 to size:
Take off detecting plate tool microscope and measure cross mark and marginal dimension; By all the other characteristic dimensions of three-dimensional coordinates measurement.Return step as undesirable (11) to revise;
Process detecting plate profile and feature 1 according to Fig. 3,4 dimensional requirements, feature 2 is shown in figure (2).0.5mm place allowance 0.4mm bottom feature 2.Detecting plate profile and allowance 0.15mm monolateral with feature thereof;
Work in-process heart machine tool chief axis changes Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 3mm
Grinding-head handle footpath size: 3mm
Diamond grit: 180 ~ 280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.4 ~ 0.6mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 60 ~ 80mm/min
The degree of depth amount of feeding: 0.02 ~ 0.03mm;
Shaping according to the fillet of Fig. 3,4 dimensional requirement processing detecting plate features 1, feature 2, monolateral allowance 0.1mm.(bottom feature 3 except 0.5mm);
Work in-process heart machine tool chief axis changes Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 6mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.5 ~ 0.8mm
The speed of mainshaft: 2300 ~ 3000rpm
Speed of feed: 50 ~ 60mm/min
The degree of depth amount of feeding: 0.02 ~ 0.03mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate external forms to size;
Work in-process heart machine tool chief axis changes Ni-based natural diamond bistrique, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3 ~ 0.5mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 50 ~ 60mm/min
The degree of depth amount of feeding: 0.015 ~ 0.025mm;
According to the fillet of Fig. 3,4 dimensional requirement finishing detecting plate features 1, feature 2 to size;
Processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3 ~ 0.5mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 30 ~ 50mm/min
The degree of depth amount of feeding: 0.01 ~ 0.02mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate features, bottom allowance 0.2mm
Processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.2 ~ 0.3mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 20 ~ 40mm/min
The degree of depth amount of feeding: 0.007 ~ 0.015mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate features, bottom allowance 0.1mm;
Processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.15 ~ 0.2mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 10 ~ 20mm/min
The degree of depth amount of feeding: 0.005 ~ 0.08mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate features to size;
Take off detecting plate tool microscope and measure cross mark and marginal dimension; By all the other characteristic dimensions of three-dimensional coordinates measurement, the square hole bottom thickness Assurance of Size 0.5 ± 0.04mm of described detecting plate processing 6x6 does not break; Relative 4 the cross mark dimensional accuracies in 3 Ge Kongwei centers of described detecting plate processing are better than 0.04mm; Detecting plate edge reference and 4 cross mark dimensional accuracies of described detecting plate processing are better than 0.04mm;
The detecting plate processed is packed, packaged detecting plate is placed in clean container preserve stand-by.
Claims (8)
1. for a job operation for the detecting plate of substep projection mask aligner, it is characterized in that, the method comprises the following steps:
1) in clean workroom, staff brings antistatic gloves, the two plane electrostatic prevention optical glass cleaning wiping cloth up and down of the detecting plate glued together are dipped in upper alcohol and carries out wiping, carefully surface dirt is watched under detecting plate being placed on the light of 100w in wiping process, until without the visible dust of human eye, wiping is complete;
2) be put on tool microscope translation stage by the detecting plate that wiping is good, upwards, adjustment irradiation source, side, makes the optical axis in irradiation source, side and the angle of microscopical axis be less than 20 degree to coated surface;
3) measure the distance A at 4 cross marks of detecting plate coated surface and detecting plate edge, B, C, D respectively each 3 times with tool microscope, then ask the mean value of A, B, C, D:
A＝(A1+A2+A3)/3
B＝(B1+B2+B3)/3
C＝(C1+C2+C3)/3
D＝(D1+D2+D3)/3；
4) measure the verticality on detecting plate four limit respectively with tool microscope, numerical value is less than 0.1mm, if be greater than 0.1mm, revises when following process benchmark;
5) fixture level is installed on processing center machine tool work top, adjustment processing center machine tool X is to, Y-direction and described fixture X side reference edge, Y-direction side reference edge, pre-fix fixture, be less than 0.02mm with the X of lever indicator adjustment fixture to the error of side reference edge, Y-direction side reference edge;
6) lever indicator is replaced by dial test indicator, the X of adjustment fixture is less than 0.008mm to side reference edge (1) and processing center machine tool X to precision, adjust Y-direction side reference edge (3) of fixture and processing center machine tool Y-direction precision is less than 0.008mm;
7) described detecting plate level is put on the level reference of described fixture, make the X of described detecting plate to side reference edge (1) near the X of processing center machine tool to reference edge, Y-direction side reference edge (3) of detecting plate is near the Y-direction reference edge (3) of processing center machine tool, then use four horizontal press strips (2) compression, compaction pressure is 2 ~ 3kg;
8) work in-process heart machine tool chief axis is installed Ni-based natural diamond bistrique, processing center machine tool parameter is set;
9) according to step 3) described in A, B, C, D, the detecting plate X described in processing to reference edge and Y-direction reference edge, every limit reserve 0.5mm adjust surplus, namely distance cross mark be of a size of 2.5+0.5=3mm, working depth is 1mm;
10) take off described detecting plate, measure distance a, b, c, the d at 4 cross marks of detecting plate coated surface and detecting plate edge with tool microscope respectively; When a, b, c and d difference is all less than or equal to 0.01mm, enter step 11); If a, b, c or d are greater than 0.015mm, then turn back to step 7);
11) detecting plate profile and counterbore and square hole is processed
12) take off detecting plate tool microscope and measure cross mark and marginal dimension; By the size of three-dimensional coordinates measurement counterbore and square hole, meet the requirements, enter step 13), return step 11 as undesirable) revise;
13) allowance 0.4mm is located bottom square hole, detecting plate profile and the monolateral allowance 0.15mm of counterbore;
14) work in-process heart machine tool chief axis is changed Ni-based natural diamond bistrique, processing center machine tool parameter is set, by the dimensional requirement processing counterbore of detecting plate and the fillet of square hole, monolateral allowance 0.1mm;
15) work in-process heart machine tool chief axis is changed Ni-based natural diamond bistrique, processing center machine tool parameter is set, by dimensional requirement finishing detecting plate external form to size;
16) work in-process heart machine tool chief axis is changed Ni-based natural diamond bistrique, processing center machine tool parameter is set, by the fillet of dimensional requirement institute finishing detecting plate counterbore and square hole to size;
17) processing center machine tool parameter is set, by the counterbore of dimensional requirement finishing detecting plate, bottom allowance 0.2mm;
18) processing center machine tool parameter is set, by dimensional requirement finishing detecting plate square hole, bottom allowance 0.1mm;
19) processing center machine tool parameter is set, by the square hole of dimensional requirement finishing detecting plate to size;
20) take off detecting plate tool microscope and measure cross mark and marginal dimension; Use three-dimensional coordinates measurement characteristic dimension; The bottom thickness Assurance of Size 0.5 ± 0.04mm of described detecting plate processing square hole does not break; Relative four the cross mark dimensional accuracies in Kong Wei center of the special counterbore of described detecting plate are better than 0.04mm; Detecting plate edge reference and four cross mark dimensional accuracies of described detecting plate processing are better than 0.04mm;
21) detecting plate processed is packed, packaged detecting plate is placed in clean container preserve stand-by.
2. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, described step 8) in arrange processing center machine tool parameter specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 5mm
Diamond grit: 180 ~ 280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.8 ~ 1mm
The speed of mainshaft: 2300 ~ 3000rpm
Speed of feed: 80 ~ 100mm/min
The degree of depth amount of feeding: 0.04 ~ 0.06mm.
3. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, described step 14) in arrange processing center machine tool parameter specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 3mm
Grinding-head handle footpath size: 3mm
Diamond grit: 180 ~ 280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.4 ~ 0.6mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 60 ~ 80mm/min
The degree of depth amount of feeding: 0.02 ~ 0.03mm.
4. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, described step 15) in arrange processing center machine tool parameter specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 6mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.5 ~ 0.8mm
The speed of mainshaft: 2300 ~ 3000rpm
Speed of feed: 50 ~ 60mm/min
The degree of depth amount of feeding: 0.02 ~ 0.03mm.
5. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, described step 16) in arrange processing center machine tool parameter specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3 ~ 0.5mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 50 ~ 60mm/min
The degree of depth amount of feeding: 0.015 ~ 0.025mm.
6. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, described step 17) in arrange processing center machine tool parameter specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3 ~ 0.5mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 30 ~ 50mm/min
The degree of depth amount of feeding: 0.01 ~ 0.02mm.
7. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, described step 18) in arrange processing center machine tool parameter specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.2 ~ 0.3mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 20 ~ 40mm/min
The degree of depth amount of feeding: 0.007 ~ 0.015mm.
8. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, described step 19) in arrange processing center machine tool parameter specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280 ~ 400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.15 ~ 0.2mm
The speed of mainshaft: 4000 ~ 4600rpm
Speed of feed: 10 ~ 20mm/min
The degree of depth amount of feeding: 0.005 ~ 0.08mm.
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| CN201310588967.1A CN103558741B (en) | 2013-11-20 | 2013-11-20 | Method for machining detection plate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310588967.1A CN103558741B (en) | 2013-11-20 | 2013-11-20 | Method for machining detection plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103558741A CN103558741A (en) | 2014-02-05 |
| CN103558741B true CN103558741B (en) | 2015-03-11 |
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| CN201310588967.1A Active CN103558741B (en) | 2013-11-20 | 2013-11-20 | Method for machining detection plate |
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| CN104090469B (en) * | 2014-07-15 | 2017-01-25 | 上海现代先进超精密制造中心有限公司 | Bonding and positioning method applied to precision machining of strip glass mirror in asymmetric structure |
| CN104441270B (en) * | 2014-11-24 | 2016-04-20 | 上海现代先进超精密制造中心有限公司 | A kind of adhering method for optical glass punching |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502511B1 (en) * | 1999-04-19 | 2003-01-07 | Ryobi Ltd | Printing plate processing apparatus and method of detecting the location of a register mark on a printing plate |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502511B1 (en) * | 1999-04-19 | 2003-01-07 | Ryobi Ltd | Printing plate processing apparatus and method of detecting the location of a register mark on a printing plate |
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| CN103558741A (en) | 2014-02-05 |
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