CN103558741A - Method for machining detection plate - Google Patents
Method for machining detection plate Download PDFInfo
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- CN103558741A CN103558741A CN201310588967.1A CN201310588967A CN103558741A CN 103558741 A CN103558741 A CN 103558741A CN 201310588967 A CN201310588967 A CN 201310588967A CN 103558741 A CN103558741 A CN 103558741A
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Abstract
The invention discloses a machining and manufacturing process for a detection plate of a photo-etching machine, and particularly relates to a method for machining a detection plate. The method comprises the following steps: (1) measuring positioning marks of the detection plate, and processing data; (2) adjusting the reference accuracy of X and Y directions of a machining center machine tool and a clamp, and fixing a workpiece of the detection plate; (3) machining X-direction and Y-direction reference surfaces of the detection plate, and calibrating the accuracy of the reference surfaces and the reference of a cursor; (4) pre-machining all characteristics of the detection plate, and checking and verifying parameters of the machining center machine tool; (5) roughly machining an outline and internal characteristics; and (6) finely machining the outline and the internal characteristics. According to the invention, the rejection rate is reduced, the machined detection plate is high in quality, and requirements of photo-etching are met.
Description
Technical field
The present invention relates to litho machine, a kind of job operation of the detecting plate for substep projection mask aligner particularly, this detecting plate is mainly used in the position alignment of substep projection mask aligner snoop tag, and this directly has influence on silicon chip in substep projection mask aligner to position grating auto-alignment to achievement.
Background technology
The equipment of the detecting plate of American-European countries's processing is at present on the lathe of accurate milling Cutter Body Processing with Machining Center center, to have increased the special processing equipment of on-line measurement device, and this kind equipment does not also have for sale at present.With this class special processing equipment, can in part process, to processed size, measure and by data close-loop feedback correction processing center machine tool machined parameters, realize high-precision milling processing, be easy to reach relative 4 the cross mark dimensional accuracies in 3 Ge Kongwei centers and be better than the requirement that 0.04mm, detecting plate edge benchmark and 4 cross mark dimensional accuracies are better than 0.04mm.And the DATA REASONING correction of domestic processing detecting plate need to be taken off part from processing center machine tool, on separated surveying instrument, obtain data and go corrective parameter, cause process data deviation, make processed finished products rate low, can not meet the requirement of 90nm litho machine far away.
Summary of the invention
The object of the present invention is to provide a kind of job operation of the detecting plate for substep projection mask aligner, relative 4 the cross mark dimensional accuracies in 3 Ge Kongwei centers of the detecting plate of the method processing are better than the requirement that 0.04mm, detecting plate edge benchmark and 4 cross mark dimensional accuracies are better than 0.04mm, meet litho machine to position grating auto-alignment requirement.
Technical solution of the present invention is as follows:
A job operation for the detecting plate of substep projection mask aligner, its feature is, the method comprises the following steps:
1) in clean workroom, staff is with antistatic gloves, two planes up and down of the detecting plate having glued together are dipped in to upper alcohol by electrostatic prevention optical glass cleaning wiping cloth and carry out wiping, in wiping process, detecting plate is placed under the light of 100w and carefully watches surface dirt, until without the visible dust of human eye, wiping is complete;
2) the good detecting plate of wiping is put on tool microscope translation stage, coated surface upwards, is adjusted side irradiation source, makes the optical axis in side irradiation source and the angle of microscopical axis be less than 20 degree;
3) with tool microscope, measure respectively 4 cross marks of detecting plate coated surface and the distance A at detecting plate edge, B, C, D each 3 times, noting measuring requirement is: cross mark live width is 0.01mm, during reading out data, range estimation is peeked according to live width centre position, valid data precision controls to after radix point 3, is then averaging to obtain A, B, C, D:
A=（A1+A2+A3）/3
B=（B1+B2+B3）/3
C=（C1+C2+C3）/3
D=（D1+D2+D3）/3；；
4) with tool microscope, measure respectively the verticality on detecting plate four limits, numerical value is less than 0.1mm, if be greater than 0.1mm, will be in the back revises during machining benchmark;
5) fixture level is installed on processing center machine tool work top, adjust processing center machine tool X-direction, Y-direction and described fixture X side reference edge, Y-direction side reference edge, pre-fix fixture, with lever indicator, adjust the X-direction side reference edge of fixture, the error of Y-direction side reference edge is less than 0.02mm;
6) lever indicator is replaced by dial test indicator, the X-direction side reference edge (1) of adjusting fixture is less than 0.008mm, the Y-direction side reference edge (3) of adjusting fixture and processing center machine tool Y-direction precision with processing center machine tool X-direction precision and is less than 0.008mm;
7) described detecting plate level is put on the level reference of described fixture, make the X-direction side reference edge of described detecting plate near the X-direction reference edge of processing center machine tool, the Y-direction side reference edge of detecting plate is near the Y-direction reference edge of processing center machine tool, then with 4 horizontal press strips, compress, compaction pressure is 2～3kg;
8) Ni-based natural diamond bistrique is installed on work in-process heart machine tool chief axis, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 5mm
Diamond grit: 180～280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.8～1mm
The speed of mainshaft: 2300～3000rpm
Speed of feed: 80～100mm/min
The degree of depth amount of feeding: 0.04～0.06mm;
9) according to the A described in step 3), B, C, D, detecting plate X-direction reference edge and Y-direction reference edge that processing is described, the reserved 0.5mm in every limit adjusts surplus, apart from cross mark, is of a size of 2.5+0.5=3mm, and working depth is 1mm;
10) take off described detecting plate, with tool microscope, measure respectively 4 cross marks of detecting plate coated surface and distance a, b, c, the d at detecting plate edge, when a, b, c, d are less than or equal to 0.01mm, enter step 11); If a, b, c or d are greater than 0.015mm, turn back to step 7);
11) processing detecting plate profile and feature 1, feature 2:
Feature 2 is 1 square hole that are positioned at the middle 6x6mm of detecting plate, and the party's pitch-row bottom surface distance is 0.5mm, and the distance at this square hole and edge is determined by design drawing, with X reference edge size t2y1, with Y reference edge size t2x;
Press above-mentioned requirements dimensioned detecting plate profile and feature 1, feature 2:
12) take off detecting plate and measure cross mark and marginal dimension with tool microscope; Size by three-dimensional coordinates measurement feature, meets the requirements, and enters step 13), returns to step 11) correction as undesirable;
13) process on request detecting plate profile and feature 1, feature 2, the feature 2 allowance 0.4mm of bottoms places, detecting plate profile and with the monolateral allowance 0.15mm of feature;
14) on work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter be set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 3mm
Grinding-head handle footpath size: 3mm
Diamond grit: 180～280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.4～0.6mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 60～80mm/min
The degree of depth amount of feeding: 0.02～0.03mm;
By the dimensional requirement processing feature 1 of detecting plate, the fillet of feature 2, monolateral allowance 0.1mm;
15) on work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter be set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 6mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.5～0.8mm
The speed of mainshaft: 2300～3000rpm
Speed of feed: 50～60mm/min
The degree of depth amount of feeding: 0.02～0.03mm;
Press dimensional requirement finishing detecting plate external form to size;
16) on work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter be set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3～0.5mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 50～60mm/min
The degree of depth amount of feeding: 0.015～0.025mm;
By the fillet of dimensional requirement institute finishing detecting plate feature 1, feature 2, arrive size;
17) processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3～0.5mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 30～50mm/min
The degree of depth amount of feeding: 0.01～0.02mm;
By the feature 2 of dimensional requirement finishing detecting plate, bottom allowance 0.2mm
18) processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.2～0.3mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 20～40mm/min
The degree of depth amount of feeding: 0.007～0.015mm;
By dimensional requirement finishing detecting plate feature 2, bottom allowance 0.1mm;
19) processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.15～0.2mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 10～20mm/min
The degree of depth amount of feeding: 0.005～0.08mm;
Press the feature of dimensional requirement finishing detecting plate to size;
20) take off detecting plate and measure cross mark and marginal dimension with tool microscope; Use three-dimensional coordinates measurement characteristic dimension; The bottom thickness Assurance of Size 0.5 ± 0.04mm of described detecting plate machining feature 2 does not break; Described relative 4 the cross mark dimensional accuracies in detecting plate feature 1 Kong Wei center are better than 0.04mm; Detecting plate edge benchmark and 4 cross mark dimensional accuracies of described detecting plate processing are better than 0.04mm;
21) detecting plate processing is packed, by packaged detecting plate be placed in clean container, preserve stand-by.
Compared with prior art, the invention has the beneficial effects as follows:
Conventionally the processing of detecting plate generally adopts edge to origin reference location mode, and higher to surveying datum plate morpheme dimensional requirement, location is only calibrated in roughing and finishing in process location, and operating personnel are had to dependence very doughtily; In 6x6 square hole working process, need to have strict technological process to control, directly affect passing rate of processing.
1, the invention solves following problem:
Tool microscope for ★, step measurement processing telltale mark, and data are carried out rationally processing draw and process exactly locator data;
★ carries out preprocessing location to each processing emery wheel, guarantees that process tool error does not affect Workpiece Machining Accuracy;
The strict controlled working technique of ★, adopts the substep process control such as preprocessing, roughing, finishing, superfinishing, guarantees the quality requirements of emphasis processing 6x6 center square hole;
★ has reduced production cost, has improved product percent of pass, meets high-quality requirement.
2, adopt detecting plate job operation of the present invention, can guarantee that the detecting plate of processing meets steppers completely to position grating auto-alignment requirement.
Accompanying drawing explanation
Fig. 1 is the front view of the detecting plate processed of the present invention.
Fig. 2 is the cut-open view of the detecting plate processed of the present invention.
The front view of Fig. 3 detecting plate frock.
Fig. 4 is the technical requirement figure of the detecting plate processed of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but should not limit the scope of the invention with this.
In order to prevent gluing together the solution of residing worker-house temperature and humidity on the impact of gummed, the temperature in clean workroom is 20～26 ℃ ± 0.1 ℃, and humidity is 50～70%, and normal atmosphere is depressed and carried out;
1, carrying out the measurement of detecting plate telltale mark and data processing, resulting measurement numerical value A, B, C, D precision reached ± and 0.01, meet the accuracy requirement of detecting plate processing.It is characterized in that, the method comprises the following steps:
In clean workroom, staff is with antistatic gloves, two planes up and down of the detecting plate having glued together are dipped in to upper alcohol by electrostatic prevention optical glass cleaning wiping cloth and carry out wiping, in wiping process, detecting plate is placed under the light of 100w and carefully watches surface dirt, until without the visible dust of human eye, wiping is complete;
The good detecting plate of wiping is put on tool microscope, and coated surface upwards.Adjust side irradiation source, make the optical axis in side irradiation source and the angle of microscope central axis be less than 20 degree;
With tool microscope, measure respectively 4 cross marks of detecting plate coated surface and detecting plate Edge Distance A, B, C, D, cross mark live width is 0.01mm, and during reading out data, range estimation is according to the peek of live width centre position, and valid data precision controls to after radix point 3;
The verticality of measuring respectively detecting plate four limits with tool microscope, numerical value is less than 0.01mm, if be greater than 0.01mm, will be in the back revises during machining benchmark;
4 numerical value A, B, C, D respectively measure 3 times, after being averaging, draw A, B, C, D after 3 measurement numerical value are added;
A=（A1+A2+A3）/3
B=（B1+B2+B3）/3
C=（C1+C2+C3）/3
D=（D1+D2+D3）/3;
2, adjust processing center machine tool X, Y-direction and detecting plate workholder reference surface precision and fix detecting plate with pressing plate, guaranteeing the positioning precision of each handling.
Fixture level is installed on processing center machine tool work top, adjusts processing center machine tool X-direction side reference edge, Y-direction and fixture X-direction side reference edge, Y-direction side reference edge, pre-fix fixture, see Fig. 2.By lever indicator adjustment fixture X-direction side reference edge, Y-direction side reference edge precision, be less than 0.02mm;
Lever indicator is replaced by dial test indicator, and adjustment fixture X-direction side reference edge 1 is less than 0.008mm with processing center machine tool X-direction precision, adjustment fixture Y-direction side reference edge 3 is less than 0.008mm with processing center machine tool Y-direction precision;
Detecting plate is put on fixture level reference according to Fig. 2 position level, detecting plate X-direction side reference edge 1 is near processing center machine tool X-direction reference edge, then detecting plate Y-direction side reference edge 3 compresses with 4 horizontal press strips 2 near processing center machine tool Y-direction reference edge 3, and compaction pressure is 2～3kg;
3, preprocessing detecting plate X reference field, Y-direction reference field, adjust processing center machine tool X, Y-direction and detecting plate workpiece cross mark line precision, meets the precision processing of detecting plate;
Ni-based natural diamond bistrique is installed on work in-process heart machine tool chief axis, processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 5mm
Diamond grit: 180～280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.8～1mm
The speed of mainshaft: 2300～3000rpm
Speed of feed: 80～100mm/min
The degree of depth amount of feeding: 0.04～0.06mm;
4 numerical value A, the B, C, the D that according to step, draw, preprocessing detecting plate X, a Y reference edge, adjust surplus according to the X of Fig. 4 dimensional requirement processing, the reserved 0.5mm in the every limit of Y reference edge, apart from cross mark, is of a size of 2.5+0.5=3mm.Working depth 1mm;
Take off detecting plate, with tool microscope, measure respectively 4 cross marks of detecting plate coated surface and detecting plate Edge Distance a, b, c, d, make a, b, c, d be less than or equal to 0.01mm.A, b or c, d difference turn back to step while being also greater than 0.015mm;
4, preprocessing detecting plate profile and all features, the checking correctness of job sequence and the duty of bistrique;
According to Fig. 3,4 dimensional requirement processing detecting plate profiles and feature 1, feature 2, arrive size:
Take off detecting plate and measure cross mark and marginal dimension with tool microscope; By all the other characteristic dimensions of three-dimensional coordinates measurement.As undesirable, returning to step (11) revises;
According to Fig. 3,4 dimensional requirements process detecting plate profile and feature 1, feature 2 is shown in figure (2).The feature 2 allowance 0.4mm of 0.5mm place, bottom.Detecting plate profile and with the monolateral allowance 0.15mm of feature;
On work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter be set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 3mm
Grinding-head handle footpath size: 3mm
Diamond grit: 180～280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.4～0.6mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 60～80mm/min
The degree of depth amount of feeding: 0.02～0.03mm;
According to the fillet moulding of Fig. 3,4 dimensional requirement processing detecting plate features 1, feature 2, monolateral allowance 0.1mm.(except feature 3 bottom 0.5mm);
On work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter be set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 6mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.5～0.8mm
The speed of mainshaft: 2300～3000rpm
Speed of feed: 50～60mm/min
The degree of depth amount of feeding: 0.02～0.03mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate external forms to size;
On work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter be set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3～0.5mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 50～60mm/min
The degree of depth amount of feeding: 0.015～0.025mm;
According to the fillet of Fig. 3,4 dimensional requirement finishing detecting plate features 1, feature 2, arrive size;
Processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3～0.5mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 30～50mm/min
The degree of depth amount of feeding: 0.01～0.02mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate features, bottom allowance 0.2mm
Processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.2～0.3mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 20～40mm/min
The degree of depth amount of feeding: 0.007～0.015mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate features, bottom allowance 0.1mm;
Processing center machine tool parameter is set:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.15～0.2mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 10～20mm/min
The degree of depth amount of feeding: 0.005～0.08mm;
According to Fig. 3,4 dimensional requirement finishing detecting plate features to size;
Take off detecting plate and measure cross mark and marginal dimension with tool microscope; By all the other characteristic dimensions of three-dimensional coordinates measurement, square hole bottom thickness Assurance of Size 0.5 ± 0.04mm of described detecting plate processing 6x6 does not break; Relative 4 the cross mark dimensional accuracies in 3 Ge Kongwei centers of described detecting plate processing are better than 0.04mm; Detecting plate edge benchmark and 4 cross mark dimensional accuracies of described detecting plate processing are better than 0.04mm;
The detecting plate processing is packed, by packaged detecting plate be placed in clean container, preserve stand-by.
Claims (8)
1. for a job operation for the detecting plate of substep projection mask aligner, it is characterized in that, the method comprises the following steps:
1) in clean workroom, staff is with antistatic gloves, two planes up and down of the detecting plate having glued together are dipped in to upper alcohol by electrostatic prevention optical glass cleaning wiping cloth and carry out wiping, in wiping process, detecting plate is placed under the light of 100w and carefully watches surface dirt, until without the visible dust of human eye, wiping is complete;
2) the good detecting plate of wiping is put on tool microscope translation stage, coated surface upwards, is adjusted side irradiation source, makes the optical axis in side irradiation source and the angle of microscopical axis be less than 20 degree;
3) with tool microscope, measure respectively 4 cross marks of detecting plate coated surface and the distance A at detecting plate edge, B, C, D each 3 times, then ask the mean value of A, B, C, D:
A=（A1+A2+A3）/3
B=（B1+B2+B3）/3
C=（C1+C2+C3）/3
D=（D1+D2+D3）/3；
4) with tool microscope, measure respectively the verticality on detecting plate four limits, numerical value is less than 0.1mm, if be greater than 0.1mm, when following process benchmark, revises;
5) fixture level is installed on processing center machine tool work top, adjust processing center machine tool X-direction, Y-direction and described fixture X side reference edge, Y-direction side reference edge, pre-fix fixture, with lever indicator, adjust the X-direction side reference edge of fixture, the error of Y-direction side reference edge is less than 0.02mm;
6) lever indicator is replaced by dial test indicator, the X-direction side reference edge (1) of adjusting fixture is less than 0.008mm, the Y-direction side reference edge (3) of adjusting fixture and processing center machine tool Y-direction precision with processing center machine tool X-direction precision and is less than 0.008mm;
7) described detecting plate level is put on the level reference of described fixture, make the X-direction side reference edge (1) of described detecting plate near the X-direction reference edge of processing center machine tool, the Y-direction side reference edge (3) of detecting plate is near the Y-direction reference edge (3) of processing center machine tool, then use four horizontal press strips (2) to compress, compaction pressure is 2～3kg;
8) Ni-based natural diamond bistrique is installed on work in-process heart machine tool chief axis, processing center machine tool parameter is set;
9) according to the A described in step 3), B, C, D, detecting plate X-direction reference edge and Y-direction reference edge that processing is described, the reserved 0.5mm in every limit adjusts surplus, apart from cross mark, is of a size of 2.5+0.5=3mm, and working depth is 1mm;
10) take off described detecting plate, with tool microscope, measure respectively 4 cross marks of detecting plate coated surface and distance a, b, c, the d at detecting plate edge; When a, b, c, d difference are all less than or equal to 0.01mm, enter step 11); If a, b, c or d are greater than 0.015mm, turn back to step 7);
11) processing detecting plate profile and counterbore and square hole
12) take off detecting plate and measure cross mark and marginal dimension with tool microscope; Size with three-dimensional coordinates measurement counterbore and square hole, meets the requirements, and enters step 13), returns to step 11) correction as undesirable;
13) the allowance 0.4mm of place, square hole bottom, the monolateral allowance 0.15mm of detecting plate profile and counterbore;
14) on work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter is set, by the dimensional requirement processing counterbore of detecting plate and the fillet of square hole, monolateral allowance 0.1mm;
15) on work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter is set, press dimensional requirement finishing detecting plate external form to size;
16) on work in-process heart machine tool chief axis, change Ni-based natural diamond bistrique, processing center machine tool parameter is set, by the fillet of dimensional requirement institute finishing detecting plate counterbore and square hole, arrive size;
17) processing center machine tool parameter is set, by the counterbore of dimensional requirement finishing detecting plate, bottom allowance 0.2mm;
18) processing center machine tool parameter is set, by dimensional requirement finishing detecting plate square hole, bottom allowance 0.1mm;
19) processing center machine tool parameter is set, by the square hole of dimensional requirement finishing detecting plate, arrives size;
20) take off detecting plate and measure cross mark and marginal dimension with tool microscope; Use three-dimensional coordinates measurement characteristic dimension; The bottom thickness Assurance of Size 0.5 ± 0.04mm of described detecting plate processing square hole does not break; Described relative four the cross mark dimensional accuracies in the special counterbore Kong Wei center of detecting plate are better than 0.04mm; Detecting plate edge benchmark and four cross mark dimensional accuracies of described detecting plate processing are better than 0.04mm;
21) detecting plate processing is packed, by packaged detecting plate be placed in clean container, preserve stand-by.
2. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, processing center machine tool parameter is set specific as follows in described step 8):
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 5mm
Diamond grit: 180～280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.8～1mm
The speed of mainshaft: 2300～3000rpm
Speed of feed: 80～100mm/min
The degree of depth amount of feeding: 0.04～0.06mm.
3. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, processing center machine tool parameter is set specific as follows in described step 14):
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 3mm
Grinding-head handle footpath size: 3mm
Diamond grit: 180～280#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.4～0.6mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 60～80mm/min
The degree of depth amount of feeding: 0.02～0.03mm.
4. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that, processing center machine tool parameter is set specific as follows in described step 15):
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 5mm
Grinding-head handle footpath size: 6mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.5～0.8mm
The speed of mainshaft: 2300～3000rpm
Speed of feed: 50～60mm/min
The degree of depth amount of feeding: 0.02～0.03mm.
5. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that described step 16) in that processing center machine tool parameter is set is specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3～0.5mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 50～60mm/min
The degree of depth amount of feeding: 0.015～0.025mm.
6. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that described step 17) in that processing center machine tool parameter is set is specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.3～0.5mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 30～50mm/min
The degree of depth amount of feeding: 0.01～0.02mm.
7. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that described step 18) in that processing center machine tool parameter is set is specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.2～0.3mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 20～40mm/min
The degree of depth amount of feeding: 0.007～0.015mm.
8. the job operation of the detecting plate for substep projection mask aligner according to claim 1, is characterized in that described step 19) in that processing center machine tool parameter is set is specific as follows:
Bistrique type: cylinder end face, side grinding type
Bistrique diameter dimension: 1.8mm
Grinding-head handle footpath size: 3mm
Diamond grit: 280～400#
Processing center machine tool cooked mode: screwfeed
Screwfeed amount: 0.15～0.2mm
The speed of mainshaft: 4000～4600rpm
Speed of feed: 10～20mm/min
The degree of depth amount of feeding: 0.005～0.08mm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104090469A (en) * | 2014-07-15 | 2014-10-08 | 上海现代先进超精密制造中心有限公司 | Bonding and positioning method applied to precision machining of strip glass mirror in asymmetric structure |
| CN104441270A (en) * | 2014-11-24 | 2015-03-25 | 上海现代先进超精密制造中心有限公司 | Bonding method for punching hole in optical glass |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502511B1 (en) * | 1999-04-19 | 2003-01-07 | Ryobi Ltd | Printing plate processing apparatus and method of detecting the location of a register mark on a printing plate |
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2013
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502511B1 (en) * | 1999-04-19 | 2003-01-07 | Ryobi Ltd | Printing plate processing apparatus and method of detecting the location of a register mark on a printing plate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104090469A (en) * | 2014-07-15 | 2014-10-08 | 上海现代先进超精密制造中心有限公司 | Bonding and positioning method applied to precision machining of strip glass mirror in asymmetric structure |
| CN104441270A (en) * | 2014-11-24 | 2015-03-25 | 上海现代先进超精密制造中心有限公司 | Bonding method for punching hole in optical glass |
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