CN103543485A - Manufacturing method of planar double-blazed-grating - Google Patents
Manufacturing method of planar double-blazed-grating Download PDFInfo
- Publication number
- CN103543485A CN103543485A CN201310561094.5A CN201310561094A CN103543485A CN 103543485 A CN103543485 A CN 103543485A CN 201310561094 A CN201310561094 A CN 201310561094A CN 103543485 A CN103543485 A CN 103543485A
- Authority
- CN
- China
- Prior art keywords
- grating
- delineation
- district
- icking tool
- glitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention relates to a manufacturing method of a planar double-blazed-grating. The manufacturing method includes the first step that a chromium film and an aluminum film are respectively plated on the surface of a planar glass substrate in sequence after dedusting and cleaning are carried out on the planar glass substrate; the second step that nicking tools are arranged on a grating ruling machine, and the substrate is placed on a worktable; the third step that a motor is started to carry out pre-ruling, pre-ruled groove profiles are observed by means of an electron microscope, then an ideal groove profile can be obtained after the tool angle inclination and relief angle height of the nicking tools are adjusted according to the groove profiles, the substrate is fixed and silicone oil is dripped on the surface of the substrate; the fourth step that the nicking tools are fixed well and formal ruling is carried out, when the grating of a first diffraction angle is ruled, the motor is stopped, the second nicking tool is rotated, selected and fixed to begin to carry out the ruling operation on the grating of a second diffraction angle; the fifth step that the gratings are taken out after the ruling operation and the residual silicone oil is cleaned, and finally the double-blazed-grating is manufactured. The manufacturing method is suitable for common grating ruling machines, and the manufactured gratings are suitable for portable spectrographs which are wide in wave band, small in size and integrated.
Description
Technical field
The present invention relates to a kind of method for making of diffraction optical element, be specifically related to the delineation method for making of plane double balzed grating.
Background technology
Diffraction grating is the extremely extensive and very important high-resolution dispersing optics element of a kind of application, is widely used in the scientific domains such as monochromator, spectral analysis, optical communication technique and light measurement technology.In spectral instrument, grating is the high core parts of accuracy requirement in spectral analysis, after grating is succeeded in developing and is widely applied, prism before diffraction grating has almost replaced and as the dispersion element of spectral instrument of new generation, the impact of the factors such as the precision of grating and diffraction wavelength thereof on science and technology field own profounds such as astronomy, space flight, medicine, geology.
General diffraction grating only has an angle of diffraction, well-known, and most of light-wave energy of incident light all concentrates in zero level direction, but cannot be various wavelength separately, and very faint in the light intensity having in more senior time of dispersion function.In actual applications, all need according to different application by incident light concentration of energy as much as possible in a certain specific order of diffraction time.Therefore just need to be according to the different application condition of grating, calculate grating diffration angle, determine its grooved, make the principal maximum direction of optical grating diffraction and the theoretical order of diffraction of the calculating time direction of whole grating consistent, by diffraction light energy from zero level direction is transferred to designed a specific order time.The spectral intensity detecting from this specific order is maximum, and this phenomenon is glittered exactly, and this grating is called blazed grating.On the other hand, along with scientific and technical development, in order to adapt to spectral instrument to microminiaturized, integrated future development, also more and more to the research of double balzed grating, for example, because double balzed grating can (from ultraviolet to visible waveband) all obtain higher diffraction efficiency on wider wave band, reduce the grating usage quantity of same spectral instrument, simplify the structure of spectrometer, there are more wide market outlook.
At present, the main method for making of double balzed grating is on an icking tool, to grind the blade of two different angles, and this is in the technical larger difficulty that exists of whetting a knife; Other method is to change halfway icking tool, but change like this icking tool, can because generation vibration and icking tool position are connected improper, cause the connection error of groove, cannot guarantee grating diffration wavefront, has reduced grating diffration efficiency; Also have another method to utilize exactly holographic method to make double balzed grating, Chinese invention patent " a kind of method for making of holographic double balzed grating ", the patent No.: 201110318711, the method is convenient to realize, but the etched cutting shape of this holographic production method is difficult to control, groove face is more coarse, and diffraction efficiency is lower, is sometimes difficult to meet the utilization requirement of spectrometer.
Summary of the invention
In order to overcome the defect of above-described prior art, the invention provides a kind of method for making of plane double balzed grating, improved the icking tool replacing method of district while glittering district's precise transition to B of glittering from A, in Renewal process, designed high-precision disc rotary structure, depict once double balzed grating, accurately realize the control of two blazing angles, improve grating diffration efficiency.
In order to achieve the above object, the technical solution used in the present invention is:
A mechanical scratching method for making for double balzed grating, comprises A the glitter delineation of district's grating of district and B of glittering, and concrete steps are:
(1) the A delineation of district's grating of glittering
In a, the flat glass substrate after clean dedusting, successively plate one deck chromium film and one deck aluminium film;
On the cutter bridge of the vertical direction of the rotating circular disk of b, delineation mechanism, two icking tools are installed, every that the required knife edge angular of the knife edge angular Uniform-design of icking tool grinding is consistent;
C, flat glass substrate is placed on and is take on the horizontal calibration workbench that leading screw is haulage gear, starter motor is delineated in advance, grooved with the pre-delineation of electron microscope observation, according to grooved, regulate nose angle inclination and the relief angle height of icking tool to obtain required grooved, then fix substrate, and drip silicone oil on its surface;
It is the horizontal dividing movement of a grating constant as the amount of feeding that d, workbench drive grating substrate, and cutter bridge drives the first icking tool 1 back and forth to do the delineation campaign on vertical direction, so goes round and begins again, and completes the glitter delineation of district's grating of A;
(2) the B delineation of district's grating of glittering
A, A glitter after the delineation of district's grating completes, and stop motor, and the rotating circular disk of two icking tools is equipped with in rotation, the second icking tool 2 is rotated to the position of the second icking tool 1, and fix;
B, starter motor, it is the horizontal dividing movement of a grating constant as the amount of feeding that workbench continue to drive grating substrate, cutter bridge drives the second icking tool 2 back and forth to do the delineation campaign on vertical direction, until complete the glitter delineation of district's grating of B;
(3) complete A the glitter delineation of district's grating of district and B of glittering and take out afterwards the silicone oil of grating erase residual, make double balzed grating.
In A glitters the step a of delineation of district's grating, described flat glass size of foundation base is 100mm * 50mm, and chromium film thickness is 100nm, and aluminium film thickness is 1um.
In above-mentioned steps, on rotating circular disk used, make two knife rests on same straight line, and at the rotating circular disk edge along knife rest perpendicular bisector direction, respectively make the accurate fixedly bayonet socket of the position of icking tool of when rotation.
In above-mentioned steps, from the A of the flat glass substrate district of glittering, to the glitter delineation action in district of B, be delineation continuously.
The horizontal dividing movement of workbench is realized the precision segmentation of screw mandrel by grating scale, and the vertical motion of delineation mechanism is realized delineation action by the be dynamically connected driving belt guiding icking tool of cutter bridge of servomotor band.
Be arranged on the icking tool on the rotating circular disk of delineating mechanism, its vertical range is greater than 50mm.
Compared with prior art, the invention has the beneficial effects as follows: A glitters district to the glitter icking tool transfer process in district of B, keep workbench to maintain static, by calculating the distribution angle of two icking tools, design bayonet socket position that disk rotates and precision and glitter district to the glitter precise transition of district's groove of B to reach A, improved grating diffration efficiency; By the A blazing angle and the B blazing angle that design in advance, the corresponding icking tool blade of milled, greatly reduces the difficulty of grinding double cutting edge on same icking tool, also in delineation process, has greatly improved score quality and dividing precision; The present invention continues to adopt the general structure of common rose engine, only in delineation mechanism, does and redesigns and can be directly installed on original rose engine, has reduced cost.
Accompanying drawing explanation
Fig. 1 is that plane double balzed grating of the present invention is made schematic diagram;
Fig. 2 is double balzed grating delineation schematic top plan view of the present invention;
Fig. 3 is double balzed grating delineation schematic side view of the present invention.
Embodiment
Below in conjunction with accompanying drawing, describe the delineation method for making of plane double balzed grating of the present invention in detail.It will be appreciated by those skilled in the art that embodiment described below is only to exemplary illustration of the present invention, but not for it being made to any restriction.
As shown in Figure 1 to Figure 3, the method for making of plane double balzed grating, concrete steps are:
Take common optical grating graduating machine as making machine, the critical piece of this optical grating graduating machine comprises the workbench that carries out horizontal dividing movement, by the reciprocating delineation of cutter bridge 8 guiding mechanism, in delineation mechanism, design and installation has rotating circular disk 6 structures of fixing two icking tools on same straight line, can change the icking tool of selecting different knife edge angulars according to different grating conditions.To the designing requirement of rotating circular disk 6, are positions of the bayonet socket of disk border corresponding to the knife rest 7 perpendicular bisector directions of two icking tools of calculative determination, the blade that guarantees rotating circular disk 6 rear icking tools is definitely located along the same line, and glitters district's 4 the last item grooves to the glitter precise transition of district's 5 article one grooves of B when guaranteeing to delineate from A.The flat glass substrate 3 of grating to be delineated is fixed on workbench, flat glass substrate 3 is that specification is the flat glass substrate of 100mm * 50mm, after cleaning dedusting, utilize vacuum coating equipment in flat glass substrate 3, to plate respectively one deck chromium film and aluminium film, the thickness of chromium film is 100nm, the thickness of aluminium film is 1um, makes the aluminum membranous layer of flat glass substrate 3 upward during placement.Before formal delineation, must allow respectively the first icking tool 1 and 2 pairs of flat glass substrates 3 of the second icking tool delineate in advance, at observed under electron microscope, delineate in advance rear suprabasil groove shape and be uniformly distributed situation, grooved by pre-delineation regulates the position of icking tool and fixes, then regulates rose engine to write down desirable delineation state.After regulating icking tool, pre-delineation just can start formal delineation.
After adjusting, make icking tool carry out default delineation action to flat glass substrate 3.When default delineation action refers to delineate each groove, the horizontal dividing movement of workbench and the vertical to-and-fro movement of icking tool are all precalculated and be written as the computer software control program of respective specific, and the delineation that automatically performs each groove by program controlled motor is moved.The workbench drive grating substrate that is connected to screw mandrel is the horizontal dividing movement of a grating constant as the amount of feeding, and cutter bridge 8 drives the first icking tools 1 back and forth to do the delineation campaign on vertical direction.So go round and begin again, glitter after the delineation of district's 4 gratings completing A, stop motor, suspend delineation work, the rotating circular disk 6 of two icking tools is equipped with in rotation, the second icking tool 2 is rotated to the position of the first icking tool 1, fixes the position of icking tool.Starter motor, it is the horizontal dividing movement of a grating constant as the amount of feeding that workbench continue to drive grating substrate, cutter bridge 8 drives the second icking tools 2 back and forth to do the delineation campaign on vertical direction, until complete the glitter delineation of district's 5 gratings of B.
As shown in Figure 1, known according to the design parameter of plane double balzed grating, in same substrate, there are two different flare angle θ
1and θ
2, corresponding A glitters respectively, and district 4 and B glitter district 5 in delineation process and the delineation of common grating there is no difference.When A glitters district 4 while being inscribed into the last item groove of setting, now must change the icking tool of different blades, keep maintaining static of workbench, the rotating circular disk 6 of mechanism is delineated in rotation gently, the indoor design of rotating circular disk 6 has steel ball rolling structure to reduce the vibration the produce impact on rose engine in rotation process, and the bayonet socket of disk border corresponding to the knife rest 7 perpendicular bisector directions of utilizing icking tool fixes rotating circular disk 6, to guarantee the invariant position of icking tool in delineation process.Selecting more to finish changing the second icking tool 2 rear motors continues immediately to start the glitter delineation action of district's 5 article one grooves of B from glitter the last item groove in district 4 of A.Keep the fixing of workbench and guarantee that the bayonet socket of rotating circular disk 6 reaches corresponding precision, just can guarantee the glitter precise transition in district 5 of district 4 to B of glittering by A, assurance grating diffration efficiency.In delineation process, the horizontal dividing movement of workbench is realized by the precision indexing of screw mandrel, and the vertical motion of delineation mechanism connects cutter bridge 8 guiding icking tools by driven by motor transmission gear and realizes delineation action.
After whole grating ruling completes, form and there is different optical grating diffractions angle θ
1and θ
2plane double balzed grating, can according to different grating condition, grind the blade of different angles, depict corresponding different angle of diffraction.This plane double balzed grating can provide wider wave band (as UV, visible light wave band), to there being two different diffraction peaks, is particularly suitable for instrument volume and the working environment spectral instrument that has certain requirements.
Wherein, the glitter optical grating diffraction angle of district's 4 correspondences of A is θ
1, the glitter optical grating diffraction angle of district's 5 correspondences of B is θ
2.The initial delineation position of substrate and the amount of feeding of every cutting, and the momentum of walking of the reference position of icking tool and each delineation all calculates input computer control software by theory in advance, by computer control software program controlled motor, determine the horizontal and vertical amount of feeding of each groove, realize the delineation action of each cutting.
Claims (6)
1. a method for making for plane double balzed grating, comprises A the glitter delineation of district (5) grating of district (4) and B of glittering, and it is characterized in that, concrete steps are:
1) the A delineation of district (4) grating of glittering
A, upper one deck chromium film and one deck aluminium film of successively plating of the flat glass substrate (3) after clean dedusting;
Two icking tools of the upper installation of cutter bridge (8) of the vertical direction of the rotating circular disk (6) of b, delineation mechanism, every that the required knife edge angular of the knife edge angular Uniform-design of icking tool grinding is consistent;
C, flat glass substrate (3) is placed on and is take on the horizontal calibration workbench that leading screw is haulage gear, starter motor is delineated in advance, grooved with the pre-delineation of electron microscope observation, according to grooved, regulate nose angle inclination and the relief angle height of icking tool to obtain required grooved, then fix substrate, and drip silicone oil on its surface;
It is the horizontal dividing movement of a grating constant as the amount of feeding that d, workbench drive grating substrate, and cutter bridge drives the first icking tool (1) back and forth to do the delineation campaign on vertical direction, so goes round and begins again, and completes the glitter delineation of district (4) grating of A;
2) the B delineation of district (5) grating of glittering
A, A glitter after the delineation of district (4) grating completes, and stop motor, and the rotating circular disk (6) of two icking tools is equipped with in rotation, the second icking tool (2) is rotated to the position of the second icking tool (1), and fix;
B, starter motor, it is the horizontal dividing movement of a grating constant as the amount of feeding that workbench continue to drive grating substrate, cutter bridge (8) drives the second icking tool (2) back and forth to do the delineation campaign on vertical direction, until complete the glitter delineation of district (5) grating of B;
3) complete A the glitter delineation of district (5) grating of district (4) and B of glittering and take out afterwards the silicone oil of grating erase residual, make double balzed grating.
2. the method for making of the plane double balzed grating of retouching according to claim 1, it is characterized in that, in A glitters the step a of delineation of district (4) grating, described flat glass substrate (3) is of a size of 100mm * 50mm, chromium film thickness is 100nm, and aluminium film thickness is 1um.
3. according to the method for making of the described plane double balzed grating of claim 1, it is characterized in that: in above-mentioned steps, make two knife rests (7) on same straight line rotating circular disk used (6) is upper, and the accurate fixedly bayonet socket of the position of icking tool while respectively making a rotation at rotating circular disk (6) edge along knife rest (7) perpendicular bisector direction.
4. the method for making of plane double balzed grating according to claim 1, is characterized in that: in above-mentioned steps, from the A of flat glass substrate (3) district (4) of glittering, to the glitter delineation action in district (5) of B, be delineation continuously.
5. the method for making of plane double balzed grating according to claim 1, it is characterized in that: the horizontal dividing movement of workbench is realized the precision segmentation of screw mandrel by grating scale, the vertical motion of delineation mechanism is realized delineation action by the be dynamically connected driving belt guiding icking tool of cutter bridge of servomotor band.
6. the method for making of plane double balzed grating according to claim 1, is characterized in that: described in be arranged on the icking tool on the rotating circular disk (6) of delineation mechanism, its vertical range is greater than 50mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310561094.5A CN103543485B (en) | 2013-11-13 | 2013-11-13 | The method for making of plane double balzed grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310561094.5A CN103543485B (en) | 2013-11-13 | 2013-11-13 | The method for making of plane double balzed grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103543485A true CN103543485A (en) | 2014-01-29 |
| CN103543485B CN103543485B (en) | 2015-08-26 |
Family
ID=49967104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310561094.5A Expired - Fee Related CN103543485B (en) | 2013-11-13 | 2013-11-13 | The method for making of plane double balzed grating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103543485B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104237988A (en) * | 2014-09-04 | 2014-12-24 | 兰州空间技术物理研究所 | Blazed grating structure high in diffraction efficiency |
| CN104459857A (en) * | 2014-11-25 | 2015-03-25 | 安徽华东光电技术研究所 | Comb-shaped grating manufacturing method |
| CN105388545A (en) * | 2015-12-14 | 2016-03-09 | 中国科学院长春光学精密机械与物理研究所 | Multi-grating ruling tool parallel interference type grating ruling method |
| RU2578018C1 (en) * | 2015-01-12 | 2016-03-20 | Открытое акционерное общество "Научно-производственное объединение "Государственный институт прикладной оптики" (ОАО "НПО ГИПО") | Method of producing polariser gratings |
| CN109307900A (en) * | 2018-11-26 | 2019-02-05 | 中国科学院长春光学精密机械与物理研究所 | A method of plane double balzed grating is made using rose engine |
| CN111033326A (en) * | 2017-08-18 | 2020-04-17 | 株式会社Lg化学 | Method of manufacturing module having a plurality of pattern regions, module having a plurality of pattern regions according to the method, and method of manufacturing diffraction grating module or mold for diffraction grating module |
| CN114578466A (en) * | 2022-03-11 | 2022-06-03 | 中国科学院长春光学精密机械与物理研究所 | Mesoladder grating blaze angle detection device and detection method thereof |
| WO2022188824A1 (en) * | 2021-03-12 | 2022-09-15 | 华为技术有限公司 | Grating structural member and manufacturing method therefor, grating structure template and associated device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4012843A (en) * | 1973-04-25 | 1977-03-22 | Hitachi, Ltd. | Concave diffraction grating and a manufacturing method thereof |
| JP2001133615A (en) * | 1999-11-09 | 2001-05-18 | Seiko Instruments Inc | Method and device for producing diffraction grating |
| CN102540300A (en) * | 2012-02-16 | 2012-07-04 | 苏州大学 | Method for preparing convex-surface double-blazed grating |
| CN103257383A (en) * | 2013-04-16 | 2013-08-21 | 华中科技大学 | Preparation method of blazing-angle-variable blazed grating and double-blazed grating and products |
-
2013
- 2013-11-13 CN CN201310561094.5A patent/CN103543485B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4012843A (en) * | 1973-04-25 | 1977-03-22 | Hitachi, Ltd. | Concave diffraction grating and a manufacturing method thereof |
| JP2001133615A (en) * | 1999-11-09 | 2001-05-18 | Seiko Instruments Inc | Method and device for producing diffraction grating |
| CN102540300A (en) * | 2012-02-16 | 2012-07-04 | 苏州大学 | Method for preparing convex-surface double-blazed grating |
| CN103257383A (en) * | 2013-04-16 | 2013-08-21 | 华中科技大学 | Preparation method of blazing-angle-variable blazed grating and double-blazed grating and products |
Non-Patent Citations (2)
| Title |
|---|
| 刘正坤等: "软X射线双频光栅设计及制作", 《光学精密工程》, vol. 21, no. 7, 31 July 2013 (2013-07-31) * |
| 徐平等: "双闪耀光栅的计算机设计与制作方法", 《应用激光》, vol. 16, no. 1, 29 February 1996 (1996-02-29), pages 21 - 24 * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104237988A (en) * | 2014-09-04 | 2014-12-24 | 兰州空间技术物理研究所 | Blazed grating structure high in diffraction efficiency |
| CN104459857A (en) * | 2014-11-25 | 2015-03-25 | 安徽华东光电技术研究所 | Comb-shaped grating manufacturing method |
| RU2578018C1 (en) * | 2015-01-12 | 2016-03-20 | Открытое акционерное общество "Научно-производственное объединение "Государственный институт прикладной оптики" (ОАО "НПО ГИПО") | Method of producing polariser gratings |
| CN105388545A (en) * | 2015-12-14 | 2016-03-09 | 中国科学院长春光学精密机械与物理研究所 | Multi-grating ruling tool parallel interference type grating ruling method |
| CN105388545B (en) * | 2015-12-14 | 2018-06-26 | 中国科学院长春光学精密机械与物理研究所 | Multiple grating icking tool Parallel Interferences control formula grating ruling method |
| CN111033326A (en) * | 2017-08-18 | 2020-04-17 | 株式会社Lg化学 | Method of manufacturing module having a plurality of pattern regions, module having a plurality of pattern regions according to the method, and method of manufacturing diffraction grating module or mold for diffraction grating module |
| CN111033326B (en) * | 2017-08-18 | 2021-07-13 | 株式会社Lg化学 | Method of manufacturing module having a plurality of pattern regions, module having a plurality of pattern regions according to the method, and method of manufacturing diffraction grating module or mold for diffraction grating module |
| CN109307900A (en) * | 2018-11-26 | 2019-02-05 | 中国科学院长春光学精密机械与物理研究所 | A method of plane double balzed grating is made using rose engine |
| WO2022188824A1 (en) * | 2021-03-12 | 2022-09-15 | 华为技术有限公司 | Grating structural member and manufacturing method therefor, grating structure template and associated device |
| CN115079321A (en) * | 2021-03-12 | 2022-09-20 | 华为技术有限公司 | Grating structural member and manufacturing method thereof, grating structural template and related equipment |
| CN114578466A (en) * | 2022-03-11 | 2022-06-03 | 中国科学院长春光学精密机械与物理研究所 | Mesoladder grating blaze angle detection device and detection method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103543485B (en) | 2015-08-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103543485B (en) | The method for making of plane double balzed grating | |
| CN101384967B (en) | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | |
| CN101508025B (en) | Processing control method of axial symmetry free-form surface of aspheric surface optical elements | |
| Cheng et al. | Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors | |
| US20050266772A1 (en) | System and method for Ophthalmic lens manufacture | |
| US20200401051A1 (en) | Method for figure correction of optical element by reactive ion etching | |
| JPH08507977A (en) | Method of manufacturing diffractive surface form | |
| CN103688198A (en) | Diffraction grating manufacturing method, spectrophotometer, and semiconductor device manufacturing method | |
| CN105643396A (en) | Milling and grinding method of large-caliber off-axis aspherical lens | |
| CN104551894A (en) | Processing method of L-shaped ZnSe (zinc selenide) turning prism | |
| CN103522348B (en) | Presetting cutter method and proper circle processing method thereof and Fresnel Lenses processing method | |
| Kim et al. | Calibration and optimization of computer-controlled optical surfacing for large optics | |
| CN106405701B (en) | The not up to echelle grating blaze angle of required precision precision machining method again | |
| CN104678889B (en) | A kind of laser interference control method of grating mechanical scratching machine | |
| CN105388545B (en) | Multiple grating icking tool Parallel Interferences control formula grating ruling method | |
| US9925681B2 (en) | Method and machine for etching optical lenses | |
| CN103439762B (en) | The delineation method for making of concave surface blazed grating | |
| CN204819084U (en) | Novel precision optics profile grinder | |
| Qu et al. | A spiral path generation method for achieving uniform material removal depth in aspheric surface polishing | |
| US6478661B2 (en) | Apparatus and method for processing micro-V grooves | |
| CN104924194A (en) | Device for chemically-mechanically grinding and thinning crystals and use method of device | |
| CN108413875A (en) | A kind of adjustable non-contact type high-precision length measuring system of scale | |
| Martin et al. | Status of mirror segment production for the Giant Magellan Telescope | |
| Hsu et al. | Fabrication of micro aspherical lens array using fast tool servo with tool path compensation | |
| EP2887107A1 (en) | Diffraction grating and diffraction grating producing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Huang Yuanshen Inventor after: Su Yangqing Inventor after: Huang Yunbai Inventor after: Ding Weitao Inventor after: Li Baicheng Inventor after: Zhang Dawei Inventor after: Han Pan Inventor after: Xu Banglian Inventor before: Su Yangqing Inventor before: Huang Yuanshen Inventor before: Huang Yunbai Inventor before: Ding Weitao Inventor before: Li Baicheng Inventor before: Zhang Dawei Inventor before: Han Pan Inventor before: Xu Banglian |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: SU YANGQING HUANG YUANSHEN HUANG YUNBAI DING WEITAO LI BAICHENG ZHANG DAWEI HAN SHAN XU BANGLIAN TO: HUANG YUANSHEN SU YANGQING HUANG YUNBAI DING WEITAO LI BAICHENG ZHANG DAWEI HAN SHAN XU BANGLIAN |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150826 Termination date: 20191113 |