CN103523743A - 一种微型摩擦式能量采集器及其制备方法 - Google Patents
一种微型摩擦式能量采集器及其制备方法 Download PDFInfo
- Publication number
- CN103523743A CN103523743A CN201310517933.3A CN201310517933A CN103523743A CN 103523743 A CN103523743 A CN 103523743A CN 201310517933 A CN201310517933 A CN 201310517933A CN 103523743 A CN103523743 A CN 103523743A
- Authority
- CN
- China
- Prior art keywords
- friction
- miniature
- collecting device
- energy collecting
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Micromachines (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310517933.3A CN103523743B (zh) | 2013-10-28 | 2013-10-28 | 一种微型摩擦式能量采集器及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310517933.3A CN103523743B (zh) | 2013-10-28 | 2013-10-28 | 一种微型摩擦式能量采集器及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103523743A true CN103523743A (zh) | 2014-01-22 |
CN103523743B CN103523743B (zh) | 2016-06-29 |
Family
ID=49926170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310517933.3A Expired - Fee Related CN103523743B (zh) | 2013-10-28 | 2013-10-28 | 一种微型摩擦式能量采集器及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103523743B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105186600A (zh) * | 2015-08-13 | 2015-12-23 | 北京大学 | 一种无线自供能充电服 |
CN108429428A (zh) * | 2018-03-08 | 2018-08-21 | 北京大学 | 电磁摩擦复合式多方向振动能量采集器及其制造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN202949379U (zh) * | 2012-12-07 | 2013-05-22 | 纳米新能源(唐山)有限责任公司 | 高功率纳米摩擦发电机 |
CN103121658A (zh) * | 2011-11-21 | 2013-05-29 | 水木智芯科技(北京)有限公司 | 电容式三轴微陀螺仪的硅外延制造方法 |
US8536760B1 (en) * | 2013-01-23 | 2013-09-17 | K-Technology Usa, Inc. | Ball-electric power generator |
CN103337985A (zh) * | 2013-07-12 | 2013-10-02 | 北京大学 | 一种基于横向摩擦的单表面摩擦发电机及其制备方法 |
CN103368451A (zh) * | 2013-01-28 | 2013-10-23 | 国家纳米科学中心 | 一种滑动摩擦纳米发电机 |
-
2013
- 2013-10-28 CN CN201310517933.3A patent/CN103523743B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103121658A (zh) * | 2011-11-21 | 2013-05-29 | 水木智芯科技(北京)有限公司 | 电容式三轴微陀螺仪的硅外延制造方法 |
CN202949379U (zh) * | 2012-12-07 | 2013-05-22 | 纳米新能源(唐山)有限责任公司 | 高功率纳米摩擦发电机 |
US8536760B1 (en) * | 2013-01-23 | 2013-09-17 | K-Technology Usa, Inc. | Ball-electric power generator |
CN103368451A (zh) * | 2013-01-28 | 2013-10-23 | 国家纳米科学中心 | 一种滑动摩擦纳米发电机 |
CN103337985A (zh) * | 2013-07-12 | 2013-10-02 | 北京大学 | 一种基于横向摩擦的单表面摩擦发电机及其制备方法 |
Non-Patent Citations (3)
Title |
---|
刘秀喜等: "《半导体器件制造工艺常用数据手册》", 30 September 1992, article "半导体与金属间的性质" * |
吕道强等: "《先进封装材料》", 31 January 2012, article "纳米材料与纳米封装" * |
王喆垚: "《微系统设计与制造》", 29 February 2008, article "微系统设计与制造" * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105186600A (zh) * | 2015-08-13 | 2015-12-23 | 北京大学 | 一种无线自供能充电服 |
CN105186600B (zh) * | 2015-08-13 | 2017-11-24 | 北京大学 | 一种无线自供能充电服 |
CN108429428A (zh) * | 2018-03-08 | 2018-08-21 | 北京大学 | 电磁摩擦复合式多方向振动能量采集器及其制造方法 |
CN108429428B (zh) * | 2018-03-08 | 2019-12-10 | 北京大学 | 电磁摩擦复合式多方向振动能量采集器及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103523743B (zh) | 2016-06-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103107737B (zh) | 压电摩擦复合式微纳发电机及其制备方法 | |
CN103296991B (zh) | 基于柔性基板的石墨烯高频纳机电谐振器及其制备工艺 | |
Crovetto et al. | An electret-based energy harvesting device with a wafer-level fabrication process | |
CN101944860B (zh) | 压电悬臂梁振动能量采集器及其制备方法 | |
CN102315831B (zh) | 基于石墨烯的纳机电谐振器的制备方法 | |
US9293689B2 (en) | Method of manufacturing a piezoelectric micro energy harvester | |
WO2014089891A1 (zh) | 一种微纳集成发电机及其制备方法 | |
Weisse et al. | Electroassisted transfer of vertical silicon wire arrays using a sacrificial porous silicon layer | |
CN102290968A (zh) | 一种微发电机及其制备方法 | |
CN103337985B (zh) | 一种基于横向摩擦的单表面摩擦发电机及其制备方法 | |
TW200827287A (en) | Method for fabricating micro scratch drive actuator having low driving voltage using silicon substrate with ultra-low resistance | |
CN102185097B (zh) | 压电叠堆式mems振动能量采集器及其制备方法 | |
CN102543239A (zh) | 基于碳纳米管薄膜的三维异质结同位素电池及其制备方法 | |
CN103746602B (zh) | 一种螺旋型压电式能量采集器制备方法 | |
CN106841683A (zh) | 石英摆式加速度计及其制备方法 | |
CN103523743B (zh) | 一种微型摩擦式能量采集器及其制备方法 | |
CN104409561B (zh) | 一种基于微球光学谐振增强的硅薄膜光探测器及其制备方法 | |
CN108584864B (zh) | 一种基于聚酰亚胺的柔性静电驱动mems继电器的制造方法 | |
CN100443893C (zh) | 基于一维纳米材料的微气体传感器的制造方法 | |
CN104310305B (zh) | 基于飞秒激光的大规模阵列石墨烯纳机电谐振器制备方法 | |
CN105025423A (zh) | 一种驻极体电容式超声传感器及其制作方法 | |
CN111952436B (zh) | 一种无源压电自供能单元结构的制备工艺 | |
CN105712290A (zh) | Mems静电驱动器的制作方法 | |
CN101559915A (zh) | 一种制备mems器件的牺牲层工艺方法 | |
CN108002341B (zh) | 电磁式振动能量收集器及其制备方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20160127 Address after: 100871 red third floor, Peking University, Beijing 105 Applicant after: Science & Technology Development Deparatment, Peking University Address before: 100871 Zhongguancun the Summer Palace Road, Beijing, No. 5, No. Applicant before: Peking University |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190709 Address after: 100871 No. 5 Summer Palace Road, Zhongguancun, Haidian District, Beijing Patentee after: Peking University Address before: 100871 Red Third Floor 105, Peking University Patentee before: Science & Technology Development Deparatment, Peking University |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160629 Termination date: 20191028 |