CN1034898C - high-repeat frequency rate high-average power laser - Google Patents
high-repeat frequency rate high-average power laser Download PDFInfo
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- CN1034898C CN1034898C CN94115201A CN94115201A CN1034898C CN 1034898 C CN1034898 C CN 1034898C CN 94115201 A CN94115201 A CN 94115201A CN 94115201 A CN94115201 A CN 94115201A CN 1034898 C CN1034898 C CN 1034898C
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- spark gap
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Abstract
The present invention relates to a pulse electropumping laser with a rotary spark gap switch, which comprises laser discharge electrodes (8, 9), a total reflection bronze mirror (10), an output coupling mirror (7), discharge capacitors (5, 6) and a rotary spark gap switch, wherein the fixed electrode (4) of the switch is connected with the main laser discharge electrodes (8, 9) through the discharge capacitors (5, 6). The mechanical rotary spark gap switch of the present invention can bear large pulse energy and high pulse voltage, and can operate at high repetition frequency; under the condition that the impedance of a discharge circuit is not matched, the rotary spark gap switch is not easy to damage and is easy to repair, and preheating time is not needed in the process of operation. The laser with high repetition frequency and high average power, which is provided by the present invention, can be widely used for infrared photon dissociation, optical pump infrared lasers, laser radars, etc.
Description
The invention belongs to laser, particularly adopt the high repetition frequency of rotary arrester switch, the laser of high-average power.
Widely used high-voltage switch gear is thyratron and gap in the high-voltage pulse electropumbing laser.Under the high-repeat frequency rate high-average power operating condition, thyratron not too is suitable for use in this laser because of the problem of himself.And common arrester switch is had many special requirements.Because adjacent two pulse intervals shorten, the residual substance that ionisation of gas and discharge back form in the ball crack can not fully be got rid of, and makes the stability of switch degenerate even can not work fully owing to " connecting arc ".Under high repetition frequency, the residual gas that need take high velocity air to remove after the discharge replaces live gas, and this need consume additional pump power, and makes device become huge.Increase greatly owing to reuse number of times, after the sparking electrode in ball crack was corroded, its stability descended greatly.
The objective of the invention is to propose a kind of high repetition frequency that uses rotary arrester switch, the laser of high-average power.
Main feature of the present invention is to be that the sparking electrode (6) of fixed electrode (4) by discharge capacity (5) and laser of switch links with rotary gap.
The present invention adopts the high-voltage switch gear of the arrester switch of mechanical rotation as the high-voltage pulse electropumbing laser, and it can bear very big pulse energy and very high pulse voltage.The reliability height can turn round under very high repetition rate.Under the unmatched situation of discharge circuit impedance, not fragile, and for ease of maintenaince.Do not need during work to give the hot time.The high high-average power TEA CO frequently that repeats of the present invention
2Laser provides a kind of new possibility for laser processing technology, and can be widely used in the application such as infrared multiple photon dissociation, optical pumping infrared laser and laser radar.
Fig. 1 is the rotary arrester switch schematic diagram.
1 is the insulation rotating disk among the figure, the 2nd, and motor, the 3rd, rotation electrode, the 4th, fixed electrode.
Fig. 2 is a pulse electric exciting gas laser schematic diagram.
Among the figure the 5, the 6th, main discharge electric capacity, the 7th, output coupling mirror, the 8, the 9th, the main discharge utmost point, the 10th, total reflection bronze mirror.
Fig. 3 is that laser is connected profile with rotary arrester switch.
Among the figure the 8, the 9th, main discharge electrode, the 11st, metallic cavity, the 12nd, preionization spark pin array, the 13rd, heat exchanger, the 14th, tangential blower fan, the 15th, baffler.
Discuss the present invention below in conjunction with accompanying drawing. A pair of by rotary gap shown in Figure 1 Fixedly increase an additional rotation electrode (3) between the sparking electrode (4), rotation electrode (3) is contained in one On the insulating disc (1) of the individual High Rotation Speed that is driven by motor (2), when rotation electrode (3) rotation to solid Fixed electrode switch connection during to the angle orientation of (4), switch disconnects when the rotation electrode turn-off. If the distance between two fixed electrodes is that the height of D rotation electrode is L, then have during switch opens The effect discharging gap is that D-L (discharging gap was D when switch cut out) can establish owing to ratio D/D-L Count very greatly, so reliability is high, can accomplishes 100%, this Gap-Ratios is 1.5~10 suitable.
What Fig. 2 was represented is the laser instrument of a sequence discharge. Will in same laser instrument Several sparking electrode is cascaded, each sparking electrode respectively with several fixed electrodes in One links to each other, and the sparking electrode logarithm should equate with the fixed electrode logarithm.
Sparking electrode in the laser instrument can be from 10 groups of 1 group of as many as. When connecting the fixing of capacitor When electrode linked together, this circuit just became the laser instrument of general synchronous discharge circuit. Adopt the laser instrument of rotary gap sequence discharge can make swashing of high-repeat frequency rate high-average power The light device becomes possibility, and this scheme is not only to CO2Laser instrument is suitable for, and is applicable to other height Repetition rate high power electropumbing laser, such as excimer laser, the CO laser instrument.
Provide an example of the present invention below, the laser that is provided by Fig. 3 is uv preionization transverse excitation atmosphere CO
2Laser is made up of two identical assemblies.Each assembly comprises a pair of main discharge electrode (8) or (9), preionization spark array (12), tangential blower fan (14) and heat exchanger (13).Being assembled in a diameter is that main discharge electrode is processed into special section in the cylindrical outer casing of 60cm steel garden (11), asks the formation uniform electric field at two electrodes, and the discharge activation volume of a 60cm * 2.5cm * 2.5cm is provided.Preionization spark array is made up of 20 pairs of tungsten pins, is positioned at a side of sparking electrode, the downstream of gas stream, and every pair of tungsten pin is being parallel on main discharge electrode (8), (9) by preionization electric capacity on the electricity.Used rotary arrester switch, fixed electrode (4) is 1 pair, rotation electrode is 3, the motor driven of the insulation rotating disk of rotation electrode by a frequency stabilization is installed, the motor rotary speed scalable, maximum (top) speed is 6000 rev/mins, and can obtain laser pulse repetition frequency for maximum motor rotary speed is 300HZ.Main discharge capacitor C (5,6) is by high-voltage DC power supply, and the resonant charging of process inductance is to about two times of supply voltages.Laser gas mixing ratio CO
2: N
2: He=1: 1: 4, add small amount of H
2With CO as the gas catalysis reducing agent, can improve once the life-span of inflation.Adopt tangential blower fan that mixed laser gas is circulated, its structure is very compact.The motor that drives blower fan is positioned at outside the laser cavity.When rotation speed of fan is 3000 rev/mins, in the active region, produce the crossflow of 30m/s, obtaining cleaning coefficient under the 300HZ repetition rate is 4, (cleaning coefficient is the ratio of the air-flow distance that moves in the pulse repetition period and the width that discharges).Laserresonator is made up of the output coupling mirror (7) of a copper concave surface completely reflecting mirror (10) and a part transmission.At a distance of 2.2m.Laserresonator is fixed on the light bridge of being made by invar, and taked glissando, to avoid the influence of the vibration that blower motor produced, laser output average power increases linearly with pulse repetition frequency, when charging voltage is 17kv, obtain peak power output 1.5KW.
Claims (4)
1, a kind of high-repeat frequency rate high-average power laser, comprise discharging capacitor (5,6), laser sparking electrode (8,9), completely reflecting mirror (10), output coupling mirror (7) is characterized in that with rotary gap being that the fixed electrode 4 of switch links to each other with laser sparking electrode (8,9) by discharge capacity (5,6), and rotation electrode (3) is placed on fixed electrode (4) centre, said rotation electrode (3) is fixed on the insulation rotating disk (1), and rotating disk (1) is driven by motor (2).
2, by the described laser of claim 1, it is characterized by the spacing between the fixed electrode and the ratio of the effective discharging gap of gap is 1.5 to 10.
3, by the described laser of claim 1, it is characterized by on the insulation rotating disk 1 and dispose rotation electrode symmetrically, the sparking electrode logarithm of connecting in said fixed electrode number and the laserresonator is corresponding.
4, by claim 1 or 3 described lasers, it is characterized by the sparking electrode number that can connect in the laserresonator is 1-10.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN94115201A CN1034898C (en) | 1994-09-21 | 1994-09-21 | high-repeat frequency rate high-average power laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN94115201A CN1034898C (en) | 1994-09-21 | 1994-09-21 | high-repeat frequency rate high-average power laser |
Publications (2)
Publication Number | Publication Date |
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CN1119357A CN1119357A (en) | 1996-03-27 |
CN1034898C true CN1034898C (en) | 1997-05-14 |
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CN94115201A Expired - Fee Related CN1034898C (en) | 1994-09-21 | 1994-09-21 | high-repeat frequency rate high-average power laser |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102709815B (en) * | 2012-06-04 | 2015-11-18 | 中国工程物理研究院应用电子学研究所 | A kind of rotation electrode gas spark gap switch |
CN103036132A (en) * | 2012-12-12 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | Laser head device with multiple groups of discharge gain units circumferentially distributed |
CN106129785B (en) * | 2016-08-08 | 2019-03-08 | 海南师范大学 | A kind of conducting construction of switch arranged side by side and the pulsed gas laser with the structure |
CN108303627A (en) * | 2018-03-23 | 2018-07-20 | 中国工程物理研究院流体物理研究所 | A kind of test device suitable for capacitor testing |
CN109374535A (en) * | 2018-10-10 | 2019-02-22 | 金华职业技术学院 | A kind of electrochemical experimental device for spectral measurement |
CN111585152B (en) * | 2020-04-08 | 2022-02-08 | 中国科学院微电子研究所 | Electrode for laser cavity, laser system and exposure equipment |
CN114256743A (en) * | 2021-12-21 | 2022-03-29 | 深圳市睿迪医疗器械有限公司 | High-voltage pulse discharge device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0398330A2 (en) * | 1989-05-17 | 1990-11-22 | Mitsubishi Denki Kabushiki Kaisha | Discharge exciting pulse laser device |
RU867263C (en) * | 1980-05-28 | 1993-12-15 | Предприятие П/Я Р-6476 | Pulsed-alternating gas laser |
RU797512C (en) * | 1979-08-06 | 1993-12-15 | Предприятие П/Я Р-6476 | Pulsed-alternating gas laser |
WO1994022187A1 (en) * | 1993-03-25 | 1994-09-29 | British Telecommunications Public Limited Company | A laser |
-
1994
- 1994-09-21 CN CN94115201A patent/CN1034898C/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU797512C (en) * | 1979-08-06 | 1993-12-15 | Предприятие П/Я Р-6476 | Pulsed-alternating gas laser |
RU867263C (en) * | 1980-05-28 | 1993-12-15 | Предприятие П/Я Р-6476 | Pulsed-alternating gas laser |
EP0398330A2 (en) * | 1989-05-17 | 1990-11-22 | Mitsubishi Denki Kabushiki Kaisha | Discharge exciting pulse laser device |
WO1994022187A1 (en) * | 1993-03-25 | 1994-09-29 | British Telecommunications Public Limited Company | A laser |
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CN1119357A (en) | 1996-03-27 |
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