CN103487916B - Based on the off axis paraboloidal mirror control method of high-resolution scientific CCD camera - Google Patents
Based on the off axis paraboloidal mirror control method of high-resolution scientific CCD camera Download PDFInfo
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Abstract
The invention discloses a kind of off axis paraboloidal mirror control method based on high-resolution scientific CCD camera, the method utilizes high-resolution scientific CCD camera, by measuring the near focal point focal spot shapes of laser system outgoing beam after off axis paraboloidal mirror is assembled in real time, monitor adjustment off axis paraboloidal mirror.Largest benefit of the present invention, utilizing this control method to regulate in the process of collimation off axis paraboloidal mirror exactly, without the need to additionally introducing the laser system of visible light wave range, avoiding problems the complicacy of traditional regulation method.Meanwhile, also largely avoid can not the completely the same and regulating error that causes owing to introducing laser beam and former laser system outgoing beam.Meanwhile, because scientific CCD camera not only can be photosensitive to visible ray, also to the light sensation light of the invisible wave bands such as infrared and ultraviolet, can therefore can be used for the adjustment that all kinds of output wave band high power laser system assembles paraboloidal mirror.
Description
Technical field
The present invention relates to superpower ultrafast laser science, particularly a kind of precision regulating method of converging optical element.On the basis that scientific CCD camera measures focal spot, the method for minute adjustment converging optical element---off axis paraboloidal mirror.
Background technology
Ultrashort and ultrahigh laser science is with the interaction of the development of ultrashort and ultrahigh laser technology, ultrashort and ultrahigh laser and material, and the subject being applied as research object in cross discipline and relevant high-tech sector, be the important Disciplinary Frontiers of current basal scientific research.
In this research field, the manufacture of ultrashort and ultrahigh laser system realizes extreme physical condition, and and then the basis of announcement material essence.Ultrashort and ultrahigh laser system is can obtain ultra high power density focus and famous, and thus for ultrashort and ultrahigh laser system, the physical index that people pay close attention to the most is focal spot quality.Because no matter utilize the ultrashort and ultrahigh laser system of any type, really participate in matter interaction be the converging focal point of laser system.As a result, for the research of high field laser science, the adjustment for the off axis paraboloidal mirror of convergent beam is just most important, and the quality of regulation of off axis paraboloidal mirror directly determines finally for the focal spot quality of light-matter interaction.
Relative to dioptric system, due to reflective optics no color differnece, catoptron is often used in the convergence of ultra-short intense laser system pulses light beam.In theory, because parabolic reflective focusing mode has the effect eliminating spherical aberration, therefore in superpower ultrafast laser system, the most typical converging optical element is off axis paraboloidal mirror.For transmissive optical element, we can carry out minute adjustment by transmitted light and reflected light two standards respectively, and therefore degree of regulation is higher.But for reflection type optical element, there is no transmitted light owing to only having reflected light, be therefore difficult to the mode direct accommodation reflex formula optical element with traditional adjustment transmission optical component.And parabolic mirror is almost one of reflective optical devices of the most difficult adjustment.The trickle misalignment of optical axis regulates all can Focal intensity by what greatly reduce focal spot.
Simultaneously, for most of ultrashort and ultrahigh laser system, because used gain media is generally specific type (such as titanium gem crystal), therefore transmitted beam is generally in infrared or other non-visible region, naked eyes are invisible, and this just further increases adjustment difficulty.The way of usual employing is, regulates paraboloidal mirror by means of visible He-Ne light, namely utilizes two parallel He-Ne laser beam datum off axis paraboloidal mirror.Refer to [YeonH.Lee, Alignmentofanoff-axisparabolicmirrorwithtwoparallelHe-Ne laserbeams, 1992,31 (11): 2287-2292].On the one hand, this control method is very complicated, on the other hand, needs extra introducing He-Ne light regulating system in high power laser system.But for the high power laser system of majority, due to the design of system itself and the complicacy of light path thereof, introduce two parallel He-Ne light regulating system wherein very difficult.Particularly, if time convergence off axis paraboloidal mirror is placed in vacuum target chamber, extra introducing laser regulating system is just more difficult.And, because this control method is not the outgoing beam utilizing laser system itself, but regulating paraboloidal mirror by additionally introducing other light beam, inherently can introduce certain error.
Summary of the invention
The object of the invention is to overcome the deficiency that above-mentioned existing adjustment ultrashort and ultrahigh laser system assembles off axis paraboloidal mirror method, directly utilize the outgoing beam of high power laser system, by adopting high-resolution scientific CCD camera to measure focal spot in real time, regulate off axis paraboloidal mirror.This method has simple to operate, the feature that degree of regulation is high.
A kind of off axis paraboloidal mirror control method based on high-resolution scientific CCD camera, the method utilizes high-resolution scientific CCD camera, by measuring the near focal point focal spot shapes of laser system outgoing beam after off axis paraboloidal mirror is assembled in real time, monitor adjustment off axis paraboloidal mirror.
Described method comprises:
A1 system prepares: be fixed on by described off axis paraboloidal mirror (7) on motorized adjustment translation stage (3), motorized adjustment translation stage (3) comprises off-axis angle adjusting knob (4), pitching knob (5), inclination knob (6), off-axis angle adjusting knob (4) can be used for regulating the off-axis angle of off axis paraboloidal mirror (7) by rotating off axis paraboloidal mirror (7), pitching knob (5) is for regulating the pitching of off axis paraboloidal mirror (7), and inclination knob (6) is for regulating tilting of off axis paraboloidal mirror (7); Outgoing beam (2) forms the focus (8) assembled after off axis paraboloidal mirror (7) is assembled, and focus (8) is had high-resolution scientific CCD camera (9) and detects; Described scientific CCD camera (9) is fixed near focus (8), scientific CCD camera (9) is placed in can on the one dimension adjusting bracket of horizontal direction movement, first makes the position measurement of scientific CCD camera (9) at off-focal (8) center slightly can focused spot; The focal spot that departure degree is surveyed with scientific CCD camera (9), the shape that obviously can embody focal spot is in size as the criterion; Mobile electric regulates translation stage (3), makes outgoing beam (2) impinge upon off axis paraboloidal mirror (7) central authorities as far as possible; Front in adjustment off axis paraboloidal mirror (7), load aperture (1) to make outgoing beam (2) for light pencil, horizontal direction is large observes the imaging point of light pencil in scientific CCD camera (9) apart from mobile scientific CCD camera (9), then the pitching knob (5) of off axis paraboloidal mirror (7) is regulated, to make light pencil in scientific CCD camera (9) isometry position imaging;
A2 coarse tuning stage:
First A21 regulates the off-axis angle adjusting knob (4) of motorized adjustment translation stage (3), off axis paraboloidal mirror (7) will rotate around its central axis, and the focal spot shapes made in scientific CCD camera (9) is level or vertical flat hot spot; Now, scientific CCD camera (9) is moved to the front and back of focus (8), require that the focal spot of focus (8) front and rear is orthogonal, if be horizontal flat shaped laser spot before that is: burnt, then defocusedly should be vertical flat hot spot, vice versa;
A22 regulates the inclination knob (6) of motorized adjustment translation stage (3), makes the focal spot of out of focus position as far as possible close to circular;
A23 moves forward and backward scientific CCD camera (9), find the position that focal spot is minimum, this position is focus (8) place of off axis paraboloidal mirror (7), utilize scientific CCD camera (9) to observe the size of focal spot, and record focus (8) place focal spot size;
The A3 accurate adjustment stage:
A31 repeats steps A 21, and before making Jiao, defocused flat hot spot is elongated as far as possible; Repeat steps A 22, make the focal spot of out of focus position as far as possible close to circular, now, can find that the focal spot of out of focus position is little compared with aforesaid focal spot; Repeat steps A 23, record focus place focal spot size;
A32 repeats steps A 31 many times, and when the focus place focal spot size utilizing scientific CCD camera (9) to record no longer reduces, the focal spot namely observed is little as far as possible and when connecing rotund hot spot as far as possible, regulates and terminate.
Therefore described method, because scientific CCD camera not only can be photosensitive to visible ray, also to the light sensation light of the invisible wave bands such as infrared and ultraviolet, can be used for the adjustment that all kinds of output wave band high power laser system assembles paraboloidal mirror.
Largest benefit of the present invention, utilizing this control method to regulate in the process of collimation off axis paraboloidal mirror exactly, without the need to additionally introducing the laser system of visible light wave range, avoiding problems the complicacy of traditional regulation method.Meanwhile, also largely avoid can not the completely the same and regulating error that causes owing to introducing laser beam and former laser system outgoing beam.Meanwhile, because scientific CCD camera not only can be photosensitive to visible ray, also to the light sensation light of the invisible wave bands such as infrared and ultraviolet, can therefore can be used for the adjustment that all kinds of output wave band high power laser system assembles paraboloidal mirror.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that the off axis paraboloidal mirror that the present invention is based on high-resolution scientific CCD camera regulates.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.
(1) first laser system front-end optics to be regulated, with the optical table making outgoing beam 2 be parallel to system.Outgoing beam 2 forms the focus 8 of convergence after off axis paraboloidal mirror 7 is assembled, and focus 8 is had high-resolution scientific CCD camera 9 and detects.
(2) described off axis paraboloidal mirror 7 is fixed on motorized adjustment translation stage 3, motorized adjustment translation stage 3 for precise hard_drawn tuhes off axis paraboloidal mirror 7 position (comprise up and down, left and right and front and back), off-axis angle, tilt direction and pitch orientation.Visible, motorized adjustment translation stage 3 has 6 freedoms of motion.Motorized adjustment translation stage 3 comprises off-axis angle adjusting knob 4, pitching knob 5, inclination knob 6, off-axis angle adjusting knob 4 can be used for regulating the off-axis angle of off axis paraboloidal mirror 7 by rotating off axis paraboloidal mirror 7, pitching knob 5 is for regulating the pitching of off axis paraboloidal mirror 7, and inclination knob 6 is for regulating tilting of off axis paraboloidal mirror 7.
(3) carry out mobile electric by position adjustments knob and regulate translation stage 3, make outgoing beam 2 impinge upon off axis paraboloidal mirror 7 central authorities as far as possible.
(4) before adjustment off axis paraboloidal mirror 7, load aperture 1 to make outgoing beam 2 for light pencil, horizontal direction is large observes the imaging point of light pencil in scientific CCD camera 9 apart from mobile scientific CCD camera 9, then the pitching knob 5 of off axis paraboloidal mirror 7 is regulated, to make light pencil in the imaging of scientific CCD camera 9 isometry position.
(5) described scientific CCD camera 9 is fixed near focus 8, and scientific CCD camera 9 is placed in can on the one dimension adjusting bracket of horizontal direction movement, first makes scientific CCD camera 9 can focused spot in the position measurement at off-focal 8 center slightly.The focal spot that departure degree is surveyed with scientific CCD camera 9, the shape that obviously can embody focal spot is in size as the criterion.Starting stage, scientific CCD camera 9 light-sensitive surface too close to focus 8 and too off-focal 8 be all unfavorable for the collimation of paraboloidal mirror.
(6) coarse tuning stage:
(6.1) first regulate the off-axis angle adjusting knob 4 of motorized adjustment translation stage 3, off axis paraboloidal mirror 7 will rotate around its central axis, and the focal spot shapes made in scientific CCD camera 9 is level or vertical flat hot spot.Now, scientific CCD camera 9 is moved to the front and back of focus 8, require that the focal spot of focus 8 front and rear is orthogonal, if be horizontal flat shaped laser spot before that is: burnt, then defocusedly should be vertical flat hot spot, vice versa.
(6.2) regulate the inclination knob 6 of motorized adjustment translation stage 3, make the focal spot of out of focus position as far as possible close to circular.
(6.3) movable scientific CCD camera 9, find the position that focal spot is minimum, this position is focus 8 place of off axis paraboloidal mirror 7, utilizes scientific CCD camera 9 to observe the size of focal spot, and records focus 8 place focal spot size.
(7) the accurate adjustment stage:
(7.1) repeat step 6.1, before making Jiao, defocused flat hot spot is elongated as far as possible.Repeat step 6.2, make the focal spot of out of focus position as far as possible close to circular, now, can find that the focal spot of out of focus position is little compared with aforesaid focal spot.Repeat step 6.3, record focus place focal spot size.
(7.2) repeatedly repeat step 7.1, when the focus place focal spot size utilizing scientific CCD camera 9 to record no longer reduces, the focal spot namely observed is little as far as possible and when connecing rotund hot spot as far as possible, regulates and terminate.
Should be understood that, for those of ordinary skills, can be improved according to the above description or convert, and all these improve and convert the protection domain that all should belong to claims of the present invention.
Claims (2)
1. the off axis paraboloidal mirror control method based on high-resolution scientific CCD camera, it is characterized in that, the method utilizes high-resolution scientific CCD camera, by measuring the near focal point focal spot shapes of laser system outgoing beam after off axis paraboloidal mirror is assembled in real time, monitor adjustment off axis paraboloidal mirror;
A1 system prepares: be fixed on by described off axis paraboloidal mirror (7) on motorized adjustment translation stage (3), motorized adjustment translation stage (3) comprises off-axis angle adjusting knob (4), pitching knob (5), inclination knob (6), off-axis angle adjusting knob (4) can be used for regulating the off-axis angle of off axis paraboloidal mirror (7) by rotating off axis paraboloidal mirror (7), pitching knob (5) is for regulating the pitching of off axis paraboloidal mirror (7), and inclination knob (6) is for regulating tilting of off axis paraboloidal mirror (7); Outgoing beam (2) forms the focus (8) assembled after off axis paraboloidal mirror (7) is assembled, and focus (8) is had high-resolution scientific CCD camera (9) and detects; Described scientific CCD camera (9) is fixed near focus (8), scientific CCD camera (9) is placed in can on the one dimension adjusting bracket of horizontal direction movement, first makes the position measurement of scientific CCD camera (9) at off-focal (8) center slightly can focused spot; The focal spot that departure degree is surveyed with scientific CCD camera (9), the shape that obviously can embody focal spot is in size as the criterion; Mobile electric regulates translation stage (3), makes outgoing beam (2) impinge upon off axis paraboloidal mirror (7) central authorities as far as possible; Front in adjustment off axis paraboloidal mirror (7), load aperture (1) to make outgoing beam (2) for light pencil, horizontal direction is large observes the imaging point of light pencil in scientific CCD camera (9) apart from mobile scientific CCD camera (9), then the pitching knob (5) of off axis paraboloidal mirror (7) is regulated, to make light pencil in scientific CCD camera (9) isometry position imaging;
A2 coarse tuning stage:
First A21 regulates the off-axis angle adjusting knob (4) of motorized adjustment translation stage (3), off axis paraboloidal mirror (7) will rotate around its central axis, and the focal spot shapes made in scientific CCD camera (9) is level or vertical flat hot spot; Now, scientific CCD camera (9) is moved to the front and back of focus (8), require that the focal spot of focus (8) front and rear is orthogonal;
A22 regulates the inclination knob (6) of motorized adjustment translation stage (3), makes the focal spot of out of focus position as far as possible close to circular;
A23 moves forward and backward scientific CCD camera (9), find the position that focal spot is minimum, this position is focus (8) place of off axis paraboloidal mirror (7), utilize scientific CCD camera (9) to observe the size of focal spot, and record focus (8) place focal spot size;
The A3 accurate adjustment stage:
A31 repeats steps A 21, and before making Jiao, defocused flat hot spot is elongated as far as possible; Repeat steps A 22, make the focal spot of out of focus position as far as possible close to circular, now, can find that the focal spot of out of focus position is little compared with aforesaid focal spot; Repeat steps A 23, record focus place focal spot size;
A32 repeats steps A 31 many times, and when the focus place focal spot size utilizing scientific CCD camera (9) to record no longer reduces, the focal spot namely observed is little as far as possible and when connecing rotund hot spot as far as possible, regulates and terminate.
2. method according to claim 1, is characterized in that, described scientific CCD camera is used for the adjustment that all kinds of output wave band high power laser system assembles paraboloidal mirror.
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| CN107807454B (en) * | 2017-12-04 | 2024-04-23 | 中国科学院上海微系统与信息技术研究所 | Device and method for realizing terahertz quasi-Gaussian parallel laser beams |
| CN108681212B (en) * | 2018-05-03 | 2023-11-17 | 中国科学院光电研究院 | Auxiliary adjusting device and adjusting method for photoetching light source transmission light path system |
| CN110262058B (en) * | 2019-06-19 | 2021-11-23 | 中国工程物理研究院应用电子学研究所 | Auxiliary pupil optical axis adjusting device and method |
| CN112985752B (en) * | 2021-02-22 | 2023-02-07 | 中国空气动力研究与发展中心空天技术研究所 | Auxiliary adjusting device for planar laser |
| CN115555705B (en) * | 2021-07-01 | 2024-04-12 | 中国科学院上海光学精密机械研究所 | Multi-path picosecond and nanosecond composite high-power laser pulse system and focusing adjustment method |
| CN113985621B (en) * | 2021-10-13 | 2023-10-10 | 中国科学院上海光学精密机械研究所 | Method for adjusting large-caliber off-axis parabolic mirror based on grating beam splitter |
| WO2024090026A1 (en) * | 2022-10-25 | 2024-05-02 | パナソニックＩｐマネジメント株式会社 | Imaging device and distance measuring device |
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