CN103476594A - RGB printing method using plasma pretreatment and plasma apparatus therefor - Google Patents
RGB printing method using plasma pretreatment and plasma apparatus therefor Download PDFInfo
- Publication number
- CN103476594A CN103476594A CN2012800180287A CN201280018028A CN103476594A CN 103476594 A CN103476594 A CN 103476594A CN 2012800180287 A CN2012800180287 A CN 2012800180287A CN 201280018028 A CN201280018028 A CN 201280018028A CN 103476594 A CN103476594 A CN 103476594A
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- mentioned
- rgb
- plasma
- atmospheric pressure
- pressure plasma
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0011—Pre-treatment or treatment during printing of the recording material, e.g. heating, irradiating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M1/00—Inking and printing with a printer's forme
- B41M1/14—Multicolour printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M1/00—Inking and printing with a printer's forme
- B41M1/26—Printing on other surfaces than ordinary paper
- B41M1/30—Printing on other surfaces than ordinary paper on organic plastics, horn or similar materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
Abstract
The present invention relates to an RGB printing method using plasma pretreatment and a plasma apparatus therefor, and specifically to: a RGB printing method using plasma pretreatment which comprises a) forming organic partitions on an inorganic substrate, b) hydrophilizing the surface of the substrate in which the organic partitions are formed, c) hydrophobizing the hydrophilized surface of the substrate using plasma, and d) inkjet-printing RGB organic solvents between the organic partitions on the hydrophobized substrate; and a plasma apparatus therefor. Interference and diffusion phenomena are simply and efficiently prevented in printing solutions when the RGB organic solvents are inkjet printed through the use of the RGB printing method using plasma pretreatment and an atmospheric plasma apparatus of the invention.; Therefore, the quality of display devices using RGB organic solvents is substantially enhanced.
Description
Technical field
The present invention relates to utilize the pretreated RGB printing process of plasma to reach the plasma device for it, relate more specifically to, wherein, comprise the steps: a) to form organic partition on inorganic substrate; B) utilize plasma to carry out hydrophilicity-imparting treatment to substrate surface, the aforesaid substrate surface is formed with above-mentioned organic partition; C) utilize plasma to carry out the hydrophobization processing to the substrate surface of above-mentioned hydrophilicity-imparting treatment; And d) between the organic partition on the substrate of processing at above-mentioned hydrophobization, inkjet printing RGB organic solvent.
By utilizing the pretreated RGB printing process of plasma of the present invention and atmospheric pressure plasma device, thereby when inkjet printing RGB organic solvent, phase mutual interference and disperse between solvent can be prevented simply and effectively, and then the quality of the display equipment that utilizes the RGB organic solvent can be significantly improved.
Background technology
As shown in Figure 1, usually on display base plate in the step of inkjet printing RGB organic solvent, at first utilize polymer (polymer) or photoresist (PR, photoresist) the various materials such as material, form and cut off on substrate, afterwards the organic solvent differed from one another is injected between above-mentioned partition.
But, in this process can interfering with each other between organic solvent occur across cutting off, and the phenomenon of generation solvent disperse, organic solvent occurs can't stably leave in the substrate of each position in cutting off etc. simultaneously, thereby finally reduce the quality of whole display equipment.
Thus, developed in the present invention prevention method, it is in whole display fabrication process, and during to inkjet printing RGB organic solvent, the interference phenomenon between the printing solvent of generation can be prevented simply and effectively.
Summary of the invention
The object of the present invention is to provide a kind of RGB printing process to reach the device for it, it is by the step of RGB organic solvent inkjet printing on display base plate, effectively suppress to print between solvent to produce and disturb and the phenomenon of solvent generation disperse in cutting off etc., and make under various RGB organic solvents deposit in substrate, thereby can significantly improve the quality of the display equipment that utilizes the RGB organic solvent.
For achieving the above object the invention provides a kind of pretreated RGB printing process of plasma that utilizes, it comprises the steps: a) to form on inorganic substrate organic partition; B) utilize plasma to carry out hydrophilicity-imparting treatment to substrate surface, the aforesaid substrate surface is formed with above-mentioned organic partition; C) utilize plasma to carry out the hydrophobization processing to the substrate surface of above-mentioned hydrophilicity-imparting treatment; Between the organic partition on the substrate of and d) processing at above-mentioned hydrophobization, inkjet printing RGB organic solvent.
While by above-mentioned printing process, printing the RGB organic solvent, it has following feature: organic partition has hydrophobicity, therefore can suppress the disperse of organic solvent, and the substrate between organic partition has hydrophily, therefore can make organic solvent deposit in substrate.
Now, above-mentioned organic partition can be formed by macromolecule (polymer) or photoresist (photoresist) material, and utilizes atmospheric pressure plasma when above-mentioned hydrophilicity-imparting treatment, uses oxygen (O as process gas simultaneously
2), clean dry air (CDA, Clean Dry Air) or methane (CH
4), and use atmospheric pressure plasma when above-mentioned hydrophobization is processed, and, preferably, will be similar to sulfur hexafluoride (SF
6), carbon tetrafluoride (CF
4), Nitrogen trifluoride (NF
3), the fluorine-containing compound of hafnium (HF) etc. is used is process gas.
Simultaneously, for achieving the above object, the invention provides for RGB and print pretreated atmospheric pressure plasma device, it comprises: a) atmospheric pressure plasma module, and it consists of negative electrode (cathode), anode (anode), shell (housing); B) the first gas supply and control device, it is to above-mentioned atmospheric pressure plasma module supply hydrophiling gas, and control gas supply; C) the second gas supply and control device, it is to above-mentioned atmospheric pressure plasma module supply hydrophobization gas, and control gas supply; D) exhaust apparatus, it discharges the process gas in above-mentioned atmospheric pressure plasma module; E) cooling device, its cooling above-mentioned atmospheric pressure plasma module; And f) supply unit, it is to above-mentioned atmospheric pressure plasma module supply power supply.
Now, preferably, the hydrophiling of supplying from above-mentioned the first gas supply and control device comprises oxygen (O with gas
2), clean dry air (CDA, Clean Dry Air) or methane (CH
4), and the hydrophobization of supplying from above-mentioned the second gas supply and control device comprises by being similar to sulfur hexafluoride (SF with gas
6), carbon tetrafluoride (CF
4), Nitrogen trifluoride (NF
3), the process gas that forms of the fluorine-containing compound of hafnium (HF).
The present invention is before by the step of RGB organic solvent inkjet printing on display base plate, increase hydrophiling and the hydrophobization technique of utilizing the atmospheric pressure plasma device, thereby prevent from simply and effectively printing the interference phenomenon occurred between solvent by increasing very single technique, and then utilize the RGB organic solvent can significantly improve the quality of display equipment.
The accompanying drawing explanation
Fig. 1 means the flow chart that utilizes the pretreated RGB printing process of plasma according to of the present invention.
Fig. 2 means the hydrophiling module of according to of the present invention, printing pretreated atmospheric pressure plasma device for RGB.
Fig. 3 means the hydrophobization module of according to of the present invention, printing pretreated atmospheric pressure plasma device for RGB.
The specific embodiment
Describe in detail according to of the present invention and utilize plasma pretreatment RGB printing process to reach the plasma device for it referring to accompanying drawing.
Of the present inventionly utilize the pretreated RGB printing process of plasma, it comprises the steps: a) to form on inorganic substrate organic partition; B) utilize plasma to carry out hydrophilicity-imparting treatment to substrate surface, the aforesaid substrate surface is formed with above-mentioned organic partition; C) utilize plasma to carry out the hydrophobization processing to the substrate surface of above-mentioned hydrophilicity-imparting treatment; And d) between the organic partition on the substrate of processing at above-mentioned hydrophobization, inkjet printing RGB organic solvent.
Usually, by in the step of RGB organic solvent inkjet printing on display base plate, utilize the various materials such as polymer (polymer) or photoresist (PR, photoresist) material to form and cut off, afterwards the organic solvent differed from one another is injected between above-mentioned partition.
But following problem occurs in meeting in this process: interfere with each other across cutting off between organic solvent, or the phenomenon of solvent disperse occurs on cutting off, and the generation organic solvent can't stably be deposited in the substrate of each position.
In the present invention, for addressing the above problem, as shown in Figure 1, before the inkjet printing step, utilize plasma to carry out continuously hydrophiling and hydrophobization processing, thereby make it have following feature: organic partition has hydrophobicity, thereby suppress the disperse of organic solvent, and the substrate between organic partition has hydrophily, thereby organic solvent is left on substrate.Now, above-mentioned organic partition can consist of the various organic materials such as macromolecule (polymer) or photoresist (photoresist) material.
Above-mentioned hydrophilicity-imparting treatment can be utilized atmospheric pressure plasma technique usually, and can use and be similar to oxygen (O as process gas
2), clean dry air (CDA, Clean Dry Air) or methane (CH
4) the material of carried out surface hydrophilic.After so above-mentioned inorganic substrate and organic partition integral body being carried out to hydrophilicity-imparting treatment, can again carry out the hydrophobization processing to substrate surface again, it can use common atmospheric pressure plasma technique equally, but be different from hydrophilicity-imparting treatment, can preferably use fluorine-containing compound as process gas, above-mentioned fluorides is similar to sulfur hexafluoride (SF
6), carbon tetrafluoride (CF
4), Nitrogen trifluoride (NF
3), hafnium (HF) shows the hydrophobization characteristic.
In above-mentioned hydrophobization processing procedure, the chemical reaction of the fluorine of performance hydrophobization characteristic only with take the C composition and reacted as basic organic matter surface, only have thus organic partition to show the hydrophobization characteristic, and the inorganic substrate between above-mentioned organic partition still have hydrophily.Generally speaking, organic partition has hydrophobicity, thereby suppresses interference and the disperse of organic solvent, and because the substrate of organic partition has hydrophily, thereby organic solvent is deposited in substrate.
Simultaneously, as shown in Figure 2,3, the printing pretreated atmospheric pressure plasma device for RGB and comprise following formation of above-mentioned explanation: a) atmospheric pressure plasma module, it consists of negative electrode, anode, shell; B) the first gas supply and control device, it is to above-mentioned atmospheric pressure plasma module supply hydrophiling gas, and control gas supply; C) the second gas supply and control device, it is to above-mentioned atmospheric pressure plasma module supply hydrophobization gas, and control gas supply; D) exhaust apparatus, it discharges the process gas in above-mentioned atmospheric pressure plasma module; E) cooling device, its cooling above-mentioned atmospheric pressure plasma module; And f) supply unit, it is to above-mentioned atmospheric pressure plasma module supply power supply.
The hydrophiling of now, supplying from above-mentioned the first gas supply and control device can comprise nitrogen (N with gas
2) and oxygen (O
2), clean dry air (CDA, Clean Dry Air) or methane (CH
4) process gas, and from above-mentioned the second gas supply and the hydrophobization of supply controlling with gas, can comprise by nitrogen (N
2) and be similar to sulfur hexafluoride (SF
6), carbon tetrafluoride (CF
4), Nitrogen trifluoride (NF
3), the process gas that forms of the fluorine-containing compound of hafnium (HF).
By in above-mentioned explanation, utilizing the pretreated RGB printing process of plasma of the present invention, thereby in display fabrication process in the step of inkjet printing RGB organic solvent, can effectively suppress to print the phenomenon of disperse solvent in the interference that produces between solvent and partition etc., and can make each RGB organic solvent deposit on substrate, thereby can significantly improve the quality of the display equipment that utilizes the RGB organic solvent.
The present invention not is defined in above-mentioned specific embodiment and explanation; belonging to technical field of the present invention; and the personnel that possess general knowledge; can be in the situation that the main points of the present invention of asking in not breaking away from the request scope to be carried out various changes, its change belongs in the claims in the present invention protection domain.
Claims (8)
1. one kind is utilized the pretreated RGB printing process of plasma, and it comprises the steps:
A) form organic partition on inorganic substrate; B) utilize plasma to carry out hydrophilicity-imparting treatment to substrate surface, the aforesaid substrate surface is formed with above-mentioned organic partition; C) utilize plasma to carry out the hydrophobization processing to the substrate surface of above-mentioned hydrophilicity-imparting treatment; And d) between the organic partition on the substrate of processing at above-mentioned hydrophobization, inkjet printing RGB organic solvent.
2. according to claim 1ly utilize the pretreated RGB printing process of plasma, it is characterized in that:
Therefore while printing above-mentioned RGB organic solvent, above-mentioned organic partition has hydrophobicity, can suppress the disperse of organic solvent, and the substrate between organic partition has hydrophily, therefore can make organic solvent deposit on substrate.
3. according to claim 1ly utilize the pretreated RGB printing process of plasma, it is characterized in that:
Above-mentioned organic partition is formed by macromolecule (Polymer) or photoresist (Photoresist) material.
4. according to claim 1ly utilize the pretreated RGB printing process of plasma, it is characterized in that:
When above-mentioned hydrophilicity-imparting treatment, utilize atmospheric pressure plasma, use oxygen (O as process gas simultaneously
2), clean dry air (CDA, Clean Dry Air) or methane (CH
4).
5. according to claim 1ly utilize the pretreated RGB printing process of plasma, it is characterized in that:
When above-mentioned hydrophobization is processed, use atmospheric pressure plasma, and will be similar to sulfur hexafluoride (SF
6), carbon tetrafluoride (CF
4), Nitrogen trifluoride (NF
3), the fluorine-containing compound of hafnium (HF) is used is process gas.
6. print pretreated atmospheric pressure plasma device for RGB, it comprises:
A) atmospheric pressure plasma module, it consists of negative electrode (cathode), anode (anode), shell (housing); B) the first gas supply and control device, it is to above-mentioned atmospheric pressure plasma module supply hydrophiling gas, and control gas supply; C) the second gas supply and control device, it is to above-mentioned atmospheric pressure plasma module supply hydrophobization gas, and the control supply; D) exhaust apparatus, it discharges the process gas in above-mentioned atmospheric pressure plasma module; E) cooling device, its cooling above-mentioned atmospheric pressure plasma module; And f) supply unit, it is to above-mentioned atmospheric pressure plasma module supply power supply.
7. according to claim 6ly for RGB, print pretreated atmospheric pressure plasma device, it is characterized in that:
The hydrophiling of supplying from above-mentioned the first gas supply and control device comprises oxygen (O with gas
2), clean dry air (CDA, Clean Dry Air) or methane (CH
4).
8. according to claim 6ly for RGB, print pretreated atmospheric pressure plasma device, it is characterized in that:
The hydrophobization of supplying from above-mentioned the second gas supply and control device comprises by being similar to sulfur hexafluoride (SF with gas
6), carbon tetrafluoride (CF
4), Nitrogen trifluoride (NF
3), the process gas that forms of the fluorine-containing compound of hafnium (HF).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2011-0033857 | 2011-04-12 | ||
| KR1020110033857A KR20120116237A (en) | 2011-04-12 | 2011-04-12 | Rgb printing method using plasma pretreatment, and plasma device for the same |
| PCT/KR2012/002208 WO2012141436A2 (en) | 2011-04-12 | 2012-03-27 | Rgb printing method using plasma pretreatment and plasma apparatus therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103476594A true CN103476594A (en) | 2013-12-25 |
Family
ID=47009792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012800180287A Pending CN103476594A (en) | 2011-04-12 | 2012-03-27 | RGB printing method using plasma pretreatment and plasma apparatus therefor |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20120116237A (en) |
| CN (1) | CN103476594A (en) |
| WO (1) | WO2012141436A2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111063816A (en) * | 2019-12-19 | 2020-04-24 | 深圳市华星光电半导体显示技术有限公司 | Organic light-emitting diode, preparation method and display device |
| CN114905855A (en) * | 2022-05-30 | 2022-08-16 | 华中科技大学 | Micro-circumferential curved surface conformal sensitive structure and preparation method and device thereof |
| CN114919289A (en) * | 2022-05-31 | 2022-08-19 | 苏州华星光电技术有限公司 | Ink-jet printing equipment and ink-jet printing method |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11802337B1 (en) * | 2014-01-28 | 2023-10-31 | United States of America as Administrator of NASA | Atmospheric pressure plasma based fabrication process of printable electronics and functional coatings |
| CN110176477A (en) * | 2019-05-20 | 2019-08-27 | 深圳市华星光电半导体显示技术有限公司 | Organic light-emitting display device and preparation method thereof based on inkjet printing technology |
| KR102567505B1 (en) * | 2020-09-14 | 2023-08-16 | 세메스 주식회사 | Apparatus for treating substrate and method for treating substrate |
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| JP2003103895A (en) * | 2001-09-28 | 2003-04-09 | Fuji Photo Film Co Ltd | Method and apparatus for manufacturing pattern sheet |
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| CN1599669A (en) * | 2001-12-04 | 2005-03-23 | 3M创新有限公司 | Method and materials for transferring a material onto a plasma treated surface according to a pattern |
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| KR20060001859A (en) * | 2005-11-25 | 2006-01-06 | 송석균 | Atmospheric pressure plasma generating apparatus |
-
2011
- 2011-04-12 KR KR1020110033857A patent/KR20120116237A/en not_active Application Discontinuation
-
2012
- 2012-03-27 CN CN2012800180287A patent/CN103476594A/en active Pending
- 2012-03-27 WO PCT/KR2012/002208 patent/WO2012141436A2/en active Application Filing
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000301711A (en) * | 1999-02-15 | 2000-10-31 | Konica Corp | Surface treatment method, production of ink jet recording medium and ink jet recording medium |
| CN1366323A (en) * | 2001-01-09 | 2002-08-28 | 住友橡胶工业株式会社 | Electrode base plate used for plasma display screen and its manufacturing method |
| JP2003103895A (en) * | 2001-09-28 | 2003-04-09 | Fuji Photo Film Co Ltd | Method and apparatus for manufacturing pattern sheet |
| CN1599669A (en) * | 2001-12-04 | 2005-03-23 | 3M创新有限公司 | Method and materials for transferring a material onto a plasma treated surface according to a pattern |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111063816A (en) * | 2019-12-19 | 2020-04-24 | 深圳市华星光电半导体显示技术有限公司 | Organic light-emitting diode, preparation method and display device |
| CN114905855A (en) * | 2022-05-30 | 2022-08-16 | 华中科技大学 | Micro-circumferential curved surface conformal sensitive structure and preparation method and device thereof |
| CN114919289A (en) * | 2022-05-31 | 2022-08-19 | 苏州华星光电技术有限公司 | Ink-jet printing equipment and ink-jet printing method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20120116237A (en) | 2012-10-22 |
| WO2012141436A2 (en) | 2012-10-18 |
| WO2012141436A3 (en) | 2012-12-13 |
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Application publication date: 20131225 |