CN103472691A - 一种曝光机及其控制方法 - Google Patents
一种曝光机及其控制方法 Download PDFInfo
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- CN103472691A CN103472691A CN2013104497199A CN201310449719A CN103472691A CN 103472691 A CN103472691 A CN 103472691A CN 2013104497199 A CN2013104497199 A CN 2013104497199A CN 201310449719 A CN201310449719 A CN 201310449719A CN 103472691 A CN103472691 A CN 103472691A
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104614352A (zh) * | 2015-01-22 | 2015-05-13 | 深圳市开天源自动化工程有限公司 | 荧光检测芯片 |
CN111965946A (zh) * | 2020-08-13 | 2020-11-20 | Tcl华星光电技术有限公司 | 光刻用照光装置及自动调整其照度的方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05175266A (ja) * | 1991-12-20 | 1993-07-13 | Mitsubishi Electric Corp | 半導体装置 |
CN101075096A (zh) * | 2007-06-22 | 2007-11-21 | 上海微电子装备有限公司 | 光刻机工件台平衡定位系统 |
CN201134009Y (zh) * | 2007-11-14 | 2008-10-15 | 上海微电子装备有限公司 | 一种工件台平衡定位装置 |
JP2008304409A (ja) * | 2007-06-11 | 2008-12-18 | Epson Toyocom Corp | 加速度検知ユニット及び加速度センサ |
CN202885967U (zh) * | 2012-11-01 | 2013-04-17 | 沈阳仪表科学研究院 | 椭球反光镜反射照度测量装置 |
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2013
- 2013-09-27 CN CN201310449719.9A patent/CN103472691B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05175266A (ja) * | 1991-12-20 | 1993-07-13 | Mitsubishi Electric Corp | 半導体装置 |
JP2008304409A (ja) * | 2007-06-11 | 2008-12-18 | Epson Toyocom Corp | 加速度検知ユニット及び加速度センサ |
CN101075096A (zh) * | 2007-06-22 | 2007-11-21 | 上海微电子装备有限公司 | 光刻机工件台平衡定位系统 |
CN201134009Y (zh) * | 2007-11-14 | 2008-10-15 | 上海微电子装备有限公司 | 一种工件台平衡定位装置 |
CN202885967U (zh) * | 2012-11-01 | 2013-04-17 | 沈阳仪表科学研究院 | 椭球反光镜反射照度测量装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104614352A (zh) * | 2015-01-22 | 2015-05-13 | 深圳市开天源自动化工程有限公司 | 荧光检测芯片 |
CN111965946A (zh) * | 2020-08-13 | 2020-11-20 | Tcl华星光电技术有限公司 | 光刻用照光装置及自动调整其照度的方法 |
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CN103472691B (zh) | 2016-08-17 |
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Effective date of registration: 20170310 Address after: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Patentee after: Nanjing CLP panda flat panel display technology Co., Ltd. Patentee after: Nanjing CEC Panda LCD Technology Co., Ltd. Address before: 210033 Jiangsu city of Nanjing province science and technology Nanjing Crystal Valley Road Xianlin Avenue Patentee before: Nanjing CEC Panda LCD Technology Co., Ltd. |
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Effective date of registration: 20200901 Address after: No.7 Tianyou Road, Qixia District, Nanjing City, Jiangsu Province Patentee after: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Address before: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Co-patentee before: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Patentee before: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. |