CN103469171A - Anti-coating observation window of vacuum coating chamber - Google Patents
Anti-coating observation window of vacuum coating chamber Download PDFInfo
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- CN103469171A CN103469171A CN2013104347755A CN201310434775A CN103469171A CN 103469171 A CN103469171 A CN 103469171A CN 2013104347755 A CN2013104347755 A CN 2013104347755A CN 201310434775 A CN201310434775 A CN 201310434775A CN 103469171 A CN103469171 A CN 103469171A
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- baffle plate
- flange
- viewing window
- chamber
- coating chamber
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Abstract
The invention discloses an anti-coating window of a vacuum coating chamber. The anti-coating window comprises an observation window small neck communicated with the vacuum coating chamber, wherein the observation window small neck is provided with a flange, the flange comprises a left flange plate and a right flange plate, a cavity is formed on the inner side walls of the left and right flange plates, a baffle plate is arranged in the cavity, a circular quartz glass observation window is arranged at the lower part of the flange, the baffle plate is a circular thin plate, the cavity is a circular cavity correspondingly, two symmetrical strip-shaped narrow slots are formed on the baffle plate along the radial direction, a rotating shaft is arranged in the central position of the baffle plate, the rotating shaft is connected with a driving motor, the length of the narrow slots is equivalent to the radial size of the quartz glass observation window, and when the baffle plate rotates a certain angle, the narrow slots can be just positioned in the quartz glass observation window. By observing the working condition in the coating chamber through the anti-coating window disclosed by the invention, quartz glass can not be coated, the quartz glass is saved, the labor intensity of a worker is also reduced, and the production efficiency is improved.
Description
Technical field
The present invention relates to a kind of viewing window of vacuum film coating chamber, especially relate to the anti-plated film viewing window of a kind of vacuum film coating chamber.
Background technology
The viewing window of vacuum film coating chamber of the prior art, structure mainly comprises the little neck of the viewing window be connected with vacuum film coating chamber, the little neck of viewing window is equipped with flange, flange has a left side, right two ring flanges, left, the inner side-wall of right two ring flanges is formed with chamber, baffle plate is housed in chamber, circular silica glass viewing window is equipped with in the bottom of flange, the viewing window of the vacuum film coating chamber of said structure, when observing the coating chamber internal condition, need first baffle plate to be opened, after having observed, again baffle plate is shut, when baffle plate being opened to observation coating chamber internal condition, film can be plated on the silica glass of viewing window, plate a few stove platings and just need to change the silica glass of viewing window, so not only wasted silica glass, also increased workman's labour intensity, reduced production efficiency.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of vacuum film coating chamber that film can not be plated on the viewing window silica glass when observing the coating chamber internal condition and prevents the plated film viewing window.
For solving the problems of the technologies described above, vacuum film coating chamber of the present invention is prevented the plated film viewing window, comprise the little neck of the viewing window be connected with vacuum film coating chamber, the little neck of viewing window is equipped with flange, flange has a left side, right two ring flanges, left, the inner side-wall of right two ring flanges is formed with chamber, baffle plate is housed in chamber, circular silica glass viewing window is equipped with in the bottom of flange, described baffle plate is circular sheet, correspondingly described chamber is circular chamber, described baffle plate radially has two symmetrical bar shaped slits, rotating shaft is equipped with in the central position of baffle plate, rotating shaft is connected with drive-motor, the radial dimension of the length of described slit and described silica glass viewing window is suitable, when described baffle plate rotates to a certain angle, described slit just is positioned at the silica glass viewing window.
Adopt the anti-plated film viewing window of vacuum film coating chamber of said structure, when observing the coating chamber internal condition, because baffle plate is only radially having two symmetrical bar shaped slits, when driven by motor baffle plate high speed rotating, baffle plate can be the film gear in coating chamber, silica glass can not be coated with film, again because people's naked eyes resolving power is low, thereby can see by the silica glass of viewing window the counterdie situation of coating chamber inside, therefore the present invention when observing the coating chamber internal condition without change the silica glass of viewing window because silica glass is coated with film, saved silica glass, also alleviated workman's labour intensity, improved production efficiency.
The accompanying drawing explanation
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Fig. 1 is the sectional structure schematic diagram of the anti-plated film viewing window of vacuum film coating chamber of the present invention.
Fig. 2 is the main TV structure schematic diagram of the baffle plate of the anti-plated film viewing window of vacuum film coating chamber of the present invention.
Fig. 3 is the side-looking structural representation of Fig. 2.
Embodiment
Referring to Fig. 1-Fig. 3, vacuum film coating chamber of the present invention is prevented the plated film viewing window, comprise the little neck 1 of the viewing window be connected with vacuum film coating chamber, the little neck 1 of viewing window is equipped with flange 2, flange 2 has a left side, right two ring flanges 3, 4, left, right two ring flanges 3, 4 inner side-wall is formed with chamber 5, baffle plate 6 is housed in chamber 5, circular silica glass viewing window 7 is equipped with in the bottom of flange 2, described baffle plate 6 is circular sheet, correspondingly described chamber 5 is circular chamber, described baffle plate 6 radially has two symmetrical bar shaped slits 8, rotating shaft 9 is equipped with in the central position of baffle plate 6, rotating shaft 9 is connected with drive-motor 10, the radial dimension of the length of described slit 8 and described silica glass viewing window 7 is suitable, when described baffle plate 6 rotates to a certain angle, described slit just is positioned at silica glass viewing window 7.
Claims (1)
1. a vacuum film coating chamber is prevented the plated film viewing window, comprise the little neck of the viewing window be connected with vacuum film coating chamber (1), the little neck of viewing window (1) is equipped with flange (2), flange (2) has a left side, right two ring flanges (3, 4), left, right two ring flanges (3, 4) inner side-wall is formed with chamber (5), baffle plate (6) is housed in chamber (5), circular silica glass viewing window (7) is equipped with in the bottom of flange (2), it is characterized in that: described baffle plate (6) is circular sheet, correspondingly described chamber (5) is circular chamber, described baffle plate (6) radially has two symmetrical bar shaped slits (8), rotating shaft (9) is equipped with in the central position of baffle plate (6), rotating shaft (9) is connected with drive-motor (10), the radial dimension of the length of described slit (8) and described silica glass viewing window (7) is suitable, when described baffle plate (6) rotates to a certain angle, described slit just is positioned at silica glass viewing window (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104347755A CN103469171A (en) | 2013-09-24 | 2013-09-24 | Anti-coating observation window of vacuum coating chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104347755A CN103469171A (en) | 2013-09-24 | 2013-09-24 | Anti-coating observation window of vacuum coating chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103469171A true CN103469171A (en) | 2013-12-25 |
Family
ID=49794207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013104347755A Pending CN103469171A (en) | 2013-09-24 | 2013-09-24 | Anti-coating observation window of vacuum coating chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103469171A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110863187A (en) * | 2019-12-23 | 2020-03-06 | 宝鸡亚光机械有限公司 | Vacuum flash frequency observation window |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3224428A (en) * | 1962-11-07 | 1965-12-21 | Heraeus Gmbh W C | Viewing device for vacuum apparatus |
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |
| CN201459234U (en) * | 2009-07-23 | 2010-05-12 | 北京北仪创新真空技术有限责任公司 | Viewing window mechanism |
| CN102425956A (en) * | 2011-12-07 | 2012-04-25 | 北京有色金属研究总院 | Electron beam melting furnace observation window mechanism and production method thereof |
| CN202595265U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Baffle-type viewing window |
| CN203451612U (en) * | 2013-09-24 | 2014-02-26 | 辽宁北宇真空科技有限公司 | Coating-preventing inspection window of vacuum coating chamber |
-
2013
- 2013-09-24 CN CN2013104347755A patent/CN103469171A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3224428A (en) * | 1962-11-07 | 1965-12-21 | Heraeus Gmbh W C | Viewing device for vacuum apparatus |
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |
| CN201459234U (en) * | 2009-07-23 | 2010-05-12 | 北京北仪创新真空技术有限责任公司 | Viewing window mechanism |
| CN102425956A (en) * | 2011-12-07 | 2012-04-25 | 北京有色金属研究总院 | Electron beam melting furnace observation window mechanism and production method thereof |
| CN202595265U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Baffle-type viewing window |
| CN203451612U (en) * | 2013-09-24 | 2014-02-26 | 辽宁北宇真空科技有限公司 | Coating-preventing inspection window of vacuum coating chamber |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110863187A (en) * | 2019-12-23 | 2020-03-06 | 宝鸡亚光机械有限公司 | Vacuum flash frequency observation window |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20131225 |