CN103469161A - Evaporation source - Google Patents
Evaporation source Download PDFInfo
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- CN103469161A CN103469161A CN2013104389584A CN201310438958A CN103469161A CN 103469161 A CN103469161 A CN 103469161A CN 2013104389584 A CN2013104389584 A CN 2013104389584A CN 201310438958 A CN201310438958 A CN 201310438958A CN 103469161 A CN103469161 A CN 103469161A
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Abstract
The invention discloses an evaporation source which is applied to the technical field of OLED (Organic Light Emitting Diode) display. The evaporation source mainly comprises an evaporation boat and a blocking device, wherein the blocking device comprises a blocking cover and a blocking bracket or a blocking cover group and the blocking bracket, the blocking cover or blocking cover group is mounted just above the evaporation boat through the blocking bracket, and the diameter of the blocking cover is greater than that of the cross section of the evaporation boat. When the evaporation source is adopted to carry out OLED substrate evaporation, the blocking cover covers the evaporation boat in an evaporation state in non-evaporation processes, such as substrate conveying, substrate alignment, cavity substrate waiting and the like, and evaporated or sublimated evaporation materials are all condensed on the blocking cover, so that the recovery process is very simple and convenient; for circumstances that the evaporation materials comprise a main organic material and doping organic materials, during evaporation, the main organic material and the doping organic materials are respectively located in different evaporation boats and correspond to different blocking covers, so that as long as respective recovery is carried out during recovery, only simple separation and purification are carried out subsequently, and then, the main organic material and the doping organic materials can be respectively put into use again.
Description
Technical field
The invention belongs to OLED technique of display field, be specifically related to a kind of evaporation source for OLED device evaporation.
Background technology
The OLED evaporation coating technique refers to by deposition material with by the evaporation substrate and is positioned under vacuum environment, heating makes deposition material evaporation or distillation, flight is splashed to by the evaporation substrate surface and condenses the technique of film forming, can be that the independent evaporation of organic materials can be also the common evaporation of main organic materials and dopant material.
When the evaporation volume production, deposition material is continuous evaporating-plating, and, when the non-evaporation process such as board transport, substrate contraposition, cavity wait substrate, deposition material is also constantly evaporated or distils, and wastes very serious.As everyone knows, deposition material is very expensive production material, and some luminescent material is up to RMB4000/1g, and therefore, reclaiming deposition material is one of groundwork of volume production company.Contaminated in order to prevent the evaporation chamber, the evaporation inner cavity surface is equipped with Antisticking, and when non-evaporation process, be evaporated or the deposition material that distils can condense upon on this Antisticking, recovery method commonly used is to carry out the recovery of deposition material from this Antisticking at present, this method has prevented the waste of deposition material preferably, but its deficiency is: at first, the area of Antisticking is generally huge, reclaim from huge Antisticking that the technique of deposition material is very complicated and workload is huge, it is special when lighting cavity completes evaporation jointly by main organic materials and dopant material, the deposition material of collecting from Antisticking is mixture, also need to do further separating-purifying after recovery, the complicacy but also the cost that have not only increased technique are high.Simultaneously, due to continuous evaporating-plating, usually within the very short time, will add up blocked up deposition material on Antisticking and need to change clean, shut down frequently to change and also upset normal volume production order, reduced production efficiency.
Summary of the invention
The object of the invention is to overcome the problems referred to above that prior art exists, provide that a kind of recovery process is simple, the rate of recovery is high and reclaim the high evaporation source of deposition material purity.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of evaporation source is characterized in that: comprise evaporation boat and retention device, described retention device comprises blocking cover and stop support, described blocking cover by stop support be installed on evaporation boat directly over, the diameter of blocking cover is greater than the diameter of evaporation boat cross section.
Further, the hollow cylinder that is shaped as an end sealing of described blocking cover.
Further, the heat resisting temperature of described blocking cover is not less than 500 ℃.
Further, the surface of described blocking cover is through sandblasting.
Further, the distance between described blocking cover and evaporation boat is 0.5～1cm.
Further, described retention device comprises the blocking cover of 2 conllinear.
Further, described retention device comprises that n lays respectively at the blocking cover on n summit of positive n limit shape, n >=3.
Further, described retention device comprises some groups of blocking covers, and every group of blocking cover includes several blocking covers, the evaporation boat at dopant material place in the evaporation boat at main organic materials place and deposition material in the corresponding deposition material of described several blocking covers difference.
Further, described evaporation source also comprises transmission system, controlled programmer, master control computer, control circuit and communication line, retention device is fixedly connected on transmission system by stop support, transmission system is connected with controlled programmer by control circuit, and controlled programmer is connected with the master control computer by communication line.
Compared with prior art, the invention has the beneficial effects as follows:
(1) evaporation source of the present invention by arranging blocking cover directly over evaporation source, during evaporation, when in non-evaporation process such as oled substrate transmission, oled substrate contraposition, cavity wait oled substrates, blocking cover is covered on the evaporation boat in the evaporation state, the organic materials be evaporated all condenses upon on blocking cover, and recovery process is very easy; The situation that comprises main organic materials and dopant material for deposition material, during due to evaporation, main organic materials and doping organic materials lay respectively in different evaporation boats, corresponding different blocking covers, as long as reclaim respectively while reclaiming, follow-up need carry out simple separating-purifying and can again come into operation respectively;
(2) evaporation source of the present invention is provided with several blocking covers or blocking cover group, while on a blocking cover or blocking cover group, having condensed blocked up deposition material, without shut down changing, only need another blocking cover or blocking cover group are rotated to evaporation boat and got final product;
(3) evaporation source of the present invention can realize that deposition material recycles more fully, recovery process is simple, organic efficiency is high, the significant production cost that reduces the OLED device, and adopt Novel steam of the present invention to rise can to extend the replacing time of Antisticking by the number of controlling blocking cover or blocking cover group, enhance productivity;
(4) evaporation source of the present invention can coordinate the uses such as transmission system, controlled programmer, master control computer, realizes automatic operating.
The accompanying drawing explanation
The structural representation that Fig. 1 is the evaporation source in embodiment;
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
As shown in Figure 1, evaporation source in the present embodiment comprises retention device 1, retention device 1 comprise 3 be positioned on 3 summits of equilateral triangle, size, the identical blocking cover 11,12,13 of shape and stop support 14, blocking cover 11 by stop support 14 be installed on evaporation boat 2 directly over 0.5～1cm place, the diameter that the hollow cylinder that blocking cover 11,12 or 13 is an end sealing and its diameter are greater than evaporation boat 2 cross sections.
During evaporation, when in non-evaporation process such as board transport, substrate contraposition, cavity wait substrates, blocking cover 11 is covered directly over the evaporation boat 2 in the evaporation state, collects the organic materials be evaporated; When starting the evaporation substrate, remove blocking cover 11, expose evaporation boat 2, now, organic materials flies and is splashed to substrate surface and condenses film forming; When on blocking cover 11, the organic materials of cohesion is blocked up, by rotation stop support 14, blocking cover 12 is rotated to 120 °, just in time forward to evaporation boat 2 directly over, can proceed by blocking cover 12 collection of organic materials, similarly, when on blocking cover 12, the organic materials of cohesion is blocked up, 120 ° of blocking cover 13 rotations are got final product to evaporation boat 2, design by 3 blocking covers 11,12,13, extended the time of continuous evaporating-plating, compare with the technology that reclaims organic materials from Antisticking in prior art, obviously improved production efficiency.Simultaneously, because the each only corresponding evaporation boat of blocking cover 11,12,13, therefore only collect the organic materials of evaporation boat 2 in the present embodiment on each blocking cover 11,12 or 13, purity is higher, follow-uply only need to carry out simple separating-purifying and can again come into operation, significantly reduce the evaporation cost of OLED device.
The number of the blocking cover here is mainly the replacing Time dependent by the Antisticking of the number of evaporation boat and setting, in the present embodiment, the number of evaporation boat is 1, be evaporation boat 2, therefore, the blocking cover that actual participation stops is only one, for blocking cover 11,12 or 13, in the situation that the present embodiment, blocking cover also can for two of conllinear or the n that is positioned on n summit of positive n distortion individual, n>3, the number of set blocking cover is more, and the replacing time of Antisticking is longer; When deposition material comprises main organic materials and dopant material simultaneously, the evaporation boat at main organic materials place is designed the blocking cover of a correspondence, the evaporation boat at dopant material place is designed to the blocking cover of a correspondence, described two blocking covers form one group, and according to the arrangement mode of above-mentioned single deposition material blocking cover, some groups of blocking covers are set can be to the deposition material recovery of classifying.
Evaporation or the sublimation temperature difference of different deposition materials, in order to adapt to the requirement of various deposition materials, blocking cover 11,12 or 13 heat resisting temperature all are not less than 500 ℃ and through sandblasting, and can carry out respective design according to the kind of deposition material in evaporation boat 2.
In order to prevent that the deposition material condensed on blocking cover 11,12 or 13 from dropping, cause the pollution of the inner deposition material of evaporation boat, the blocking cover 11,12 and 13 in the present embodiment is all passed through sandblasting.
In order to realize the automatic operating of evaporation, evaporation source in the present embodiment also comprises transmission system 3, controlled programmer 4, master control computer 5, control circuit 6 and communication line 7, retention device 1 is fixedly connected on transmission system 3 by stop support 14, transmission system 3 is connected with controlled programmer 4 by control circuit 6, and controlled programmer 4 is connected with master control computer 5 by communication line 7.Controlled programmer 4 can be shown in the operating path of blocking cover 11,12 or 13 on master control computer 5 by communication line 7, master control computer 5 also can pass the duration of service of the blocking cover of setting 11,12 or 13 in controlled programmer 4 by communication line 7, thereby control transmission system 3, by preset path and time, blocking cover 11 is switched to blocking cover 12, and blocking cover 12 is switched to blocking cover 13.Transmission system 3 can realize the accurate control of angle of rotation and position.
Although with reference to best interpretations embodiment of the present invention, invention has been described here, but, should be appreciated that, those skilled in the art can design a lot of other modification and embodiments, and these are revised and within embodiment will drop on the disclosed principle scope and spirit of the application.More particularly, in the scope of, accompanying drawing open in the application and claim, can carry out multiple modification and improvement to building block and/or the layout of subject combination layout.Except modification that building block and/or layout are carried out with improving, to those skilled in the art, other purposes will be also obvious.
Claims (9)
1. an evaporation source, it is characterized in that: comprise evaporation boat and retention device, described retention device comprises blocking cover and stop support, described blocking cover by stop support be installed on evaporation boat directly over, the diameter of blocking cover is greater than the diameter of evaporation boat cross section.
2. evaporation source according to claim 1, is characterized in that: the hollow cylinder that is shaped as an end sealing of described blocking cover.
3. evaporation source according to claim 1, it is characterized in that: the heat resisting temperature of described blocking cover is not less than 500 ℃.
4. the retrieving arrangement of evaporation source organic materials according to claim 1, it is characterized in that: the surface of described blocking cover is through sandblasting.
5. evaporation source according to claim 1 is characterized in that: the distance between described blocking cover and evaporation boat is 0.5～1cm.
6. according to the described evaporation source of claim 1 to 5 any one claim, it is characterized in that: described retention device comprises the blocking cover of 2 conllinear.
7. according to the described evaporation source of claim 1 to 5 any one claim, it is characterized in that: described retention device comprises that n lays respectively at the blocking cover on a shape n summit, positive n limit, n >=3.
8. evaporation source according to claim 1, it is characterized in that: described retention device comprises some groups of blocking covers, every group of blocking cover includes two blocking covers, and two blocking covers are the evaporation boat at dopant material place in the evaporation boat at main organic materials place and deposition material in corresponding deposition material respectively.
9. according to the described evaporation source of claim 1 or 8, it is characterized in that: also comprise transmission system, controlled programmer, master control computer, control circuit and communication line, retention device is fixedly connected on transmission system by support, transmission system is connected with controlled programmer by control circuit, and controlled programmer is connected with the master control computer by communication line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310438958.4A CN103469161B (en) | 2013-09-24 | 2013-09-24 | Evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310438958.4A CN103469161B (en) | 2013-09-24 | 2013-09-24 | Evaporation source |
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| Publication Number | Publication Date |
|---|---|
| CN103469161A true CN103469161A (en) | 2013-12-25 |
| CN103469161B CN103469161B (en) | 2015-08-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310438958.4A Expired - Fee Related CN103469161B (en) | 2013-09-24 | 2013-09-24 | Evaporation source |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104073764A (en) * | 2014-06-17 | 2014-10-01 | 京东方科技集团股份有限公司 | Rotary evaporation source device used for evaporation of OLED (organic light emitting diode) |
| CN110205601A (en) * | 2019-05-06 | 2019-09-06 | 铜陵市启动电子制造有限责任公司 | A kind of thin film capacitor processing metallic film evaporated device |
| US10653764B2 (en) | 2015-01-15 | 2020-05-19 | Pfizer Inc. | Immunogenic compositions for use in pneumococcal vaccines |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201873746U (en) * | 2010-11-08 | 2011-06-22 | 咸阳盛基电子有限公司 | Vertically silver-sprayed double-layer compound cylindrical closed molybdenum boat |
-
2013
- 2013-09-24 CN CN201310438958.4A patent/CN103469161B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201873746U (en) * | 2010-11-08 | 2011-06-22 | 咸阳盛基电子有限公司 | Vertically silver-sprayed double-layer compound cylindrical closed molybdenum boat |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104073764A (en) * | 2014-06-17 | 2014-10-01 | 京东方科技集团股份有限公司 | Rotary evaporation source device used for evaporation of OLED (organic light emitting diode) |
| CN104073764B (en) * | 2014-06-17 | 2016-05-18 | 京东方科技集团股份有限公司 | A kind of rotary evaporation source apparatus for OLED evaporation |
| US9970097B2 (en) | 2014-06-17 | 2018-05-15 | Boe Technology Group Co., Ltd. | Rotary evaporation source apparatus for OLED evaporation |
| US10653764B2 (en) | 2015-01-15 | 2020-05-19 | Pfizer Inc. | Immunogenic compositions for use in pneumococcal vaccines |
| CN110205601A (en) * | 2019-05-06 | 2019-09-06 | 铜陵市启动电子制造有限责任公司 | A kind of thin film capacitor processing metallic film evaporated device |
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| Publication number | Publication date |
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| CN103469161B (en) | 2015-08-12 |
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Granted publication date: 20150812 Termination date: 20200924 |