CN103457009A - Terahertz low-loss bent waveguide - Google Patents

Terahertz low-loss bent waveguide Download PDF

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CN103457009A
CN103457009A CN2013103609089A CN201310360908A CN103457009A CN 103457009 A CN103457009 A CN 103457009A CN 2013103609089 A CN2013103609089 A CN 2013103609089A CN 201310360908 A CN201310360908 A CN 201310360908A CN 103457009 A CN103457009 A CN 103457009A
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waveguide plate
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陈麟
朱亦鸣
高春梅
徐嘉明
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University of Shanghai for Science and Technology
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Abstract

本发明涉及一种太赫兹低损耗弯曲波导,其包括外侧波导板和内侧波导板,外侧波导板和内侧波导板均为弯曲的金属板并且弯曲部为圆弧状,外侧波导板和内侧波导板彼此相距地平行布置,在外侧波导板和内侧波导板的彼此相对的表面上分别设有周期性凹槽。太赫兹波以横磁波模式从外侧波导板和内侧波导板的一端输入,进入外侧波导板和内侧波导板之间的间隙后形成表面波在该间隙中传输,进而传送到外侧波导板和内侧波导板的另一端,从而实现了太赫兹波的低损耗弯曲传输。根据本发明的技术方案,不仅太赫兹波弯曲损耗低,而且结构简单、使用方便、成本低廉。

Figure 201310360908

The invention relates to a terahertz low-loss curved waveguide, which includes an outer waveguide plate and an inner waveguide plate, both of which are curved metal plates with arc-shaped curved parts, and the outer waveguide plate and the inner waveguide plate They are arranged in parallel with a distance from each other, and periodic grooves are respectively provided on the opposite surfaces of the outer waveguide plate and the inner waveguide plate. The terahertz wave is input from one end of the outer waveguide plate and the inner waveguide plate in the transverse magnetic wave mode, enters the gap between the outer waveguide plate and the inner waveguide plate, forms a surface wave and transmits in the gap, and then transmits to the outer waveguide plate and the inner waveguide The other end of the plate, thus realizing the low-loss bending transmission of terahertz waves. According to the technical solution of the present invention, not only the bending loss of the terahertz wave is low, but also the structure is simple, the use is convenient, and the cost is low.

Figure 201310360908

Description

太赫兹低损耗弯曲波导Terahertz low-loss curved waveguide

技术领域technical field

本发明涉及一种太赫兹低损耗弯曲波导。The invention relates to a terahertz low-loss curved waveguide.

背景技术Background technique

太赫兹(THz)波是位于微波和远红外线之间的电磁波。近年来,随着超快激光技术的发展,使得太赫兹脉冲的产生有了稳定、可靠的激发光源,使人们能够研究太赫兹。太赫兹在生物医学、安全监测、无损伤探测、天文学、光谱与成像技术以及信息科学等领域有着广泛的应用。太赫兹波导是太赫兹应用的一种基本的传输器件并且是太赫兹通信系统的关键器件。国际上,Maier等人于2008年研究了太赫兹波在结构化金属表面的传播特性(Nature Photonics,2,175-179,2008),Nahata等于2011年研究了矩形凹槽阵列上的伪表面等离子波导(Optics Express,19,1072-1080,2011),但是所有这些结构的横向电尺寸较大,导致在弯曲的情况下损耗较大。Terahertz (THz) waves are electromagnetic waves that lie between microwaves and far infrared rays. In recent years, with the development of ultrafast laser technology, the generation of terahertz pulses has a stable and reliable excitation light source, enabling people to study terahertz. Terahertz has a wide range of applications in biomedicine, safety monitoring, non-destructive detection, astronomy, spectroscopy and imaging technology, and information science. Terahertz waveguide is a basic transmission device for terahertz applications and a key device for terahertz communication systems. Internationally, Maier et al. studied the propagation characteristics of terahertz waves on structured metal surfaces in 2008 (Nature Photonics, 2, 175-179, 2008), and Nahata et al. studied pseudo-surface plasmon waveguides on rectangular groove arrays in 2011 ( Optics Express, 19, 1072-1080, 2011), but the lateral electrical dimensions of all these structures are large, resulting in large losses in the case of bending.

发明内容Contents of the invention

本发明的目的在于克服上述现有的波导在弯曲的情况下损耗较大的缺陷。The purpose of the present invention is to overcome the defect that the above-mentioned existing waveguide has relatively large loss in the case of bending.

为了实现这一目的,本发明提供了一种太赫兹低损耗弯曲波导,其包括外侧波导板和内侧波导板,外侧波导板和内侧波导板均为弯曲的金属板并且弯曲部为圆弧状,外侧波导板和内侧波导板彼此相距地平行布置,在外侧波导板和内侧波导板的彼此相对的表面上分别设有周期性凹槽。In order to achieve this purpose, the present invention provides a terahertz low-loss curved waveguide, which includes an outer waveguide plate and an inner waveguide plate, both of which are curved metal plates and the curved portion is arc-shaped, The outer waveguide plate and the inner waveguide plate are arranged in parallel with a distance from each other, and periodic grooves are respectively provided on the opposite surfaces of the outer waveguide plate and the inner waveguide plate.

优选地,外侧波导板和内侧波导板的金属材质为铝、铜、银、铁、镍中的一种。Preferably, the metal material of the outer waveguide plate and the inner waveguide plate is one of aluminum, copper, silver, iron, and nickel.

根据本发明的一优选实施例中,波导的弯曲角度为直角,弯曲半径大于500μm。According to a preferred embodiment of the present invention, the bending angle of the waveguide is a right angle, and the bending radius is greater than 500 μm.

根据本发明的一优选实施例中,其中外侧波导板和内侧波导板形状类似,外侧波导板上的凹槽和内侧波导板上的凹槽的尺寸和间隔周期均相同。According to a preferred embodiment of the present invention, the outer waveguide plate and the inner waveguide plate are similar in shape, and the grooves on the outer waveguide plate and the grooves on the inner waveguide plate have the same size and interval.

根据本发明的一优选实施例中,外侧波导板上的凹槽和内侧波导板上的凹槽关于外侧波导板和内侧波导板之间的中心线对称。According to a preferred embodiment of the present invention, the grooves on the outer waveguide plate and the grooves on the inner waveguide plate are symmetrical about the center line between the outer waveguide plate and the inner waveguide plate.

根据本发明的一优选实施例中,凹槽的宽度为50~500μm,深度为50~500μm,长度为不低于500μm;其中凹槽的宽度优选为152μm,深度优选为274μm。According to a preferred embodiment of the present invention, the width of the groove is 50-500 μm, the depth is 50-500 μm, and the length is not less than 500 μm; the width of the groove is preferably 152 μm, and the depth is preferably 274 μm.

根据本发明的一优选实施例中,凹槽的周期性间隔优选为475μm。According to a preferred embodiment of the present invention, the periodic interval of the grooves is preferably 475 μm.

根据本发明的一优选实施例中,外侧波导板的弯曲部两个表面的圆弧半径分别为0.8mm和1.2mm,而内侧波导板的弯曲部两个表面的圆弧半径分别为0.2mm和0.6mm。According to a preferred embodiment of the present invention, the arc radii of the two surfaces of the curved portion of the outer waveguide plate are 0.8 mm and 1.2 mm respectively, while the arc radii of the two surfaces of the curved portion of the inner waveguide plate are 0.2 mm and 1.2 mm respectively. 0.6mm.

根据本发明的一优选实施例中,外侧波导板与内侧波导板之间的间距为0.1~0.5mm,板间及凹槽内媒质为空气。According to a preferred embodiment of the present invention, the distance between the outer waveguide plate and the inner waveguide plate is 0.1-0.5 mm, and the medium between the plates and in the groove is air.

与现有技术相比,根据本发明的技术方案,不仅降低了太赫兹波弯曲损耗,而且结构简单、使用方便、成本低廉。Compared with the prior art, according to the technical solution of the present invention, not only the bending loss of the terahertz wave is reduced, but also the structure is simple, the use is convenient, and the cost is low.

附图说明Description of drawings

图1以立体图示意性示出了根据本发明一优选实施例的太赫兹低损耗弯曲波导的结构;Figure 1 schematically shows the structure of a terahertz low-loss curved waveguide according to a preferred embodiment of the present invention in a perspective view;

图2以侧视图进一步示意性示出了根据本发明一优选实施例的太赫兹低损耗弯曲波导的结构。Fig. 2 further schematically shows the structure of a terahertz low-loss curved waveguide according to a preferred embodiment of the present invention in a side view.

具体实施方式Detailed ways

下面结合附图详细描述本发明的太赫兹低损耗弯曲波导。本领域技术人员应当理解,下面描述的实施例仅是对本发明的示例性说明,而非用于对其作出任何限制。The terahertz low-loss curved waveguide of the present invention will be described in detail below with reference to the accompanying drawings. Those skilled in the art should understand that the embodiments described below are only illustrative illustrations of the present invention, and are not intended to limit it in any way.

如图1所示,在根据本发明的一优选实施例中,太赫兹低损耗弯曲波导包括两个金属板即外侧波导板1和内侧波导板2,这两个金属板均是弯曲的金属板,弯曲部(拐角处)为圆弧状,外侧波导板1和内侧波导板2平行放置并且外侧波导板1和内侧波导板2之间有一定的间隙,在外侧波导板1和内侧波导板2的相对的表面上设有周期性凹槽,也就是在外侧波导板1的内表面上设有周期性凹槽11以及在内侧波导板2的外表面上设有周期性凹槽21。另外,可以理解的是,凹槽的数量可根据实际所需的传输长度来确定,这里的传输长度指的是实际应用中太赫兹信号的传输长度,也就是波导的长度。As shown in Figure 1, in a preferred embodiment according to the present invention, the terahertz low-loss curved waveguide includes two metal plates, namely the outer waveguide plate 1 and the inner waveguide plate 2, both of which are curved metal plates , the bending part (corner) is arc-shaped, the outer waveguide plate 1 and the inner waveguide plate 2 are placed in parallel and there is a certain gap between the outer waveguide plate 1 and the inner waveguide plate 2, and the outer waveguide plate 1 and the inner waveguide plate 2 Periodic grooves are provided on opposite surfaces of the outer waveguide plate 1 , that is, periodic grooves 11 are provided on the inner surface of the outer waveguide plate 1 and periodic grooves 21 are provided on the outer surface of the inner waveguide plate 2 . In addition, it can be understood that the number of grooves can be determined according to the actual required transmission length, where the transmission length refers to the transmission length of the terahertz signal in practical applications, that is, the length of the waveguide.

其中,外侧波导板1和内侧波导板2的形状可相类似,外侧波导板1上的凹槽11和内侧波导板2上的凹槽21的尺寸和间隔周期可均相同。优选地,凹槽11和凹槽21关于外侧波导板1和内侧波导板2之间的中心线呈对称状态分布。The outer waveguide plate 1 and the inner waveguide plate 2 may have similar shapes, and the grooves 11 on the outer waveguide plate 1 and the grooves 21 on the inner waveguide plate 2 may have the same size and interval. Preferably, the grooves 11 and 21 are symmetrically distributed with respect to the center line between the outer waveguide plate 1 and the inner waveguide plate 2 .

太赫兹波以横磁波模式从外侧波导板1和内侧波导板2的一端输入,进入外侧波导板1和内侧波导板2之间的间隙后形成表面波在该间隙中传输,进而传送到外侧波导板1和内侧波导板2的另一端,从而实现太赫兹波的低弯曲损耗传输。The terahertz wave is input from one end of the outer waveguide plate 1 and the inner waveguide plate 2 in the transverse magnetic wave mode, enters the gap between the outer waveguide plate 1 and the inner waveguide plate 2, forms a surface wave, and is transmitted in the gap, and then transmitted to the outer waveguide plate 1 and the other end of the inner waveguide plate 2, so as to realize low bending loss transmission of terahertz waves.

需要指出的是,弯曲的金属板(也就是外侧波导板1和内侧波导板2)的弯曲角度可以为任意角度,例如90°。It should be pointed out that the bending angle of the bent metal plate (that is, the outer waveguide plate 1 and the inner waveguide plate 2 ) can be any angle, for example, 90°.

波导的弯曲半径优选大于500μm,这里,波导的弯曲半径指的是外侧波导板1和内侧波导板2之间的中心线在弯曲部分的弯曲半径。The bending radius of the waveguide is preferably greater than 500 μm. Here, the bending radius of the waveguide refers to the bending radius of the center line between the outer waveguide plate 1 and the inner waveguide plate 2 at the bending portion.

这种太赫兹弯曲波导可以低损耗地改变太赫兹波的传输方向。另外,本领域技术人员可以理解的是,可以通过调整凹槽尺寸以及外侧波导板1和内侧波导板2之间的板间距来实现不同波段的太赫兹波的传输。This terahertz curved waveguide can change the transmission direction of terahertz waves with low loss. In addition, those skilled in the art can understand that the transmission of terahertz waves in different wavebands can be realized by adjusting the groove size and the plate spacing between the outer waveguide plate 1 and the inner waveguide plate 2 .

下面,参照图2进一步描述根据本发明一优选实施例的太赫兹低损耗弯曲波导的结构。如图2所示,外侧波导板1和内侧波导板2之间的距离D为200μm,凹槽11、21深度H为274μm,凹槽11、21宽度W为152μm,凹槽11、21出现的周期T为475μm,板长L1为3mm,板长L2为3mm,板厚S为0.4mm,板宽为2mm,圆弧半径R1为0.2mm,圆弧半径R2为0.6mm,圆弧半径R3为0.8mm,圆弧半径R4为1.2mm,该波导的弯曲半径为700μm,凹槽的长度与波导板宽度相同,外侧波导板1和内侧波导板2弯曲角度为90°,板间及凹槽内媒质为空气。Next, the structure of the terahertz low-loss curved waveguide according to a preferred embodiment of the present invention will be further described with reference to FIG. 2 . As shown in Figure 2, the distance D between the outer waveguide plate 1 and the inner waveguide plate 2 is 200 μm, the depth H of the grooves 11 and 21 is 274 μm, the width W of the grooves 11 and 21 is 152 μm, and the grooves 11 and 21 appear The period T is 475μm, the plate length L1 is 3mm, the plate length L2 is 3mm, the plate thickness S is 0.4mm, the plate width is 2mm, the arc radius R1 is 0.2mm, the arc radius R2 is 0.6mm, and the arc radius R3 is 0.8mm, arc radius R4 is 1.2mm, the bending radius of the waveguide is 700μm, the length of the groove is the same as the width of the waveguide plate, the bending angle of the outer waveguide plate 1 and the inner waveguide plate 2 is 90°, between the plates and in the groove The medium is air.

接着,一并描述根据本发明一优选实施例的太赫兹低损耗弯曲波导的示例性主要加工步骤(下面的步骤1-2)及损耗测试(下面的步骤3-4)。Next, exemplary main processing steps (steps 1-2 below) and loss testing (steps 3-4 below) of the terahertz low-loss curved waveguide according to a preferred embodiment of the present invention are described together.

1)先用机械加工的方法按尺寸加工出一定厚度并且90°弯曲的金属板两块(外侧波导板1和内侧波导板2),然后用机械微加工的方法在金属板的相应表面上加工出凹槽11、21,如图2所示。1) First process two metal plates with a certain thickness and 90° bending (outer waveguide plate 1 and inner waveguide plate 2) according to the size by mechanical processing, and then process on the corresponding surface of the metal plate by mechanical micromachining Out the grooves 11, 21, as shown in Figure 2.

2)将外侧波导板1和内侧波导板2有凹槽的面相对地平行放置,并进一步使凹槽11、21相对应,同时保证两板相对平行。2) Place the grooved surfaces of the outer waveguide plate 1 and the inner waveguide plate 2 in parallel, and further make the grooves 11 and 21 correspond to each other, while ensuring that the two plates are relatively parallel.

3)打开时域太赫兹波谱系统(TDS系统),将上述制成的如图2所示的太赫兹低损耗弯曲波导接入到TDS系统中合适的位置,使太赫兹信号从太赫兹低损耗弯曲波导一端上的狭缝入射。3) Turn on the time-domain terahertz spectroscopy system (TDS system), and connect the terahertz low-loss curved waveguide made above as shown in Figure 2 to a suitable position in the TDS system, so that the terahertz signal is transmitted from the terahertz low-loss Slit incidence on one end of the curved waveguide.

4)采集数据:使用TDS系统的光电导接收器对太赫兹低损耗弯曲波导的输出信号进行采集。4) Collect data: Use the photoconductive receiver of the TDS system to collect the output signal of the terahertz low-loss curved waveguide.

测试结果表明该太赫兹低损耗弯曲波导输出信号在0.4THz到0.6THz的信号透射率高于95%,这明显优于现有技术中的弯曲波导的损耗。Test results show that the signal transmittance of the output signal of the terahertz low-loss curved waveguide at 0.4 THz to 0.6 THz is higher than 95%, which is obviously better than the loss of the curved waveguide in the prior art.

本发明的太赫兹低损耗弯曲波导结构简单、使用方便、成本低廉。The terahertz low-loss curved waveguide of the invention has the advantages of simple structure, convenient use and low cost.

Claims (10)

1. a Terahertz low-loss curved waveguide, it is characterized in that: comprise outside waveguide plate and inboard waveguide plate, described outside waveguide plate and described inboard waveguide plate are crooked metallic plate and bend is circular-arc, described outside waveguide plate and described inboard waveguide plate are arranged in parallel each other apart, are respectively equipped with periodically groove on the surfaces opposite to each other of described outside waveguide plate and described inboard waveguide plate.
2. Terahertz low-loss curved waveguide according to claim 1, the metal material of wherein said outside waveguide plate and described inboard waveguide plate is a kind of in aluminium, copper, silver, iron, nickel.
3. Terahertz low-loss curved waveguide according to claim 1, the angle of bend of wherein said waveguide is right angle, bending radius is greater than 500 μ m.
4. Terahertz low-loss curved waveguide according to claim 1, wherein said outside waveguide plate and described inboard waveguide plate shape are similar, and size and the gap periods of the groove on the groove on the waveguide plate of the described outside and described inboard waveguide plate are all identical.
5. Terahertz low-loss curved waveguide according to claim 1, the groove on the groove on the waveguide plate of the wherein said outside and described inboard waveguide plate is about the center line symmetry between described outside waveguide plate and described inboard waveguide plate.
6. Terahertz low-loss curved waveguide according to claim 1, the width of wherein said groove is 50~500 μ m, and the degree of depth is 50~500 μ m, and length is for being not less than 500 μ m.
7. Terahertz low-loss curved waveguide according to claim 6, the width of wherein said groove is 152 μ m, the degree of depth is 274 μ m.
8. Terahertz low-loss curved waveguide according to claim 1, the periodic intervals of wherein said groove is 475 μ m.
9. Terahertz low-loss curved waveguide according to claim 1, the arc radius on two surfaces of bend of wherein said outside waveguide plate is respectively 0.8mm and 1.2mm, and the arc radius on two surfaces of bend of described inboard waveguide plate is respectively 0.2mm and 0.6mm.
10. according to the described Terahertz low-loss of any one curved waveguide in claim 1-9, the spacing between wherein said outside waveguide plate and described inboard waveguide plate is 0.1~0.5mm, and reaching medium in described groove between plate is air.
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CN105551920A (en) * 2016-01-19 2016-05-04 电子科技大学 Ultra wide band high-power terahertz radiation source
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CN110133855A (en) * 2019-05-08 2019-08-16 上海理工大学 Diffraction-free transmission of terahertz waves based on plasma column arrays
WO2019179095A1 (en) * 2018-03-22 2019-09-26 华为技术有限公司 Mode conversion device and signal transmission system
CN113346211A (en) * 2021-06-04 2021-09-03 北京邮电大学 Electromagnetic wave transmission waveguide
CN116430510A (en) * 2023-06-14 2023-07-14 之江实验室 Optical waveguide and optical waveguide design method

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