CN103436861A - Separating spray header device - Google Patents
Separating spray header device Download PDFInfo
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- CN103436861A CN103436861A CN2013104013665A CN201310401366A CN103436861A CN 103436861 A CN103436861 A CN 103436861A CN 2013104013665 A CN2013104013665 A CN 2013104013665A CN 201310401366 A CN201310401366 A CN 201310401366A CN 103436861 A CN103436861 A CN 103436861A
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- gas
- spray header
- header device
- separate type
- ventpipe
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Abstract
The invention discloses a separating spray header device. The separating spray header device comprises a gas distribution part and a cooling part, wherein the gas distribution part comprises multiple vent pipes; the cooling part is in a bucket shape and comprises a bottom and a side wall, the gas distribution part is contained in the side wall, and the gas distribution part and the cooling part are matched so as to form a sealed space; the side wall comprises a blowing channel for inputting the blowing gas into the sealed space, the bottom comprises multiple vent holes, and each vent pipe is correspondingly connected to each vent hole. The separating spray header device provided by the invention has small possibility of generating faults.
Description
Technical field
The present invention relates to a kind of spray equipment of manufacturing equipment, relate in particular to a kind of separate type spray header device.
Background technology
MOCVD (Metal-organic Chemical Vapor Deposition, organometallics chemical vapour deposition) equipment is for the manufacture of the important equipment of the contour accurate device of chip in prior art.The manufacture difficulty of MOCVD equipment is larger, especially its spray header.
In prior art, in order to reduce the manufacture difficulty of MOCVD device spray head, designed a kind of spray header device of separate type.The spray header device of this separate type comprises that an assembly for distribution of gas and one are for cooling assembly.
Refer to Fig. 1 to Fig. 3.Fig. 1 is the sectional view of gas dispenser of the spray header device of separate type in prior art, and Fig. 2 is the sectional view of the cooling end of the spray header device of separate type in prior art, and Fig. 3 is the sectional view after the welding of cooling end shown in the dispenser of gas shown in Fig. 1 and Fig. 2.The spray header device 1 of this separate type comprises a gas dispenser 11 and a cooling end 12.This gas dispenser 11 and this cooling end 12 are generally round pie, have the bottom surface of two circles and the side of an annular.The cavity that there is the disc-shape of two stacked settings in this gas dispenser 11, wherein, a cavity is the first gas distribution chamber 111, the another one cavity is the second gas distribution chamber 112.This first gas distribution chamber 111 and this second gas distribution chamber 112 all go out by a plurality of the same surface that vent hole 113 extends to this gas dispenser 11.To go out the surface that vent hole 113 is communicated to this first gas distribution chamber 111 and this second gas distribution chamber 112 be the surface of giving vent to anger by a plurality of to define this.
This cooling end 12 is also round pie, comprises a cooling chamber 121 and a plurality of ventilation through hole 122.The plurality of ventilation through hole 122 goes out vent hole 113 corresponding setting one by one with the plurality of.When this cooling end 12 and 11 assembling of this gas dispenser, go out vent hole 113 and the plurality of ventilation through hole 122 is corresponding one by one by the plurality of, this surface label of giving vent to anger is should after cooling end 12, by this cooling end 12 and 11 welding of this gas dispenser, make each go out the passage of vent hole 113 and a ventilation of ventilation through hole 122 cooperation formation.
Yet, due to the problem of weldprocedure, the gas dispenser 11 of the spray header device 1 of separate type of the prior art and cooling end 12 easily produce gap in welding process.This just causes the reactant gases that vent hole 113 discharges of gas dispenser 11 easily to enter among this gap, and forms settling in reaction in this gap.This situation will make the spray header device 1 that uses this separate type easily produce fault.
Summary of the invention
In view of separate type spray header device of the prior art easily produces the technical problem of fault, be necessary to provide a kind of separate type spray header device of difficult generation fault.
Technical scheme provided by the invention is:
A kind of separate type spray header device, comprise a gas dispenser and a cooling end.This gas dispenser comprises a plurality of ventpipes; This cooling end is tubbiness, comprises a bottom and a sidewall; This gas dispenser is contained in this sidewall, and coordinates an enclosed space of formation with this cooling end; This sidewall comprises that one for the purge passage to this enclosed space input sweeping gas; This bottom comprises a plurality of ventilating pits, and each ventpipe correspondence is connected to a ventilating pit.
In an embodiment of further optimizing of separate type spray header device of the present invention, the outside dimension of this ventpipe is less than the internal diameter size of this ventilating pit, and each ventpipe corresponding inserted is in a ventilating pit.
In an embodiment of further optimizing of separate type spray header device of the present invention, the outside dimension of this ventpipe is greater than the internal diameter size of this ventilating pit, conflicts in this ventpipe and this bottom, and each ventpipe covers a ventilating pit.
In an embodiment of further optimizing of separate type spray header device of the present invention, this ventpipe comprises the first ventpipe and the second ventpipe, this gas dispenser comprises first gas distribution chamber and second gas distribution chamber, this first gas distribution chamber is communicated with this first ventpipe, and this second gas distribution chamber is communicated with this second ventpipe.
In an embodiment of further optimizing of separate type spray header device of the present invention, this cooling end is the drum shape, and this gas dispenser is the cake shape, and this bottom is the cake shape, and this sidewall is toroidal.
In an embodiment of further optimizing of separate type spray header device of the present invention, this gas dispenser comprises the side of a toroidal and is arranged at least one locator protrusions on this side; This sidewall comprises inner and outer wall, and this inwall is provided with the positioning runner be used in conjunction with this locator protrusions; The interior profile of the outline of this locator protrusions and this positioning runner coincide.
In an embodiment of further optimizing of separate type spray header device of the present invention, be provided with a cooling chamber in this bottom, this cooling chamber is round pie; Being provided with ，Gai cooling channel, a cooling channel in this sidewall is connected with this cooling chamber.
A kind of separate type spray header device, comprise a refrigerating module, a gas distribution module be oppositely arranged with this refrigerating module.This separate type spray header device also comprises that purges a module; This gas distribution module extends in this refrigerating module by a plurality of ventpipes; This purging module position, between this refrigerating module and this gas distribution module, exporting sweeping gas, prevents that reactant gases from flowing into the zone between refrigerating module and this gas distribution module.
In an embodiment of further optimizing of separate type spray header device of the present invention, this refrigerating module comprises cools body and an a plurality of cooling through hole that runs through these two bottom surfaces of cools body with round pie of round pie cooling chamber; This gas distribution module comprises the distribution body of the gas distribution chamber of a round pie with two stacked settings; This ventpipe is arranged in this distribution body, and extends and to be inserted into this cooling through hole, corresponding one by one with this cooling through hole.
In one of the separate type spray header device of the present invention embodiment of further optimizing, this purging module comprise an annular wall and be arranged in annular wall for inputting the purge passage of sweeping gas; This annular wall has two circular port, and this distribution body is positioned at a circular port, and this cools body is positioned at another circular port; This distribution body, this cools body and this annular wall coordinate an enclosed space of formation.
With respect to prior art, the present invention at least has following beneficial effect:
Because the cooling end of separate type spray header device of the present invention is tubbiness, its gas dispenser is contained in the sidewall of this tubbiness cooling end, and coordinates with this cooling end and form an enclosed space; This sidewall comprises that one for the purge passage to this enclosed space input sweeping gas; Therefore separate type spray header device of the present invention can blow away by using the gas for deposition that sweeping gas leaks this gas dispenser between this gas dispenser and this cooling end, make this gas for deposition can not deposit between this cooling end and this gas dispenser, thereby make separate type spray header device of the present invention be not easy to produce fault.
Simultaneously, with respect to prior art, the gas for deposition of inciting somebody to action by the use sweeping gas due to separate type spray header device of the present invention blows away, therefore the gas dispenser of separate type spray header device of the present invention and cooling end are without welding together, make separate type spray header device assembling of the present invention simple, saved built-up time and cost.
The accompanying drawing explanation
Fig. 1 is the sectional view of gas dispenser of the spray header device of separate type in prior art;
Fig. 2 is the sectional view of the cooling end of the spray header device of separate type in prior art;
Fig. 3 is the sectional view after the welding of cooling end shown in the dispenser of gas shown in Fig. 1 and Fig. 2;
Fig. 4 is the vertical view of separate type spray header device of the present invention;
Fig. 5 is the sectional view of the spray header device of separate type shown in Fig. 4 along the A-A line;
Fig. 6 is the vertical view of the gas dispenser of the spray header device of separate type shown in Fig. 4;
Fig. 7 is the sectional view of the dispenser of gas shown in Fig. 6 along the B-B line;
Fig. 8 is the vertical view of the cooling end of the spray header device of separate type shown in Fig. 4;
Fig. 9 is the sectional view of cooling end shown in Fig. 8 along the C-C line.
Embodiment
Refer to Fig. 4 to Fig. 9, Fig. 4 is the vertical view of separate type spray header device of the present invention, Fig. 5 is the sectional view of the spray header device of separate type shown in Fig. 4 along the A-A line, Fig. 6 is the vertical view of the gas dispenser of the spray header device of separate type shown in Fig. 4, Fig. 7 is the sectional view of the dispenser of gas shown in Fig. 6 along the B-B line, Fig. 8 is the vertical view of the cooling end of the spray header device of separate type shown in Fig. 4, and Fig. 9 is the sectional view of cooling end shown in Fig. 8 along the C-C line.
Separate type spray header device 2 of the present invention comprises a gas dispenser 21 and a cooling end 22.This gas dispenser 21 is for arriving deposition region by least two class gas transmissions, and this cooling end 22 is for cooling these gases.
This gas dispenser 21 is round pie, have two rounded bottom surfaces that are parallel to each other with one for being connected the ring-type side of these two rounded bottom surfaces.This gas dispenser 21 comprises first gas distribution chamber 211 and second gas distribution chamber 212.This first gas distribution chamber 211 is identical with these the second gas distribution chamber 212 structures, is disc-shape, is positioned at this gas dispenser 21.This first gas distribution chamber 211 and the stacked setting of this second gas distribution chamber 212, have certain intervals, and parallel with these two rounded bottom surfaces.This gas dispenser 21 also comprises a plurality of escape pipes 213.The plurality of escape pipe 213 is generally cylindrical.The plurality of escape pipe 213 is arranged on a rounded bottom surface of this gas dispenser 21, defines this rounded bottom surface for the face of giving vent to anger.A part of escape pipe in the plurality of escape pipe 213 is communicated to this first gas distribution chamber 211, and another part escape pipe in the plurality of escape pipe 213 is communicated to this second gas distribution chamber 212.That is, this first gas distribution chamber 211 makes this first gas distribution chamber 211 be in communication with the outside by a plurality of escape pipes 213, and this second gas distribution chamber 212 makes this second gas distribution chamber 212 be in communication with the outside by a plurality of escape pipes 213.The plurality of escape pipe 213 is given vent to anger and is extended towards the direction of the face of giving vent to anger away from this from this, and the bearing of trend of escape pipe is perpendicular to this face of giving vent to anger.
This gas dispenser 21 also comprises a plurality of locator protrusions 214.This locator protrusions 214 is arranged on the annular side of this gas dispenser.This locator protrusions 214 is long strip shape, the central axes of its bearing of trend and this annular side.
This cooling end 22 is tubbiness, has bottom 227 and a circular sidewall 223 of a round pie.Be provided with a cooling chamber 221 and a plurality of ventilating pit 222 in the bottom 227 of this cooling end 22.This cooling chamber 221 is also round pie, for loading cooling liqs.The plurality of ventilating pit 222 runs through two bottom surfaces of this bottom 227.This ventilating pit 222 and the corresponding setting one by one of this escape pipe 213, the internal diameter size of this ventilating pit 222 is greater than the outside dimension of this escape pipe 213.
The sidewall 223 of this cooling end 22 is vertical with this bottom 227, has common axle center.This sidewall 223 comprises inner and outer wall, and inwall refers to the wall of annular inboard, and outer wall refers to the wall of annular outboard.This inwall is provided with a plurality of positioning runners 226.The plurality of positioning runner 226 is long strip shape, and the exterior contour of its in-profile and this locator protrusions 214 matches.This positioning runner 226 extends to this bottom 227 from the top of this sidewall 223.This bottom 227 of end-point distances near this bottom 227 of this positioning runner 226 has certain distance L, and this distance L is less than the length of this ventpipe 213.The interior profile of this sidewall 223 and the outline of this gas dispenser 21 are basic identical, and the interior profile of this sidewall 223 is slightly larger than the outline of this gas dispenser 21.
Also be provided with a purge passage 224 on the sidewall 223 of this cooling end 22.This purge passage 224 is for inputting sweeping gas.This purge passage 224 extends to the medial surface of this sidewall 223 from the top of this sidewall 223.So-called top is the bottom surface of this sidewall 223 away from this bottom 227.The inlet mouth of this purge passage 224 is positioned at the top of this sidewall 223, and the air outlet of this purge passage 224 is positioned at the position of close this bottom 227 on these sidewall 223 medial surfaces.This sweeping gas is generally rare gas element.
Also be provided with a cooling channel 225 on the sidewall 223 of this cooling end 22.This cooling channel 225 for to the interior input of this cooling chamber 221 and/or output cooling liqs.For example, this cooling channel 225 is for to the interior input water coolant of this cooling chamber 221.One end of this cooling channel 221 is connected to the top of this sidewall 223, and the other end is connected to this cooling chamber 221.
When mounted, giving vent to anger facing to the bottom of this cooling end 22 inboards of this gas dispenser 21, locator protrusions 214 on this gas dispenser 21 is aimed at the positioning runner 226 of this cooling end 22, on the track of this positioning runner 224 and the 214 cooperation formation of this locator protrusions, slips into this cooling end 22.The sidewall 223 of this cooling end 22 and bottom 227 cooperations have formed a receiving space, and this gas dispenser 21 is accommodated in this receiving space.
Because this positioning runner 226 still has a segment distance L apart from this bottom 227, and this distance L is less than the length of this ventpipe 213, and this ventpipe 213 is corresponding one by one with this ventilating pit 222, and the outside dimension of ventpipe 213 is less than the internal diameter size of this ventilating pit 222; Therefore, after installation, a plurality of ventpipes 213 of this gas dispenser 21 insert in this ventilating pit 222 one to one, and simultaneously, this gas dispenser 21 coordinates and formed an enclosed space 23 with the cooling end 22 of tubbiness.This enclosed space 23 between this gas dispenser 21 and this bottom 227, for this annular sidewall 223 in.That is, the plurality of ventpipe 213 is plugged in the plurality of ventilating pit 222 correspondingly, and each ventpipe 213 is plugged in a ventilating pit 222, and each ventilating pit 222 is interior is plugged a ventpipe 213; Separate type spray equipment 1 of the present invention comprises that a gas dispenser 21, cooling end 22 and one coordinate by this gas dispenser 21 and this cooling end 22 enclosed cavity 23 formed.
The air outlet of this purge passage 223 is connected with this enclosed space 23, makes this enclosed space 23 be connected with extraneous by this purge passage 23.Simultaneously, because the outside dimension of this ventpipe 213 is less than the internal diameter size of this ventilating pit 222, this enclosed space 23 also is connected with the external world by the plurality of ventilating pit 222.
When separate type spray header device 1 work of the present invention:
This first gas distribution chamber 211 and the different default gas of the interior injection of this second gas distribution chamber 212, this default gas passes through this ventpipe 213 to the interior transmission of this ventilating pit 222.Be provided with cooling liqs in the cooling chamber 221 of this cooling end 22, make these default gases be cooled.
Simultaneously, the inlet mouth of this purge passage 224 passes into sweeping gas, and this sweeping gas is gushed out from this air outlet, enters this enclosed space 23.This sweeping gas can be from the interior discharge of this ventilating pit 222, or can discharge from the gap between this gas dispenser 21 and this sidewall 223.Perhaps, in the another one embodiment, a sweeping gas exhaust channel is set on this sidewall 223, for this sweeping gas is discharged.
With respect to prior art, because gas dispenser 21 of the present invention is provided with the ventpipe 213 be inserted in these cooling end 22 ventilating pits 222, be provided with the purge passage 224 of input sweeping gas on the sidewall 223 of this cooling end 22, therefore, when separate type spray header device 2 work of the present invention, while entering between this cooling end 22 and this gas dispenser 21 for the default gas deposited, the sweeping gas that can be transfused to blows out.Thereby make this gas for deposition can not deposit between this gas dispenser 21 and this cooling end 22, and then can not cause this separate type spray header device 2 to produce fault because of aforementioned deposition.
In addition, with respect to prior art, because separate type spray header device 2 of the present invention also comprises a plurality of a plurality of positioning runners 226 that are arranged on the locator protrusions 214 on gas dispenser 21 and are used in conjunction with one by one with this locator protrusions 214, therefore, when separate type spray header device 2 assembling of the present invention, can make simple and convenient assembly, improved efficiency, precision increase according to cooperatively interacting of this locator protrusions 214 and this positioning runner 226.
In addition, with respect to prior art, because the gas dispenser 21 of separate type spray header device 2 of the present invention and cooling end 22 just can carry out work without welding, make the packaging technology simplification of separate type spray header device 2 of the present invention, promote packaging efficiency, saved assembly cost.
Certainly the present invention also can have other change embodiments, for example:
Ventpipe 213 in the present invention is not to be plugged in this ventilating pit 222, and this ventpipe 213 docks with this ventilating pit 222, forms the breather line of a sealing, makes default gas transfer out from breather line.For example, this ventpipe 213 is conflicted just on the surface of this bottom 227, covers this ventilating pit 222.
Realization in order to demonstrate the invention, described above-mentioned embodiment.But other variations of the present invention and modification, be apparent for those skilled in the art, any modification in essence disclosed in this invention and fundamental principle scope/variation or imitation conversion all belong to claim protection domain of the present invention.
Claims (10)
1. a separate type spray header device, comprise a gas dispenser and a cooling end, and it is characterized in that: this gas dispenser comprises a plurality of ventpipes; This cooling end is tubbiness, comprises a bottom and a sidewall; This gas dispenser is contained in this sidewall, and coordinates an enclosed space of formation with this cooling end; This sidewall comprises that one for the purge passage to this enclosed space input sweeping gas; This bottom comprises a plurality of ventilating pits, and each ventpipe correspondence is connected to a ventilating pit.
2. separate type spray header device according to claim 1, is characterized in that, each ventpipe corresponding inserted is in a ventilating pit.
3. separate type spray header device according to claim 1, is characterized in that, the outside dimension of this ventpipe is greater than the internal diameter size of this ventilating pit, conflicts in this ventpipe and this bottom, and each ventpipe covers a ventilating pit.
4. according to the described separate type spray header device of claims 1 to 3 any one, it is characterized in that, this ventpipe comprises the first ventpipe and the second ventpipe, this gas dispenser comprises first gas distribution chamber and second gas distribution chamber, this first gas distribution chamber is communicated with this first ventpipe, and this second gas distribution chamber is communicated with this second ventpipe.
5. separate type spray header device according to claim 4, is characterized in that, this cooling end is the drum shape, and this gas dispenser is the cake shape, and this bottom is the cake shape, and this sidewall is toroidal.
6. separate type spray header device according to claim 5, is characterized in that, this gas dispenser comprises the side of a toroidal and is arranged at least one locator protrusions on this side; This sidewall comprises inner and outer wall, and this inwall is provided with the positioning runner be used in conjunction with this locator protrusions; The interior profile of the outline of this locator protrusions and this positioning runner coincide.
7. separate type spray header device according to claim 4, is characterized in that, is provided with a cooling chamber in this bottom, and this cooling chamber is round pie; Being provided with ，Gai cooling channel, a cooling channel in this sidewall is connected with this cooling chamber.
8. a separate type spray header device, comprise a refrigerating module, a gas distribution module be oppositely arranged with this refrigerating module, it is characterized in that, this separate type spray header device also comprises that purges a module; This gas distribution module extends in this refrigerating module by a plurality of ventpipes; This purging module position, between this refrigerating module and this gas distribution module, exporting sweeping gas, prevents that the reactant gases in ventpipe from flowing into the zone between refrigerating module and this gas distribution module.
9. separate type spray header device according to claim 8, is characterized in that, this refrigerating module comprises cools body and an a plurality of cooling through hole that runs through these two bottom surfaces of cools body with round pie of round pie cooling chamber; This gas distribution module comprises the distribution body of the gas distribution chamber of a round pie with two stacked settings; This ventpipe is arranged in this distribution body, and extends and to be inserted into this cooling through hole, corresponding one by one with this cooling through hole.
10. separate type spray header device according to claim 9, is characterized in that, this purging module comprise an annular wall and be arranged in annular wall for inputting the purge passage of sweeping gas; This annular wall has two circular port, and this distribution body is positioned at a circular port, and this cools body is positioned at another circular port; This distribution body, this cools body and this annular wall coordinate an enclosed space of formation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104013665A CN103436861A (en) | 2013-09-05 | 2013-09-05 | Separating spray header device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104013665A CN103436861A (en) | 2013-09-05 | 2013-09-05 | Separating spray header device |
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| CN103436861A true CN103436861A (en) | 2013-12-11 |
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| CN2013104013665A Pending CN103436861A (en) | 2013-09-05 | 2013-09-05 | Separating spray header device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624865A (en) * | 2017-03-15 | 2018-10-09 | 汉民科技股份有限公司 | Detachable air injection device applied to semiconductor equipment |
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2013
- 2013-09-05 CN CN2013104013665A patent/CN103436861A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624865A (en) * | 2017-03-15 | 2018-10-09 | 汉民科技股份有限公司 | Detachable air injection device applied to semiconductor equipment |
| CN108624865B (en) * | 2017-03-15 | 2020-06-23 | 汉民科技股份有限公司 | Detachable air injection device applied to semiconductor equipment |
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Application publication date: 20131211 |