CN103436851B - A kind of arc extinction method for magnetron sputtering technique - Google Patents
A kind of arc extinction method for magnetron sputtering technique Download PDFInfo
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Abstract
The invention discloses a kind of arc extinction method for magnetron sputtering technique, first sample magnetron sputtering electric power output voltage, electric current, carry out electric arc detecting according to voltage slope and current amplitude, judge whether electric arc produces; Secondly, carry out electric arc classification according to the current amplitude size that electric arc produces, electric arc is divided into the first electric arc type and the second electric arc type; Finally respectively arc extinguishing process is carried out to the first electric arc type and the second electric arc type.The present invention can rapid detection and extinguish in magnetron sputtering technique the electric arc produced; method is simple, practical, be easy to realize; compensate for the error detection and undetected survey that exist in arc-detection and extinguishing method in the past; lose problem between process island, can available protecting sputtering target, between process island and power supply.
Description
Technical field
The invention belongs to field of surface engineering technique, be specifically related to a kind of arc extinction method for magnetron sputtering technique.
Background technology
Magnetron sputtering ion plating technology, is different from traditional Surface heat-treatent, and required various parameters can change along with coating growth process, and load is constantly change on a large scale.This just requires that filming equipment has good reliability and stability, to ensure quality product.
In magnetron sputtering membrane process, " beating arc " that the paradoxical discharge of target causes may cause coating effects to be deteriorated, and burns safety fuse, even power supply.Magnetron sputtering power supply in the past, in the face of " beating arc " phenomenon, mainly take two schemes, the first increases power supply flow-resistant capacity, namely the flow-resistant capacity of power semiconductor is increased, the method does not do any process to the electric arc produced, and not only have impact on coating quality, and considerably increases the cost of equipment; It two is unified process of overcurrent that the of short duration over-current phenomenon avoidance that " beating arc " produced and failure and other reasons produce; namely once there is overcurrent, just power supply is shut down, although the method is simple; but the loss that also result between process island, have impact on production efficiency and coating quality.These two kinds of methods have obvious weak point.
At present, the means detecting electric arc the most frequently used utilize voltage (electric current) amplitude or voltage (electric current) velocity of variation as basis for estimation.Using the basis for estimation whether voltage (electric current) amplitude produces as electric arc, when there is igniting or plasma body by situations such as electric arc generations in sediment chamber, electric arc error detection may be caused; And use voltage (electric current) velocity of variation as electric arc basis for estimation, this occasion may be run into, because the electric arc occurred is just in relatively slow movement, therefore can not produce Fast incremental at sampled voltage, thus cause undetected survey.
In recent years, some companies have developed detection and the Restrain measurement of new electric arc successively, such as: patent publication No. is: CN1565148, publication date is: 2005.01.12, denomination of invention is: the method and the hf electric arc electric discharge restraining device that judge electric arc in glow discharge device, patent publication No. is: CN102312209A, publication date is: 2012.01.11, denomination of invention is: the method and apparatus that during RF sputtered film, electric arc prevents on substrate, patent publication No. is: CN1665955, publication date is: 2005.09.07, denomination of invention is: the method and system suppressed for electric arc in plasma processing system, above-mentioned patent is for radio-frequency sputtering technique, have developed corresponding arc-detection and Restrain measurement, because radio-frequency sputtering and reactive sputtering differ greatly, so these schemes be not suitable for reactive sputtering.Patent publication No. is: CN1987490, publication date is: 2007.06.27, denomination of invention is: for detecting the method and apparatus of electric arc, for interchange sputtering, devise the arc method for measuring compared with reference value in the set time point sampling assessing signal (voltage or electric current) in each cycle, when sampled signal exceedes reference value, namely think that electric arc produces, although the method can avoid some error detections, but add the risk of undetected survey, rapidity is deteriorated.Patent publication No. is: CN101983255A, publication date is: 2011.03.02, denomination of invention is: the sputtering system and the method that comprise arc detection system, this patent with the impedance of plasma body in sputtering technology and conductance for according to carrying out arc-detection, the method take plasma characteristics as detected object, improve the tolerance range of arc-detection, but the diversity of technique makes the impedance variations scope of plasma body comparatively large, the method adaptability is poor.
Summary of the invention
The object of this invention is to provide a kind of arc extinction method for magnetron sputtering technique, the speed and the efficiency that solve arc-detection and extinguishing in prior art are low, the problem that the outage rate caused by electric arc is high.
The technical solution used in the present invention is: a kind of arc extinction method for magnetron sputtering technique, is characterized in that, specifically implement according to following steps:
Step 1: utilize voltage, current Hall sensor to gather magnetron sputtering electric power output voltage electric current, jointly carry out electric arc detecting as basis for estimation using current amplitude and Voltage Drop speed;
Step 2: in power-supply controller of electric, arc extinguishing process is carried out to the electric arc that step 1 detects.
Feature of the present invention is also,
Step 1 is carried out electric arc detecting with current amplitude and Voltage Drop speed for basis for estimation and is specifically implemented according to following steps: utilize detecting voltage method and current sense method to detect electric arc simultaneously, as long as there is a kind of method first electric arc to be detected, namely think that electric arc produces.
Detecting voltage method is specifically implemented according to following steps: in magnetron sputtering power-supply controller of electric to continuous acquisition to magnitude of voltage calculate, by the current magnitude of voltage that collects and the front magnitude of voltage once collected poor, are divided by acquired results and twice acquisition time interval, draw Voltage Drop speed, when the result calculated is negative value and absolute value is greater than the empirical value of setting, namely think that electric arc produces.
Current sense method is specifically implemented according to following steps: the first current maxima of the electric current collected and setting compared, when the current value collected is not less than the first current maxima, namely think that electric arc produces, wherein, the first current maxima is 1.1 times of magnetron sputtering power supply maximum output current.
Arc extinguishing process in step 2 is specifically implemented according to following steps:
Step 2.1, by step 1 produce electric arc be divided into two classes, the overcurrent that one class produces is less, be not less than the first current maxima and be less than the second current maxima, less to the harm of equipment and process, be referred to as the first electric arc type, the overcurrent of another kind of generation is larger, electric current is not less than the second current maxima, comparatively large to equipment and process harm, is referred to as the second electric arc type, wherein, the second current maxima is 3 times of magnetron sputtering power supply maximum output current;
Step 2.2, when appearance first electric arc type, carry out the first arc extinguishing process, specifically implement according to following steps: first output voltage is restricted to the minimum output voltage of magnetron sputtering power supply by power-supply controller of electric, then time delay for some time, output voltage is returned to the value before the first arc extinguishing process, then return step 2.1;
Step 2.3, when appearance second electric arc type, carry out the second arc extinguishing process, specifically implement according to following steps:
First output voltage is restricted to the minimum output voltage of magnetron sputtering power supply by step 2.3.1, power-supply controller of electric, then time delay for some time;
Step 2.3.2, judge whether the second electric arc type signal disappears, determination methods is with step 2.1, and the second electric arc type signal disappears, then delay counter resets, and recovers output voltage, returns step 1; Second electric arc type signal does not disappear, then time delay number counter adds 1;
Step 2.3.3, judge whether time delay number counter reaches set(ting)value, time delay number counter does not reach set(ting)value, then return step 2.3.1; Time delay number counter reaches set(ting)value, then shut down.
The invention has the beneficial effects as follows:
1) method is simple, practical, is easy to realize, the detection method that electric current and Voltage Drop speed combine, and improves electric arc detecting speed, reduces loss; The method of electric arc classification process, even if make electric arc error detection occurs, also can not produce large impact to technique.
2) compensate for separately using voltage (electric current), voltage (electric current) velocity of variation as the defect of examination criteria and simple arc extinguishing process, for the detection of the electric arc produced in magnetron sputtering technique process and extinguishing, there is advantage fast and efficiently.
3) classify according to the hazard rating of electric arc to technique, equipment; finally suitable process is made to dissimilar electric arc; the method accelerates arc-detection speed, decreases the machine stop times because electric arc causes, and improves efficiency and the product quality of magnetron sputtering plating.
Accompanying drawing explanation
Fig. 1 is the schema of the present invention for the arc extinction method of magnetron sputtering technique.
Fig. 2 is the electric arc classification schematic diagram of the present invention for the arc extinction method of magnetron sputtering technique.
Embodiment
The invention provides a kind of arc extinction method for magnetron sputtering technique, as shown in Figure 1, specifically implement according to following steps:
Step 1: utilize voltage, current Hall sensor to gather magnetron sputtering electric power output voltage electric current, jointly electric arc detecting is carried out as basis for estimation using current amplitude and Voltage Drop speed, specifically implement according to following steps: utilize detecting voltage method and current sense method to detect electric arc simultaneously, as long as there is a kind of method first electric arc to be detected, namely think that electric arc produces.
Wherein, detecting voltage method is specifically implemented according to following steps: in magnetron sputtering power-supply controller of electric to continuous acquisition to magnitude of voltage calculate, by the current magnitude of voltage that collects and the front magnitude of voltage once collected poor, are divided by acquired results and twice acquisition time interval, draw Voltage Drop speed, when the result calculated is negative value and absolute value is greater than the empirical value of setting, namely think that electric arc produces.
Wherein, current sense method is specifically implemented according to following steps: the first current maxima of the electric current collected and setting compared, when the current value collected is not less than the first current maxima, namely think that electric arc produces, wherein, the first current maxima is 1.1 times of magnetron sputtering power supply maximum output current.
Step 2, in power-supply controller of electric, carry out arc extinguishing process to the electric arc that step 1 detects, arc extinguishing process is specifically implemented according to following steps:
Step 2.1, as shown in Figure 2, the electric arc produced in step 1 is divided into two classes, the overcurrent that one class produces is less, be not less than the first current maxima and be less than the second current maxima, less to the harm of equipment and process, be referred to as the first electric arc type, the overcurrent of another kind of generation is larger, electric current is not less than the second current maxima, comparatively large to equipment and process harm, is referred to as the second electric arc type.
Step 2.2, when appearance first electric arc type, carry out the first arc extinguishing process, specifically implement according to following steps: first output voltage is restricted to the minimum output voltage of magnetron sputtering power supply by power-supply controller of electric, then time delay for some time, output voltage is returned to the value before the first arc extinguishing process, then return step 1.
Step 2.3, when appearance second electric arc type, carry out the second arc extinguishing process, specifically implement according to following steps:
First output voltage is restricted to the minimum output voltage of magnetron sputtering power supply by step 2.3.1, power-supply controller of electric, then time delay for some time;
Step 2.3.2, judge whether the second electric arc type signal disappears, determination methods is with step 2.1, and the second electric arc type signal disappears, then delay counter resets, and recovers output voltage, returns step 1; Second electric arc type signal does not disappear, then time delay number counter adds 1;
Step 2.3.3, judge whether time delay number counter reaches set(ting)value, time delay number counter does not reach set(ting)value, then return step 2.3.1; Time delay number counter reaches set(ting)value, then shut down.
The present invention utilizes Voltage Drop speed and current amplitude two kinds of methods to carry out electric arc detecting simultaneously, as long as wherein a kind of method detects electric arc, namely thinks that electric arc produces, and substantially increases the speed of electric arc detecting.
The invention provides electric arc rapid detection and extinguishing method in a kind of magnetron sputtering technique, adopt the roadmap of " detecting+classification+arc extinguishing " to complete rapid detection and the extinguishing of electric arc in magnetron sputtering technique.
Arc extinction method in magnetron sputtering technique of the present invention; utilize the electric arc method for detecting that current amplitude and Voltage Drop speed two kinds are carried out simultaneously; realize the rapid detection of electric arc; classify according to the hazard rating of electric arc to technique, equipment again; finally suitable process is made to dissimilar electric arc; the method accelerates arc-detection speed, decreases the machine stop times because electric arc causes, and improves efficiency and the product quality of magnetron sputtering plating.
Claims (2)
1. for an arc extinction method for magnetron sputtering technique, it is characterized in that, specifically implement according to following steps:
Step 1: utilize voltage, current Hall sensor to gather magnetron sputtering electric power output voltage electric current, jointly carry out electric arc detecting as basis for estimation using current amplitude and Voltage Drop speed;
Step 2: in power-supply controller of electric, arc extinguishing process is carried out to the electric arc that step 1 detects;
Step one is carried out electric arc detecting with current amplitude and Voltage Drop speed for basis for estimation and is specifically implemented according to following steps: utilize detecting voltage method and current sense method to detect electric arc simultaneously, as long as there is a kind of method first electric arc to be detected, namely think that electric arc produces, detecting voltage method is specifically implemented according to following steps: in magnetron sputtering power-supply controller of electric to continuous acquisition to magnitude of voltage calculate, by the current magnitude of voltage that collects and the front magnitude of voltage once collected poor, are divided by acquired results and twice acquisition time interval, draw Voltage Drop speed, when the result calculated is negative value and absolute value is greater than the empirical value of setting, namely think that electric arc produces, wherein current sense method is specifically implemented according to following steps: the first current maxima of the electric current collected and setting compared, when the current value collected is not less than the first current maxima, namely think that electric arc produces, wherein, first current maxima is 1.1 times of magnetron sputtering power supply maximum output current.
2. the arc extinction method for magnetron sputtering technique according to claim 1, is characterized in that, the arc extinguishing process in described step 2 is specifically implemented according to following steps:
Step 2.1, by step 1 produce electric arc be divided into two classes, the overcurrent that one class produces is less, be not less than the first current maxima and be less than the second current maxima, less to the harm of equipment and process, be referred to as the first electric arc type, the overcurrent of another kind of generation is larger, electric current is not less than the second current maxima, comparatively large to equipment and process harm, is referred to as the second electric arc type, wherein, the second described current maxima is 3 times of magnetron sputtering power supply maximum output current;
Step 2.2, when appearance first electric arc type, carry out the first arc extinguishing process, specifically implement according to following steps: first output voltage is restricted to the minimum output voltage of magnetron sputtering power supply by power-supply controller of electric, then time delay for some time, output voltage is returned to the value before the first arc extinguishing process, then return step 2.1;
Step 2.3, when appearance second electric arc type, carry out the second arc extinguishing process, specifically implement according to following steps:
First output voltage is restricted to the minimum output voltage of magnetron sputtering power supply by step 2.3.1, power-supply controller of electric, then time delay for some time;
Step 2.3.2, judge whether the second electric arc type signal disappears, determination methods is with step 2.1, and the second electric arc type signal disappears, then delay counter resets, and recovers output voltage, returns step 1; Second electric arc type signal does not disappear, then time delay number counter adds 1;
Step 2.3.3, judge whether time delay number counter reaches set(ting)value, time delay number counter does not reach set(ting)value, then return step 2.3.1; Time delay number counter reaches set(ting)value, then shut down.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103774105B (en) * | 2014-01-10 | 2016-04-06 | 西安理工大学 | A kind of arc-detection for magnetron sputtering technique and suppressing method |
| CN104267208B (en) * | 2014-09-18 | 2017-09-08 | 西安近代化学研究所 | A kind of diaphragm that tests the speed for the one-dimensional treadmill test of explosive |
| CN104362593A (en) * | 2014-10-10 | 2015-02-18 | 湖南红太阳光电科技有限公司 | Quick arc extinguishing circuit of direct-current magnetron sputtering film coating power supply |
| CN104466940A (en) * | 2014-11-10 | 2015-03-25 | 芜湖真空科技有限公司 | Arc extinguishing method for power source |
| CN111926308B (en) * | 2020-08-24 | 2022-08-12 | 湖南红太阳光电科技有限公司 | Method for processing plasma discharge abnormity |
| CN114540774B (en) * | 2022-01-29 | 2022-09-27 | 深圳市瀚强科技股份有限公司 | Power supply and arc processing method |
| CN114959623A (en) * | 2022-07-07 | 2022-08-30 | 广州粤芯半导体技术有限公司 | DC sputtering method and DC sputtering apparatus |
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