CN103425843B - Copper Foil roughness loss modeling method and sheet material electric parameter extracting method and device - Google Patents
Copper Foil roughness loss modeling method and sheet material electric parameter extracting method and device Download PDFInfo
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- CN103425843B CN103425843B CN201310366722.4A CN201310366722A CN103425843B CN 103425843 B CN103425843 B CN 103425843B CN 201310366722 A CN201310366722 A CN 201310366722A CN 103425843 B CN103425843 B CN 103425843B
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Abstract
The invention discloses a kind of Copper Foil roughness loss modeling method and sheet material electric parameter extracting method and device. The present invention by by least one sheet material test board not the measurement of electric parameter electric parameter emulation frequency varied curve that frequently varied curve is given roughness parameter with it of substitution Copper Foil roughness loss compare, can estimate the discrete discrepancy that the loss of Copper Foil roughness produces the electric parameter under each frequency, and, by the statistical modeling that the curve of discrete discrepancy is realized, can obtain as Copper Foil roughness loss varied curve frequently. Than mathematical modeling, utilize the loss of Copper Foil roughness loss that statistical modeling the obtains roughness that varied curve can true reflects Copper Foil frequently to the actual generation of sheet material. Correspondingly, in the time extracting sheet material electric parameter, just can utilize the Copper Foil roughness loss frequency varied curve that statistical modeling obtains to determine the Copper Foil roughness loss of institute's substitution, thereby can obtain electric parameter more accurately.
Description
Technical field
The present invention relates to measuring technology, particularly a kind of Copper Foil roughness loss modeling method, the electric ginseng of a kind of sheet materialNumber extracting method and a kind of Copper Foil roughness loss model building device and sheet material electric parameter extraction element.
Background technology
Pcb board material is the important carrier of high speed transmission of signals, and high speed signal is transmitting by the Copper Foil of pcb board materialTime, except the loss that Copper Foil itself brings, the material medium of pcb board material also can be brought loss to high speed signal, dielectric lossConventionally the loss bringing than Copper Foil is larger. Therefore, industrywide standard has defined Dk(DielectircConstant, and dielectric is normalNumber) and Df(DisssipationFactor, fissipation factor or loss angle) these two electric parameters weigh the electricity of pcb board materialGas performance. Correspondingly, for each pcb board material, just can estimate that it is electric by extracting two above-mentioned electric parametersPerformance.
In the prior art, normally first produce the sheet material test board of pcb board material, then the S of sheet material measurement test boardParameter (S-Parameter, scattering parameter), finally recycles S3(StriplineS-ParameterSweep, transmission line S ginsengNumber scanning) algorithm obtains two electric parameter Dk and the Df of pcb board material from S parameter.
Wherein, S3 algorithm comprises two kinds of compute modes, wherein a kind of be the loss of not substitution Copper Foil roughness mode, anotherPlanting is the mode of substitution Copper Foil roughness loss:
In the time adopting the mode of not substitution Copper Foil roughness loss, two electric parameter Dk that utilize that S3 algorithm obtains andDf does not relate to the loss that the roughness of Copper Foil produces pcb board material, thereby has relatively large deviation;
In the time adopting the mode of substitution Copper Foil roughness loss, two electric parameter Dk that utilize that S3 algorithm obtains and DfAlthough related to the loss that the roughness of Copper Foil produces pcb board material, the Copper Foil roughness loss of institute's substitution is foundationSimple mathematical modeling obtains, and simple mathematical modeling is not only realized complexity, and its merely depend on theoretical derive,Thereby the Copper Foil roughness loss obtaining the thus roughness that can not reflect truly Copper Foil produces pcb board material is actualLoss, therefore, still there is certain deviation in the electric parameter Dk and the Df that finally obtain.
Visible, no matter be to use S3 algorithm in any mode, prior art all cannot obtain electric parameter Dk accuratelyAnd Df.
Summary of the invention
In view of this, the invention provides a kind of Copper Foil roughness loss modeling method, the extraction of a kind of sheet material electric parameterMethod and a kind of Copper Foil roughness loss model building device and sheet material electric parameter extraction element.
A kind of Copper Foil roughness loss modeling method provided by the invention, this Copper Foil roughness loss modeling method is used toUse the electric parameter of at least one sheet material of same Copper Foil that Copper Foil roughness loss varied curve is frequently provided, wherein, electricityGas parameter at least comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss modeling method forEach sheet material test board in described at least one sheet material is carried out following step:
Utilize transmission line S parameter scanning algorithm, the S in the mode of not substitution Copper Foil roughness loss from this sheet material test boardIn parameter, extract and obtain corresponding measurement of electric parameter varied curve frequently;
The measurement of electric parameter that utilizes this sheet material test board frequently varied curve carries out the emulation of 3 D electromagnetic field and to 3 D electromagneticThe roughness parameter that the model that field emulation is set up is given this sheet material test board, obtains the electric parameter emulation of this sheet material test board frequentlyVaried curve;
The measurement of electric parameter frequency varied curve of this sheet material test board and the electric parameter emulation of this sheet material test board are become frequentlyCurve subtracts each other at predetermined each frequency, obtains the discrete discrepancy of this sheet material test board at predetermined each frequency;
And for described any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss is builtModeling method is also carried out following step for the discrete discrepancy of the sheet material test board of described at least one sheet material:
Utilize the sheet material test board of described at least one sheet material to carry out curve fitting at the discrete discrepancy of predetermined each frequency,The Copper Foil roughness loss of this kind of Copper Foil that described in obtaining, at least one sheet material uses is varied curve frequently.
Alternatively, roughness parameter is to extract and obtain from the contour images in the Copper Foil cross section of this sheet material test board, shouldThe contour images in the Copper Foil cross section of sheet material test board be successively by this sheet material test board cutting obtain Copper Foil cross section section,Section is amplified to take pictures and obtain the sectioning image in Copper Foil cross section and the sectioning image in Copper Foil cross section is carried out to image processing obtaining.
Alternatively, curve utilizes Debye model realization.
A kind of sheet material electric parameter extracting method provided by the invention, this sheet material electric parameter extracting method makes for extractingWith the electric parameter of the multiple sheet material of same Copper Foil, electric parameter comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this sheet material electric parameter extracting method is for makingCarry out following step with the sheet material test board of this Copper Foil:
Utilize transmission line S parameter scanning algorithm, in the mode of substitution Copper Foil roughness loss respectively from this sheet material test boardS parameter in extract and obtain corresponding measurement of electric parameter varied curve frequently;
And the Copper Foil roughness that imports this Copper Foil being obtained by Copper Foil roughness loss modeling method as above is damagedConsumption frequently varied curve, to realize the loss of described substitution Copper Foil roughness.
Alternatively, for any electric parameter in dielectric constant and dissipation factor, the electric extracting method of this sheet material is enteredOne step is carried out following step:
The measurement of electric parameter that utilizes this sheet material test board frequently varied curve carries out the emulation of 3 D electromagnetic field and to 3 D electromagneticThe roughness parameter that the model that field emulation is set up is given this sheet material test board, obtains for the electric parameter to this sheet material test boardMeasure the electric parameter emulation varied curve frequently that varied curve is verified frequently.
Alternatively, the sheet material test board of each sheet material all has stepped construction and comprises at least two signals layers, itsIn, the holding wire at least two signals layers is single line.
Alternatively, the sheet material test board of each sheet material all has stepped construction and comprises at least two signals layers, itsIn, identical with the glue content of two inter-level dielectrics of one of them signals layer adjacency, with two layers of another signals layer adjacencyBetween the glue content of medium different.
A kind of Copper Foil roughness loss model building device provided by the invention, this Copper Foil roughness loss model building device is used toUse the electric parameter of at least one sheet material of same Copper Foil that Copper Foil roughness loss varied curve is frequently provided, wherein, electricityGas parameter at least comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss model building device forEach sheet material test board in described at least one sheet material moves following module:
Modeling extraction module, utilizes transmission line S parameter scanning algorithm, in the mode of not substitution Copper Foil roughness loss from thisIn the S parameter of sheet material test board, extract and obtain corresponding measurement of electric parameter varied curve frequently;
Modeling and simulating module, the measurement of electric parameter that utilizes this sheet material test board frequently varied curve to carry out 3 D electromagnetic field imitativeVery and the model roughness parameter of giving this sheet material test board that the emulation of 3 D electromagnetic field is set up, obtain this sheet material test boardFrequently varied curve of electric parameter emulation;
Deviation sampling module, by the measurement of electric parameter of this sheet material test board varied curve and this sheet material test board electric frequentlyParameters simulation frequently varied curve subtracts each other at predetermined each frequency, obtains the discrete discrepancy of this sheet material test board at predetermined each frequency;
And for described any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss is builtDie device also moves following module for the discrete discrepancy of the sheet material test board of described at least one sheet material:
Statistical fit module, utilizes the sheet material test board of described at least one sheet material at the discrete discrepancy of predetermined each frequencyCarry out curve fitting, the Copper Foil roughness loss of this kind of Copper Foil that described in obtaining, at least one sheet material uses is varied curve frequently.
Alternatively, roughness parameter is to extract and obtain from the contour images in the Copper Foil cross section of this sheet material test board, shouldThe contour images in the Copper Foil cross section of sheet material test board be successively by this sheet material test board cutting obtain Copper Foil cross section section,Section is amplified to take pictures and obtain the sectioning image in Copper Foil cross section and the sectioning image in Copper Foil cross section is carried out to image processing obtaining.
Alternatively, curve utilizes Debye model realization.
A kind of sheet material electric parameter extraction element provided by the invention, this sheet material electric parameter extraction element makes for extractingWith the electric parameter of the multiple sheet material of same Copper Foil, electric parameter comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this sheet material electric parameter extraction element is for makingMove following module with the sheet material test board of this Copper Foil:
Test extraction module, utilizes transmission line S parameter scanning algorithm, with the mode of substitution Copper Foil roughness loss respectively fromIn the S parameter of this sheet material test board, extract and obtain corresponding measurement of electric parameter varied curve frequently;
Loss substitution module, the Copper Foil that imports this Copper Foil being obtained by Copper Foil roughness loss model building device is as above coarseDegree loss frequently varied curve, to realize the loss of described substitution Copper Foil roughness.
Alternatively, for any electric parameter in dielectric constant and dissipation factor, the electric extraction element of this sheet material entersOne step is moved following module:
Test emulation module, the measurement of electric parameter that utilizes this sheet material test board frequently varied curve to carry out 3 D electromagnetic field imitativeVery and the model roughness parameter of giving this sheet material test board that the emulation of 3 D electromagnetic field is set up, obtain for to this sheet materialThe measurement of electric parameter of the test board electric parameter emulation that varied curve is verified frequently varied curve frequently.
Alternatively, the sheet material test board of every kind of sheet material all has stepped construction and comprises at least two signals layers, wherein,Holding wire at least two signals layers is single line.
Alternatively, the sheet material test board of every kind of sheet material all has stepped construction and comprises at least two signals layers, wherein,Identical with the glue content of two inter-level dielectrics of one of them signals layer adjacency, be situated between with two interlayers of another signals layer adjacencyThe glue content of matter is different.
As can be seen here, the present invention passes through the electric ginseng of the not substitution Copper Foil roughness loss of at least one sheet material test boardNumber is measured varied curves frequently and is given the electric parameter emulation frequency varied curve of roughness parameter with it and compare, and can estimate Copper FoilThe discrete discrepancy that roughness loss produces the electric parameter under each frequency, and, by the curve to discrete discrepancyThe statistical modeling of realizing, can obtain as Copper Foil roughness loss varied curve frequently. Than mathematical modeling, statistical modeling is notBe merely to depend on theoretical derivation, but depend on active loss and the simulation result of sheet material test board, therefore, utilize statisticsCopper Foil roughness loss that modeling the obtains roughness that varied curve can true reflects Copper Foil is frequently to the actual product of sheet materialRaw loss.
Correspondingly, the present invention, just can be real in the mode of substitution Copper Foil roughness loss in the time extracting sheet material electric parameterExisting S3 algorithm and utilize Copper Foil roughness loss that statistical modeling obtains frequently varied curve determine the Copper Foil roughness damage of institute's substitutionConsumption, thereby can obtain electric parameter more accurately.
Brief description of the drawings
Fig. 1 is the example schematic that the embodiment of the present invention is measured S parameter;
Fig. 2 is the schematic diagram that the embodiment of the present invention is carried out the emulation of 3 D electromagnetic field;
Fig. 3 a and Fig. 3 b are the example schematic of the discrete discrepancy of the electric parameter that obtains of the embodiment of the present invention;
The exemplary flow schematic diagram of the Copper Foil roughness loss modeling method in Fig. 4 embodiment of the present invention;
Fig. 5 is the exemplary flow schematic diagram of the sheet material electric parameter extracting method in the embodiment of the present invention;
Fig. 6 is the example schematic that the embodiment of the present invention is improved the stepped construction of a kind of sheet material test board obtaining;
Fig. 7 a and Fig. 7 b are the reality that the embodiment of the present invention is improved the signals layer wire structures of a kind of sheet material test board obtainingIllustrate intention.
Detailed description of the invention
For making object of the present invention, technical scheme and advantage clearer, referring to the accompanying drawing embodiment that develops simultaneously, rightThe present invention further describes.
The S3 algorithm that the present embodiment is realized for the mode of substitution Copper Foil roughness loss, the mode of employing statistical modelingDetermine the Copper Foil roughness loss of substitution, be elaborated below. Wherein, the present embodiment is with " sheet material " reduced representation " PCBSheet material ", with " electric parameter " reduced representation " any electric parameter in Dk and Df ".
For the multiple sheet material that uses same Copper Foil, the present embodiment can provide a sheet material test by corresponding every kind of sheet materialPlate, and the sheet material test board of the multiple sheet material that uses same Copper Foil is divided into two groups by the present embodiment. Wherein by a part of plateThe sheet material test board of material form one group is for statistical modeling, and the present embodiment is called prediction group; By another part sheet materialAnother group that sheet material test board forms is extracted for normal electric parameter, and the present embodiment is called test group. Wherein, this realityExecute the same Copper Foil described in example and refer to the Copper Foil with identical roughness specification, the Copper Foil of different roughness specification, at plateThe loss difference of in material, electric parameter being brought.
1), for the sheet material test board in prediction group:
First, realizing S3 in the mode of not substitution Copper Foil roughness loss for every kind of sheet material test board in prediction group calculatesMethod, and obtain with this one group of measurement of electric parameter varied curve frequently that does not embody Copper Foil roughness loss impact;
In practical application, the S parameter that realizes the sheet material test board of S3 algorithm required importing all can be according to as shown in Figure 1Mode, utilizes VNA(VectorNetworkAnalyzer, vector network analyzer) 11 by the frequency to sheet material test board 12Domain measurement obtains, and wherein, VNA11 and sheet material test board 12 are by SMA(Sub-Miniature-A, and A type is extra small) connector 13Electrical connection; And preferably VNA adopts AFR(AutomaticFixtureRemoval to the frequency domain measurement of sheet material test board,Automatic fixture goes embedding) mode realize, to reduce the impact of SMA connector 13 on S parameter measurement.
And, the real roughness parameter of the sheet material test board in prediction group is sampled, utilize this sheet material testThe measurement of electric parameter of plate frequently varied curve carries out the emulation of 3 D electromagnetic field and the model of 3 D electromagnetic field emulation foundation is given and being adoptedThe roughness parameter of this sheet material test board that sample obtains, obtains to be similar to this and embodies truly the loss of Copper Foil roughnessOne group of electric parameter emulation of impact varied curve frequently;
In practical application, the wheel in the Copper Foil cross section that can obtain from sampling the real roughness parameter of sheet material test boardIn wide image, extract, the contour images in Copper Foil cross section can be successively by obtaining cutting of Copper Foil cross section to this sheet material test board cuttingSheet, section is amplified and taken pictures and obtain the sectioning image in Copper Foil cross section and the sectioning image in Copper Foil cross section is carried out to image processing(as binary conversion treatment, denoising and edge extracting etc.) obtain; The emulation of 3 D electromagnetic field can utilize any oneExisting three-dimensional body electromagnetic-field simulation instrument is realized, for example HFSS(HighFrequencyStructureSimulation, high-frequency structure emulator), the holding wire 21 of the sheet material test board that emulation forms and the three-dimensional in abutting connection with medium 22 thereofModel as shown in Figure 2.
After this, by the measurement of electric parameter of every kind of sheet material test board in prediction group varied curve and electric parameter emulation frequency frequentlyVaried curve is compared and subtracted each other at each frequency (is that measurement of electric parameter frequency varied curve and electric parameter emulation frequency varied curve existThe value of the S parameter of each frequency is subtracted each other), thus the frequently varied curve of measurement of electric parameter of every kind of sheet material test board in prediction group obtainedThan the electric parameter emulation discrete discrepancy that varied curve exists at each frequency frequently.
Although the measurement of electric parameter of every kind of sheet material test board in prediction group is varied curve and electric parameter emulation change frequently frequentlyCurve all can there are differences with other sheet material test board due to the difference of sheet material, still, and due to the electricity of every kind of sheet material test boardGas parameter measurement frequently varied curve than the electric parameter emulation discrete discrepancy reflection that varied curve exists at each frequency frequently be byThe loss of the caused Copper Foil roughness of aforesaid real Copper Foil roughness, therefore, for the various sheet material tests in prediction groupThe above-mentioned discrete discrepancy that plate obtains should be very to approach the loss of the caused Copper Foil roughness of real Copper Foil roughness.
Referring to Fig. 3 a and Fig. 3 b, recording through experiment, be no matter that the electric parameter Dk of different plates as shown in Figure 3 a existsThe discrete discrepancy of each frequency (in Fig. 3 a as an example of three kinds of sheet materials example and the Dk of three kinds of sheet materials at the value Δ of the discrete discrepancy of each frequencyDk is expressed as the difform identification point in coordinate system as shown in Figure 3 a), still different plates as shown in Figure 3 bElectric parameter Df the discrete discrepancy of each frequency (in Fig. 3 b as an example of three kinds of sheet materials example and the Df of three kinds of sheet materials each frequency fromThe value Δ Df of loose deviation is expressed as the difform identification point in coordinate system as shown in Figure 3 b), its distribution all exists oneFixed statistical regularity, therefore, based on such statistical regularity, can utilize the discrete discrepancy of each frequency to carry out curve planClose and relatively approached true frequency and become the parameter error varied curve frequently of electric parameter with this; And, due to so discrete partiallyDifference can be similar to the Copper Foil roughness loss that reflects truly each frequency reality, therefore, and the ginseng of utilizing discrete discrepancy to formNumber deviation frequently varied curve in fact just can be thought Copper Foil roughness loss varied curve frequently.
In practical application, curve can utilize Debye(debye) model, i.e. a √ f+b × f+c × f2, give realityExisting. Wherein, the f in Debye model refers to frequency, and a, b, c are the conventional coefficients of setting in Debye model, these coefficientsConcrete value can be determined according to existing curve mode by those skilled in the art, will not enumerate herein.
As previously mentioned, due to the above-mentioned discrete discrepancy reflection obtaining for every kind of sheet material test board in prediction group be withThe loss of the caused Copper Foil roughness of a kind of Copper Foil, thereby the discrete discrepancy that utilizes all sheet material test boards in prediction group to obtainThe Copper Foil roughness loss frequency varied curve obtaining can be served as the loss of the Copper Foil roughness of all sheet materials that use this kind of Copper FoilModel, the i.e. loss of the electric parameter of the roughness of Copper Foil to sheet material.
It should be noted that, S3 algorithm needs calculated population loss and the overall loss calculating is detained from S parameterRemove. Wherein, realizing S3 algorithm in the mode of substitution Copper Foil roughness loss, overall loss=dielectric loss of deducting+pureThe loss of copper loss+Copper Foil roughness, is realizing S3 algorithm in the mode of not substitution Copper Foil roughness loss, and that deducts is overallThe loss of loss=dielectric loss+fine copper. So, carry out the loss of not substitution Copper Foil roughness at the sheet material test board in prediction groupThe parameter extraction of S3 algorithm time, the measurement of electric parameter of acquisition is varied curve button not in the value of the S of each frequency parameter frequentlyExcept the loss of Copper Foil roughness; And it is thick by the Copper Foil that varied curve and the sampling frequently of the measurement of electric parameter that measures obtainedWhen roughness parameter carries out 3 D electromagnetic emulation, the electric parameter emulation frequency varied curve obtaining is in the value of the S of each frequency parameterAlthough still comprised measurement of electric parameter frequently varied curve in the value of the S of each frequency parameter itself with do not deductedThe loss of Copper Foil roughness, but electric parameter emulation frequently varied curve in the value of the S of each frequency parameter, deducted by Copper FoilRoughness parameter is determined is similar to the loss of real Copper Foil roughness, therefore, and by measurement of electric parameter varied curve and electricity frequentlyGas parameters simulation frequently varied curve subtracts each other, and the deviation obtaining is for being similar to real copper by Copper Foil roughness parameter is determinedThe loss of paper tinsel roughness, i.e. the Copper Foil roughness loss of Copper Foil frequency varied curve is one and is similar to the comparatively accurate of true loss impactModel.
2), for the sheet material test board in test group:
Mode with the loss of substitution Copper Foil roughness realizes S3 algorithm, and the Copper Foil roughness loss of S3 algorithm institute substitution,Varied curve is determined frequently to utilize just the loss of Copper Foil roughness, embodies truly Copper Foil roughness thereby can obtain to be similar toOne group of measurement of electric parameter of loss impact varied curve frequently.
Visible, because statistical modeling is not merely to depend on theoretical derivation, but depend on the reality of sheet material test boardBorder loss and simulation result, therefore, than mathematical modeling, the Copper Foil roughness loss varied curve frequently that utilizes statistical modeling to obtainThe loss of the roughness that can true reflects Copper Foil to the actual generation of sheet material. Thereby, utilize statistical modeling to obtainCopper Foil roughness loss frequency varied curve is determined the Copper Foil roughness loss of S3 algorithm institute substitution, just can obtain more accuratelyElectric parameter.
Following table 1 be a kind of measurement of electric parameter of sheet material frequently varied curve is in the value of some frequencies, table 2 is to a kind of plateThe electric parameter emulation frequency varied curve of material is in the value of some frequencies.
| Frequency | Dk | Df |
| 0.1GHz | 4.139 | 0.0084 |
| 1GHz | 3.97 | 0.0085 |
| 2GHz | 3.934 | 0.0085 |
| 3GHz | 3.91 | 0.0086 |
| 4GHz | 3.894 | 0.0086 |
| 6GHz | 3.866 | 0.0088 |
| 8GHz | 3.844 | 0.0089 |
| 10GHz | 3.826 | 0.009 |
| 15GHz | 3.788 | 0.0093 |
| 18GHz | 3.768 | 0.0094 |
| 20GHz | 3.758 | 0.0095 |
Table 1
| Frequency | Dk | Df |
| 0.1GHz | 4.04 | 0.0081 |
| 1GHz | 3.97 | 0.0081 |
| 2GHz | 3.937 | 0.0081 |
| 3GHz | 3.912 | 0.0081 |
| 4GHz | 3.899 | 0.0082 |
| 6GHz | 3.847 | 0.0084 6 --> |
| 8GHz | 3.85 | 0.0087 |
| 10GHz | 3.822 | 0.009 |
| 15GHz | 3.797 | 0.0094 |
| 18GHz | 3.778 | 0.0095 |
| 20GHz | 3.759 | 0.0096 |
Table 2
Visible by comparing above-mentioned table 1 and table 2, utilize the Copper Foil roughness loss frequency varied curve that statistical modeling obtainsDetermine the Copper Foil roughness loss of S3 algorithm institute substitution, the Dk obtaining and the value of Df differ with the simulation value that is similar to actual valueVery few.
In addition, consider that statistical modeling can cause electric parameter to produce certain statistic bias, the Dk in table 1 described aboveAnd difference between Dk and the value of Df in value and the table 2 of Df, therefore, the present embodiment also can be surveyed every kind of sheet material in test groupThe real roughness parameter sampling of test plate (panel), utilizes the measurement of electric parameter frequency varied curve of this sheet material test board to carry out 3 D electromagneticEmulation the model that the emulation of 3 D electromagnetic field is set up are given the roughness parameter of this sheet material test board that sampling obtains, withThis obtains for the electric parameter emulation that varied curve is verified frequently of the measurement of electric parameter to this sheet material test board and frequently becomes bentLine;
Then, due to varied curve and the electric parameter emulation frequently of the measurement of electric parameter of every kind of sheet material test board in test group frequentlyVaried curve has all been deducted the loss of Copper Foil roughness in the value of the S of each frequency parameter, therefore, can utilize being somebody's turn to do in test groupThe electric parameter emulation of sheet material test board frequently varied curve becomes bent frequently to the measurement of electric parameter of this sheet material test board in test groupLine is verified, coarse to determine measurement of electric parameter frequency varied curve deducted Copper Foil in the value of the S of each frequency parameterDegree loss (by the loss of Copper Foil roughness frequently varied curve determine) than electric parameter emulation frequently varied curve in the S of each frequency parameterValue in deducted Copper Foil roughness loss (obtained by sampling roughness parameter determine), whether there is larger error.
For the sheet material test board that has larger error in test group, the result that can obtain by range estimation, to surveyingThe measurement of electric parameter of this sheet material test board in examination group frequently varied curve is revised, and can according to prediction group inThe mode that sheet material test board is identical calculates discrete discrepancy, and the discrete discrepancy of this sheet material test board is added in prediction groupIn the set of the discrete discrepancy of each sheet material test board, utilize the set that is added with new discrete discrepancy matching obtain upgrading again afterFrequently varied curve of Copper Foil roughness loss, to utilize the checking correction of closed loop to reduce the electricity of statistic bias to this sheet material test boardGas parameter measurement is the impact of varied curve frequently.
Based on above principle, the present embodiment provides a kind of Copper Foil roughness loss modeling method and coarse based on this Copper FoilThe sheet material electric parameter extracting method of degree loss modeling method, is described in detail respectively below.
Copper Foil roughness loss modeling method in the present embodiment is used at least one sheet material that uses same Copper FoilElectric parameter the frequently varied curve of Copper Foil roughness loss of this kind of Copper Foil is provided, for any the electric ginseng in Dk and DfNumber, refers to Fig. 4, and this Copper Foil roughness loss modeling method is carried out for a sheet material test board of every kind of sheet material of prediction groupFollowing step:
Step 401, utilizes transmission line S parameter scanning algorithm, in the mode of not substitution Copper Foil roughness loss from this sheet materialIn the S parameter of test board, extract and obtain corresponding measurement of electric parameter varied curve frequently.
Step 402, utilizes the measurement of electric parameter frequency varied curve of this sheet material test board to carry out 3 D electromagnetic field emulation, also rightThe roughness parameter that the model that 3 D electromagnetic field emulation is set up is given this sheet material test board, obtains the electric ginseng of this sheet material test boardNumber emulation varied curve frequently.
Step 403, by the measurement of electric parameter frequency varied curve of this sheet material test board and the electric parameter of this sheet material test boardEmulation frequency varied curve subtracts each other predetermined each frequency, obtains the discrete discrepancy of this sheet material test board at predetermined each frequency.
After above-mentioned step 403 is finished, if this flow process is for the sheet material test board of every kind of sheet material of prediction groupEqual execution of step 401～steps 403, the Copper Foil roughness loss modeling method in the present embodiment is also in prediction groupThe discrete discrepancy of the sheet material test board of all sheet materials is carried out follow-up step 404; Otherwise, continue for remaining plate in prediction groupMaterial test board execution step 401～step 403.
Step 404, the discrete discrepancy that utilizes each sheet material test board to exist at predetermined each frequency carries out curve fitting, and obtainsThe Copper Foil roughness loss of the same Copper Foil that each sheet material test board uses is varied curve frequently.
So far, above-mentioned flow process finishes.
For any electric parameter in Dk and Df, in the Copper Foil roughness loss modeling side shown in flow process as implied aboveMethod utilizes Copper Foil roughness loss that the each sheet material test board in prediction group obtains Copper Foil frequently after varied curve, can carry out this realityExecute sheet material electric parameter extracting method in example, to extract this kind of electric parameter of sheet material. Or, also can be understood as upper instituteShow that the Copper Foil roughness loss modeling method shown in flow process is a part for the sheet material electric parameter extracting method in the present embodiment.Referring to Fig. 5, the sheet material electric parameter extracting method in the present embodiment is for a sheet material test of every kind of sheet material in test groupPlate is carried out following step:
Step 501, utilizes transmission line S parameter scanning algorithm, in the mode of substitution Copper Foil roughness loss respectively from this plateIn the S parameter of material test board, extract and obtain corresponding measurement of electric parameter varied curve frequently.
Step 502, the Copper Foil roughness loss that imports this Copper Foil being obtained by Copper Foil roughness loss modeling method becomes frequentlyCurve, to realize the loss of described substitution Copper Foil roughness.
,, in the S parameter scanning algorithm of realizing based on step 501 and step 502, can first be calculated by step 501The initial measurement that does not comprise the loss of Copper Foil roughness to the electric parameter of sheet material beta version is varied curve frequently, and then by step 501This initial measurement Copper Foil roughness damage curve that varied curve and step 502 import is frequently subtracted each other, can obtain considering Copper FoilThe measurement of electric parameter of roughness loss impact varied curve frequently.
Wherein, step 502 is to be performed in the process of execution step 501.
In addition alternatively, after executing the step 501 of invocation step 502, can also continue to perform step 503, rightThe measurement of electric parameter measuring frequently varied curve is verified.
Step 503, utilizes the measurement of electric parameter frequency varied curve of this sheet material test board to carry out 3 D electromagnetic field emulation, also rightThe roughness parameter that the model that 3 D electromagnetic field emulation is set up is given this sheet material test board, obtains for to this sheet material test boardThe measurement of electric parameter electric parameter emulation that varied curve is verified frequently varied curve frequently.
The emulation that obtains by step 503 is frequently varied curve, and the result that can obtain by range estimation, in test groupThe measurement of electric parameter of this sheet material test board frequently varied curve is revised, and reduces statistic bias with the checking correction that utilizes closed loopOn the impact of varied curve frequently of the measurement of electric parameter of this sheet material test board. In practical application, applicant is by a large amount of checkings, and it is repaiiedPositive is conventionally very little, therefore, in actual electric parameter leaching process, can not verify and also can.
So far, above-mentioned flow process finishes.
More than to the Copper Foil roughness loss modeling method in the present embodiment with based on this Copper Foil roughness loss modelingThe detailed description of the sheet material electric parameter extracting method of method. In the time of specific implementation the present embodiment, above-mentioned Copper Foil roughness is damagedConsumption modeling method and sheet material electric parameter extracting method all can show as computer program, and therefore, the present embodiment also providesCorresponding Copper Foil roughness loss model building device and sheet material electric parameter extraction element, described in detail below.
Copper Foil roughness loss model building device in the present embodiment is used at least one sheet material that uses same Copper FoilElectric parameter frequently varied curve of Copper Foil roughness loss is provided;
For any electric parameter in Dk and Df, this Copper Foil roughness loss model building device is for using this Copper FoilA sheet material test board of each sheet material in prediction group moves following module:
Modeling extraction module, utilizes transmission line S parameter scanning algorithm, in the mode of not substitution Copper Foil roughness loss from thisIn the S parameter of sheet material test board, extract and obtain corresponding measurement of electric parameter varied curve frequently;
Modeling and simulating module, the measurement of electric parameter that utilizes this sheet material test board frequently varied curve to carry out 3 D electromagnetic field imitativeVery and the model roughness parameter of giving this sheet material test board that the emulation of 3 D electromagnetic field is set up, obtain this sheet material test boardFrequently varied curve of electric parameter emulation;
Deviation sampling module, by the measurement of electric parameter of this sheet material test board varied curve and this sheet material test board electric frequentlyParameters simulation frequently varied curve the subtracting each other of predetermined each frequency, obtain this sheet material test board predetermined each frequency discrete partiallyPoor;
And for any electric parameter in Dk and Df, this Copper Foil roughness loss model building device is also for describedThe discrete discrepancy of the sheet material test board of at least one sheet material moves following module:
Statistical fit module, what described in utilizing, the sheet material test board of at least one sheet material existed at predetermined each frequency is discreteDeviation carries out curve fitting, and it is bent that the Copper Foil roughness loss of this kind of Copper Foil that described in obtaining, at least one sheet material uses becomes frequentlyLine.
Sheet material electric parameter extraction element in the present embodiment is for extracting the electricity of the multiple sheet material that uses same Copper FoilGas parameter, electric parameter comprises dielectric constant and dissipation factor;
For any electric parameter in Dk and Df, when Copper Foil roughness loss model building device as above is for makingObtain the Copper Foil roughness loss frequency varied curve of this Copper Foil with the sheet material test board in the prediction group of this Copper Foil after, this sheet material electricityGas parameter extraction device is for using each the sheet material test board in the test group of this Copper Foil to move following module:
Test extraction module, utilizes transmission line S parameter scanning algorithm, with the mode of substitution Copper Foil roughness loss respectively fromIn the S parameter of this sheet material test board, extract and obtain corresponding measurement of electric parameter varied curve frequently;
Loss substitution module, imports the Copper Foil roughness loss of this Copper Foil being obtained by Copper Foil roughness loss modeling methodFrequently varied curve, to realize the loss of described substitution Copper Foil roughness.
That is, in the S parameter scanning algorithm of realizing based on Test extraction module and loss substitution module, can be first by testingExtraction module calculates the initial measurement varied curve frequently that the electric parameter of sheet material beta version does not comprise the loss of Copper Foil roughness, soAfter again by Test extraction module by the Copper Foil roughness damage curve of this initial measurement varied curve and importing of loss substitution module frequentlySubtract each other, can obtain considering the measurement of electric parameter varied curve frequently of Copper Foil roughness loss impact.
In practical application, also can be understood as above-mentioned Copper Foil roughness loss model building device is that sheet material electric parameter extractsA part for device.
And alternatively,, for any electric parameter in Dk and Df, the electric extraction element of this sheet material can also enter oneStep is for using each the sheet material test board in the test group of this Copper Foil to move following module:
Test emulation module, the measurement of electric parameter that utilizes this sheet material test board frequently varied curve to carry out 3 D electromagnetic field imitativeVery and the model roughness parameter of giving this sheet material test board that the emulation of 3 D electromagnetic field is set up, obtain for to this sheet materialThe measurement of electric parameter of the test board electric parameter emulation that varied curve is verified frequently varied curve frequently.
After operation test emulation module, the result that can obtain by range estimation, to this sheet material in test groupThe measurement of electric parameter of test board frequently varied curve is revised, to utilize the checking correction of closed loop to reduce statistic bias to this plateThe measurement of electric parameter of material test board is the impact of varied curve frequently.
Except above-mentioned Copper Foil roughness loss modeling method and sheet material electric parameter extracting method and Copper Foil roughnessOutside loss model building device and sheet material electric parameter extraction element, the present embodiment has also improved in order to optimize the measurement of S parameterThe structure of sheet material test board, is described in detail below.
The sheet material test board of various sheet materials adopts unified stepped construction conventionally, refers to Fig. 6, taking 6 copper foil layers as example,Between every two-layer in 6 copper foil layers, have inter-level dielectric, the 2nd layer of L2 and the 5th layer of L5 in 6 copper foil layers are signals layer,Remaining the 1st layer of L1, the 3rd layer of L3, the 4th layer of L4 and the 6th layer of L6 are plane layer. So, above-mentioned Copper Foil roughness lossModeling method and sheet material electric parameter extracting method and Copper Foil roughness loss model building device and sheet material electric parameter extract dressPut the processing of every kind of sheet material test board all simultaneously for two signals layers of the 2nd layer of L2 of sheet material test board and the 5th layer of L5.
What wherein, the conventional design of sheet material test board adopted is following mode:
Lay single line, lay differential lines at the signals layer of the 5th layer of L5 at the signals layer of the 2nd layer of L2;
The glue content of the inter-level dielectric of each the institute's adjacency in the signals layer of the signals layer of the 2nd layer of L2 and the 5th layer of L5 is equalBe 50%.
Correspondingly, just there is following defect in the conventional design of sheet material test board:
The differential lines of laying in order to adapt to the signals layer of the 5th layer of L5, the signals layer of the 2nd layer of L2 and the 5th layer of L5 walk line lengthDegree all needs at least to reach 16 inches, thereby makes the planar dimension of sheet material test board at least will reach 4 inches × 18 inches, entersAnd make sheet material test board oversize, be unfavorable for saving testing cost;
The glue content of the inter-level dielectric of each the institute's adjacency in the signals layer of the signals layer of the 2nd layer of L2 and the 5th layer of L5 is equalSelect 50%, just make to only limit to from the electric parameter of every kind of sheet material test board extraction the situation of 50% this lower glue content, andCannot extract the electric parameter in other the higher glue content situations such as 65% grade for example of obtaining.
The present embodiment is exactly for above-mentioned two defects to the improvement of sheet material test board.
1), for sheet material test board oversize, be unfavorable for saving this defect of testing cost:
The present embodiment all laying single line at the 2nd layer of L2 and the 5th layer of L5, like this, and the 2nd layer of L2 and the 5th layer of L5 in theoryThe track lengths of signals layer can shorten to 8 inches.
The top view please first obtaining towards end face one lateral projection of the 1st layer of L1 from the 2nd layer of L2 referring to Fig. 7 a(), in Fig. 7 a, showWhat the holding wire of the 2nd layer of L2 going out comprised test cabling 71a, checking cabling 72a and went embedding for AFR removes embedding cabling 73a,Wherein, the length of test cabling 71a is with checking cabling 72a and go the length sum of embedding cabling 73a to equate, for example, and test cablingThe length of 71a is that 10 inches, the length of checking cabling 72a are 8 inches, to go the length of embedding cabling 73a be 2 inches, therefore, and from theThe test cabling 71a of the signals layer of 2 layers of L2 can measure the S parameter of 8 inches of cablings, testing from the signals layer of the 2nd layer of L2Card cabling 72a can measure the S parameter of 6 inches of cablings for verifying.
The upward view please obtaining towards the bottom surface of the 6th layer of L6 one lateral projection from the 5th layer of L6 referring to Fig. 7 b(again), with the 2nd layerIn like manner, the holding wire of the 5th layer of L5 shown in Fig. 7 b comprises test cabling 71b, checking cabling 72b and goes embedding for AFR L2Remove embedding cabling 73b, wherein, the length of test cabling 71b is with checking cabling 72b and go the length sum of embedding cabling 73b to equate,For example, the length of test cabling 71b is that 10 inches, the length of checking cabling 72b are 8 inches, to go the length of embedding cabling 73b be 2Inch, therefore, from the test cabling 71b of the signals layer of the 5th layer of L5 can measure the S parameter of 8 inches of cablings, from the 5th layerThe checking cabling 72b of the signals layer of L5 can measure the S parameter of 6 inches of cablings for verifying.
Thus, the planar dimension of sheet material test board can be reduced to 2 inches × 12 inches, be about 4 inches × 18 EnglishVery little 1/3, thus the size of sheet material test board can be reduced so that save testing cost.
It should be noted that, the present embodiment is only taking 6 copper foil layers and wherein comprises two signals layers as example, but realityIn border application, the quantity of the quantity of copper foil layer and the signals layer that wherein comprises can be not limited to this, that is, and and every kind of sheet material test boardCan comprise that the holding wire at least two signals layers and at least two signals layers can be single line.
2), for this defect of test that only limits to lower glue content:
The laminated construction of sheet material test board can have slight asymmetric, therefore, and the signals layer both sides institute adjacency of the 2nd layer of L2Inter-level dielectric, i.e. CORE(central layer) and PP(PrePreg, prepreg or be called preimpregnation material) all adopt 55% glue contentSpecification, and the inter-level dielectric CORE of the signals layer one side institute adjacency of the 5th layer of L5 can adopt 55% glue content specification, opposite sideThe inter-level dielectric PP of institute's adjacency can adopt 65% glue content specification, thereby, from the signals layer of the 2nd layer of L2 and the 5th layer of L5Measure respectively the sheet material electric parameter under lower glue content and the combination of higher glue content.
Refer to table 3, in following table 3, listed the explanation to 6 copper foil layers and inter-level dielectric.
Table 3
Thus, just can extract and obtain lower glue content and higher glue content situation from every kind of sheet material test boardElectric parameter.
It should be noted that, the present embodiment is only taking 6 copper foil layers and wherein comprises two signals layers as example, but realityIn border application, the quantity of the quantity of copper foil layer and the signals layer that wherein comprises can be not limited to this, that is, and and every kind of sheet material test boardCan comprise at least two signals layers, and identical with the glue content of two inter-level dielectrics of one of them signals layer adjacency, with anotherThe glue content of two inter-level dielectrics of a signals layer adjacency is different.
In addition, in the time that the signals layer of the 2nd layer of L2 and the 5th layer of L5 is selected RTF, if the impedance of single line more close to 50 ohm,Measurement result is just more accurate. Correspondingly, for control group, can retrain the bit size that processing signal hole is used.
And, for the ease of obtaining the Copper Foil cross-sectional slice of the sheet material test board for extracting roughness parameter, every kind of plateThe edge of material test board can be provided for the cut Coupon(sample portion that forms section).
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all in essence of the present inventionWithin god and principle, any amendment of making, be equal to replacement, improvement etc., within the scope of protection of the invention all should be included in.
Claims (14)
1. a Copper Foil roughness loss modeling method, is characterized in that, this Copper Foil roughness loss modeling method is for being usedAt least one sheet material of same Copper Foil, and provide the loss of Copper Foil roughness frequently for the electric parameter of this at least one sheet materialVaried curve, wherein, electric parameter at least comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss modeling method is for describedEach sheet material test board at least one sheet material is carried out following step:
Utilize transmission line S parameter scanning algorithm, the S parameter in the mode of not substitution Copper Foil roughness loss from this sheet material test boardMiddle extraction obtains corresponding measurement of electric parameter varied curve frequently;
Utilize the measurement of electric parameter frequency varied curve of this sheet material test board to carry out the emulation of 3 D electromagnetic field, and imitative to 3 D electromagnetic fieldThe roughness parameter that the true model of setting up is given this sheet material test board, the electric parameter emulation that obtains this sheet material test board becomes bent frequentlyLine;
By the electric parameter emulation varied curve frequently of the measurement of electric parameter frequency varied curve of this sheet material test board and this sheet material test boardSubtract each other at predetermined each frequency, obtain the discrete discrepancy of this sheet material test board at predetermined each frequency;
And, for described any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss modeling sideMethod is also carried out following step for the discrete discrepancy of the sheet material test board of described at least one sheet material:
Utilize the discrete discrepancy at predetermined each frequency of the sheet material test board of described at least one sheet material to carry out curve fitting,The Copper Foil roughness loss of this kind of Copper Foil using to described at least one sheet material is varied curve frequently.
2. Copper Foil roughness loss modeling method according to claim 1, is characterized in that, roughness parameter is from this plateIn the contour images in the Copper Foil cross section of material test board, extraction obtains, and the contour images in the Copper Foil cross section of this sheet material test board is to comply withInferior to this sheet material test board cutting being obtained to the section in Copper Foil cross section, section amplification is taken pictures and obtained the slice map in Copper Foil cross sectionPicture, and the sectioning image in Copper Foil cross section is carried out to image processing obtains.
3. Copper Foil roughness loss modeling method according to claim 1, is characterized in that, curve is to utilizeDebye model realization.
4. a sheet material electric parameter extracting method, is characterized in that, this sheet material electric parameter extracting method is used for extracting useAn electric parameter for the sheet material of Copper Foil, electric parameter comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this sheet material electric parameter extracting method should for usingThe sheet material test board of Copper Foil is carried out following step:
Utilize transmission line S parameter scanning algorithm, join from the S of this sheet material test board respectively in the mode of substitution Copper Foil roughness lossIn number, extract and obtain corresponding measurement of electric parameter varied curve frequently;
And, import by this Copper Foil obtaining according to the Copper Foil roughness loss modeling method described in claim 1 or 2 or 3The loss of Copper Foil roughness is varied curve frequently, to realize the loss of described substitution Copper Foil roughness.
5. sheet material electric parameter extracting method according to claim 4, is characterized in that, for dielectric constant and dissipation because ofAny electric parameter in son, this sheet material electric parameter extracting method is further carried out following step:
Utilize the measurement of electric parameter frequency varied curve of this sheet material test board to carry out the emulation of 3 D electromagnetic field, and imitative to 3 D electromagnetic fieldThe roughness parameter that the true model of setting up is given this sheet material test board, obtains for the measurement of electric parameter to this sheet material test boardFrequently the electric parameter emulation that varied curve is verified varied curve frequently.
6. sheet material electric parameter extracting method according to claim 4, is characterized in that, the sheet material test of each sheet materialPlate all has stepped construction, and comprises at least two signals layers, and wherein, the holding wire at least two signals layers is single line.
7. sheet material electric parameter extracting method according to claim 4, is characterized in that, the sheet material test of each sheet materialPlate all has stepped construction, and comprises at least two signals layers, wherein, and with two inter-level dielectrics of one of them signals layer adjacencyGlue content identical, different with the glue content of two inter-level dielectrics of another signals layer adjacency.
8. a Copper Foil roughness loss model building device, is characterized in that, this Copper Foil roughness loss model building device is for usingAt least one sheet material of same Copper Foil, and provide the loss of Copper Foil roughness frequently for the electric parameter of this at least one sheet materialVaried curve, wherein, electric parameter at least comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss model building device is for describedEach sheet material test board at least one sheet material moves following module:
Modeling extraction module, utilizes transmission line S parameter scanning algorithm, in the mode of not substitution Copper Foil roughness loss from this sheet materialIn the S parameter of test board, extract and obtain corresponding measurement of electric parameter varied curve frequently;
Modeling and simulating module, utilizes the measurement of electric parameter frequency varied curve of this sheet material test board to carry out the emulation of 3 D electromagnetic field, andThe roughness parameter that the model that the emulation of 3 D electromagnetic field is set up is given this sheet material test board, obtains the electric of this sheet material test boardParameters simulation is varied curve frequently;
Deviation sampling module, by the measurement of electric parameter frequency varied curve of this sheet material test board and the electric parameter of this sheet material test boardEmulation frequently varied curve is subtracted each other at predetermined each frequency, obtains the discrete discrepancy of this sheet material test board at predetermined each frequency;
And, for described any electric parameter in dielectric constant and dissipation factor, this Copper Foil roughness loss modeling dressAlso put for the discrete discrepancy of the sheet material test board of described at least one sheet material and move following module:
Statistical fit module, utilizes the sheet material test board of described at least one sheet material to carry out at the discrete discrepancy of predetermined each frequencyCurve, the Copper Foil roughness loss of this kind of Copper Foil that described in obtaining, at least one sheet material uses is varied curve frequently.
9. Copper Foil roughness loss model building device according to claim 8, is characterized in that, roughness parameter is from this plateIn the contour images in the Copper Foil cross section of material test board, extraction obtains, and the contour images in the Copper Foil cross section of this sheet material test board is to comply withInferior to this sheet material test board cutting being obtained to the section in Copper Foil cross section, section amplification is taken pictures and obtained the slice map in Copper Foil cross sectionPicture, and the sectioning image in Copper Foil cross section is carried out to image processing obtains.
10. Copper Foil roughness loss model building device according to claim 8, is characterized in that, curve is to utilizeDebye model realization.
11. 1 kinds of sheet material electric parameter extraction elements, is characterized in that, this sheet material electric parameter extraction element is used for extracting useThe electric parameter of the multiple sheet material of same Copper Foil, electric parameter comprises dielectric constant and dissipation factor;
For any electric parameter in dielectric constant and dissipation factor, this sheet material electric parameter extraction element should for usingThe sheet material test board of Copper Foil moves following module:
Test extraction module, utilizes transmission line S parameter scanning algorithm, in the mode of substitution Copper Foil roughness loss respectively from this plateIn the S parameter of material test board, extract and obtain corresponding measurement of electric parameter varied curve frequently;
Loss substitution module, importing is obtained by the Copper Foil roughness loss model building device described according to Claim 8 or 9 or 10The Copper Foil roughness loss of this Copper Foil is varied curve frequently, to realize the loss of described substitution Copper Foil roughness.
12. sheet material electric parameter extraction elements according to claim 11, is characterized in that, for dielectric constant and dissipationAny electric parameter in the factor, the electric extraction element of this sheet material is the following module of operation further:
Test emulation module, utilizes the measurement of electric parameter frequency varied curve of this sheet material test board to carry out the emulation of 3 D electromagnetic field, andThe model roughness parameter of giving this sheet material test board that the emulation of 3 D electromagnetic field is set up, obtains for to this sheet material test boardThe measurement of electric parameter electric parameter emulation that frequently varied curve is verified varied curve frequently.
13. sheet material electric parameter extraction elements according to claim 11, is characterized in that, the sheet material test of every kind of sheet materialPlate all has stepped construction, and comprises at least two signals layers, and wherein, the holding wire at least two signals layers is single line.
14. sheet material electric parameter extraction elements according to claim 11, is characterized in that, the sheet material test of every kind of sheet materialPlate all has stepped construction, and comprises at least two signals layers, wherein, and with two inter-level dielectrics of one of them signals layer adjacencyGlue content identical, different with the glue content of two inter-level dielectrics of another signals layer adjacency.
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