CN103424893A - Optical polarization converter and manufacturing method thereof - Google Patents
Optical polarization converter and manufacturing method thereof Download PDFInfo
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- CN103424893A CN103424893A CN2013103744502A CN201310374450A CN103424893A CN 103424893 A CN103424893 A CN 103424893A CN 2013103744502 A CN2013103744502 A CN 2013103744502A CN 201310374450 A CN201310374450 A CN 201310374450A CN 103424893 A CN103424893 A CN 103424893A
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Abstract
The invention discloses an optical polarization converter and a manufacturing method thereof. The optical polarization converter comprises a polarization beam splitter, a first half-wave plate, a second half-wave plate and a polarization beam combiner. The optical polarization converter is a thermoluminescence type polarization converter, a phase delay unit is introduced by changing the temperature of a silicon dioxide optical waveguide, the light intensity of two beams of polarized light is distributed in any proportion through a combination device of a tunable coupler and a phase shifter, and the polarization state of light is further accurately converted in real time. The manufacturing method of the optical polarization converter comprises the following steps of: (1) cutting a silicon wafer; (2) cleaning the silicon wafer; (3) thermally oxidizing the silicon wafer; (4) directly writing an optical waveguide and a micro photon device; and (5) manufacturing a micro-thin film heating electrode. The optical polarization converter has the advantages of low loss, simplicity and accuracy in manufacturing, high integration degree, small driving voltage and low power consumption, and can be used for accurately converting the polarization state of the light in real time.
Description
Technical field
The invention belongs to electronic technology field, further relate to a kind of optical polarization transducer of optical element manufacturing technology in microelectronic and preparation method thereof.Optical polarization transducer provided by the present invention can be used for real-time, the accurately conversion of optical polarization.Method for making of the present invention is the integrated of polarisation transformer and other optoelectronic devices, and a kind of simple, quick, cheap, high method of making precision of utilizing femtosecond pulse to write direct in the silicon based silicon dioxide photonic waveguide and realizing polarisation transformer necessary waveguide and micro-optical device is provided.
Background technology
The accumulation of the Polarization-Dependent Gain in optical fiber telecommunications system in the Polarization Dependent Loss of a plurality of optical devices and multistage erbium-based amplifier can produce serious Power penalty.In long-reach wavelength division multiplexing fibre-optic transmission system (FOTS) and reconfigurable optical time division multiplexing system, when optical signal transmission speed surpasses 40Gb/S, polarization mode dispersion becomes one of bottleneck of restriction optical signal transmission quality.To be electrooptical effect, elasto-optical effect, magneto-optic effect and thermo-optic effect by optical medium realize polarisation transformation to the modulation of the refractive index of material to traditional optical polarisation transformer great majority.
The patented claim " a kind of Polarization Controller " (application number 201110262016.4 application publication number CN1023140042A) that University of Electronic Science and Technology proposes discloses a kind of Polarization Controller, comprises that light imports device, polarizer, light-output device, rotation magneto-optic optical fiber structure and magnetic control means.The spin fiber structure that this Polarization Controller utilizes magneto-optic memory technique to make, and utilize magnetic control means to be controlled the spin fiber structure, can regulate ellipticity and azimuthal variation of incident light.The weak point that this device exists is: one, and the magnetic field changed in Polarization Controller can produce very large scattering loss to the polarized light through magnetic field; Its two, integrated degree is low.
The people such as C.K.Madsen are at paper " Reset-Free Integrated Polarization Controller Using Phase Shifters " (IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOLUME11, NUMER2, MARCH/APRIL2005) a kind of integrated polarisation transformer of exempting to reset that utilizes phase-shifter to make has been proposed in a literary composition.This device is comprised of the polarization mode transducer of polarization beam apparatus, half-wave plate, elementary path.This device is a kind of thermal-optical type polarisation transformer, introduces phase delay cell by changing temperature, and then the polarisation of light state is controlled.The weak point that this device exists is: one, and this device employing is mixed germanium and is realized optical waveguide, needed technical matters complexity in silicon; Its two, mix germanium and can cause the scattering of light effect in silicon, increase the insertion loss of device; Its three, the composition device complexity of the polarization mode transducer of elementary path, can cause very large insertion loss, integrated degree is low;
Summary of the invention
The object of the invention is to overcome the deficiency of above-mentioned prior art, a kind of optical polarization transducer and preparation method thereof is provided.
The thinking that realizes the object of the invention is, optical polarization transducer of the present invention is a kind of thermal-optical type polarisation transformer, introduce phase delay cell by the temperature that changes silicon dioxide optical waveguide, and by the assembling device that can regulate coupling mechanism and phase-shifter, the light intensity of two bundle polarized lights is carried out to the arbitrary proportion distribution, and then the polarisation of light state is carried out in real time to accurately conversion.
Optical polarization transducer of the present invention comprises based on silicon based silicon dioxide makes polarization beam apparatus, first half-wave plate of being three-dimensional 2 * 2 types that material makes, the assembling device that can regulate coupling mechanism and phase-shifter, second half-wave plate, polarization beam combiner.
Polarization beam apparatus is positioned at the high order end of optical polarization transducer, in order to the incident light by random polarization state, is decomposed into the linearly polarized light that two bundle polarization direction angles are 90 °.
First half-wave plate is connected by optical waveguide with polarization beam apparatus, in order to the two bunch polarized lights by polarization beam apparatus output, is converted to the two identical linearly polarized lights in bundle polarization direction.
The assembling device of tunable coupling mechanism and phase-shifter is connected with first half-wave plate with polarization beam apparatus respectively by optical waveguide, in order to the light intensity of the linearly polarized light identical to two bundle polarization directions, carries out the arbitrary proportion distribution.
Second half-wave plate is connected by optical waveguide with the assembling device of tunable coupling mechanism and phase-shifter, in order to the polarization direction half-twist of the linearly polarized light that will enter to inject second half-wave plate, the linearly polarized light of second half-wave plate output is 90 ° with the polarization direction angle of the linearly polarized light that first half-wave plate is exported.
Polarization beam combiner is positioned at the low order end of optical polarization transducer, polarization beam combiner is connected with second half-wave plate with the assembling device of tunable coupling mechanism and phase-shifter respectively by optical waveguide, in order to the two bunch polarized lights that will export from the assembling device of second half-wave plate and tunable coupling mechanism and phase-shifter, synthesizes the light of a branch of any required polarization state.
Method for making of the present invention, comprise the steps:
(1) cutting silicon:
Adopt laser cutting technique, according to making the required big or small cutting silicon of optical polarizator.
(2) clean silicon wafer:
Adopt the method for chemical cleaning, clean the dirt of the silicon wafer surface after cutting.
(3) thermal oxidation silicon wafer:
Adopt thermal oxidation technique, in silicon dioxide tubular type stove, the single face of the silicon wafer after cleaning carried out to partial thermal oxidation, obtain the silicon based silicon dioxide.
(4) the sub-device of directly writing light guide and low-light:
4a) silicon wafer after thermal oxide is fixed on the three-D electric translation stage, the thermal oxide of silicon wafer faces up;
4b) regulate microcobjective, make the inside of the silicon dioxide layer of femto-second laser pulse vertical focusing in silicon based silicon dioxide;
4c) the built-in driver parameter in the setting computer;
4d) regulate variable attenuator, make the energy attenuation of femto-second laser pulse to the optimum capacity scope;
The motion of 4e) computer control three-D electric translation stage, make the three-D electric translation stage with step 4c) in the parameter set in the plane perpendicular to the focused beam direction of propagation, move, complete directly writing light guide, can regulate coupling mechanism, polarization beam apparatus, first half-wave plate, second half-wave plate, polarization beam combiner.
(5) make the mems thin film heating electrode:
5a) calculate the length of mems thin film heating electrode;
5b) directly over any one transmission waveguide in can regulating coupling mechanism, adopt the method for sputter coating, make the mems thin film heating electrode, acquisition can be regulated the assembling device of coupling mechanism and phase-shifter.
The present invention compared with prior art has the following advantages:
First, because adopting the femto-second laser pulse direct writing technology, the present invention makes optical waveguide in silicon dioxide, overcome and in the prior art, utilized the method for mixing Ge element change medium refraction index to make the large shortcoming of complex manufacturing technology, scattering loss that optical waveguide is brought, made the present invention have advantages of that loss is little, manufacture craft simple, the making precision is high.
Second, because adopting the femto-second laser pulse direct writing technology, the present invention makes polarisation transformer in silicon based silicon dioxide, overcome the shortcoming that complex structure, insertion loss are large, integrated level is low of prior art, made the present invention have advantages of that integrated level is high, simple in structure, loss is little.
The accompanying drawing explanation
The structural representation that Fig. 1 is polarisation transformer of the present invention;
The process flow diagram that Fig. 2 is optical polarization transducer method for making of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to accompanying drawing 1, optical polarization transducer of the present invention, comprise based on silicon based silicon dioxide make polarization beam apparatus 1, first half-wave plate 2 of being three-dimensional 2 * 2 types that material makes, the assembling device that can regulate coupling mechanism and phase-shifter 3, second half-wave plate 4, polarization beam combiner 5.
Polarization beam apparatus 1 is positioned at the high order end of optical polarization transducer, and the incident light of random polarization state is broken down into by polarization beam apparatus 1 linearly polarized light that two bundle polarization direction angles are 90 °.
First half-wave plate 2 is connected by optical waveguide with polarization beam apparatus 1, any a branch of from two bunch polarized lights of polarization beam apparatus 1 output incided in first half 2 wave plates by optical waveguide, and the polarization direction of the linearly polarized light of exporting from the first half-wave plate 2 is identical with the polarization direction of an other bunch polarisation.
The assembling device 3 that can regulate coupling mechanism and phase-shifter is connected with first half-wave plate 2 with polarization beam apparatus 1 respectively by optical waveguide, the two identical line polarisations in bundle polarization direction incide by optical waveguide in the assembling device 3 that can regulate coupling mechanism and phase-shifter, by coherent interference and relative phase modulation, the light intensity of two bunch polarized lights are carried out to the arbitrary proportion distribution.
Second half-wave plate 4 is connected with the assembling device 3 of tunable coupling mechanism and phase-shifter by optical waveguide, from the assembling device 3 that can regulate coupling mechanism and phase-shifter, in the two-beam of output, a branch of linearly polarized light incides in second half-wave plate 4 by optical waveguide, the polarization direction of this bunch polarized light is 90 ° with the angle that incides the polarization direction of the linearly polarized light in the first half-wave plate 2, second half-wave plate 4 is by the polarization direction half-twist of the linearly polarized light of incident, and the polarization state of the line polarisation of exporting from second half-wave plate 4 and the angle of other a branch of polarization direction are 90 °.
With reference to accompanying drawing 2, implementation method of the present invention is further described.
Step 1, cutting silicon.
Adopt the laser cutting technique cutting silicon, the acquisition size is 1 * 1cm
2, the silicon wafer of thickness 2mm;
Step 2, clean silicon wafer.
Adopt the method for chemical cleaning, clean the dirt of the silicon wafer surface after cutting;
The single face of the silicon wafer after cleaning is carried out to partial thermal oxidation in silicon dioxide tubular type stove, obtain silicon based silicon dioxide; The thickness of silicon dioxide and the time of oxidation are approximated to linear relationship, can judge by oxidization time the thickness of silicon dioxide.
Silicon wafer after thermal oxide is fixed on the three-D electric translation stage, and the thermal oxide of silicon wafer faces up; Three-dimensional micro-processing platform can be accurate mobile at X, Y and Z direction by computer controlled automatic, and its mobile accuracy can reach 500nm/s; Be that 1mJ, pulse width are that the high-energy fly secondary laser pulse that 50fs and repetition frequency are 1kHz is decayed with variable attenuator by the maximum single pulse energy of titanium jewel amplifier output, obtain the pulse energy of 200nJ; With numerical aperture be 0.5, enlargement factor is 50 * microcobjective the high-energy fly secondary laser pulse after decay is focused on to the following 10 μ m depths in silicon dioxide layer surface in silicon based silicon dioxide, and control by the driver of built-in computer speed, direction, the length that three-dimensional mobile platform moves, directly writing light guide, can regulate coupling mechanism, polarization beam apparatus, first half-wave plate, second half-wave plate, polarization beam combiner.
Directly over any one transmission waveguide in can regulating coupling mechanism, adopt the method for sputter coating, the mems thin film heating electrode that the making material is chromium or aluminium, acquisition can be regulated the assembling device of coupling mechanism and phase-shifter.The following formula that passes through of the length of mems thin film heating electrode calculates:
Wherein, L means the length of mems thin film heating electrode, λ means the operation wavelength of optical polarization transducer, size is 1500nm, Δ φ means the phase differential between the assembling device Zhong Liangge road light of tunable coupling mechanism and phase-shifter, Δ T means the temperature lift-off value that the optical waveguide in mems thin film heating electrode heating phase-shifter obtains
Mean the temperature T differentiate of the refractive index n of silicon dioxide to silicon dioxide, its value is the thermo-optical coeffecient of silicon dioxide, and size is 1 * 10
-5K
-1.
Claims (5)
1. an optical polarization transducer, comprise based on silicon based silicon dioxide and make polarization beam apparatus (1), first half-wave plate (2), the assembling device (3) that can regulate coupling mechanism and phase-shifter, second half-wave plate (4), the polarization beam combiner (5) that are three-dimensional 2 * 2 types that material is made; Wherein:
Described polarization beam apparatus (1) is positioned at the high order end of optical polarization transducer, in order to the incident light by random polarization state, is decomposed into the linearly polarized light that two bundle polarization direction angles are 90 °;
Described first half-wave plate (2) is connected by optical waveguide with polarization beam apparatus (1), and the linearly polarized light that is 90 ° in order to the two bundle polarization direction angles by polarization beam apparatus (1) output is converted to the two identical linearly polarized lights in bundle polarization direction;
The assembling device (3) of described tunable coupling mechanism and phase-shifter is connected with first half-wave plate (2) with polarization beam apparatus (1) respectively by optical waveguide, in order to the light intensity of the linearly polarized light identical to two bundle polarization directions, carries out the arbitrary proportion distribution;
The assembling device (3) of the tunable coupling mechanism of described second half-wave plate (4) and phase-shifter is connected by optical waveguide, in order to the polarization direction half-twist of the linearly polarized light that will enter to inject second half-wave plate (4), the linearly polarized light of second half-wave plate (4) output is 90 ° with the polarization direction angle of the linearly polarized light that first half-wave plate (2) is exported;
Described polarization beam combiner (5) is positioned at the low order end of optical polarization transducer, polarization beam combiner (5) is connected with second half-wave plate (4) with the assembling device (3) of tunable coupling mechanism and phase-shifter respectively by optical waveguide, in order to the two bunch polarized lights that will export from the assembling device (3) of second half-wave plate (4) and tunable coupling mechanism and phase-shifter, synthesizes the light of a branch of any required polarization state.
2. an optical polarization transducer method for making, comprise the steps:
(1) cutting silicon:
Adopt laser cutting technique, according to making the required big or small cutting silicon of optical polarizator;
(2) clean silicon wafer:
Adopt the method for chemical cleaning, clean the dirt of the silicon wafer surface after cutting;
(3) thermal oxidation silicon wafer:
Adopt thermal oxidation technique, in silicon dioxide tubular type stove, the single face of the silicon wafer after cleaning carried out to partial thermal oxidation, obtain the silicon based silicon dioxide;
(4) the sub-device of directly writing light guide and low-light:
4a) silicon wafer after thermal oxide is fixed on the three-D electric translation stage, the thermal oxide of silicon wafer faces up;
4b) regulate variable attenuator, make the energy attenuation of femto-second laser pulse to the optimum capacity scope;
4c) regulate microcobjective, make the inside of the silicon dioxide layer of femto-second laser pulse vertical focusing in silicon based silicon dioxide;
4d) the built-in driver parameter in the setting computer;
The motion of 4e) computer control three-D electric translation stage, make the three-D electric translation stage with step 4c) in the parameter set in the plane perpendicular to the focused beam direction of propagation, move, complete directly writing light guide, can regulate coupling mechanism, polarization beam apparatus, first half-wave plate, second half-wave plate, polarization beam combiner;
(5) make the mems thin film heating electrode:
5a) calculate the length of mems thin film heating electrode;
5b) directly over any one transmission waveguide in can regulating coupling mechanism, adopt the method for sputter coating, make the mems thin film heating electrode, acquisition can be regulated the assembling device of coupling mechanism and phase-shifter.
3. a kind of optical polarization transducer method for making according to claim 2, is characterized in that step 4c) described in the degree of depth of inside of the silicon dioxide layer of femto-second laser pulse vertical focusing in silicon based silicon dioxide be 10～100 μ m.
4. a kind of optical polarization transducer method for making according to claim 2, is characterized in that step 4b) described in the optimum capacity scope be 200～400nJ.
5. a kind of optical polarization transducer method for making according to claim 2, is characterized in that step 5a) described in the length of mems thin film heating electrode according to following formula, calculate:
Wherein, L means the length of mems thin film heating electrode, λ means the operation wavelength of optical polarization transducer, Δ φ means the phase differential between the assembling device Zhong Liangge road light of tunable coupling mechanism and phase-shifter, Δ T means the temperature lift-off value that the optical waveguide in mems thin film heating electrode heating phase-shifter obtains
Mean the temperature T differentiate of the refractive index n of silicon dioxide to silicon dioxide, its value is the thermo-optical coeffecient of silicon dioxide.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2015096070A1 (en) * | 2013-12-25 | 2015-07-02 | 华为技术有限公司 | Waveguide polarization splitter and polarization rotator |
| WO2015176311A1 (en) * | 2014-05-23 | 2015-11-26 | 华为技术有限公司 | Polarization control device and polarization control method |
| CN105829935A (en) * | 2013-12-20 | 2016-08-03 | 华为技术有限公司 | Polarizer and polarization modulation system |
| CN107561646A (en) * | 2017-10-18 | 2018-01-09 | 西安奇芯光电科技有限公司 | Optical waveguide polarization separator and its manufacture method |
| CN111106205A (en) * | 2019-11-29 | 2020-05-05 | 中国科学院微电子研究所 | Silicon-based photonic devices and methods of fabricating the same |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105829935A (en) * | 2013-12-20 | 2016-08-03 | 华为技术有限公司 | Polarizer and polarization modulation system |
| US10067363B2 (en) | 2013-12-20 | 2018-09-04 | Huawei Technologies Co., Ltd | Polarizer and polarization modulation system |
| WO2015096070A1 (en) * | 2013-12-25 | 2015-07-02 | 华为技术有限公司 | Waveguide polarization splitter and polarization rotator |
| CN105829933A (en) * | 2013-12-25 | 2016-08-03 | 华为技术有限公司 | Waveguide polarization splitter and polarization rotator |
| CN105829933B (en) * | 2013-12-25 | 2019-04-12 | 华为技术有限公司 | Wave-guide polarization separation and polarization converter |
| WO2015176311A1 (en) * | 2014-05-23 | 2015-11-26 | 华为技术有限公司 | Polarization control device and polarization control method |
| CN105308495A (en) * | 2014-05-23 | 2016-02-03 | 华为技术有限公司 | Polarization control device and polarization control method |
| CN107561646A (en) * | 2017-10-18 | 2018-01-09 | 西安奇芯光电科技有限公司 | Optical waveguide polarization separator and its manufacture method |
| CN107561646B (en) * | 2017-10-18 | 2020-05-05 | 西安奇芯光电科技有限公司 | Optical waveguide polarization splitter and method of manufacturing the same |
| CN111106205A (en) * | 2019-11-29 | 2020-05-05 | 中国科学院微电子研究所 | Silicon-based photonic devices and methods of fabricating the same |
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