CN103418538B - Inner surface machining process for charging barrel - Google Patents
Inner surface machining process for charging barrel Download PDFInfo
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- CN103418538B CN103418538B CN201310381580.9A CN201310381580A CN103418538B CN 103418538 B CN103418538 B CN 103418538B CN 201310381580 A CN201310381580 A CN 201310381580A CN 103418538 B CN103418538 B CN 103418538B
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Abstract
The invention discloses an inner surface machining process for a charging barrel for placing silicon chips. The inner surface machining process is used for coating the inner surface of the charging barrel and comprises the following process steps: (1) carrying out material degreasing; (2) carrying out physical surface area expansion; (3) removing dust; (4) spraying polyether ether ketone on the inner surface; (5) predrying an inner surface coating; (6) sintering the coating; and (10) carrying normal temperature cooling. The surface machining process is adopted to coating the inner surface of the charging barrel, so that the inner surface of the charging barrel resists to high temperature, resists to corrosion and has good self-lubricating performance and wear resistance, service life of the charging barrel is greatly prolonged and production cost of enterprises is reduced.
Description
Technical field
The present invention relates to a kind of surface processing technique, particularly relate to a kind of inner surface processing technology of placing the barrel of silicon wafer.
Background technology
Barrel is one of utensil used when producing silicon wafer, and in process of production, silicon wafer is put into barrel from barrel upper end continuously, exports from barrel lower end then continuously again.Therefore, higher to the performance requirement of barrel inner surface, generally carry out processing the method for process for spraying to barrel inner surface, that is: to barrel inner surface spraying polytetrafluoroethylene (PTFE), though PTFE material has good mechanical performance, high temperature resistant, decay resistance and high lubricating property, PTFE is extremely not wear-resisting, makes the wearing and tearing of barrel inner surface very large, the service life of barrel is short, adds the production cost of enterprise.
Summary of the invention
The technical problem of solution required for the present invention is: the inner surface processing technology providing a kind of barrel, and the wearability of the barrel inner surface after processing is improved greatly.
For solving the problem, the technical solution used in the present invention is: the inner surface processing technology of barrel of the present invention, comprises following processing step:
(1) material degreasing: with soaking normal hexane---be commonly called as the cloth even wiping barrel inner surface of white spirit, be positioned in closed furnace by the barrel wiping across white spirit, in-furnace temperature is 350-400 DEG C, and the heat time is 90-110min;
(2) physical surface area expansion: at 6-8kg/cm
2pressure under blasting treatment is carried out to barrel inner surface, make barrel inner surface form depressed cellular, make barrel internal surface area be expanded to 1.5-1.8 doubly;
(3) dedusting: select 5-7kg/cm
2air pressure blow off the residual trickle sand dust of barrel inner surface;
(4) spray: with air cannon by polyether-ether-ketone Emulsion Spraying on barrel inner surface, under normal temperature, coating on inner surface micro-moistening, do not hang and flow, control coating on inner surface thickness is 50-70 micron;
(5) coating on inner surface predry: be positioned in closed furnace by the barrel after spraying, in-furnace temperature is 90-110 DEG C, and the heat time is 15-25min;
(6) coating sintering: inner surface is sprayed the barrel made a good job of in advance and is positioned in closed furnace, in-furnace temperature is 385-400 DEG C, and the heat time is 90-110min;
(7) cool: cool under barrel being positioned over normal temperature, get product after cooling.
Further, the inner surface processing technology of aforesaid barrel, wherein, the sandblasting material adopted in step (2) is alundum (Al2O3) sandblasting material.
Further, the inner surface processing technology of aforesaid barrel, wherein, the barrel in step (5) after spraying need be put into closed furnace and carry out coating on inner surface predry within 5 minutes.
The invention has the beneficial effects as follows: polyether-ether-ketone has good resistance to elevated temperatures, decay resistance, self-lubricating property and anti-wear performance, above-mentioned surface processing technique is adopted to carry out application to barrel inner surface, barrel inner surface high temperature resistant, corrosion-resistant, self lubricity is good, wearability is good, considerably increase the service life of barrel, decrease the production cost of enterprise.
Accompanying drawing explanation
Fig. 1 is the structural representation of the barrel after carrying out Surface Machining.
Detailed description of the invention
Below in conjunction with accompanying drawing and preferred embodiment, technical solutions according to the invention are described in further detail.
As shown in Figure 1, barrel is made up of upper flange 1, upper shell 2 and lower shell 3, upper flange 1, between upper shell 2 and lower shell 3 by being welded together, before application is carried out to the inner surface of barrel, first that weld grinding is smooth, and then carry out application.
Embodiment one
The inner surface processing technology of barrel, is mainly used in carrying out application to barrel inner surface, comprises following processing step:
(1) material degreasing: with the cloth soaking white spirit even wiping barrel inner surface, be positioned in closed furnace by the barrel wiping across white spirit, in-furnace temperature is 350 DEG C, and the heat time is 110min;
(2) physical surface area expansion: at 6kg/cm
2pressure under blasting treatment is carried out to barrel inner surface, make barrel inner surface formed depressed cellular, make barrel internal surface area be expanded to 1.5 times, sandblasting material is alundum (Al2O3) sandblasting material;
(3) dedusting: select 5kg/cm
2air pressure blow off the residual trickle sand dust of barrel inner surface;
(4) spray: with air cannon by polyether-ether-ketone Emulsion Spraying on barrel inner surface, under normal temperature, coating on inner surface 4 micro-moistening, do not hang and flow, control coating on inner surface 4 thickness be 50 microns;
(5) coating on inner surface 4 predry: be positioned in closed furnace by the barrel after spraying, in-furnace temperature is 90 DEG C, and the heat time is 25min, and the barrel after spraying need put into closed furnace within 5 minutes;
(6) coating sintering: inner surface is sprayed the barrel made a good job of in advance and is positioned in closed furnace, in-furnace temperature is 385 DEG C, and the heat time is 110min;
(7) cool: cool under barrel being positioned over normal temperature, get product after cooling.
Embodiment two
The inner surface processing technology of barrel, is mainly used in carrying out application to barrel inner surface, comprises following processing step:
(1) material degreasing: with the cloth soaking white spirit even wiping barrel inner surface, be positioned in closed furnace by the barrel wiping across white spirit, in-furnace temperature is 380 DEG C, and the heat time is 100min;
(2) physical surface area expansion: at 7kg/cm
2pressure under blasting treatment is carried out to barrel inner surface, make barrel inner surface formed depressed cellular, make barrel internal surface area be expanded to 1.6 times, sandblasting material is alundum (Al2O3) sandblasting material;
(3) dedusting: select 6kg/cm
2air pressure blow off the residual trickle sand dust of barrel inner surface;
(4) spray: with air cannon by polyether-ether-ketone Emulsion Spraying on barrel inner surface, under normal temperature, coating on inner surface 4 micro-moistening, do not hang and flow, control coating on inner surface 4 thickness be 60 microns;
(5) coating on inner surface 4 predry: be positioned in closed furnace by the barrel after spraying, in-furnace temperature is 100 DEG C, and the heat time is 20min, and the barrel after spraying need put into closed furnace within 5 minutes;
(6) coating sintering: inner surface is sprayed the barrel made a good job of in advance and is positioned in closed furnace, in-furnace temperature is 395 DEG C, and the heat time is 100min;
(7) cool: cool under barrel being positioned over normal temperature, get product after cooling.
Embodiment three
The inner surface processing technology of barrel, is mainly used in carrying out application to barrel inner surface, comprises following processing step:
(1) material degreasing: with the cloth soaking white spirit even wiping barrel inner surface, be positioned in closed furnace by the barrel wiping across white spirit, in-furnace temperature is 400 DEG C, and the heat time is 90min;
(2) physical surface area expansion: at 8kg/cm
2pressure under blasting treatment is carried out to barrel inner surface, make barrel inner surface formed depressed cellular, make barrel internal surface area be expanded to 1.8 times, sandblasting material is alundum (Al2O3) sandblasting material;
(3) dedusting: select 7kg/cm
2air pressure blow off the residual trickle sand dust of barrel inner surface;
(4) spray: with air cannon by polyether-ether-ketone Emulsion Spraying on barrel inner surface, under normal temperature, coating on inner surface 4 micro-moistening, do not hang and flow, control coating on inner surface 4 thickness be 70 microns;
(5) coating on inner surface 4 predry: be positioned in closed furnace by the barrel after spraying, in-furnace temperature is 100 DEG C, and the heat time is 15min, and the barrel after spraying need put into closed furnace within 5 minutes;
(6) coating sintering: inner surface is sprayed the barrel made a good job of in advance and is positioned in closed furnace, in-furnace temperature is 400 DEG C, and the heat time is 90min;
(7) cool: cool under barrel being positioned over normal temperature, get product after cooling.
Polyether-ether-ketone has good resistance to elevated temperatures, decay resistance, self-lubricating property and anti-wear performance, above-mentioned surface processing technique is adopted to carry out application to barrel inner surface, make that barrel inner surface is high temperature resistant, corrosion-resistant, self lubricity is good, wearability is good, considerably increase the service life of barrel, decrease cost.In the present invention, the specifications and models of described polyether-ether-ketone are VICOTE 816 BLK, control the coating layer thickness of barrel inner surface to meet design requirement in spraying process by controlling spray time.
Claims (2)
1. the inner surface processing technology of barrel, is characterized in that: comprise following processing step:
(1) material degreasing: with the cloth soaking white spirit even wiping barrel inner surface, be positioned in closed furnace by the barrel wiping across white spirit, in-furnace temperature is 350-400 DEG C, and the heat time is 90-110min;
(2) physical surface area expansion: at 6-8kg/cm
2pressure under blasting treatment is carried out to barrel inner surface, make barrel inner surface form depressed cellular, make barrel internal surface area be expanded to 1.5-1.8 doubly; The sandblasting material adopted is alundum (Al2O3) sandblasting material;
(3) dedusting: select 5-7kg/cm
2air pressure blow off the residual trickle sand dust of barrel inner surface;
(4) spray: with air cannon by polyether-ether-ketone Emulsion Spraying on barrel inner surface, under normal temperature, coating on inner surface micro-moistening, do not hang and flow, control coating on inner surface thickness is 50-70 micron;
(5) coating on inner surface predry: be positioned in closed furnace by the barrel after spraying, in-furnace temperature is 90-110 DEG C, and the heat time is 15-25min;
(6) coating sintering: inner surface is sprayed the barrel made a good job of in advance and is positioned in closed furnace, in-furnace temperature is 385-400 DEG C, and the heat time is 90-110min;
(7) cool: cool under barrel being positioned over normal temperature, get product after cooling.
2. according to the inner surface processing technology of barrel according to claim 1, it is characterized in that: the barrel in step (5) after spraying need be put into closed furnace and carry out coating on inner surface predry within 5 minutes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310381580.9A CN103418538B (en) | 2013-08-29 | 2013-08-29 | Inner surface machining process for charging barrel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310381580.9A CN103418538B (en) | 2013-08-29 | 2013-08-29 | Inner surface machining process for charging barrel |
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| Publication Number | Publication Date |
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| CN103418538A CN103418538A (en) | 2013-12-04 |
| CN103418538B true CN103418538B (en) | 2014-12-24 |
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| JP4168480B2 (en) * | 1998-02-27 | 2008-10-22 | ダイキン工業株式会社 | Fluororubber aqueous coating composition and coated article |
| US20030209610A1 (en) * | 2001-12-14 | 2003-11-13 | Edward Miller | High velocity oxygen fuel (HVOF) method for spray coating non-melting polymers |
| US20030165689A1 (en) * | 2001-12-14 | 2003-09-04 | Miller Edward A. | Articles spray coated with non-melting polymer |
| CN103213357B (en) * | 2013-01-05 | 2015-07-08 | 浙江鹏孚隆科技有限公司 | Non-stick coating layer with characteristics of high hardness, scratch resistance and corrosion resistance, and coating method thereof |
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