CN103411683A - Device for measuring infrared spectrum radiation energy and calibration method thereof - Google Patents
Device for measuring infrared spectrum radiation energy and calibration method thereof Download PDFInfo
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- CN103411683A CN103411683A CN2013103199845A CN201310319984A CN103411683A CN 103411683 A CN103411683 A CN 103411683A CN 2013103199845 A CN2013103199845 A CN 2013103199845A CN 201310319984 A CN201310319984 A CN 201310319984A CN 103411683 A CN103411683 A CN 103411683A
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Abstract
The invention provides a device for measuring infrared spectrum radiation energy and a calibration method of the device. The device comprises an optical grating monochrometer, an infrared detector, a lock-in amplifier and a wave chopper. The calibration method includes the steps that a black body radiation source is used as a standard radiation energy source, temperature is accurately controlled to a certain temperature respectively, output signals of the device for measuring infrared spectrum radiation energy are measured respectively, and the device for measuring infrared spectrum radiation energy is calibrated by the utilization of a known black body standard radiation energy value. Through the research of the method, the device for measuring infrared spectrum radiation energy and the calibration method of the device are applied to measuring infrared characteristic parameters of infrared spectrum emissivity and the like of infrared stealth coatings and other materials, therefore, measuring accuracy of the device for measuring infrared spectrum radiation energy is improved, the problem that the measuring accuracy is low in a wide spectrum range is solved, and the application effect is good.
Description
Technical field
The present invention relates to infrared stealth coating material infrared spectrum emissivity measurement, be specifically related to a kind of infrared spectral radiant energy measuring apparatus and scaling method thereof for material infrared spectrum emissivity measurement.
Background technology
The radiation characteristic such as infrared emittance, infra-red emission, when estimating stealth material, bait coating material performance, is very important achievement data.When carrying out the infrared spectrum emissivity measurement of the materials such as infrared stealth coating, topmost content is exactly to utilize the infrared band emittance of infrared spectral radiant energy measuring apparatus Measurement accuracy testee under assigned temperature.The infrared spectral radiant energy gauge being demarcated, made it to have good measure linear degree, can accurately reflect the spectral power distribution of each wave band under assigned temperature, is material infrared spectrum emissivity measurement result prerequisite accurately and reliably.Usually, measure the infrared spectral radiant energy measuring apparatus, the spectrum that the light splitting instruments such as employing monochromator are divided into narrow wave band coordinates infrared eye or adopts Fourier infrared spectrograph to measure.But, owing to being subject to the factor impacts such as light path system energy loss, infrared eye signal output nonlinear, directly measure the result precision of output, can not meet the measurement requirement.
Summary of the invention
In order to solve the poor problem of infrared spectrum emissivity measurement middle infrared spectrum energy signal measurement of the materials such as infrared stealth coating, the invention provides a kind of infrared spectral radiant energy measuring apparatus and scaling method thereof.
A kind of infrared spectral radiant energy measuring apparatus of the present invention, it comprises grating monochromator, infrared eye, lock-in amplifier and chopper; Wherein, chopper is placed in the front 10～20mm of entrance slit of grating monochromator, the exit slit of infrared eye next-door neighbour grating monochromator; Lock-in amplifier is connected with chopper, infrared eye, and the AC signal that infrared eye produces is amplified to processing.
The scaling method of a kind of infrared spectral radiant energy measuring apparatus of the present invention, it comprises the steps:
(a) blackbody radiation source one is stabilized in to the temperature T 1 of setting, blackbody radiation source two is stabilized in to the temperature T 2 of setting, make the emittance of the emittance of blackbody radiation source one and blackbody radiation source two inject respectively the entrance slit of grating monochromator (6); Temperature T 1, T2 are higher than room temperature more than 100 ℃;
(b) chopper is placed in the front 10～20mm of entrance slit of grating monochromator, the exit slit of infrared eye next-door neighbour grating monochromator;
The emittance that chopper blocks blackbody radiation source one or blackbody radiation source two repeatedly with the fixed frequency of setting, make the frequency switching of emittance to fix; In the time of logical, infrared detector measurement is the emittance of blackbody radiation source one or blackbody radiation source two; In the time of disconnected, infrared detector measurement be the emittance of chopper, due to chopper, block the emittance of blackbody radiation source one or blackbody radiation source two with fixed frequency, and the temperature of blackbody radiation source one or blackbody radiation source two is far above room temperature, and the temperature of chopper is room temperature, so on infrared eye, produce the ac signal of frequency stabilization;
(c) lock-in amplifier is connected with chopper, infrared eye, the AC signal that infrared eye produces is amplified to processing, then be transferred to data acquisition processing system;
100～300 ac signal data of the each collection of data acquisition processing system are averaged, and improve the signal to noise ratio (S/N ratio) parameter; Simultaneously, calculate the output voltage U of blackbody radiation source one and blackbody radiation source two
1, U
2
Output voltage U
1That reflect is the effective spectral radiant energy L of blackbody radiation source one at assigned direction
eff(λ, T
1) with effective spectral radiant energy L on chopper surface
Meff(λ, T
Am) poor; Wherein, λ is the wavelength that the grating monochromator light splitting obtains, T
AmFor the temperature of chopper, be room temperature,
U
1=[L
eff(λ,T
1)-L
meff(λ,T
am)]·η(λ)·R(λ)·Δλ (1)
In formula (1): R (λ) is the spectral responsivity of infrared eye, and η (λ) is the spectrum efficiency of grating monochromator, and Δ λ is the wavelength bandwidth that the grating monochromator light splitting obtains;
Correspondingly, output voltage U
2That reflect is the effective spectral radiant energy L of blackbody radiation source two at assigned direction
Reff(λ, T
2) with effective spectral radiant energy L on chopper surface
Meff(λ, T
Am) poor; Wherein, λ is the wavelength that the grating monochromator light splitting obtains, T
AmFor the temperature of chopper, be room temperature,
U2=[L
reff(λ,T
2)-L
meff(λ,T
am)]·η(λ)·R(λ)·Δλ （2）；
In formula (2): R (λ) is the spectral responsivity of infrared eye, and η (λ) is the spectrum efficiency of grating monochromator, and Δ λ is the wavelength bandwidth that the grating monochromator light splitting obtains;
The emittance M of blackbody radiation source one and blackbody radiation source two under uniform temperature
1And M
2Should meet Planck law, be respectively:
Wherein, c
1, c
2For constant, λ, T
1, T
2Known, calibration coefficient B is:
By U
1Substitution is theoretical calculates, U
2The demarcation output valve should be:
U
2*＝U
1×B
After correction, the linearity L=U of ac signal output
2*/U
2, should be as far as possible near 1.
The scaling method of a kind of infrared spectral radiant energy measuring apparatus as above, its described blackbody radiation source one, blackbody radiation source two are placed in the front 200～300mm of entrance slit of grating monochromator.
The scaling method of a kind of infrared spectral radiant energy measuring apparatus as above, its described blackbody radiation source one, blackbody radiation source two are placed on motorized precision translation stage.
Effect of the present invention is:
But the infrared band emittance of infrared spectral radiant energy measuring apparatus Measurement accuracy testee of the present invention under assigned temperature, the infrared spectral radiant energy measuring apparatus is demarcated, can greatly be improved the accuracy of material infrared spectrum emissivity measurement.
The present invention adopts two black matrix methods, utilize the alternating temperature black matrix as the standard radiant energy source, respectively temperature is accurately controlled to uniform temperature, measure respectively infrared spectral radiant energy measuring apparatus output signal, utilize known blackbody standard radiation energy value to demarcate the infrared spectral radiant energy measuring apparatus.Research by this method, apply it to the infrared characteristic parameter measurements such as infrared spectrum emissivity of the materials such as infrared stealth coating, improve infrared spectral radiant energy measuring apparatus measuring accuracy, solve the problem not high than accuracy of measurement in wide spectral range, effect is good.
By experiment, the present invention verifies at a plurality of temperature spots and infrared spectrum wave band, and result shows that the method is reliable, effectively, and experimental data is good.
The accompanying drawing explanation
Fig. 1 is infrared spectral radiant energy measuring apparatus of the present invention and demarcates schematic diagram.
In figure: 1. blackbody radiation source one; 2. blackbody radiation source two; 3. lock-in amplifier; 4. data acquisition processing system; 5. infrared eye; 6. grating monochromator; 7 choppers; 8 motorized precision translation stages.
Embodiment
Below in conjunction with the drawings and specific embodiments, a kind of infrared spectral radiant energy measuring apparatus of the present invention and scaling method thereof are further described.
As shown in Figure 1, a kind of infrared spectral radiant energy measuring apparatus of the present invention, it comprises grating monochromator 6, infrared eye 5, lock-in amplifier 3 and chopper 7; Wherein, chopper 7 is placed in the front 10～20mm of entrance slit of grating monochromator 6, the exit slit of infrared eye 5 next-door neighbour's grating monochromators 6; Lock-in amplifier 3 is connected with chopper 7, infrared eye 5, and the AC signal that infrared eye 5 produces is amplified to processing.
Embodiment 2
The scaling method of a kind of infrared spectral radiant energy measuring apparatus of the present invention, it comprises the steps:
(a) blackbody radiation source 1, blackbody radiation source 22 are placed on motorized precision translation stage 8, blackbody radiation source 1 is stabilized in to the temperature T 1 of setting, blackbody radiation source 22 is stabilized in to the temperature T 2 of setting, the front 200～300mm(of entrance slit that the emittance of the mobile emittance that makes blackbody radiation source 1 and blackbody radiation source 22 is injected respectively grating monochromator 6 for example: 200mm, 250mm or 300mm); Temperature T 1, T2 are higher than 100 ℃ of room temperatures;
(b) chopper 7 is placed in the front 10～20mm of entrance slit of grating monochromator 6, the exit slit of infrared eye 5 next-door neighbour's grating monochromators 6;
The emittance that chopper 7 blocks blackbody radiation source one or blackbody radiation source two repeatedly with the fixed frequency of setting, make the frequency switching of emittance to fix; What in the time of logical, infrared eye 5 was measured is the emittance of blackbody radiation source one or blackbody radiation source two; In the time of disconnected, what infrared eye 5 was measured is the emittance of chopper 7, due to chopper 7, block the emittance of blackbody radiation source one or blackbody radiation source two with fixed frequency, and the temperature of blackbody radiation source one or blackbody radiation source two is far above room temperature, and the temperature of chopper 7 is room temperature, so on infrared eye 5, produce the ac signal of frequency stabilization;
(c) lock-in amplifier 3 is connected with chopper 7, infrared eye 5, the AC signal that infrared eye 5 produces is amplified to processing, then be transferred to data acquisition processing system 4;
100 ac signal data of data acquisition processing system 4 each collections are averaged, and improve the signal to noise ratio (S/N ratio) parameter; Simultaneously, calculate the output voltage U of blackbody radiation source 1 and blackbody radiation source 22
1, U
2
Output voltage U
1That reflect is the effective spectral radiant energy L of blackbody radiation source 1 at assigned direction
eff(λ, T
1) with effective spectral radiant energy L on chopper 7 surfaces
Meff(λ, T
Am) poor; Wherein, λ is the wavelength that grating monochromator 6 light splitting obtain, T
AmFor the temperature of chopper (7), be room temperature,
U
1=[L
eff(λ,T
1)-L
meff(λ,T
am)]·η(λ)·R(λ)·Δλ （1）
In formula (1): R (λ) is the spectral responsivity of infrared eye 5, and η (λ) is the spectrum efficiency of grating monochromator 6, and Δ λ is the wavelength bandwidth that grating monochromator 6 light splitting obtain;
Correspondingly, output voltage U
2That reflect is the effective spectral radiant energy L of blackbody radiation source 22 at assigned direction
Reff(λ, T
2) with effective spectral radiant energy L on chopper 7 surfaces
Meff(λ, T
Am) poor; Wherein, λ is the wavelength that grating monochromator 6 light splitting obtain, T
AmFor the temperature of chopper 7, be room temperature,
U
2=[L
reff(λ,T
2)-L
meff(λ,T
am)]·η(λ)·R(λ)·Δλ （2）；
In formula (2): R (λ) is the spectral responsivity of infrared eye 5, and η (λ) is the spectrum efficiency of grating monochromator 6, and Δ λ is the wavelength bandwidth that grating monochromator 6 light splitting obtain;
The emittance M of blackbody radiation source 1 and blackbody radiation source 22 under uniform temperature
1And M
2Should meet Planck law, be respectively:
Wherein, c
1, c
2For constant, λ, T
1, T
2Known, calibration coefficient B is:
By U
1Substitution is theoretical calculates, U
2The demarcation output valve should be:
U
2*＝U
1×B
After correction, the linearity L=U of ac signal output
2*/U
2, should be as far as possible near 1.
The inventive method is distinguished temperature controls in temperature T by two blackbody radiation sources
1, T
2, because blackbody radiation source can be considered emissivity, be 1, the temperature control emittance of blackbody radiation source at a certain temperature meets Planck law.The inventive method to infrared spectral radiant energy measurement demarcate, can greatly improve the accuracy of material infrared spectrum emissivity measurement.Research by this method, apply it to the infrared characteristic parameter measurements such as infrared spectrum emissivity of the materials such as infrared stealth coating, improve infrared spectral radiant energy measuring apparatus measuring accuracy, solve the problem not high than accuracy of measurement in wide spectral range, effect is good.
Claims (4)
1. infrared spectral radiant energy measuring apparatus, it is characterized in that: this device comprises grating monochromator (6), infrared eye (5), lock-in amplifier (3) and chopper (7); Wherein, chopper (7) is placed in the front 10～20mm of entrance slit of grating monochromator (6), the exit slit of infrared eye (5) next-door neighbour's grating monochromator (6); Lock-in amplifier (3) is connected with chopper (7), infrared eye (5), and the AC signal that infrared eye (5) produces is amplified to processing.
2. the scaling method of an infrared spectral radiant energy measuring apparatus, it is characterized in that: the method comprises the steps:
(a) blackbody radiation source one (1) is stabilized in to the temperature T 1 of setting, blackbody radiation source two (2) is stabilized in to the temperature T 2 of setting, makes the emittance of the emittance of blackbody radiation source one (1) and blackbody radiation source two (2) inject respectively the entrance slit of grating monochromator (6); Temperature T 1, T2 are higher than room temperature more than 100 ℃;
(b) chopper (7) is placed in the front 10～20mm of entrance slit of grating monochromator (6), the exit slit of infrared eye (5) next-door neighbour's grating monochromator (6);
The emittance that chopper (7) blocks blackbody radiation source one or blackbody radiation source two repeatedly with the fixed frequency of setting, make the frequency switching of emittance to fix; What in the time of logical, infrared eye (5) was measured is the emittance of blackbody radiation source one or blackbody radiation source two; In the time of disconnected, what infrared eye (5) was measured is the emittance of chopper (7), because chopper (7) blocks the emittance of blackbody radiation source one or blackbody radiation source two with fixed frequency, and the temperature of blackbody radiation source one or blackbody radiation source two is far above room temperature, and the temperature of chopper (7) is room temperature, so the upper ac signal that produces frequency stabilization of infrared eye (5);
(c) lock-in amplifier (3) is connected with chopper (7), infrared eye (5), the AC signal that infrared eye (5) produces is amplified to processing, then be transferred to data acquisition processing system (4);
Data acquisition processing system (4) gathers 100～300 ac signal data at every turn and averages, and improves the signal to noise ratio (S/N ratio) parameter; Simultaneously, calculate the output voltage U of blackbody radiation source one (1) and blackbody radiation source two (2)
1, U
2
Output voltage U
1That reflect is the effective spectral radiant energy L of blackbody radiation source one (1) at assigned direction
eff(λ, T
1) the effective spectral radiant energy L surperficial with chopper (7)
Meff(λ, T
Am) poor; Wherein, λ is the wavelength that grating monochromator (6) light splitting obtains, T
AmFor the temperature of chopper (7), be room temperature,
U
1=[L
eff(λ,T
1)-L
meff(λ,T
am)]·η(λ)·R(λ)·Δλ （1）
In formula (1): R (λ) is the spectral responsivity of infrared eye (5), and η (λ) is the spectrum efficiency of grating monochromator (6), and Δ λ is the wavelength bandwidth that grating monochromator (6) light splitting obtains;
Correspondingly, output voltage U
2That reflect is the effective spectral radiant energy L of blackbody radiation source two (2) at assigned direction
Reff(λ, T
2) the effective spectral radiant energy L surperficial with chopper (7)
Meff(λ, T
Am) poor; Wherein, λ is the wavelength that grating monochromator (6) light splitting obtains, T
AmFor the temperature of chopper (7), be room temperature,
U
2=[L
reff(λ,T
2)-L
meff(λ，T
am)]·η(λ)·R(λ)·Δλ （2）；
In formula (2): R (λ) is the spectral responsivity of infrared eye (5), and η (λ) is the spectrum efficiency of grating monochromator (6), and Δ λ is the wavelength bandwidth that grating monochromator (6) light splitting obtains;
The emittance M of blackbody radiation source one (1) and blackbody radiation source two (2) under uniform temperature
1And M
2Should meet Planck law, be respectively:
Wherein, c
1, c
2For constant, λ, T
1, T
2Known, calibration coefficient B is:
By U
1Substitution is theoretical calculates, U
2The demarcation output valve should be:
U
2*＝U
1×B
After correction, the linearity L=U of ac signal output
2*/U
2, should be as far as possible near 1.
3. the scaling method of a kind of infrared spectral radiant energy measuring apparatus according to claim 2, it is characterized in that: described blackbody radiation source one (1), blackbody radiation source two (2) are placed in the front 200～300mm of entrance slit of grating monochromator (6).
4. according to the scaling method of the described a kind of infrared spectral radiant energy measuring apparatus of claim 2 or 3, it is characterized in that: described blackbody radiation source one (1), blackbody radiation source two (2) are placed on motorized precision translation stage.
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| CN103776531A (en) * | 2014-01-01 | 2014-05-07 | 西安应用光学研究所 | Near infrared weak pulse spectral radiance calibration device |
| CN103808676A (en) * | 2014-01-17 | 2014-05-21 | 四川省医学科学院（四川省人民医院） | Method for detecting traditional Chinese medicine powder by using photoacoustic spectrometry |
| CN104280136A (en) * | 2014-09-30 | 2015-01-14 | 中国电子科技集团公司第四十一研究所 | Temperature drift and spectral response compensation method for pyroelectric detector |
| CN104501961A (en) * | 2014-12-02 | 2015-04-08 | 中国科学院等离子体物理研究所 | Intensity absolute calibration method of microwave heterodyne system in fusion device |
| CN105784127A (en) * | 2016-05-05 | 2016-07-20 | 合肥芯福传感器技术有限公司 | Combined-type standard testing source and method for infrared sensor |
| CN106525254A (en) * | 2016-09-29 | 2017-03-22 | 上海热像机电科技股份有限公司 | Automatic temperature calibration system and method for infrared thermal imager |
| CN107389204A (en) * | 2017-07-27 | 2017-11-24 | 电子科技大学 | The test platform and its method of infrared focal plane detector dim light spectrum signal |
| CN108163223A (en) * | 2016-12-07 | 2018-06-15 | 南京理工大学 | A kind of portable aircraft infrared stealth capability evaluating device and method |
| CN108780038A (en) * | 2018-05-21 | 2018-11-09 | 深圳达闼科技控股有限公司 | Determine method, relevant apparatus and the storage medium of spectrometer calibration coefficient |
| CN110207830A (en) * | 2019-06-03 | 2019-09-06 | 中国矿业大学 | A kind of the imaging sensor caliberating device and scaling method in nonblackbody radiation source |
| CN111595457A (en) * | 2020-05-31 | 2020-08-28 | 广西电网有限责任公司南宁供电局 | Method for improving temperature measurement precision of robot by adopting double-blackbody correction |
| CN114235690A (en) * | 2021-11-25 | 2022-03-25 | 中国人民解放军空军工程大学 | Method and device for measuring surface infrared emissivity of aircraft coating |
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| CN103776531A (en) * | 2014-01-01 | 2014-05-07 | 西安应用光学研究所 | Near infrared weak pulse spectral radiance calibration device |
| CN103808676A (en) * | 2014-01-17 | 2014-05-21 | 四川省医学科学院（四川省人民医院） | Method for detecting traditional Chinese medicine powder by using photoacoustic spectrometry |
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| CN104501961A (en) * | 2014-12-02 | 2015-04-08 | 中国科学院等离子体物理研究所 | Intensity absolute calibration method of microwave heterodyne system in fusion device |
| CN105784127A (en) * | 2016-05-05 | 2016-07-20 | 合肥芯福传感器技术有限公司 | Combined-type standard testing source and method for infrared sensor |
| CN105784127B (en) * | 2016-05-05 | 2019-11-12 | 合肥芯福传感器技术有限公司 | A kind of infrared sensor combined type standard testing source and test method |
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| CN108163223A (en) * | 2016-12-07 | 2018-06-15 | 南京理工大学 | A kind of portable aircraft infrared stealth capability evaluating device and method |
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| CN107389204A (en) * | 2017-07-27 | 2017-11-24 | 电子科技大学 | The test platform and its method of infrared focal plane detector dim light spectrum signal |
| CN108780038A (en) * | 2018-05-21 | 2018-11-09 | 深圳达闼科技控股有限公司 | Determine method, relevant apparatus and the storage medium of spectrometer calibration coefficient |
| CN110207830A (en) * | 2019-06-03 | 2019-09-06 | 中国矿业大学 | A kind of the imaging sensor caliberating device and scaling method in nonblackbody radiation source |
| CN111595457A (en) * | 2020-05-31 | 2020-08-28 | 广西电网有限责任公司南宁供电局 | Method for improving temperature measurement precision of robot by adopting double-blackbody correction |
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| CN114252162B (en) * | 2021-12-07 | 2023-12-08 | 南京理工大学 | Thermal infrared imager parameter test system under space environment |
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