A kind of Graphene transfer device
Technical field
The present invention relates to a kind of Graphene transfer device.
Background technology
Graphene, due to its feature such as High Performance, low cost, has application prospect widely, thus causes the extensive concern of domestic and international researcher.Owing to being subject to the restriction of preparation technology up till now, be difficult to high speed, the growth individual layer of low defect, large-area Graphene on the base material beyond copper, but copper is as one conduction, non-transparency base material, can't be used in final applied product, so how the Graphene of growth on Copper base material film is transferred on other flexible, non-conductive, elastomeric base films, just becoming the bottleneck of restriction Graphene widespread use, is gordian technique urgently to be resolved hurrily.
Volume to volume rolling techniques, because it has the advantages such as low cost, high efficiency, high speed, continuity be good, be widely used already in the commercial production such as steel-making, papermaking, printing, the researcher of field of micro-Na manufacture is even conceived and is utilized volume to volume rolling techniques to realize the transfer of micro-nano structure.In the process of volume to volume roll-in, the parallelism between upper and lower roll is association area technical bottleneck urgently to be resolved hurrily always, by the popularization of the quality He this technology that directly have influence on product.
Patent of invention CN102656016A discloses Graphene volume to volume transfer device, the graphene film that metal base grows is transferred in other flexible substrate by roller system by this device, but in prior art, due to Graphene need the vacuum high-temperature condition of 1000 DEG C under grow, be in close proximity to the fusing point of copper, graphene film cannot be obtained by the mode of growth continuously in the Copper base material of rolling, so what often obtain is the Copper thin film that growth scattered one by one has Graphene, and the growth needs dozens of minutes of Graphene, it is a process at a slow speed, and Graphene to be transferred to other flexible substrate (PET) from copper substrate only need tens seconds, it is a fast speed process, this device will be grown on transfer and be coupled, be unfavorable for enhancing productivity, and be unfavorable for the transfer of bulk product, in transfer process, the pressure field between transfer roll, parallelism all cannot regulate, and cannot ensure the homogeneity of transfer printing.
Summary of the invention
Object of the present invention provides a kind of Graphene transfer device, solves the above-mentioned problems in the prior art.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of Graphene transfer device, comprise feeding device, transfer device for exerting, finished product recovery device and platform chassis, described feeding device, transfer device for exerting are connected in turn with finished product recovery device, and are connected with described platform chassis respectively by feeding device Connection Block, mesa sidewalls, finished product recovery device Connection Block;
Described transfer device for exerting comprises pressure-bearing feeding power roller, initiatively pressure roller, roller bearing assembly, exert pressure assembly and feeding power provide assembly, described assembly and the roller bearing assembly of exerting pressure all has two groups, lay respectively at the two ends of described active pressure roller and pressure-bearing feeding power roller, described roller bearing assembly is used for providing support pressure-bearing feeding power roller and active pressure roller, described assembly of exerting pressure is for applying pressure to described active pressure roller, and described feeding power provides assembly for providing feeding power to described pressure-bearing feeding power roller;
Described feeding device comprises feeding device supporting base, flitch on copper film, PET film material loading sliding track mechanism, described feeding device supporting base is arranged on described feeding device Connection Block, on described copper film, flitch is arranged on the top of described feeding device supporting base, described PET film material loading sliding track mechanism comprises material loading slide rail and material loading slide block, on described feeding device supporting base, on described copper film, the upside of flitch is fixed with described material loading slide rail, the symmetrical setting in the described material loading slide rail position that flitch two ends are corresponding on described copper film, described material loading slide block is provided with between the material loading slide rail of described both sides, straight-line motion pair is formed between described material loading slide rail and material loading slide block.
Further, described assembly of exerting pressure comprises servomotor of exerting pressure, coupler, ball-screw, the nut matched with described ball-screw, flexible bearing and tension-compression sensor, described servomotor of exerting pressure be arranged on be positioned at described mesa sidewalls upper end support platform on, described ball-screw is connected with described servomotor of exerting pressure by described coupler, described nut is connected with described flexible bearing, described tension-compression sensor is arranged on described flexible bearing, described flexible bearing is connected with described active pressure roller, described ball-screw is vertically placed, and below servomotor of exerting pressure described in being positioned at, described mesa sidewalls is provided with ball-screw mount pad and ball-screw bearing seat.
Further, described flexible bearing comprises nut fixed part and sensor fixed part, wherein nut fixed part is fixed on the lower end of described nut, and described tension-compression sensor is fixed on described sensor fixed part, and described sensor fixed part is connected with described active pressure roller bearing seat.
Further, described roller bearing assembly comprises pressure-bearing feeding power roll bearing seat and active pressure roller bearing seat, described pressure-bearing feeding power roll bearing seat is fixed in described platform chassis, described pressure-bearing feeding power roll bearing seat upper end is provided with penetrating groove, described penetrating groove comprises a sloped sidewall, and described active pressure roller bearing seat is configured in described penetrating groove.
Further, the bearing seat compact heap of wedge shape is provided with between one side of described active pressure roller bearing seat and the sloped sidewall of described penetrating groove, the narrow end of described bearing seat compact heap is inserted into described penetrating bottom portion of groove, forms sliding pair between the sloped sidewall of the described penetrating groove in the dip plane of described bearing seat compact heap and described pressure-bearing feeding power roll bearing seat.
Further, described active pressure roller bearing seat both sides are respectively arranged with a roller sliding shoe, one of them roller sliding shoe is connected with a side of described groove, another one roller sliding shoe is fixedly connected with the vertical surface relative with described dip plane of described bearing seat compact heap, and described active pressure roller bearing block is clamped between two roller sliding shoes.
Further, described bearing seat compact heap is provided with adjustment screw.
Further, described feeding power provides assembly to comprise feed servo motor, synchronous pulley, transmission shaft, described feed servo motor is connected with the described synchronous pulley be arranged on described transmission shaft by Timing Belt, and described transmission shaft is connected by coupler with described pressure-bearing feeding power roller.
Further, described material loading slide block is provided with the vacuum cup that PET substrate can be adsorbed on described material loading slide block.
Further, flitch is provided with described copper film copper film material loading gesture stability slide block, copper film locating piece, localization criteria block, described copper film locating piece has two pieces, flitch both sides of the edge on described copper film are arranged on respectively along copper film direction of feed, described copper film locating piece is provided with draw-in groove, and the straight-line motion that described draw-in groove and described localization criteria block are formed along copper film direction of feed is secondary; Described copper film material loading gesture stability slide block to be arranged on described copper film on flitch.
Further, described finished product recovery device comprises regenerative apparatus supporting seat and finished product reclaims plate, described finished product reclaims plate and is arranged on described regenerative apparatus supporting seat upper end, described regenerative apparatus supporting seat is arranged on described finished product recovery device Connection Block, and described finished product recovery device Connection Block and described platform chassis link together.
The invention has the beneficial effects as follows: the invention provides a kind of Graphene transfer device, Graphene in Copper base material can be transferred in flexible PET base material, compact conformation, simple, device for exerting that is intelligent, automation accurately can control force value between upper and lower roll and parallelism, improve precision and the efficiency of transfer, and the growth of Graphene and transfer are separately realized, be conducive to the efficiency improving transfer, reduce equipment cost, the large-scale application for Graphene provides the thinking of industrialization.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of Graphene transfer device of the present invention;
Fig. 2 is the structural representation of the flexible bearing of a kind of Graphene transfer device of the present invention;
Fig. 3 is the structural representation of the device for exerting of a kind of Graphene transfer device of the present invention;
Fig. 4 is the structural representation of the feeding device of a kind of Graphene transfer device of the present invention;
Fig. 5 is the structural representation of the roller bearing assembly of a kind of Graphene transfer device of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows:
1, platform chassis, 2, mesa sidewalls, 3, support platform, 4, regenerative apparatus supporting seat, 11, feeding device Connection Block, 12, feeding device supporting base, 13, copper film material loading gesture stability slide block, 14, flitch on copper film, 16, Copper thin film locating piece, 17, localization criteria block, 21, material loading slide block, 22, vacuum cup, 23, material loading slide rail, 30, initiatively pressure roller bearing seat, 3101, left side roller sliding shoe, 3102, right side roller sliding shoe, 32, bearing seat compact heap, 3201, adjustment screw, 33, pressure-bearing feeding power roll bearing seat, 40, synchronous pulley, 4001, synchronous pulley bearing seat, 4002, transmission shaft, 41, pressure-bearing feeding power roller, 42, initiatively pressure roller, 43, to exert pressure servomotor, 44, tension-compression sensor, 46, coupler, 48, flexible bearing, 4801, nut fixed part, 4802, sensor fixed part, 49, ball-screw, 4901, nut, 4902, ball-screw mount pad, 4903, ball-screw bearing seat, 51, finished product recovery device Connection Block, 52, regenerative apparatus supporting seat, 53, finished product reclaims plate.
Detailed description of the invention
Be described principle of the present invention and feature below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit scope of the present invention.
As shown in Figure 1, Figure 3, a kind of Graphene transfer device, comprise feeding device, transfer device for exerting and finished product recovery device, described feeding device, transfer device for exerting are connected with platform chassis 1 respectively by feeding device Connection Block 11, mesa sidewalls 2, finished product recovery device Connection Block 51 with finished product recovery device.
Described transfer device for exerting is connected with platform chassis 1 by the mesa sidewalls 2 being positioned at Graphene transfer device both sides, comprises pressure-bearing feeding power roller 41, initiatively pressure roller 42, assembly of exerting pressure, roller bearing assembly and feeding power provide assembly.The top of described mesa sidewalls 2 is provided with support platform 3, described in exert pressure assembly, roller bearing assembly all have two groups, lay respectively at the two ends of initiatively pressure roller 42 and pressure-bearing feeding power roller 41, described in exert pressure assembly for applying pressure to active pressure roller 42; Described roller bearing assembly is used for providing support pressure-bearing feeding power roller 41 and active pressure roller 42; Described feeding power provides assembly for providing feeding power to pressure-bearing feeding power roller 41.
Be introduced for two groups of groups of exerting pressure in assembly below, described assembly of exerting pressure comprises servomotor 43 of exerting pressure, coupler 46, ball-screw 49, the nut 4901 matched with described ball-screw 49, flexible bearing 48 and tension-compression sensor 44, described servomotor 43 of exerting pressure be arranged on be positioned at described mesa sidewalls 2 upper end support platform 3 on, described ball-screw 49 is vertically placed, exert pressure below servomotor 43 described in being positioned at, described ball-screw 49 is connected with described servomotor 43 of exerting pressure by coupler 46, described nut 4901 is connected with flexible bearing 48, described tension-compression sensor 44 is arranged on flexible bearing 48, described mesa sidewalls 2 is provided with ball-screw mount pad 4902 and ball-screw bearing seat 4903.Described flexible bearing 48 is connected with the bearing seat 30 of described active pressure roller 42.Preferably, as shown in Figure 2, described flexible bearing 48 comprises nut fixed part 4801 and sensor fixed part 4802, wherein nut fixed part 4801 is fixed on the lower end of described nut 4901, described tension-compression sensor 44 is fixed on described sensor fixed part 4802, and this sensor fixed part is connected with the bearing seat 30 of described active pressure roller 42.This assembly of exerting pressure is arranged on one end of described active pressure roller 42, and other one group of assembly of exerting pressure is arranged on other one end of initiatively pressure roller 42, and what two groups of assemblies of exerting pressure coordinated acts on initiatively pressure roller 42.
As shown in Figure 5, described roller bearing assembly comprises pressure-bearing feeding power roll bearing seat 33 and active pressure roller bearing seat 30, described pressure-bearing feeding power roll bearing seat 33 is fixedly installed in described platform chassis 1, described active pressure roller bearing seat 30 is positioned at above described pressure-bearing feeding power roll bearing seat 33, described pressure-bearing feeding power roll bearing seat 33 upper end is provided with penetrating groove, described penetrating groove comprises a sloped sidewall, described active pressure roller bearing seat 30 is configured in this groove, and between a side of this active pressure roller bearing seat 30 and the sloped sidewall of described penetrating groove, be provided with the bearing seat compact heap 32 of wedge shape, the narrow end of this wedge shape bearing seat compact heap 32 is inserted into bottom portion of groove, sliding pair is formed between the sloped sidewall of the penetrating groove in its dip plane and pressure-bearing feeding power roll bearing seat 33, left side roller sliding shoe 3101 and right side roller sliding shoe 3102 is respectively arranged with in described active pressure roller bearing seat 30 both sides, described left side roller sliding shoe 3101 is connected with described groove left surface, described right side roller sliding shoe 3102 is fixedly connected with the vertical surface relative with dip plane of described bearing seat compact heap 32, described active pressure roller bearing seat 30 is clamped between described left side roller sliding shoe 3101 and right side roller sliding shoe 3102, and all form rolling pair with described left side roller sliding shoe 3101 and right side roller sliding shoe 3102, thus limit the movement along the X-direction shown in Fig. 4 of initiatively pressure roller bearing seat 30, the rotation of Y direction, the motion of rotation 3 degree of freedom of Z-direction.Described bearing seat compact heap 32 is provided with adjustment screw 3201, be used for regulating described bearing seat compact heap 32 to insert the degree of depth of groove, thus adjust left side roller sliding shoe 3101, right side roller sliding shoe 3102 and the tolerance clearance initiatively between pressure roller bearing seat 30.
As shown in Figure 1,3, feeding power provides assembly to comprise feed servo motor, synchronous pulley 40, transmission shaft 4002, described feed servo motor is connected with the synchronous pulley 40 be arranged on transmission shaft 4002 by Timing Belt, described transmission shaft 4002 is connected by coupler with described pressure-bearing feeding power roller 41, and the synchronous pulley bearing seat 4001 being positioned at described transmission shaft 4002 two ends is used for providing support described transmission shaft 4002.
As shown in Figure 4, described feeding device comprises flitch 14 on feeding device supporting base 12, copper film, PET film material loading sliding track mechanism, described material loading sliding track mechanism comprises material loading slide rail 23 and material loading slide block 21, described feeding device supporting base 12 is arranged on described feeding device Connection Block 11, described feeding device by passing through free-running fit between this feeding device Connection Block 11 and described platform chassis 1, and is connected by screw; On described copper film, flitch 14 is placed on described supporting base 12 top, flitch 14 is provided with described copper film copper film material loading gesture stability slide block 13, Copper thin film locating piece 16 and localization criteria block 17, described Copper thin film locating piece 16 has two pieces, flitch 14 both sides of the edge on described copper film are arranged on respectively along copper film direction of feed, Copper thin film locating piece 16 is designed with draw-in groove, and it is secondary that this draw-in groove and localization criteria block 17 are formed straight-line motion with sliding-modes.On feeding device supporting base 12, on described copper film, the upside of flitch 14 is also fixed with material loading slide rail 23, the symmetrical setting in position that this material loading slide rail 23 flitch 14 two ends on described copper film are corresponding, material loading slide block 21 is provided with between the material loading slide rail 23 of both sides, form straight-line motion pair between material loading slide rail 23 and material loading slide block 21, described material loading slide block 21 is also provided with the vacuum cup 22 of fixing PET film.
As shown in Figure 1, described finished product recovery device comprises regenerative apparatus supporting seat 52 and finished product reclaims plate 53, described finished product reclaims plate 53 and is arranged on described regenerative apparatus supporting seat 52 upper end, described regenerative apparatus supporting seat 52 is arranged on described finished product recovery device Connection Block 51, and described finished product recovery device Connection Block 51 links together with described platform chassis 1.
Equipment installation phase, by the adjustment screw 3201 on adjusting shaft bearing compact heap 32, bearing seat compact heap 32 is slided along the groove slant wall in pressure-bearing feeding power roll bearing seat 33, thus drive initiatively pressure roller bearing seat 30 can finely tune along the X-axis shown in Fig. 4, place it on erecting stage, utilize protractor to regulate, the parallelism of two rollers is controlled at about 3um.
During work, first growth is had the Copper thin film of Graphene smooth to be layered on copper film on flitch 14, sway Copper thin film locating piece 16 on localization criteria block 17, the attitude of adjustment Copper thin film on copper film on flitch 14, allow Copper thin film and squarely be layered on copper film on flitch 14 as far as possible, then copper film material loading gesture stability slide block 13 is pressed in the tail end of Copper thin film, in transfer process, Copper thin film drags copper film material loading gesture stability slide block 13 slip on flitch 14 on copper film together with certain speed under the effect of feeding pulling force, the weight of suitable control copper film material loading gesture stability slide block 13, both Copper thin film can not be torn, also Copper thin film can be allowed to keep good attitude and planarization, prevent Copper thin film warpage.
Then the tail end of PET substrate is fixed on material loading slide block 21 by vacuum cup 22, under the effect of feeding pulling force, PET substrate will slide along PET film material loading slide rail 23 by material loading slide block 21 in tow together, a friction force contrary with PET film working direction is created in this process, this friction force is conducive to ensureing the attitude of PET film in transfer process and planarization, prevents from contacting with Graphene before entering transfer device of exerting pressure and producing bubble.
In transfer process, feed servo motor drives pressure-bearing feeding power roller 41 to rotate with the constant-velocity of setting, exert pressure servomotor 43, tension-compression sensor 44 forms closed-loop, and forming two pressure regulating system with flexible bearing 48, achieving the control to being applied to initiatively pressure between pressure roller 42 and pressure-bearing feeding power roller 41.
When supplied materials is uneven, flexible bearing 48 can absorb the vibrating noise of a part, passive adjustment left and right sides force value, and in displacement drive method control presssure process, can also play the effect of displacement enlargement, improve the control accuracy of pressure; When supplied materials is uneven, when the difference that left and right side tension-compression sensor 44 feeds back exceedes the threshold value of setting, control the servomotor 43 of exerting pressure on left side and right side respectively, initiatively pressure roller 42 just can be made to rotate around X-axis in the YOZ plane shown in Fig. 4, thus the accurate control not only achieved pressure uniformity distribution between active pressure roller 42 and pressure-bearing feeding power roller 41, also ensure that active pressure roller 42 and pressure-bearing feeding power roller 41 in YOZ plane along the parallelism of Z-direction.
The finished film completing the copper substrate after transfer-Graphene-PET substrate formation is collected by finished product recovery device.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.