CN103399543B - The dispatching method of multiple robot devices of film trasport cooperation and system - Google Patents
The dispatching method of multiple robot devices of film trasport cooperation and system Download PDFInfo
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Abstract
The present invention proposes dispatching method and the system of multiple robot devices of a kind of film trasport cooperation, and wherein, method comprises the following steps: the waiting task receiving multiple robot device; Multiple robot device is configured, and generates configuration information; The schedule sequences multiple robot device being carried out to scheduling is in order generated according to the topological structure of configuration information, multiple robot device, path list and wafer list; And according to the waiting task of schedule sequences and multiple robot device, scheduling controlling is carried out to multiple robot device, make multiple robot device work in coordination with waiting task.According to the method for the embodiment of the present invention, achieve the flexible configuration to film trasport cooperation robot device feature, production path and required processing wafer information, improve the work efficiency of robot device simultaneously.
Description
Technical field
The present invention relates to field of computer technology, particularly the dispatching method of multiple robot devices that cooperates of a kind of film trasport and system.
Background technology
(1) film trasport cooperates multiple robot device
Multiple robots controlling equipment comprises LoadPort, Robot1, Buffer, Loadlock, Robot2 and periphery P M, Robot3 and periphery P M thereof.Wherein, LoadPort holds the Cassette of wafer for placing, and its number and position can be configured.Robot1 angular velocity of rotation, move up and down speed, stretching speed can be configured.When wafer imports into, wafer can pass to from the Cassette LoadPort and transmits Buffer or directly pass on Loadlock1 by Robot1, and Wafer judges whether to be configured through importing Buffer into.When wafer spreads out of, wafer can be passed to from Loadlock2 and spread out of Buffer or directly pass on the slot of the Cassette LoadPort, each Slot of Cassette places a wafer, and under SlotToSlot technology pattern, wafer puts back to source Slot.Wafer is put back into the total Slot number of n(Cassette of Cassette under Convert pattern) No. Slot ,-m(source wafer)+1 position, the number of Buffer, capacity, as import into or spread out of buffer memory, position can be configured.LoadLock1 is as afferent pathway, by Vent and Pump gas conversion air and vacuum environment, Vent and the Pump time can be configured, whether mechanical arm does the current state that LoadLock is depended in Vent or Pump operation before passing sheet, ensure vacuum mechanical-arm access vacuum state thus, atmospheric mechanical hand access atmospheric condition, before Robot1 passes sheet to LoadLock1, Loadlock1 is that vacuum then performs Vent operation, otherwise directly can pass sheet, after wafer is passed to Loadlock1 by Robot1, Pump operation can be performed immediately, also Pump operation is carried out together after can putting into a collection of wafer, operate rear Robot2 and can import wafer into object chamber from LoadLock1.Chamber number, position, capacity, setup time and process time can be configured.Wafer is after chamber executes technique, pass on LoadLock3 by Robot2, (without the need to performing Vent or Pump operation after executing the operation of configuration, the operations such as cooling may be had, configure process time), wafer can be passed to its peripheral chambers and proceed processing by Robot3, be transferred on LoadLock4 by Robot3 again etc. completion of processing, wafer passes to Loadlock2 by Robot2 execute the operation of configuration on Loadlock4 after, passed to by Robot1 again and spread out of Buffer, or directly pass back on the Slot of Cassette on LoadPort; More than perform flow process to be as the criterion with Fig. 1 example, scheduling flow is configured by system hardware structure and determines.
(2) based on the dispatching method of heuristic rule
Method based on heuristic rule belongs to one of approximation method solving manufacture process scheduling problem.These class methods can be divided into again simple heuristic and complicated heuristic two kinds.Simple heuristic generally refers to according to some attribute of workpiece (such as, process time, delivery date, residue process time and completed process time etc.) and some characteristics (such as, machinery utilization rate and buffer length etc.) of workshop processing environment directly determine a class dispatching method of machine right of priority on workpiece.Common scheduling rule comprises the shortest (SmallestProcessingTime process time, SPT) rule, process time the longest (LargestProcessingTime, LPT) rule and commutation period the earliest (EarliestDueDate, EDD) regular etc.
The relevant information obtained for utilizing Scheduling Problem process is further to improve the dispatching effect of simple heuristic, on the Research foundation based on simple heuristic, some scholars also proposed complicated heuristic, mainly comprise Johnson algorithm, SBP algorithm, SVS algorithm and PH algorithm etc.These class methods can incorporate the knowledge having experience scheduler easily.
(3) based on the system control technique of state analysis
In short, first, deep analysis has been carried out to each device characteristics in this system, has concluded the duty that it is possible.Secondly, analysed in depth the motion characteristic of each robot in system, concluded all possible action classification.Then, specific equipment working state is attached on concrete robot performs an action, as the constraint condition of this action executing.Finally, the complete rear equipment state needing to reset this action and relate to of each robot motion.Therefore, the element of work of the multiple robot device of whole cooperation can be decomposed into action and state two large divisions, and action causes equipment state to change, and equipment state is the constraint condition of action executing.
Scheduling is there is complicated, the defects such as efficiency is low in prior art.
Summary of the invention
Object of the present invention is intended at least solve one of above-mentioned technological deficiency.
For this reason, one object of the present invention is the dispatching method of the multiple robot devices proposing the cooperation of a kind of film trasport.Described dispatching method has the high advantage of dispatching efficiency.
Another object of the present invention is to the dispatching system of the multiple robot devices proposing the cooperation of a kind of film trasport.
For achieving the above object, embodiments of the invention propose the dispatching method of multiple robot devices of a kind of film trasport cooperation, comprise the following steps: the waiting task receiving described multiple robot device; Described multiple robot device is configured, and generates configuration information; The schedule sequences described multiple robot device being carried out to scheduling is in order generated according to the topological structure of described configuration information, described multiple robot device, path list and wafer list; And according to the waiting task of described schedule sequences and described multiple robot device, scheduling controlling is carried out to described multiple robot device, make described multiple robot device work in coordination with described waiting task.
According to the method for the embodiment of the present invention, achieve the flexible configuration to film trasport cooperation robot device feature, production path and required processing wafer information, improve the work efficiency of robot device simultaneously.
In one embodiment of the invention, the described topological structure according to described configuration information, described multiple robot device, path list and wafer list generate the step of the schedule sequences described multiple robot device being carried out to scheduling in order, comprise further: the corresponding relation setting up described action and state according to action and the state relation of corresponding robot device of each robot device; And generate described schedule sequences according to described action and the corresponding relation of state, described path list and described wafer list.
In one embodiment of the invention, described configuration information comprises the type of described multiple robot device, capacity, position and processing time.
In one embodiment of the invention, when the action corresponding to described pending personage is multiple, the action selecting working time the shortest from described multiple action.
For achieving the above object, embodiments of the invention propose the dispatching system of multiple robot devices of a kind of film trasport cooperation on the other hand, comprising: receiver module, for receiving the waiting task of described multiple robot device; Configuration module, for being configured described multiple robot device, and generates configuration information; Generation module, generates the schedule sequences described multiple robot device being carried out to scheduling in order for the topological structure according to described configuration information, the multiple robot devices be pre-stored in described generation module, path list and wafer list; And scheduler module, for carrying out scheduling controlling according to the waiting task of described schedule sequences and described multiple robot device to described multiple robot device, make described multiple robot device work in coordination with described waiting task.
According to the system of the embodiment of the present invention, achieve the flexible configuration to film trasport cooperation robot device feature, production path and required processing wafer information, improve the work efficiency of robot device simultaneously.
In one embodiment of the invention, described generation module specifically comprises: associative cell, for setting up the corresponding relation of described action and state according to the action of each robot device and the state relation of corresponding robot device; And generation unit, generate described schedule sequences for the corresponding relation according to described action and state, described path list and described wafer list.
In one embodiment of the invention, described configuration information comprises the type of described multiple robot device, capacity, position and processing time.
In one embodiment of the invention, described scheduler module also for when the action corresponding to described pending operation is multiple, the action selecting working time the shortest from described multiple action.
The aspect that the present invention adds and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
The present invention above-mentioned and/or additional aspect and advantage will become obvious and easy understand from the following description of the accompanying drawings of embodiments, wherein:
Fig. 1 is the process flow diagram of the dispatching method of multiple robot devices of film trasport cooperation according to an embodiment of the invention;
Fig. 2 is the structured flowchart of the dispatching system of multiple robot devices of film trasport cooperation according to an embodiment of the invention;
Fig. 3 is Equipments Setting interface according to an embodiment of the invention;
Fig. 4 is Wafer configuration interface according to an embodiment of the invention;
Fig. 5 is that scheduling calculates interface according to an embodiment of the invention;
Fig. 6 is algorithm simulating test interface according to an embodiment of the invention; And
Fig. 7 is the process flow diagram of layoutprocedure according to an embodiment of the invention.
Embodiment
Be described below in detail embodiments of the invention, the example of embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition above-mentioned term concrete meaning in the present invention can be understood.
Fig. 1 is the process flow diagram of the dispatching method of multiple robot devices of film trasport cooperation according to an embodiment of the invention.As shown in Figure 1, the dispatching method of the multiple robot devices cooperated according to the film trasport of the embodiment of the present invention comprises the following steps:
Step S101, receives the waiting task of multiple robot device.
Step S102, is configured multiple robot device, and generates configuration information.Configuration information comprises the type of multiple robot device, capacity, position and processing time.
Step S103, generates the schedule sequences multiple robot device being carried out to scheduling in order according to the topological structure of configuration information, multiple robot device, path list and wafer list.
Particularly, the corresponding relation of action and state is set up according to the action of each robot device and the state relation of corresponding robot device.Schedule sequences is generated afterwards according to the corresponding relation of action and state, path list and wafer list.
Step S104, the waiting task according to schedule sequences and multiple robot device carries out scheduling controlling to multiple robot device, makes multiple robot device work in coordination with waiting task.
In one embodiment of the invention, when the action corresponding to pending personage is multiple, the action selecting working time the shortest from multiple action.
According to the method for the embodiment of the present invention, achieve the flexible configuration to film trasport cooperation robot device feature, production path and required processing wafer information, improve the work efficiency of robot device simultaneously.
Fig. 2 is the structured flowchart of the dispatching system of multiple robot devices of film trasport cooperation according to an embodiment of the invention.As shown in Figure 2, the dispatching system of the multiple robot devices cooperated according to the film trasport of the embodiment of the present invention comprises receiver module 100, configuration module 200, generation module 300 and scheduler module 400.
Receiver module 100 is for receiving the waiting task of multiple robot device.
Configuration module 200 for being configured multiple robot device, and generates configuration information.Configuration information comprises the type of multiple robot device, capacity, position and processing time.
Generation module 300 generates the schedule sequences multiple robot device being carried out to scheduling in order for the topological structure according to configuration information, the multiple robot devices be pre-stored in generation module, path list and wafer list.
In one embodiment of the invention, generation module 300 specifically comprises: associative cell 310 and generation unit 320.
Associative cell 310 is for setting up the corresponding relation of action and state according to the action of each robot device and the state relation of corresponding robot device.
Generation unit 320 generates schedule sequences for the corresponding relation according to action and state, path list and wafer list.
Scheduler module 400, for carrying out scheduling controlling according to the waiting task of schedule sequences and multiple robot device to multiple robot device, makes multiple robot device work in coordination with waiting task.
In one embodiment of the invention, when scheduler module 400 is also for being multiple when the action corresponding to pending operation, the action selecting working time the shortest from multiple action.
According to the system of the embodiment of the present invention, achieve the flexible configuration to film trasport cooperation robot device feature, production path and required processing wafer information, improve the work efficiency of robot device simultaneously.
Illustrate below and to be described in detail to this method, be understandable that, following explanation only for illustrative purposes, is not limited thereto according to embodiments of the invention.
Equipments Setting interface, Wafer configuration interface and scheduling are mainly comprised to configuration interface of the present invention and calculates interface and algorithm simulating test interface.
Fig. 3 is Equipments Setting interface according to an embodiment of the invention.As shown in Figure 3, Equipments Setting interface is divided into upper and lower two parts, and upper part is mainly used in PM, the configuration of the facility informations such as LoadLock, LoadPort and Buffer, and configuration information comprises type, capacity, position, pre-service and finishing time etc.Lower part is used for the configuration of robot information, and configuration information comprises type (single armed or both arms), coordinate position and the adjacent arm angles of mechanical hand etc.As shown in Figure 3, Equipments Setting interface comprises configured title (Name), type (Type) etc., and can newly-built (New), upgrade (update) and delete (delete) process, do not illustrating at this.
Fig. 4 is wafer (Wafer) configuration interface according to an embodiment of the invention.As shown in Figure 4, Wafer configuration comprises the configuration of the configuration of Wafer number and wafer (Wafer) and path (Route) corresponding relation.Wafer and Route corresponding relation is configured with two kinds of collocation methods, and one is batch configuration, and another kind configures one by one.As shown in Figure 4, Wafer configuration interface comprises, Basiclnfor, passage stepping (routestep), accessing step (stepvisit) etc., and can increase the process such as (Add), renewal to it.
Fig. 5 is that scheduling calculates interface according to an embodiment of the invention.As shown in Figure 5, scheduling calculates display scheduling result of calculation on the left of interface, and right side is the function button starting to dispatch (StartScheduler) and stop scheduling (StopScheduler) to calculate.
Fig. 6 is algorithm simulating test interface according to an embodiment of the invention.As shown in Figure 6, emulation testing interface comprises the optimum configurations of configuration (station) and wafer (wafer), and the transmission of dispatching algorithm emulation testing interface Dynamic Announce and process, calculate transmission and execution time (excutetime).For user provides the interface truly can shown.
In one embodiment of the invention, ConfigInterface is that the module encapsulated on ConfigManager basis unifies external interface, and ConfigManager mainly realizes configuration file editor, checking configuration file, reads configuration file and developing algorithm topological structure four kinds of functions.
Fig. 7 is the process flow diagram of layoutprocedure according to an embodiment of the invention.As shown in Figure 7, configuration device information, and the rationality verifying this facility information.After configuration rationally, according to facility information configuration Route path, and soundness verification is carried out in this Route path.After configuration is rationally, configuration Wafer-Route relation table, and read configuration file, to build topological structure.
Film trasport cooperates the device characteristics of multiple robot, and the complicacy determining its exception and the difficulty solved, do not exist the algorithm of polynomial computation time.Therefore heuristic search is a selection preferably, can ensure to obtain in the short period of time comparatively satisfied scheduling solution.According to problem character, have employed a kind of heuristic search of the chained list that performs an action based on robot.
For concrete cooperation multiple robots scheduler task, an action sequence table can be distributed, wherein, by the action that this robot of prioritizing is pending for each robot, and be that each equipment distributes a status indication, show the duty residing for current device.System is when operation dispatching, analyze the first element be in each robot motion sequence table current one by one, if constraint condition meets, this action is then current performing an action, if there be multiple performing an action, then chooses most suitable action executing according to dispatching rules, then this action is deleted from corresponding actions sequence table after action executing completes, and change relevant device status indication, by which, the scheduling solution space of this system very clearly can be portrayed.Our specifically equipment state, action and association of the two below, and explain how to carry out scheduling Searching Resolution Space according to these key elements.
Film trasport multiple robot system that cooperates comprises equipment PM, LoadPort, Robot(and comprises single armed and both arms), Buffer and LoadLock.The characteristic of these equipment is summarized as follows:
Equipment PM: this equipment has certain capacity, capacity is discontented also can carry out Process.The cyclic process of work is as follows: first slice, thin piece arrives → the second slice, thin piece arrival →...→ kth slice, thin piece arrival → Process → take away slice, thin piece → take away second slice, thin piece → take kth slice, thin piece → aftertreatment → pre-service away.
Equipment LoadPort: have certain capacity, the course of work is as follows: got sheet → got sheet → got sheet →...→ by film releasing → by film releasing → got sheet → by film releasing →....
Equipment Robot (comprising single armed and both arms): have 1 to 2 arm, only have the Robot of an arm to only have FullMove action, the Robot for two arms has Pick, Place, FullMove tri-kinds of actions.Arm can be regarded as a capacity of Robot, be 1 to 2.All equipment, except LoadLock, only associates with a Robot.
Equipment B uffer: there is certain capacity, the course of work and LoadPort similar.
Equipment LoadLock: there is certain capacity, the course of work and LoadPort similar.
By the above analysis to device characteristics, the equipment state that we can be defined as follows, for state space search afterwards sets up basis.
Equipment PM and LoadLock: two state variable CanPick and CanPlace, all have TRUE and FALSE two kinds of values.Environmental characteristic air or vacuum.If CanPick TRUE represents that mechanical arm can get sheet from equipment, otherwise cannot get sheet.If CanPlace TRUE represents that mechanical arm can to film releasing in equipment, otherwise cannot film releasing.
Equipment LoadPort, Buffer, and Robot: whether state reaches maximal value to mark with capacity.Environmental characteristic is air or vacuum.
The state variable value of all devices, constitutes the equipment state list of system, when system arrangement action is dispatched, needs the state of equipment residing in status list checking that this action relates to, thus determines whether this action can perform.The state upgrading involved equipment is also needed after executing.So can find out state table along with scheduling carrying out be constantly update.
Multiple robot device mainly contains following several typical action: Pick, Place, FullMove, and Process.Wherein, FullMove is only for single arm robot, and it is Pick and Place two composition.The constraint condition that the execution demand fulfillment of these actions is certain, in this solution, this constraint condition is represented in current state by involved equipment.Because FullMove comprises Pick and Place two processes, execution constraint condition and the equipment state translation example of FullMove and Process two actions is given in table 1, wherein, the state after action executing is realized by the state of relevant device in Reset Status table.
Table 1
In one embodiment of the invention, by the step performed required for each wafer process, maintenance is a single-track link table, and each chained list node represents to perform an action, and the priority of node represents the priority restriction relation of action executing.Each action executing, scans the head node of all chained lists, and the action of correct node representative, checks state table, judge whether this action can perform.Work as the end of scan, if only have an action to meet executable condition, then this action performs immediately, complete rear renewal state table.If there is multiple action to perform, then according to the mode of most short operation time priority, action is chosen.After action is chosen and complete time, this action deleted from corresponding chained list, circulation performs above step, until all chained lists be sky, scheduling completes.Heuristic rule can carry out reasonable definition according to priori, and we simply have employed in systems in which " rule of robotic transfer's shortest time ", and when namely having multiple robot motion available, minimum that action of prioritizing selection execution time performs.
Said process is stated by following steps.Concrete steps are as follows:
1, according to problem data, original state chained list is set up.
2, pending action schedule is set up.
3, the head node of scanning mode chained list one by one, that detects action representated by node can executive condition, if can perform, adds pending action schedule.
4, according to heuristic rule, from pending action schedule, an action executing is chosen.
5, the state of equipment involved by complete rear renewal.
6, this action is deleted from corresponding chained list.
7, whether all chained list nodal point number sums are 0, if algorithm terminates, otherwise, go to step 2.
In one embodiment of the invention, device configuration information and wafer path configuration information is mainly comprised.Initialized facility information is as shown in table 2:
1, according to problem data, original state chained list is set up.
2, pending action schedule is set up.
3, the head node of scanning mode chained list one by one, that detects action representated by node can executive condition, if can perform, adds pending action schedule.
4, according to heuristic rule, from pending action schedule, an action executing is chosen.
5, the state of equipment involved by complete rear renewal.
6, this action is deleted from corresponding chained list.
7, whether all chained list nodal point number sums are 0, if algorithm terminates, otherwise, go to step 2.
Table 2
Wafer path configurations needs to be configured on the device structure configured.Wafer path configurations file is under present-day system devices configuration, and configure the machining path of a collection of wafer original state and the selection of each wafer, different Wafer can be identical path, and also can be different paths, wafer path configurations file be as shown in table 3:
Table 3
In one embodiment of the invention, four kinds of command forms are always had in film trasport cooperation robot device: Pick, Place, FullMove and Process.Provide the specifying information that various order comprises below, Statiaon makes a general reference PM, Buffer, LoadPort or LoadLock tetra-kinds of equipment.The action sequence that dispatching algorithm calculates is the command sequence that four kinds of orders are below formed.
A, Pick order example comprises information:
No. ID of the Robot performed an action, No. ID of the Robot arm performed an action, relates to No. ID of wafer, No. ID of source Station, residing in the Station of source No. Slot of wafer.
B, Place order example:
No. ID of the Robot performed an action, No. ID of the Robot arm performed an action, relates to No. ID of wafer, No. ID of object Station, wafer No. ID of residing Slot in object Station.
C, FullMove order example:
No. ID of the Robot performed an action, No. ID of the Robot arm performed an action, relates to No. ID of wafer, No. ID of source Station, residing in the Station of source No. Slot of wafer, No. ID of object Station, wafer No. ID of residing Slot in object Station.
D, Process order example:
No. ID of the Station related to, No. ID of the wafer related to, No. D, the formula I of execution.
A possible schedule sequences output example is as follows:
Table 4
In one embodiment of the invention, ScheduleTestInterface package module unifies external interface, realizes, according to schedule sequences processing Wafer list, revising animated image data in the process of implementation, statistics execution time, external clock periodic refreshing image.SimulatorInterface is that image processing module unifies external interface, package image data modification function and drawing function; ImageData class definition image data structure, TransferInterface realizes view data amending method, and SimulateImage draws emulating image according to view data.
Emulation testing performs flow process and mainly comprises following several step:
A, traversal Wafer list.
B, open a thread for each Wafer.
The Step list of C, traversal Route.
D, judge Step executive condition, to judge whether at schedule sequences head of the queue.
E, execution Step.
F, amendment emulating image data.
G, perform next Step ...
Although illustrate and describe embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment within the scope of the invention when not departing from principle of the present invention and aim, revising, replacing and modification.
Claims (6)
1. multiple robot devices' of a film trasport cooperation dispatching method, is characterized in that, comprise the following steps:
Receive the waiting task of described multiple robot device;
Described multiple robot device is configured, and generates configuration information;
The schedule sequences described multiple robot device being carried out to scheduling is in order generated according to the topological structure of described configuration information, described multiple robot device, path list and wafer list; And
Waiting task according to described schedule sequences and described multiple robot device carries out scheduling controlling to described multiple robot device, makes described multiple robot device work in coordination with described waiting task,
Wherein, the described topological structure according to described configuration information, described multiple robot device, path list and wafer list generate the step of the schedule sequences described multiple robot device being carried out to scheduling in order, comprise further:
The corresponding relation of described action and state is set up according to the action of each robot device and the state relation of corresponding robot device; And
Described schedule sequences is generated according to described action and the corresponding relation of state, described path list and described wafer list.
2. the dispatching method of multiple robot devices of film trasport cooperation as claimed in claim 1, is characterized in that, described configuration information comprises the type of described multiple robot device, capacity, position and processing time.
3. the dispatching method of multiple robot devices of film trasport cooperation as claimed in claim 1, is characterized in that, when described multiple robot device waiting task corresponding to action be multiple time, the action selecting working time the shortest from described multiple action.
4. multiple robot devices' of a film trasport cooperation dispatching system, is characterized in that, comprising:
Receiver module, for receiving the waiting task of described multiple robot device;
Configuration module, for being configured described multiple robot device, and generates configuration information;
Generation module, generates the schedule sequences described multiple robot device being carried out to scheduling in order for the topological structure according to described configuration information, the multiple robot devices be pre-stored in described generation module, path list and wafer list; And
Scheduler module, for carrying out scheduling controlling according to the waiting task of described schedule sequences and described multiple robot device to described multiple robot device, makes described multiple robot device work in coordination with described waiting task,
Wherein said generation module specifically comprises:
Associative cell, for setting up the corresponding relation of described action and state according to the action of each robot device and the state relation of corresponding robot device; And
Generation unit, generates described schedule sequences for the corresponding relation according to described action and state, described path list and described wafer list.
5. the dispatching system of multiple robot devices of film trasport cooperation as claimed in claim 4, is characterized in that, described configuration information comprises the type of described multiple robot device, capacity, position and processing time.
6. the dispatching system of multiple robot devices of film trasport cooperation as claimed in claim 4, it is characterized in that, when described scheduler module is also multiple for the action corresponding to the waiting task as described multiple robot device, the action selecting working time the shortest from described multiple action.
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