CN103398203A - Miniature hydrodynamic piezoelectric switch valve - Google Patents
Miniature hydrodynamic piezoelectric switch valve Download PDFInfo
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- CN103398203A CN103398203A CN2013103582739A CN201310358273A CN103398203A CN 103398203 A CN103398203 A CN 103398203A CN 2013103582739 A CN2013103582739 A CN 2013103582739A CN 201310358273 A CN201310358273 A CN 201310358273A CN 103398203 A CN103398203 A CN 103398203A
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Abstract
The invention relates to a miniature hydrodynamic piezoelectric switch valve which comprises a piezoelectric oscillator, a liquid storage cavity, a driving hole, a flexible valve plug, a valve opening, an inlet, an outlet, a flow passage and driving liquid, wherein the piezoelectric oscillator is arranged at the upper part or the lower part of the liquid storage cavity; the driving hole connected with the liquid storage cavity is formed in the upper part, the lower part or the cavity wall of the liquid storage cavity; the flexible valve plug is arranged on the driving hole and matched with the valve opening; the piezoelectric oscillator, the liquid storage cavity and the flexible valve plug together form a sealed space filled with the driving liquid. The switch valve provided by the invention controls the opening and closing of a valve indirectly by virtue of hydraulic power, can fully utilize the overall deformation of a piezoelectric chip, and has the advantages of high response speed, good cut-off property, high cut-off pressure, low leakage rate and easiness in processing and manufacturing. The piezoelectric driving part and the fluid control part of the switch valve can be separated through a liquid guide tube, and the mounting form is flexible.
Description
Technical field
The present invention relates to a kind of switch valve, particularly a kind of miniature fluid power Piezoelectric switches valve.
Background technique
At present, miniature valve is the critical component in microfluidic control system, by having or not of driving source, can be divided into passive valve and aggressive valve.Passive valve belongs to one-way valve, can only one-way conduction, and be not suitable for and need to two-way circulate and the occasion of ending.Aggressive valve is due to switching that can the ACTIVE CONTROL valve, but and two-way stop, thereby have unique advantage.The kind of miniature aggressive valve is a lot, by the difference of driving mode, can be divided into piezo electric valve, thermodynamic valve, static valve, solenoid valve, memory alloy valve etc.Piezo electric valve all disclosed in numerous design proposals, CN 101755157A for example, CN 1391639A, CN 1354335A, CN 101573548A.Utilize piezoelectric chip directly to control the switching of valve opening, can make the structure of piezo electric valve compacter, be easy to realize microminiaturized, but because the piezoelectric chip distortion is small, only utilized again in the course of the work the local deformation of piezoelectric chip, therefore planeness and the assembly precision of piezoelectric chip are had relatively high expectations, increased manufacture cost.In order to obtain larger distortion, usually adopt piezoelectric stack and be aided with displacement amplifying mechanism and construct piezo electric valve, but thickness is difficult for reduction, be unfavorable for realizing microminiaturized.Also have the scholar to propose the piezo electric valve of fluid power membrane type displacement amplifying mechanism, can be by the volume compression of displacement amplifying mechanism to minimum, but due to its surface tension of the planar film that adopts and spring-back force larger, cause the cut-off of this valve and through-current capability undesirable.
Summary of the invention
The invention provides a kind of miniature fluid power Piezoelectric switches valve, purpose is under the prerequisite that guarantees the piezo electric valve volume microminiaturization, reduce existing miniature piezoelectric valve to the planeness of piezoelectric chip and the requirement of assembly precision, and bring into play to greatest extent the driving force of piezoelectric chip, promote cut-off and the through-current capability of miniature piezoelectric valve, make the commercialization of miniature piezoelectric valve and production in enormous quantities become possibility.
Miniature fluid power Piezoelectric switches valve of the present invention is stifled by piezoelectric vibrator, liquid storage cylinder, drive hole, flexible valve, valve seat, valve opening, entrance, outlet, runner and driving liquid form.Wherein piezoelectric vibrator is located at top or the bottom of liquid storage cylinder, on the top of liquid storage cylinder or bottom or chamber wall, offer the drive hole that is connected with liquid storage cylinder, stifled being located on drive hole and with valve opening of flexible valve matched, the stifled common space that forms a sealing of piezoelectric vibrator, liquid storage cylinder and flexible valve, inside is full of driving liquid, the liquid storage cylinder bottom is fixedly connected with valve seat and sealing fully, makes entrance, outlet, valve opening and runner can form continuous flow channels.
Piezoelectric vibrator is provided with one or several, by concentric bonding the forming of piezoelectric chip and metal substrate.
Liquid storage cylinder is provided with one or several, and while being provided with several liquid storage cylinder, several liquid storage cylinder stacks arrange, and the inner chamber of each liquid storage cylinder connects.
Valve opening can connect a catheter, the stifled outlet port that is located at catheter of flexible valve, the intracavity inter-connection of catheter and liquid storage cylinder, flexible valve block up and catheter between seal.
Flexible valve is stifled is semi-sphere type or bellows-like structure, and material is elastic material.
Working principle of the present invention:
Refer to Fig. 1, Fig. 2 and shown in Figure 3:
Fig. 1 is that flexible valve gets lodged in liquid flow path nature closed condition schematic diagram;
Fig. 2 is that flexible valve gets lodged in liquid flow path enforced opening view;
Fig. 3 is that flexible valve gets lodged in liquid flow path positive closing view;
Therefore in liquid storage cylinder, be full of driving liquid, during encapsulation, guaranteeing in liquid storage cylinder has certain initial pressure, does without applied voltage that the used time flexible valve is stifled is in expansion state, and the bulbous protrusions of its end is close to valve opening, and formed excellent sealing has guaranteed the normally closed characteristic of valve.piezoelectric vibrator produces distortion when the polarised direction of applied voltage and piezoelectric chip is consistent, driving liquid in liquid storage cylinder is stretched, force the stifled contraction of flexible valve, the effect that piezoelectric chip will all be out of shape by driving liquid this moment all is reflected in flexible valve and blocks, if the area of piezoelectric vibrator is n with the ratio of the sectional area that flexible valve is blocked up, due to the incompressibility that drives liquid, the shrinkage amplitude of flexible valve stifled this moment be approximately the average displacement that piezoelectric vibrator produces n doubly, therefore flexible valve is stifled, will significantly leave the valve opening that coordinates with it, make entrance, outlet, valve opening and runner are communicated with fully, valve is in opening state.When the polarised direction of applied voltage and piezoelectric chip is opposite, drive liquid and be further compressed, the stifled trend of significantly expanding that produces of flexible valve this moment will make the sealing of itself and valve opening further strengthen, and can make valve remain off under higher pressure reduction.
Beneficial effect of the present invention:
Utilize the switching of fluid power indirectly control valve, accuracy of manufacturing is less demanding, and is simple and practical, can produce in enormous quantities, and cost of production is lower; Flexible valve is blocked up and the valve opening good sealing effect, and the cut-off that flexible valve is blocked up is good, cutoff pressure is high, leak-down rate is low; Can utilize catheter that the Piezoelectric Driving part is separated with the fluid control section, installation form is flexible; Can utilize hydraudynamic drive without the advantage that lags behind, give full play to the characteristics of piezoelectric chip fast response time; Can take full advantage of the bulk deformation of piezoelectric chip.
The accompanying drawing explanation
Fig. 1 is that flexible valve gets lodged in liquid flow path nature closed condition schematic diagram.
Fig. 2 is that flexible valve gets lodged in liquid flow path enforced opening view.
Fig. 3 is that flexible valve gets lodged in liquid flow path positive closing view.
Fig. 4 is embodiment's one schematic diagram.
Fig. 5 is embodiment's two schematic diagram.
Fig. 6 is embodiment's three schematic diagram.
Fig. 7 is embodiment's four schematic diagram.
Fig. 8 is embodiment's five schematic diagram.
Fig. 9 is embodiment's six schematic diagram.
1, piezoelectric vibrator 2, liquid storage cylinder 3, drive that liquid 4, drive hole 5, flexible valve are stifled 6, entrance 7, valve opening 8, valve seat 9, runner 10, outlet 11, catheter.
Embodiment
Refer to Fig. 1, Fig. 2 and shown in Figure 3:
Miniature fluid power Piezoelectric switches valve of the present invention by piezoelectric vibrator 1, liquid storage cylinder 2, drive that liquid 3, drive hole 4, flexible valve are stifled 5, entrance 6, valve opening 7, valve seat 8, runner 9, outlet 10 form.Wherein piezoelectric vibrator 1 is located at top or the bottom of liquid storage cylinder 2, on the top of liquid storage cylinder 2 or bottom or chamber wall, offer the drive hole 4 that is connected with liquid storage cylinder 2, flexible valve stifled 5 is located on drive hole 4 and with valve opening 7 and matches, the common space that forms a sealing of piezoelectric vibrator 1, liquid storage cylinder 2 and flexible valve stifled 5, inside is full of and drives liquid 3, liquid storage cylinder 2 bottoms are fixedly connected with valve seat 8 and sealing fully, make entrance 6, outlet 10, valve opening and runner 9 form continuable flow channels.
This,, in order to discuss conveniently, is divided into two-part by the present invention: Piezoelectric Driving part and valve body part.Valve body is divided and is comprised: valve opening 7, valve seat 8, entrance 6, runner 9 and export 10.Piezoelectric Driving partly comprises: piezoelectric vibrator 1, liquid storage cylinder 2, driving liquid 3, drive hole 4 and flexible valve stifled 5.The valve body part mainly provides flexible valve stifled switch passage, and structural type can be adjusted as required, the sealing when its key point is valve opening and the stifled cooperation of flexible valve.The key of Piezoelectric Driving part is the structural type of flexible valve stifled 5 and the arrangement of piezoelectric vibrator 1.
The specific embodiment of miniature fluid power Piezoelectric switches valve Piezoelectric Driving part is as described below:
Embodiment one, refer to shown in Figure 4:
A kind of Piezoelectric Driving of miniature fluid power Piezoelectric switches valve partly is comprised of piezoelectric vibrator 1, liquid storage cylinder 2, driving liquid 3, drive hole 4 and flexible valve stifled 5, wherein piezoelectric vibrator 1 is located at the top of liquid storage cylinder 2, on the chamber wall on liquid storage cylinder 2 right sides, offer the drive hole 4 with liquid storage cylinder 2 intracavity inter-connections, flexible valve stifled 5 is located on drive hole 4, the common space that forms a sealing of piezoelectric vibrator 1, liquid storage cylinder 2 and flexible valve stifled 5, inside is full of and drives liquid 3, and flexible valve stifled 5 is bellows-like structure.
Embodiment two, refer to shown in Figure 5:
A kind of Piezoelectric Driving of miniature fluid power Piezoelectric switches valve partly is comprised of piezoelectric vibrator 1, liquid storage cylinder 2, driving liquid 3, drive hole 4 and flexible valve stifled 5, wherein piezoelectric vibrator 1 is provided with two, be located at respectively the upper and lower of liquid storage cylinder 2, on the chamber wall on liquid storage cylinder 2 right sides, offer the drive hole 4 with liquid storage cylinder 2 intracavity inter-connections, flexible valve stifled 5 is located on drive hole 4, the common space that forms a sealing of piezoelectric vibrator 1, liquid storage cylinder 2 and flexible valve stifled 5, inside is full of and drives liquid 3, and flexible valve stifled 5 is bellows-like structure.
Embodiment three, refer to shown in Figure 6:
a kind of Piezoelectric Driving of miniature fluid power Piezoelectric switches valve is partly by piezoelectric vibrator 1, liquid storage cylinder 2, drive liquid 3, drive hole 4 and flexible valve stifled 5 forms, liquid storage cylinder 2 is provided with two, stack arranges up and down, the inner chamber of two liquid storage cylinders 2 connects, piezoelectric vibrator 1 is provided with two, the top of one of them liquid storage cylinder 2 located in the above, another piezoelectric vibrator 1 is located at the bottom of following liquid storage cylinder 2, the bottom of top liquid storage cylinder 2 offers the drive hole 4 with liquid storage cylinder 2 intracavity inter-connections, flexible valve stifled 5 is located on drive hole 4, piezoelectric vibrator 1, the common space that forms a sealing of liquid storage cylinder 2 and flexible valve stifled 5, inside is full of and drives liquid 3, flexible valve stifled 5 is semi-sphere type.
Embodiment four, refer to shown in Figure 7:
a kind of Piezoelectric Driving of miniature fluid power Piezoelectric switches valve is partly by piezoelectric vibrator 1, liquid storage cylinder 2, drive liquid 3, drive hole 4 and flexible valve stifled 5 forms, liquid storage cylinder 2 is provided with three, three liquid storage cylinders 2 are the stack of " T " font and arrange, the inner chamber of three liquid storage cylinders 2 connects, piezoelectric vibrator 1 is provided with three, two piezoelectric vibrators 1 top of two liquid storage cylinders 2 located in the above respectively wherein, all the other piezoelectric vibrators 1 are located at the bottom of following liquid storage cylinder 2, the bottom of the liquid storage cylinder 2 of upper left side of face offers the drive hole 4 with liquid storage cylinder 2 intracavity inter-connections, flexible valve stifled 5 is located on drive hole 4, piezoelectric vibrator 1, the common space that forms a sealing of liquid storage cylinder 2 and flexible valve stifled 5, inside is full of and drives liquid 3, flexible valve stifled 5 is semi-sphere type.
Embodiment five, refer to shown in Figure 8:
a kind of Piezoelectric Driving of miniature fluid power Piezoelectric switches valve is partly by piezoelectric vibrator 1, liquid storage cylinder 2, drive liquid 3, drive hole 4 and flexible valve stifled 5 forms, piezoelectric vibrator 1 is provided with two, be located at respectively the upper and lower of liquid storage cylinder 2, on the chamber wall on liquid storage cylinder 2 right sides, offer the drive hole 4 with liquid storage cylinder 2 intracavity inter-connections, drive hole 4 connects a catheter 11, flexible valve stifled 5 is located at the outlet port of catheter 11, the intracavity inter-connection of catheter 11 and liquid storage cylinder 2, piezoelectric vibrator 1, liquid storage cylinder 2, flexible valve stifled 5 and the common space that forms a sealing of catheter 11, inside is full of and drives liquid 3, flexible valve stifled 5 is bellows-like structure.
Embodiment six, refer to shown in Figure 9:
a kind of Piezoelectric Driving of miniature fluid power Piezoelectric switches valve is partly by piezoelectric vibrator 1, liquid storage cylinder 2, drive liquid 3, drive hole 4 and flexible valve stifled 5 forms, piezoelectric vibrator 1 is located at the top of liquid storage cylinder 2, the bottom of liquid storage cylinder 2 offers the drive hole 4 with liquid storage cylinder 2 intracavity inter-connections, drive hole 4 connects a catheter 11, flexible valve stifled 5 is located at the outlet port of catheter 11, the intracavity inter-connection of catheter 11 and liquid storage cylinder 2, piezoelectric vibrator 1, liquid storage cylinder 2, flexible valve stifled 5 and the common space that forms a sealing of catheter 11, inside is full of and drives liquid 3, flexible valve stifled 5 is semi-sphere type.
Claims (5)
1. miniature fluid power Piezoelectric switches valve, it is characterized in that:, valve opening stifled by piezoelectric vibrator, liquid storage cylinder, drive hole, flexible valve, entrance, outlet, runner and driving liquid form, wherein piezoelectric vibrator is located at top or the bottom of liquid storage cylinder, on the top of liquid storage cylinder or bottom or chamber wall, offer the drive hole that is connected with liquid storage cylinder, stifled being located on drive hole and with valve opening of flexible valve matched, the stifled common space that forms a sealing of piezoelectric vibrator, liquid storage cylinder and flexible valve, inside is full of driving liquid.
2. miniature fluid power Piezoelectric switches valve according to claim 1, it is characterized in that: described piezoelectric vibrator is provided with one or several, by piezoelectric chip and metal substrate is bonding forms.
3. miniature fluid power Piezoelectric switches valve according to claim 1, it is characterized in that: described liquid storage cylinder is provided with one or several, and while being provided with several liquid storage cylinder, several liquid storage cylinders stacks arrange, and the inner chamber of each liquid storage cylinder connects.
4. miniature fluid power Piezoelectric switches valve according to claim 1 is characterized in that: described drive hole connects a catheter, the stifled outlet port that is located at catheter of flexible valve, the intracavity inter-connection of catheter and liquid storage cylinder, flexible valve block up and catheter between seal.
5. miniature fluid power Piezoelectric switches valve according to claim 1 is characterized in that: described flexible valve is stifled is semi-sphere type or bellows-like structure, and material is elastic material.
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| CN2013103582739A CN103398203A (en) | 2013-08-17 | 2013-08-17 | Miniature hydrodynamic piezoelectric switch valve |
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| CN2013103582739A CN103398203A (en) | 2013-08-17 | 2013-08-17 | Miniature hydrodynamic piezoelectric switch valve |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104100542A (en) * | 2014-07-19 | 2014-10-15 | 长春隆美科技发展有限公司 | Piezoelectric driving type micro fan |
| CN104100541A (en) * | 2014-07-18 | 2014-10-15 | 长春隆美科技发展有限公司 | Micro piezoelectric type axial flow fan |
| CN108061024A (en) * | 2016-11-09 | 2018-05-22 | 英业达(重庆)有限公司 | Air flow-producing device and airflow generating method |
| CN108061025A (en) * | 2016-11-09 | 2018-05-22 | 英业达(重庆)有限公司 | Air flow-producing device and airflow generating method |
| CN108096664A (en) * | 2017-12-25 | 2018-06-01 | 浙江师范大学 | A kind of new separable piezoelectricity medical infusion pump |
| CN108223814A (en) * | 2016-12-21 | 2018-06-29 | 无锡源清天木生物科技有限公司 | It is a kind of for the controller for liquid flow of microfluidic control and microfluidic control method |
| CN114294290A (en) * | 2022-01-10 | 2022-04-08 | 江苏大学 | Array piezoelectric stack driving type high-speed switch valve and control method thereof |
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| CN202100824U (en) * | 2011-06-01 | 2012-01-04 | 浙江师范大学 | Piezoelectric drive type micro-flow valve |
| CN102818069A (en) * | 2012-08-28 | 2012-12-12 | 哈尔滨工业大学 | Bellows-type piezoelectrically-hydraulically-actuated microfluidic servo valve and actuating device thereof |
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Patent Citations (6)
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| US6062532A (en) * | 1997-05-14 | 2000-05-16 | Fev Motorentechnik Gmbh & Co. Kg | Electric solid-body actuator having a hydraulic amplitude magnifier |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104100541A (en) * | 2014-07-18 | 2014-10-15 | 长春隆美科技发展有限公司 | Micro piezoelectric type axial flow fan |
| CN104100542A (en) * | 2014-07-19 | 2014-10-15 | 长春隆美科技发展有限公司 | Piezoelectric driving type micro fan |
| CN104100542B (en) * | 2014-07-19 | 2019-10-22 | 长春隆美科技发展有限公司 | Piezoelectric driving type micro fan |
| CN108061024A (en) * | 2016-11-09 | 2018-05-22 | 英业达(重庆)有限公司 | Air flow-producing device and airflow generating method |
| CN108061025A (en) * | 2016-11-09 | 2018-05-22 | 英业达(重庆)有限公司 | Air flow-producing device and airflow generating method |
| CN108223814A (en) * | 2016-12-21 | 2018-06-29 | 无锡源清天木生物科技有限公司 | It is a kind of for the controller for liquid flow of microfluidic control and microfluidic control method |
| CN108223814B (en) * | 2016-12-21 | 2019-10-15 | 无锡源清天木生物科技有限公司 | A kind of controller for liquid flow and microfluidic control method for microfluidic control |
| CN108096664A (en) * | 2017-12-25 | 2018-06-01 | 浙江师范大学 | A kind of new separable piezoelectricity medical infusion pump |
| CN108096664B (en) * | 2017-12-25 | 2024-01-26 | 浙江师范大学 | Novel separable piezoelectric medical infusion pump |
| CN114294290A (en) * | 2022-01-10 | 2022-04-08 | 江苏大学 | Array piezoelectric stack driving type high-speed switch valve and control method thereof |
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Application publication date: 20131120 |