CN103387405A - Preparation method of silicon carbide and silicon carbide composite material member - Google Patents
Preparation method of silicon carbide and silicon carbide composite material member Download PDFInfo
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- CN103387405A CN103387405A CN201310287547XA CN201310287547A CN103387405A CN 103387405 A CN103387405 A CN 103387405A CN 201310287547X A CN201310287547X A CN 201310287547XA CN 201310287547 A CN201310287547 A CN 201310287547A CN 103387405 A CN103387405 A CN 103387405A
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Abstract
The invention relates to a preparation method of silicon carbide and silicon carbide composite material member, especially relates to a preparation method of deformed silicon carbide and silicon carbide composite material member, and belongs to the technology field of ceramic matrix composite material. The impregnation phase and the precursor used in the preparation method not only comprise the solid PCS, but also comprise the liquid PCS, which is more cheap, so the technology matching property of the member is stronger, the densification efficiency of the member is improved to some degree, the cost is reduced and the preparation period of the member is shortened. The impregnation phase has little harm to the environment and the operators, and only a general type ventilation device is needed.
Description
Technical field
The present invention relates to a kind of preparation method of silicon carbide/carbon SiClx composite element, particularly a kind of preparation method of special-shaped silicon carbide/carbon SiClx composite element, belong to the ceramic matric composite technical field.
Background technology
As everyone knows, Continuous Fiber Reinforced Ceramic Matrix Composites has the characteristics such as high temperature resistant, the high rigidity of stupalith, corrosion-resistant, high abrasion concurrently, and the enhancing of continuous fibre is on good terms and is effectively improved the obdurability of matrix material.For silicon carbide/carbon SiClx matrix material, because its fiber and matrix are silicon carbide, can not have thermal mismatch problem between the two, and its density is low, intensity is high, good rigidity, material itself have resistance to elevated temperatures, particularly excellent intrinsic high-temperature oxidation resistance.Therefore, this material has broad application prospects at high-technology fields such as aerospace, nuclear industry.
The preparation method of silicon carbide/carbon SiClx matrix material mainly comprises following four kinds: chemical vapor infiltration (CVI), slurry heat of immersion platen press (HP), nanometer dipping and instantaneous eutectic phase method (NITE) and polymer infiltration and pyrolysis method (PIP).Wherein all need there be hot pressing process in HP and NITE method in the processing step later stage, for the special-shaped material members that particularly has complicated shape of preparation, have larger process limitation; And the damage for silicon carbide fiber is larger, and the composite materials property aspect can be subject to larger negative impact.Simultaneously, for CVI technique, it can be by the processing parameter adjustment, and in control silicon carbide fiber precast body, the heterogeneous composite material of Formed SiClx or carbon modified SiClx, have certain process advantage.But CVI technique preparation cycle is long, equipment and process control is required very high, for prepare heavy wall (〉=10mm), larger-size special-shaped component difficulty comparatively.The polymer infiltration and pyrolysis method claims again polymer impregnated cracking conversion method, is that development in recent years prepares one of main flow technique of ceramic matric composite rapidly.It can be by designing and control organic precursor molecular structure for the preparation of the ceramic matrix with specific components; The matrix material preparation temperature is lower, particularly for preparing complicated shape heavy wall silicon carbide/carbon SiClx matrix material, has obvious advantage.Certainly, adopt the PIP method also to have the engineering application problem such as length and prices of raw and semifnished materials costliness of preparation cycle.
Summary of the invention
The objective of the invention is in order to propose a kind of preparation method of silicon carbide/carbon SiClx composite element, the method cost is low, the cycle is short, and prepared matrix material has excellent intrinsic antioxidant property.This invention for shortening the composite element preparation cycle, reduce costs all and have important practical significance.
The objective of the invention is to be achieved through the following technical solutions.
The preparation method of a kind of silicon carbide/carbon SiClx composite element of the present invention, step is:
1) preparation of silicon carbide fiber precast body: adopt Two-dimensional Carbon SiClx cloth laying or 3 D weaving technique to prepare the silicon carbide fiber precast body, can realize the preparation of profiling/clean whole size;
2) chemical Vapor deposition process prepares the RESEARCH OF PYROCARBON interfacial layer: use methane, propane, propylene or acetylene gas as the deposition carbon source, diluent gas is argon gas, the silicon carbide fiber precast body that step 1) is obtained is placed in the carbon laydown stove and deposits, at the surface deposition RESEARCH OF PYROCARBON interfacial layer of silicon carbide fiber; Processing parameter is as follows: depositing temperature is 850-1400 ℃, and deposition pressure is 0.1-20KPa, and depositing time is 1-100 hour.Wherein the RESEARCH OF PYROCARBON interfacial layer thickness on silicon carbide fiber surface is 0.05-5 μ m; Before deposition, adopt specific frock to carry out " the dimension shape " of precast body; Described specific frock is for to be complementary with the shape of silicon carbide fiber precast body;
3) the silicon carbide fiber precast body that matrix densification: adopt the PIP method to step 2) obtains carries out densification, obtains silicon carbide/carbon SiClx matrix material.
Above-mentioned steps 3) in, the step of PIP method is: the silicon carbide fiber precast body is carried out pressure impregnation, then be cured, obtain base substrate after curing is completed; Base substrate is carried out Pintsch process to be transformed; The infiltration pyrolysis process that circulates finally above-mentioned.Wherein, impregnation pressure is 0.1-10MPa, and dipping time is 1-10 hour, and dipping temperature is 20-120 ℃; Solidification value is between 160-550 ℃, and be 1-10 hour set time; The outlet temperature of Pintsch process is 900-1600 ℃, and the time is 1-10 hour; The cycle index of infiltration pyrolysis is 5-15 time, finally realizes the matrix densification of matrix material.
Above-mentioned steps 3) dipping that uses during PIP method pressure impregnation in comprises in solid-state Polycarbosilane (PCS), the liquid PCS of liquid PCS(a kind of group or the mixed group more than 2 kinds that contains in silico ethylene base, silene propyl group, silicon propargyl, silicon ethynylene group mutually) or the mixture of solid-state PCS and liquid PCS, can also comprise solvent in flooding mutually, solvent is tetrahydrofuran (THF), toluene, dimethylbenzene, divinylbenzene (DVB) or hexane, and wherein divinylbenzene also has the effect of crosslinking and curing agent simultaneously.Reasonably combined according to solvent and solute, and coordinate the round of dipping, the mass ratio of solvent and PCS is 0-5.
In the component of described dipping phase, can also comprise the functionality ceramic powder, described functionality ceramic powder comprises active filler such as Ti, Zr, Hf, Al, Si or B, or inert filler such as SiC powder, B
4C, TiB
2, TiC, ZrB
2, ZrC, HfB
2, HfC or Al
2O
3Adopt the mode of wet ball grinding blend, the blend of solution mechanical stirring or the blend of ultrasonic wave solution to carry out blend; Wherein the functionality ceramic powder is micro-nano magnitude, and the functionality ceramic powder that adds accounts for the 0.05%-0.5% of PCS and solvent total mass.
Above-mentioned steps 3) in the step of PIP law technology route, can add the roughing operation in the process of circulation infiltration pyrolysis in, also can adopt the mode of clean whole size moulding.In the later stage of densification, if the rate of body weight gain of composites less than 1% the time, densification finishes.
Beneficial effect
Dipping phase used in the present invention, the presoma that adopts except comprising solid-state PCS, also comprises relatively cheap liquid PCS, and process matching is stronger, and efficiency of densification can be improved to some extent, and can reduce the cost simultaneously and shorten the manufacturing cycle of material members.Simultaneously, when using liquid PCS, due to itself be thickness (viscosity in the situation that the heating can be thinning, be applicable to dipping) or viscosity lower than the liquid of 1000 centipoises (under room temperature), can be less with even not using poisonous benzene homologues equal solvent, whole steeping process can be completed in room temperature or lower temperature (lower than 100 ℃), the poisonous and harmful that produces, inflammable and explosive material can decrease, therefore the dipping phase in should invention preferred little to environment and operator's harm, only need the environmental practice such as universal ventilation installation to get final product.
Description of drawings
Fig. 1 is the cross-section morphology stereoscan photograph after the silicon carbide/carbon SiClx matrix material flexural strength test that obtains of the embodiment of the present invention 1;
Fig. 2 is the cross-section morphology stereoscan photograph after the silicon carbide/carbon SiClx matrix material flexural strength test that obtains of the embodiment of the present invention 2;
Fig. 3 is the surface topography stereoscan photograph after the silicon carbide/carbon SiClx matrix material ablation that obtains of the embodiment of the present invention 4;
Fig. 4 is the cross-section morphology stereoscan photograph after the silicon carbide/carbon SiClx matrix material ablation that obtains of the embodiment of the present invention 4.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
A kind of preparation method of silicon carbide/carbon SiClx composite element, step is:
1) preparation of silicon carbide fiber precast body: adopt Two-dimensional Carbon SiClx cloth laying or 3 D weaving technique to prepare the silicon carbide fiber precast body;
2) chemical Vapor deposition process prepares the RESEARCH OF PYROCARBON interfacial layer: use methane, propane, propylene or acetylene gas as the deposition carbon source, diluent gas is argon gas, the silicon carbide fiber precast body that step 1) is obtained is placed in the carbon laydown stove and deposits, at the surface deposition RESEARCH OF PYROCARBON interfacial layer of silicon carbide fiber; Processing parameter is as follows: depositing temperature is 850-1400 ℃, and deposition pressure is 0.1-20KPa, and depositing time is 1-100 hour.Wherein the RESEARCH OF PYROCARBON interfacial layer thickness on silicon carbide fiber surface is 0.05-5 μ m;
3) the silicon carbide fiber precast body that matrix densification: adopt the PIP method to step 2) obtains carries out densification, obtains silicon carbide/carbon SiClx matrix material; The step of PIP method is: the silicon carbide fiber precast body is carried out pressure impregnation, then be cured, obtain base substrate after curing is completed; Base substrate is carried out Pintsch process to be transformed.
Step 2) in, before deposition, the frock that the shape of employing and silicon carbide fiber precast body is complementary is carried out keeping of shape to precast body.
Circulation step 3) the infiltration pyrolysis process in, less than 1% the time, densification finishes when the matrix material rate of body weight gain.
In step 3), impregnation pressure is 0.1-10MPa, and dipping time is 1-10 hour, and dipping temperature is 20-120 ℃; Solidification value is between 160-550 ℃, and be 1-10 hour set time; The outlet temperature of Pintsch process is 900-1600 ℃, and the time is 1-10 hour.
The dipping that uses during PIP method pressure impregnation in step 3) is Polycarbosilane mutually; Polycarbosilane is the mixture of solid-state Polycarbosilane, liquid Polycarbosilane or solid-state Polycarbosilane and liquid Polycarbosilane.
Contain a kind of group or the mixed group more than 2 kinds in silico ethylene base, silene propyl group, silicon propargyl, silicon ethynylene group in described liquid Polycarbosilane.
Described dipping also comprises solvent in mutually, and solvent is a kind of in tetrahydrofuran (THF), toluene, dimethylbenzene, divinylbenzene or hexane, and the solvent that adds and the mass ratio of Polycarbosilane are a, 0＜a≤5.
Described dipping also comprises the functionality ceramic powder mutually, and described functionality ceramic powder comprises active filler Ti, Zr, Hf, Al, Si or B, or inert filler SiC powder, B
4C, TiB
2, TiC, ZrB
2, ZrC, HfB
2, HfC or Al
2O
3The functionality ceramic powder that adds accounts for the 0.05%-0.5% of Polycarbosilane and solvent total mass
Adopt the mode of wet ball grinding blend, the blend of solution mechanical stirring or the blend of ultrasonic wave solution to carry out blend to functionality ceramic powder, Polycarbosilane and solvent.
The functionality ceramic powder is micro-nano magnitude.
Embodiment 1
A kind of preparation method of silicon carbide/carbon SiClx composite element comprises following step:
1) take continuous carbofrax fibre as raw material, at first be made into plain, then adopt sewing process to make the arc precast body under graphite frock auxiliary;
2) take methane as carbon-source gas, the precast body that step 1) is obtained is placed in cvd furnace and carries out chemical vapour deposition, at the silicon carbide fiber surface deposition RESEARCH OF PYROCARBON interfacial layer of precast body.The processing condition of chemical vapour deposition are: depositing temperature is 900 ℃, and deposition pressure is 0.15KPa, and depositing time is 40 hours.Wherein the interfacial layer thickness of RESEARCH OF PYROCARBON is 0.17 μ m;
3) adopt the mode of vacuum aided, after the dipping for preparing is preheated to 60 ℃ mutually, be incorporated in the silicon carbide fiber precast body that has deposited the RESEARCH OF PYROCARBON interfacial layer, final impregnation pressure is 3MPa.Wherein, the mass ratio that dipping contains the liquid PCS of vinyl and DVB in mutually is 1:0.2, and the liquid PCS solution of the vinyl that will prepare and silicon carbide powder be with weight ratio 1:0.5 blend, and the median size of silicon carbide powder is 0.5 μ m; Ball milling forms final dipping phase after 4 hours;
4) flood the N that is solidificated in of phase
2Carry out in atmosphere, solidifying holding temperature is 200 ℃ and 400 ℃, and soaking time is respectively 3h and 5h; Pintsch process carries out in Ar atmosphere, burning temperature eventually is 1000 ℃, and soaking time is 10 hours;
5) adopt the mode of circulation infiltration pyrolysis to carry out densification in the sample of above-mentioned processing, cycle index is 10 times, and the sample rate of body weight gain, less than 0.1%, has namely been realized the densification of material, obtain final arc silicon carbide/carbon SiClx composite element, its density is 2.3g/cm
3, be 402MPa with the flexural strength of stove flat board, modulus in flexure is 95Gpa.As shown in Figure 1, matrix material presents comparatively significantly fiber to be extracted cross-section morphology after the test of its flexural strength, illustrate that continuous fibre brought reinforced effects into play, shows comparatively obvious ductile rupture characteristic.
Embodiment 2
A kind of preparation method of silicon carbide/carbon SiClx composite element comprises following step:
1) take continuous carbofrax fibre as raw material, at first be made into five heddle satin cloth, then adopt the mode of two-dimentional laying to form T shape precast body in the graphite frock;
2), take propane as carbon-source gas, precast body is placed in cvd furnace and carries out chemical vapour deposition, at the silicon carbide fiber surface deposition RESEARCH OF PYROCARBON interfacial layer of precast body.The processing condition of chemical vapour deposition are: depositing temperature is 1200 ℃, and deposition pressure is 1.0KPa, and depositing time is 20 hours.Wherein the interfacial layer thickness of RESEARCH OF PYROCARBON is 0.15 μ m left and right;
3) adopt the mode of vacuum aided, the dipping for preparing is incorporated into mutually in the silicon carbide precast body that has deposited the RESEARCH OF PYROCARBON interfacial layer, final impregnation pressure is 2MPa.Wherein, the mass ratio that dipping contains the liquid PCS of propargyl and solid-state PCS in mutually is 1:0.8, and the solution that will prepare and silicon carbide powder be with weight ratio 1:0.2 blend, and ball milling forms final dipping phase after 10 hours;
4) flood the N that is solidificated in of phase
2Carry out in atmosphere, solidifying holding temperature is 150 ℃ and 350 ℃, and soaking time is respectively 2h and 5 hours; Pintsch process carries out in Ar atmosphere, burning temperature eventually is 1200 ℃, and soaking time is 2 hours;
5) adopt the mode of circulation infiltration pyrolysis to carry out densification (wherein flooding phase composite slightly adjusts) in the sample of above-mentioned processing, cycle index is 8 times, and the sample rate of body weight gain, less than 0.1%, has namely been realized the densification of material.
6) by precision work, obtained final silicon carbide/carbon SiClx composite element, its density is 2.25g/cm
3, be 370MPa with the flexural strength of stove flat board, modulus in flexure is 82GPa, cross-section morphology after its flexural strength test as shown in Figure 2, matrix material presents comparatively significantly fiber to be extracted, and illustrate that continuous fibre brought reinforced effects into play, shows comparatively obvious ductile rupture characteristic.
Embodiment 3
A kind of preparation method of silicon carbide/carbon SiClx composite element comprises following step:
1), take continuous carbofrax fibre as raw material, adopt three-dimensional four-way craft woven to become thrust chamber precast body (band graphite inner core);
2), take acetylene as carbon-source gas, precast body is placed in cvd furnace and carries out chemical vapour deposition, at the silicon carbide fiber surface deposition RESEARCH OF PYROCARBON interfacial layer of precast body.The processing condition of chemical vapour deposition are: depositing temperature is 1000 ℃, and deposition pressure is 4.0KPa, and depositing time is 30 hours.Wherein the interfacial layer thickness of RESEARCH OF PYROCARBON is 0.23 μ m left and right;
3) adopt the mode of vacuum aided, the dipping for preparing is incorporated into mutually in the silicon carbide precast body that has deposited the RESEARCH OF PYROCARBON interfacial layer, final impregnation pressure is 1MPa.Wherein, dipping contains the liquid PCS of propargyl and silicon carbide, Zr powder in mutually with weight ratio 1:0.1:0.1 blend, and ball milling forms final dipping phase after 10 hours;
4) flood the N that is solidificated in of phase
2Carry out in atmosphere, solidifying holding temperature is 180 ℃ and 420 ℃, and soaking time is respectively 1h and 2 hours; Pintsch process carries out in Ar atmosphere, burning temperature eventually is 1300 ℃, and soaking time is 2 hours;
5) adopt the mode of circulation infiltration pyrolysis to carry out densification (wherein flooding phase composite slightly adjusts) in the sample of above-mentioned processing, cycle index is 9 times, and the sample rate of body weight gain, less than 0.1%, has namely been realized the densification of material.
6) by precision work, obtained final silicon carbide/carbon SiClx composite element, its density is 2.32g/cm
3, be 356MPa with the flexural strength of stove flat board, modulus in flexure is 89GPa.
Embodiment 4
A kind of preparation method of silicon carbide/carbon SiClx composite element comprises following step:
1) take continuous carbofrax fibre as raw material, at first prepare silicon carbide without latitude cloth and net tire, then by replace the mode of laying without latitude cloth and net tire, successively stack, successively amplify, and successively adopt the fixing imitative type stereo fabric that forms L-type of acupuncture, and by the graphite frock, carry out " dimension type ";
2), take acetylene as carbon-source gas, precast body is placed in cvd furnace and carries out chemical vapour deposition, at the silicon carbide fiber surface deposition RESEARCH OF PYROCARBON interfacial layer of precast body.The processing condition of chemical vapour deposition are: depositing temperature is 1050 ℃, and deposition pressure is 0.4KPa, and depositing time is 4 hours.Wherein the interfacial layer thickness of RESEARCH OF PYROCARBON is 0.08 μ m left and right;
3) adopt the mode of vacuum aided, the dipping for preparing is incorporated into mutually in the silicon carbide precast body that has deposited the RESEARCH OF PYROCARBON interfacial layer, final impregnation pressure is 4MPa.Wherein, contain allylic liquid PCS and silicon carbide, ZrB in flooding mutually
2Powder is with weight ratio 1:0.05:0.2 blend, and ball milling forms final dipping phase after 10 hours;
4) flood the N that is solidificated in of phase
2Carry out in atmosphere, solidifying heat preservation zone is 180 ℃ and 350 ℃, and soaking time is respectively 2h and 2 hours; Pintsch process carries out in Ar atmosphere, burning temperature eventually is 1500 ℃, and soaking time is 2 hours;
5) carry out at infiltration pyrolysis the later stage of matrix densification, the situation according to weightening finish and surface " sealing of hole ", added rough machined operation 2 times;
6) adopt the mode of circulation infiltration pyrolysis to carry out densification (wherein flooding phase composite slightly adjusts) in the sample of above-mentioned processing, cycle index is 8 times, and the sample rate of body weight gain, less than 0.1%, has namely been realized the densification of material.
7) by precision work, obtained final silicon carbide/carbon SiClx composite element, its density is 2.38g/cm
3, be 337MPa with the flexural strength of stove flat board, modulus in flexure is 85GPa.
8) be 1450 ℃ with stove dull and stereotyped (surface is without oxidation resistant coating) arc tunnel ablation test examination 800s(surface temperature), the linear ablative rate of test specimen is 1.0 * 10
-5– 8.2 * 10
-5Mm/s, show excellent intrinsic antioxidant property.As shown in Figures 3 and 4, material shows the silicon-dioxide oxide film that has formed one deck densification after the ablation examination, thereby has effectively stoped the diffusion of oxygen to material internal for surface after its ablation and cross-section morphology; This oxidated layer thickness only has tens microns simultaneously, shows the intrinsic antioxidant characteristics of silicon carbide/carbon SiClx matrix material excellence at this temperature.
The above; only be the embodiment of the best of the present invention, but protection scope of the present invention is not limited to this, any those skilled in the art of being familiar with are in the technical scope that the present invention covers; the variation that can expect easily or replacement, within all should being encompassed in protection scope of the present invention.The content that is not described in detail in specification sheets of the present invention belongs to this area professional and technical personnel's known technology.
Claims (10)
1. the preparation method of a silicon carbide/carbon SiClx composite element is characterized in that step is:
1) preparation of silicon carbide fiber precast body: adopt Two-dimensional Carbon SiClx cloth laying or 3 D weaving technique to prepare the silicon carbide fiber precast body;
2) chemical Vapor deposition process prepares the RESEARCH OF PYROCARBON interfacial layer: use methane, propane, propylene or acetylene gas as the deposition carbon source, diluent gas is argon gas, the silicon carbide fiber precast body that step 1) is obtained is placed in the carbon laydown stove and deposits, at the surface deposition RESEARCH OF PYROCARBON interfacial layer of silicon carbide fiber; Processing parameter is as follows: depositing temperature is 850-1400 ℃, and deposition pressure is 0.1-20KPa, and depositing time is 1-100 hour; Wherein the RESEARCH OF PYROCARBON interfacial layer thickness on silicon carbide fiber surface is 0.05-5 μ m;
3) the silicon carbide fiber precast body that matrix densification: adopt the PIP method to step 2) obtains carries out densification, obtains silicon carbide/carbon SiClx matrix material; The step of PIP method is: the silicon carbide fiber precast body is carried out pressure impregnation, then be cured, obtain base substrate after curing is completed; Base substrate is carried out Pintsch process to be transformed.
2. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 1, is characterized in that: step 2) in before deposition, the frock that adopts the shape with the silicon carbide fiber precast body to be complementary is carried out keeping of shape to precast body.
3. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 1 is characterized in that: the infiltration pyrolysis process circulation step 3), less than 1% the time, densification finishes when the matrix material rate of body weight gain.
4. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 1, it is characterized in that: in step 3), impregnation pressure is 0.1-10MPa, and dipping time is 1-10 hour, and dipping temperature is 20-120 ℃; Solidification value is between 160-550 ℃, and be 1-10 hour set time; The outlet temperature of Pintsch process is 900-1600 ℃, and the time is 1-10 hour.
5. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 1 is characterized in that: the dipping that uses during PIP method pressure impregnation in step 3) is Polycarbosilane mutually; Polycarbosilane is the mixture of solid-state Polycarbosilane, liquid Polycarbosilane or solid-state Polycarbosilane and liquid Polycarbosilane.
6. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 5, is characterized in that: contain a kind of group or the mixed group more than 2 kinds in silico ethylene base, silene propyl group, silicon propargyl, silicon ethynylene group in described liquid Polycarbosilane.
7. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 5, it is characterized in that: described dipping also comprises solvent in mutually, solvent is a kind of in tetrahydrofuran (THF), toluene, dimethylbenzene, divinylbenzene or hexane, the solvent that adds and the mass ratio of Polycarbosilane are a, 0＜a≤5.
8. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 7, it is characterized in that: described dipping also comprises the functionality ceramic powder mutually, described functionality ceramic powder comprises active filler Ti, Zr, Hf, Al, Si or B, or inert filler SiC powder, B
4C, TiB
2, TiC, ZrB
2, ZrC, HfB
2, HfC or Al
2O
3The functionality ceramic powder that adds accounts for the 0.05%-0.5% of Polycarbosilane and solvent total mass.
9. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 8, is characterized in that: adopt the mode of wet ball grinding blend, the blend of solution mechanical stirring or the blend of ultrasonic wave solution to carry out blend to functionality ceramic powder, Polycarbosilane and solvent.
10. the preparation method of a kind of silicon carbide/carbon SiClx composite element according to claim 8, it is characterized in that: the functionality ceramic powder is micro-nano magnitude.
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