CN103385711A - MEMS -based human body physiological parameter detection device - Google Patents
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Abstract
The invention provides an MEMS-based human body physiological parameter detection device. The human body physiological parameter detection device comprises an integrated circuit chip integrated on the basis of an MEMS technology and a wrist strap, wherein the wrist strap is worn on a wrist when the device is used; the integrated circuit chip is divided into a front face and a reverse face; the reverse face is a face which faces the wrist; the front face is a face which backs on to the wrist; a blood sugar concentration detection sensor, a blood oxygen saturation detection sensor and a pulse detection sensor are integrated on the reverse face of the integrated circuit chip; a heart rate detection sensor and a respiration detection sensor are integrated on the front face of the integrated circuit chip. The invention provides the MEMS-based human body physiological parameter detection device, which has the advantages of small size, easiness in carrying, various testing functions, easiness in operation, low cost and the like.
Description
Technical field
The invention belongs to biomedical engineering, design of electronic circuits technical field, be specifically related to a kind of checkout gear of human body physiological parameter based on MEMS.
Background technology
Along with the raising gradually of people's living standard, also more and more higher to the attention rate of self health problem, therefore, need the physiological parameter of often test self.In prior art, the human body physiological parameter testing equipment usually can only one or two physiological parameters of testing human, have the single problem of test function; And existing human body physiological parameter testing equipment is bulky, is not easy to carry; Also have complicated operation, problem that cost is high, thereby brought inconvenience for people's use.
Summary of the invention
Defect for prior art exists, the invention provides a kind of checkout gear of human body physiological parameter based on MEMS, has that volume is little, portable, test function is various, simple to operate, low cost and other advantages.
The technical solution used in the present invention is as follows:
The invention provides a kind of checkout gear of human body physiological parameter based on MEMS, described human body physiological parameter checkout gear comprises IC chip and the wrist strap based on the MEMS technology; Described wrist strap is worn on wrist while being used for using; Described IC chip is divided into obverse and reverse, and described reverse side is the one side in the face of wrist, and described front is the one side back to wrist; The integrated blood sugar concentration detecting sensor of the reverse side of described IC chip, blood oxygen saturation detecting sensor and pulse detection sensor; Positive integrated heart rate detection sensor and the respiration detection sensor of described IC chip.
Preferably, described heart rate detection sensor is identical with the structure of described respiration detection sensor, comprises respectively: the controller of capacitance sensor, pulse-width modulator, filter, voltage follower, peak detector and integrated A/D converter; Described capacitance sensor is used for the vibrations that perception heartbeat or abdominal part rise and fall and cause, the outfan of described capacitance sensor is connected with the input of described pulse-width modulator; The outfan of described pulse-width modulator is connected with the input of described filter; The outfan of described filter is connected with the input of described voltage follower; The outfan of described voltage follower is connected with the input of described peak detector; The outfan of described peak detector is connected with the input of described controller; The outfan of described controller is connected to display screen.
Preferably, described capacitance sensor comprises fixed pole and the removable utmost point; Described fixed pole is by silicon beam or film manufacturing, and the described removable utmost point is made by the polysilicon diaphragm; The area of described polysilicon diaphragm top electrode and the spacing of its cavity of resorption have determined the capacitance of this capacitance sensor; When described polysilicon diaphragm is subjected to ambient pressure to do the used time, described polysilicon diaphragm deforms, thereby causes the variation of electric capacity between described polysilicon diaphragm and silicon substrate electrode.
Preferably, described blood sugar concentration detecting sensor, described blood oxygen saturation detecting sensor and described pulse detection sensor are respectively optical sensor.
Preferably, the reverse side setting of described IC chip: the processor of the first sense channel, the second sense channel, the 3rd sense channel and built-in A/D conversion; Described processor is connected with described the first sense channel, described the second sense channel and the 3rd sense channel of being connected respectively;
Described the first sense channel comprises the first light source, the first photo-detector and first signal modulate circuit; The outfan of described the first photo-detector is connected with described processor by described first signal modulate circuit;
Described the second sense channel comprises secondary light source, the second photo-detector and secondary signal modulate circuit; The outfan of described the second photo-detector is connected with described processor by described secondary signal modulate circuit;
Described the 3rd sense channel comprises the 3rd light source, the 3rd photo-detector and the 3rd signal conditioning circuit; The outfan of described the 3rd photo-detector is connected with described processor by described the 3rd signal conditioning circuit;
Integrated described the first sense channel of described blood sugar concentration detecting sensor; Integrated described the second sense channel of described blood oxygen saturation detecting sensor and described the 3rd sense channel; Integrated described the second sense channel of described pulse detection sensor and described the 3rd sense channel.
Preferably, described first signal modulate circuit, described secondary signal modulate circuit are identical with the structure of described the 3rd signal conditioning circuit, and comprise respectively: electric current is to preamplifier, comparator, amplifier and the calibration hardware of electric pressure converter, incorporating filter; Described electric current is connected to described processor after electric pressure converter, described preamplifier, described comparator and the series connection of described amplifier; And the input of described calibration hardware is connected with the outfan of described amplifier; The outfan of described calibration hardware is connected with the input of described comparator; Described calibration hardware also is provided with the reference signal input interface.
Preferably, described the first light source, described secondary light source and described the 3rd light source are respectively the light source based on the VCSEL framework; Described the first photo-detector, described the second photo-detector and described the 3rd photo-detector are respectively the photo-detector of based semiconductor photodiode.
Preferably, described the first light source is 1100 nanometer MEMS tunable vertical-cavity surface emitting lasers; Described secondary light source is 1060 nanometer MEMS tunable vertical-cavity surface emitting lasers; Described the 3rd light source is 1100 nanometer MEMS tunable vertical-cavity surface emitting lasers.
Human body physiological parameter based on MEMS checkout gear provided by the invention has the following advantages:
(1) volume is little, directly is worn on wrist and uses, and has portative advantage;
(2) can test blood sugar concentration, blood oxygen saturation, pulse, heart rate and five kinds of physiological parameters of breathing, have advantages of that test function is various;
(3) three sense channels under the control of processor, adopt time-multiplexed working method, thereby test blood sugar concentration, blood oxygen saturation and three parameters of pulse, have simplified the complexity of system configuration, have also saved cost;
(4) utilize optical property measurement blood glucose, blood oxygen saturation and pulse, utilize electric capacity property measurement heart rate and breathing, have that test structure is simple, test result is accurate and easy-operating advantage.
Description of drawings
Fig. 1 is the structural representation of the checkout gear of the human body physiological parameter based on MEMS provided by the invention;
Fig. 2 is the layout of IC chip reverse side provided by the invention;
Fig. 3 is the schematic diagram that utilizes optical property measurement blood glucose, blood oxygen saturation and pulse provided by the invention;
Fig. 4 is the fundamental diagram of the first sense channel provided by the invention, the second sense channel and the 3rd sense channel time division multiplexing;
Fig. 5 is the schematic diagram of heart rate detection sensor provided by the invention and respiration detection sensor.
The specific embodiment
The present invention is described in detail below in conjunction with accompanying drawing:
As shown in Figure 1, the invention provides a kind of checkout gear of human body physiological parameter based on MEMS, described human body physiological parameter checkout gear comprises based on MEMS technology integrated IC chip and wrist strap; Described wrist strap is worn on wrist while being used for using; Described IC chip is divided into obverse and reverse, and described reverse side is the one side in the face of wrist, and described front is the one side back to wrist; The integrated blood sugar concentration detecting sensor of the reverse side of described IC chip, blood oxygen saturation detecting sensor and pulse detection sensor; Positive integrated heart rate detection sensor and the respiration detection sensor of described IC chip.
Wherein, integrated blood sugar concentration detecting sensor, blood oxygen saturation detecting sensor and the pulse detection sensor of integrated circuit reverse side is optical sensor, utilizes optical property measurement blood glucose, blood oxygen saturation and pulse.Positive integrated heart rate detection sensor and the respiration detection sensor of integrated circuit utilizes electric capacity property measurement heart rate and breathing.While measuring heart rate, only wrist cardiac position need to be placed on, heart rate can be detected; Measure while breathing, only wrist need to be placed on abdominal part, can measure breathing.
Below introduce respectively IC chip reverse side and positive circuit theory diagrams:
(1) IC chip reverse side
As shown in Figure 2, be the layout of IC chip reverse side, the reverse side setting of IC chip: the processor of the first sense channel, the second sense channel, the 3rd sense channel and built-in A/D conversion; Processor is connected with the first sense channel, the second sense channel and the 3rd sense channel respectively;
Wherein, the first sense channel comprises the first light source, the first photo-detector and first signal modulate circuit; The outfan of the first photo-detector is connected with processor by the first signal modulate circuit;
The second sense channel comprises secondary light source, the second photo-detector and secondary signal modulate circuit; The outfan of the second photo-detector is connected with processor by the secondary signal modulate circuit;
The 3rd sense channel comprises the 3rd light source, the 3rd photo-detector and the 3rd signal conditioning circuit; The outfan of the 3rd photo-detector is connected with processor by the 3rd signal conditioning circuit.
First signal modulate circuit, secondary signal modulate circuit are identical with the structure of the 3rd signal conditioning circuit, and comprise respectively: electric current is to preamplifier, comparator, amplifier and the calibration hardware of electric pressure converter, incorporating filter; Electric current is connected to processor after electric pressure converter, preamplifier, comparator and amplifier series connection; And the input of calibration hardware is connected with the outfan of amplifier; The outfan of calibration hardware is connected with the input of comparator; Described calibration hardware also is provided with the reference signal input interface.
Integrated the first sense channel of blood sugar concentration detecting sensor; Integrated the second sense channel of blood oxygen saturation detecting sensor and the 3rd sense channel; Integrated the second sense channel of pulse detection sensor and the 3rd sense channel.
In the present invention, blood sugar concentration detecting sensor, blood oxygen saturation detecting sensor and pulse detection sensor are and utilize optical property measurement blood glucose, blood oxygen saturation and pulse.Concrete, embed photo-detector in integrated circuit, adopt Semiconducting Silicon Materials si.The integrated of this material is the part of MEMS technology.This material have low-dark current, high-speed, have good sensitivity between wavelength 400 to 1000 nanometers.As shown in Figure 3, infrared light is incident on the skin surface of wrist to its operation principle, and reflects, and the optical signal that photo-detector will reflect is converted to the signal of telecommunication, and with reference signal, compares, and by signal processing unit, the differential signal that obtains is processed.Finally with the form of the concentration of glucose in blood, show result.Adopt the light source of vcsel structure can guarantee that the light of launching directly enters interstitial fluid or blood plasma
Integrated the first sense channel of blood sugar concentration detecting sensor; Integrated the second sense channel of blood oxygen saturation detecting sensor and the 3rd sense channel; Integrated the second sense channel of pulse detection sensor and the 3rd sense channel, its principle is: (1) is by the first sense channel measuring blood concentration, and, the first light source is emission 1100nm nanometer MEMS tunable vertical-cavity surface emitting laser, after the light of the first light source emission 1100nm, glucose sugar is by the light wave that absorbs or reflect this frequency range and then transmission or the reflected signal that affects measurement.(2) use simultaneously the second sense channel and the 3rd sense channel to measure blood oxygen saturation and pulse, and secondary light source is emission 1060 nanometer MEMS tunable vertical-cavity surface emitting lasers; The 3rd light source is emission 1100 nanometer MEMS tunable vertical-cavity surface emitting lasers.Principle is: because oxygen containing blood absorption light wavelength is 1060nm, the light of anaerobic blood absorption 1100nm, in the present invention, use simultaneously the light emitting diode of two individual wavelengths (1060 nanometers and 1100 nanometers) as radiation source, the light of light source emission will be through the tissue of human body skin, part light is absorbed by tissue, and remaining part is detected by photo-detector after reflection.The received light intensity of photo-detector changes along with the variation of blood engorgement degree, and the signal of telecommunication of output also changes.The signal of telecommunication that uses electronic circuit to amplify these variations just can obtain the pulse wave that the cycle changes along with heart beating.In addition, in practical application, the first light source, secondary light source and the 3rd light source adopt the light source based on the VCSEL framework, VCSEL: entirely be called vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, VCSEL),, take gallium arsenide semiconductor material as foundation development, be different from the other light sources such as LED (light emitting diode) and LD (Laser Diode, laser diode).It has, and the output of little, the circular output facula of volume, single longitudinal mode, threshold current are little, cheap, easy of integration is the advantages such as large tracts of land array, extensive use and optic communication, light interconnection, the fields such as optical storage.Meanwhile, VCSEL is than traditional edge-emitting laser, has unsettled polarization mode output, at injection current by little lasting increase or by large while continuing to reduce, polarization conversion can occur, and when changing some other parameter, also can find the conversion of polarization mode, when this conversion presents in short-term saltus step characteristic, be called polarization switch.
In the present invention, the first sense channel, the second sense channel and the 3rd sense channel adopt the working method of time division multiplexing, thereby detect blood sugar concentration, blood oxygen saturation and pulse.Concrete working method as shown in Figure 4, wherein, D1-the first photo-detector, D2-the second photo-detector, D3-the 3rd photo-detector, the electric current of I1-the first photo-detector output, the electric current of I2-the second photo-detector output, the electric current of I3-the 3rd photo-detector output, the 1-electric current is to electric pressure converter, the preamplifier of 2-incorporating filter, the 3-comparator, R-reference signal, 4-amplifier, the 5-calibration hardware, the MCU of built-in 18 A/D conversion of 6-.
As shown in truth table 1, the light source of vcsel structure and corresponding photodetector adopt the mode of time division multiplexing to work.At time t1, the first light source and D1 are activated.I1 is the electric current that obtains.Arrive the processing of preamplifier, comparator, amplifier and calibration hardware of electric pressure converter, incorporating filter by electric current after, terminal is passed through the processing of MCU again, obtains final blood sugar concentration.
Same, at time t2, the second photo-detector and the 3rd photo-detector of secondary light source, the 3rd light source and its correspondence are activated simultaneously.After the processing of modulate circuit, be input to MCU, then pass through the processing of MCU, obtain final blood oxygen saturation and the measured value of pulse.
More specifically, while detecting blood glucose, only have the first light source S1 and the first contiguous photo-detector D1 to be activated.The light of light source emission 1100nm nanometer.While measuring blood oxygen saturation, secondary light source, the 3rd light source, the second photo-detector and the 3rd photo-detector are activated simultaneously, the light of secondary light source emission 1060nm, the light of the 3rd light source emission 1100nm.Absorb the light of 1060nm due to oxygenated blood fluid, oxygen-free blood oxygen absorbs the light of 1100nm, and photo-detector will receive different signals.
Blood sugar test and blood oxygen, pulse detection adopt time-multiplexed mode to work.Wherein the square wave frequency of pulse generator generation is 921.6kHz.The baud rate of this frequency values and IBM PC is compatible.Enumerator need to carry out the step-by-step counting of 60 seconds continuously.Namely measure and once need the time of 1 minute.But completing from the skin collection and processing reflected light only to need the time in several seconds.
Enumerator its output of reversing every one minute.The time of 1 minute is assigned to each time and measures.Comprise light incident, absorption, reflect, incide photodetector and final signal processing, to obtain a result.
Enumerator will be set to carry out step-by-step counting from pulse generator.It need to carry out the step-by-step counting of 60 seconds.If the frequency of square wave is 921.6 kilo hertzs, in an optical measurement process, enumerator will be counted 55 * 106 pulse signals.
When reset was placed in 0, blood sugar test will be activated.S1 and D1 will start to detect blood glucose.If reset is placed in 0 always, chip will detect blood glucose always.
When reset was placed in 1, blood oxygen and blood sugar test will be worked in the mode of time division multiplexing.Truth table 1 is seen in concrete operations.
Table 1
| Reset | Cout | Sel_SD | Sel1 | Sel2 | Y1 | Y2 |
| 1 | 0 | 0 | 0 | 0 | S1 | D1 |
| 1 | 1 | 1 | 1 | 1 | S2 | D2 |
| Reset | Cout | Sel_SD | Sel1 | Sel2 | Y1 | Y2 |
| 0 | 0 | 0 | 0 | 0 | S1 | D1 |
| 0 | 1 | 0 | 0 | 0 | S1 | D1 |
The calculating of related data
[output of VCSEL light source]
Wherein b is the coefficient of coup
Complicated time correlation amplitude under m pattern, ω
0 mIt is mode frequency.
[reflection of light]
In measuring process, the light beam of directive tissue will occur to absorb and reflection.The light that enters tissue can, due to the removable frame in tissue,, as erythrocyte, be offset according to the Doppler effect occurrence frequency.A part of light of reflection can incide on the surface of photodetector.
T is formulated as in the reflection of the detector photosensitive area of position x constantly:
Wherein DRm (t, x) is complicated electromagnetic field, by m zlasing mode and not mobile structure reflection, is produced.
DQm (t, x) is complicated electromagnetic field, by m zlasing mode and removable frame (as erythrocyte) reflection, is produced.If with ω
0 mRelatively, Doppler shift is less, can think a narrowband random process, with following formulate:
Wherein,
Be scattered in the complex amplitude of the arrowband of removable frame.
[photodetector currents]
Value approaches but greater than zero photoelectric current i (t, x) arbitrarily, and is proportional in the instantaneous strength of the photosensitive area DT (t, x) of position x with photodetector, in the uncared-for situation of noise.
K is instrumental constant, comprises the quantum efficiency of detector, and asterisk represents complex conjugate.
Formula (1)-(3) are inserted in formula (4) and obtain,
Due to the arrowband character of DSm (t, x), the power spectrum of photoelectric current concentrates on discrete frequency.If the output signal of photodetector is low-pass filtering.The index l=1 in formula (5), the form of photoelectric current can be expressed as:
Total photoelectric current under associative perception light area radiant intensity can be expressed as (6)
First electric current that represents the light beam generation of not occurrence frequency displacement in equation (7).
The heterodyne that on second expression photodetector photosensitive region in equation (7), occurrence frequency is not shifted and occurrence frequency is shifted is mixed.
Any change of blood glucose value, all can cause the change of blood flow, and blood flow and blood glucose value are indirectly proportional.By analyzing, people are according to the degree of depth of photon transparent transmission tissue.Can access the detailed situation of blood glucose in tissue.
By the photodetector currents in analyzing and processing formula 7, people can obtain by the degree of depth that photon penetrates tissue the information of glucose in blood.By this technology, the inhomogeneous impact (structural or metabolic alterations) of any optics can detect in tissue.
[computational methods of blood oxygen]
, by two kinds of different wavelength, can calculate the calculating oxygenation levels HbC
HbO2With deoxyhemoglobin C
HbConcentration, as shown in following formula:
Here, λ
1And λ
2Two wavelength;
Blood oxygen saturation can be calculated as:
(2) IC chip is positive
Positive integrated heart rate detection sensor and the respiration detection sensor of IC chip, the heart rate detection sensor is identical with the structure of described respiration detection sensor, as shown in Figure 5, comprise respectively: the controller of capacitance sensor, pulse-width modulator, filter, voltage follower, peak detector and integrated A/D converter; Described capacitance sensor is used for the vibrations that perception heartbeat or abdominal part rise and fall and cause, the outfan of described capacitance sensor is connected with the input of described pulse-width modulator; The outfan of described pulse-width modulator is connected with the input of described filter; The outfan of described filter is connected with the input of described voltage follower; The outfan of described voltage follower is connected with the input of described peak detector; The outfan of described peak detector is connected with the input of described controller; The outfan of described controller is connected to display screen.
Wherein, capacitance sensor comprises fixed pole and the removable utmost point; Fixed pole is by silicon beam or film manufacturing, and the removable utmost point is made by the polysilicon diaphragm; The area of polysilicon diaphragm top electrode and the spacing of its cavity of resorption have determined the capacitance of this capacitance sensor; Do the used time when the polysilicon diaphragm is subjected to ambient pressure, the polysilicon diaphragm deforms, thereby causes the variation of electric capacity between polysilicon diaphragm and silicon substrate electrode.The removable utmost point is used for body measurement, when near cardiac position, is used for measuring heart beating; When near stomach, be used for measuring and breathe.The capacitance sensing output voltage depends on two distances between electrode plane.The two poles of the earth of electric capacity are used for electric current and discharge and recharge, and change the spacing between two electrodes, will change the capacitance of capacitance sensor, and are out measured by Voltage-output.This kind detection method has high accuracy and stability.
Capacitance type sensor is not easy to produce noise, and is not easy to vary with temperature., due to internal feedback circuitry, usually have less power consumption, but have larger bandwidth.
During actual the use, when detecting breathing, the front of IC chip is placed in abdominal part, in people's respiratory, contraction and the extensional motion that can cause abdominal part, detect by the capacitance sensor that embeds in integrated circuit the vibrations that abdominal part rises and falls and causes, these vibrations cause the change of capacitance.The variation of this capacitance further shows by the change of analog voltage, the human body respiration frequency that namely obtains.Except display device, other devices all are integrated on the MEMS integrated circuit.
As a kind of example, the variation of capacitance sensor capacitance is relevant to the side-play amount of polysilicon diaphragm, and the side-play amount of diaphragm is by diaphragm center deflection equation formula,
ω
0＝(PR∧4)/49.6D
Wherein, ω
0It is the maximum deflection under bending rigidity D; The R-radius; The P-uniform pressure;
Bending rigidity D is provided by following formula:
D＝EyH
3/12(1-v
2)；
Wherein, Ey represents Young's modulus, and W represents the Bai Song ratio, and the Bai Song ratio of silicon is 0.3; The relative pressure sensitivity of capacitance type sensor is provided by following formula:
Wherein, S
R(C)=relative pressure sensitivity;
The C=pressure-sensitive capacitance; C
0=reference capacitance; C
p=parasitic capacitance; C
x=the electric capacity that formed by electrode.
Human body physiological parameter based on MEMS checkout gear provided by the invention has the following advantages:
(1) volume is little, directly is worn on wrist and uses, and has portative advantage;
(2) can test blood sugar concentration, blood oxygen saturation, pulse, heart rate and five kinds of physiological parameters of breathing, have advantages of that test function is various;
(3) three sense channels under the control of processor, adopt time-multiplexed working method, thereby test blood sugar concentration, blood oxygen saturation and three parameters of pulse, have simplified the complexity of system configuration, have also saved cost;
(4) utilize optical property measurement blood glucose, blood oxygen saturation and pulse, utilize electric capacity property measurement heart rate and breathing, have that test structure is simple, test result is accurate and easy-operating advantage.
The above is only the preferred embodiment of the present invention; should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be looked protection scope of the present invention.
Claims (8)
1. the checkout gear of the human body physiological parameter based on MEMS, is characterized in that, described human body physiological parameter checkout gear comprises IC chip and the wrist strap based on the MEMS technology; Described wrist strap is worn on wrist while being used for using; Described IC chip is divided into obverse and reverse, and described reverse side is the one side in the face of wrist, and described front is the one side back to wrist; The integrated blood sugar concentration detecting sensor of the reverse side of described IC chip, blood oxygen saturation detecting sensor and pulse detection sensor; Positive integrated heart rate detection sensor and the respiration detection sensor of described IC chip.
2. the checkout gear of the human body physiological parameter based on MEMS according to claim 1, it is characterized in that, described heart rate detection sensor is identical with the structure of described respiration detection sensor, comprises respectively: the controller of capacitance sensor, pulse-width modulator, filter, voltage follower, peak detector and integrated A/D converter; Described capacitance sensor is used for the vibrations that perception heartbeat or abdominal part rise and fall and cause, the outfan of described capacitance sensor is connected with the input of described pulse-width modulator; The outfan of described pulse-width modulator is connected with the input of described filter; The outfan of described filter is connected with the input of described voltage follower; The outfan of described voltage follower is connected with the input of described peak detector; The outfan of described peak detector is connected with the input of described controller; The outfan of described controller is connected to display screen.
3. the checkout gear of the human body physiological parameter based on MEMS according to claim 2, is characterized in that, described capacitance sensor comprises fixed pole and the removable utmost point; Described fixed pole is by silicon beam or film manufacturing, and the described removable utmost point is made by the polysilicon diaphragm; The area of described polysilicon diaphragm top electrode and the spacing of its cavity of resorption have determined the capacitance of this capacitance sensor; When described polysilicon diaphragm is subjected to ambient pressure to do the used time, described polysilicon diaphragm deforms, thereby causes the variation of electric capacity between described polysilicon diaphragm and silicon substrate electrode.
4. the checkout gear of the human body physiological parameter based on MEMS according to claim 1, is characterized in that, described blood sugar concentration detecting sensor, described blood oxygen saturation detecting sensor and described pulse detection sensor are respectively optical sensor.
5. the checkout gear of the human body physiological parameter based on MEMS according to claim 4, is characterized in that, the reverse side setting of described IC chip: the processor of the first sense channel, the second sense channel, the 3rd sense channel and built-in A/D conversion; Described processor is connected with described the first sense channel, described the second sense channel and the 3rd sense channel of being connected respectively;
Described the first sense channel comprises the first light source, the first photo-detector and first signal modulate circuit; The outfan of described the first photo-detector is connected with described processor by described first signal modulate circuit;
Described the second sense channel comprises secondary light source, the second photo-detector and secondary signal modulate circuit; The outfan of described the second photo-detector is connected with described processor by described secondary signal modulate circuit;
Described the 3rd sense channel comprises the 3rd light source, the 3rd photo-detector and the 3rd signal conditioning circuit; The outfan of described the 3rd photo-detector is connected with described processor by described the 3rd signal conditioning circuit;
Integrated described the first sense channel of described blood sugar concentration detecting sensor; Integrated described the second sense channel of described blood oxygen saturation detecting sensor and described the 3rd sense channel; Integrated described the second sense channel of described pulse detection sensor and described the 3rd sense channel.
6. the checkout gear of the human body physiological parameter based on MEMS according to claim 5, it is characterized in that, described first signal modulate circuit, described secondary signal modulate circuit are identical with the structure of described the 3rd signal conditioning circuit, and comprise respectively: electric current is to preamplifier, comparator, amplifier and the calibration hardware of electric pressure converter, incorporating filter; Described electric current is connected to described processor after electric pressure converter, described preamplifier, described comparator and the series connection of described amplifier; And the input of described calibration hardware is connected with the outfan of described amplifier; The outfan of described calibration hardware is connected with the input of described comparator; Described calibration hardware also is provided with the reference signal input interface.
7. the according to claim 5 or 6 described checkout gears of human body physiological parameter based on MEMS, is characterized in that, described the first light source, described secondary light source and described the 3rd light source are respectively the light source based on the VCSEL framework; Described the first photo-detector, described the second photo-detector and described the 3rd photo-detector are respectively the photo-detector of based semiconductor photodiode.
8. the checkout gear of the human body physiological parameter based on MEMS according to claim 7, is characterized in that, described the first light source is 1100 nanometer MEMS tunable vertical-cavity surface emitting lasers; Described secondary light source is 1060 nanometer MEMS tunable vertical-cavity surface emitting lasers; Described the 3rd light source is 1100 nanometer MEMS tunable vertical-cavity surface emitting lasers.
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| WO2017128930A1 (en) * | 2016-01-29 | 2017-08-03 | 安徽华米信息科技有限公司 | Wearable device and electrocardiogram signal collection |
| CN107174220A (en) * | 2016-03-11 | 2017-09-19 | 合肥芯福传感器技术有限公司 | Multi-mode biopotential sensor based on intelligent processor platform |
| CN113576435A (en) * | 2021-09-10 | 2021-11-02 | 湖南金智芯医疗科技有限公司 | Preparation method of nano chip integrating pulse wave, blood oxygen, heat metabolism and spectrum |
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Denomination of invention: Human physiological parameter detection device based on MEMS Effective date of registration: 20211021 Granted publication date: 20150114 Pledgee: Linyi Lanshan sub branch of Qilu Bank Co.,Ltd. Pledgor: LINYI INFOTOP NETWORK Co.,Ltd. Registration number: Y2021980011089 |