CN103380301B - 定子元件以及高真空泵 - Google Patents

定子元件以及高真空泵 Download PDF

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Publication number
CN103380301B
CN103380301B CN201280009498.7A CN201280009498A CN103380301B CN 103380301 B CN103380301 B CN 103380301B CN 201280009498 A CN201280009498 A CN 201280009498A CN 103380301 B CN103380301 B CN 103380301B
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CN
China
Prior art keywords
stator
sheet
stator component
connects
component
Prior art date
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Active
Application number
CN201280009498.7A
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English (en)
Chinese (zh)
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CN103380301A (zh
Inventor
海因里希·恩伦德尔
迈克尔·里希特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
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Publication of CN103380301A publication Critical patent/CN103380301A/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN201280009498.7A 2011-02-17 2012-02-08 定子元件以及高真空泵 Active CN103380301B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE202011002809.7 2011-02-17
DE202011002809U DE202011002809U1 (de) 2011-02-17 2011-02-17 Statorelement sowie Hochvakuumpumpe
DE2020110028097 2011-02-17
PCT/EP2012/052122 WO2012110378A1 (de) 2011-02-17 2012-02-08 Statorelement sowie hochvakuumpumpe

Publications (2)

Publication Number Publication Date
CN103380301A CN103380301A (zh) 2013-10-30
CN103380301B true CN103380301B (zh) 2016-08-17

Family

ID=45569659

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280009498.7A Active CN103380301B (zh) 2011-02-17 2012-02-08 定子元件以及高真空泵

Country Status (5)

Country Link
EP (1) EP2676034A1 (ja)
JP (1) JP2014505833A (ja)
CN (1) CN103380301B (ja)
DE (1) DE202011002809U1 (ja)
WO (1) WO2012110378A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
EP4155549B1 (de) 2022-11-14 2024-09-04 Pfeiffer Vacuum Technology AG Vakuumpumpe mit verbessertem saugvermögen der holweck-pumpstufe
EP4379216A1 (de) * 2024-04-22 2024-06-05 Pfeiffer Vacuum Technology AG Turbomolekularvakuumpumpe mit kompakter bauform

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3531942A1 (de) * 1984-09-17 1986-04-30 Japan Atomic Energy Research Institute, Tokio/Tokyo Rotationspumpe
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
WO2009153874A1 (ja) * 2008-06-19 2009-12-23 株式会社島津製作所 ターボ分子ポンプ
CN101952602A (zh) * 2008-01-15 2011-01-19 厄利孔莱博尔德真空技术有限责任公司 涡轮分子泵

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (de) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3531942A1 (de) * 1984-09-17 1986-04-30 Japan Atomic Energy Research Institute, Tokio/Tokyo Rotationspumpe
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
CN101952602A (zh) * 2008-01-15 2011-01-19 厄利孔莱博尔德真空技术有限责任公司 涡轮分子泵
WO2009153874A1 (ja) * 2008-06-19 2009-12-23 株式会社島津製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
JP2014505833A (ja) 2014-03-06
EP2676034A1 (de) 2013-12-25
DE202011002809U1 (de) 2012-06-12
WO2012110378A1 (de) 2012-08-23
CN103380301A (zh) 2013-10-30

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee
CP01 Change in the name or title of a patent holder

Address after: Cologne, Germany

Patentee after: LEYBOLD Co. Ltd.

Address before: Cologne, Germany

Patentee before: Oerlikon Leybold Vacuum GmbH