CN103368447A - Electrostatic impulse generator and direct current (DC) impulse generator - Google Patents
Electrostatic impulse generator and direct current (DC) impulse generator Download PDFInfo
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- CN103368447A CN103368447A CN2012102873427A CN201210287342A CN103368447A CN 103368447 A CN103368447 A CN 103368447A CN 2012102873427 A CN2012102873427 A CN 2012102873427A CN 201210287342 A CN201210287342 A CN 201210287342A CN 103368447 A CN103368447 A CN 103368447A
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Abstract
The invention provides an electrostatic impulse generator, which sequentially comprises a first electrode layer, a first insulation layer, insulation supports, a second insulation layer and a second electrode layer, wherein materials of the first and second insulation layers have a friction electrode order difference, the insulation supports enable a gap to be formed between the first and second insulation layers, and under the action of external force, the first and second insulation layers are mutually contacted. The invention further provides a direct current impulse generator which combines the electrostatic impulse generator with a full-bridge rectifier. According to the electrostatic impulse generator disclosed by the invention, contact charges which are generated when the two insulation materials which have the friction electrode order difference are contacted under the action of external force are used, so the potential difference is formed between the first and second electrode layers. Under the action of periodic external force, the first and second insulation layers are periodically contacted with each other and separated from each other, and pulse currents in opposite directions are respectively generated.
Description
Technical field
The present invention relates to a kind of generator, the mechanical energy that particularly motion, vibration, fluid etc. is existed naturally is converted into electrostatic pulse generator and the DC pulse generator of electric energy.
Background technology
In today of microelectronics and material technology high speed development, a large amount of novel microelectronic devices with several functions and Highgrade integration constantly are developed, and show unprecedented application prospect in the every field of people's daily life.Yet, and the research of these microelectronic devices power-supply system of mating but relatively lags behind, in general, the power supply of these microelectronic devices all is directly or indirectly to come from battery.Battery has 3 limitation that are difficult to overcome, and the firstth, larger volume and heavier quality are so that whole electronic system is difficult to realize miniaturization; The secondth, the limited life-span, the network that particularly forms for the transducer by a large amount of dispersions, limited battery life will bring high maintenance cost; The 3rd is poisonous chemical confrontation environment and the potential harm of human body.Therefore, thus develop and the mechanical energy that motion, vibration, fluid etc. exist naturally can be converted into electric energy and realize need not the technology of the microdevice of external power supply and be extremely important.
At present, mechanical energy is converted into the principle that the generator of electric energy utilizes and mainly contains electrostatic induction, the piezoelectric property of electromagnetic induction and special material etc.Yet, the shortcoming such as the electrostatic induction electricity generator of having invented exists volume large, and applicability is narrow, induction generator and piezoelectric generator ubiquity complex structure have specific (special) requirements and the more high defective of cost to material.
Summary of the invention
The purpose of this invention is to provide the electrostatic pulse generator simple in structure that a kind of mechanical energy that motion, vibration, fluid etc. are existed naturally is converted into electric energy, the power supply of coupling is provided for microelectronic device.
For achieving the above object, the invention provides a kind of electrostatic pulse generator, described generator has layer structure, comprises successively the first electrode layer, the first insulating barrier, insulation support body, the second insulating barrier and the second electrode lay, wherein,
The material of described the first insulating barrier and the second insulating barrier exists friction electrode order poor;
Described insulation support body makes between described the first insulating barrier and the second insulating barrier and forms the space, and under external force, described the first insulating barrier and the second insulating barrier contact with each other.
Preferably, described the first insulating barrier or the second insulating barrier comprise nano wire or nanometer stick array towards the surface in described space, the basic vertical surface with described the first insulating barrier or the second insulating barrier of described nano wire or nanometer rods.
Preferably, described the first insulating barrier and/or the second insulating barrier are towards the surface process chemical modification in described space, making two insulating barrier Semi-polarities is that easy betatopic functional group is introduced on positive thin layer surface, perhaps introduces the functional group of the electronics that is easy to get for negative material surface in polarity.
Preferably, described the first insulating barrier and/or the second insulating barrier are insulating thin layer.
Preferably, described the first insulating barrier and/or the second insulating barrier are elastomeric material, and under the effect of external periodic force, described the first insulating barrier periodically contacts with the second insulating barrier.
Preferably, described insulation support body is elastomeric material, and under the effect of external periodic force, described the first insulating barrier periodically contacts with the second insulating barrier.
Preferably, described the first insulating barrier, the second insulating barrier and/or insulation support body are elastomeric material, and under the effect of external periodic force, described the first insulating barrier periodically contacts with the second insulating barrier.
Preferably, the material of described the first insulating barrier and/or the second insulating barrier is Inorganic Non-metallic Materials, high-molecular organic material or its combination.
Preferably, described the first insulating barrier is that thickness is 2 microns polymethyl methacrylate film layer, described the second insulating barrier is that thickness is 50 microns polymethyl methacrylate film, and described the second insulating barrier comprises that on the surface towards described space length is about 1.5 microns polyimide nano rod array, basic vertical and described the second insulating barrier of described nanometer rods.
Preferably, described insulation support body is the polyimides double faced adhesive tape.
Preferably, described external force comprises that Low-Frequency Mechanical impacts and high-frequency mechanical vibration.
Correspondingly, the present invention also provides a kind of DC pulse generator, comprises electrostatic pulse generator of the present invention and full-bridge rectifier, and the output of described electrostatic pulse generator is connected with the input of described full-bridge rectifier.
Compared with prior art, the beneficial effect that has of the present invention is:
The invention provides a kind of electrostatic pulse generator, described generator has layer structure, comprise successively the first electrode layer, the first insulating barrier, insulation support body, the second insulating barrier and the second electrode lay, wherein, the material of described the first insulating barrier and the second insulating barrier exists friction electrode order poor; Described insulation support body makes between described the first insulating barrier and the second insulating barrier and forms the space, and under external force, described the first insulating barrier and the second insulating barrier contact with each other.Because the material of the first insulating barrier and the second insulating barrier exists friction electrode order poor, the contact electric charge that electrostatic pulse generator of the present invention produces when utilizing the first insulating barrier to contact under external force with the second insulating barrier and the design of the hollow structure between the first insulating barrier and the second insulating barrier form electrical potential difference between the first electrode layer and the second electrode lay.Under the effect of external periodic force, the first insulating barrier contacts with the second insulating barrier generating period and separates two processes, produces respectively the pulse current of opposite direction.
Electrostatic pulse electric generator structure of the present invention is simple, and the preparation method is simple, and material without specific (special) requirements, is had widely practical use.In addition, be combined with full-bridge rectifier and can form the DC pulse generator, be directly used in the multiple use of electrochemical field, it not only can be used as the pulse power and directly applies to electrochemical field, can also be capacitor or lithium ion cell charging, for various small portable electronic devices provide required electric power.
Description of drawings
Shown in accompanying drawing, above-mentioned and other purpose of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawings is indicated identical part.Deliberately do not draw accompanying drawing by actual size equal proportion convergent-divergent, focus on illustrating purport of the present invention.
Fig. 1 is the structural representation of the electrostatic pulse generator of the embodiment of the invention one;
Fig. 2 is the structural representation of the electrostatic pulse generator of the embodiment of the invention three;
Fig. 3 is the electromicroscopic photograph of the high molecular nanometer prepared on the surface of polyimide material rod array;
Fig. 4 is electrostatic pulse generator open circuit voltage measurement result under external force;
Fig. 5 a is electrostatic pulse generator short circuit current measurement result under external force; Fig. 5 b is the short circuit current measurement result of a pulse period under external force among Fig. 5 a;
Fig. 6 is the connection diagram of electrostatic pulse generator and full-bridge rectifier in the DC pulse generator.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described.Obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
Secondly, the present invention is described in detail in conjunction with schematic diagram, and when the embodiment of the invention was described in detail in detail, for ease of explanation, described schematic diagram was example, and it should not limit the scope of protection of the invention at this.
In today of microelectronics and material technology high speed development, a large amount of novel microelectronic devices with several functions and Highgrade integration constantly are developed, and show unprecedented application prospect in the every field of people's daily life.Thereby develop and the mechanical energy that motion, vibration, fluid etc. exist naturally can be converted into electric energy and realize need not the technology of the microdevice of external power supply and be extremely important.At present, mechanical energy is converted into the principle that the generator of electric energy utilizes and mainly contains electrostatic induction, the piezoelectric property of electromagnetic induction and special material etc.Yet, the shortcoming such as the electrostatic induction electricity generator of having invented exists volume large, and applicability is narrow, induction generator and piezoelectric generator ubiquity complex structure have specific (special) requirements and the more high defective of cost to material.
The invention provides the electrostatic pulse generator simple in structure that a kind of mechanical energy that motion, vibration, fluid etc. are existed naturally is converted into electric energy, the power supply of coupling can be provided for microelectronic device.Electrostatic pulse generator of the present invention has layer structure, comprises successively the first electrode layer, the first insulating barrier, insulation support body, the second insulating barrier and the second electrode lay, and wherein, the material of described the first insulating barrier and the second insulating barrier exists friction electrode order poor; Described insulation support body makes between described the first insulating barrier and the second insulating barrier and forms the space, and under external force, described the first insulating barrier and the second insulating barrier contact with each other.Select to exist the first poor insulating barrier of friction electrode order and the material of the second insulating barrier, both can shift by electronics or ion generation surface charge in the moment that is in contact with one another, namely contact electric charge, make wherein a kind of surface of insulating layer with clean positive charge, and another kind of surface of insulating layer is correspondingly with net negative charge.Under the effect of external periodic force, the first insulating barrier contacts with the second insulating barrier generating period and separates two processes, produces respectively the pulse current of opposite direction, realizes the pulse generating.
Under external force, described the first insulating barrier and the second insulating barrier contact with each other, namely have at least one to be elastomeric material in the first insulating barrier, insulation support body and the second insulating thin layer, with assurance under external force, the first insulating barrier and the second insulating barrier can contact with each other.
Described in the present invention " friction electrode order ", refer to according to material the attraction degree of electric charge its ordering of carrying out, bi-material is in the moment that is in contact with one another, and positive charge is transferred to the material surface of friction electrode order Semi-polarity calibration from the negative material surface of friction electrode order Semi-polarity on contact-making surface.Up to now, the mechanism that does not also have explanation electric charge that a kind of unified theory can be complete to shift it is generally acknowledged that this electric charge shifts relevant with the surface work function of material, and the transfer on contact-making surface realizes the electric charge transfer by electronics or ion.Need to prove, friction electrode order is a kind of statistics based on experience, be that bi-material differs far away in this sequence, the probability that the positive negativity of the electric charge that produces and this sequence are consistent after the contact is just larger, and actual result is subject to the impact of many factors, such as material surface roughness, ambient humidity with whether relative friction etc. is arranged.If inventor's discovery bi-material is in the position that approaches in friction electrode order, the positive negativity of CHARGE DISTRIBUTION may and not meet the prediction of this sequence after the contact.Need to further specify and be, the transfer of electric charge does not need the relative friction between the bi-material, is in contact with one another as long as exist, and therefore, strictly speaking, the statement of friction electrode order is inaccurate, but uses till today owing to historical reasons always.
" contact electric charge " described in the present invention, refer to the material that there are differences two kinds of friction electrode order polarity in contact and after separating its surface with electric charge, it is generally acknowledged, this electric charge only is distributed in the surface of material, and the distribution depth capacity only is about 10 nanometers.Research is found, this electric charge can keep time of growing, according to factors such as humidity in the environment, its retention time is in a few hours even a couple of days of reaching, and the quantity of electric charge of its disappearance can be replenished by again contacting, therefore, the inventor thinks, the electric weight that contacts in the present invention electric charge can be similar to be thought and keep constant.Need to prove, the symbol of contact electric charge is the symbol of net charge, and namely at the aggregation zone that may have negative electrical charge with some areas of the material surface that just contacts electric charge, but the symbol of whole surperficial net charge is for just.
In the electrostatic pulse generator of the present invention, the key dimension parameter that affects output of a generator is the thickness of the first insulating barrier and the second insulating barrier and the distance in space between it.The thickness of two kinds of insulating material is thinner, and the space distance between two kinds of insulating material is larger, and the power output that obtains generator is also just larger.
Introduce in detail embodiments of the invention below in conjunction with accompanying drawing.
Embodiment one:
The electrostatic pulse generator of the present embodiment, the first insulating barrier and the second insulating barrier all adopt thin-film material, referring to Fig. 1, described mechanism of power generation is standby on substrate 101, generator has layer structure, described generator comprises the first electrode layer 102, the first insulating thin layer 103, insulation support body 104, the second insulating thin layer 105 and the second electrode lay 106 successively, and wherein, the material of described the first insulating thin layer 103 and the second insulating thin layer 105 exists friction electrode order poor; Described insulation support body 104 makes and forms space 107 between described the first insulating thin layer 103 and the second insulating thin layer 105, and under external force F effect, described the first insulating thin layer 103 and the second insulating thin layer 105 contact with each other.
The first insulating thin layer 103 in the present embodiment and the material of the second insulating thin layer 105 can adopt Inorganic Non-metallic Materials or high-molecular organic material, can be Inorganic Non-metallic Materials, perhaps high-molecular organic material.The material of the first insulating thin layer 103 can adopt glass, and the material of the second insulating thin layer 105 can adopt silicon.The material of the first insulating thin layer 103 and the second insulating thin layer 105 can be polymethyl methacrylate and polyimides.The material of the first insulating thin layer 103 and the second insulating thin layer 105 also can one is Inorganic Non-metallic Materials, and one is high-molecular organic material, and for example the material of the first insulating thin layer 103 and the second insulating thin layer 105 can be glass and polyimides.Have one in the first insulating thin layer 103, insulation support body 104 and the second insulating thin layer 105 at least for elastomeric material, guaranteeing under external force F effect, the first insulating thin layer 103 and the second insulating thin layer 105 can contact with each other.
The polarity difference of the material of the first insulating thin layer and the second insulating thin layer in friction electrode order directly affects and contacts charge density, polarity difference is larger, contact charge density is just larger, to between two electrode layers, produce larger electrical potential difference and more contact electric charge, thereby improve power output of the present invention.Therefore, be chosen at as much as possible one group of large insulating film material of friction electrode order Semi-polarity difference.
The key dimension parameter that affects the power output of generator of the present invention is the thickness of the first insulating thin layer and the second insulating thin layer and the distance in space between it.Experimental result and theoretical derive all provablely, the thickness of thin-film material is thinner, and the distance between two kinds of thin-film materials is larger, and the power output that obtains generator is also just larger.Therefore, in the situation that conditions permits such as mechanical strengths, in order to obtain larger power output, the first insulating thin layer and the second insulating thin layer need to be chosen thinner material and make the larger space of maintenance between the two.Need to prove, adopt the larger thin-film material of area can improve power output equally, but this method can not improve the density of power output.
In the present embodiment, be insulated supporter 104 between the first insulating thin layer 103 and the second insulating thin layer 105 and support formation space 107, insulation support body 104 can be supported on the edge of the first and second insulating thin layers.The structural design of insulation support body 104 and material select to consider the mechanical performance of the material of the first insulating thin layer 103 and the second insulating thin layer 105, if have a kind of elasticity macromolecular material at least in two kinds of insulating film materials of the first insulating thin layer 103 and the second insulating thin layer 105, then self elasticity of this macromolecular material can guarantee its recovery after deformation, thereby the space is kept, and therefore insulation support body can be selected insulating material such as having certain thickness double-sided tape in this case; If two kinds of insulating film materials are the rigid inorganic nonmetallic materials, then insulation support body need to adopt the spring structure with restoring force, perhaps adopt elastomeric material, after coming in contact under the effect of external force, can under the restoring force effect of insulation support body, separate and keep certain space to guarantee two kinds of insulating film materials.
The generating detailed process of the generator of the present embodiment is: under the effect of external force F, two kinds of insulating film materials of the first insulating thin layer 103 and the second insulating thin layer 105 are in contact with one another and at contact-making surface electric charge occur and shift.After external force removes, because the elasticity of two kinds of insulating film materials self or the restoring force of insulation support body separate between two kinds of insulating film materials, and at the opposite polarity contact electric charge of surface formation separately.Because the existence in space, the contact electric charge of positively charged there are differences at the electromotive force of the first electrode layer 102 and the second electrode lay 106 generations with the electronegative electric charge that contacts.In the situation that applied load is arranged, this electrical potential difference causes free electron to redistribute between two metal electrodes, and with this electrical potential difference of balance, thereby formation is by the pulse current of load.When external force applies again, because the space distance between two kinds of insulating film materials is changed, the electrical potential difference between two metal electrodes occurs again, and the CHARGE DISTRIBUTION that reaches balance is changed, and the electric charge of redistribution causes again the pulse current by applied load.Need to prove, in the situation that load access, two kinds of insulating film materials separate and approach process in the opposite electrical potential difference of generation, therefore, the flow direction of the pulse current in two processes is opposite.In sum, the generating function of the present embodiment is exported the pulse ac electricity with corresponding frequencies under the effect of external periodic force.
Need to prove, the shape of insulation support body 104 is not limited to the shape in the present embodiment, as long as the first insulating thin layer and the second insulating thin layer can be separated mutually.Can be the insulation support body of discrete point shape distribution, its edge also can exceed the edge of the first insulating thin layer and the second insulating thin layer.
In the present embodiment, the first electrode layer 102 and the second electrode lay 106 can adopt metal electrode layer, metal electrode layer in the present embodiment is to make by a surface deposition metallic film at the first insulating thin layer 103 and the second insulating thin layer 105 respectively, in the actual assembled process of generator, place in opposite directions on the surface that does not have metal electrode layer of the first insulating thin layer 103 and the second insulating thin layer 105, and make the certain space 107 of maintenance between the first insulating thin layer 103 and the second insulating thin layer 105 by insulation support body.The preparation of metal electrode layer can be adopted evaporation or sputtering method, and concrete metal material can be selected the good conductivity such as titanium or aluminium, cost is lower and the material good with the first insulating thin layer 103 and the second insulating thin layer 105 associativities.
In the middle of real work, the resistance value of applied load has a great impact real output at electrostatic pulse generator of the present invention.Along with the increase of load resistance value, the voltage at load two ends increases, and the electric current by load reduces, and the real output first increases and then decreases, and maximum appears.The inventor finds through many experiments, and the corresponding resistance value of power output maximum is in the megaohm magnitude, and therefore, the present invention can at utmost bring into play its effect in the situation of megaohm magnitude.Need to prove, " power output " used herein refers to the maximum of pulse current and the product of the maximum of the pulse voltage that forms at the load two ends, and namely instantaneous pole is high-power.
The power output of generator of the present invention is except being subject to the external environment factor, the size that comprises external force, outside the impact such as the resistance value of applied load, also be subject to the Design and manufacture of generator itself, comprise the selection of the material of the first insulating thin layer and the second insulating thin layer, and the size of each several part, and the impact of the physics and chemistry character of insulating thin layer material surface etc.
Embodiment two:
In the present embodiment, identical among the structure of electrostatic pulse generator and the embodiment one, here no longer repeat.Be with the difference of embodiment one, to the first insulating thin layer 103 of 107 and/or the material surface of the second insulating thin layer 105 have carried out chemical modification towards the space in the generator, reach the purpose that effectively improves power output.Two kinds of insulating film materials for the first insulating thin layer and the second insulating thin layer, be that positive material surface is introduced easier betatopic functional group (namely by force to electron cloud) in polarity, perhaps introduce the functional group (strong electrophilic group) of the electronics that more is easy to get for negative material surface in polarity, can both further improve electric charge in the transfer amount of Contact, thereby improve the power output of contact charge density and generator.
Comprise to electron cloud by force: amino, hydroxyl, alkoxyl etc.; Strong electrophilic group comprises: acyl group, carboxyl, nitro etc.
In the present embodiment, the first insulating thin layer 103 adopts polymethyl methacrylate materials, the second insulating thin layer 105 adopts polyimide material, introduce strong electron donating group on the polymethyl methacrylate materials surface, and entering strong electron-withdrawing group group on the polyimide material surface, this will further increase the density of contact electric charge.
Introducing amino method on the polymethyl methacrylate materials surface is: the method for utilizing plasma surface modification, atmosphere is nitrogen, nitrogen and hydrogen mixed gas or ammonia, under certain power, produce plasma, realize the introducing of polymethyl methacrylate materials surface amino groups.
The method of introducing nitro on the polyimide material surface is: utilize the method for plasma surface modification, atmosphere is the mist of oxygen and nitrogen, produces plasma under certain power, realizes the introducing in the polyimide material surface amino groups.
Can only carry out chemical modification to the first insulating barrier of electrostatic pulse engine or the material surface of the second insulating barrier in other embodiments of the invention.
It is generally acknowledged, material surface is more coarse, and the area that can effectively contact during the bi-material contact is just less, produces simultaneously contact electric charge still less, correspondingly obtains lower power output.But, the present inventor finds in research process, the roughness on the first insulating thin layer of electrostatic pulse generator or the insulating film material surface of the second insulating thin layer has larger impact to power output, introduces the power output that the special appearance with certain surface roughness can improve generator on the surface of insulating film material.
Embodiment three:
In the present embodiment, identical among the structure of electrostatic pulse generator and the embodiment one, here no longer repeat.Be with the difference of embodiment one, there is a surface to be the rough surface through physical modification in the first insulating thin layer surface relative with the second insulating thin layer, that is to say, under external force, when the first insulating thin layer contacts with the second insulating thin layer, there is a surface to be the rough surface through physical modification in the surface that contacts with each other.
Preferably, can prepare nano wire or nanometer stick array towards the surface in described space at the first insulating thin layer or the second insulating thin layer, the basic vertical surface with described the first insulating thin layer or the second insulating thin layer of described nano wire or nanometer rods is to reach the purpose that increases the insulating film material surface roughness.
Particularly, choose high molecular film material as example take the first insulating thin layer or the second insulating thin layer, prepare polymer nano-wire or nanometer stick array by on the surface that high energy particle is directed to coarse macromolecule membrane it being carried out selective etch, high energy particle wherein can be inductively coupled plasma, the gasification energetic ions that the pulse laser calcination produces etc., the physical modification method of this material surface can improve power output of the present invention widely.
The inventor thinks, when the high molecular film material of this method modification of process and another kind of thin-film material are in contact with one another, these high molecular nanometer rods can bend and produce local relative sliding on another kind of surface, there are some researches show, extra friction can increase contact charge density effectively, therefore, the existence of these nano wires or nanometer stick array can improve the power output of generator of the present invention.
Adopt polymethyl methacrylate film material and polyimide film material to make the electrostatic pulse generator as example take the first insulating thin layer or the second insulating thin layer, specifically introduce the preparation process of the electrostatic pulse generator of the present embodiment.
Referring to Fig. 2, deposit aluminium first electrode layer 202 of 200 nanometer thickness in the method for the substrate of glass 201 usefulness electron beam evaporation platings that are of a size of 1.5 centimetres of 1.5 cm x, method on aluminium the first electrode layer 202 surfaces with spin coated covers last layer polymethyl methacrylate (PMMA), and oven dry sclerosis under 180 ℃ condition, formation thickness is the first insulating thin layer 203 of 2 microns.
The second insulating thin layer 205 uses E.I.Du Pont Company to produce the polyimide film material that is of a size of 50 microns of 1.5 cm x, 1.5 cm x, deposit aluminium one electrode layer 206 of 200 nanometer thickness in the method for its one side electricity consumption bundle evaporation, deposit the approximately gold of 10 nanometer thickness at its another side with sputter.Afterwards, polyimide film is put into the inductively coupled plasma etching machine, the one side that deposits gold is carried out etching, pass into O
2, Ar and CF
4Gas, flow is controlled at respectively 10sccm, 15sccm and 30sccm, pressure is controlled at 15mTorr, working temperature is controlled at 55 ℃, power with 400 watts produces plasma, 100 watts power comes accelerate plasma, carries out approximately 5 minutes etching, the length that obtains being basically perpendicular to the second insulating thin layer 205 be about 1.5 microns polyphosphazene polymer acid imide nanometer stick array 205 ' as shown in Figure 3.
Use E.I.Du Pont Company to produce the polyimides double-sided tape that is of a size of 50 microns of 1.5 cm x, 0.1 cm x, surround into the insulation support body 204 of hollow at the edge of PMMA.Afterwards, the one side that polyimide film is prepared with nanometer stick array 205 ' is attached on the insulation support body 204, make and form space 207 between the first insulating thin layer 203 and the second insulating thin layer 205, under external force F2 effect, the nanometer stick array 205 ' on described the first insulating thin layer 203 and the second insulating thin layer 205 surfaces contacts with each other.So just formed the stratiform hollow structure based on two kinds of insulating film material polymethyl methacrylates (PMMA) and polyimide film material, as shown in Figure 2.
The roughness on insulating film material surface has larger impact to power output, it is generally acknowledged, material surface is more coarse, and the area that can effectively contact is just less, produces contact electric charge still less, thereby correspondingly obtains lower power output.But the inventor is surprised to find that, introduces the special appearance with certain surface roughness and can improve power output on the contrary.When choosing high molecular film material, prepare high molecular nanometer rod array by on the surface that high energy particle is directed to coarse macromolecule substrate it being carried out selective etch, high energy particle wherein can be inductively coupled plasma, the gasification energetic ions that the pulse laser calcination produces etc., the physical modification method of this material surface can improve power output of the present invention widely.The inventor thinks, when the high molecular film material of this method modification of process and another kind of thin-film material are in contact with one another, these high molecular nanometer rods can bend and produce local relative sliding on another kind of surface, there are some researches show, extra friction can increase contact charge density effectively, therefore, the existence of these nanometer stick arrays is helpful to the power output that improves generator.
Need to prove, electrostatic pulse generator among the embodiment one, two or three can directly adopt the first larger electrode layer of intensity, and not need substrate, for example adopting aluminium foil or aluminium sheet is the first electrode layer, directly can prepare the first insulating layer material of electrostatic pulse engine thereon.
Embodiment four:
In the present embodiment, under the effect of external periodic force, the electrostatic pulse generator has been carried out the measurement of open circuit voltage and short circuit current, the result respectively as shown in Figure 4 and Figure 5, Fig. 4 is electrostatic pulse generator open circuit voltage measurement result under external force, Fig. 5 a is electrostatic pulse generator short circuit current measurement result under external force, and Fig. 5 b is the short circuit current measurement result of a pulse period under external force among Fig. 5 a.Illustration among Fig. 4 and Fig. 5 is the electrostatic pulse generator of corresponding test result and the connection diagram of measuring system.Can see from experimental result, the connected mode of two electrode layers of generator and the both positive and negative polarity of measuring system is directly connected to the positive negativity of measuring the signal of telecommunication.
Inventor's discovery, there is certain scope in the size of external force to the impact of the power output of electrostatic pulse generator of the present invention.When external force hour, its variation can exert an influence to power output effectively, this is because larger external force will produce larger contact area and more effective friction, contacts charge density thereby improve; And when external force was larger, it changed for the impact of power output and not obvious, this be because when external force large to a certain degree the time, it is very limited on contact area and impact of effectively rubbing.Need explanation to be, described magnitude range is to be determined by the first insulating thin layer and the second choosing of insulation film layer material, and quantized result need to record by experiment.
Embodiment five:
Corresponding with electrostatic pulse generator of the present invention, the inventor also proposes a kind of DC pulse generator, comprise embodiment one, electrostatic pulse generator and full-bridge rectifier described in two or three, referring to Fig. 5, the output of electrostatic pulse generator 300 (is that the first electrode layer of electrostatic pulse generator is connected with the second electrode lay and is connected with the input of full-bridge rectifier 310, when the output of full-bridge rectifier 310 connected load, the alternating-current pulse electric current that electrostatic pulse generator 300 is exported can be rectified into dc pulse current later through full-bridge rectifier 310 and offer load.Experiment showed, that this DC pulse generator can be used for as direct current pulse power source the multinomial application of electrochemical field, comprise that metal plating, pollutant electrolysis and electrochemical metal are anticorrosion etc.Need to prove, because the resistance value of the actual pulse voltage at load two ends and load is relevant, therefore, need to carry out relevant design to guarantee that actual pulse voltage is greater than the critical voltage in the above-mentioned electrochemical applications to devices such as electrolysis tanks.
DC pulse generator in the present embodiment, during application in metal plating, use the method for electron beam evaporation plating to deposit the gold of one deck 50 nanometer thickness as Seed Layer at silicon chip, again with the silicon dioxide of plasma reinforced chemical vapour deposition method in gold surface deposition one deck 2 micron thick, afterwards at surperficial spin coated one deck photoresist of silicon dioxide, and baking and curing, utilize photoetching process to open the window of required figure at photoresist, with the inductively coupled plasma lithographic technique with the silicon dioxide travel direction ground etching that comes out, until expose Seed Layer.Afterwards, the negative pole "-" of this silicon test piece as negative electrode and DC pulse generator being linked to each other, the positive pole "+" of pure metallic silver as sacrificial anode and DC pulse generator linked to each other, is under 13 hertz the External Force Acting, to carry out 2 minutes electro-deposition in frequency.Negative electrode is taken out from electrolyte, with the buffering etching liquid that contains HF remaining silicon dioxide is all removed, clean and dry up with deionized water at last.Resulting three-dimensional deposit.Utilize the deposition results after the electrostatic pulse generator is implemented metal plating, through electron-microscopic analysis, show the deposit surface densification of adopting after DC pulse generator of the present invention carries out metal plating, and having very little crystallite dimension, the three-dimensional deposit that obtains is proved to be argent through energy spectrum analysis.
The pulse current of the DC pulse generator output in the present embodiment, can also be used to charge to energy-storage travelling wave tube, such as capacitor or lithium ion battery etc., and the electric energy that stores can be used for providing electric power for portable small-sized electronic equipment, is with a wide range of applications.
The above only is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction.Any those of ordinary skill in the art, do not breaking away from the technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement that technical solution of the present invention is made many possible changes and modification, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical solution of the present invention according to any simple modification, equivalent variations and the modification that technical spirit of the present invention is done above embodiment, all still belongs in the scope of technical solution of the present invention protection.
Claims (12)
1. an electrostatic pulse generator is characterized in that, described generator has layer structure, comprises successively the first electrode layer, the first insulating barrier, insulation support body, the second insulating barrier and the second electrode lay, wherein,
The material of described the first insulating barrier and the second insulating barrier exists friction electrode order poor;
Described insulation support body makes between described the first insulating barrier and the second insulating barrier and forms the space, and under external force, described the first insulating barrier and the second insulating barrier contact with each other.
2. electrostatic pulse generator according to claim 1, it is characterized in that, described the first insulating barrier or the second insulating barrier comprise nano wire or nanometer stick array towards the surface in described space, the basic vertical surface with described the first insulating barrier or the second insulating barrier of described nano wire or nanometer rods.
3. electrostatic pulse generator according to claim 1, it is characterized in that, described the first insulating barrier and/or the second insulating barrier are towards the surface process chemical modification in described space, making two insulating barrier Semi-polarities is that easy betatopic functional group is introduced on positive thin layer surface, perhaps introduces the functional group of the electronics that is easy to get for negative material surface in polarity.
4. each described electrostatic pulse generator is characterized in that according to claim 1-3, and described the first insulating barrier and/or the second insulating barrier are insulating thin layer.
5. each described electrostatic pulse generator is characterized in that according to claim 1-3, and described the first insulating barrier and/or the second insulating barrier are elastomeric material, and under the effect of external periodic force, described the first insulating barrier periodically contacts with the second insulating barrier.
6. each described electrostatic pulse generator is characterized in that according to claim 1-3, and described insulation support body is elastomeric material, and under the effect of external periodic force, described the first insulating barrier periodically contacts with the second insulating barrier.
7. each described electrostatic pulse generator according to claim 1-3, it is characterized in that, described the first insulating barrier, the second insulating barrier and/or insulation support body are elastomeric material, and under the effect of external periodic force, described the first insulating barrier periodically contacts with the second insulating barrier.
8. each described electrostatic pulse generator is characterized in that according to claim 1-3, and the material of described the first insulating barrier and/or the second insulating barrier is Inorganic Non-metallic Materials, high-molecular organic material or its combination.
9. electrostatic pulse generator according to claim 8, it is characterized in that, described the first insulating barrier is that thickness is 2 microns polymethyl methacrylate film layer, described the second insulating barrier is that thickness is 50 microns polymethyl methacrylate film, and described the second insulating barrier comprises that on the surface towards described space length is about 1.5 microns polyimide nano rod array, basic vertical and described the second insulating barrier of described nanometer rods.
10. each described electrostatic pulse generator is characterized in that according to claim 1-3, and described insulation support body is the polyimides double faced adhesive tape.
11. each described electrostatic pulse generator is characterized in that according to claim 1-3, described external force comprises that Low-Frequency Mechanical impacts and high-frequency mechanical vibration.
12. a DC pulse generator is characterized in that, comprises electrostatic pulse generator claimed in claim 1 and full-bridge rectifier, the output of described electrostatic pulse generator is connected with the input of described full-bridge rectifier.
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