CN103289680A - Preparation method of mixed fluorescent film for broadband silicon-based detector - Google Patents
Preparation method of mixed fluorescent film for broadband silicon-based detector Download PDFInfo
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- CN103289680A CN103289680A CN2013102288432A CN201310228843A CN103289680A CN 103289680 A CN103289680 A CN 103289680A CN 2013102288432 A CN2013102288432 A CN 2013102288432A CN 201310228843 A CN201310228843 A CN 201310228843A CN 103289680 A CN103289680 A CN 103289680A
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Abstract
The invention relates to a preparation method of a mixed fluorescent film for a broadband silicon-based detector, which comprises the following steps of: performing grinding pretreatment of Lumogen powder and Coronene powder respectively by use of an agate mortar, and then putting into a designated beaker; preparing a suspension colloidal solution by taking a toluene solution as a solvent and a nitrocotton colloidal solution as an adhesive; fetching a proper amount of the suspension colloidal solution, and dropwise adding on a photosensitive surface or quartz glass substrate; and meanwhile, performing vacuum adsorption of a sample on a spin coater, and performing spin coating to obtain a film. The preparation method does not damage the crystal structure characteristics of two fluorescent materials so as to guarantee the consistency of the luminescence characteristics of the two fluorescent materials before and after film formation; the film compensates for the defect of low quantum efficiency of a single fluorescent material at partial band; compared with the traditional thermal evaporation technology, the preparation technology is simple to operate, and the material utilization rate is remarkably improved; and the preparation method provided by the invention reduces the experimental cost, and is time-saving and efficient and favorable for the industrial development of a silicon-based imaging device.
Description
Technical field
The present invention relates to a kind of ultraviolet and strengthen coating technique, particularly a kind of preparation method of the mixing fluorescence membrane for the wide band silicon-based detector.
Background technology
Because light wave penetration depth in polysilicon of ultraviolet band is very little, general image device such as CCD, CMOS etc. are very weak in the ultraviolet band response.Since photodetectors such as CCD, CMOS dropped into commercial production, people just were devoted to seek a kind of method that can improve detector ultraviolet responding ability always.In order to improve detector to the susceptibility of uv-radiation, feasible a kind of way is the frequency conversion film that UV-light can be converted into visible light at device plating one deck.Fluorescent substance is a lot, but can the material that UV and EUV light convert visible light to also be needed to meet some requirements: at first, their emmission spectrum must mate with CCD, and wavelength region is as far as possible in wide SPECTRAL REGION.Secondly, they must have very high efficiency of conversion at UV and EUV in the switching process of visible light, and efficient has nothing to do with light intensity.Again, their chemical property is more stable, and decay is slow in irradiation and the placement.Lumogen or Coronene are the fluorescent substance that satisfies above-mentioned condition and are widely used, have when each having advantage again that each defectiveness: Coronene but shows very high quantum yield at the deep ultraviolet wave band, but relatively low in the efficiency of conversion of near ultraviolet band; Lumogen is opposite with the corresponding wave band of Coronene.Two kinds of simple substance can't be implemented in the significant response sensitivity of wideer ultraviolet band in actual use.
Summary of the invention
The present invention be directed to frequency conversion film that present UV-light is converted into visible light and can't be implemented in the problem of the significant response sensitivity of wideer ultraviolet band, a kind of preparation method of the mixing fluorescence membrane for the wide band silicon-based detector is proposed, the Lumogen powder is mixed spin-coating film with the Coronene powder by special process, this mixed film has overcome single kind of fluorescent material in the weak defective of subband response, has realized complementary enhancing in spectral response range.
Technical scheme of the present invention is: a kind of preparation method of the mixing fluorescence membrane for the wide band silicon-based detector specifically comprises the steps:
1) pre-treatment of respectively Lumogen powder and Coronene powder being ground with agate mortar is handled the back powder and is put into and specify beaker;
2) use toluene solution as solvent, nitro-cotton colloidal solution is put into the beaker that step 1) is equipped with fluorescent powder together as tackiness agent, in layoutprocedure, adopts magnetic stirring apparatus that mixing solutions is heated while stirring, and makes suspensoid solution;
3) get an amount of suspensoid solution, splash on the photosurface or on the quartz glass substrate, simultaneously, with the sample vacuum suck on the spin coating instrument, spin-coating film.
Described Lumogen powder and Coronene powder quality are than being 1:1.
Respectively take by weighing the Lumogen powder and the Coronene powder 0.2g that fully grind through agate mortar in the described step 1), step 2) measures the 10ml toluene solvant with graduated cylinder again, and draw the 6ml nitrocellulose solution with dropper, then they are fully mixed, the mixed conversion film emmission spectrum through the step 3) spin-coating film concentrates in 500nm～600nm wavelength region again.
Beneficial effect of the present invention is: the present invention is used for the preparation method of the mixing fluorescence membrane of wide band silicon-based detector, can not destroy the crystalline structure characteristic of two kinds of fluorescent materials, thereby has guaranteed the consistence of two kinds of fluorescent material film forming front and back characteristics of luminescences; With respect to traditional thermal evaporation technology, this preparation technology is simple to operate, and material use efficiency significantly improves, and the time-saving and efficiency, reduces experimental cost, is conducive to the industrialization development of silica-based image device.
Embodiment
The preparation method who is used for the mixing fluorescence membrane of wide band silicon-based detector:
At first, the pre-treatment that utilizes agate mortar respectively Lumogen powder and Coronene powder to be ground is put into after the processing and is specified beaker.
Secondly, utilize toluene solution as solvent, nitro-cotton colloidal solution as tackiness agent, put into the beaker that fluorescent powder is housed together, in layoutprocedure, adopt magnetic stirring apparatus that mixing solutions is heated while stirring, make suspensoid solution.
At last, get an amount of suspensoid solution, splash on the photosurface or on the quartz glass substrate, simultaneously, with the sample vacuum suck on the spin coating instrument, spin-coating film.
The prepared mixed conversion film of the present invention can effectively absorb UV-light, and excitation spectrum is contained deep ultraviolet near ultraviolet; Launch visible light then, emmission spectrum concentrates in 500nm～600nm wavelength region, and does not influence the transmitance of visible light.Simultaneously, this film has remedied single kind of fluorescent material in the low defective of subband quantum yield.
At detector photosurface upper abdomen membrane process:
One, quartz substrate 2 is cleaned, cleaning was divided into for three steps:
(1) clean quartz substrate repeatedly with dehydrated alcohol, bright and clean to substrate surface till;
(2) with ultrasonic cleaning machine substrate is carried out secondary treatment, heated wash 20 minutes;
(3) again substrate is repeatedly cleaned with ultrapure water.
Two, the preparation of colloidal sol:
(1) respectively takes by weighing lumogen S0795 powder and the coronene powder that 0.2g fully grinds through agate mortar with table balance respectively with table balance, be that the 1:1 quality is to the flask of level land, measure the 10ml toluene solvant with graduated cylinder again by concentration requirement, and with dropper absorption 6ml nitrocellulose solution, then they are fully mixed;
(2) whole flask is placed on the magnetic stirring apparatus, puts into magneton, adjust stirring velocity and Heating temperature after, start agitator, heated and stirred 30 minutes.
Three, spin-coating film:
After checking that each parts of sol evenning machine are normal, adjust even glue rotating speed and even glue time, the even glue of first low speed (800rpm) 15 seconds, back high speed (2000rpm) whirl coating 60 seconds, place the quartz substrate that cleans up in advance in the pallet central position, start-up routine is spared glue, spin-coating film.
Claims (3)
1. a preparation method who is used for the mixing fluorescence membrane of wide band silicon-based detector is characterized in that, specifically comprises the steps:
1) pre-treatment of respectively Lumogen powder and Coronene powder being ground with agate mortar is handled the back powder and is put into and specify beaker;
2) use toluene solution as solvent, nitro-cotton colloidal solution is put into the beaker that step 1) is equipped with fluorescent powder together as tackiness agent, in layoutprocedure, adopts magnetic stirring apparatus that mixing solutions is heated while stirring, and makes suspensoid solution;
3) get an amount of suspensoid solution, splash on the photosurface or on the quartz glass substrate, simultaneously, with the sample vacuum suck on the spin coating instrument, spin-coating film.
2. according to the preparation method of the described mixing fluorescence membrane for the wide band silicon-based detector of claim 1, it is characterized in that Lumogen powder and Coronene powder quality are than being 1:1 in the described step 1).
3. according to the preparation method of the described mixing fluorescence membrane for the wide band silicon-based detector of claim 1, it is characterized in that, respectively take by weighing the Lumogen powder and the Coronene powder 0.2g that fully grind through agate mortar in the described step 1), step 2) measures the 10ml toluene solvant with graduated cylinder again, and draw the 6ml nitrocellulose solution with dropper, then they are fully mixed, the mixed conversion film emmission spectrum through the step 3) spin-coating film concentrates in 500nm～600nm wavelength region again.
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| CN2013102288432A CN103289680A (en) | 2013-06-09 | 2013-06-09 | Preparation method of mixed fluorescent film for broadband silicon-based detector |
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| CN2013102288432A CN103289680A (en) | 2013-06-09 | 2013-06-09 | Preparation method of mixed fluorescent film for broadband silicon-based detector |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105968812A (en) * | 2016-05-24 | 2016-09-28 | 中国科学院长春光学精密机械与物理研究所 | Application of polydimethylsiloxane, fluorescent film and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20100043875A1 (en) * | 2008-08-19 | 2010-02-25 | Sabic Innovative Plastics Ip B.V. | Luminescent solar collector |
| CN102141437A (en) * | 2010-02-03 | 2011-08-03 | 清华大学 | Method for remarkably improving ultraviolet response of optical detector and detector with remarkably improved ultraviolet response |
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2013
- 2013-06-09 CN CN2013102288432A patent/CN103289680A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100043875A1 (en) * | 2008-08-19 | 2010-02-25 | Sabic Innovative Plastics Ip B.V. | Luminescent solar collector |
| CN102141437A (en) * | 2010-02-03 | 2011-08-03 | 清华大学 | Method for remarkably improving ultraviolet response of optical detector and detector with remarkably improved ultraviolet response |
Non-Patent Citations (2)
| Title |
|---|
| M. W. COWENS等: "Coronene and liumogen as VUV sensitive coatings for Si CCD imagers: a comparison", 《APPLIED OPTICS》, vol. 19, 31 December 1980 (1980-12-31), pages 3727 - 3728 * |
| 姜霖等: "紫外增强Lumogen薄膜旋涂法制备及其性能表征", 《光谱学与光谱分析》, vol. 33, 28 February 2013 (2013-02-28), pages 468 - 470 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105968812A (en) * | 2016-05-24 | 2016-09-28 | 中国科学院长春光学精密机械与物理研究所 | Application of polydimethylsiloxane, fluorescent film and preparation method thereof |
| CN105968812B (en) * | 2016-05-24 | 2019-03-12 | 中国科学院长春光学精密机械与物理研究所 | The purposes of dimethyl silicone polymer, fluorescence membrane and preparation method thereof |
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Application publication date: 20130911 |