CN103286871A - Clamping device for workpiece mounting table of multi-wire cutting machine - Google Patents
Clamping device for workpiece mounting table of multi-wire cutting machine Download PDFInfo
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- CN103286871A CN103286871A CN2013102172421A CN201310217242A CN103286871A CN 103286871 A CN103286871 A CN 103286871A CN 2013102172421 A CN2013102172421 A CN 2013102172421A CN 201310217242 A CN201310217242 A CN 201310217242A CN 103286871 A CN103286871 A CN 103286871A
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- erecting bed
- oil
- brilliant holder
- workpiece
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- 238000005520 cutting process Methods 0.000 title abstract description 5
- 239000003921 oil Substances 0.000 claims abstract description 45
- 239000010720 hydraulic oil Substances 0.000 claims abstract description 18
- 239000000126 substance Substances 0.000 claims description 13
- 230000007306 turnover Effects 0.000 claims description 9
- 241000397426 Centroberyx lineatus Species 0.000 claims description 6
- 239000003208 petroleum Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000009471 action Effects 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 abstract 3
- 238000007599 discharging Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000003754 machining Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
A clamping device for a workpiece mounting table of a multi-wire cutting machine comprises the workpiece mounting table bonded with a workpiece. The workpiece mounting table is provided with a tenon which is used for hanging the long groove of the through hole and is inserted into the left dovetail groove and the right dovetail groove below the crystal support clamping worktable. A distributor with an inner cavity oil way inside and an oil inlet and outlet hole outside is arranged in the middle of the concave center of the crystal support clamping worktable. Six oil cylinders connected with the oil inlet and outlet holes of the oil way distributor through oil conveying pipes are arranged on two sides of the distributor. The splicing caps connected with the lower ends of the pressing rods arranged on the oil cylinders are positioned in left and right dovetail grooves of the crystal support clamping workbench and are respectively spliced in hanging through hole elongated slots of two tenons of the workpiece mounting table. The inner cavity of the oil way distributor is communicated with the oil inlet sealing stop block through a hydraulic oil inlet and outlet seat. The pressing rod can move up and down or lock or loosen the workpiece mounting table under the action of the oil cylinder. The invention has simple structure, high workpiece processing precision, easy automatic control, manual feeding and discharging of workpieces, short processing time and high work efficiency.
Description
Technical field
The present invention relates to a kind of frock for clamping work pieces, particularly relate to a kind of multi-wire saw component erecting bed clamping device.
Background technology
In the semiconductor equipment manufacturing, high efficiency, the multi-line cutting machine that production capacity is big has obtained using widely, work system is the key component in the cutting machine, it should realize that feeding reposefully drives, safety is firm when guaranteeing to be processed placement again, thereby guarantees finishing smoothly of workpiece processing technology.
Existing multi-wire saw component clamping means mainly adopt two kinds.First kind is that the wedge shape erecting bed that will be stained with workpiece directly is placed in the mounting groove, after workpiece being clamped from a side of clamping table mounting groove with screw, carries out machining.Adopt this method, screw for a long time repeatedly carries out dismounting, and screwed hole is easy to wear, and screw easily gets loose, and influences the suface processing quality of product.Second method be be stained with the wedge shape erecting bed of workpiece cooperate with wedge-shaped slot on the clamping table install after, adopt cam link mechanism from the same side tapered wall to be clamped, utilize the height point of cam to withstand the polished rod that contacts with wedge surface.This method is the reliability height comparatively speaking, but the often unbalance stress that operates, again can not online detection and On-line Control, still influence the suface processing quality of product.
Summary of the invention
The objective of the invention is to provide a kind of simple in structure, easy to use safe, can improve the upper and lower material efficient of workpiece, can control automatically again, the workpiece that is bonded on the workbench is both reliable and stable, the multi-wire saw component erecting bed clamping device that machining accuracy is high again.
The objective of the invention is to realize.Multi-wire saw component erecting bed clamping device of the present invention comprises the tenon of two swallow-tail forms that arrange on the workpiece erecting bed that is bonded with workpiece and the workpiece erecting bed, also include a rectangular-shaped crystalline substance holder clamping table, the following width both sides of brilliant holder clamping table are respectively equipped with a lower-left groove and bottom right groove of strip, be connected with a left gib block of brilliant holder on the bossing of lower-left groove left side edge, be connected with a right gib block of brilliant holder on the bossing of bottom right groove right side edge, be connected with a middle gib block of brilliant holder on the middle common bossing of lower-left groove and bottom right groove, the lower-left groove, gib block forms the left side dovetail groove jointly in the middle of the brilliant left gib block of holder and the brilliant holder, the bottom right groove, gib block forms the right side dovetail groove jointly in the middle of the brilliant right gib block of holder and the brilliant holder, a left side, right two dovetail grooves connect the workpiece erecting bed by two swallow-tail form tenon plugs on the workpiece erecting bed, two tenons on the workpiece erecting bed 1 are on a left side, has a round horizontal linear pull sliding trace in right two dovetail grooves, multi-wire saw component erecting bed clamping device of the present invention is characterized in that: respectively be provided with one on each tenon of described workpiece erecting bed and articulate the through hole elongated slot, described brilliant holder clamping table top is ' recessed ' type with four peripheries, the recessed heart bottom mid portion of the crystalline substance holder clamping table of described ' recessed ' type is provided with a boss, an affixed oil circuit distributor on the boss, described oil circuit inner skeleton is established an inner chamber oil circuit, some turnover oilholes are established in the outside, the both sides of described brilliant holder clamping table bottom oil circuit distributor are laid with three mounting bases separately, a hydraulic jack respectively is installed on six mounting bases, described each hydraulic jack all is connected with the turnover oilhole of described oil circuit distributor by a petroleum pipeline, described hydraulic jack is provided with brilliant holder compressor arm, the lower end of described each brilliant holder compressor arm all is in a described left side by the dirt-proof boot that crystalline substance holder clamping table bottom arranges, in right two dovetail grooves, the lower end of described brilliant holder compressor arm is equipped with and compresses the assembly cap, compressing on the described brilliant holder compressor arm pieced together cap and all is plugged on articulating in the through hole elongated slot of two tenons of described workpiece erecting bed, be provided with a hydraulic oil i/o block above the described oil circuit distributor length direction left end, the oil through at described hydraulic oil i/o block center is communicated with the inner chamber oil circuit of oil circuit distributor 4 by the turnover oilhole of described oil circuit distributor 4, the affixed cover plate in peripheral flange upper end of described brilliant holder clamping table, block 15 is sealed in the oil-feed that is connected with a hydraulic oil on the described cover plate, the seal washer of the oilhole on the described cover plate between cover plate and hydraulic oil i/o block and the oil through UNICOM of described hydraulic oil i/o block.
Multi-wire saw component erecting bed clamping device of the present invention, wherein said brilliant holder compressor arm has a round straight-line trajectory up and down at hydraulic jack.
Multi-wire saw component erecting bed clamping device of the present invention, compressing on the wherein said brilliant holder compressor arm pieced together cap and had a round horizontal linear pull sliding trace in the through hole elongated slot the articulating of two tenons of described workpiece erecting bed, the movement locus of two tenons of described workpiece erecting bed in left and right two dovetail grooves with compress that to piece together the movement locus of cap in two tenons simultaneously servo-actuated in the same way.
Multi-wire saw component erecting bed clamping device difference from prior art of the present invention is that multi-wire saw component erecting bed clamping device of the present invention is the isolated plant that clamps safely at workpiece in the multi-line cutting machine.It drives brilliant holder compressor arm by hydraulic jack, locks the workpiece erecting bed that is bonded with workpiece by crystalline substance holder compressor arm by two tenons of workpiece erecting bed, makes workpiece fixed stable, the machining accuracy height.Multi-wire saw component erecting bed clamping device of the present invention is simple in structure, is easy to automatic control, does not need by any attachment tools, can finish the upper and lower material of workpiece by hand.Workpiece process is safe and reliable, can shorten the whole processing technology time, improves working (machining) efficiency, can avoid the damage of workpiece again, guarantees the surface quality of workpiece.
Below in conjunction with accompanying drawing multi-wire saw component erecting bed clamping device of the present invention is described further.
Description of drawings
Fig. 1 looks schematic diagram for the structure master of multi-wire saw component erecting bed clamping device of the present invention.
Fig. 2 is the structure schematic top plan view of multi-wire saw component erecting bed clamping device of the present invention.
Fig. 3 looks schematic diagram for the structure right side of multi-wire saw component erecting bed clamping device of the present invention.
Fig. 4 looks the A-A generalized section of schematic diagram for Fig. 1 master.
Fig. 5 looks the B-B generalized section of schematic diagram for Fig. 2 master.
Fig. 6 looks schematic diagram for the C-C right side that schematic diagram is looked on Fig. 3 right side.
Among the figure: gib block, 10 dirt-proof boots, 11 compress and piece together cap, the right gib block of 12 brilliant holders, 13 hydraulic oil i/o blocks, 14 seal washers, 15 oil-feeds and seal block, 16 workpiece in the middle of 1 workpiece erecting bed, the left gib block of 2 brilliant holders, 3 brilliant holder clamping tables, 4 oil circuit distributors, 5 petroleum pipelines, 6 cover plates, 7 hydraulic jacks, 8 brilliant holder compressor arms, the 9 brilliant holders.
The specific embodiment
As Fig. 1, Fig. 2, shown in Figure 3, multi-wire saw component erecting bed clamping device of the present invention comprises the tenon of two swallow-tail forms that arrange on the workpiece erecting bed 1 that is bonded with workpiece 16 and the workpiece erecting bed 1.Outward appearance asks the oil-feed of gib block 9 in the middle of left gib block 2, brilliant holder clamping table 3, cover plate 6, brilliant holder compressor arm 8, the brilliant holder, the brilliant right gib block 12 of holder and hydraulic oil to seal block 15 by crystalline substance to constitute.
As Fig. 1～shown in Figure 6, multi-wire saw component erecting bed clamping device of the present invention also contains a rectangular-shaped crystalline substance holder clamping table 3.The following width both sides of brilliant holder clamping table 3 are respectively equipped with a lower-left groove and bottom right groove of strip.Be connected with a left gib block 2 of brilliant holder on the bossing of lower-left groove left side edge.Be connected with a right gib block 12 of brilliant holder on the bossing of bottom right groove right side edge.Be connected with a middle gib block 9 of brilliant holder on the middle common bossing of lower-left groove and bottom right groove.The gib block 9 common left side dovetail grooves that form in the middle of lower-left groove, the brilliant left gib block 2 of holder and the brilliant holder, the gib block 9 common right side dovetail grooves that form in the middle of bottom right groove, the brilliant right gib block 12 of holder and the brilliant holder.Left and right two dovetail grooves connect described workpiece erecting bed 1 by the tenon plug of two swallow-tail forms on the workpiece erecting bed 1.
Respectively be provided with one on each tenon of workpiece erecting bed 1 and articulate the through hole elongated slot.Brilliant holder clamping table 3 tops are ' recessed ' type with four peripheries.The recessed heart bottom mid portion of the crystalline substance holder clamping table 3 of ' recessed ' type is provided with a boss, an affixed oil circuit distributor 4 on the boss.An inner chamber oil circuit is established in oil circuit distributor 4 inside, and some turnover oilholes are established in the outside.The both sides of brilliant holder clamping table 3 bottom oil circuit distributors 4 are laid with three mounting bases separately, and a hydraulic jack 7 respectively is installed on six mounting bases.Each hydraulic jack 7 all is connected with the turnover oilhole of oil circuit distributor 4 by a petroleum pipeline 5.Hydraulic jack 7 is provided with brilliant holder compressor arm 8, and the lower end of each brilliant holder compressor arm 8 all is in left and right two dovetail grooves by the dirt-proof boot 10 that crystalline substance holder clamping table 3 bottoms arrange.The lower end of brilliant holder compressor arm 8 is equipped with to compress pieces together cap 11, and compressing on the brilliant holder compressor arm 8 pieced together cap 11 and all be plugged on articulating in the through hole elongated slot of 1 two tenons of workpiece erecting bed.Be provided with a hydraulic oil i/o block 13 above the oil circuit distributor 4 length direction left ends, the oil through at hydraulic oil i/o block 13 centers is communicated with the inner chamber oil circuit of oil circuit distributor 4 by the turnover oilhole of oil circuit distributor 4.The affixed cover plate 6 in peripheral flange upper end of brilliant holder clamping table 3.Block 15 is sealed in the oil-feed that is connected with a hydraulic oil on the cover plate 6, and oil-feed is sealed the center oil through of block 15 by the seal washer 14 of the oilhole on the cover plate 6 between cover plate 6 and hydraulic oil i/o block 13 and the oil through UNICOM of hydraulic oil i/o block 13.
Brilliant holder compressor arm 8 has a round straight-line trajectory up and down at hydraulic jack 7.Two tenons on the workpiece erecting bed 1 have a round horizontal linear pull sliding trace in left and right two dovetail grooves.Compressing on the brilliant holder compressor arm 8 pieced together cap 11 and had a round horizontal linear pull sliding trace in the through hole elongated slot the articulating of two tenons of workpiece erecting bed 1.The movement locus of 1 two tenons of workpiece erecting bed in left and right two dovetail grooves with compress that to piece together the movement locus of cap 11 in two tenons simultaneously servo-actuated in the same way.
When multi-wire saw component erecting bed clamping device of the present invention is worked, at first cementation there is workpiece erecting bed 1 tenon of workpiece to push and plug in the left and right sides dovetail groove of crystalline substance holder clamping table 3, after control system has monitored the workpiece insertion, start the Hydraulic Station system and carry out pressure release, under action of pressure, crystalline substance holder compressor arm 8 on the hydraulic jack 7 drives the brilliant backing pressure that is threaded in brilliant holder compressor arm 8 bottoms tightly to be pieced together cap 11 and moves upward, thereby workpiece erecting bed 1 is fastened in the left and right sides dovetail groove of brilliant holder clamping table 3.When workpiece is finished the processing dismounting, import a signal by touch-screen, after this moment, control system was received signal, start the pressurization of Hydraulic Station system, under the effect of hydraulic coupling, be sleeved on the crystalline substance holder compressor arm 8 on the hydraulic jack 7, drive the brilliant backing pressure be threaded in brilliant holder compressor arm 8 bottoms and tightly piece together cap 11 and move downward, tightening state is untied, and can carry out the dismounting of workpiece erecting bed 1.
Above-described embodiment is described preferred embodiment of the present invention; be not that scope of the present invention is limited; design under the prerequisite of spirit not breaking away from the present invention; various distortion and improvement that those of ordinary skills make technical scheme of the present invention all should fall in the definite protection domain of claims of the present invention.
Claims (3)
1. multi-wire saw component erecting bed clamping device, comprise that the workpiece erecting bed (1) that is bonded with workpiece (16) and workpiece erecting bed (1) go up the tenon of two swallow-tail forms that arrange, also include a rectangular-shaped crystalline substance holder clamping table (3), the following width both sides of brilliant holder clamping table (3) are respectively equipped with a lower-left groove and bottom right groove of strip, be connected with a brilliant holder left gib block (2) on the bossing of lower-left groove left side edge, be connected with a brilliant holder right gib block (12) on the bossing of bottom right groove right side edge, be connected with a middle gib block (9) of brilliant holder on the middle common bossing of lower-left groove and bottom right groove, the lower-left groove, the common left side dovetail groove that forms of gib block (9) in the middle of brilliant holder left gib block (2) and the brilliant holder, the bottom right groove, gib block (9) forms the right side dovetail groove jointly in the middle of brilliant holder right gib block (12) and the brilliant holder, a left side, right two dovetail grooves connect workpiece erecting bed (1) by two swallow-tail form tenon plugs on the workpiece erecting bed (1), two tenons on the workpiece erecting bed (1) are on a left side, has a round horizontal linear pull sliding trace in right two dovetail grooves, this multi-wire saw component erecting bed clamping device is characterized in that: respectively be provided with one on each tenon of described workpiece erecting bed (1) and articulate the through hole elongated slot, described brilliant holder clamping table (3) top is ' recessed ' type with four peripheries, the recessed heart bottom mid portion of the crystalline substance holder clamping table (3) of described ' recessed ' type is provided with a boss, an affixed oil circuit distributor (4) on the boss, an inner chamber oil circuit is established in described oil circuit distributor (4) inside, some turnover oilholes are established in the outside, the both sides of described brilliant holder clamping table (3) bottom oil circuit distributor (4) are laid with three mounting bases separately, a hydraulic jack (7) respectively is installed on six mounting bases, described each hydraulic jack (7) all is connected by the turnover oilhole of a petroleum pipeline (5) with described oil circuit distributor (4), described hydraulic jack (7) is provided with brilliant holder compressor arm (8), the lower end of described each brilliant holder compressor arm (8) all is in a described left side by the dirt-proof boot (10) that brilliant holder clamping table (3) bottom arranges, in right two dovetail grooves, the lower end of described brilliant holder compressor arm (8) is equipped with to compress pieces together cap (11), compressing on the described brilliant holder compressor arm (8) pieced together cap (11) and all is plugged on articulating in the through hole elongated slot of (1) two tenon of described workpiece erecting bed, be provided with a hydraulic oil i/o block (13) above described oil circuit distributor (4) the length direction left end, the oil through at described hydraulic oil i/o block (13) center is communicated with the inner chamber oil circuit of oil circuit distributor (4) by the turnover oilhole of described oil circuit distributor (4), the peripheral flange upper end affixed cover plate (6) of described brilliant holder clamping table (3), block (15) is sealed in the oil-feed that is connected with a hydraulic oil on the described cover plate (6), the seal washer 14 of the oilhole on the described cover plate (6) between cover plate (6) and hydraulic oil i/o block (13) and the oil through UNICOM of described hydraulic oil i/o block (13).
2. multi-wire saw component erecting bed clamping device according to claim 1 is characterized in that: the round straight-line trajectory of described brilliant holder compressor arm (8) about hydraulic jack (7) has one.
3. multi-wire saw component erecting bed clamping device according to claim 1 and 2, it is characterized in that: compressing on the described brilliant holder compressor arm (8) pieced together cap (11) and had a round horizontal linear pull sliding trace in the through hole elongated slot the articulating of two tenons of described workpiece erecting bed (1), the movement locus of (1) two tenon of described workpiece erecting bed in left and right two dovetail grooves with compress that to piece together the movement locus of cap (11) in two tenons simultaneously servo-actuated in the same way.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102172421A CN103286871A (en) | 2013-06-04 | 2013-06-04 | Clamping device for workpiece mounting table of multi-wire cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102172421A CN103286871A (en) | 2013-06-04 | 2013-06-04 | Clamping device for workpiece mounting table of multi-wire cutting machine |
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| Publication Number | Publication Date |
|---|---|
| CN103286871A true CN103286871A (en) | 2013-09-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013102172421A Pending CN103286871A (en) | 2013-06-04 | 2013-06-04 | Clamping device for workpiece mounting table of multi-wire cutting machine |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108956073A (en) * | 2018-07-19 | 2018-12-07 | 苏州百搭王者物流技术有限公司 | A kind of large vibration table Fast Installation structure |
| CN109483278A (en) * | 2018-12-06 | 2019-03-19 | 安徽省人防建筑设计研究院 | A kind of civil air defense constructions and installations Work treatment installation |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07205140A (en) * | 1994-01-10 | 1995-08-08 | Tokyo Seimitsu Co Ltd | Wafer taking-out method for wire saw |
| JPH09193140A (en) * | 1996-01-12 | 1997-07-29 | Mitsubishi Materials Corp | Wire type cutting work device |
| CN201950740U (en) * | 2011-01-06 | 2011-08-31 | 张万进 | Workpiece feeding and discharging clamping device of multi-wire cutting machine |
| CN102198706A (en) * | 2011-05-12 | 2011-09-28 | 无锡机床股份有限公司 | Workpiece clamping mechanism of multi-wire cutting machine |
| CN202399424U (en) * | 2011-12-31 | 2012-08-29 | 株洲德瑞佳科技有限公司 | Silicon wafer cutting pneumatic-hydraulic linkage self-resetting clamping device |
| CN102672830A (en) * | 2011-03-17 | 2012-09-19 | 苏州赫瑞特电子专用设备科技有限公司 | Multi-line cutting machine workbench system |
-
2013
- 2013-06-04 CN CN2013102172421A patent/CN103286871A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07205140A (en) * | 1994-01-10 | 1995-08-08 | Tokyo Seimitsu Co Ltd | Wafer taking-out method for wire saw |
| JPH09193140A (en) * | 1996-01-12 | 1997-07-29 | Mitsubishi Materials Corp | Wire type cutting work device |
| CN201950740U (en) * | 2011-01-06 | 2011-08-31 | 张万进 | Workpiece feeding and discharging clamping device of multi-wire cutting machine |
| CN102672830A (en) * | 2011-03-17 | 2012-09-19 | 苏州赫瑞特电子专用设备科技有限公司 | Multi-line cutting machine workbench system |
| CN102198706A (en) * | 2011-05-12 | 2011-09-28 | 无锡机床股份有限公司 | Workpiece clamping mechanism of multi-wire cutting machine |
| CN202399424U (en) * | 2011-12-31 | 2012-08-29 | 株洲德瑞佳科技有限公司 | Silicon wafer cutting pneumatic-hydraulic linkage self-resetting clamping device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108956073A (en) * | 2018-07-19 | 2018-12-07 | 苏州百搭王者物流技术有限公司 | A kind of large vibration table Fast Installation structure |
| CN108956073B (en) * | 2018-07-19 | 2021-08-06 | 苏州百搭王者物流技术有限公司 | Quick mounting structure of large-scale shaking table |
| CN109483278A (en) * | 2018-12-06 | 2019-03-19 | 安徽省人防建筑设计研究院 | A kind of civil air defense constructions and installations Work treatment installation |
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Application publication date: 20130911 |