CN103278472A - Fourier infrared spectrometer and sample gas absorption cell - Google Patents
Fourier infrared spectrometer and sample gas absorption cell Download PDFInfo
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- CN103278472A CN103278472A CN2013101665915A CN201310166591A CN103278472A CN 103278472 A CN103278472 A CN 103278472A CN 2013101665915 A CN2013101665915 A CN 2013101665915A CN 201310166591 A CN201310166591 A CN 201310166591A CN 103278472 A CN103278472 A CN 103278472A
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Abstract
The invention discloses a Fourier infrared spectrum detection device. The Fourier infrared spectrum detection device comprises a sample gas absorption cell for absorbing sample gas, an interferometer for generating an interference optical signal for the light beam which passes through the sample gas in the sample gas absorption cell, a photoelectric detector for converting the interference optical signal into a voltage signal, and a control computer for performing Fourier transform on the voltage signal to convert the interference pattern into a spectrum chart, wherein the computer is controlled to solve the concentration information of the sample gas by inversion calculation, and optical adjustment lenses are arranged in the sample gas absorption cell so as to increase the optical distance. According to the Fourier infrared spectrum detection device, the optical adjustment lenses are additionally arranged in the sample gas absorption cell so as to change the light beam propagation path and increase the length of optical distance, and sequentially, the lower detection limit of the signal concentration is increased.
Description
Technical field
The present invention relates to infrared spectrum and learn a skill, relate in particular to for Fourier infrared spectrograph and the sample gas absorption cell that is used for Fourier infrared spectrograph.
Background technology
Infrared spectrum belongs to molecular vibration spectrum, carries out spectrum elucidation by the spectrum to molecular vibration, can obtain the information of molecular structure.Compare with other analytical instrument, infrared spectrum can detect any gaseous state, liquid state and solid sample, and the restriction to some extent in this of other analytical instrument.Especially for organic compound, because every kind of compound all has infrared absorption, especially the infrared spectrum energy of organic compound provides abundant structures information, thereby especially for organic compound, the infrared spectrum instrument is a kind of considerable structure detection analyzing device.Infra-red sepectrometry is mainly used in qualitative evaluation and the quantitative test of various materials as the useful means that detect the amalyzing substances structure, and between can analyzing molecules and intramolecular interaction, thereby has obtained using widely in chemical analysis field.The infrared spectrum instrument has also obtained strong development.From lens type color dispersion-type infrared spectrometer the earliest, to grating type chromatic dispersion formula infrared spectrometer, arrive the interfere type infrared spectrometer again, Fourier infrared spectrograph has appearred in the fast development along with computer technology.Fourier infrared spectrograph can be used as a representative of interfere type infrared spectrum instrument, and signal to noise ratio (S/N ratio) is higher, and resolution is also higher.Fourier infrared spectrograph also possesses the Computer Processing function usually, can be applied to various different samples, can be used for the quality monitoring of sample easily and effectively.
Fourier infrared spectrograph utilizes infrared radiation to enter interferometer mainly based on the fourier transform infrared spectroscopy ultimate principle, produces interferogram after interferometer modulation light splitting, then the interferogram that measures is carried out Fourier transform and obtains the infrared radiating light spectrogram.The Fourier transform infrared spectroscopy technology is as a kind of spectroscopy technology, can be specifically designed to measurement of species infrared absorption, transmit.
When Fourier infrared spectrograph is measured the concentration information of gas to be measured, the infrared beam of infrared light supply emission passes dusty gas absorption of sample to be measured pond, produce interference light signal after entering interferometer, interference light signal becomes voltage signal after the photodetector conversion, the voltage signal that the capture card collection produces, and by computer control, the voltage signal that receives is carried out Fourier transform, by Fourier transform interferogram is converted to spectrogram, inversion solution is calculated the concentration information of gas to be measured.Wherein, dusty gas absorption of sample to be measured pond is in case setting is finished, and the detection lower limit of the gas concentration signal that can measure has just had restriction.If gas concentration to be measured has exceeded the detection lower limit of the gas concentration signal that can measure, need to change the detection lower limit of the gas concentration signal that can measure, this just need change whole Fourier infrared spectrograph again.This will cause the rising of measuring cost, more may therefore can't finish the measurement task.
Therefore, need to propose a kind of Fourier infrared spectrograph, have the detection lower limit of the gas concentration signal that can expand.
Summary of the invention
For solving problem proposed by the invention, the purpose of this invention is to provide a kind of sample gas absorption cell for the Fourier infrared spectrum pick-up unit, optics is set in the sample gas absorption cell adjusts eyeglass, can increase light path, the concentration signal that improves the Fourier infrared spectrum device detects lower limit.
Described optics is adjusted eyeglass and is comprised the principal reflection mirror that is arranged on sample gas absorption cell second side and the secondary mirror that is arranged on first side relative with principal reflection mirror.
Described optics is adjusted eyeglass and is also comprised the fine motion adjustment mirror that is arranged on first side relative with principal reflection mirror, is positioned at the below of secondary mirror.
Described sample gas absorption cell comprises the entrance window mouth mirror that is arranged on sample gas absorption cell first side and the exit window mouth mirror that is arranged on sample gas absorption cell second side relative with the entrance window mouth mirror, the entrance window mouth mirror is used for incident beam incident sample gas absorption cell, and the exit window mouth mirror is used for outgoing beam outgoing sample gas absorption cell.
Incident beam is parallel with the bottom surface of described sample gas absorption cell with outgoing beam, and the bottom surface of described entrance window mouth mirror and described exit window mouth mirror and described sample gas absorption cell is angled, and incident beam is avoided vertical incidence and vertical outgoing with outgoing beam.
The bottom surface of described principal reflection mirror, secondary mirror and fine motion adjustment mirror and sample gas absorption cell is angled.
Described fine motion is adjusted mirror and can be adjusted by trace, makes outgoing beam and incident beam keeping parallelism.
The plating of surface, the inside of the seal chamber of described sample gas absorption cell scribbles low-refraction, inside plating that adsorption coefficient is little is coated with material.
It is the Teflon material that described inner plating is coated with material.
Another object of the present invention provides a kind of Fourier infrared spectrum pick-up unit, comprise the sample gas absorption cell that absorbs sample gas, the light beam that passes the sample gas in the sample gas absorption cell is produced the interferometer of interference light signal, interference light signal is transformed into the photoconductive detector of voltage signal, voltage signal is carried out Fourier transform interferogram is converted to the control computing machine of spectrogram, control computing machine inversion solution is calculated the concentration information of sample gas, optics is set in the described sample gas absorption cell adjusts eyeglass, can increase light path.
The present invention adjusts eyeglass by increase optics in sample gas absorption cell cavity, changes propagation path, reaches the purpose that increases optical path length, thereby the concentration signal that improves Fourier infrared spectrograph detects lower limit, improves the sensitivity that detects.
Description of drawings
Fig. 1 is Fourier infrared spectrograph theory of constitution synoptic diagram according to an embodiment of the invention;
Fig. 2 is sample gas absorption cell according to an embodiment of the invention.
Embodiment
Fig. 1 is Fourier infrared spectrograph theory of constitution synoptic diagram according to an embodiment of the invention.As shown in Figure 1, the infrared beam 101 of infrared light supply emission passes sample gas absorption cell 103.According to one embodiment of present invention, the infrared beam 101 of infrared light supply emission passes sample gas absorption cell 103 after collimating.Sample gas absorption cell 103 is provided with the sample gas entrance 102 that enters for sample gas and is used for the sample gas outlet 104 that sample gas is discharged.When sample gas entered sample gas absorption cell 103 from sample gas entrance 102, infrared beam passed the sample gas that enters in the sample gas absorption cell 103.Sample gas is discharged sample gas absorption cell 103 by sample gas outlet 104.Infrared beam 101 is incident on first paraboloidal mirror 105 after passing sample gas in the sample gas absorption cell 103.Enter interferometer 109 by first paraboloidal mirror, 105 focussing forces then.The composition structure of interferometer 109 is present industry common type, no longer adds to describe at this.Infrared beam generates interference light signal by interferometer 109.The interference light signal that generates is incident on the plane mirror 108, and the reflection through plane mirror 108 is radiated on second parabolic lens 107.Focussing force through second parabolic lens 107 enters photodetector.Photodetector is changed the beam signal that enters, and forms voltage signal.The voltage signal that obtains is controlled the capture card of circuit 110 and is gathered, and the voltage signal that 111 pairs of capture cards of control computing machine collect carries out Fourier transform.By Fourier transform, optical interference is converted to can be at the spectrogram of absorption spectrum display terminal 112 demonstrations.Utilize the spectrogram that shows on the absorption spectrum display terminal 112, can inversion solution calculate the concentration information of the sample gas that enters sample gas absorption cell 103, thereby can obtain the concentration information of gas to be measured.
When gas concentration to be measured has exceeded the detection lower limit of the gas concentration signal that can measure, then the concentration information of gas to be measured can't be measured exactly.In order to enlarge the detection lower limit of the gas concentration signal that can measure, the present invention has realized the light path increase by the sample gas absorption cell is improved, thereby has improved the detection lower limit of concentration information, has strengthened the sensitivity that concentration signal detects.The sample gas absorption cell arranges for sealing, can avoid steam to disturb.According to one embodiment of present invention, referring to accompanying drawing 2, the sample gas absorption cell comprises seal chamber 8, and sample gas entrance 6 and sample gas outlet 7 are separately positioned on seal chamber 8 tops, is respectively applied to sample gas and enters seal chamber 8 and sample gas discharge seal chamber 8.The entrance window mouth mirror is contained in first side of seal chamber 8, according to one embodiment of the invention, entrance window mouth mirror 4 is installed on the seal chamber 8 by the first window gland 3, and gland screw 2 is tightened the first window gland 3, and entrance window mouth mirror 4 is pressed on the first window gland 3.The one O type circle 5 is arranged between entrance window mouth mirror 4 and the first window gland 3, can strengthen the sealing effect.Be understandable that entrance window mouth mirror 4 also can be installed on the seal chamber 8 by alternate manner.Principal reflection mirror 9 is installed on the seal chamber 8 the first side second side surface opposite with entrance window mouth mirror 4 places.Secondary mirror 21 is installed on first side of seal chamber 8, is positioned at the below of entrance window mouth mirror 4.Exit window mouth mirror 11 is installed on the seal chamber 8 second side with principal reflection mirror 9 same side, and is positioned at the below of principal reflection mirror 9.According to one embodiment of present invention, exit window mouth mirror 11 is installed on the seal chamber 8 by the second window gland 12.The 2nd O type circle 10 is arranged between exit window mouth mirror 11 and the second window gland 12, can strengthen the sealing effect.Be understandable that exit window mouth mirror 11 also can be installed on the seal chamber 8 by alternate manner.Fine motion adjustment mirror 18 is installed in first side with entrance window mouth mirror 4 and secondary mirror 21 same side, is positioned at the below of secondary mirror 21.
According to one embodiment of present invention, sample gas absorption cell 103 also comprises fine motion adjustment mirror 18.Described fine motion is adjusted mirror and is arranged on first side of seal chamber 8, is in same side with entrance window mouth mirror 4 and secondary mirror 21, and is positioned at the below of secondary mirror 21.As shown in Figure 2, fine motion adjustment mirror 18 is installed on the bearing 17, and index glass trim ring 19 is arranged on fine motion and adjusts between mirror 18 and the bearing 17, increases sealing and tight effect.Index glass is adjusted bolt 16 and is cooperated index glass gland 20, and bearing 17 and fine motion adjustment mirror 18 are installed on first side of seal chamber 8.
The both sides arranged outside of seal chamber 8 first fixed orifice 14 and second fixed orifice 15, can utilize bolt etc. that the sample gas absorption cell is fixedly mounted.
The plating of surface, the inside of seal chamber 8 scribbles low-refraction, inside plating that adsorption coefficient is little is coated with material 22, according to one embodiment of present invention, it is the Teflon material that described inner plating is coated with material, inner plating is coated with material 22 makes the light beam of getting to the seal chamber internal side wall no longer be coupled to main beam, and sample gas is not adsorbed.
Incident beam 1 enters sample gas absorption cell 103 by entrance window mouth mirror 4, directive principal reflection mirror 9.Through the reflection of principal reflection mirror 9, light beam is penetrated on secondary mirror 21.Through the reflection of secondary mirror 21, light beam is penetrated again on principal reflection mirror 9.Through the reflection second time of principal reflection mirror 9, light beam is penetrated in fine motion and is adjusted on the mirror 18.Through the reflection of fine motion adjustment mirror 18, light beam penetrates from sample gas absorption cell 103 by exit window mouth mirror 11, forms irradiating light beam 13.By the reflection of fine motion adjustment mirror 18, outgoing beam 13 and incident beam 1 relative keeping parallelism.
Adjust eyeglass by in the seal chamber of sample gas absorption cell, increasing optics, according to one embodiment of present invention, comprise principal reflection mirror 9, secondary mirror 21 and fine motion adjustment mirror 18, the travel path of light beam in sample gas absorption cell 103 produced variation, reach the purpose that increases optical path length, can improve the detection lower limit of Fourier infrared spectrograph concentration signal.
According to one embodiment of present invention, incident beam 1 is parallel with outgoing beam 13, and incident beam 1 is parallel with respect to the bottom surface of the seal chamber 8 of sample gas absorption cell 103 with outgoing beam 13.As shown in Figure 2, entrance window mouth mirror 4 is angled with the bottom surface of exit window mouth mirror 11 relative seal chamber bodies.First side of seal chamber 8 and second side also can be angled with the bottom surface.Because incident beam 1 is parallel with respect to the bottom surface of seal chamber 8 with outgoing beam 13, and entrance window mouth mirror 4 is angled with the bottom surface of exit window mouth mirror 11 relative seal chamber bodies, make incident beam 1 and outgoing beam 13 relative entrance window mouth mirrors 4 and exit window mouth mirror 11 out of plumb, just realize out of plumb incident, outgoing, avoid minute surface to reflect to form interference fringe and disturb.Principal reflection mirror 9 and secondary mirror 21 are angled with seal chamber 8, and it is also angled with seal chamber 8 that mirror 18 is adjusted in fine motion, can keep incident beam 1 parallel with outgoing beam 13 like this, incident beam 1 and outgoing beam 13 are respectively from first side and second side of seal chamber 8, just sample gas absorption cell 103 two ends, incident sample gas absorption cell 103 and outgoing sample gas absorption cell 103.Index glass adjustment bolt 16 can be transferred pine or tighten, and can fine adjust the position that mirror 18 is adjusted in fine motion with this, makes outgoing beam parallel with respect to the bottom surface of the seal chamber 8 of sample gas absorption cell 103, can avoid vertical outgoing.
According to preamble, sample gas enters the sample gas absorption cell by sample gas entrance, and leaves the absorption of sample pond from the outlet of sample gas.The infrared beam light source passes the sample gas absorption cell, enters interferometer, and generates interference light signal in interferometer.Interference light signal becomes voltage signal after the photodetector conversion is gathered by capture card, and the control computing machine is converted to spectrogram by Fourier transform with interferogram, and inversion solution is calculated the concentration information of gas to be measured.Here, the sample gas absorption cell can increase optical path length, thereby can be described as extended range model sample gas absorption cell.
Extended range model sample gas absorption cell of the present invention is according to Beer – Lambert law, i.e. the concentration of target components and the long-pending peak absorbance area ratio that equals of optical path length.Usually, the absorption of sample gas cell of Fourier infrared spectrograph adopts direct-injection type to penetrate, and namely light path is not done any conversion, directly passes gas cell.Absorption of sample gas cell of the present invention is adjusted eyeglass by increase optics in sealing gas cell cavity body as shown in Figure 2, changes propagation path, reaching the purpose that increases optical path length L, and then improves the sensitivity that signal concentration detects.
According to one embodiment of present invention, disturb for avoiding steam, Fourier infrared spectrograph adopts sealed construction design, the theory of constitution synoptic diagram of Fig. 1 Fourier infrared spectrograph.When adopting Fourier infrared spectrograph of the present invention to work, at first the infrared beam of infrared light supply emission is through after collimating, pass the sample gas absorption cell, after focusing on, paraboloidal mirror converges in the interferometric cavity, interference light is assembled the laggard photodetector of going into through paraboloidal mirror again, undertaken entering capture card after the opto-electronic conversion by photodetector, the interferogram that collects is sent to control and anacom.Computing machine is converted to spectrum by Fourier transform with interferogram, obtains the absorption spectrum of whole sample absorption cell thus, calculates the concentration information that sample gas also is gas to be measured by retrieving concentration.
Test findings and analysis:
Extended range model sample gas absorption cell of the present invention is applied to same Fourier infrared spectrograph with improving preceding sample gas absorption cell, utilizes 15 kinds of gases to compare test.Test findings can be referring to table 1.Test findings shows: extended range model sample gas absorption cell improves about 5 times with the detection lower limit of Fourier infrared spectrograph.
Table 1 journey type sample gas absorption cell and the preceding absorption cell contrast test result of improvement
。
Claims (10)
1. a sample gas absorption cell that is used for the Fourier infrared spectrum pick-up unit is characterized in that, optics is set in the sample gas absorption cell adjusts eyeglass, can increase light path, and the concentration signal that improves the Fourier infrared spectrum device detects lower limit.
2. sample gas absorption cell according to claim 1 is characterized in that, described optics is adjusted eyeglass and comprised the principal reflection mirror that is arranged on sample gas absorption cell second side and the secondary mirror that is arranged on first side relative with principal reflection mirror.
3. sample gas absorption cell according to claim 1 is characterized in that, described optics is adjusted eyeglass and also comprised the fine motion adjustment mirror that is arranged on first side relative with principal reflection mirror, is positioned at the below of secondary mirror.
4. sample gas absorption cell according to claim 1, it is characterized in that, described sample gas absorption cell comprises the entrance window mouth mirror that is arranged on sample gas absorption cell first side and the exit window mouth mirror that is arranged on sample gas absorption cell second side relative with the entrance window mouth mirror, the entrance window mouth mirror is used for incident beam incident sample gas absorption cell, and the exit window mouth mirror is used for outgoing beam outgoing sample gas absorption cell.
5. sample gas absorption cell according to claim 1, it is characterized in that, incident beam is parallel with the bottom surface of sample gas absorption cell with outgoing beam, the bottom surface of entrance window mouth mirror and exit window mouth mirror and sample gas absorption cell is angled, and incident beam is avoided vertical incidence and vertical outgoing with outgoing beam.
6. sample gas absorption cell according to claim 5, it is characterized in that described optics adjustment eyeglass comprises principal reflection mirror, secondary mirror and fine motion adjustment mirror, the bottom surface of principal reflection mirror, secondary mirror and fine motion adjustment mirror and sample gas absorption cell is angled.
7. sample gas absorption cell according to claim 1 is characterized in that, the fine motion adjustment mirror that described optics is adjusted in the eyeglass can be adjusted by trace, makes outgoing beam and incident beam keeping parallelism.
8. sample gas absorption cell according to claim 1 is characterized in that, the plating of surface, the inside of the seal chamber of described sample gas absorption cell scribbles low-refraction, inside plating that adsorption coefficient is little is coated with material.
9. sample gas absorption cell according to claim 8 is characterized in that, it is the Teflon material that described inner plating is coated with material.
10. Fourier infrared spectrum pick-up unit, comprise the sample gas absorption cell that absorbs sample gas, the light beam that passes the sample gas in the sample gas absorption cell is produced the interferometer of interference light signal, interference light signal is transformed into the photoconductive detector of voltage signal, voltage signal is carried out Fourier transform interferogram is converted to the control computing machine of spectrogram, control computing machine inversion solution is calculated the concentration information of sample gas, optics is set in the described sample gas absorption cell adjusts eyeglass, can increase light path.
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Cited By (10)
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| CN106018276A (en) * | 2016-06-30 | 2016-10-12 | 杭州泽天科技有限公司 | Optical absorption cell |
| CN106596468A (en) * | 2017-01-23 | 2017-04-26 | 章欣 | Optical gas absorption tank and optical gas sensor |
| CN106770026A (en) * | 2017-01-23 | 2017-05-31 | 章欣 | Optical gas absorbance pond and optical gas sensor |
| CN107389622A (en) * | 2017-06-28 | 2017-11-24 | 广东省特种设备检测研究院茂名检测院 | A kind of optics cavity for being used to measure natural gas transmitted spectrum |
| CN107870148A (en) * | 2017-10-13 | 2018-04-03 | 中国科学院上海光学精密机械研究所 | A kind of space environment compact long light path high sealed gas absorption cell |
| CN108844918A (en) * | 2018-06-08 | 2018-11-20 | 哈尔滨工程大学 | A kind of TDLAS measurement gas cell device for simulating internal combustion engine situation |
| CN109470643A (en) * | 2018-11-21 | 2019-03-15 | 中国科学院上海技术物理研究所 | A kind of infrared spectroscopy scaler based on gas sorption features spectrum |
| CN111837025A (en) * | 2018-03-12 | 2020-10-27 | 关东电化工业株式会社 | Gas analysis method and apparatus |
| CN112229811A (en) * | 2019-06-27 | 2021-01-15 | 盖斯麦科技有限公司 | Back-to-back spectrometer arrangement structure |
| CN113390812A (en) * | 2021-06-01 | 2021-09-14 | 天津同阳科技发展有限公司 | Fourier transform infrared spectrometer and gas concentration detection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106770026A (en) * | 2017-01-23 | 2017-05-31 | 章欣 | Optical gas absorbance pond and optical gas sensor |
| CN107389622A (en) * | 2017-06-28 | 2017-11-24 | 广东省特种设备检测研究院茂名检测院 | A kind of optics cavity for being used to measure natural gas transmitted spectrum |
| CN107870148A (en) * | 2017-10-13 | 2018-04-03 | 中国科学院上海光学精密机械研究所 | A kind of space environment compact long light path high sealed gas absorption cell |
| CN111837025A (en) * | 2018-03-12 | 2020-10-27 | 关东电化工业株式会社 | Gas analysis method and apparatus |
| CN108844918A (en) * | 2018-06-08 | 2018-11-20 | 哈尔滨工程大学 | A kind of TDLAS measurement gas cell device for simulating internal combustion engine situation |
| CN109470643A (en) * | 2018-11-21 | 2019-03-15 | 中国科学院上海技术物理研究所 | A kind of infrared spectroscopy scaler based on gas sorption features spectrum |
| CN112229811A (en) * | 2019-06-27 | 2021-01-15 | 盖斯麦科技有限公司 | Back-to-back spectrometer arrangement structure |
| CN113390812A (en) * | 2021-06-01 | 2021-09-14 | 天津同阳科技发展有限公司 | Fourier transform infrared spectrometer and gas concentration detection method |
| CN113390812B (en) * | 2021-06-01 | 2022-07-12 | 天津同阳科技发展有限公司 | Fourier transform infrared spectrometer and gas concentration detection method |
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